Micro-reflector, spatial light modulator, and optomechanical system
By employing a circuit board and spacer electrodes in the microreflector design, the fabrication process is simplified, the yield is improved, and the driving effect is enhanced, solving the problem of high fabrication difficulty in existing technologies.
Patent Information
- Authority / Receiving Office
- WO · WO
- Patent Type
- Applications
- Current Assignee / Owner
- SHENZHEN LASER INST
- Filing Date
- 2025-11-17
- Publication Date
- 2026-06-18
AI Technical Summary
The existing microreflector fabrication process is complex, which increases the difficulty of fabrication and reduces the yield rate.
The circuit adopts a structure with a first electrode and a second electrode spaced apart on a circuit board, and an intermediate electrode surrounding it. The intermediate electrode has a support part and a landing part. The actuator can flip to drive the reflector to deflect and land on the landing part during the deflection process. This simplifies the landing structure, reduces external signal interference, and improves the yield of the manufactured products.
The fabrication process of the microreflector was simplified, the yield rate was improved, and the driving effect of the electrode on the actuator was enhanced, thereby improving the working performance of the microreflector.
Smart Images
Figure CN2025135315_18062026_PF_FP_ABST
Abstract
Description
Microreflectors, spatial light modulators, and optomechanical systems Technical Field
[0001] This application relates to the field of optical equipment technology, specifically to a microreflector, a spatial light modulator, and an optomechanical system. Background Technology
[0002] In projection equipment, a common approach is to use a spatial light modulator as the key output device for imaging. The spatial light modulator converts light into image light output. The working principle of the spatial light modulator is based on the independent control of each microreflector. The microreflectors can be tilted to two different angles: an "on" state and a "off" state. When a microreflector is in the "on" state, it reflects light in a specific direction, thus guiding the light to the target location.
[0003] However, existing microreflectors have complex landing structures. The fabrication process requires repeated etching and smoothing steps, increasing the uncontrollable aspects of the microreflector fabrication process and thus increasing the difficulty of manufacturing. This may lead to increased complexity and lower yield rates in microreflector fabrication. Summary of the Invention
[0004] This application provides a microreflector, a spatial light modulator, and an optomechanical system to at least partially improve the above-mentioned technical problems.
[0005] In a first aspect, this application provides a microreflector, including a circuit board, an actuator, and a reflector. The circuit board is provided with a spaced first electrode and a second electrode, and an intermediate electrode surrounding the first electrode and the second electrode. The intermediate electrode separates the first electrode and the second electrode. The intermediate electrode has a support portion that protrudes from the circuit board. The intermediate electrode also has a first landing portion and a second landing portion that are opposite each other. The first landing portion and the second landing portion are located on both sides of the support portion. The actuator is supported on the support portion and can be flipped relative to the support portion. The reflector is mounted on the actuator. Under the actuation of the first electrode and / or the second electrode, the actuator drives the reflector to deflect and land on the first landing portion or the second landing portion during the deflection process.
[0006] In one embodiment, the actuator includes a driven portion, a first bearing portion, and a second bearing portion. The driven portion is connected between the first bearing portion and the second bearing portion and is rotatably connected to a support portion. A reflector is mounted on the first bearing portion and the second bearing portion. The first bearing portion is disposed opposite to a first electrode, and the second bearing portion is disposed opposite to a second electrode. The first bearing portion is used to drive the driven portion to deform and rotate toward a first landing portion when actuated by the first electrode, and the second bearing portion is used to drive the driven portion to deform and rotate toward a second landing portion when actuated by the second electrode.
[0007] In one embodiment, the end of the first bearing portion away from the driven portion has a first abutting portion, and the end of the second bearing portion away from the driven portion has a second abutting portion. When the actuator drives the reflector to land on the first landing portion, the first abutting portion abuts against the first landing portion. When the actuator drives the reflector to land on the second landing portion, the second abutting portion abuts against the second landing portion.
