Driving device, positioning device, processing device, and device manufacturing method

Abstract

This driving device comprises a first drive shaft and two second drive shafts 200 provided to the two end portions of the first drive shaft. The second drive shafts 200 are each provided with a Y guide 210, a Y slider 150 capable of moving along the Y guide 210, and a gas floating part for floating the Y slider 150 off from the Y guide 210 by means of gas. In one of the second drive shafts 200, a first hydrostatic bearing is formed that restrains the Y slider 150 with respect to the Y guide 210 in an X-axis direction by means of gas. In the other second drive shaft 200, a second hydrostatic bearing is formed that restrains the Y slider 150 with respect to the Y guide 210 only in a Z-axis direction by means of gas.

Description

Drive device, positioning device, processing device, device manufacturing method 【0001】 The present disclosure relates to a drive device and the like. 【0002】 Patent Document 1 discloses that in a drive device or actuator used in a vacuum environment, a linear motor is installed outside a vacuum vessel. This linear motor linearly drives a slider along a guide extending in the moving direction. The slider can float from the guide and move smoothly by a hydrostatic bearing formed by compressed air supplied between the slider and the guide. 【0003】 Japanese Patent Application Laid-Open No. 2004-349289 【0004】 In Patent Document 1, by installing the heat-generating linear motor outside the vacuum vessel, deterioration of the vacuum due to heat can be prevented. However, it has an unconventional structure in which the slider inside the vacuum vessel is driven by the linear motor outside the vacuum vessel, which may lead to complication of the structure and increase in cost. 【0005】 The present disclosure has been made in view of such a situation, and an object thereof is to provide a drive device and the like that can effectively absorb the influence of heat accompanying driving. 【0006】 In order to solve the above problems, a drive device according to an aspect of the present disclosure includes a first drive shaft that drives a driven body in a first direction, and two second drive shafts provided at both ends of the first drive shaft, each of which drives the driven body and the first drive shaft in a second direction intersecting the first direction. Each second drive shaft includes a guide extending in the second direction, a slider connected to each end of the first drive shaft and movable along the guide, and a gas floating portion that floats the slider from the guide by gas. On one side of the second drive shaft, a first hydrostatic bearing that restrains the slider with respect to the guide is formed by the gas supplied by the gas floating portion at least in the first direction. On the other side of the second drive shaft, a second hydrostatic bearing that restrains the slider with respect to the guide is formed by the gas supplied by the gas floating portion only in a third direction intersecting the first direction and the second direction. 【0007】In this embodiment, a first hydrostatic bearing formed on one side of the second drive shaft restrains the slider against the guide in a first direction, while a second hydrostatic bearing formed on the other side of the second drive shaft restrains the slider against the guide only in a third direction intersecting the first and second directions. Here, even if the first drive shaft elongates in the first direction due to the heat generated during driving, the slider on the other side of the second drive shaft, which is restrained only in the third direction, moves in the first direction, thereby effectively absorbing the elongation of the first drive shaft. 【0008】 Another aspect of the present disclosure is a positioning device, which positions a driven object using the above-described drive device. 【0009】 Another aspect of the present disclosure is a processing apparatus. This apparatus performs a predetermined process on an object to be processed, which is positioned on a driven body positioned by the positioning device described above. 【0010】 Another aspect of this disclosure is a device manufacturing method, which manufactures a device through processing by the processing apparatus described above. 【0011】 Furthermore, any combination of the above components, as well as any representations thereof converted into methods, apparatus, systems, recording media, computer programs, etc., are also included in this disclosure. 【0012】 According to this disclosure, the effects of heat generated during operation can be effectively absorbed. 【0013】 This is a schematic perspective view of the stage device. This is a schematic perspective view showing the details of the first linear motor. This is a schematic cross-sectional view showing the first gas buoyancy section that smooths the X-axis drive of the X slider by the first drive shaft using buoyancy gas. This is a schematic cross-sectional view showing the second gas buoyancy section that smooths the Y-axis drive of the Y slider by the second drive shaft using buoyancy gas. This is a schematic cross-sectional view of the ZX section including the two second drive shafts. This is a ZX cross-sectional view showing a schematic configuration example of the Y1 axis. This is a ZX cross-sectional view showing a schematic configuration example of the Y2 axis. 【0014】The following describes in detail the forms for implementing this disclosure (hereinafter also referred to as embodiments) with reference to the drawings. In the description and / or drawings, identical or equivalent components, members, processes, etc., are denoted by the same reference numerals, and redundant descriptions are omitted. The scale and shape of the illustrated parts are set for convenience to simplify the description and are not to be interpreted restrictively unless otherwise specified. The embodiments are illustrative and do not limit the scope of this disclosure in any way. Not all features or combinations thereof presented in the embodiments are necessarily essential to this disclosure. For convenience, embodiments are presented by breaking them down into components for each function and / or group of functions that realize them. However, one component in an embodiment may actually be realized by a combination of multiple components as separate entities, and multiple components in an embodiment may actually be realized by a single component as a whole. Furthermore, multiple embodiments and modifications may be disclosed in parallel, and any components of each embodiment and / or modification may be combined in any manner as long as they do not interfere with each other's functions. 【0015】 Figure 1 is a schematic perspective view showing a stage device 1 as a drive device or positioning device according to an embodiment of the present disclosure. In this embodiment, for convenience, a three-dimensional coordinate system or XYZ coordinate system formed by mutually orthogonal X, Y, and Z axes is set. The X-axis direction is the first direction as the driving direction in which the first drive shaft 100, described later, drives the stage 2 or table as the driven object. The Y-axis direction is the second direction as the driving direction in which the second drive shaft 200, described later, drives the stage 2 and the first drive shaft 100 integrally. The Z-axis direction is the third direction as the normal direction of the drive plane or XY plane formed by the X and Y axes. The XY plane is preferably a horizontal plane, in which case the Z-axis direction is vertical. Note that the X, Y, and Z axes do not have to be orthogonal to each other, but at least they should intersect each other. In other words, the X-axis direction, Y-axis direction, and Z-axis direction may be different from each other. 【0016】The stage device 1 includes a first drive shaft 100 that drives the stage 2 in the X-axis direction by magnetism, and a second drive shaft 200 that drives the stage 2 and the first drive shaft 100 together in the Y-axis direction by magnetism. In this embodiment, a pair (i.e., two) second drive shafts 200 are provided at both ends of the first drive shaft 100 that extends in the X-axis direction. Since many of the components of the two second drive shafts 200 are common, unless otherwise specified, the two second drive shafts 200 will not be distinguished and will be described together below. The differences between the two second drive shafts 200 will be described later. 【0017】 One first drive shaft 100 and two second drive shafts 200 form a substantially H shape when viewed in the Z-axis direction or from above. The two second drive shafts 200 are fixedly mounted on the surface of a base plate 3 having an XY plane or horizontal plane. One first drive shaft 100 is in a non-contact state, separated from the surface of the base plate 3 in the Z-axis direction, so that it can move in the Y-axis direction on the base plate 3 through the two second drive shafts 200. The base plate 3 is further fixedly mounted on the surface of a base 4 having an XY plane or horizontal plane. 