Inclination adjusting device

Abstract

An inclination adjustment device (10) has a device base (20), a rocking body (30), a shaft (40), a shaft rocking part (60), and a control device (90). The shaft rocking part (60) rocks the shaft (40) such that an end surface of a crimping tool (A) attached to the rocking body (30) is inclined at a preset angle with respect to a reference surface (S). The shaft rocking part (60) has a movable member (61) provided to the shaft (40), an encoder (80), a plurality of permanent magnets (62), and a plurality of coils (64). The plurality of permanent magnets (62) are provided to one of the device base (20) and the movable member (61). The plurality of coils (64) are provided to the other of the device base (20) and the movable member (61).

Description

Tilt adjustment device

[0001] The present disclosure relates to a tilt adjustment device.

[0002] Conventionally, when bonding an IC chip to a substrate, a tilt adjustment device that adjusts the end face of a crimping tool to a desired angle with respect to a reference plane is known. The IC chip and the substrate are placed on the reference plane. For example, in Patent Document 1, a bonding device which is a tilt adjustment device is disclosed. The bonding device includes a spherical base, a following reference portion which is a crimping tool, and an X-Y table mechanism which is a shaft swing portion. The X-Y table mechanism has a horizontal movement table configured to be movable in the X-Y directions. The bonding device has a connection mechanism that connects the X-Y table mechanism and the spherical base. The connection mechanism includes a shaft portion composed of a shaft body and a sphere disposed on the lower surface of the spherical base, a cylindrical portion that slidably supports the shaft body, and a receiving portion that slidably holds the sphere. The bonding device adjusts the following reference portion to a desired angle by changing the tilt of the spherical base via the connection mechanism by the X-Y table mechanism.

[0003] Japanese Patent No. 5296395

[0004] In a tilt adjustment device, when a member that swings a swing body includes members that slide relative to each other, there is a risk that the accuracy of tilt adjustment of the swing body will decrease.

[0005] A tilt adjustment device according to one aspect of the present disclosure comprises a device base, a rocking body, a shaft, a shaft rocking part, and a control device. The device base has a base engagement surface which is either a concave spherical surface or a convex spherical surface. The rocking body has a rocking body engagement surface which engages with the base engagement surface, and is held so as to be rockable relative to the device base with the rocking body engagement surface facing the base engagement surface. The shaft is erected on the rocking body. The shaft rocking part rocks the shaft so that the end face of a crimping tool attached to the rocking body is tilted at a preset angle with respect to a reference surface. The control device is configured to control the shaft rocking part. The shaft rocking part comprises a movable member, an encoder, a plurality of permanent magnets, and a plurality of coils. The movable member is provided on the shaft. The encoder measures the displacement of the movable member relative to the device base. The plurality of permanent magnets are provided on either the device base or the movable member. The plurality of coils are provided on the other of the device base and the movable member. Each of the plurality of coils faces each of the plurality of permanent magnets. The control device is connected to the plurality of coils and is configured to control the current value supplied to the coils. The shaft oscillating part moves the movable member by the electromagnetic force generated by the permanent magnets and the coils, thereby positioning the movable member so that the end face is at the preset angle with respect to the reference plane within the measurement range of the encoder.

[0006] Figure 1 is an exploded perspective view showing the tilt adjustment device. Figure 2 is a cross-sectional view showing the tilt adjustment device and reference plane of Figure 1. Figure 3 is a cross-sectional view showing the tilt adjustment device and reference plane of Figure 1. Figure 4 is an enlarged cross-sectional view showing the tilt adjustment device of Figure 1. Figure 5 is a top view showing the tilt adjustment device of Figure 1. Figure 6 is a bottom view showing the tilt adjustment device of Figure 1. Figure 7 is an enlarged cross-sectional view showing the tilt adjustment device in a modified example.

[0007] The following describes one embodiment of the tilt adjustment device. <Overall view of the tilt adjustment device> As shown in Figures 1 and 2, the tilt adjustment device 10 includes a device base 20, a oscillating body 30, a shaft 40, a locking mechanism 50, a shaft oscillating part 60, and a control device 90.

[0008] <Device Base> The device base 20 includes a base body 201, a cover member 26, and an encoder mounting section 84. The base body 201 is block-shaped. The cover member 26 and the encoder mounting section 84 are fixed to the base body 201.

[0009] The base body 201 defines a housing space 20a. The housing space 20a penetrates the base body 201. Hereafter, the central axis of the base body 201 will be referred to as the base axis LB. The housing space 20a extends along the base axis LB so as to penetrate the base body 201. The base axis LB extends parallel to the opening direction of the housing space 20a. The direction in which the base axis LB extends will be referred to as the base axis direction D3. The base axis direction D3 is the axial direction of the device base 20. The base body 201 has a first base end face 21 at one end of the base axis direction D3 and a second base end face 22 at the other end of the base axis direction D3. The housing space 20a opens to the outside of the base body 201 at both the first base end face 21 and the second base end face 22. The first base end face 21 is the opposite side of the second base end face 22 in the base axial direction D3. A cover member 26 is attached to the second base end face 22.

[0010] As shown in Figure 2, the first base end face 21 has a base engagement surface 23. The base engagement surface 23 constitutes the central portion of the first base end face 21 when viewed from the base axis direction D3. The storage space 20a is open at the base engagement surface 23 of the first base end face 21.

[0011] The device base 20 has a base engagement surface 23 which is either a concave sphere or a convex sphere. In this embodiment, the base engagement surface 23 is a concave sphere. The base engagement surface 23 is the portion of the first base end surface 21 that is recessed compared to the surrounding area.

[0012] The device base 20 has a bulge 27. The bulge 27 is formed when a portion of the inner surface defining the housing space 20a in the base body 201 bulges inward toward the inside of the device base 20, i.e., toward the base axis LB. The bulge 27 is formed in the base axis direction D3, near the first base end face 21.

[0013] The device base 20 has a porous portion 24 in the base axial direction D3, closer to the first base end face 21 than the bulging portion 27. The porous portion 24 has a plurality of through holes (not shown). The porous portion 24 is annular. The porous portion 24 has a surface that is exposed to the outside of the housing space 20a. The base engagement surface 23 is formed by the surface of the porous portion 24 that is exposed to the outside of the housing space 20a.

[0014] The device base 20 has an air supply and exhaust chamber 20b for the bearing. The porous portion 24 and the bulging portion 27 define the air supply and exhaust chamber 20b for the bearing inside the device base 20. The air supply and exhaust chamber 20b for the bearing is defined by the fact that a recess formed in the bulging portion 27 is closed off by the porous portion 24. The air supply and exhaust chamber 20b for the bearing communicates with the outside of the device base 20 via the porous portion 24. The air supply and exhaust chamber 20b for the bearing communicates with the outside of the device base 20 through multiple through holes in the porous portion 24.

[0015] As shown in Figure 1, the outer surface of the device base 20 includes four base sides 25. Each base side 25 is different from the first base end face 21 and the second base end face 22. The device base 20 has a bearing port 25a, a locking port 25b, and an anti-rotation port 25c on one of the four base sides 25.

[0016] The four base sides 25 are parallel to the base axis direction D3. Of the four base sides 25, the direction perpendicular to the base side 25 having the bearing port 25a, the locking port 25b, and the anti-rotation port 25c is described as the first direction D1. The direction perpendicular to both the first direction D1 and the base axis direction D3 is described as the second direction D2.

[0017] As shown in Figure 2, the bearing port 25a communicates with the bearing air supply and exhaust chamber 20b through a passage formed inside the device base 20. The bearing port 25a is connected to a pressure supply source (not shown) located outside the device base 20. The pressure supply source is connected to the bearing air supply and exhaust chamber 20b via the bearing port 25a.

[0018] The locking port 25b is connected to the locking air supply and exhaust chamber 50a, described later, by a passage formed inside the device base 20. The locking port 25b is connected to a pressure supply source. The pressure supply source is connected to the locking air supply and exhaust chamber 50a via the locking port 25b.

[0019] The anti-rotation port 25c is connected to an anti-rotation passage 20c formed inside the device base 20. The anti-rotation port 25c connects the anti-rotation passage 20c to a pressure supply source. The anti-rotation passage 20c is open in the portion of the first base end face 21 other than the base engagement surface 23.

[0020] The bearing port 25a, the locking port 25b, and the anti-rotation port 25c may be connected to a single pressure supply source, or they may be connected to three different pressure supply sources. In this embodiment, the bearing port 25a, the locking port 25b, and the anti-rotation port 25c are connected to a single pressure supply source. The pressure supply source is configured to allow independent control of the pressure supplied to the bearing port 25a, the locking port 25b, and the anti-rotation port 25c.

[0021] The cover member 26 is made of a magnetic material. The cover member 26 is plate-shaped. The thickness direction of the cover member 26 coincides with the base axis direction D3. The cover member 26 is fixed to the device base 20 by four fixing members 26a shown in Figure 1. The cover member 26 closes the portion of the housing space 20a that opens to the second base end face 22.

[0022] The cover member 26 has an inner surface 261. The inner surface 261 is the surface facing the base body 201. As shown in Figure 1, the cover member 26 has a plurality of grooves 262 on the inner surface 261. The grooves 262 are recessed portions from the inner surface 261. The cover member 26 has eight grooves 262. The eight grooves 262 include four grooves 262 extending in a first direction D1 and four grooves 262 extending in a second direction D2. The eight grooves 262 are formed near the four edges of the cover member 26. Near each edge of the cover member 26, there are two grooves 262 extending in a direction perpendicular to that edge. In other words, the cover member 26 has four sets of two grooves 262.

