Gas sensor package for measuring composite gas, and manufacturing method therefor

Abstract

The present invention provides a gas sensor package for measuring composite gas, and a manufacturing method therefor. One aspect of the present embodiment comprises: a sensor module in which at least one gas sensor for detecting different gas components is disposed; and a cover module which is disposed on the upper portion of the sensor module so as to cover and hermetically accommodate the entire gas sensor in an inner accommodation space, and which includes a mesh-shaped barrier so as to allow the gas components to pass through the accommodation space, wherein the gas sensor includes: a sensing material that absorbs and desorbs a preset gas component to be detected; a heater for separating gas components adsorbed on the sensing material therefrom; a first insulating layer disposed on a substrate so as to electrically separate the substrate from the heater; a sensing electrode which receives a signal from the outside so as to generate an electric field corresponding to the signal, and which senses changes in intensity and frequency of a voltage; and a second insulating layer disposed on the heater so as to electrically separate the heater from the sensing electrode.

Description

Gas sensor package for measuring complex gases and method for manufacturing the same

[0001] The present embodiment relates to a gas sensor package for measuring complex gases and a method for manufacturing the same.

[0002] The content described in this section merely provides background information regarding the present embodiment and does not constitute prior art.

[0003] The gas sensor analyzes the presence and concentration of specific gaseous components present in the air, such as carbon monoxide (CO), methane (CH4), ethylene (C2H4), or ethane (C2H6).

[0004] Conventional gas sensors input a signal into a sensing unit and detect changes in the signal caused by changes in the resistance value due to the presence of the aforementioned gaseous components or changes in the electric field that vary accordingly. In this way, conventional gas sensors have detected the presence and concentration of the gaseous components to be detected from changes in the signal.

[0005] However, conventional gas sensors have a problem in that the accuracy of detection is reduced when detecting changes in signals because the terminal for inputting the signal and the terminal for detecting the signal are structurally the same.

[0006] Energy storage systems (ESS) primarily use high-energy-efficiency lithium-ion batteries and consist of units ranging from the smallest unit, the battery cell, to modules in which dozens of cells are connected in series and parallel. Due to the nature of ESS requiring the storage of a large amount of energy in a limited space, a large number of batteries are densely arranged. Consequently, if a fire occurs in an ESS, the high heat generated during the fire leads to a chain of explosions, causing significant damage.

[0007] Therefore, gas sensors are used to detect off-gases generated in batteries within ESS, but most gas sensors measure only one type of gas. However, since off-gases consist of various components such as electrolyte vapor and decomposition / reaction gases, there is a need for composite sensor technology that includes various gas sensors to detect various off-gas components.

[0008] One objective of the present invention is to provide a gas sensor package for measuring a composite gas and a method for manufacturing the same, which is composed of a composite sensor structure capable of detecting at least one type of gas component and can structurally improve the sensing accuracy of the gas component to be detected.

[0009] According to one aspect of the present embodiment, a gas sensor package comprises: a sensor module in which at least one gas sensor for detecting different gas components is disposed; and a cover module disposed above the sensor module, which covers and seals the entire gas sensor within an internal receiving space and includes a mesh-shaped barrier to allow gas components to pass into the receiving space, wherein the gas sensor comprises: a sensing material for desorbing a preset gas component to be detected; a heater for separating gas components adsorbed on the sensing material; a first insulating layer disposed on the substrate to electrically separate the substrate and the heater; a sensing electrode that receives a signal from the outside, generates an electric field corresponding thereto, and senses changes in voltage intensity and frequency; and a second insulating layer disposed on the heater to electrically separate the heater and the sensing electrode.

[0010] Alternatively, the sensor module is characterized by comprising: a body portion having at least one gas sensor disposed on one surface; and a first coupling portion coupled to the cover module by means of coupling.

[0011] Alternatively, the cover module is characterized by having a second coupling portion formed at a position corresponding to the first coupling portion of the sensor module.

[0012] Alternatively, the heater is characterized by separating adsorbed gaseous components by applying heat to the sensing material.

[0013] Alternatively, the heater is characterized by including an input terminal and a heating element.

[0014] Alternatively, the input terminals are formed at each end of the heating element and are characterized by receiving power to be applied to the heating element.

[0015] Alternatively, the gaseous component set above is characterized by including carbon monoxide (CO), methane (CH4), ethylene (C2H4), or ethane (C2H6).

[0016] According to one aspect of the present embodiment, a gas sensor package comprises: a power source for applying DC power; a signal generator that receives DC power from the power source and generates a signal having a frequency for detecting a preset gas component; a sensing unit that receives an input signal applied from the signal generator and senses the presence and concentration of a preset gas component; a filter unit that filters noise within the sensing value sensed by the sensing unit; an amplifier that amplifies the signal passed through the filter unit; and a detection unit that receives the signal passed through the amplifier and detects the presence and concentration of a preset gas component, wherein the sensing unit comprises: a sensor module in which at least one gas sensor for detecting different gas components is disposed; and a cover module disposed on the upper part of the sensor module, which includes a mesh-shaped barrier that covers and seals the entire gas sensor in an internal receiving space and allows the gas component to pass through the receiving space.