【0018】 Any object (not shown) is placed on the surface of the stage 2 that constitutes the driven body. Here, in this embodiment, "surface" or "top surface" refers to the +Z side surface (top surface in Figure 1), and in this embodiment, "back surface" or "bottom surface" refers to the -Z side surface (bottom surface in Figure 1). Furthermore, with respect to the first drive shaft 100 whose driving direction is in the X-axis direction, the ±Y side surface is referred to as the "side surface," and the ±X side surface is referred to as the "front surface" or "rear surface." Similarly, with respect to the second drive shaft 200 whose driving direction is in the Y-axis direction, the ±X side surface is referred to as the "side surface," and the ±Y side surface is referred to as the "front surface" or "rear surface." 【0019】Any object to be processed, such as a semiconductor wafer, or a workpiece may be placed on the surface or top surface of Stage 2. In this case, Stage 1 constitutes a positioning device for positioning the object to be processed placed on Stage 2 as a driven object, and further constitutes a part of a processing apparatus that performs any processing on the object to be processed positioned by the positioning device. Examples of processing apparatuses include semiconductor manufacturing equipment such as exposure apparatuses, ion implantation apparatuses, heat processing apparatuses, ashing apparatuses, sputtering apparatuses, dicing apparatuses, inspection apparatuses, and cleaning apparatuses, as well as FPD (Flat Panel Display) manufacturing apparatuses. 【0020】 The first drive shaft 100, which drives the stage 2 as the driven body in the X-axis direction, is equipped with an X-guide 110 that extends linearly along the X-axis direction. The X-guide 110 constitutes the main body of the first drive shaft 100. An X-slider 21 is provided on the X-guide 110 that is movable or slideable linearly along the X-axis direction (a predetermined driving direction) while being guided by the X-guide 110. The surface of the X-slider 21 (the +Z side) is connected to the back surface (the -Z side) of the stage 2, and together they constitute the driven body. Therefore, the stage 2 can move in the X-axis direction while being guided by the X-guide 110, together with the X-slider 21. As will be described later, a buoyant gas such as compressed air is supplied between the inner circumferential surface of the X-slider 21 which constitutes the driven body and the outer circumferential surface of the X-guide 110 which constitutes the first drive shaft 100, so that the X-slider 21 floats away from the X-guide 110 and can move smoothly with substantially no contact. 【0021】To drive the driven body, which is composed of the stage 2 and the X slider 21, along the X-axis direction, a first linear motor 120 is configured as a drive unit between the driven body and the first drive shaft 100. The first linear motor 120 applies a driving force to the X slider 21 along the X-axis direction (driving direction). In this embodiment, a pair (i.e., two) substantially identical first linear motors 120 are provided on both sides in the Y-axis direction of the X slider 21 (and the X guide 110 as the body of the first drive shaft 100), which is the driven body. Furthermore, each first linear motor 120 is provided on the X slider 21 on the back side of the driven body, which is composed of the stage 2 and the X slider 21. In this way, by providing each first linear motor 120 on the X slider 21 on the back side, away from the front side stage 2, it is possible to reduce the adverse effects that magnetic leakage from each first linear motor 120 may have on the processing of semiconductor wafers and the like on the stage 2 (for example, irradiation with an electron beam that is susceptible to magnetic fields). 【0022】 Generally, a linear motor comprises a coil section composed of multiple coils that generate a magnetic field when an electric current is passed through them from an external source, and a magnet section composed of multiple magnets that interact with the magnetic field generated by the coil section. The first linear motor 120 according to this embodiment also comprises a first coil section 130 as the coil section and a first magnet section 140 as the magnet section. In order to configure the first linear motor 120 to drive the X slider 21 (and stage 2) as the driven object along the X axis direction, one of the first coil section 130 and the first magnet section 140 can be provided on the X slider 21, and the other on the first drive shaft 100. 【0023】In the first linear motor 120, it is preferable that the first coil section 130 is provided on the X slider 21 and the first magnet section 140 is provided on the first drive shaft 100. As shown in the figure, the first magnet section 140 may be attached to a columnar beam section 160 that spans between a pair of Y sliders 150 (described later), which are also part of the first drive shaft 100. Although their arrangement is arbitrary, for example, in a view along the Z axis, the X slider 21, the first magnet section 140 (or the first coil section 130), and the beam section 160 are arranged in that order from the central X slider 21 outward along the Y axis. Furthermore, the long first magnet section 140 and beam section 160, respectively, are arranged substantially parallel to each other on both sides in the Y axis direction of the X guide 110, which is also long along the X axis. However, the first magnet section 140 and the beam section 160 are not in contact with the X guide 110, and the X slider 21 is able to move through the gap between them. 【0024】 The first coil section 130 is driven integrally with the X slider 21 in the X-axis direction by magnetic interaction with the first magnet section 140. Because the first coil section 130 moves in this way, the first linear motor 120 is a so-called moving coil type linear motor. In this case, since the first magnet section 140 is stationary in the X-axis direction (however, it moves in the Y-axis direction by the second drive shaft 200), there is an advantage that there is little fluctuation in magnetism leaking outside the first linear motor 120. This is particularly preferable when the processing of semiconductor wafers and the like on the stage 2 is susceptible to magnetic influences. 【0025】 In such a moving coil type first linear motor 120, the length of the first coil section 130 in the X-axis direction is shorter than the length of the first magnet section 140 in the X-axis direction. For example, it is preferable that the length of the first coil section 130 in the X-axis direction is less than or equal to the length of the X slider 21 and / or stage 2 in the X-axis direction. Also, it is preferable that the length of the first magnet section 140 in the X-axis direction is long enough to cover the range of motion of the X slider 21 in the X-axis direction. As will be described later, the relatively short first coil section 130 can move integrally with the X slider 21 and stage 2, which are driven bodies, in the X-axis direction within the installation range of the relatively long first magnet section 140. 【0026】 On the other hand, if the processing of semiconductor wafers and the like on stage 2 is not easily affected by magnetism, the first linear motor 120 may be configured as a so-called moving magnet type. Specifically, the first coil section 130 is provided on the first drive shaft 100 (for example, the beam section 160), and the first magnet section 140 is provided on the X slider 21 (not shown). In this case, the first coil section 130, which generates heat due to the current flowing through it, is isolated from the driven body integrated with stage 2 or the X slider 21, so that heat transfer to stage 2 and / or the workpiece such as semiconductor wafers can be effectively suppressed. This is particularly preferable when the workpiece such as semiconductor wafers is susceptible to heat. 【0027】 In such a moving magnet type first linear motor 120, the length of the first coil section 130 in the X-axis direction is greater than the length of the first magnet section 140 in the X-axis direction. For example, it is preferable that the length of the first coil section 130 in the X-axis direction is long enough to cover the range of motion of the X slider 21 in the X-axis direction. Also, it is preferable that the length of the first magnet section 140 in the X-axis direction is less than or equal to the length of the X slider 21 and / or stage 2 in the X-axis direction. The relatively short first magnet section 140 can move integrally with the X slider 21 and stage 2, which are driven bodies, in the X-axis direction within the installation range of the relatively long first coil section 130. 【0028】 By providing the pair of first linear motors 120 described above on both sides of the X-slider 21 and stage 2 in the Y-axis direction, the driven body can be stably driven in the X-axis direction while effectively suppressing undesirable rotations such as yawing (rotation around the Z-axis). 【0029】 Figure 2 is a schematic perspective view showing the details of the first linear motor 120. This figure shows the first linear motor 120 in Figure 1 viewed from the back side (-Z side). 【0030】The first coil section 130 comprises a holder 131 and a coil 132 held by the holder 131. Although detailed illustrations are omitted, the coil 132 is, for example, a general three-phase coil. Specifically, U-phase coils, V-phase coils, and W-phase coils (not shown) are arranged periodically along the X-axis direction, which is the driving direction. The current flowing through each phase coil 132 (e.g., U-phase current, V-phase current, W-phase current) may be supplied via the holder 131. The coil 132 is provided so as to protrude from the holder 131 on the back side toward the front side (+Z side). Such a coil 132 or group of coils is preferably formed as a flat plate shape with the Y-axis direction as the normal direction. The holder 131 is fixedly attached to the side surface, preferably on the back side, of the X-slider 21, which is the driven body. For this reason, the first coil section 130 is movable integrally with the X-slider 21 in the X-axis direction. 