Metal mirror based multispectral filter array

The metal mirror-based multispectral filter array addresses integration issues in sensor devices by enhancing durability and spectral range while reducing angle shifts, enabling effective multispectral sensing.

CA2952683CActive Publication Date: 2026-09-22VIAVI SOLUTIONS INC(US)
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Patent Information

Application Number
CA2952683
Authority / Receiving Office
CA · CA
Patent Type
Patents
Current Assignee / Owner
Priority Date
2016-12-20
Filing Date
2016-12-22
Publication Date
2026-09-22
Estimated Expiration
2036-12-22

AI Technical Summary

Technical Problem

Existing multispectral sensor devices face challenges in integrating filter arrays due to difficulties in incorporating filters like linear variable filters or circular variable filters with semiconductor-based sensor elements, leading to reduced spectral range and accuracy, and high angle shifts.

Method used

A multispectral filter array using metal mirrors is developed, comprising a first and second metal mirror sandwiching a spacer with multiple layers, aligned with sensor elements to capture multiple wavelengths, and incorporating protective layers to enhance durability.

Benefits of technology

The metal mirror-based filter array improves durability, spectral range, and reduces angle shift, facilitating efficient multispectral sensing without the integration challenges of other filter types.

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Abstract

A device may include a multispectral filter array disposed on the substrate. The multispectral filter array may include a first metal mirror disposed on the substrate. The multispectral filter may include a spacer disposed on the first metal mirror. The spacer may include a set of layers. The spacer may include a second metal mirror disposed on the spacer. The second metal mirror may be aligned with two or more sensor elements of a set of sensor elements.
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