[0017] Alternatively, the filter section and amplifier are characterized by being included in a number equal to the number of gas components to be detected.

[0018] Alternatively, the signal generator is characterized by generating an alternating current signal having a frequency suitable for detecting a gas component.

[0019] Alternatively, the filter section is characterized by being implemented as a bandpass filter.

[0020] Alternatively, the sensing unit is installed on one side of the ESS rack to reflect the structure of the battery and the airflow of the fan of the Energy Storage System (ESS), and is characterized by detecting off-gas during venting.

[0021] According to one aspect of the present embodiment, a method for manufacturing a gas sensor package comprises: a sensor manufacturing process for manufacturing at least one gas sensor capable of detecting different gas components; and a module coupling process for coupling a cover module comprising a mesh-shaped barrier that covers and seals the entire gas sensor in an internal receiving space to allow gas components to pass through the receiving space, wherein the sensor manufacturing process is characterized by repeatedly performing a gas sensor manufacturing process in the order of a first insulating layer, a heater, a second insulating layer, a sensing electrode, and a sensing material, wherein the process comprises a photolithography process for forming a photoresist pattern on a substrate, a deposition process for depositing a unit element on top of the photoresist pattern, and a metal deposition process for depositing a metal material for an electrode.

[0022] As described above, according to one aspect of the present embodiment, the composite sensor structure is configured to detect at least one type of gas component, and structurally, it has the effect of improving the sensing accuracy of the gas component to be detected.

[0023] FIG. 1 is a diagram illustrating the configuration of a gas sensor package for measuring a complex gas according to one embodiment of the present invention.

[0024] FIG. 2 is a diagram illustrating the configuration of a sensor module according to one embodiment of the present invention.

[0025] FIG. 3 is a drawing illustrating the configuration of a cover module according to an embodiment of the present invention.

[0026] FIG. 4 is a block diagram illustrating the configuration of a gas sensor according to one embodiment of the present invention.

[0027] FIG. 5 is a diagram illustrating the gas sensor measurement process of a gas sensor according to one embodiment of the present invention.

[0028] FIG. 6 is a diagram illustrating the configuration of a sensing unit according to one embodiment of the present invention.

[0029] FIG. 7 is a plan view of a sensing unit according to one embodiment of the present invention.

[0030] FIG. 8 is a diagram illustrating the configuration of a heater according to one embodiment of the present invention.

[0031] FIG. 9 is a diagram illustrating the configuration of a sensing electrode according to one embodiment of the present invention.

[0032] FIG. 10 is a graph illustrating a signal generated by a signal generator and a signal detected by a detection unit according to one embodiment of the present invention.

[0033] FIG. 11 is a drawing illustrating an example of an implementation of a filter unit, an amplifier, and a detector unit according to one embodiment of the present invention.

[0034] FIG. 12 is a diagram illustrating the process of manufacturing a sensing unit according to one embodiment of the present invention.

[0035] FIG. 13 is a diagram illustrating the state in which a gas sensor package according to one embodiment of the present invention is installed in an energy storage device.

[0036] FIG. 14 is an exemplary diagram showing a gas sensor package according to one embodiment of the present invention installed in an energy storage device to measure a single gas or a complex gas.

[0037] FIGS. 15 to 18 are graphs measuring the gas precision of a gas sensor according to one embodiment of the present invention.

[0038] FIG. 19 is a graph showing the change in sensitivity during repeated measurements of a gas sensor according to one embodiment of the present invention.

[0039] FIG. 20 is a graph illustrating the dispersion trend of the average and deviation after repeated measurements of a gas sensor according to one embodiment of the present invention.

[0040] The present invention is susceptible to various modifications and may have various embodiments, and specific embodiments are illustrated in the drawings and described in detail. However, this is not intended to limit the invention to specific embodiments, and it should be understood that the invention includes all modifications, equivalents, and substitutions that fall within the spirit and scope of the invention. Similar reference numerals have been used for similar components in the description of each drawing.

[0041] Terms such as first, second, A, B, etc., may be used to describe various components, but said components should not be limited by said terms. These terms are used solely for the purpose of distinguishing one component from another. For example, without departing from the scope of the present invention, the first component may be named the second component, and similarly, the second component may be named the first component. The term "and / or" includes a combination of a plurality of related described items or any of a plurality of related described items.

[0042] When it is stated that one component is "connected" or "connected" to another component, it should be understood that while it may be directly connected or connected to that other component, there may also be other components in between. On the other hand, when it is stated that one component is "directly connected" or "directly connected" to another component, it should be understood that there are no other components in between.

[0043] The terms used in this application are used merely to describe specific embodiments and are not intended to limit the invention. The singular expression includes the plural expression unless the context clearly indicates otherwise. In this application, terms such as "comprising" or "having" should be understood as not precluding the existence or addition of the features, numbers, steps, actions, components, parts, or combinations thereof described in the specification.

[0044] Unless otherwise defined, all terms used herein, including technical or scientific terms, have the same meaning as generally understood by those skilled in the art to which this invention pertains.

[0045] Terms such as those defined in commonly used dictionaries should be interpreted as having meanings consistent with their meanings in the context of the relevant technology, and should not be interpreted in an ideal or overly formal sense unless explicitly defined in this application.