【0031】 The first magnetic section 140 comprises a substantially rectangular parallelepiped housing 141 and magnets 142 arranged on the inner circumferential surface of the housing 141. The housing 141 is made of a magnetic shielding material or soft magnetic material such as carbon steel or permalloy. A long opening 143 extending in the X-axis direction over substantially its entire length is formed on the back surface of the housing 141 (the surface of the housing 141 is closed by a magnetic shielding material or the like). Although not explicitly shown, a magnetic shielding portion may be provided on the edge of the opening 143 or on the side surface of the housing 141. The aforementioned flat plate-shaped coil 132 is inserted into the substantially rectangular parallelepiped space inside the housing 141 formed by this opening 143. Furthermore, magnets 142, such as permanent magnets with periodically changed magnetic poles, are arranged along the X-axis direction on the inner circumferential surface of the housing 141, which is the side wall surface of the space. 【0032】Thus, in the roughly rectangular parallelepiped space within the housing 141, the coil 132 or coil group in the first coil section 130 and the magnet 142 or magnet group in the first magnet section 140 face each other in the Y-axis direction. When three-phase alternating current flows through the coil 132, which functions as an electromagnet, it magnetically interacts with the magnet 142, generating a thrust or driving force that drives the coil 132, which acts as a movable element, in the X-axis direction. The flat coil 132 is driven along the X-axis direction within the roughly rectangular parallelepiped space within the housing 141. The X-slider 21 and stage 2, which are driven bodies to which the coil 132 or the first coil section 130 is fixed, are also driven integrally with the first coil section 130 in the X-axis direction while being guided by the X-guide 110. 【0033】 As described above, in the example of Figure 2, the coil 132 through which the current flows is provided so as to protrude from the holder 131 toward the surface side (+Z side), and the first magnet part 140 or magnet 142 that interacts with the magnetic field generated by the coil 132 is provided so as to cover the coil 132 from the surface side. In such a first linear motor 120, since the opening 143 through which the magnetism from the coil 132 and / or magnet 142 leaks is provided on the back side far from the stage 2, the adverse effects that this magnetism may have on the processing of semiconductor wafers and the like on the stage 2 can be reduced. 【0034】 In Figure 1, the second drive shaft 200, which integrally drives the stage 2 and X slider 21 as driven objects and the first drive shaft 100 in the Y-axis direction, is equipped with a Y guide 210 that extends linearly along the Y-axis direction. The Y guide 210 constitutes the main body of the second drive shaft 200. A Y slider 150 is provided on the Y guide 210, which is movable or slideable linearly along the Y-axis direction (a predetermined driving direction) while being guided by the Y guide 210. 【0035】The Y-slider 150 is both a part of the second drive shaft 200 and a part of the first drive shaft 100. Specifically, a pair (i.e., two) Y-sliders 150, which share many common components, are integrally provided at both ends in the X-axis direction of the X-guide 110, which serves as the main body of the first drive shaft 100. When the pair of second drive shafts 200 drive the pair of Y-sliders 150 in the Y-axis direction, the entire first drive shaft 100, which is integrally configured with the Y-sliders 150, and the driven objects, the stage 2 and the X-slider 21, are also driven integrally in the Y-axis direction. Thus, the objects driven by the second drive shaft 200 include the entire first drive shaft 100, which includes the Y-sliders 150, and the driven objects composed of the stage 2 and the X-slider 21. 【0036】 The stage 2, acting as the driven body, is movable in the Y-axis direction while being guided by the Y-guide 210, integrally with the Y-slider 150. As will be described later, a buoyant gas such as compressed air is supplied between the inner circumferential surface of the Y-slider 150, which constitutes the first drive shaft 100, and the outer circumferential surface of the Y-guide 210, which constitutes the second drive shaft 200. As a result, the Y-slider 150 floats away from the Y-guide 210 and can move smoothly with virtually no contact. 【0037】 To drive the drive target, including the stage 2 and the Y slider 150, along the Y-axis direction, a second linear motor 220 is configured as a drive unit between the drive target and the second drive shaft 200. The second linear motor 220 applies a driving force to the Y slider 150 along the Y-axis direction (driving direction). In this embodiment, a pair (i.e., two) substantially identical second linear motors 220 are provided on the outside of each Y guide 210 and each Y slider 150 in the X-axis direction. 【0038】 The second linear motor 220 comprises a second coil section 230 as a coil section and a second magnet section 240 as a magnet section. In order to configure the second linear motor 220 to drive the Y slider 150, which is the object to be driven, along the Y axis direction, one of the second coil section 230 and the second magnet section 240 can be attached to the Y slider 150, and the other can be attached to the second drive shaft 200. 【0039】In the second linear motor 220, it is preferable that the second coil section 230 is attached to the second drive shaft 200 and the second magnet section 240 is provided on the Y slider 150. As shown in the figure, the second coil section 230 may be fixedly installed on a base 4 adjacent to the second drive shaft 200. Since the base 4, the base plate 3, and the second drive shaft 200 are fixed to each other, regardless of which of them the second coil section 230 is provided on, it should be interpreted as being provided on the second drive shaft 200 in substance. The second coil section 230 (in particular the coil 232 described later) is not in contact with the Y guide 210 and the Y slider 150, and the second magnet section 240 (in particular the housing 241 described later) is movable in the Y direction through the gap between them. In this way, the second coil section 230 is provided at a position away from the Y guide 210, which is the main body of the second drive shaft 200, in the X direction. 【0040】 The second coil section 230 comprises a holder 231 installed on the base 4 and a coil 232 held by the holder 231. Although detailed illustrations are omitted, the coil 232 is, for example, a general three-phase coil. Specifically, U-phase coils, V-phase coils, and W-phase coils (not shown) are arranged periodically along the Y-axis direction, which is the driving direction. The current flowing through each phase coil 232 (e.g., U-phase current, V-phase current, W-phase current) may be supplied via the holder 231. The coil 232 is provided so as to protrude from the holder 231 on the back side (-Z side) toward the front side (+Z side). It is preferable that such a coil 232 or coil group as a whole is formed in a flat plate shape with the X-axis direction as the normal direction. Also, in a view along the Z-axis direction, the entire second coil section 230 and / or the coil 232 extend along the Y-axis direction substantially parallel to the Y-guide 210. 【0041】 The second magnet section 240 comprises a substantially rectangular parallelepiped housing 241 and magnets (not shown) arranged on the inner circumferential surface of the housing 241. The housing 241 is fixedly attached to the side of the Y slider 150, which is the object to be driven, with the X-axis direction being the normal direction. Therefore, the second magnet section 240 is movable in the Y-axis direction integrally with the Y slider 150. 【0042】The housing 241 is made of, for example, a magnetic shielding material or a soft magnetic material such as carbon steel or permalloy. Inside the housing 241, a substantially rectangular parallelepiped space 243 that penetrates in the Y-axis direction and opens on the back surface is formed. The housing 241 is reverse U-shaped when viewed in the Y-axis direction. The flat coil 232 described above is inserted into the substantially rectangular parallelepiped space 243 in the housing 241. Further, on the inner peripheral surface of the housing 241, which is the side wall surface of the space 243, magnets (not shown) such as permanent magnets with periodically changed poles are arranged along the Y-axis direction. 【0043】 In this way, in the substantially rectangular parallelepiped space 243 in the housing 241, the coil 232 or the coil group in the second coil portion 230 and the magnet or magnet group (not shown) in the second magnet portion 240 face each other in the X-axis direction. Then, when a three-phase alternating current or the like flows through the coil 232, which functions as an electromagnet, and magnetically interacts with the magnet (not shown), a thrust or driving force is generated to drive the second magnet portion 240, which serves as a mover, in the Y-axis direction. The housing 241, which is reverse U-shaped when viewed in the Y-axis direction, is driven in the Y-axis direction along the flat coil 232 in a state where the flat coil 232 is sandwiched from above (a state where the coil 232 is included in the space 243 in the housing 241). The Y slider 150, which is the driving target to which the housing 241 of the second magnet portion 240 is fixed, is also driven integrally with the second magnet portion 240 in the Y-axis direction while being guided by the Y guide 210. 