[0023] The cover member 26 has magnetic biasing portions 263. The magnetic biasing portions 263 are formed on multiple parts of the cover member 26. The function of the magnetic biasing portions 263 will be described in detail later. In Figure 1, the magnetic biasing portions 263 are the parts of the cover member 26 indicated by the dashed lines. The cover member 26 has one magnetic biasing portion 263 between each pair of two groove portions 262. Furthermore, the cover member 26 has two magnetic biasing portions 263 on both sides of each pair of groove portions 262. In other words, the cover member 26 has three magnetic biasing portions 263 for each pair of groove portions 262.

[0024] The encoder mounting section 84 is a plate-shaped body provided inside the base body 201. The encoder mounting section 84 is interposed between the cover member 26 and the bulging section 27 in the base axial direction D3. The encoder mounting section 84 is spaced apart from the bulging section 27 and the cover member 26.

[0025] As shown in Figure 2, the device base 20 is provided with a cylindrical retaining member 28. The retaining member 28 is housed in the housing space 20a. The retaining member 28 is attached to the bulging portion 27. The retaining member 28 is held by the base body 201. The retaining member 28 holds a retaining magnet 281. The retaining magnet 281 is provided at the end of the retaining member 28 in the base axial direction D3.

[0026] <Oscillating Body and Shaft> The oscillating body 30 is cylindrical. The oscillating body 30 is magnetic. The oscillating body 30 has a tool mounting surface 31 and an oscillating body engagement surface 32 at both ends in the direction in which the central axis of the oscillating body 30 extends. In the direction in which the central axis of the oscillating body 30 extends, the oscillating body engagement surface 32 is the opposite surface of the tool mounting surface 31. The oscillating body engagement surface 32 faces the base engagement surface 23. The oscillating body 30 is positioned in line with the device base 20 in the base axis direction D3. The device base 20 and the oscillating body 30 are aligned on the central axis of the oscillating body 30.

[0027] The oscillating body 30 has a base portion 34. The base portion 34 forms the end of the oscillating body 30 located on the opposite side of the oscillating body engagement surface 32. The base portion 34 includes a tool mounting surface 31.

[0028] A crimping tool A is mounted on the tool mounting surface 31. The crimping tool A is shown by a dashed line in Figures 1 and 2. The crimping tool A has a crimping tool end face A1. The crimping tool end face A1 is the end face opposite the face facing the tool mounting surface 31. The tilt adjustment device 10 is positioned such that the crimping tool end face A1 is aligned with the reference surface S in the base axis direction D3.

[0029] The oscillating body engagement surface 32 is a convex spherical surface. The oscillating body engagement surface 32 engages with the base engagement surface 23. The radius of curvature of the base engagement surface 23 and the radius of curvature of the oscillating body engagement surface 32 are the same. Both the base engagement surface 23 and the oscillating body engagement surface 32 are parts of a sphere centered at the point where the central axis of the oscillating body 30 intersects with the end face A1 of the crimping tool.

[0030] As shown in Figure 1, the oscillating body 30 has one or more anti-rotation pins 33 on its outer circumferential surface. In this embodiment, the oscillating body 30 has two anti-rotation pins 33. Note that only one of the two anti-rotation pins 33 is shown in Figure 1. The anti-rotation pins 33 are cylindrical bodies protruding from the outer circumferential surface of the oscillating body 30. The anti-rotation pins 33 are magnetic. The central axis of the anti-rotation pins 33 is perpendicular to the central axis of the oscillating body 30. The other anti-rotation pin 33 is located on the central axis of the other anti-rotation pin 33.

[0031] As shown in Figure 2, the oscillating body 30 has a locking oscillating body chamber 30a. The locking oscillating body chamber 30a is open at the oscillating body engagement surface 32. A portion of the inner surface defining the locking oscillating body chamber 30a is the locking oscillating body inner surface 35. The locking oscillating body inner surface 35 faces the base portion 34 in the direction in which the central axis of the oscillating body 30 extends.

[0032] The shaft 40 is cylindrical. The shaft 40 is provided on the oscillating body 30. The shaft 40 protrudes from the oscillating body 30. The shaft 40 has a base end attached to the base portion 34, and a tip that protrudes from the oscillating body engagement surface 32 to the outside of the locking oscillating body chamber 30a. The tip of the shaft 40 protrudes from the locking oscillating body chamber 30a. The tip of the shaft 40 is inserted into the housing space 20a by passing through the inside of the holding member 28.

[0033] The oscillating body 30 is held to the device base 20 by the magnetic force of the holding magnet 281, with the tip of the shaft 40 inserted into the housing space 20a. The outer surface of the shaft 40 is spaced apart from other members within the housing space 20a. Therefore, the shaft 40 can oscillate within the housing space 20a without contacting other members. In conjunction with the oscillating of the shaft 40, the oscillating body 30 oscillates along the base engagement surface 23. In other words, the oscillating body 30 is held to swing relative to the device base 20.

[0034] The oscillating body 30 oscillates about the pivot axis C as its pivot point. The pivot axis C is an axis that passes through the center of curvature of the oscillating body engagement surface 32 and is perpendicular to the base axis LB. In other words, the pivot axis C is an axis that passes through the point where the central axis of the oscillating body 30 intersects with the crimping tool end face A1 and is perpendicular to the base axis LB. In Figures 2, 3, and 6, an example of a pivot axis C is shown, which extends in the second direction D2. In the cases of Figures 2, 3, and 6, the oscillating body 30 oscillates about the pivot axis C in the first direction D1. Note that the direction in which the pivot axis C extends is not limited to the second direction D2. The direction in which the pivot axis C extends is arbitrary as long as it is perpendicular to the base axis LB. In other words, the oscillating body 30 is held on the device base 20 so as to be able to swing about any axis that passes through the point where the base axis LB and the crimping tool end face A1 intersect, and is perpendicular to the base axis LB.

[0035] <Locking Mechanism> As shown in Figure 2, the locking mechanism 50 includes a locking piston 51, a locking shaft 52, and a locking retaining member 53.

[0036] The locking piston 51 has a piston body portion 511 housed in a housing space 20a and a piston connecting portion 512 protruding from the center of the piston body portion 511. The locking piston 51 is provided on the device base 20 so as to be able to reciprocate in the base axis direction D3.

[0037] The piston body portion 511 is a plate-shaped body. The thickness direction of the piston body portion 511 coincides with the base axis direction D3. The piston body portion 511 is aligned with the bulge portion 27 in the base axis direction D3. The piston body portion 511 has a first sealing member 54. The first sealing member 54 seals the space between the piston body portion 511 and the device base 20. The piston connecting portion 512 is a cylindrical body having a central axis that coincides with the base axis LB. Male threads are formed on the outer circumferential surface of the piston connecting portion 512. The piston connecting portion 512 penetrates the holding member 28. The tip of the piston connecting portion 512 is inserted into the locking oscillating chamber 30a.

[0038] The locking shaft 52 is cylindrical. The locking shaft 52 is connected to the piston connecting portion 512 by an internal thread on its inner circumference. The locking shaft 52 moves in conjunction with the locking piston 51. The locking shaft 52 passes through the retaining member 28. One end of the locking shaft 52 is inserted into the locking oscillating body chamber 30a. The space between the locking shaft 52 and the retaining member 28 is sealed by the second sealing member 55. The locking shaft 52 has a locking convex spherical surface 521 on the outer circumference of the end inserted into the locking oscillating body chamber 30a.

[0039] The device base 20 has a locking air supply and discharge chamber 50a. The locking air supply and discharge chamber 50a is defined by a bulge 27, a retaining member 28, a locking piston 51, and a locking shaft 52. The first sealing member 54 and the second sealing member 55 prevent the exchange of air between the locking air supply and discharge chamber 50a and the housing space 20a.

[0040] The shaft 40 passes through the locking piston 51 and the locking shaft 52. The inner surfaces of the locking piston 51 and the locking shaft 52 surround the shaft 40, spaced apart from its outer surface. The shaft 40 is oscillating without contacting the locking piston 51 and the locking shaft 52.

[0041] The locking retaining member 53 is provided at the end of the locking shaft 52 that is inserted into the locking oscillating body chamber 30a. The locking retaining member 53 is housed in the locking oscillating body chamber 30a. The locking retaining member 53 has a retaining flange portion 56. The retaining flange portion 56 is formed by a bulge in a portion of the outer circumferential surface of the locking retaining member 53. The retaining flange portion 56 has a contact surface 561 that faces the inner surface 35 of the locking oscillating body.

[0042] The locking holding member 53 has a concave spherical surface 531 for locking. The concave spherical surface 531 for locking is a part of the inner peripheral surface of the locking holding member 53. The concave spherical surface 531 for locking is engaged with the convex spherical surface 521 for locking. The locking holding member 53 is attached to the locking shaft 52 so as to be swingable. Each of the convex spherical surface 521 for locking and the concave spherical surface 531 for locking is a part of a spherical surface centered at a point where the base axis LB intersects a virtual plane including the contact surface 561.

[0043] <Anti-rotation ring> As shown in FIGS. 1 and 2, the apparatus base 20 has an anti-rotation ring 57. The anti-rotation ring 57 is an annular body. The anti-rotation ring 57 is installed on the first base end face 21. The cover member 26 is provided on the opposite side of the anti-rotation ring 57 with respect to the apparatus base 20. The anti-rotation ring 57 surrounds the swing body 30. The anti-rotation ring 57 has a ring end face 571 facing the first base end face 21. A flange is formed on the anti-rotation ring 57 so as to expand the area of the ring end face 571. The ring end face 571 and the first base end face 21 can be in contact with each other so as to form a metal touch seal.

