Three-dimensional spatial light source system and related light measurement device

Abstract

Embodiments of the present application relate to a three-dimensional spatial light source system and a corresponding light measurement device, wherein the three-dimensional spatial light source system comprises: a light source; and a plurality of light paths independent of each other and configured to be coupled to the light source independently; wherein the plurality of light paths further comprises an intermediate light path and a plurality of peripheral light paths arranged around the intermediate light path and capable of being output as secondary light sources. Thus, the three-dimensional spatial light source system of the present application only needs one light source to meet the multi-path light source requirement of an elliptical polarization measurement device, and has simple structure, convenient installation and maintenance.

Description

Technical Field

[0001] The various embodiments of the present invention relate to the field of optics, and more specifically to a three-dimensional spatial light source system and related optical measurement equipment. Background Technology

[0002] Elliptic polarization measurement equipment is a powerful, multifunctional optical measurement device that can be used to measure the thickness, optical constants (reflectivity r, refractive index n, extinction coefficient k), polarization characteristics, surface microstructure, particles, defects, and roughness of object surfaces or thin films. Due to its high sensitivity and non-destructive, non-contact nature, elliptic polarization equipment has wide applications in semiconductor chip manufacturing, optical coating, and materials analysis.

[0003] Ellipsometry measurement equipment typically requires at least three light sources: a light source for the spectral ellipsometry (SE) system (hereinafter referred to as the SE light source) used to measure sample surface parameters; a light source for the spectral reflection (SR) system (hereinafter referred to as the SR light source); a light source for the autofocus (AF) system (hereinafter referred to as the AF light source); and a light source for the pattern recognition (PR) system (hereinafter referred to as the PR light source). Currently, two to three separate light sources are generally used to meet the four-source requirement of ellipsometry measurement equipment. This not only increases the cost of the equipment but also makes the light source structure complex and inconvenient to maintain, especially since the reflectors used have an extremely high aging frequency and need to be replaced frequently.

[0004] Therefore, based on the above problems, a novel three-dimensional spatial light source system for elliptic polarization measurement equipment is proposed. Summary of the Invention

[0005] In view of the above, one of the objectives of the present invention is to provide a novel three-dimensional spatial light source system and related optical measurement equipment, wherein the three-dimensional spatial light source system can at least overcome or alleviate the technical problems existing in the prior art.

[0006] According to a first aspect of the present invention, a three-dimensional spatial light source system is provided, comprising: a light source; and a plurality of independent optical paths configured to be independently coupled to the light source; wherein the plurality of optical paths further comprises an intermediate optical path and a plurality of peripheral optical paths, the plurality of peripheral optical paths being configured to be arranged around the intermediate optical path and output as a secondary light source.

[0007] In particular, the three-dimensional spatial light source system according to the present invention can be applied to elliptometric measurement devices. For example, the light source system of an elliptometric measurement device may include a central optical path and four peripheral optical paths. The central optical path can serve as the light intensity monitoring path for the light source itself, reflecting changes in the light intensity in real time to accurately monitor the real-time state of the light source. The four peripheral optical paths, coupled with specific optical subsystems, can serve as the SE light source, SR light source, AF light source, and PR light source of the elliptometric measurement device. Alternatively, there can be three peripheral optical paths, used as the SE light source, AF light source, and PR light source, respectively. Or, depending on the actual situation, there can be two peripheral optical paths, used as the SE light source, AF light source, etc. When the elliptometric measurement device only needs to use two light sources, the above-mentioned three-dimensional spatial light source system can, for example, be used simultaneously for two measurement devices.

[0008] According to some embodiments of the present invention, the intermediate optical path can be configured to receive light emitted from the light source and detect changes in the light intensity of the light source in real time, thereby determining the real-time state of the light source.

[0009] According to some embodiments of the present invention, the intermediate optical path may include a color wheel and a light intensity detector arranged sequentially; wherein the color wheel may be configured to include a neutral density filter and a long-pass or short-pass filter. For example, a neutral density filter such as ND2, ND4, or ND8 may be selected according to the light intensity and the dynamic range of the detector.

[0010] Preferably, the light intensity detector can be a four-quadrant detector.