[0008] In one embodiment, the support portion includes a first support column and a second support column spaced apart, and the driven portion has a first end and a second end that are far apart from each other, the first end being connected to the first support column and the second end being connected to the second support column.
[0009] In one embodiment, the driven part includes a first rotating part, a second rotating part, and a connecting part. The connecting part is connected between the first bearing part and the second bearing part. The first rotating part and the second rotating part are disposed on both sides of the line connecting the first bearing part and the second bearing part. One end of the first rotating part is connected to the first support column, and the other end is connected to the connecting part. One end of the second rotating part is connected to the second support column, and the other end is connected to the connecting part.
[0010] In one embodiment, the microreflector further includes a carrier, a reflector is mounted on the carrier, and the surface of the carrier away from the reflector is attached to a first carrier portion and a second carrier portion. The carrier is formed with a notch that corresponds to the first rotating portion and the second rotating portion.
[0011] In one embodiment, the thickness of the carrier is greater than the thickness of the actuator.
[0012] In one embodiment, the cross-sectional area of the first support column and the second support column gradually increases from the end furthest from the circuit board to the end closest to the circuit board.
[0013] In one embodiment, the surface of the intermediate electrode near the reflector is flush with the surfaces of the first electrode and the second electrode near the reflector.
[0014] Secondly, this application provides a spatial light modulator, which includes a plurality of microreflectors as described in the first aspect.
[0015] Thirdly, this application provides an optomechanical system including the spatial light modulator described in the second aspect above.
[0016] The microreflector, spatial light modulator, and optomechanical system provided in this application embodiment can drive a reflector to deflect when the actuator is actuated by the first or second electrode. An intermediate electrode surrounds the first and second electrodes, and a first and second landing portion are formed on the intermediate electrode. The intermediate electrode can both isolate the first and second electrodes for signal shielding, reducing external signal interference, and simplify the landing structure, reducing the fabrication difficulty of the microreflector and improving the yield rate. Furthermore, the first and second landing portions do not interfere with the first and second electrodes, allowing for maximized placement of the first and second electrodes, enhancing their driving effect on the actuator, and improving the working performance of the microreflector. The first and second electrodes do not require clearance structures, further reducing their fabrication difficulty. Attached Figure Description
[0017] To more clearly illustrate the technical solutions in the embodiments of this application, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.
[0018] Figure 1 is a schematic diagram of the structure of an optomechanical system proposed in an embodiment of this application;
[0019] Figure 2 is a schematic diagram of a microreflector proposed in an embodiment of this application;
[0020] Figure 3 is an exploded schematic diagram of a microreflector proposed in an embodiment of this application;
[0021] Figure 4 is a schematic diagram of the operation of a microreflector according to an embodiment of this application;
[0022] Figure 5 is a schematic diagram of the circuit board structure in a microreflector according to an embodiment of this application;
[0023] Figure 6 is a cross-sectional view of a circuit board structure in a microreflector according to an embodiment of this application;
[0024] Figure 7 is a schematic diagram of the actuator in a microreflector according to an embodiment of this application.
[0025] Reference numerals: Optomechanical system 1, Spatial light modulator 100, Microreflector 10, Circuit board 20, First electrode 21, Second electrode 22, Intermediate electrode 23, Support part 231, First support column 2311, Second support column 2312, First landing part 232, Second landing part 233, Actuator 30, Driven part 31, First end 311, Second end 312, Connecting part 315, First bearing part 32, First abutting part 321, Second bearing part 33, Second abutting part 331, Reflector 40, Bearing member 50, Notch 51. Detailed Implementation
[0026] To enable those skilled in the art to better understand the present application, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of the present application, and not all of them. All other embodiments obtained by those skilled in the art based on the embodiments of the present application without inventive effort are within the scope of protection of the present application.
[0027] In this application, unless otherwise expressly specified or limited, the terms "installation," "connection," "fixation," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components; they can refer to mere surface contact; or they can refer to surface contact connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.