【0044】 As described above, in the example of FIG. 1, the coil 232 through which current flows is provided so as to protrude from the holder 231 toward the front surface side (+Z side), and the second magnet portion 240 that acts on the magnetic field generated by the coil 232 is provided so as to cover the coil 232 from the front surface side. In such a second linear motor 220, since the space 243 where magnetic flux leaks from the coil 232 and / or the second magnet portion 240 is provided on the back surface side far from the stage 2, the adverse effects that the magnetic flux may have on the processing of a semiconductor wafer or the like on the stage 2 can be reduced. 【0045】The second linear motor 220 in which the second magnet portion 240 moves as described above is a so-called moving magnet type linear motor. In this case, since the second coil portion 230 that generates heat due to the flowing current is isolated from the driven object integrated with the stage 2 or the Y slider 150 (further, in the illustrated example, the second coil portion 230 is also thermally isolated from the second drive shaft 200 via the base 4 and the surface plate 3), heat transfer to the stage 2 and / or the object to be processed such as a semiconductor wafer can be effectively suppressed. This is particularly preferable when the object to be processed such as a semiconductor wafer is easily affected by heat or when the stage 2 itself is easily deformed by heat. 【0046】 In such a moving magnet type second linear motor 220, the length of the second coil portion 230 in the Y-axis direction is larger than the length of the second magnet portion 240 in the Y-axis direction. For example, the length of the second coil portion 230 in the Y-axis direction is preferably a length that can cover the movable range of the Y slider 150 in the Y-axis direction. Also, the length of the second magnet portion 240 in the Y-axis direction is preferably equal to or less than the length of the Y slider 150 and / or the stage 2 in the Y-axis direction. The relatively short second magnet portion 240 can move integrally with the Y slider 150 as the driven object in the Y-axis direction within the installation range of the relatively long second coil portion 230. 【0047】 In the illustrated example, it is preferable that the first linear motor 120 is of the moving coil type in order to reduce the magnetic influence on the stage 2 and the like, and it is preferable that the second linear motor 220 is of the moving magnet type in order to reduce the thermal influence on the stage 2 and the like. Thus, in the stage device 1 according to the present embodiment, it is preferable that the first linear motor 120 and the second linear motor 220 are of different types. 【0048】On the other hand, in order to further reduce the influence of magnetism on stage 2, etc., the second linear motor 220 may be configured as a moving coil type. Specifically, the second coil section 230 is provided on the Y slider 150, and the second magnet section 240 is provided on the second drive shaft 200 (for example, the base 4) (not shown). In this case, since the second magnet section 240 is stationary, there is an advantage that there is little fluctuation in magnetism leaking outside the second linear motor 220. This is particularly preferable when the processing of semiconductor wafers, etc. on stage 2 is susceptible to magnetic influences. 【0049】 In such a moving coil type second linear motor 220, the length of the second coil section 230 in the Y-axis direction is smaller than the length of the second magnet section 240 in the Y-axis direction. For example, it is preferable that the length of the second coil section 230 in the Y-axis direction is less than or equal to the length of the Y slider 150 and / or stage 2 in the Y-axis direction. Also, it is preferable that the length of the second magnet section 240 in the Y-axis direction is long enough to cover the range of motion of the Y slider 150 in the Y-axis direction. The relatively short second coil section 230 can move integrally with the Y slider 150, which is the object to be driven, in the Y-axis direction within the installation range of the relatively long second magnet section 240. 【0050】 By providing the pair of second linear motors 220 described above on both sides of the first drive shaft 100 in the X-axis direction, the drive target can be stably driven in the Y-axis direction while effectively suppressing undesirable rotations such as yawing (rotation around the Z-axis). 【0051】 Next, we will describe the gas levitation section for facilitating the X-axis drive by the first drive shaft 100 and the Y-axis drive by the second drive shaft 200. 【0052】 Figure 3 is a schematic cross-sectional view of the first gas buoyancy section 10, which facilitates the X-axis drive of the X-slider 21 by the first drive shaft 100 using buoyancy gas. Specifically, the ZX cross-section at the center in the Y-axis direction of the X-guide 110, which is the main body of the first drive shaft 100, is schematically shown. The first gas buoyancy section 10 uses gas to levitate the X-slider 21, which is the driven object, away from the X-guide 110, which is the main body of the first drive shaft 100. 【0053】 An air pad 170, acting as a hydrostatic bearing, is formed between the outer circumferential surface of the X guide 110 and the inner circumferential surface of the X slider 21, so that the X slider 21 can move smoothly in the X-axis direction along the X guide 110. The air pad 170 is formed by a first flotation gas, such as compressed air, supplied through a first flotation pipe 127 located inside the X guide 110, which is the body of the first drive shaft 100, and constantly supplied between the outer circumferential surface of the X guide 110 and the inner circumferential surface of the X slider 21. The X slider 21, which is levitated from the X guide 110 by the air pad 170, can move smoothly with virtually no contact with the X guide 110. 【0054】 It is preferable that the multiple air pads 170 are positioned symmetrically so as to sandwich the center of the X-slider 21 in the X-axis direction and / or the Y-axis direction from both the positive and negative sides in the X-axis direction and / or the Y-axis direction. It is also preferable that the multiple air pads 170 are positioned symmetrically so as to sandwich the X-guide 110 from both the positive and negative sides in the Z-axis direction. Such symmetrical arrangement of the multiple air pads 170 in the X-axis direction, Y-axis direction, Z-axis direction, etc., effectively suppresses undesirable rotation of the X-slider 21. 【0055】 The first flotation tube 127 comprises a positive first flotation tube 127P and a negative first flotation tube 127N. In this embodiment, the positive first flotation tube 127P and the negative first flotation tube 127N, which are located inside the X guide 110, communicate with a flotation gas relay tube located inside the Y guide 210, as will be described later. However, the positive first flotation tube 127P and the negative first flotation tube 127N may also communicate with a flotation gas supply tube or pipe (not shown) that is directly attached to the X guide 110 and supplies flotation gas from the outside. Alternatively, the tubes that supply flotation gas to the air pad 170, such as the positive first flotation tube 127P and the negative first flotation tube 127N, may be located inside the X slider 21 instead of inside the X guide 110. In this case, a flotation gas supply pipe or tube (not shown) may be directly attached to the X slider 21 to supply flotation gas from the outside. 【0056】The positive first floating gas from a pump (not shown) is supplied to the positive air pad 170 in the X-axis direction via, for example, a positive floating gas relay pipe inside the positive Y-guide 210 and a positive first floating pipe 127P inside the X-guide 110. Similarly, the negative first floating gas from a pump (not shown) is supplied to the negative air pad 170 in the X-axis direction via, for example, a negative floating gas relay pipe inside the negative Y-guide 210 and a negative first floating pipe 127N inside the X-guide 110. 【0057】 Furthermore, the first floating gas may be supplied to both the positive and negative air pads 170 from either the positive or negative floating gas relay pipe and the first floating pipe 127. For example, the first floating gas from a pump (not shown) may be supplied to both the positive and negative air pads 170 via the positive floating gas relay pipe inside the positive Y guide 210 and the positive first floating pipe 127P inside the X guide 110. In this case, all or part of the negative floating gas relay pipe inside the negative Y guide 210 and at least part of the negative first floating pipe 127N on the negative side, where the first floating gas is not supplied, may not be provided. 