[0011] According to some embodiments of the present invention, at least one of the plurality of peripheral optical paths includes a first peripheral optical path, the first peripheral optical path including a first color wheel, a spherical reflector, a plane reflector, and a second color wheel arranged sequentially.

[0012] According to some embodiments of the present invention, at least one of the plurality of peripheral optical paths includes a second peripheral optical path, the second peripheral optical path including a first color wheel, a first parabolic reflector, a second color wheel, a third color wheel and a second parabolic reflector arranged sequentially.

[0013] According to some embodiments of the present invention, at least one of the plurality of peripheral optical paths includes a third peripheral optical path, the third peripheral optical path including a first color wheel, an ellipsoidal reflector and a second color wheel arranged sequentially.

[0014] According to some embodiments of the present invention, at least one of the plurality of peripheral optical paths may include a fourth peripheral optical path, the fourth peripheral optical path including a first color wheel and an optical fiber arranged sequentially.

[0015] According to some embodiments of the present invention, the first color wheel of the first peripheral optical path, the first color wheel and the second color wheel of the second peripheral optical path, the first color wheel of the third peripheral optical path, or the first color wheel of the fourth peripheral optical path are configured to include a fully open aperture, a light-blocking plate, a long-pass filter, and a neutral density filter.

[0016] According to some embodiments of the present invention, the second color wheel in the first peripheral optical path, the third color wheel in the second peripheral optical path, or the second color wheel in the third peripheral optical path can be configured to include a fully open aperture, a neutral density filter, and a long-pass or short-pass filter.

[0017] According to some embodiments of the present invention, the plurality of peripheral optical paths may include a plurality of peripheral optical paths selected from the group consisting of an optical path of a light source for a spectral ellipsometric measurement system (SE), an optical path of a light source for a spectral reflective system (SR), an optical path of a light source for a sample autofocusing system (AF), and an optical path of a light source for a sample image recognition system (PR).

[0018] According to some embodiments of the present invention, the meridional plane of the converging beam in at least one of the plurality of peripheral optical paths may be in the same plane or at an angle to the meridional plane of the beam emitted from the light source.

[0019] According to some embodiments of the present invention, the light source can be a broadband light source, such as a xenon lamp light source or a laser-pumped broadband light source. In particular, the light source can be a xenon lamp light source that uses negative electrode discharge to maintain plasma discharge light emission generated by high-voltage discharge igniting xenon gas in the lamp; or a xenon lamp light source that uses laser pumping to maintain plasma discharge light emission; or a laser-pumped broadband light source.

[0020] According to a second aspect of the present invention, a light measurement device is provided, which may include any of the three-dimensional spatial light source systems described above.

[0021] According to some embodiments of the present invention, the optical measurement device may be an elliptic polarization measurement device.

[0022] By utilizing the aforementioned three-dimensional spatial light source system of the present invention, a more compact light source structure layout can be achieved, thereby saving space. In particular, the aforementioned three-dimensional spatial light source system is suitable for ellipsometric measurement equipment, where multiple peripheral optical paths coupled with specific optical subsystems can provide light sources for spectral ellipsometric measurement systems, spectral reflective systems, autofocus systems, and image recognition systems, etc., for the ellipsometric measurement equipment. Therefore, the three-dimensional spatial light source system disclosed herein only requires a single light source to meet the multi-source light source requirements of ellipsometric measurement equipment. It is simple in structure, easy to assemble and adjust, and easy to maintain, successfully solving the problems of current multi-source light source systems for ellipsometric measurement equipment, which often have complex light source structures, are difficult to maintain, and, in particular, have extremely high aging frequencies of the reflectors used, requiring frequent replacement. Attached Figure Description

[0023] In the accompanying drawings, similar / identical reference numerals are typically used throughout different views to refer to similar / identical parts. The drawings are not necessarily drawn to scale, but generally emphasize the illustration of the principles of the invention. In the accompanying drawings:

[0024] Figure 1 This is a schematic diagram of a three-dimensional spatial light source system according to an embodiment of the present invention;

[0025] Figure 2 This is a spatial layout diagram of a three-dimensional spatial light source system with a different number of optical paths according to an embodiment of the present invention;

[0026] Figure 3 This is a schematic diagram of the intermediate optical path of a three-dimensional spatial light source system according to an embodiment of the present invention;