[0028] Furthermore, the terms "first," "second," etc., are used only for distinguishing descriptions and should not be construed as referring to specific or particular structures. The terms "some embodiments," "other embodiments," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of this application. In this application, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in a suitable manner in any one or more embodiments or examples. Furthermore, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this application, as well as the features of different embodiments or examples.
[0029] Example
[0030] This application provides an optomechanical system 1, as shown in Figure 1. The optomechanical system 1 is a system that realizes optical operations through optical devices, etc. The optomechanical system 1 can be an optical instrument, optical inspection equipment, optical communication equipment, optical measurement equipment, industrial optical equipment, optical projection equipment, etc. For example, the optomechanical system 1 can include a light source and optical devices. The optical devices can adjust the light emitted from the light source so that the subsequent light can meet the usage requirements of subsequent devices.
[0031] Understandably, in order to achieve the output target image or target light, the selection and design of optical devices and light sources can be carried out according to the specific implementation plan.
[0032] In this embodiment, the optomechanical system 1 may include a spatial light modulator 100. A spatial light modulator 100 is a component that modulates the light field distribution of a light wave. The spatial light modulator 100 can be a complementary metal-oxide-semiconductor (CMOS) chip or a micro-electro-mechanical system (MEMS) chip. It is widely used in many application fields such as optical information processing, beam conversion, and output display. Referring to Figures 1 and 2, the spatial light modulator 100 can be used to receive and modulate illumination light emitted from a light source to form image light. The spatial light modulator 100 directs the image light in a specific direction. The spatial light modulator 100 contains many independent units (independent optical units), such as microreflectors 10, which can be arranged in a one-dimensional or two-dimensional array in space. Each unit can be independently controlled by optical or electrical signals, utilizing various physical effects (Paukler effect, Kerr effect, acousto-optic effect, magneto-optic effect, semiconductor self-electro-optic effect, or photorefractive effect, etc.) to change its own characteristics, thereby modulating the illumination beams of several independent units and outputting an image beam. In some other embodiments, the spatial light modulator 100 can also be a digital micromirror device (DMD).
[0033] More specifically, referring to Figures 1 and 2, the spatial light modulator 100 may include a plurality of microreflectors 10, which may be arranged in a two-dimensional array. The spatial light modulator 100 receives a control signal. The plurality of microreflectors 10 can be driven to deflect according to the control signal, controlling a portion of the plurality of microreflectors 10 to be in an "on" state and the remaining portion to be in an "off" state.
[0034] For ease of description, the following content will replace the "on" state with the first state and the "off" state with the second state.
[0035] In its first state, the microreflector 10 reflects light in a specific direction to form a target image. In its second state, the microreflector 10 reflects light to other locations. The distinction between the first and second states is based on the specific direction. For example, the specific direction could be the opposite direction of the incident light from the spatial light modulator 100, meaning the spatial light modulator 100 can reflect the modulated light. In the first state, the reflector 40 of the microreflector 10 can be perpendicular to the incident direction of the light, reflecting the light to the specific direction to form the target image. In the second state, the reflector 40 of the microreflector 10 can be at an acute angle to the incident light, such as 60°, reflecting the light to other directions.
[0036] In this embodiment, referring to Figures 3 and 4, the microreflector 10 may include a circuit board 20, an actuator 30, and a reflector 40. The circuit board 20 can be used to carry and electrically connect the actuator 30, and the circuit board 20 can also drive the actuator 30 to tilt. The actuator 30 can be used to carry the reflector 40, and incident light can exit onto a surface of the reflector 40 away from the actuator 30.
[0037] The initial state of the microreflector 10 is its first state, where incident light can be reflected in a specific direction by the reflector 40. According to a control signal, the actuator 30 can be actuated by the circuit board 20. The actuator 30 deflects, causing the reflector 40 to deflect as well. The angle of incidence of light on the surface of the reflector 40 changes. When the actuator 30 deflects relative to the circuit board 20 to a certain angle, the light can be reflected in other directions by the reflector 40, at which point the microreflector 10 is in its second state.