[0044] As shown in FIGS. 1 and 6, the anti-rotation ring 57 is attached to the apparatus base 20 by two ring holding pins 58. The ring holding pins 58 are magnetic bodies. The ring holding pins 58 penetrate the anti-rotation ring 57 and have tip portions inserted into the apparatus base 20 from the first base end face 21. The ring holding pins 58 have flange portions 581 shown in FIG. 6 at their base ends. The anti-rotation ring 57 has holes (not shown) through which the ring holding pins 58 penetrate, and the holes are elongated holes extending in the radial direction of the anti-rotation ring 57. The elongated holes are formed in the flange of the anti-rotation ring 57. The anti-rotation ring 57 is slidable with respect to the apparatus base 20 by allowing relative movement between the elongated holes and the ring holding pins 58.

[0045] The anti-rotation ring 57 is non-rotatably attached to the end of the device base 20. The anti-rotation ring 57 is attached to the device base 20 so as to be reciprocable in the direction in which the ring holding pin 58 extends. The anti-rotation ring 57 is supported by the flange portion 581 of the ring holding pin 58 on the opposite surface of the ring end face 571. The anti-rotation ring 57 can take a separated state in which the ring end face 571 is separated from the device base 20, or a contact state in which the ring end face 571 contacts the first base end face 21. The anti-rotation ring 57 transitions from the separated state to the contact state, or vice versa, by reciprocating in the direction in which the ring holding pin 58 extends.

[0046] As shown in FIG. 2, the anti-rotation ring 57 has a ring groove portion 573 on the ring end face 571. The ring groove portion 573 opens toward the first base end face 21. The ring groove portion 573 is formed over the entire circumference in the circumferential direction of the anti-rotation ring 57. A part of the ring groove portion 573 is aligned with the portion of the first base end face 21 where the anti-rotation passage 20c opens in the base axis direction D3.

[0047] As shown in FIGS. 1 and 6, the anti-rotation ring 57 has two notch portions 574 formed by cutting away the opposite surface of the ring end face 571. In FIG. 1, only one of the two notch portions 574 is shown. In the anti-rotation ring 57, the straight line connecting the two notch portions 574 is orthogonal to the straight line connecting the two long holes through which the two ring holding pins 58 penetrate respectively. The anti-rotation pins 33 are inserted through each of the two notch portions 574.

[0048] The anti-rotation ring 57 has two notch portions 574. Each notch portion 574 is engaged with one anti-rotation pin 33. That is, the anti-rotation ring 57 is formed with notch portions 574 that engage with each of the two anti-rotation pins 33. The tip of the anti-rotation pin 33 protrudes radially from the outer peripheral surface of the anti-rotation ring 57, that is, from the notch portion 574.

[0049] As shown in Figure 6, the anti-rotation ring 57 has two first anti-rotation magnets 575 and two second anti-rotation magnets 576. The first anti-rotation magnets 575 are provided in the circumferential direction of the anti-rotation ring 57 in the portions adjacent to each notch 574. The first anti-rotation magnets 575 attract the portion of the anti-rotation pin 33 that protrudes from the notch 574 by magnetic force. The two first anti-rotation magnets 575 are arranged so as to rotate the oscillating body 30 in the circumferential direction of the anti-rotation ring 57 by this magnetic force. When the anti-rotation ring 57 is viewed from the base axis direction D3, each first anti-rotation magnet 575 is interposed between the two notches 574 in the circumferential direction of the anti-rotation ring 57.

[0050] The second anti-rotation magnet 576 is provided on the opposite side of the ring end face 571. Each second anti-rotation magnet 576 is provided in the circumferential direction of the anti-rotation ring 57 in a portion adjacent to one of the ring retaining pins 58. The second anti-rotation magnet 576 attracts the adjacent ring retaining pin 58 by magnetic force. When the anti-rotation ring 57 is viewed from the base axis direction D3, each second anti-rotation magnet 576 is interposed between the two ring retaining pins 58 in the circumferential direction of the anti-rotation ring 57. The second anti-rotation magnet 576 generates a magnetic force that can rotate the anti-rotation ring 57 in the circumferential direction. Due to this magnetic force, the anti-rotation ring 57 presses the inner circumferential surface of the elongated hole through which the ring retaining pin 58 passes against the ring retaining pin 58.

[0051] <Shaft Oscillating Section> As shown in Figures 1 and 2, the shaft oscillating section 60 includes a movable member 61, two first drive units 71, two second drive units 72, and an encoder 80. The shaft oscillating section 60 is located in the housing space 20a, in the portion closer to the second base end face 22.

[0052] As shown in Figure 1, the movable member 61 is a plate-like body. The movable member 61 is cross-shaped. The movable member 61 has portions extending in a first direction D1 and a second direction D2. The movable member 61 is provided on the shaft 40. The thickness direction of the movable member 61 coincides with the direction in which the central axis of the shaft 40 extends.

[0053] As shown in Figure 2, the movable member 61 is attached to the tip of the shaft 40 and is housed in the housing space 20a. Hereafter, the portion of the housing space 20a in which the movable member 61 is housed will be referred to as the gap 20d. The gap 20d is the portion of the housing space 20a closer to the second base end face 22.

[0054] The movable member 61 is interposed between the cover member 26 and the locking piston 51 in the base axial direction D3. The movable member 61 is attached to the portion of the shaft 40 that protrudes from the locking piston 51.

[0055] As shown in Figure 1, the movable member 61 has two first mounting portions 611 and two second mounting portions 612. The two first mounting portions 611 and the two second mounting portions 612 are located on the surface of the movable member 61 that faces the cover member 26 in the thickness direction.

[0056] The two first mounting parts 611 are aligned in the second direction D2. The two first mounting parts 611 are spaced apart in the second direction D2. The two first mounting parts 611 are provided near the two edges of the movable member 61 in the second direction D2.

[0057] The two second mounting portions 612 are aligned in the first direction D1. The two second mounting portions 612 are spaced apart in the first direction D1. The two second mounting portions 612 are provided near the two edges of the movable member 61 in the first direction D1.

[0058] As shown in Figures 1 and 2, each first drive unit 71 is composed of a plurality of permanent magnets 62 installed on one first mounting part 611, and a plurality of coils 64 facing those permanent magnets 62. Each second drive unit 72 is composed of a plurality of permanent magnets 62 installed on one second mounting part 612, and a plurality of coils 64 facing those permanent magnets 62. In other words, the shaft oscillating unit 60 has a plurality of permanent magnets 62 and a plurality of coils 64. The permanent magnets 62 and coils 64 constituting the first drive unit 71 are the first permanent magnets 62 and the first coils 64. The permanent magnets 62 and coils 64 constituting the second drive unit 72 are the second permanent magnets 62 and the second coils 64.

[0059] In this embodiment, the shaft oscillating section 60 has 12 permanent magnets 62 and 8 coils 64. In this specification, a loop-shaped body formed by winding a conductor wire around a single axis one or more times forms one coil 64.

[0060] The permanent magnet 62 and coil 64 constituting one of the two first drive units 71 are different from the permanent magnet 62 and coil 64 constituting the other first drive unit 71. Similarly, the permanent magnet 62 and coil 64 constituting one of the two second drive units 72 are different from the permanent magnet 62 and coil 64 constituting the other second drive unit 72. The permanent magnet 62 and coil 64 constituting the two first drive units 71 are different from the permanent magnet 62 and coil 64 constituting the two second drive units 72.

[0061] In the shaft oscillating section 60, the multiple permanent magnets 62 are provided on either the device base 20 or the movable member 61, while the multiple coils 64 are provided on the other of the device base 20 or the movable member 61. In this embodiment, the multiple permanent magnets 62 are provided on the movable member 61, and the multiple coils 64 are provided on the device base 20.

[0062] <Permanent Magnets> The permanent magnets 62 are long, plate-shaped bodies. The permanent magnets 62 have two surfaces in the thickness direction, one of which is the north pole surface and the other is the south pole surface. Three permanent magnets 62 provided in one first mounting section 611 constitute one first drive section 71, and three permanent magnets 62 provided in the other first mounting section 611 constitute the other first drive section 71. The permanent magnets 62 provided in one second mounting section 612 constitute one second drive section 72, and the permanent magnets 62 provided in the other second mounting section 612 constitute the other second drive section 72.

[0063] The thickness direction of each permanent magnet 62 coincides with the thickness direction of the movable member 61. The permanent magnet 62 has a magnetic pole surface facing the movable member 61 and a magnetic pole surface on the opposite side of the movable member 61, i.e., an exposed magnetic pole surface. The three permanent magnets 62 in each first mounting section 611 include one permanent magnet 62 having an exposed north pole surface and two permanent magnets 62 having exposed south pole surfaces. In each first mounting section 611, the one permanent magnet 62 having an exposed north pole surface is interposed between the two permanent magnets 62 having exposed south pole surfaces in the first direction D1.

[0064] Each second mounting section 612 includes three permanent magnets 62, one having an exposed north pole, and two permanent magnets 62 having exposed south poles. In each second mounting section 612, the one permanent magnet 62 having an exposed north pole is interposed between the two permanent magnets 62 having exposed south poles in the second direction D2.

[0065] <Coils> Multiple coils 64 are provided on a substrate 63 installed on the cover member 26. The thickness direction of the substrate 63 coincides with the base axis direction D3. Multiple coils 64 are provided on the surface of the substrate 63 opposite to the surface facing the cover member 26.