[0046] In addition, each component, process, procedure, or method included in each embodiment of the present invention may be shared within a scope that is not technically contradictory to one another.

[0047]

[0048] FIG. 1 is a diagram illustrating the configuration of a gas sensor package for measuring a composite gas according to one embodiment of the present invention, FIG. 2 is a diagram explaining the configuration of a sensor module according to one embodiment of the present invention, and FIG. 3 is a diagram explaining the configuration of a cover module according to one embodiment of the present invention.

[0049] Referring to FIGS. 1 to 3, the gas sensor package (1000) includes a sensor module (1110) in which at least one gas sensor (100) for detecting different gas components is disposed, and a cover module (1200) disposed on top of the sensor module (1100).

[0050] The sensor module (1100) includes a body portion (1110) in which a plurality of gas sensors (100) are arranged in an n×m shape in the center, and a first coupling portion (1120) for coupling with a cover module (1200) by means of coupling such as screws or bonding. The gas sensors (100) can be spaced apart so that the electrodes of each gas sensor (100) do not come into contact with each other in various shapes such as 1×3, 2×2, 3×1, etc.

[0051] The cover module (1200) covers and seals the entire gas sensor (100) within the internal receiving space and includes a mesh-shaped barrier (1210) to allow gaseous components to pass into the receiving space. Additionally, the cover module (1200) may have a second coupling part (1220) formed at a position corresponding to the first coupling part (1120) of the sensor module (1100), and a leg part (1230) may be formed extending from the second coupling part (1220) to allow the gas sensor package (1000) to have a certain distance from the bottom surface or installation surface.

[0052] Here, the barrier (1210) can be formed from a material having chemical resistance and heat resistance properties of any one of PEEK resin, Teflon resin, PC resin, PPSF resin, ABS resin, and heat-resistant PLA resin.

[0053] PEEK (Polyetheretherketone) resin possesses heat resistance that prevents deformation at high temperatures, chemical resistance, and high-pressure durability. As such, it is widely used in the aviation sector, which requires resistance to high temperatures and pressures; in the automotive sector, which offers high performance and wear resistance; and in the medical sector, which is harmless to the human body and biocompatible. Teflon (PTFE, Polytetrafluoroethylene) resin exhibits excellent heat resistance (up to 260°C) and mold release properties. It possesses chemical and chemical resistance to acids and alkalis, as well as superior electrical insulation, flame retardancy, and non-stick properties. Furthermore, it exhibits strong weather resistance, resisting oxidation, surface contamination, and discoloration even after prolonged outdoor use. PC (Polycarbonate) resin, also known as polycarbonate, is a new type of transparent thermoplastic resin synthesized from bisphenol A and phosgene. It offers high heat resistance and excellent electrical insulation, as well as impact resistance, allowing it to be used as a substitute for metal. It is widely used in the automotive and medical fields. PPSF resin, also known as PPSU, possesses stronger properties than PC and exhibits strong heat and chemical resistance against exposure to oil, gas, and acid. It is used for sterilization applications involving steam, autoclaves, plasma, chemicals, and radiation. ABS resin is a synthetic resin composed of three components: acrylonitrile, polybutadiene, and styrene. As it is easy to process and possesses strong impact and heat resistance, it is suitable for all molding methods, including injection molding, extrusion molding, and vacuum forming. Heat-resistant PLA resin is a material with enhanced heat resistance compared to general PLA, which typically has poor heat resistance and post-processing capabilities. It is suitable for high-temperature injection molding and post-processing.

[0054] FIG. 4 is a block diagram illustrating the configuration of a gas sensor according to one embodiment of the present invention, and FIG. 5 is a diagram explaining the gas sensor measurement process of a gas sensor according to one embodiment of the present invention.

[0055] Referring to FIGS. 4 and 5, a gas sensor (100) according to one embodiment of the present invention includes a power source (110), a signal generator (120), a sensing unit (130), a filter unit (140), an amplifier (150), and a detection unit (160).

[0056] The gas sensor (100) analyzes the presence and concentration of a preset gas component, carbon monoxide (CO), methane (CH4), ethylene (C2H4), or ethane (C2H6) present in the air. The gas sensor (100) applies a signal and measures the signal strength that changes according to the presence of the gas to analyze whether a particular gas is present and in what amount. At this time, the gas sensor (100) significantly improves the accuracy of the detected signal by ensuring that the detected signal is not structurally affected by the input signal.

[0057] The power supply (110) supplies power to enable the signal generator (120) to generate a signal. By applying DC power to the signal generator (120), the power supply (110) enables the signal generator (120) to generate a desired signal from the power supply. Additionally, the power supply (110) can supply power to the heater (230) for heating or temperature measurement, etc.

[0058] The signal generator (120) generates a signal having a frequency suitable for the sensing unit (130) to detect a preset gas component. While it is acceptable to apply a direct current signal or an alternating current signal with a relatively low frequency to detect ethylene or ethane with a relatively large molecular weight, it is preferable to apply an alternating current signal with a relatively high frequency to detect carbon monoxide or methane with a relatively small molecular weight. The signal generator (120) may selectively apply a signal suitable for detecting a specific gas component, or it may apply a signal while scanning the aforementioned frequency band to detect all gas components.