[0038] In a more specific embodiment, referring to Figures 3 and 5, the circuit board 20 is provided with a spaced first electrode 21, a second electrode 22, and an intermediate electrode 23. Depending on different control signals, the first electrode 21 or the second electrode 22 can respectively actuate the actuator 30, thereby achieving deflection of the actuator 30 in different directions or angles. The intermediate electrode 23 surrounds the first electrode 21 and the second electrode 22. The intermediate electrode 23, the first electrode 21, and the second electrode 22 are spaced apart and electrically insulated from each other to avoid mutual interference. The intermediate electrode 23 can isolate external interference signals from the first electrode 21 and the second electrode 22, preventing external interference signals from interfering with the first electrode 21 and the second electrode 22, ensuring the normal operation of the microreflector 10. The intermediate electrode 23 separates the first electrode 21 and the second electrode 22. Under the control of the control signal, the first electrode 21 and the second electrode 22 operate in different states. The intermediate electrode 23 can isolate them from mutual interference, avoiding interference from external signals and signals between internal electrodes, optimizing the structure of the circuit board 20, and improving the performance of the microreflector 10.
[0039] Please refer to Figures 3 and 6. The intermediate electrode 23 has a support portion 231 that protrudes from the circuit board 20. The structure of the support portion 231 can be a prism, cylinder, frustum, or cone, etc. The actuator 30 is supported on the support portion 231. The support portion 231 allows the circuit board 20 and the actuator 30 to be spaced apart. When the actuator 30 is tilted relative to the circuit board 20, there is a certain deflection space between the actuator 30 and the circuit board 20, which can avoid mutual interference between the circuit board 20 and the actuator 30 and improve the working safety of the microreflector 10.
[0040] Understandably, the selection and design of the support portion 231 are based on parameters such as the deflection range and size of the actuator 30. For example, the larger the deflection range and size of the actuator 30, the longer the support portion 231 can be configured. Conversely, the smaller the deflection range and size of the actuator 30, the shorter the length of the support portion 231 can be configured.
[0041] Please refer to Figure 3 again. The intermediate electrode 23 can be a metal frame structure. For example, the intermediate electrode 23 can also have a first landing portion 232 and a second landing portion 233, which can be distributed along the edge of the intermediate electrode 23. The actuator 30 is supported on the support portion 231 and can be flipped relative to the support portion 231. The reflector 40 is mounted on the actuator 30. The first landing portion 232 and the second landing portion 233 are located on both sides of the support portion 231. The actuator 30 can be deflected in different directions by the action of the first electrode 21 and the second electrode 22. For example, the actuator 30 can be flipped toward the first landing portion 232 and the second landing portion 233. The first landing portion 232 and the second landing portion 233 can limit the deflection range of the actuator 30, improve the regularity of the deflection of the actuator 30, and ensure the controllability of the deflection of the actuator 30. More specifically, the first electrode 21 and / or the second electrode 22 can receive control signals, which may include a first signal and a second signal. The first signal can control the first electrode 21 and / or the second electrode 22 to attract and deflect the actuator 30, and the second signal can control the first electrode 21 and / or the second electrode 22 to repel the actuator 30. Under the control of different control signals, the actuator 30 can be actuated by the first electrode 21 and / or the second electrode 22 to drive the reflector 40 to deflect, and land on the first landing part 232 or the second landing part 233 during the deflection process. Under the actuation of the first electrode 21 or the second electrode 22, the actuator 30 can drive the reflector 40 to deflect, so that the actuator 30 lands on the first landing part 232 or the second landing part 233. In this embodiment, the microreflector 10 can also utilize the actuator 30 itself to land on the intermediate electrode 23, simplifying the landing structure, reducing the manufacturing difficulty of the microreflector 10, and improving the yield.
[0042] In one embodiment, the first electrode 21 receives a first signal, and under the control of the first signal, the first electrode 21 attracts the actuator 30, causing the actuator 30 to deflect in a direction closer to the first electrode 21. The actuator 30 drives the reflector 40 to deflect, and during the deflection process, it lands on the first landing part 232.