[0027] Figure 4 This is a schematic diagram of the structure of the first embodiment of the peripheral optical path of a three-dimensional spatial light source system according to an embodiment of the present invention;

[0028] Figure 5 This is a schematic diagram of the structure of a second embodiment of the peripheral optical path of a three-dimensional spatial light source system according to an embodiment of the present invention;

[0029] Figure 6 A schematic diagram of the structure of a third embodiment of the peripheral optical path of a three-dimensional spatial light source system according to an embodiment of the present invention; and

[0030] Figure 7 A schematic diagram of the fourth embodiment of the peripheral optical path of a three-dimensional spatial light source system according to an embodiment of the present invention. Detailed Implementation

[0031] The various embodiments of the present invention will now be described in detail with reference to the accompanying drawings. One or more examples of the embodiments are illustrated in the drawings. The embodiments are provided by way of the exposition of the invention and are not intended to be limiting of the invention. For example, features shown or described as part of one embodiment may be used in another embodiment to generate yet another further embodiment. The invention is intended to include these and other modifications and variations that fall within the scope and spirit of the invention.

[0032] It should be noted that, in this document, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of those features. In the description herein, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0033] As mentioned earlier, existing ellipsometry measurement equipment generally requires at least three light sources: a light source for a spectral ellipsometry (SE) system (hereinafter referred to as the SE light source) used to measure sample surface parameters; a light source for a spectral reflection (SR) system (hereinafter referred to as the SR light source); a light source for an autofocus (AF) system (hereinafter referred to as the AF light source); and a light source for a pattern recognition (PR) system (hereinafter referred to as the PR light source). However, the light source layout or structure in existing ellipsometry measurement equipment is unreasonable, leading to increased equipment costs and complex light source structures that are difficult to maintain. In particular, the unreasonable optical path layout in existing light source systems also results in extremely high aging rates for the reflectors used, requiring frequent replacement.

[0034] Therefore, this paper proposes a novel three-dimensional spatial light source system applicable to ellipsometric measurement devices. It should be noted that although the embodiments described below refer to the light source system of an ellipsometric measurement device, this is not intended to be limiting. Rather, the three-dimensional spatial light source system of this invention can be applied to other suitable light source systems that may require multiple light sources, in addition to ellipsometric measurement devices.

[0035] The following is a combination of... Figure 1 This invention describes a three-dimensional spatial light source system applicable to an elliptic polarization measurement device according to an embodiment of the present invention.

[0036] like Figure 1As shown, the three-dimensional spatial light source system of the present invention mainly includes a light source 10 and multiple independent optical paths 20, 30, 40, 50 and 60, wherein these multiple independent optical paths are independently coupled to the light source 10 to receive light emitted from the light source 10. According to various embodiments of the present invention, the light output from the aforementioned multiple independent optical paths 20, 30, 40, 50 and 60 can be used as a secondary light source.

[0037] As a non-limiting example, light source 10 can be a light source emitting a broad spectrum. In particular, light source 10 can be a laser-pumped broadband light source or a xenon lamp light source, such as a xenon lamp light source that uses negative electrode discharge to maintain plasma discharge light emission generated by high-voltage discharge igniting xenon gas in the lamp, or a xenon lamp light source that uses laser pumping to maintain plasma discharge light emission.

[0038] In order to optimize the layout of the optical path in the three-dimensional spatial light source system of the various embodiments of the present invention, the multiple independent optical paths 20, 30, 40, 50 and 60 of the present invention may include an intermediate optical path 20 and multiple peripheral optical paths 30, 40, 50 and 60.

[0039] It should be understood that the multiple independent optical paths 20, 30, 40, 50 and 60 coupled to the light source 10 as proposed in this invention are merely illustrative. In other embodiments, there may be more or fewer independent peripheral optical paths coupled to the light source 10.

[0040] As an example of the layout of the optical path in a three-dimensional spatial light source system, Figure 2 The diagram schematically illustrates a spatial layout of a three-dimensional spatial light source system with a different number of peripheral optical paths according to an embodiment of the present invention. Figure 2 a shows a spatial layout diagram of a central optical path and four peripheral optical paths according to an embodiment of the present invention; Figure 2 b illustrates a spatial layout diagram of a central optical path and three peripheral optical paths according to an embodiment of the present invention; and Figure 2 c shows a spatial layout diagram with a central optical path and two peripheral optical paths according to an embodiment of the present invention.