[0059] The sensing unit (130) receives an input signal from the signal generator (120) and senses the presence and concentration of a preset gas component. The sensing unit (130) has a structure capable of adsorbing the preset gas component. When the preset gas component is adsorbed by the sensing unit (130), a change occurs in the resistance value of the sensing unit (130) due to the component, and a change in the electric field occurs as a result. The sensing unit (130) detects such a change in resistance value or change in the electric field to detect whether a specific gas component exists in the air and how much of it exists. In addition, as described above, the sensing unit (130) can detect a component corresponding to the frequency of the applied input signal. At this time, the sensing unit (130) can secure high sensing accuracy by including a structure and configuration as described below with reference to FIGS. 6 to 8.

[0060] The filter unit (140) filters noise within the sensing value of the sensing unit (130). The filter unit (140) is implemented as a band-pass filter (BPF) to filter out noise other than the signal detected by the sensing unit (130). The filter unit (140) is implemented as many times as there are components to be detected, and only passes through a pre-set band based on the center frequency corresponding to each component to be detected. Accordingly, each filter unit (140) filters noise within the sensed sensing value according to the presence of each component.

[0061] The amplifier (150) amplifies the signal (sensing value) that has passed through each filter section (140). A problem may occur where the magnitude of the sensing value decreases as it passes through the filter section (140). This may cause inaccurate detection by the detection section (160). The amplifier (150) receives and amplifies the signal (sensing value) that has passed through each filter section (140). The amplifier (150) is also implemented in the same way as the filter section (140) as the number of components to be detected, and amplifies the signal that has passed through each filter section (140).

[0062] The detection unit (160) receives a signal passed through the amplifier (150) and detects the presence and concentration of a preset gas component. If a preset gas component is present, a change occurs in the input signal (of a frequency that affects the component), and the greater the concentration of the component (the more of the component), the greater the amount of change. Considering these circumstances, the detection unit (160) detects whether the sensed sensing value has changed from the input signal, and if it has changed, how much it has changed. The detection unit (160) can detect the presence and concentration of a preset gas component based on the detected content, such as repeatability, reproducibility, response speed, operation time, and sensitivity. The detection unit (160) can be implemented as many times as there are components to be detected, and can proceed with detection by receiving the signal passed through each amplifier (150) separately, or it can be included only once and proceed with detection by receiving the signal passed through each amplifier (150) sequentially or separately.

[0063] FIG. 6 is a diagram illustrating the configuration of a sensing unit according to an embodiment of the present invention, and FIG. 7 is a plan view of a sensing unit according to an embodiment of the present invention.

[0064] Referring to FIGS. 6 and 7, a sensing unit (130) according to one embodiment of the present invention includes a substrate (210), first and second insulating layers (220, 240), a heater (230), a sensing electrode (250), and a sensing material (260).

[0065] The substrate (210) provides a space for each component within the sensing unit (130) to be deposited or grown. The substrate (210) can be implemented as a silicon substrate or an aluminum oxide (Al2O3) substrate.

[0066] The first insulating layer (220) is disposed on the substrate (210) to electrically separate the substrate (210) from the heater (230). The heater (230) includes electrodes and can generate heat electrically. Accordingly, if the heater (230) and the substrate (210) are disposed in direct contact, a problem of short circuit between the two may occur. Accordingly, the first insulating layer (220) is disposed on the substrate (210) to prevent the short circuit between the substrate (210) and the heater (230). The first insulating layer (220) is made of SiO2 or SiN x It can be implemented as.

[0067] A heater (230) is placed on the first insulating layer (220) to separate gas components adsorbed on the sensing material (260). When the sensing material (260) is heated (when the temperature of the sensing material increases), the adsorbed gas components can be separated. When the detection of a specific gas component is completed, the heater (230) applies heat to the sensing material (260) so that the detected gas component can be separated from the sensing material (260). Accordingly, the sensing material (260) and the sensing unit (130) containing it can proceed with the detection of newly set gas components. The heater (230) can be implemented in platinum (Pt), nickel (Ni), tungsten (W), polycrystalline silicon (Poly si), or ITO. The heater (230) can be implemented as shown in FIG. 7.

[0068] FIG. 8 is a diagram illustrating the configuration of a heater according to one embodiment of the present invention.

[0069] Referring to FIG. 8, a heater (230) according to one embodiment of the present invention includes input terminals (410, 415) and a heating element (420).

[0070] Input terminals (410, 415) are formed at both ends of the heating unit (420) respectively, and receive power to be applied to the heating unit (420).

[0071] The heating element (420) generates heat by receiving power input from the input terminals (410, 415). The heating element (420) is implemented with the aforementioned components and generates heat by receiving power. To improve the amount of heat generated per unit area, the heating element (420) may be arranged in a multiple-fold curved shape.

[0072] Referring again to FIGS. 6 and 7, the second insulating layer (240) is placed on the heater (230) to electrically separate the heater (230) from the sensing electrode (250).

[0073] The sensing electrode (250) receives a signal generated from the signal generator (120), generates an electric field corresponding to it, and senses changes in voltage intensity and frequency. Since the sensing electrode (250) has the structure shown in FIG. 9, it can sense changes in voltage intensity and frequency while minimizing the influence on the input signal.