[0043] In another embodiment, the second electrode 22 receives a first signal, and under the control of the first signal, the second electrode 22 attracts the actuator 30, causing the actuator 30 to deflect in a direction closer to the second electrode 22. The actuator 30 drives the reflector 40 to deflect, and during the deflection process, it lands on the second landing part 233.
[0044] In another embodiment, the first electrode 21 receives a first signal and, under the control of the first signal, attracts the actuator 30, causing the actuator 30 to deflect towards the first electrode 21. The second electrode 22 receives a second signal and, under the control of the second signal, repels the actuator 30, causing the actuator 30 to deflect away from the second electrode 22. The first electrode 21 and the second electrode 22 simultaneously drive the actuator 30, which can accelerate the deflection speed of the actuator 30. The actuator 30 can quickly drive the reflector 40 to deflect and land on the first landing part 232 during the deflection process.
[0045] In another embodiment, the second electrode 22 receives a first signal and, under the control of the first signal, attracts the actuator 30, causing the actuator 30 to deflect towards the second electrode 22. The first electrode 21 receives a second signal and, under the control of the second signal, repels the actuator 30, causing the actuator 30 to deflect away from the second electrode 22. The first electrode 21 and the second electrode 22 simultaneously drive the actuator 30, which can accelerate the deflection speed of the actuator 30. The actuator 30 can quickly drive the reflector 40 to deflect and land on the first landing part 232 during the deflection process.
[0046] In this embodiment, referring to Figures 3 to 7, the actuator 30 may include a driven portion 31, a first support portion 32, and a second support portion 33. The driven portion 31 is connected between the first support portion 32 and the second support portion 33, meaning the first support portion 32 and the second support portion 33 are respectively disposed on both sides of the driven portion 31 and connected to it. The driven portion 31 is rotatably connected to the support portion 231. Furthermore, the driven portion 31 can be rotatably disposed relative to the circuit board 20, and the first support portion 32 and the second support portion 33 connected to the driven portion 31 can also be rotatably disposed relative to the circuit board 20. The reflector 40 is mounted on the first support portion 32 and the second support portion 33, thereby allowing the reflector 40 to be rotatably disposed relative to the circuit board 20.
[0047] The first support portion 32 is disposed opposite to the first electrode 21. The shape and size of the first support portion 32 and the first electrode 21 can be configured to be the same to improve the driving effect of the first electrode 21 on the first support portion 32. The second support portion 33 is disposed opposite to the second electrode 22. The shape and size of the second support portion 33 and the second electrode 22 can be configured to be the same to improve the driving effect of the second electrode 22 on the second support portion 33. The first support portion 32 is used to drive the driven portion 31 to deform and rotate toward the first landing portion 232 when actuated by the first electrode 21. The second support portion 33 is used to drive the driven portion 31 to deform and rotate toward the second landing portion 233 when actuated by the second electrode 22. By controlling the rotation of the actuator 30 through two methods, namely the first electrode 21 driving the first support portion 32 and the second electrode 22 driving the second support portion 33, the rotation effect of the actuator 30 is guaranteed, the reflector 40 can quickly respond to the control signal, and the microreflector 10 can be operated normally.