[0066] The substrate 63 and the multiple coils 64 are interposed between the permanent magnet 62 and the cover member 26 in the base axis direction D3. In other words, the multiple permanent magnets 62 are interposed between the multiple coils 64 and the oscillating body 30 in the base axis direction D3.

[0067] Multiple coils 64 are provided on the substrate 63 at positions facing multiple permanent magnets 62. Two coils 64 constituting the first drive unit 71 are installed on the portion of the substrate 63 facing each first mounting portion 611. The two coils 64 face the three permanent magnets 62 installed on the first mounting portion 611. The two coils 64 of the first drive unit 71 are aligned in a first direction D1 on the substrate 63. The two first drive units 71 are aligned in a second direction D2. The shaft 40 is interposed between one first drive unit 71 and the other first drive unit 71.

[0068] Two coils 64 constituting the second drive unit 72 are installed on the portion of the substrate 63 facing each second mounting portion 612. The two coils 64 face the three permanent magnets 62 installed on the second mounting portion 612. The two coils 64 of the second drive unit 72 are aligned in the second direction D2 on the substrate 63. The two second drive units 72 are aligned in the first direction D1. The shaft 40 is interposed between one second drive unit 72 and the other second drive unit 72.

[0069] As described above, four pairs of coils 64 are provided on the substrate 63. Each pair of coils 64 faces three permanent magnets 62 in the base axis direction D3. As shown in Figure 5, each permanent magnet 62 is aligned with a portion of the opposing coil 64 in the base axis direction D3. The portion of the coil 64 that faces the permanent magnet 62 is the portion that extends in the longitudinal direction of the coil 64. More specifically, in the case of the three permanent magnets 62 installed in the first installation section 611, each permanent magnet 62 faces the portion of the opposing coil 64 that extends in the second direction D2 in the thickness direction. In the case of the three permanent magnets 62 installed in the second installation section 612, each permanent magnet 62 faces the portion of the opposing coil 64 that extends in the first direction D1 in the thickness direction. In Figure 5, the cover member 26 is not shown, and the substrate 63 is shown by a dashed line.

[0070] As shown in Figure 1, the substrate 63 protrudes outside the housing space 20a by passing through one of the base side surfaces 25. The base side surface 25 through which the substrate 63 passes is provided with a bearing port 25a, a locking port 25b, and an anti-rotation port 25c. The substrate 63 has a substrate connection portion 631 in the portion that protrudes from the housing space 20a. Power is supplied to the substrate 63 via the substrate connection portion 631. The power supplied to the substrate 63 is then supplied to each coil 64.

[0071] When power is supplied to the coil 64 constituting the first drive unit 71, an electromagnetic force acts on the permanent magnet 62 on the first mounting part 611. This electromagnetic force is caused by the magnetic force of the permanent magnet 62 on the first mounting part 611 and the current flowing in the second direction D2 through the coil 64 facing the permanent magnet 62. The magnetic field lines originating from the permanent magnet 62 extend from the exposed magnetic pole surface in the base axis direction D3. Therefore, an electromagnetic force in the first direction D1 acts on the permanent magnet 62. In other words, an electromagnetic force in the first direction D1 acts on the permanent magnet 62 constituting the first drive unit 71. As a result, the first drive unit 71 moves the movable member 61 in the first direction D1.

[0072] When power is supplied to the coil 64 constituting the second drive unit 72, an electromagnetic force acts on the permanent magnet 62 of the second mounting unit 612. This electromagnetic force is caused by the magnetic force of the permanent magnet 62 of the second mounting unit 612 and the current flowing in the first direction D1 through the coil 64 facing the permanent magnet 62. The magnetic field lines originating from the permanent magnet 62 extend from the exposed magnetic pole surface in the base axis direction D3. Therefore, an electromagnetic force in the second direction D2 acts on the permanent magnet 62. In other words, an electromagnetic force in the second direction D2 acts on the permanent magnet 62 constituting the second drive unit 72. As a result, the second drive unit 72 moves the movable member 61 in the second direction D2.

[0073] Magnetic flux from the permanent magnet 62 flows through the cover member 26. The cover member 26 and the permanent magnet 62 constitute a magnetic circuit. For example, the magnetic flux emitted from the permanent magnet 62 having an exposed north pole surface passes through the cover member 26 and enters the permanent magnet 62 adjacent to the permanent magnet 62 having an exposed north pole surface and an exposed south pole surface. Therefore, the portion of the cover member 26 facing the permanent magnet 62 has a magnetic pole opposite to the magnetic pole of the exposed surface of the permanent magnet 62.

[0074] The magnetic biasing portion 263 is located on the surface of the cover member 26 that faces the permanent magnet 62 via the coil 64. The cover member 26 has one magnetic biasing portion 263 for each permanent magnet 62. Each magnetic biasing portion 263 is the portion of the cover member 26 that is magnetized by the opposing permanent magnet 62. For example, the magnetic biasing portion 263 facing the north pole surface of the permanent magnet 62 is the south pole surface. Also, the magnetic biasing portion 263 facing the south pole surface of the permanent magnet 62 is the north pole surface.

[0075] As shown in Figure 1, each magnetic biasing unit 263 is positioned on the cover member 26 so as not to be directly facing the permanent magnet 62. Each magnetic biasing unit 263 is positioned at a certain angle relative to the corresponding permanent magnet 62 around the base axis LB.

[0076] <Encoder> As shown in Figure 1, the encoder 80 includes an encoder substrate 81, a first detection unit 821, a second detection unit 822, a first encoder scale 831, and a second encoder scale 832. The encoder 80 is optical. The encoder 80 is mounted on the device base 20. The encoder 80 is interposed between the locking piston 51 and the movable member 61 in the base axial direction D3.

[0077] The encoder board 81 is installed in the encoder mounting section 84. The encoder mounting section 84 is provided on the base body 201. The encoder mounting section 84 is interposed between the locking piston 51 and the movable member 61 in the base axial direction D3. The encoder mounting section 84 has the encoder board 81. The encoder board 81 is located on the surface of the encoder mounting section 84 that faces the movable member 61. The encoder board 81 is interposed between the encoder mounting section 84 and the movable member 61.

[0078] The encoder board 81 and the encoder mounting section 84 are spaced apart from the locking piston 51 and the movable member 61 in the base axis direction D3. The encoder board 81 and the encoder mounting section 84 are positioned so as not to interfere with the operation of the movable member 61 and the locking piston 51, respectively. The shaft 40 passes through the encoder board 81 and the encoder mounting section 84.

[0079] The first detection unit 821 and the second detection unit 822 are installed on the surface of the encoder substrate 81 facing the movable member 61. The first detection unit 821 is aligned with one of the two second mounting units 612 in the base axis direction D3. The second detection unit 822 is aligned with one of the two first mounting units 611 in the base axis direction D3.

[0080] The first encoder scale 831 and the second encoder scale 832 are installed on the movable member 61. The first encoder scale 831 and the second encoder scale 832 are installed on the portion of the movable member 61 facing the encoder substrate 81. The first encoder scale 831 and the second encoder scale 832 are elongated plate-shaped bodies. The thickness direction of the first encoder scale 831 coincides with the thickness direction of the movable member 61, and the longitudinal direction of the first encoder scale 831 coincides with the first direction D1. The thickness direction of the second encoder scale 832 coincides with the thickness direction of the movable member 61, and the longitudinal direction of the second encoder scale 832 coincides with the second direction D2.

[0081] The first encoder scale 831 is aligned with the first detection unit 821 in the base axis direction D3. The second encoder scale 832 is aligned with the second detection unit 822 in the base axis direction D3.

[0082] The first detection unit 821 and the first encoder scale 831 are arranged on a line extending in a first direction D1 through the geometric center of the movable member 61 when the movable member 61 is viewed from the base axis direction D3. The second detection unit 822 and the second encoder scale 832 are arranged on a line extending in a second direction D2 through the geometric center of the movable member 61 when the movable member 61 is viewed from the base axis direction D3.

[0083] The encoder 80 measures the displacement of the movable member 61 relative to the device base 20. The encoder 80 measures the displacement of the movable member 61 in a first direction D1 using the first detection unit 821 and the first encoder scale 831. The encoder 80 measures the displacement of the movable member 61 in a second direction D2 using the second detection unit 822 and the second encoder scale 832. The encoder 80 measures the displacement of the movable member 61 by measuring the encoder value and reference value, which will be described later, in each of the first direction D1 and the second direction D2.

[0084] The range in which the encoder 80 can measure the displacement of the movable member 61 is the range in which the first detection unit 821 and the first encoder scale 831 overlap when viewed from the base axis direction D3, and the range in which the second detection unit 822 and the second encoder scale 832 overlap.

[0085] The encoder board 81 protrudes outside the housing space 20a by passing through one of the base side surfaces 25. The base side surface 25 through which the encoder board 81 passes is provided with a bearing port 25a, a locking port 25b, and an anti-rotation port 25c. The encoder board 81 has a signal output unit 811 in the portion that protrudes from the housing space 20a. The signal output unit 811 outputs a signal indicating the measurement value from the encoder 80, that is, a signal indicating the displacement of the movable member 61 in the first direction D1 and the second direction D2, respectively.

[0086] The displacement of the movable member 61 is the distance from the movable member 61 in the reference state to the movable member 61 in the state that has moved from the reference state. In this embodiment, the reference state is the state in which the thickness direction of the movable member 61 coincides with the base axis direction D3. However, the setting of the reference state is not limited to this.