【0058】 When the stage device 1 is used in a vacuum chamber where the interior is under vacuum, it is necessary to prevent the first floating gas, such as compressed air supplied to the air pad 170, from leaking into the vacuum chamber. Therefore, in this embodiment, exhaust grooves 172, 174, and 176 are provided on the inner surface of the X slider 21 as exhaust sections for discharging the first floating gas in the air pad 170 to the outside of the vacuum chamber housing the stage device 1. As shown in the figure, the exhaust grooves 172, 174, and 176 are positioned to sandwich the air pad 170 from both the positive and negative sides in the X-axis direction and / or the Y-axis direction. In other words, the exhaust grooves 172, 174, and 176 are provided on the inner surface of the X slider 21, outside the air pad 170. 【0059】The exhaust channels 172, 174, and 176 are arranged such that the pressure decreases sequentially from the inside or center outwards, that is, the vacuum level increases sequentially. For example, exhaust channel 172 is at atmospheric pressure, exhaust channel 174 is at low vacuum, and exhaust channel 176 is at medium vacuum. These exhaust channels 172, 174, and 176, which have different pressures or vacuum levels, are realized by a plurality of first exhaust pipes 129 (only one is shown in Figure 3 for convenience) provided inside the X guide 110, which is the main body of the first drive shaft 100. Specifically, by opening the first exhaust pipe 129, which communicates with the atmosphere or air at atmospheric pressure, at a position opposite the exhaust channel 172, the exhaust channel 172 becomes atmospheric pressure; by opening the first exhaust pipe 129, which is connected to a low vacuum pump (not shown), at a position opposite the exhaust channel 174, the exhaust channel 174 becomes low vacuum; and by opening the first exhaust pipe 129, which is connected to a medium vacuum pump (not shown), at a position opposite the exhaust channel 176, the exhaust channel 176 becomes medium vacuum. 【0060】 As described above, the multiple exhaust channels 172, 174, 176 and the multiple first exhaust pipes 129 allow the first floating gas in the air pad 170 to be sequentially exhausted to the outside of the vacuum chamber through atmospheric pressure (exhaust channel 172), low vacuum (exhaust channel 174), and medium vacuum (exhaust channel 176). This effectively prevents the first floating gas in the air pad 170 from leaking into the vacuum chamber. 【0061】 Thus, the stage apparatus 1 according to this embodiment can be used in a vacuum environment such as inside a vacuum chamber. Here, vacuum refers to a space filled with gas at a pressure lower than normal atmospheric pressure. Vacuum is classified into low vacuum (100 kPa to 100 Pa), medium vacuum (100 Pa to 0.1 Pa), and high vacuum (0.1 Pa to 10 Pa) depending on the pressure range. -5 Pa), ultra-high vacuum (10 -5 The vacuum environments are classified as follows (Pa or less). The stage device 1 according to this embodiment may be used in any of the above vacuum environments, or in a non-vacuum environment. The stage device 1 according to this embodiment is particularly suitable for use in low-pressure vacuum environments where a high degree of cleanliness is required. 【0062】The first exhaust pipe 129 comprises a positive first exhaust pipe 129P and a negative first exhaust pipe 129N. In this embodiment, the positive first exhaust pipe 129P and the negative first exhaust pipe 129N, which are located inside the X guide 110, are connected to an exhaust relay pipe located inside the Y guide 210, as will be described later. In this case, the first exhaust pipe 129 exhausts the first floating gas to the Y guide 210, which is the main body of the second drive shaft 200 in which the exhaust relay pipe is located. The exhaust relay pipe in the Y guide 210 is connected to, for example, the atmosphere, a low vacuum pump, and a medium vacuum pump, respectively, in order to achieve atmospheric pressure (exhaust channel 172), low vacuum (exhaust channel 174), and medium vacuum (exhaust channel 176), respectively. However, the positive first exhaust pipe 129P and the negative first exhaust pipe 129N may be connected to an exhaust pipe or tube (not shown) that is directly attached to the X guide 110 and supplies atmospheric pressure, low vacuum, medium vacuum, etc. from the outside. Alternatively, the pipes that supply atmospheric pressure, low vacuum, medium vacuum, etc., such as the positive first exhaust pipe 129P and the negative first exhaust pipe 129N, may be provided inside the X slider 21 instead of inside the X guide 110. In this case, an exhaust pipe or tube (not shown) that is directly attached to the X slider 21 and supplies atmospheric pressure, low vacuum, medium vacuum, etc., from the outside may be provided. 【0063】 The exhaust from exhaust channel 172 is discharged into the atmosphere via the first exhaust pipe 129 (129P and / or 129N) for atmospheric pressure inside the X guide 110 and the exhaust relay pipe for atmospheric pressure inside the Y guide 210. The exhaust from exhaust channel 174 is discharged via the first exhaust pipe 129 (129P and / or 129N) for low vacuum inside the X guide 110, the exhaust relay pipe for low vacuum inside the Y guide 210 and the low vacuum pump. The exhaust from exhaust channel 176 is discharged via the first exhaust pipe 129 (129P and / or 129N) for medium vacuum inside the X guide 110, the exhaust relay pipe for medium vacuum inside the Y guide 210 and the medium vacuum pump. 【0064】Furthermore, exhaust from both the positive and negative exhaust grooves 172, 174, and 176 may be performed through either the positive or negative first exhaust pipe 129 and the exhaust relay pipe. For example, exhaust from both the positive and negative exhaust grooves 172, 174, and 176 may be performed through the positive first exhaust pipe 129P inside the X guide 110 and the positive exhaust relay pipe inside the positive Y guide 210. In this case, at least a portion of the negative first exhaust pipe 129N and all or part of the negative exhaust relay pipe inside the negative Y guide 210 may not be provided on the negative side where exhaust is not performed. 【0065】 Figure 4 is a schematic cross-sectional view of the second gas buoyancy section 20, which facilitates the Y-axis drive of the Y-slider 150 by the second drive shaft 200 using buoyancy gas. Specifically, the YZ cross-section at the center in the X-axis direction of the Y-guide 210, which is the main body of the second drive shaft 200, is schematically shown. Components similar to those in the first gas buoyancy section 10 shown in Figure 3 are given the same reference numerals, and redundant explanations are omitted. The second gas buoyancy section 20 uses gas to levitate the Y-slider 150 (part of the first drive shaft 100), which is the object to be driven, away from the Y-guide 210, which is the main body of the second drive shaft 200. 【0066】 An air pad 170, acting as a hydrostatic bearing, is formed between the outer circumferential surface of the Y guide 210 and the inner circumferential surface of the Y slider 150, so that the Y slider 150 can move smoothly in the Y-axis direction along the Y guide 210. The air pad 170 is formed by a second flotation gas, such as compressed air, supplied through a second flotation pipe 137 located inside the Y guide 210, which is the body of the second drive shaft 200, and constantly supplied between the outer circumferential surface of the Y guide 210 and the inner circumferential surface of the Y slider 150. Alternatively, the pipe supplying the flotation gas to the air pad 170, such as the second flotation pipe 137, may be located inside the Y slider 150 instead of inside the Y guide 210. In this case, a flotation gas supply pipe or tube (not shown) may be directly attached to the outside of the Y slider 150 to supply the flotation gas from the outside. The Y-slider 150, which is lifted off the Y-guide 210 by the air pad 170, can move smoothly without virtually contacting the Y-guide 210. 【0067】Preferably, the multiple air pads 170 are positioned symmetrically to sandwich the center of the Y slider 150 in the Y-axis direction and / or the X-axis direction from both the positive and negative sides in the Y-axis direction and / or the X-axis direction. Furthermore, it is preferable that the multiple air pads 170 are positioned symmetrically to sandwich the Y guide 210 from both the positive and negative sides in the Z-axis direction. Such symmetrical arrangement of the multiple air pads 170 in the X-axis direction, Y-axis direction, Z-axis direction, etc., effectively suppresses undesirable rotation of the Y slider 150. 【0068】 The second flotation tube 137 comprises a positive second flotation tube 137P and a negative second flotation tube 137N. The positive second flotation tube 137P and the negative second flotation tube 137N are located inside the Y-guide 210. 【0069】 The positive second flotation gas from a pump (not shown) is supplied to the positive air pad 170 in the Y-axis direction via, for example, the positive second flotation pipe 137P inside the Y-guide 210. Similarly, the negative second flotation gas from a pump (not shown) is supplied to the negative air pad 170 in the Y-axis direction via, for example, the negative second flotation pipe 137N inside the Y-guide 210. 【0070】 Furthermore, the second flotation gas may be supplied to both the positive and negative air pads 170 from either the positive or negative second flotation pipe 137. For example, the second flotation gas from a pump (not shown) may be supplied to both the positive and negative air pads 170 via the positive second flotation pipe 137P inside the Y guide 210. In this case, at least a portion of the negative second flotation pipe 137N on the negative side, where the second flotation gas is not supplied, may be omitted. 