[0074] FIG. 9 is a diagram illustrating the configuration of a sensing electrode according to one embodiment of the present invention.

[0075] Referring to FIG. 9, a sensing electrode (250) according to one embodiment of the present invention includes an input terminal (510, 515), a body (520, 525), a protruding electrode (530, 535), and an output terminal (540, 545). As such, the electrodes of the input terminal (510, 515) and the output terminal (540, 545) of the sensing electrode (250) are separated to reduce signal noise and enable high-sensitivity measurement.

[0076] The input terminals (510, 515) receive signals generated from the power supply (110) and the signal generator (120). The input terminals (510, 515) are each implemented at one end of the body (520, 525) to receive signals generated from the signal generator (120) and transmit them to the body (520, 525) and the protruding electrodes (530, 535).

[0077] The body (520, 525) provides a space for each component within the sensing electrode (250) to be implemented and transmits a signal input from the input terminal (510, 515) to the protruding electrode (530, 535) and the output terminal (540, 545). The body (520, 525) may be implemented in gold (Au), platinum (Pt), or polycrystalline silicon (Poly si).

[0078] The bodies (520, 525) are arranged with a preset spacing. Here, the preset spacing may mean a spacing such that each protruding electrode (530, 535) does not come into contact with the body (525, 520) facing it.

[0079] The protruding electrodes (530, 535) protrude sequentially in an intersecting manner from each body (520, 525) toward the opposing body (525, 520), thereby forming an electric field between adjacent protruding electrodes (530, 535). As the protruding electrodes (530, 535) are implemented in the aforementioned form within the body (520, 525), an electric field is formed between adjacent protruding electrodes (530, 535) according to an applied signal without physical contact between the body (520, 525) and the protruding electrodes (530, 535). Under normal circumstances, an electric field is formed in this manner, and the applied signal along the body (520, 525) and the protruding electrodes (530, 535) is transmitted to the output terminal (540, 545). However, when a preset gas component to be detected is adsorbed onto the sensing material (260), a change in the resistance value occurs, and consequently, a change in the electric field formed by the adjacent protruding electrodes (530, 535) also occurs. Accordingly, a change in the strength and frequency of the signal transmitted to the output terminals (540, 545) through the body (520, 525) and the protruding electrodes (530, 535) occurs.

[0080] Output terminals (540, 545) are each implemented at opposite ends of the body (520, 525) to transmit signals transmitted through the body (520, 525) and protruding electrodes (530, 535) to the detection unit (160). The detection unit (160) is electrically connected to the output terminals (540, 545) via the filter unit (140) and the amplifier (150), so that the detection unit (160) finally receives the signals transmitted to the output terminals (540, 545). At this time, the output terminals (540, 545) are structurally implemented separated from the input terminals (510, 515). In conventional sensing units, an applied signal is applied and a detection signal is detected using the same terminal. However, if the configuration for applying a signal and the configuration for detecting a signal are electrically connected to the same terminal and operate respectively, there may be cases where the applied signal is applied to the configuration for detecting the signal instead of the detection signal that should actually be detected, and even if the applied signal is not fully configured to detect the signal, it may affect the detection signal and act as noise. Accordingly, in conventional sensing units, it has frequently occurred that the gas component to be detected is detected as present even when it is not actually present, or vice versa. However, the sensing unit (130) can fundamentally prevent the occurrence of the aforementioned problem by structurally separating the input terminals (510, 515) and the output terminals (540, 545).

[0081] Referring again to FIGS. 6 and 7, the sensing material (260) is placed on the sensing electrode (250) to desorb a preset gas component. The sensing material (260) is electrically connected to the sensing electrode (250) and acts as a resistor. At this time, when a preset gas component is adsorbed onto the sensing material (260), a change occurs in the resistance value felt by the sensing electrode (250) due to the component, and the magnitude of the resistance value changes according to the concentration (amount) of the adsorbed component. Accordingly, as described above, when a preset gas component is adsorbed onto the sensing material (260), a change may occur in the strength and frequency of the detection signal transmitted to the output terminals (540, 545). Meanwhile, the sensing material (260) adsorbs the preset gas component at room temperature, and can separate the preset gas component when the temperature rises by receiving heat from the heater (230). Accordingly, the sensing material (260) can sense the desired component at the desired time. The sensing material (260) may be implemented as tungsten trioxide (WO3) or tin oxide (SnO2) so as to adsorb the aforementioned gaseous components (carbon monoxide (CO), methane (CH4), ethylene (C2H4) or ethane (C2H6)). In particular, when the sensing material (260) is implemented as tin oxide, it may be implemented as tin oxide doped with titanium dioxide (TiO2).

[0082] FIG. 10 is a graph illustrating a signal generated by a signal generator and a signal detected by a detection unit according to an embodiment of the present invention, and FIG. 11 is a drawing illustrating an embodiment of a filter unit, an amplifier, and a detection unit according to an embodiment of the present invention.