[0041] from Figure 2 a to Figure 2 As can be seen from c, multiple peripheral optical paths are arranged to surround a central optical path. According to various embodiments of the present invention, this central optical path is arranged as a light intensity monitoring optical path for the light source itself, so as to reflect the changes in the light intensity of the light source in real time, or to accurately monitor the real-time status of the light source.

[0042] For example, in the case of an elliptic polarization measurement device, the central optical path can be used to detect changes in the intensity of light emitted from the light source; the multiple peripheral optical paths can be selected from a group consisting of the optical path of the light source for a spectral ellipticity measurement system (SE), the optical path of the light source for a spectral reflective system (SR), the optical path of the light source for a sample autofocusing system (AF), and the optical path of the light source for a sample image recognition system (PR).

[0043] The advantage of arranging multiple peripheral optical paths around a central optical path is that each peripheral optical path can have more optical path expansion space, thereby making the layout of the entire light source system more compact and reducing the interference between the independent optical paths.

[0044] The following will combine Figures 3 to 7 The possible arrangements of the central optical path 20 and the plurality of peripheral optical paths 30, 40, 50 and 60 of the three-dimensional spatial light source system of the present invention are described in detail. It should also be noted that the central optical path 20 and the plurality of peripheral optical paths 30, 40, 50 and 60 described below are merely structural illustrations and are not intended to be limiting in any way.

[0045] Figure 3 This is a schematic diagram of the intermediate optical path of a three-dimensional spatial light source system according to an embodiment of the present invention. Figure 3 As shown, the intermediate optical path 20 is coupled to a light source such as a xenon lamp light source 101, and includes a first color wheel 201 and a light intensity detector 202 arranged sequentially. The xenon lamp light source 101, as the light source, can emit broad-spectrum, high-intensity light. The first color wheel 201 can directly receive light from the light source, such as the xenon lamp light source 101, and then incident the light onto the target surface of the light intensity detector 202. The type of filter in the first color wheel 201 can be appropriately selected depending on the implementation of the light intensity detector and the different dynamic ranges.

[0046] As an example, if the light intensity detector 202 is a four-quadrant detector, a neutral density filter (ND2, ND4 or ND8) can be appropriately selected so that the light intensity value emitted by the light source is within the dynamic range of the four-quadrant detector.

[0047] According to various embodiments of the present invention, a plurality of peripheral optical paths are independent of each other, and each of the plurality of peripheral optical paths can be implemented in a variety of possible ways. In particular, at least one peripheral optical path can be the optical path of at least one light source selected from the SE light source, SR light source, AF light source, and / or PR light source of the elliptic measuring device. The following will describe... Figures 4 to 7 This section will introduce the possible implementation forms of any one of the multiple peripheral optical paths.

[0048] Figure 4This is a schematic diagram of the structure of a first embodiment of the peripheral optical path in a three-dimensional spatial light source system according to an embodiment of the present invention. Figure 4 As shown, the divergent light emitted from, for example, xenon lamp light source 101 passes through the first color wheel 701, and is converged by the spherical reflector 702. After the light path is deflected by the plane reflector 703, the converged beam passes through the second color wheel 704 and converges at the light-collecting point 705 of the light source.

[0049] Specifically, the diffused light emitted from, for example, a xenon lamp light source 101 can first pass through a first color wheel 701 and be incident on a spherical reflector 702. The first color wheel 701 can be equipped with a fully open aperture, a light-blocking plate, a 500nm long-pass filter, and multiple neutral density filters (ND2, ND4 and / or ND8), etc. The appropriate arrangement and / or function of the color wheel can be selected according to the actual situation and / or application requirements.

[0050] For example, when the light source system is idle, the first color wheel 701 can be switched to the light-blocking position to prevent the light emitted by the light source from shining on subsequent optical components (such as mirrors) in the optical path for a long time, causing aging and affecting the lifespan of the optical components; for example, when the light source system is used to measure samples such as photoresist, the first color wheel 701 can be switched to a 500nm long-pass filter to prevent the influence of light below 500nm on the photoresist; for example, when the light intensity of the light source system is too strong and causes the photodetector in the SE, AF, or PR optical path to saturate, the first color wheel 701 can be switched to the position of an appropriate neutral density filter (ND2, ND4, or ND8); for example, under normal conditions when the light source system is measuring correctly, the first color wheel 701 can be in the fully open aperture position.