[0087] The encoder 80 measures the displacement of the movable member 61 by acquiring a reference value indicating the position of the movable member 61 in a reference state and an encoder value indicating the position of the movable member 61 at each time interval measured at regular time intervals. The time interval at which the encoder 80 acquires the encoder value is arbitrary. The reference value and the encoder value are defined by axes extending in the first direction D1 and the second direction D2, respectively.

[0088] Multiple permanent magnets 62, multiple coils 64, and encoder 80 are arranged spaced apart from each other in the base axis direction D3. Therefore, the movable member 61 can operate within the gap 20d shown in Figure 2 in the first direction D1, the second direction D2, and the base axis direction D3 without sliding against other members of the tilt adjustment device 10.

[0089] The range in which the shaft oscillating unit 60 operates the movable member 61 in the first direction D1 and the second direction D2 is the range in which the displacement of the movable member 61 can be measured by the first detection unit 821 and the second detection unit 822.

[0090] <Control device> As shown in Figures 2 and 3, the control device 90 includes a drive amount calculation unit 91 and a current control unit 92. The control device 90 is connected to a sensor (not shown) and is configured to receive measurement values ​​obtained by the sensor. In this embodiment, the measurement values ​​obtained by the sensor are the inclination direction and inclination angle of the crimping tool end face A1 with respect to the reference plane S. Alternatively, the measurement values ​​obtained by the sensor may be the distances from the reference plane S at multiple points on the crimping tool end face A1. In this case, the control device 90 is configured to calculate the inclination direction and inclination angle of the crimping tool end face A1 with respect to the reference plane S from the distances received from the sensor.

[0091] The sensor can be installed at any location that allows measurement of the inclination direction and inclination angle of the crimping tool end face A1 relative to the reference surface S. For example, the sensor may be installed on the crimping tool A or on the reference surface S. Alternatively, the sensor may be installed outside the tilt adjustment device 10 and in a location different from the reference surface S. The sensor only needs to be installed at a location that allows measurement of the physical quantities necessary for the control device 90 to acquire the inclination direction and inclination angle of the crimping tool end face A1 relative to the reference surface S.

[0092] The control device 90 is connected to the circuit board 63. The control device 90 is connected to the circuit board connection part 631 and controls the current value supplied to the circuit board 63. By controlling the current value supplied to the circuit board 63, the control device 90 controls the current flowing through the coil 64. In this way, the control device 90 controls the magnitude and direction of the electromagnetic force in the movable member 61. The control device 90 controls the operation of the movable member 61. In this manner, the control device 90 controls the shaft oscillating part 60.

[0093] The control device 90 is connected to the encoder 80. The control device 90 is connected to the signal output unit 811. The control device 90 receives the displacement of the movable member 61 output from the signal output unit 811. The control device 90 receives the reference value and encoder value of the movable member 61. The control device 90 receives the encoder value each time the encoder 80 measures the encoder value of the movable member 61. The control device 90 controls the movement of the movable member 61 by referring to the displacement of the movable member 61 by the encoder 80, thereby positioning the movable member 61.

[0094] The control device 90 has a processor and a memory unit. The processor may be, for example, a CPU (Central Processing Unit), a GPU (Graphics Processing Unit), or a DSP (Digital Signal Processor). The memory unit includes RAM (Random Access Memory) and ROM (Read Only Memory). The memory unit stores program code or commands configured to cause the processor to execute processing. The processor in the control device 90 functions as a drive amount calculation unit 91 and a current control unit 92 by executing the program code or commands in the memory unit. The memory unit, i.e., the computer-readable medium, includes any available medium accessible by a general-purpose or dedicated computer. The control device 90 may also be composed of hardware circuits such as an ASIC (Application Specific Integrated Circuit) or an FPGA (Field Programmable Gate Array). The control device 90, which is a processing circuit, may include one or more processors operating according to a computer program, one or more hardware circuits such as an ASIC or FPGA, or a combination thereof.

[0095] The drive amount calculation unit 91 calculates the amount by which the movable member 61 should move in order to tilt the crimping tool end face A1 to a preset angle with respect to the reference surface S, based on the measurement values ​​received from the sensor. Hereafter, the position that the movable member 61 should reach by moving based on the amount calculated by the drive amount calculation unit 91 will be referred to as the target value. In other words, the target value is a value relating to the position of the movable member 61 when the crimping tool end face A1 is tilted to a preset angle with respect to the reference surface S. The target value is defined by the axes extending in the first direction D1 and the second direction D2, respectively. Before calculating the amount by which the movable member 61 should move, a reference value is set for the target value in the drive amount calculation unit 91.

[0096] The control device 90 is connected to a plurality of coils 64 and is configured to control the current value supplied to the coils 64. The control device 90 controls the current value supplied to each coil 64 by the current control unit 92. In this specification, "current value" means information including the magnitude and direction of the current.

[0097] The current value that the current control unit 92 supplies to each coil 64 is calculated by the drive amount calculation unit 91. The drive amount calculation unit 91 calculates the current value to supply to each coil 64 so that the movable member 61 moves in a direction that reduces the difference between the target value and the encoder value. The drive amount calculation unit 91 individually calculates the current value to supply to the coil 64 included in the first drive unit 71 and the coil 64 included in the second drive unit 72. The current control unit 92 supplies current to each coil 64 based on the results calculated by the drive amount calculation unit 91.

[0098] The drive amount calculation unit 91 individually calculates the current value to be supplied to the coil 64 included in the first drive unit 71 and the current value to be supplied to the coil 64 included in the second drive unit 72. The control device 90 may have two drive amount calculation units 91. In this case, one drive amount calculation unit 91 calculates the current value to be supplied to the coil 64 of the first drive unit 71, and the other drive amount calculation unit 91 calculates the current value to be supplied to the coil 64 of the second drive unit 72.

[0099] The current control unit 92 supplies current to the first drive unit 71 and the second drive unit 72, respectively. The control device 90 may have two current control units 92. In this case, one current control unit 92 controls the current supplied to the coil 64 of the first drive unit 71, while the other current control unit 92 controls the current supplied to the coil 64 of the second drive unit 72.

[0100] When the control device 90 maintains the reference state of the movable member 61, it performs positioning servo control using the drive amount calculation unit 91 and the current control unit 92. The movable member 61 operates by the electromagnetic force generated by the current supplied to each coil 64 and the magnetic force of the permanent magnet 62. When the movable member 61 is positioned in the reference state, the control device 90 supplies current to each coil 64 using the current control unit 92 so that the deviation between the encoder value and the reference value is less than or equal to a specified value. The "deviation" between the two values ​​is the magnitude of the difference between the two values. The "specified value" is a value that is set in advance and corresponds to the magnitude of the deviation that is allowed.

[0101] In this specification, "positioning servo control" refers to a control method in which the control device 90 supplies current to each coil 64 in order to position the movable member 61. <Operation of the tilt adjustment device> As shown in Figures 2 and 3, the tilt adjustment device 10 uses the shaft oscillating unit 60 to oscillate the shaft 40 so that the end face A1 of the crimping tool A attached to the oscillating body 30 is tilted at a preset angle with respect to the reference plane S. The shaft oscillating unit 60 positions the movable member 61 in the first direction D1 and the second direction D2 by operating the movable member 61 in the first direction D1 and the second direction D2. By operating the movable member 61, the tilt of the end face A1 of the crimping tool with respect to the reference plane S is adjusted. In this embodiment, the preset angle is zero degrees. In other words, the shaft oscillating unit 60 oscillates the shaft 40 so that the end face A1 of the crimping tool is parallel to the reference plane S. The following describes the operation of the tilt adjustment device 10 to make the crimping tool end face A1 parallel to the reference plane S. Figure 3 shows the tilt adjustment device 10 in a state where the crimping tool end face A1 is parallel to the reference plane S.

[0102] As shown in Figure 2, when the tilt adjustment device 10 is in its initial position, the crimping tool end face A1 and the reference surface S are spaced apart from each other and arranged to lie on the base axis LB. A sensor (not shown) measures the tilt direction and tilt angle of the crimping tool end face A1 with respect to the reference surface S in the initial position. The sensor outputs the measured values ​​to the control device 90. In this embodiment, the reference surface S is tilted with respect to the crimping tool end face A1 in the initial position when viewed from the second direction D2.

[0103] When the tilt adjustment device 10 is in its initial position, a pressure supply source (not shown) pressurizes the bearing air supply and discharge chamber 20b via the bearing port 25a. The gap between the base engagement surface 23 and the oscillating body engagement surface 32 is pressurized. As a result, the oscillating body 30 moves away from the device base 20. The oscillating body 30 is attracted to the device base 20 by the magnetic force of the holding magnet 281. The magnetic force of the permanent magnet 62 and the cover member 26 acts on the oscillating body 30, the shaft 40, and the movable member 61 in the direction from the first base end face 21 to the second base end face 22. As a result, the oscillating body 30 maintains a state in which the oscillating body engagement surface 32 is slightly separated from the base engagement surface 23.

[0104] In the initial position, the pressure supply source creates a negative pressure in the locking air supply / discharge chamber 50a via the locking port 25b. As a result, the locking piston 51 comes into contact with the bulging portion 27. The locking holding member 53 is spaced apart from the oscillating body 30 in the base axis direction D3.

[0105] In the initial position, the pressure supply source does not apply pressure to or depressurize the anti-rotation passage 20c via the anti-rotation port 25c. In the initial position, the movable member 61 is in the reference state. In the initial position, the control device 90 supplies current to the multiple coils 64. Specifically, the control device 90 performs positioning servo control so that the movable member 61 maintains the reference state. At this time, the drive amount calculation unit 91 has set a reference value as the target value.