[0083] As illustrated in FIG. 10(a), the signal generator (120) can generate an alternating current signal to detect all substances, including carbon monoxide and methane, which have relatively small molecular weights, and apply it to the sensing unit (130). As described above, the signal generator (120) may generate signals of a frequency suitable for detecting specific components, or it may generate signals by scanning a frequency band and adjusting the frequency.

[0084] When an alternating current signal is applied in this manner, the detection unit (160) detects a signal as illustrated in FIG. 6(b). The relatively low frequency band is a signal generated by a gas component with a relatively large molecular weight and has a relatively large intensity (I). On the other hand, the relatively high frequency band is a signal generated by a gas component with a relatively small molecular weight and has a relatively small intensity. In this way, the frequency and intensity (sensitivity) of the signal detected by the detection unit (160) vary depending on the molecular weight of the gas component to be detected.

[0085] Considering these circumstances, the filter unit (140), amplifier (150), and detector unit (160) may be implemented as shown in FIG. 11a or FIG. 11b.

[0086] As illustrated in FIG. 11a, the filter section (140), amplifier (150), and detector section (160) are each provided in the number of gas components to be detected, so that signals from each component can be separated and processed.

[0087] As shown in FIG. 10(b), it can be seen that the frequency or strength of the detected signal varies depending on the type of gas component adsorbed to the sensing unit (130). Accordingly, the filter unit (140) can separate noise by passing only a certain area centered on the frequency band of the detection signal corresponding to each component to be detected.

[0088] The amplifier (150) amplifies the signal that has passed through each filter section (140). The amplification ratio of the amplifier (150) also varies depending on the frequency band. Accordingly, each amplifier (150) optimally amplifies each signal of a different frequency that has passed through the filter section (140).

[0089] The detection unit (160) receives a signal passed through each amplifier (150) and detects the presence and concentration of a preset gas component. As shown in FIG. 10(b), the presence and concentration of a preset gas component are detected based on whether a signal with a certain intensity is detected in a specific frequency band.

[0090] Alternatively, as illustrated in FIG. 11b, the filter unit (140) and the amplifier (150) are each provided in the number of gas components to be detected, and the detection unit (160) is provided only once to receive the signal passed through each amplifier (150) and proceed with detection.

[0091] The detector (160) may receive the signal passing through each amplifier (150) directly and sequentially, or it may receive the signal passing through each amplifier (150) sequentially using a separate configuration (not shown), for example, a switch. The detector (160) can determine whether a gas component is present and how much of it is present based on whether a signal with a certain intensity is detected in a certain frequency band.

[0092] As the gas sensor (100) includes the above-described configuration, it can detect each gas component to be detected when each component is introduced, and even if some or all of the gas components are mixed and introduced, it can distinguish and detect whether the gas components are mixed and which components are mixed.

[0093] FIG. 12 is a diagram illustrating the process of manufacturing a sensing unit according to one embodiment of the present invention.

[0094] The gas sensor (100) can be manufactured on a substrate (210) by repeating the photolithography process, deposition process, and metal process for each unit element. Here, the photolithography process consists of photoresist coating, exposure on the upper part of a photomask applied over the photoresist, development to remove the photoresist, and etching to remove the deposited material remaining in the area where the photoresist has disappeared. The deposition process deposits an insulating oxide film such as SiNx or SnO2 for each unit, and the metal deposition process deposits the heater electrode and the sensing electrode with Au.

[0095] Specifically, in step S10, a photoresist pattern is formed on a substrate (210) by a photolithography process, and a first insulating layer (220) is deposited or grown thereon. In step S20, a heater (230) is deposited or grown on the first insulating layer (220), and in step S30, an insulating layer (240) is deposited or grown again on the heater (230), and in step S40, a sensing electrode (250) is deposited or grown on the insulating layer (240), and in step S50, a sensing material (260) is deposited or grown on the sensing electrode (250).

[0096] A gas sensor package (1000) can be manufactured by placing at least one manufactured gas sensor (100) in a sensor module (1100) and placing a cover module (1200) on top of the sensor module (1100) to combine the modules.

[0097] FIG. 13 is a diagram illustrating the state in which a gas sensor package according to one embodiment of the present invention is installed in an energy storage device, and FIG. 14 is an example diagram for measuring a single gas or a complex gas by installing a gas sensor package according to one embodiment of the present invention in an energy storage device.

[0098] At least one gas sensor package (1000) is installed considering the structure of the battery of the Energy Storage System (ESS), and can also be installed in a location where outside air can enter. Specifically, since the ESS is composed of multiple ESS racks, the location where off-gas can be detected during venting may vary depending on the configuration or structure of the ESS racks.

[0099] The gas sensor package (1000) is installed considering the airflow of the fan installed in the lithium-ion battery (module or rack). In a front exhaust structure where the airflow moves from the rear to the front, it is installed at the front top, and in a rear exhaust structure where the airflow moves from the front to the rear, it is installed at the rear top. Additionally, the gas sensor package (1000) is installed at the bottom center in a bottom exhaust structure where the airflow moves from the top to the bottom, and at the top center in a top exhaust structure where the airflow moves from the bottom to the top. Furthermore, since the battery (lithium-ion battery) is arranged in a module unit in one ESS rack, the number of gas sensor packages (1000) installed can increase from 1 to N depending on the number of battery modules.