[0048] In a more specific embodiment, the end of the first supporting portion 32 away from the driven portion 31 may have a first abutting portion 321. The first abutting portion 321 extends in a direction away from the driven portion 31. The extension length of the first abutting portion 321 is affected by the deflection amplitude and size of the first supporting portion 32, etc., and is not limited in this embodiment. When the actuator 30 drives the reflector 40 to land on the first landing portion 232, the first abutting portion 321 abuts against the first landing portion 232. The first abutting portion 321 extends beyond the supporting member 50. The first abutting portion 321 has a certain elasticity, and when the first supporting portion 32 deflects, the first abutting portion 321 abuts against the first landing portion 232. The first abutting portion 321 deforms under force to buffer the deflection force of the first supporting portion 32 and improve structural stability. The end of the second bearing portion 33 furthest from the driven portion 31 may have a second abutment portion 331. The second abutment portion 331 extends in a direction furthest from the driven portion 31. The extension length of the second abutment portion 331 is affected by the deflection amplitude and size of the second bearing portion 33, and is not limited in this embodiment. When the actuator 30 drives the reflector 40 to land on the second landing portion 233, the second abutment portion 331 abuts against the second landing portion 233. The second abutment portion 331 extends beyond the bearing portion 50 and has a certain elasticity. When the second bearing portion 33 deflects, the second abutment portion 331 abuts against the second landing portion 233. The second abutment portion 331 deforms under force to buffer the deflection force of the second bearing portion 33 and improve structural stability. The first abutment portion 321 and the second abutment portion 331 can prevent the impact from being transmitted to the bearing portion 50 and the reflector 40, effectively protecting the connection stability of the reflector 40 and the bearing portion 50 and optimizing the deflection effect.
[0049] The support portion 231 may include a first support column 2311 and a second support column 2312 spaced apart. The shape of the first support column 2311 and / or the second support column 2312 may be a prism, frustum, etc. The height of the first support column 2311 and the second support column 2312 may be selected according to the deflection angle and size of the actuator 30. The distance between the first support column 2311 and the second support column 2312 may be selected and designed according to the specific parameters of the driven portion 31. For example, the driven portion 31 has a first end 311 and a second end 312 that are far apart from each other. The first support column 2311 and the second support column 2312 are connected to the first end 311 and the second end 312 of the driven portion 31, and the first support column 2311 and the second support column 2312 can improve the rotation effect of the driven portion 31.
[0050] Furthermore, the first support column 2311 and the first end 311 cooperate with each other, with the first end 311 connected to the first support column 2311. The second support column 2312 and the second end 312 cooperate with each other, with the second end 312 connected to the second support column 2312. Specifically, the driven part 31 may include a first rotating part (not shown in the figure), a second rotating part (not shown in the figure), and a connecting part 315. The connecting part 315 connects between the first bearing part 32 and the second bearing part 33. The end of the first rotating part away from the connecting part 315 is the first end 311, and the end of the second rotating part away from the connecting part 315 is the second end 312. When the first bearing part 32 and / or the second bearing part 33 is driven, the connecting part 315 can transmit driving force to the first rotating part and the second rotating part. The first rotating part and the second rotating part are disposed on both sides of the line connecting the first bearing part 32 and the second bearing part 33. One end of the first rotating part is connected to the first support column 2311, and the other end is connected to the connecting part 315. One end of the second rotating part is connected to the second support column 2312, and the other end is connected to the connecting part 315. The first rotating part and the second rotating part can deform so that the first bearing part 32, the second bearing part 33, and the connecting part 315 can rotate relative to the first support column 2311 and the second support column 2312, thereby improving rotational stability and ensuring normal operation.
[0051] Preferably, the cross-sectional areas of the first support column 2311 and the second support column 2312 gradually increase from the end away from the circuit board 20 to the end closer to the circuit board 20. The cross-sectional areas of the first support column 2311 and the second support column 2312 near the actuator 30 are smaller, and the dimensions of the first end 311 and the second end 312 can be smaller, which can further increase the dimensions of the first rotating part and the second rotating part, and improve the rotation effect of the first rotating part and the second rotating part.
[0052] In another embodiment, referring to Figures 2 to 7, the first support portion 32 can also be used to drive the driven portion 31 to deform and rotate in a direction away from the first landing portion 232 when actuated by the first electrode 21, thereby driving the actuator 30 to deflect towards the second landing portion 233. The second support portion 33 is also used to drive the driven portion 31 to deform and rotate in a direction away from the second landing portion 233 when actuated by the second electrode 22, thereby driving the actuator 30 to deflect towards the first landing portion 232. Furthermore, the attraction effect of the first electrode 21 on the first support portion 32 and the repulsion effect of the second electrode 22 on the second support portion 33 can coexist, allowing the actuator 30 to rotate towards the first landing portion 232. Similarly, the attraction effect of the second electrode 22 on the second support portion 33 and the repulsion effect of the first electrode 21 on the first support portion 32 can coexist, allowing the actuator 30 to rotate towards the second landing portion 233. The driving effects of the first electrode 21 and the second electrode 22 are superimposed, which can increase the deflection rate of the actuator 30 and enhance the response speed of the microreflector 10.
