Ohmic-Resistance Heating Devices TRIZ Cases
- Substrate Support Unit With Reflective Cooling Isolation
A reflective plate, cooling plate, and gas gap limit heat transfer, coolant boiling, and chuck contamination during substrate treatment.
- Reflector Cooling Chamber for Fast SiC Substrate Heating
Integrated reflector pockets and coolant chambers let high-power lamps heat SiC substrates quickly while protecting heating assembly components.
- LED Chuck Magnetic Shielding for Electromagnetic Noise Control
A magnetic material layer on the cooling and base plates shields LED control noise, limiting electromagnetic interference beyond the chuck.
- Circular Lamp Arrays for Uniform Thermal Processing
Angled reflective troughs in circular lamp arrays deliver uniform thermal radiation to resolve substrate temperature non-uniformities.
- Preform Heating Apparatus with Segmented Cooling Air Feeds
Segmenting cooling air into three independent feeds controls mouth area temperature during infrared heating, preventing preform unusability from overheating.
- Luminescent Heating Device Uniform Surface Radiation
Segmented luminescent layers distribute energy uniformly across the surface, eliminating decay from edge sources.
- Multi-Zone Substrate Heater Uniformity Control
Independent zone control compensates for heat loss variations, resolving non-uniform etch rates across semiconductor substrates.
- Sterile Chamber Heating for Plastic Preforms
Integrating a movable wall with microwave heating creates a compact sterile zone that prevents contamination during plastic preform processing.
- Segmented Melting Heater for Selective Resin Joining
A segmented melting heater uses independent pair heaters to selectively melt joining end surfaces of semi-molded products.
- Counter Reflector Shield Portions for Preform Heating
Shield portions on a counter reflector block unwanted irradiation, reducing energy losses and improving heat profile control.