[0100] Additionally, as illustrated in FIG. 14, the gas sensor package (1000) may be packaged by combining a sensor module (1100) and a cover module (1200) so that it can detect various types of off-gases from one to four types according to the user's selection. Alternatively, if four types of gas sensors are placed in the gas sensor package (1000), the user may activate only the gas of the desired detection target and deactivate the remaining gas sensors.

[0101] If the gas sensor package (1000) detects only one type of off-gas, the cover module (1200) may have a pass hole formed on its upper surface to allow the gas component to be detected to pass through, and may be formed so that one end is open as the sensing electrode is exposed.

[0102] Fire accidents involving Energy Storage Systems (ESS) are having a negative impact on related industries. Damage from ESS fires is exacerbated by thermal runaway in lithium-ion batteries, and the reality is that if thermal runaway occurs in a chain reaction, the fire cannot be suppressed by conventional fire extinguishing devices. According to analysis reports on ESS fire accidents abroad, it is known that detecting off-gases generated from batteries can prevent thermal runaway in lithium-ion batteries, thereby preventing ESS fires. The stages in which thermal runaway occurs in lithium-ion batteries are classified into stress, venting, and thermal runaway. In the stress stage, the internal temperature of the cell rises due to electrical, thermal, or physical external stress applied to the cell, or due to quality defects. If the temperature rise persists, the internal pressure of the cell increases, and if it exceeds a certain pressure value, it enters the venting stage. At this point, specific locations on the battery surface tear or burst, releasing gases including electrolyte vapor; this is referred to as off-gas. Thermal runaway is the stage following venting where the internal temperature of the cell increases, the separator melts, and an internal short circuit occurs, leading to a fire. Thermal runaway continuously generates heat and oxygen until all internal energy is exhausted, causing thermal shock and propagating the fire to adjacent cells.

[0103] Off-gas consists of various components, such as electrolyte vapor and decomposition / reaction gases. Therefore, a gas sensor package must be configured to measure complex gases capable of detecting various components.

[0104] A gas sensor package according to one embodiment of the present invention can ensure operational reliability by detecting the rate of change of a specific gas during venting at the 1 ppm level, and can determine off-gas by detecting the subsequently generated component even if the component initially emitted during venting is not detected, and can quickly detect and determine off-gas through other gas sensors even if any one of the multiple gas sensors fails or loses function. In addition, if off-gas is detected early through the gas sensor package of the present invention, electrical stress can be cut off by disconnecting the power / load side of the battery, thereby preventing the concentration of flammable gas, thermal runaway can be avoided, and fire can be prevented.

[0105] FIGS. 15 to 18 are graphs measuring the gas precision of a gas sensor according to one embodiment of the present invention.

[0106] In FIGS. 15 to 18, to measure the precision of the gas sensor by detecting four types of gases, CO, CH4, C2H4, and C2H6, each of the gases CO, CH4, C2H4, and C2H6 is introduced into the gas chamber in an amount of 0 to 1.0 SCCM, and it is checked whether the gas sensor detects the target gas and measures the gas with a precision of 1 PPM or less.

[0107] As shown in FIG. 15 (a), the change in sensitivity of the gas sensor according to the amount of CO gas can be measured, and as shown in FIG. 15 (b), it can be confirmed that the change in sensitivity of the gas sensor according to the amount of CO gas is detected to be 1 PPM or less.

[0108] At this time, the gas chamber where the gas sensor is installed is robustly constructed of steel to account for battery thermal runaway, and may be equipped with an exhaust fan and filter, and the heating device may be composed of a coil heater and heating wire to transmit thermal stress to the battery.

[0109] As shown in FIG. 16 (a), the change in sensitivity of the gas sensor according to the amount of CH4 gas can be measured, and as shown in FIG. 15 (b), it can be confirmed that the change in sensitivity of the gas sensor according to the amount of CH4 gas is detected to be 1 PPM or less.

[0110] Likewise, as shown in FIGS. 17 and 18, (a) the change in sensitivity of the gas sensor according to the amount of C2H4 and C2H6 gas in the gas chamber can be measured, and (b) it can be confirmed that the change in sensitivity of the gas sensor according to the amount of C2H4 and C2H6 gas is detected to be 1 PPM or less.

[0111] FIG. 19 is a graph showing the change in sensitivity during repeated measurements of a gas sensor according to one embodiment of the present invention, and FIG. 20 is a graph explaining the dispersion trend of the average and deviation after repeated measurements of a gas sensor according to one embodiment of the present invention.

[0112] As shown in FIGS. 19 and 20, when examining the change in sensitivity of the gas sensor while repeatedly turning one type of gas (C2H6) on and off five times, it can be seen through the average and deviation of the off-gas sensor's repeatability as shown in Table 1 that the gas sensor stably and repeatedly shows the same measurement results multiple times under the same conditions.

[0113] [Table 1]

[0114]

[0115] As such, it can be seen that the gas sensor according to one embodiment of the present invention, and the gas sensor package including a plurality of gas sensors, enable accurate and precise measurements with excellent repeatability and reproducibility, thereby ensuring reliable data and results.