[0053] In this embodiment, referring to Figure 3, the microreflector 10 may further include a carrier 50, which is a plate-like structure with a cross-sectional shape that can be rectangular, rhomboid, or similar. A reflector 40 is mounted on the surface of the carrier 50 and can be connected to the carrier 50 via bonding, snap-fit connections, or other methods. The carrier 50 has sufficient strength to ensure the structural stability of the reflector 40. The carrier 50 may have the same shape and structure as the actuator 30. The surface of the carrier 50 away from the reflector 40 is attached to the first carrier portion 32 and the second carrier portion 33. Furthermore, the surface of the carrier 50 away from the reflector 40 can be bonded to the surfaces of the first carrier portion 32 and the second carrier portion 33 away from the circuit board 20. When driven, the actuator 30 can deflect the carrier 50 and the reflector 40. During this deflection, the first carrier portion 32 and the second carrier portion 33 rotate relative to the first support column 2311 and the second support column 2312, causing deformation of the first and second rotating portions of the actuator 30. The support member 50 has a notch 51, which corresponds to the first rotating part and the second rotating part. The notch 51 provides a certain clearance space, and part of the structure of the deformed first rotating part and the second rotating part can be placed in the clearance space, which can prevent the support member 50 from interfering with the actuator 30, and ensure the normal operation of the actuator 30 and the structural stability of the reflector 40.
[0054] Preferably, after deformation, the first rotating part and the second rotating part protrude relatively beyond the first bearing part 32 and the second bearing part 33. In this embodiment, the thickness of the bearing member 50 is greater than the thickness of the actuator 30, increasing the deformation space of the first rotating part and the second rotating part. This prevents the first rotating part and the second rotating part from contacting the reflector 40 during deformation and damaging the structure of the reflector 40. Furthermore, the thicker bearing member 50 has better structural stability, which can better ensure the structural performance of the reflector 40. It can also increase the distance between the reflector 40 and the actuator 30, preventing the heat of the reflector 40 from being transferred to the actuator 30, further preventing the actuator 30 from being heated and its elasticity from decreasing.
[0055] In one embodiment, unlike the structure where the first electrode 21 and the second electrode 22 protrude from the intermediate electrode 23 (see Figure 5), the surface of the intermediate electrode 23 near the reflector 40 is flush with the surfaces of the first electrode 21 and the second electrode 22 near the reflector 40. The distance between the first electrode 21 and the second electrode 22 and the actuator 30 is greater, resulting in a wider driving range for the actuator 30 and increasing the tilt angle of the reflector 40. Furthermore, the maximized arrangement of the first electrode 21 and the second electrode 22 enhances their driving effect on the actuator 30. Even with the increased distance between the first electrode 21 and the second electrode 22 and the actuator 30, the driving effect of the first electrode 21 and the second electrode 22 on the actuator 30 remains unaffected. Moreover, the flush arrangement simplifies the structure of the first electrode 21, the second electrode 22, and the intermediate electrode 23, placing them on the same plane. It can increase the number of etched structures in a certain step of etching or planarization, thereby reducing process steps, simplifying the preparation process, and improving the yield of the preparation process.