[0106] The drive amount calculation unit 91 of the control device 90 calculates a target value for the movable member 61 required for the crimping tool end face A1 to be parallel to the reference plane S, based on the input measurement value. In the drive amount calculation unit 91, the target value is updated from the reference value to the target value for the movable member 61 required for the crimping tool end face A1 to be parallel to the reference plane S. When the target value is updated, the current control unit 92 changes the direction and magnitude of the current supplied from a power supply (not shown) to the substrate 63 via the substrate connection unit 631. As a result, the movable member 61 moves from the reference value toward the target value.

[0107] The control device 90 moves the movable member 61 until the encoder value of the movable member 61 matches the target value within a specified range. During the movement of the movable member 61, each time the control device 90 receives an encoder value from the encoder 80, the drive amount calculation unit 91 calculates the deviation between the target value and the encoder value. The control device 90 compares the deviation between the target value and the encoder value with a specified value. When the deviation is greater than the specified value, the drive amount calculation unit 91 calculates the current value to supply to each coil 64 so that the value of the deviation becomes smaller. The current control unit 92 supplies current to each coil 64 from a power supply (not shown) based on the current value calculated by the drive amount calculation unit 91.

[0108] The control device 90 controls the current supplied by the current control unit 92 to move the movable member 61 so that the encoder value of the movable member 61 becomes the target value. The movement by the control device 90 is carried out until the deviation between the encoder value and the target value falls below a specified value.

[0109] When the deviation between the encoder value and the target value falls below a specified value, the control device 90 controls the current supplied to each coil 64 to maintain the movable member 61 in the target value position. In other words, the control device 90 performs positioning servo control to prevent the movable member 61 from moving once the encoder value reaches the target value.

[0110] As described above, the shaft oscillating section 60 positions the movable member 61 such that the end face A1 of the crimping tool is at a preset angle with respect to the reference surface S within the measurement range of the encoder 80.

[0111] When the tilt adjustment device 10 is operating, current flows through the multiple coils 64 included in the shaft oscillating section 60 via the substrate 63. In other words, the multiple coils 64 are energized. The value of the current flowing through each coil 64 differs depending on whether the coil 64 is included in the first drive unit 71 or the second drive unit 72.

[0112] An electromagnetic force acts on the permanent magnet 62 included in the first drive unit 71, corresponding to the magnitude of the current flowing through the coil 64 included in the first drive unit 71. The magnetic force of the permanent magnet 62 does not change due to the operation of the tilt adjustment device 10. Therefore, the magnitude of the electromagnetic force is determined by the value of the current flowing through the coil 64. Similarly, an electromagnetic force acts on the permanent magnet 62 included in the second drive unit 72, corresponding to the magnitude of the current flowing through the coil 64 included in the second drive unit 72. Since the permanent magnet 62 is fixed to the movable member 61, the electromagnetic force acting on the permanent magnet 62 also acts on the movable member 61. In this way, the movable member 61 moves due to the electromagnetic force.

[0113] The first drive unit 71 moves the movable member 61 in a first direction D1 by the electromagnetic force acting on the permanent magnet 62. The second drive unit 72 moves the movable member 61 in a second direction D2 by the electromagnetic force acting on the permanent magnet 62. As the movable member 61 moves in the first direction D1 and the second direction D2, it causes the shaft 40 and the oscillating body 30 to oscillate. As a result, the crimping tool A oscillates in a direction in which the end face A1 of the crimping tool becomes parallel to the reference plane S.

[0114] The oscillation of the oscillating body 30 causes the first mounting portion 611 and the second mounting portion 612 to move in the base axis direction D3. The movable member 61 moves in the base axis direction D3 within the gap 20d without sliding against other members. In this way, the shaft oscillating portion 60 allows the movable member 61 to move in the base axis direction D3 through the gap 20d.

[0115] <Operation of the Locking Mechanism> As shown in Figures 3 and 4, the tilt adjustment device 10 maintains the state in which the crimping tool end face A1 is parallel to the reference plane S by the locking mechanism 50. The locking mechanism 50 restricts the movement of the oscillating body 30 relative to the device base 20. In other words, the locking mechanism 50 maintains the oscillating body posture of the oscillating body 30, which is tilted at a preset angle with respect to the reference plane S. The oscillating body posture is the posture that the oscillating body 30 takes relative to the device base 20 when the crimping tool end face A1 is tilted at a preset angle with respect to the reference plane S. The oscillating body 30, whose movement relative to the device base 20 is restricted by the locking mechanism 50, is shown in Figure 4.

[0116] When the crimping tool end face A1 is parallel to the reference plane S, the pressure supply source creates negative pressure in the bearing air supply / exhaust chamber 20b via the bearing port 25a. As a result, the oscillating body 30 is attracted to the base engagement surface 23 of the device base 20. The device base 20 is configured to attract the oscillating body 30 to the base engagement surface 23 by creating negative pressure in the bearing air supply / exhaust chamber 20b. By being attracted to the device base 20, the oscillating body 30 relative to the device base 20 is restricted.

[0117] After the oscillating body 30 is attracted to the device base 20, the pressure supply source creates positive pressure in the locking air supply / exhaust chamber 50a via the locking port 25b. As a result, the locking piston 51, the locking shaft 52, and the locking holding member 53 move in the direction from the first base end face 21 to the second base end face 22 in the base axial direction D3. The locking holding member 53 presses the inner surface 35 of the locking oscillating body with the contact surface 561 of the holding flange portion 56. As a result, the locking holding member 53 presses the oscillating body 30 against the device base 20. Consequently, the oscillating body 30 is pressed against the base engagement surface 23. In other words, the locking holding member 53 is configured to press against the base engagement surface 23 in conjunction with the locking piston 51.

[0118] As the oscillating body 30 is pressed against the device base 20, a normal force acts on the oscillating body 30 from the device base 20. Due to static friction caused by the normal force, the oscillating body 30 is restricted from swinging relative to the device base 20.

[0119] <Operation related to preventing rotation of the oscillating body> When the tilt adjustment device 10 is in operation, the rotation prevention ring 57 restricts the rotation of the oscillating body 30 by engaging the rotation prevention pin 33 with the notch 574.

[0120] Let's consider the case where the oscillating body 30 oscillates around the pivot axis C as the pivot point. In this case, the oscillating body 30 moves in a second direction D2 by pushing the anti-rotation ring 57 in the direction of movement of the oscillating body 30 with the two anti-rotation pins 33, while aligning the ring-holding pin 58 along the inner circumferential surface of the elongated hole. In the process of the anti-rotation ring 57 moving in the second direction D2, the anti-rotation ring 57 moves relative to the two anti-rotation pins 33 and the ring-holding pin 58, thereby restricting the rotation of the oscillating body 30. In other words, the anti-rotation ring 57 allows the linear motion of the oscillating body 30 accompanying its oscillation, while restricting the rotation of the oscillating body 30 around the central axis of the shaft 40 as the center of rotation.

[0121] In the tilt adjustment device 10, the magnetic biasing unit 263 applies a magnetic force to the movable member 61 in a direction that causes it to rotate around the base axis LB. The magnitude of the magnetic force acting on the movable member 61 is adjusted by the distance between each permanent magnet 62 and the magnetic biasing unit 263 corresponding to that permanent magnet 62 in the first direction D1 and the second direction D2. The magnetic biasing unit 263 imparts a rotational force to the oscillating body 30 around the base axis LB via the movable member 61 and the shaft 40. As a result, the oscillating body 30 presses the anti-rotation pin 33 against the inner surface defining the notch 574. In this way, the magnetic biasing unit 263 works in cooperation with the permanent magnet 62 to generate a magnetic force that presses the anti-rotation pin 33 against the anti-rotation ring 57.

[0122] After the crimping tool end face A1 becomes parallel to the reference plane S, the pressure supply source creates negative pressure in the anti-rotation passage 20c via the anti-rotation port 25c. As a result, the anti-rotation ring 57 is attracted to the first base end face 21. Furthermore, the pressure supply source creates negative pressure in the ring groove 573 which communicates with the anti-rotation port 25c. As a result, the movement of the oscillating body 30 is restricted by the anti-rotation ring 57, and the movement of the anti-rotation ring 57 relative to the device base 20 is also restricted.

[0123] The first anti-rotation magnet 575, provided on the anti-rotation ring 57, attracts the anti-rotation pin 33 of the oscillating body 30. As a result, the anti-rotation pin 33 is pressed against the inner surface defining the notch 574. The second anti-rotation magnet 576, also provided on the anti-rotation ring 57, presses the inner circumferential surface of the anti-rotation ring 57 that defines the elongated hole against the ring holding pin 58.

[0124] [Effects of this embodiment] The effects of this embodiment will be explained. (1) The shaft oscillating part 60 operates with a plurality of permanent magnets 62 provided on one of the device base 20 and the movable member 61, and a plurality of coils 64 provided on the other of the device base 20 and the movable member 61. The shaft oscillating part 60 operates the movable member 61 and oscillates the oscillating body 30 by the electromagnetic force generated by the plurality of permanent magnets 62 and the plurality of coils 64.