[0116]

[0117] The above description is merely an illustrative explanation of the technical concept of the present embodiment, and a person skilled in the art to which the present embodiment belongs would be able to make various modifications and variations within the scope of the essential characteristics of the present embodiment. Accordingly, the present embodiments are intended to explain, not limit, the technical concept of the present embodiment, and the scope of the technical concept of the present embodiment is not limited by these embodiments. The scope of protection of the present embodiment shall be interpreted by the claims below, and all technical concepts within an equivalent scope shall be interpreted as being included within the scope of rights of the present embodiment.

[0118]

[0119] CROSS-REFERENCE TO RELATED APPLICATION

[0120]

[0121] This patent is the result of research conducted with funding from the government of the Republic of Korea (Ministry of Trade, Industry and Energy) and support from the Korea Institute of Planning and Evaluation for Industrial Technology (Detailed Project No.: 00155821, Project Title: Development of a Multi-Sensor System for Detecting / Predicting Abnormal Symptoms in Secondary Batteries of Mobile ESS).

[0122] If this patent application claims priority under Section 119(a) of the U.S. Patent Act (35 USC § 119(a)) to Korean Patent Application No. 10-2024-0178327 filed on December 4, 2024, all of the contents thereof shall be incorporated into this patent application by reference. Furthermore, if this patent application claims priority in countries other than the United States for the same reasons as above, all of the contents thereof shall be incorporated into this patent application by reference.

Claims

1. In a gas sensor package, A sensor module in which at least one gas sensor for detecting different gas components is disposed; and A cover module is positioned on the upper part of the sensor module, which covers and seals the entire gas sensor within an internal receiving space, and includes a mesh-shaped barrier to allow gaseous components to pass into the receiving space. The above gas sensor is, A sensing material that desorbs a preset gas component to be detected; A heater for separating gaseous components adsorbed on the above sensing material; A first insulating layer disposed on the substrate and electrically separating the substrate and the heater; A sensing electrode that receives a signal from the outside and generates an electric field corresponding thereto, and senses changes in voltage intensity and frequency; and A gas sensor package characterized by including a second insulating layer disposed on the heater and electrically separating the heater and the sensing electrode.

2. In Paragraph 1, The above sensor module is, A body portion having at least one gas sensor disposed on one surface; and A gas sensor package characterized by including a first coupling portion coupled to the above-mentioned cover module by a coupling means.

3. In Paragraph 2, The above cover module is, A gas sensor package characterized by having a second coupling portion formed at a position corresponding to the first coupling portion of the sensor module.

4. In Paragraph 1, The above heater is, A gas sensor package characterized by separating adsorbed gas components by applying heat to the above-mentioned sensing material.

5. In Paragraph 1, The above heater is, A gas sensor package characterized by including an input terminal and a heating element.

6. In Paragraph 5, The above input terminal is, A gas sensor package characterized by being formed at each end of the heating element and receiving power to be applied to the heating element.

7. In Paragraph 1, The gaseous components previously set above are, A gas sensor package characterized by containing carbon monoxide (CO), methane (CH4), ethylene (C2H4), or ethane (C2H6).

8. In a gas sensor package, Power supply that applies DC power; A signal generator that receives DC power from the above power source and generates a signal having a frequency for detecting a preset gas component; A sensing unit that receives an input signal applied from the above signal generator and senses the presence and concentration of a preset gas component; A filter unit that filters noise within the sensing value sensed by the above-mentioned sensing unit; An amplifier that amplifies the signal passing through the filter section above; and It includes a detection unit that receives a signal passed through the amplifier and detects the presence and concentration of a preset gas component, The above sensing unit is, A sensor module in which at least one gas sensor for detecting different gas components is disposed; and A gas sensor package characterized by including: a cover module disposed on the upper part of the sensor module, which covers and seals the entire gas sensor within an internal receiving space and includes a mesh-shaped barrier to allow gas components to pass into the receiving space.

9. In Paragraph 8, The above filter section and amplifier are, A gas sensor package characterized by containing as many components as the number of gas components to be detected.

10. In Paragraph 8, The above signal generator is, A gas sensor package characterized by generating an alternating current signal having a frequency suitable for detecting a gas component.

11. In Paragraph 8, The above filter unit is, A gas sensor package characterized by being implemented as a band-pass filter.

12. In Paragraph 8, The above sensing unit is, A gas sensor package characterized by being installed on one side of an ESS rack and detecting off-gas during venting, reflecting the structure of the battery and the airflow of the fan of an Energy Storage System (ESS).

13. A method for manufacturing a gas sensor package, A sensor manufacturing process for manufacturing at least one gas sensor that detects different gas components; and The method includes a module coupling process comprising placing at least one manufactured gas sensor in a sensor module, covering and sealing the entire gas sensor in an internal receiving space, and placing and coupling a cover module including a mesh-shaped barrier to allow gas components to pass into the receiving space on top of the sensor module. The above sensor manufacturing process is, A method for manufacturing a gas sensor package characterized by repeating a gas sensor manufacturing process, comprising a photolithography process for forming a photoresist pattern on a substrate, a deposition process for depositing a unit element on top of the photoresist pattern, and a metal deposition process for depositing a metal material for an electrode, in the order of a first insulating layer, a heater, a second insulating layer, a sensing electrode, and a sensing material.

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