【0071】As previously mentioned with respect to Figure 3, the first flotation pipe 127, which supplies the first flotation gas to the air pad 170 in the first gas flotation section 10, communicates with a flotation gas relay pipe 157 located inside the Y guide 210 in Figure 4. This flotation gas relay pipe 157 is connected to a pump (not shown) which is the source of the first flotation gas. The first flotation gas from the pump (not shown) is supplied to the air pad 170 in the first gas flotation section 10 via the flotation gas relay pipe 157 inside the Y guide 210 and the first flotation pipe 127 inside the X guide 110. In this way, inside the Y guide 210, which is the main body of the second drive shaft 200, the supply of the second flotation gas for the flotation of the Y slider 150 via the second flotation pipe 137 and the supply or relay of the first flotation gas for the flotation of the X slider 21 via the flotation gas relay pipe 157 are performed simultaneously. 【0072】 When the stage device 1 is used in a vacuum chamber where the interior is under vacuum, it is necessary to prevent the second floating gas, such as compressed air supplied to the air pad 170, from leaking into the vacuum chamber. Therefore, in this embodiment, exhaust grooves 172, 174, and 176 are provided on the inner surface of the Y slider 150 as exhaust sections for discharging the second floating gas in the air pad 170 to the outside of the vacuum chamber housing the stage device 1. As shown in the figure, the exhaust grooves 172, 174, and 176 are positioned to sandwich the air pad 170 from both the positive and negative sides in the Y-axis direction and / or the X-axis direction. In other words, the exhaust grooves 172, 174, and 176 are provided on the inner surface of the Y slider 150, outside the air pad 170. 【0073】The exhaust channels 172, 174, and 176 are arranged such that the pressure decreases sequentially from the inside or center outwards, that is, the vacuum level increases sequentially. For example, exhaust channel 172 is at atmospheric pressure, exhaust channel 174 is at low vacuum, and exhaust channel 176 is at medium vacuum. These exhaust channels 172, 174, and 176, which have different pressures or vacuum levels, are realized by a plurality of second exhaust pipes 139 (only one is shown in Figure 4 for convenience) provided inside the Y-guide 210, which is the main body of the second drive shaft 200. Specifically, by opening a second exhaust pipe 139, which communicates with the atmosphere or air at atmospheric pressure, at a position opposite the exhaust channel 172, the exhaust channel 172 becomes atmospheric pressure; by opening a second exhaust pipe 139, which is connected to a low vacuum pump (not shown), at a position opposite the exhaust channel 174, the exhaust channel 174 becomes a low vacuum; and by opening a second exhaust pipe 139, which is connected to a medium vacuum pump (not shown), at a position opposite the exhaust channel 176, the exhaust channel 176 becomes a medium vacuum. 【0074】 As described above, the multiple exhaust channels 172, 174, 176 and the multiple second exhaust pipes 139 allow the second floating gas in the air pad 170 to be sequentially exhausted to the outside of the vacuum chamber through atmospheric pressure (exhaust channel 172), low vacuum (exhaust channel 174), and medium vacuum (exhaust channel 176). This effectively prevents the second floating gas in the air pad 170 from leaking into the vacuum chamber. 【0075】 The second exhaust pipe 139 comprises a positive second exhaust pipe 139P and a negative second exhaust pipe 139N. The positive second exhaust pipe 139P and the negative second exhaust pipe 139N are located inside the Y-guide 210. These second exhaust pipes 139 are connected to, for example, the atmosphere, a low vacuum pump, and a medium vacuum pump, respectively, to achieve atmospheric pressure (exhaust channel 172), low vacuum (exhaust channel 174), and medium vacuum (exhaust channel 176). 【0076】The exhaust from exhaust channel 172 is discharged into the atmosphere via a second exhaust pipe 139 (139P and / or 139N) for atmospheric pressure inside the Y-guide 210. The exhaust from exhaust channel 174 is discharged via a second exhaust pipe 139 (139P and / or 139N) for low vacuum inside the Y-guide 210 and a low vacuum pump. The exhaust from exhaust channel 176 is discharged via a second exhaust pipe 139 (139P and / or 139N) for medium vacuum inside the Y-guide 210 and a medium vacuum pump. 【0077】 Furthermore, exhaust from both the positive and negative exhaust grooves 172, 174, and 176 may be performed through either the positive or negative second exhaust pipe 139. For example, exhaust from both the positive and negative exhaust grooves 172, 174, and 176 may be performed through the positive second exhaust pipe 139P inside the Y guide 210. In this case, at least a portion of the negative second exhaust pipe 139N on the negative side, where exhaust is not performed, may not be provided. 【0078】 As previously mentioned with respect to Figure 3, the first exhaust pipe 129, which exhausts the first floating gas from the exhaust channels 172, 174, and 176 in the first gas floating section 10, communicates with the exhaust relay pipe 159 provided inside the Y guide 210 in Figure 4. This exhaust relay pipe 159 is connected to, for example, the atmosphere, a low vacuum pump, and a medium vacuum pump in order to achieve atmospheric pressure (exhaust channel 172 in Figure 3), low vacuum (exhaust channel 174 in Figure 3), and medium vacuum (exhaust channel 176 in Figure 3), respectively. 【0079】Thus, the exhaust gas (first floating gas) from the exhaust channel 172 in the first gas floating section 10 is discharged into the atmosphere via the first exhaust pipe 129 (129P and / or 129N) for atmospheric pressure inside the X guide 110 and the exhaust relay pipe 159 for atmospheric pressure inside the Y guide 210. The exhaust gas (first floating gas) from the exhaust channel 174 in the first gas floating section 10 is discharged via the first exhaust pipe 129 (129P and / or 129N) for low vacuum inside the X guide 110, the exhaust relay pipe 159 for low vacuum inside the Y guide 210 and the low vacuum pump. The exhaust gas (first floating gas) from the exhaust channel 176 in the first gas floating section 10 is discharged via the first exhaust pipe 129 (129P and / or 129N) for medium vacuum inside the X guide 110, the exhaust relay pipe 159 for medium vacuum inside the Y guide 210 and the medium vacuum pump. 【0080】 As described above, inside the Y-guide 210, which is the main body of the second drive shaft 200, exhaust of the second gas buoyancy section 20 (atmospheric pressure / low vacuum / medium vacuum) through the second exhaust pipe 139 and exhaust of the first gas buoyancy section 10 (atmospheric pressure / low vacuum / medium vacuum) through the exhaust relay pipe 159 are performed simultaneously. In Figure 4, for convenience, the second exhaust pipe 139 and the exhaust relay pipe 159 are shown as separate components, but since the purpose of exhaust (atmospheric pressure / low vacuum / medium vacuum) is the same, the second exhaust pipe 139 and the exhaust relay pipe 159 may be configured as a single unit (the low vacuum pump and medium vacuum pump connected to the second exhaust pipe 139 and the exhaust relay pipe 159 can also be common). 【0081】 According to the embodiments described above, high responsiveness during operation can be achieved by the first drive shaft 100 and the second drive shaft 200, which drive the driven object such as the X slider 21 and the first drive shaft 100 by magnetism (first linear motor 120 and second linear motor 220), and high smoothness during operation can be achieved by the first gas levitation section 10 and the second gas levitation section 20, which levitate the driven object such as the X slider 21 and the first drive shaft 100 by gas. Since the first gas levitation section 10 and the second gas levitation section 20 are equipped with an exhaust mechanism for the levitating gas, the stage device 1 according to this embodiment can be used in a vacuum environment such as inside a vacuum chamber. 【0082】Next, the differences between the two second drive shafts 200 will be explained in detail. Figure 5 is a schematic cross-sectional view in the ZX section, including the two second drive shafts 200, each equipped with an X guide 110, a Y guide 210, and a Y slider 150. In the following explanation, the second drive shaft 200A on the left side (-X side) in Figure 5 will also be referred to as the Y1 axis (200A), and the second drive shaft 200B on the right side (+X side) in Figure 5 will also be referred to as the Y2 axis (200B). Furthermore, similar components common to the Y1 axis 200A and the Y2 axis 200B will be assigned the same numerical designations as previously mentioned, but the designations for the components of the Y1 axis 200A will have an "A" added to the end, and the designations for the components of the Y2 axis 200B will have a "B" added to the end. 