[0125] The movement of the movable member 61 is guided by the swing of the oscillating body 30 via the shaft 40 provided on the movable member 61 and the oscillating body 30. The shaft swinging part 60 can swing the oscillating body 30 without requiring any sliding members relative to the shaft 40 and the movable member 61 during the positioning process of the movable member 61. For example, unlike the case where the movement of the movable member 61 in the base axis direction D3 caused by the swing of the oscillating body 30 is permitted by a sliding member with respect to the movable member 61, the shaft swinging part 60 can avoid the sliding between the movable member 61 and other members influencing the swing of the oscillating body 30. As a result, the shaft swinging part 60 can position the movable member 61 with high precision. Therefore, the tilt adjustment device 10 can improve the accuracy of tilt adjustment. Furthermore, since the tilt adjustment device 10 does not have any sliding members relative to the shaft 40 and the movable member 61 during the operation of the shaft swinging part 60, wear occurring within the tilt adjustment device 10 can be reduced. As a result, the tilt adjustment device 10 can have improved durability.

[0126] (2) The shaft oscillating section 60 oscillates the oscillating body 30 by moving a movable member 61 provided on the shaft 40 in a first direction D1 and a second direction D2. For example, compared to a case where a member that moves in the first direction D1 and a member that moves in the second direction D2 are stacked and these two members operate the shaft 40 and the oscillating body 30, the tilt adjustment device 10 is miniaturized in the base axis direction D3.

[0127] (3) Multiple permanent magnets 62 are provided on the movable member 61, and multiple coils 64 are provided on the device base 20. Consider the case in which multiple coils 64 are provided on the movable member 61 and multiple permanent magnets 62 are provided on the device base 20. In this case, for example, the wiring connecting the circuit board 63 and the external power supply moves in conjunction with the operation of the movable member 61. Furthermore, the circuit board 63 moves together with the coils 64 due to the operation of the movable member 61. In the tilt adjustment device 10 of this embodiment, the coils 64 and the circuit board 63 are provided on the device base 20, which is not linked to the movable member 61. Even when the movable member 61 operates, the wiring connected to the circuit board 63 does not move. Therefore, interference between the wiring and the device base 20 due to the movement of the wiring can be avoided.

[0128] If the wiring interferes with the device base 20 as the movable member 61 moves, for example, a reaction force acts on the movable member 61 due to the interference between the wiring and the device base 20. The tilt adjustment device 10 of this embodiment can position the movable member 61 while avoiding interference between the device base 20 and the wiring, so the movable member 61 can be positioned with greater precision compared to the case where the device base 20 and the wiring interfere.

[0129] When the wiring moves in conjunction with the movement of the movable member 61, for example, the reaction force generated when the wiring itself is bent and straightened acts as a resistive force on the movable member 61. In this embodiment, since the wiring connected to the substrate 63 does not move, it is possible to avoid the reaction force caused by the bending and straightening of the wiring itself acting on the movable member 61. For this reason, the tilt adjustment device 10 can position the movable member 61 with greater precision compared to the case where the wiring moves in conjunction with the movable member 61.

[0130] Furthermore, by providing the coil 64 and circuit board 63 on the device base 20 of the tilt adjustment device 10, repeated bending of the wiring with each operation can be avoided. As a result, the tilt adjustment device 10 can suppress wire breakage caused by repeated bending of the wiring. Therefore, the durability of the tilt adjustment device 10 is improved.

[0131] (4) Because the movable member 61 is equipped with a permanent magnet 62, no wiring for connecting to an external power source is installed on the movable member 61. As a result, the movable member 61 operates under less resistance compared to the case where such wiring is installed. For example, the movable member 61 can operate with less electromagnetic force compared to the case where the resistance of the wiring is added to the operation of the movable member 61. The magnitude of the electromagnetic force is determined by the current value in the coil 64. This means that the movable member 61 can operate with a smaller current value. The tilt adjustment device 10 can suppress heat generation in the coil 64 and thermal deformation of the coil 64 and the device base 20 caused by the heat generation of the coil 64 by reducing the current value required to operate the movable member 61. Deformation of the coil 64 may change the direction of the current flowing through the coil 64 and may also change the direction of the electromagnetic force related to the current. Furthermore, deformation of the device base 20 may change the position of the base engagement surface 23 and the oscillating body engagement surface 32 of the oscillating body 30. As described above, the tilt adjustment device 10 can suppress thermal deformation of the coil 64 and the device base 20 by providing a permanent magnet 62 on the movable member 61. As a result, the tilt adjustment device 10 can position the movable member 61 with higher precision compared to the case where the coil 64 is provided on the movable member 61.

[0132] (5) The multiple permanent magnets 62 are interposed between the oscillating body 30 and the multiple coils 64 in the base axis direction D3. As a result, the magnetic pole surfaces of the multiple permanent magnets 62 are oriented in the direction from the first base end face 21 toward the second base end face 22 inside the device base 20. For example, consider a situation where the magnetic pole surfaces of the multiple permanent magnets 62 are oriented in the direction from the second base end face 22 toward the first base end face 21. In this situation, a magnetic force is generated between the permanent magnets 62 and the device base 20 or other members in the housing space 20a, and a magnetic force in the direction from the second base end face 22 toward the first base end face 21 may act on the movable member 61. Such a magnetic force can cause the oscillating body 30 to move excessively away from the device base 20, reducing the accuracy of the tilt adjustment. The tilt adjustment device 10 of this embodiment, which has multiple permanent magnets 62 between the oscillating body 30 and multiple coils 64, can suppress a decrease in the accuracy of such tilt adjustment.

[0133] (6) The shaft oscillating section 60 has two first drive units 71 and two second drive units 72. This allows the shaft oscillating section 60 to reduce the torque required for the rotation of the movable member 61 around the central axis of the shaft 40 compared to, for example, the case where it has one first drive unit 71 and one second drive unit 72. In other words, the tilt adjustment device 10 can adjust the tilt of the oscillating body 30 with higher precision by operating the movable member 61 with the shaft oscillating section 60 which has two first drive units 71 and two second drive units 72.

[0134] (7) The device base 20 has an anti-rotation ring 57 and a cover member 26. Furthermore, the device base 20 has a magnetic biasing part 263 on the cover member 26. The magnetic biasing part 263 applies a magnetic force to the movable member 61 in a direction that causes the oscillating body 30 to rotate around the central axis of the shaft 40. As a result, the oscillating body 30 presses the anti-rotation pin 33 against the inner circumferential surface of the notch 574. This pressing reduces the rattle of the oscillating body 30 relative to the anti-rotation ring 57. As a result, the tilt adjustment device 10 can suppress the decrease in the accuracy of tilt adjustment caused by such rattle.

[0135] Unlike the first anti-rotation magnet 575 and the second anti-rotation magnet 576, the magnetic biasing unit 263 does not fall off the device base 20. Therefore, it is possible to prevent a decrease in the rattle suppression function of the tilt adjustment device 10 due to the magnetic biasing unit 263 falling off.

[0136] (8) The anti-rotation ring 57 has two first anti-rotation magnets 575. The anti-rotation ring 57 can attract the anti-rotation pin 33 of the oscillating body 30 to the first anti-rotation magnets 575. This allows the tilt adjustment device 10 to reduce the rattle of the oscillating body 30 relative to the anti-rotation ring 57.

[0137] (9) The anti-rotation ring 57 has two second anti-rotation magnets 576. The anti-rotation ring 57 is pressed against the ring retaining pin 58 by the magnetic force between the second anti-rotation magnets 576 and the ring retaining pin 58. This allows the tilt adjustment device 10 to reduce rattle of the anti-rotation ring 57 relative to the device base 20.

[0138] (10) The encoder 80 has a first detection unit 821 and a first encoder scale 831 on the central axis of a movable member 61 that extends in a first direction D1 when viewed from the base axis direction D3. For example, consider the case where the first detection unit 821 and the first encoder scale 831 are arranged off the central axis. Compared to this case, in this embodiment, the encoder 80 can accurately measure the displacement of the movable member 61 in the first direction D1 even if there is some rotation in the movable member 61. The encoder 80 also has a second detection unit 822 and a second encoder scale 832 on the central axis of a movable member 61 that extends in a second direction D2 when viewed from the base axis direction D3. The encoder 80 can accurately measure the displacement of the movable member 61 in the second direction D2, similar to the case of the first detection unit 821 and the first encoder scale 831.

[0139] [Example of Modification] The above embodiment can be implemented with the following modifications. The above embodiment and the following examples of modifications can be combined with each other to the extent that they do not contradict each other technically.

[0140] ○ The control device 90 may be configured to control the current value supplied to each of the plurality of coils 64 included in at least one of the sets of two first drive units 71 and two second drive units 72, on a coil-by-coil basis. For example, the control device 90 controls the current value supplied to each of the plurality of coils 64 included in the two first drive units 71 on a coil-by-coil basis. More specifically, the control device 90 may control the current value supplied to each coil 64 such that the current value supplied to the coil 64 included in one first drive unit 71 is different from the current value supplied to the coil 64 included in the other first drive unit 71. In this case, the encoder 80 has two first detection units 821 and two first encoder scales 831. The encoder 80 measures the displacement of the movable member 61 by one first drive unit 71 using one first detection unit 821, and measures the displacement of the movable member 61 by the other first drive unit 71 using the other first detection unit 821.

[0141] The control device 90, configured as described above, can suppress the rotation of the movable member 61 around the central axis of the shaft 40. More specifically, the control device 90 can control the current values ​​supplied to the two first drive units 71 so that the values ​​measured by the two first detection units 821 match with a set accuracy. As a result, the control device 90 can suppress the rotation of the movable member 61 that may occur due to the difference in displacement of the movable member 61 by the two first drive units 71. Consequently, the tilt adjustment device 10 can suppress the deterioration of the measurement accuracy of the encoder 80 and the decrease in the accuracy of tilt adjustment due to such rotation of the movable member 61.