[0051] Specifically, the optical axis of the light emitted from the light source 10, after passing through the first color wheel 701, can be incident at an angle of 6° with the normal of the spherical reflector 702. The diverging beam after passing through the spherical reflector 702 is focused into a converging beam. The converging beam passes through the spatial plane mirror 703, which redirects the light path to the desired direction. In particular, the meridional plane of the converging beam and the meridional plane of the light source in this light source system can be on the same plane, or they can be perpendicular to each other or form an angle, depending on the three-dimensional spatial layout of the light source system.

[0052] Then, the beam, after being deflected by the spatial plane mirror 703, can be imaged at the light-collecting point 705 via the second color wheel 704. The second color wheel 704 can be equipped with a fully open aperture and multiple neutral density filters (e.g., ND2, ND4, and ND8). The second color wheel 704 and the first color wheel 701 can serve the same function. Two color wheels are used because sometimes they need to work together. For example, when measuring photoresist samples, the first color wheel 701 needs to be switched to a 500nm long-pass filter. If the light intensity received by the detector is still saturated, the second color wheel 704 needs to be switched to the corresponding neutral density filter position to ensure the elliptic polarization measurement equipment functions properly. The converging beam is imaged at the light-collecting point 705 after passing through the second color wheel 704. The light-collecting point 705 can then be directly coupled to an optical fiber or spatially coupled to subsequent optical path components (e.g., for subsequent optical path components in SE, AR, AF, or PR light sources).

[0053] Figure 5 This is a schematic diagram of the structure of a second embodiment of the peripheral optical path of a three-dimensional spatial light source system according to an embodiment of the present invention;

[0054] like Figure 5 As shown, the diverging light emitted from, for example, a xenon lamp light source 101 passes through a first color wheel 801, and after passing through a first parabolic reflector 802, the beam becomes parallel light. After passing through a second color wheel 803 and a third color wheel 804, it passes through a second parabolic reflector 805, which converges the parallel beam to a point 806. Similarly, a suitable color wheel arrangement and / or function can be selected according to the actual situation and application requirements.

[0055] As a non-limiting example, for instance, when the light converging at point 806 is directly spatially coupled to the optical path of a subsequent SE, AR, AF, or PR light source, in order to reduce the impact of optical aberrations on the measurement system, the first color wheel 801 can be completely identical to the aforementioned first color wheel 701, and can be in a fully open position when the light source system is in measurement and in a light-blocking position when the light source system is idle, i.e., the first color wheel 801 has only two states; simultaneously, the second color wheel 803 can also be completely identical to the first color wheel 701, but only used to implement other functions of the aforementioned first color wheel 701; the third color wheel 804 can be completely identical to the aforementioned second color wheel 704, and can perform the same functions as the aforementioned second color wheel 704. For another example, when the light converging at point 806 is directly coupled to the optical fiber, the first color wheel 803 is not required. In this case, the functions of the first color wheel 801 and the third color wheel 804 are the same as those of the aforementioned first color wheel 701 and second color wheel 704, respectively.

[0056] The second parabolic mirror 805 can converge the parallel beam to point 806, and its spatial position can be determined according to the direction of the converging beam. Similarly, the meridional plane of the converging beam and the meridional plane of the beam emitted from the light source 10 can be on the same plane, or they can be perpendicular to each other or form an angle, depending on the three-dimensional spatial layout of the light source system.

[0057] Figure 6 This is a schematic diagram of the third embodiment of the peripheral optical path of a three-dimensional spatial light source system according to an embodiment of the present invention.

[0058] like Figure 6 As shown, the diverging light emitted from, for example, a xenon lamp light source 101 passes through a first color wheel 901, and after passing through an ellipsoidal reflector 902, it becomes a converging beam, which finally converges at a point 904 after passing through a second color wheel 903. Similarly, the appropriate arrangement and / or function of the first color wheel 901 and the second color wheel 903 can be selected according to the actual situation and application requirements.