【0083】 On the Y1 axis 200A (one of the second drive shafts 200), a first hydrostatic bearing is configured that restrains the Y slider 150A against the Y guide 210A at least in the X-axis direction (first direction) by the second buoyancy gas supplied by the aforementioned second gas buoyancy section 20. Specifically, a first hydrostatic bearing is configured that restrains the Y slider 150A against the Y guide 210A in the X-axis direction by at least one air pad 170A provided between the outer circumferential surface (side surface) of the Y guide 210A on the +X side and the inner circumferential surface (side surface) of the Y slider 150A on the -X side, and / or between the outer circumferential surface (side surface) of the Y guide 210A on the -X side and the inner circumferential surface (side surface) of the Y slider 150A on the +X side. In other words, in the Y1 axis 200A, at least one air pad 170A, which serves as the first hydrostatic bearing, is positioned on the inner (right side in Figure 5) and / or outer (left side in Figure 5) side of the Y guide 210A. 【0084】The first hydrostatic bearing, formed by the air pad 170A on the Y1 axis 200A, preferably restrains the Y slider 150A from the Y guide 210A not only in the X axis direction (first direction) but also in the Z axis direction (third direction) by the second buoyant gas supplied by the second gas buoyant portion 20 described above. Specifically, the first hydrostatic bearing is configured to restrain the Y slider 150A from the Y guide 210A in the Z axis direction by at least one air pad 170A provided between the outer circumferential surface (top surface) on the +Z side of the Y guide 210A and the inner circumferential surface (bottom surface) on the -Z side of the Y slider 150A, and / or between the outer circumferential surface (bottom surface) on the -Z side of the Y guide 210A and the inner circumferential surface (top surface) on the +Z side of the Y slider 150A. In other words, in the Y1 axis 200A, at least one air pad 170A, which serves as a first hydrostatic bearing, is positioned on the outer circumferential surface of the Y guide 210A on the +Z side (upper side in Figure 5) and / or the -Z side (lower side in Figure 5). 【0085】 As described above, in the Y1 axis 200A, air pads 170A, which serve as first hydrostatic bearings, are provided on the ±X and ±Z outer circumferential surfaces of the Y guide 210A. Therefore, the Y slider 150A is constrained to the Y guide 210A in two directions: the X-axis direction (first direction) and the Z-axis direction (third direction). 【0086】 On the Y2 axis 200B (the other of the second drive axis 200), a second hydrostatic bearing is configured that restrains the Y slider 150B from the Y guide 210B only in the Z axis direction (third direction) by the second buoyancy gas supplied by the second gas buoyancy section 20 mentioned above. Specifically, a second hydrostatic bearing is configured that restrains the Y slider 150B from the Y guide 210B in the Z axis direction by at least one air pad 170B provided between the outer circumferential surface (top surface) on the +Z side of the Y guide 210B and the inner circumferential surface (bottom surface) on the -Z side of the Y slider 150B, and / or between the outer circumferential surface (bottom surface) on the -Z side of the Y guide 210B and the inner circumferential surface (top surface) on the +Z side of the Y slider 150B. In other words, in the Y2 axis 200B, at least one air pad 170B, which serves as a second hydrostatic bearing, is positioned on the outer circumferential surface of the Y guide 210B on the +Z side (upper side in Figure 5) and / or the -Z side (lower side in Figure 5). 【0087】 On the other hand, in the Y2 axis 200B, unlike the Y1 axis 200A, the air pad 170B, which serves as a second hydrostatic bearing, is not provided on the outer circumferential surface of the Y guide 210B on the ±X side. Therefore, in the Y2 axis 200B, the Y slider 150B is constrained to the Y guide 210B in only one direction, the Z axis direction (third direction). In other words, in the X axis direction (first direction), the Y slider 150B is not constrained to the Y guide 210B, and a certain degree of freedom of movement or displacement exists. 【0088】 As schematically shown in Figure 5, in the Y2 axis 200B, there is a gap 178 between the Y guide 210B and the ±X side surfaces of the Y slider 150B that is significantly larger than the gap between the first and second hydrostatic bearings. The width of the minute gap (not visible in Figure 5; see Figures 3 and 4) to which the buoyant gas is supplied in the first and / or second hydrostatic bearings is significantly smaller than the width of the gap 178. 【0089】 As will be described later, the width of each gap 178 may vary due to thermal expansion of the X-guide 110, etc. In the above comparison, the width of the gap 178 is assumed to be measured when there is no expansion of the X-guide 110 (for example, when it is the length as per the design value). 【0090】 In this embodiment described above, the first hydrostatic bearing formed on the Y1 axis 200A in the X-axis direction (and Z-axis direction) restrains the Y slider 150A from the Y guide 210A in the X-axis direction, while the second hydrostatic bearing formed on the Y2 axis 200B in the Z-axis direction only restrains the Y slider 150B from the Y guide 210B in the Z-axis direction only. Here, even if the X guide 110 expands (or contracts) in the X-axis direction due to heat generated by driving by the first linear motor 120 (Figure 1), the Y slider 150B, which is restrained only in the Z-axis direction on the Y2 axis 200B, moves in the X-axis direction, thereby effectively absorbing the expansion of the X guide 110. Here, the gap 178 can be interpreted as defining the range of motion or movement (i.e., margin) of the Y slider 150B in the X-axis direction due to the expansion and contraction of the X guide 110. 【0091】In the above example, the Y1 axis 200A is provided on the -X side and the Y2 axis 200B is provided on the +X side, but the Y1 axis 200A may be provided on the +X side and the Y2 axis 200B may be provided on the -X side. 【0092】 Figure 6 is a ZX cross-sectional view showing a schematic configuration example of the Y1 axis 200A. The main part of the stage apparatus 1, including the Y1 axis 200A, is placed in a high vacuum HV inside a vacuum chamber or vacuum vessel. As described above, at least one air pad 170A (first hydrostatic bearing) is provided at each of the ±X and ±Z interfaces between the Y guide 210A and the Y slider 150A. Atmospheric pressure exhaust grooves 172A are arranged on both sides of each air pad 170A. In addition, a low vacuum exhaust groove 174A is arranged between each air pad 170A. 【0093】 Figure 7 is a ZX cross-sectional view showing a schematic configuration example of the Y2 axis 200B. The main part of the stage apparatus 1, including the Y2 axis 200B, is placed in a high vacuum HV inside a vacuum chamber or vacuum vessel. As described above, at least one air pad 170B (second hydrostatic bearing) is provided at each of the ±Z interfaces between the Y guide 210B and the Y slider 150B. In the illustrated example, two air pads 170B (second hydrostatic bearings) are provided at each of the ±Z interfaces between the Y guide 210B and the Y slider 150B, in positions symmetrical with respect to the central axis (not shown) in the Z-axis direction of the Y2 axis 200B. Atmospheric pressure exhaust grooves 172B are arranged on both sides of each air pad 170B. Low vacuum exhaust grooves 174B are arranged between each air pad 170B at each of the ±Z interfaces. 【0094】Furthermore, on the outer side in the X-axis direction of each air pad 170B at each interface on the ±Z side, a low-vacuum exhaust groove 174B and a medium-vacuum exhaust groove 176B are arranged in order. In this way, the atmospheric pressure exhaust groove 172B (located on the outer side of each air pad 170B), the low-vacuum exhaust groove 174B, and the medium-vacuum exhaust groove 176B are arranged in order from each air pad 170B outward, so that the second floating gas inside the air pad 170B is sequentially exhausted to the outside of the vacuum chamber through atmospheric pressure (exhaust groove 172B), low vacuum (exhaust groove 174B), and medium vacuum (exhaust groove 176B). As a result, leakage of the second floating gas inside the air pad 170B into the vacuum chamber or into the gap 178 at each interface on the ±X side is effectively prevented. 【0095】 As described above, air pads 170B (second hydrostatic bearing) (and exhaust grooves 172B, 174B, 176B) are not provided at the ±X-side interfaces between the Y-guide 210B and the Y-slider 150B, and a gap 178 significantly larger than the width of the second hydrostatic bearing is provided. This gap 178 communicates with the outside of the Y2 axis 200B (inside the vacuum chamber) and is in a high vacuum HV. 【0096】 The present disclosure has been described above based on embodiments. Various modifications are possible for each component and each combination of processes in the exemplary embodiments, and it will be obvious to those skilled in the art that such modifications are included in the scope of the present disclosure. 【0097】 The configuration, operation, and function of each device and method described in the embodiments can be realized by hardware resources or software resources, or by the cooperation of hardware resources and software resources. Hardware resources include, for example, processors, ROMs, RAMs, and various integrated circuits. Software resources include, for example, operating systems and application programs. 【0098】 This disclosure relates to drive devices, etc. 【0099】1. Stage device, 2. Stage, 20. Second gas levitation section, 100. First drive shaft, 110. X guide, 150. Y slider, 170. Air pad, 178. Gap, 200. Second drive shaft, 210. Y guide, 220. Second linear motor.