[0056] The microreflector 10, spatial light modulator 100, and optomechanical system 1 provided in this embodiment can drive the reflector 40 to deflect when the actuator 30 is actuated by the first electrode 21 or the second electrode 22. An intermediate electrode 23 surrounds the first electrode 21 and the second electrode 22, and a first landing portion 232 and a second landing portion 233 are formed on the intermediate electrode 23. The intermediate electrode 23 can both isolate the first electrode 21 and the second electrode 22 for signal shielding, reducing external signal interference, and simplify the landing structure, reducing the fabrication difficulty of the microreflector 10 and improving the yield rate. Furthermore, the first landing portion 232 and the second landing portion 233 will not interfere with the first electrode 21 and the second electrode 22, allowing the first electrode 21 and the second electrode 22 to be maximized, enhancing the driving effect of the first electrode 21 and the second electrode 22 on the actuator 30 and improving the working performance of the microreflector 10. The first electrode 21 and the second electrode 22 do not require a clearance structure, which also reduces the fabrication difficulty of the first electrode 21 and the second electrode 22.
[0057] The above embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this application, and should all be included within the protection scope of this application.
Claims
1. A microreflector, characterized in that, include: A circuit board having a spaced first electrode and a second electrode, and an intermediate electrode surrounding the first electrode and the second electrode, the intermediate electrode separating the first electrode and the second electrode, the intermediate electrode having a support portion protruding from the circuit board, and the intermediate electrode also having opposing first landing portions and second landing portions located on both sides of the support portion; An actuator, which is supported on the support and is rotatable relative to the support; as well as A reflector, which is mounted on the actuator; The actuator, driven by the first electrode and / or the second electrode, causes the reflector to deflect and land on the first landing part or the second landing part during the deflection process.
2. The microreflector according to claim 1, characterized in that, The actuator includes a driven portion, a first bearing portion, and a second bearing portion. The driven portion is connected between the first bearing portion and the second bearing portion. The driven portion is rotatably connected to the support portion. The reflector is mounted on the first bearing portion and the second bearing portion. The first bearing portion is disposed opposite to the first electrode, and the second bearing portion is disposed opposite to the second electrode. The first bearing portion is used to drive the driven portion to deform and rotate toward the first landing portion when actuated by the first electrode. The second bearing portion is used to drive the driven portion to deform and rotate toward the second landing portion when actuated by the second electrode.
3. The microreflector according to claim 2, characterized in that, The first bearing portion has a first abutting portion at the end away from the driven portion, and the second bearing portion has a second abutting portion at the end away from the driven portion. When the actuator drives the reflector to land on the first landing portion, the first abutting portion abuts against the first landing portion. When the actuator drives the reflector to land on the second landing portion, the second abutting portion abuts against the second landing portion.
4. The microreflector according to claim 2, characterized in that, The support portion includes a first support column and a second support column spaced apart. The driven portion has a first end and a second end that are far apart from each other. The first end is connected to the first support column, and the second end is connected to the second support column.
5. The microreflector according to claim 4, characterized in that, The driven part includes a first rotating part, a second rotating part, and a connecting part. The connecting part is connected between the first bearing part and the second bearing part. The first rotating part and the second rotating part are disposed on both sides of the line connecting the first bearing part and the second bearing part. One end of the first rotating part is connected to the first support column, and the other end is connected to the connecting part. One end of the second rotating part is connected to the second support column, and the other end is connected to the connecting part.
6. The microreflector according to claim 5, characterized in that, The microreflector further includes a carrier, the reflector is mounted on the carrier, and the surface of the carrier away from the reflector is attached to the first carrier portion and the second carrier portion. The carrier has a notch, which corresponds to the first rotating portion and the second rotating portion.
7. The microreflector according to claim 6, characterized in that, The thickness of the bearing member is greater than the thickness of the actuator.
8. The microreflector according to claim 4, characterized in that, The cross-sectional area of the first support column and the second support column gradually increases from the end furthest from the circuit board to the end closest to the circuit board.
9. The microreflector according to claim 1, characterized in that, The surface of the intermediate electrode near the reflector is flush with the surfaces of the first electrode and the second electrode near the reflector.
10. A spatial light modulator, characterized in that, The spatial light modulator includes a plurality of microreflectors as described in any one of claims 1-9.
11. An optomechanical system, characterized in that, Including the spatial light modulator as described in claim 10.