[0142] Furthermore, the control device 90 may apply torque to the movable member 61 by making the current value supplied to one of the coils 64 in the first drive unit 71 different from the current value supplied to the other coil 64 in the first drive unit 71. In other words, the control device 90 may apply torque to the movable member 61 that is related to rotation around the central axis of the shaft 40 as the center of rotation. The torque applied to the movable member 61 can press the anti-rotation pin 33 of the oscillating body 30 against the inner circumferential surface of the notch 574. In this way, the control device 90 can reduce rattle caused by the relative movement of the oscillating body 30 with respect to the anti-rotation ring 57 by controlling the current value supplied to each coil 64. As a result, the tilt adjustment device 10 can suppress the decrease in the accuracy of tilt adjustment caused by such rattle.

[0143] ○ The arrangement of the two first anti-rotation magnets 575 with respect to the anti-rotation ring 57 is not limited to the embodiment. For example, the two first anti-rotation magnets 575 may be arranged such that the magnetic force between each first anti-rotation magnet 575 and the anti-rotation pin 33 moves the anti-rotation ring 57 radially. Specifically, the two first anti-rotation magnets 575 may be arranged such that the anti-rotation ring 57 moves radially in the direction in which the oscillating body 30 and the anti-rotation ring 57 attract each other. In this case, the two first anti-rotation magnets 575 are arranged interposed between the two notches 574 in the circumferential direction of the anti-rotation ring 57.

[0144] ○ The arrangement of the two second anti-rotation magnets 576 with respect to the anti-rotation ring 57 is not limited to the embodiment. For example, the two second anti-rotation magnets 576 may be arranged such that the anti-rotation ring 57 is moved radially by the magnetic force between each second anti-rotation magnet 576 and the ring retaining pin 58. In this case, the two second anti-rotation magnets 576 are arranged to be interposed between the two ring retaining pins 58 in the circumferential direction of the anti-rotation ring 57.

[0145] ○ The anti-rotation ring 57 does not necessarily have to have a notch 574. For example, the anti-rotation ring 57 may have a through hole. In this case, the anti-rotation pin 33 of the oscillating body 30 is inserted into the through hole of the anti-rotation ring 57.

[0146] ○ The number of anti-rotation pins 33 on the oscillating body 30 is not limited to this embodiment. The oscillating body 30 only needs to have one or more anti-rotation pins 33. The anti-rotation ring 57 only needs to be provided with a portion that engages with the anti-rotation pins 33, in proportion to the number of anti-rotation pins 33.

[0147] ○ The tilt adjustment device 10 does not necessarily have a rotation-preventing ring 57. In this case, the control device 90 may restrict the rotation of the movable member 61, shaft 40, and oscillating body 30 around the central axis of the shaft 40 by controlling the current values ​​supplied to the plurality of coils 64.

[0148] ○ The locking mechanism 50 does not necessarily have a locking shaft 52. For example, a locking retaining member 53 may be attached to the locking piston 51. In this case, the locking convex spherical surface 521 is formed at the end of the piston connecting portion 512. Also in this case, the second sealing member 55 seals the space between the piston connecting portion 512 and the retaining member 28.

[0149] ○ The tilt adjustment device 10 does not necessarily have a locking mechanism 50. In this case, the tilt adjustment device 10 restricts the movement of the oscillating body 30 only by attracting it to the base engagement surface 23 by creating a negative pressure in the bearing air supply and discharge chamber 20b.

[0150] ○ The cover member 26 may have a projection instead of a groove 262, thereby forming a magnetic biasing portion 263 in the portion adjacent to the projection. ○ The cover member 26 does not have to have a magnetic biasing portion 263.

[0151] ○ The number of first drive units 71 and second drive units 72 is not limited to this embodiment. For example, the shaft oscillating unit 60 may have one first drive unit 71 and one second drive unit 72. The shaft oscillating unit 60 may have different numbers of first drive units 71 and second drive units 72. For example, the shaft oscillating unit 60 may have one first drive unit 71 and two second drive units 72.

[0152] ○ The shaft oscillating section 60 may have a third drive unit (not shown) in addition to the first drive unit 71 and the second drive unit 72. In this case, for example, when viewing the movable member 61 from the base axis direction D3, the first drive unit 71, the second drive unit 72, and the third drive unit are arranged to surround the shaft 40. In other words, the shaft oscillating section 60 may operate the movable member 61 along each of the three axes that intersect each other using the first drive unit 71, the second drive unit 72, and the third drive unit.

[0153] ○ The number of permanent magnets 62 and coils 64 is not limited to the embodiment. The number of permanent magnets 62 and coils 64 of the first drive unit 71 is not limited to the embodiment. The number of permanent magnets 62 and coils 64 of the second drive unit 72 is not limited to the embodiment. The number of permanent magnets 62 and coils 64 can be appropriately changed depending on, for example, the dimensions of the tilt adjustment device 10 and the magnitude of the electromagnetic force required in the shaft oscillating unit 60.

[0154] ○ The multiple permanent magnets 62 do not necessarily have to be interposed between the oscillating body 30 and the multiple coils 64 in the base axis direction D3. For example, as shown in Figure 7, the multiple permanent magnets 62 may be installed on the surface of the movable member 61 that faces the first base end face 21 in the base axis direction D3, and the multiple coils 64 may be installed in the encoder installation section 84 together with the substrate 63. In this case, the encoder 80 is installed on the cover member 26.

[0155] ○ Multiple permanent magnets 62 may be provided on the device base 20. In this case, multiple coils 64 are provided on the movable member 61. ○ The base engagement surface 23 may be a convex spherical surface. In this case, the oscillating body engagement surface 32 is a concave spherical surface.

Claims

1. An inclination adjustment device comprising: a device base having a base engagement surface which is either a concave spherical surface or a convex spherical surface; a rocking body having a rocking body engagement surface that engages with the base engagement surface, and being held so as to be rockable with respect to the device base with the rocking body engagement surface facing the base engagement surface; a shaft erected on the rocking body; a shaft rocking unit that rocks the shaft so that the end face of a crimping tool attached to the rocking body is inclined at a preset angle with respect to a reference surface; and a control device configured to control the shaft rocking unit, wherein the shaft rocking unit comprises: a movable member provided on the shaft; an encoder configured to measure the displacement of the movable member with respect to the device base; a plurality of permanent magnets provided on one of the device base and the movable member; a plurality of coils provided on the other of the device base and the movable member, each of which is opposite to the plurality of permanent magnets; and the control device is connected to the plurality of coils and configured to control the current value supplied to the coils. The shaft oscillating part is a tilt adjustment device that moves the movable member by electromagnetic force generated by the permanent magnet and the coil, thereby positioning the movable member so that the end face is at a preset angle with respect to the reference plane within the measurement range of the encoder.

2. The tilt adjustment device according to claim 1, wherein the plurality of permanent magnets are provided on the movable member, and the plurality of coils are provided on the base of the device.

3. The tilt adjustment device according to claim 2, wherein the plurality of permanent magnets are interposed between the oscillating body and the plurality of coils in the axial direction of the base of the device.

4. The tilt adjustment device according to claim 3, wherein the shaft oscillating portion comprises a first drive unit and a second drive unit, the first drive unit includes a first coil among a plurality of coils and a first permanent magnet among a plurality of permanent magnets, and is configured to move the movable member in a first direction perpendicular to the axial direction, and the second drive unit includes a second coil among a plurality of coils and a second permanent magnet among a plurality of permanent magnets, and is configured to move the movable member in a second direction perpendicular to both the axial direction and the first direction.

5. The tilt adjustment device according to claim 4, wherein the device base has a porous portion that forms the base engagement surface and a bearing air supply and discharge chamber that communicates with the outside of the device base via the porous portion, and the bearing air supply and discharge chamber is configured to be under negative pressure so that the oscillating body is attracted to the base engagement surface.

6. The tilt adjustment device according to claim 5, further comprising a locking mechanism, the locking mechanism comprising: a locking piston provided on the device base so as to be reciprocating in the axial direction; and a locking holding member configured to press the oscillating body against the base engagement surface in conjunction with the locking piston.

7. The tilt adjustment device according to claim 4 or claim 6, wherein the first drive unit consists of two first drive units, the second drive unit consists of two second drive units, the two first drive units are arranged side by side in the second direction with the shaft interposed between one first drive unit and the other first drive unit, and the two second drive units are arranged side by side in the first direction with the shaft interposed between one second drive unit and the other second drive unit.

8. The tilt adjustment device according to claim 7, wherein the control device is configured to control the current value supplied to each of the plurality of coils included in at least one of the two sets of first drive units and the two sets of second drive units, for each coil.

9. The tilt adjustment device according to claim 7, wherein the oscillating body has one or more anti-rotation pins on its outer circumferential surface, the device base is provided with an anti-rotation ring having a notch that engages with the anti-rotation pins, the anti-rotation ring is rotatably attached to the end of the device base and restricts the rotation of the oscillating body by the engagement of the anti-rotation pins with the notch.

10. The tilt adjustment device according to claim 9, wherein the device base has a cover member provided on the opposite side of the end of the device base from the end on which the anti-rotation ring is provided, the cover member has a magnetic biasing portion on the surface facing the permanent magnet via the coil, the magnetic biasing portion is magnetized by the permanent magnet, and thereby generates a magnetic force that cooperates with the permanent magnet to press the anti-rotation pin against the anti-rotation ring.

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