Claims

1. A drive device comprising: a first drive shaft for driving a driven body in a first direction; and two second drive shafts provided at both ends of the first drive shaft, each of which drives the driven body and the first drive shaft in a second direction intersecting the first direction, wherein each second drive shaft comprises: a guide extending in the second direction; a slider connected to each end of the first drive shaft and movable along the guide; and a gas buoyancy section that levitates the slider away from the guide using gas, wherein one of the second drive shafts is configured with a first hydrostatic bearing that restrains the slider with respect to the guide at least in the first direction by gas supplied by the gas buoyancy section; and the other of the second drive shafts is configured with a second hydrostatic bearing that restrains the slider with respect to the guide only in a third direction intersecting the first and second directions by gas supplied by the gas buoyancy section.

2. The drive device according to claim 1, wherein the first hydrostatic bearing restrains the slider with respect to the guide in the first and third directions by gas supplied by the gas levitation portion.

3. The drive device according to claim 1 or 2, comprising a vacuum chamber that houses the first drive shaft and the second drive shaft inside a vacuum, wherein each of the second drive shafts is provided with an exhaust section that discharges the gas supplied by the gas buoyancy section to the outside of the vacuum chamber.

4. The drive device according to claim 1 or 2, wherein each of the second drive shafts is equipped with a linear motor that applies a driving force in the second direction to the slider.

5. The drive device according to claim 1 or 2, wherein the third direction is the vertical direction.

6. The drive device according to claim 1 or 2, wherein the first direction, the second direction, and the third direction are orthogonal to each other.

7. A positioning device for positioning the driven object by the drive device described in claim 1 or 2.

8. A processing apparatus for performing a predetermined process on an object to be processed, which is positioned on the driven body positioned by the positioning device described in claim 7.

9. A device manufacturing method for manufacturing a device through the processing performed by the processing apparatus described in claim 8.

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