[0059] As a non-limiting example, the first color wheel 901 and the second color wheel 903 can be exactly the same in type and function as the aforementioned first color wheel 701 and second color wheel 704. The spatial position of the ellipsoidal reflector 902 can be determined according to the direction of the converging beam. Similarly, the converging beam meridional plane can be on the same plane as the beam meridional plane emitted from the light source, or they can be perpendicular to each other or at an angle, depending on the three-dimensional spatial layout of the light source system.

[0060] Figure 7 This is a schematic diagram of the fourth embodiment of the peripheral optical path of a three-dimensional spatial light source system according to an embodiment of the present invention.

[0061] like Figure 7 As shown, the divergent light emitted from, for example, a xenon lamp light source 101 is directly coupled to the end face of the optical fiber 1002 via a first color wheel 1001. Similarly, the appropriate arrangement and / or function of the first color wheel 1001 can be selected according to the actual situation and application requirements.

[0062] As a non-limiting example, the first color wheel 1001 can be exactly the same type and function as the aforementioned first color wheel 701. Furthermore, in some embodiments, to ensure the broad spectrum requirements of the ellipsometric measurement device, a fiber with high transmittance to ultraviolet light is required.

[0063] It should be noted that the appropriate implementation of each of the above peripheral optical paths can be selected according to the actual application, and includes, but is not limited to, the peripheral optical paths of the first to fourth embodiments described above.

[0064] The three-dimensional spatial light source system provided by this invention, comprising a single light source, multiple peripheral optical paths, and an intermediate optical path, enables a more compact light source layout, thereby saving space. In particular, the three-dimensional spatial light source system provided by this invention is applicable to elliptometric measurement equipment requiring multiple light sources. Thus, only one light source is needed to meet the multi-source light source requirements of elliptometric measurement equipment, and the system is simple in structure, easy to assemble and adjust, and easy to maintain. It successfully solves the problems of current elliptometric measurement equipment multi-source systems, which often have complex light source structures, are difficult to maintain, and, in particular, have extremely high aging frequencies of the reflectors, requiring frequent replacement.

[0065] While the invention has been detailed and described in the accompanying drawings and foregoing description, these descriptions and descriptions should be considered illustrative or exemplary rather than restrictive; the invention is not limited to the disclosed embodiments. Other variations of the disclosed embodiments will be understood and practiced by those skilled in the art in practicing the claimed invention through study of the drawings, disclosure, and appended claims.

[0066] In the claims, the word "comprising" does not exclude other elements, and the indefinite articles "a" or "an" do not exclude a plurality. A single element or other unit may fulfill the function of multiple items set forth in the claims. The mere fact that certain features are recited only in dissimilar embodiments or dependent claims does not imply that combinations of these features cannot be used advantageously. Without departing from the spirit and scope of this application, the scope of protection of this application covers any possible combination of the various features recited in the various embodiments or dependent claims.

[0067] Any reference marks in the claims should not be construed as limiting the scope of the invention.

Claims

1. A three-dimensional spatial light source system, characterized in that, include: Light source (10); as well as Multiple independent optical paths (20, 30, 40, 50, 60) are configured to be independently coupled to the light source; The plurality of optical paths further include a central optical path (20) and a plurality of peripheral optical paths (30, 40, 50, 60), wherein the plurality of peripheral optical paths are configured to be arranged around the central optical path (20) and are capable of outputting as a secondary light source; The intermediate optical path (20) is configured to receive light emitted from the light source (10) and detect changes in the light intensity of the light source in real time.

2. The three-dimensional spatial light source system according to claim 1, wherein the intermediate optical path includes a color wheel (201) and a light intensity detector (202) arranged in sequence.

3. The three-dimensional spatial light source system according to claim 2, wherein the color wheel (201) is configured to include a neutral density filter and a long-pass or short-pass filter.

4. The three-dimensional spatial light source system according to claim 1, wherein at least one of the plurality of peripheral light paths (30, 40, 50, 60) includes a first peripheral light path, the first peripheral light path including a first color wheel (701), a spherical reflector (702), a plane reflector (703) and a second color wheel (704) arranged in sequence.

5. The three-dimensional spatial light source system according to claim 4, wherein at least one of the plurality of peripheral light paths (30, 40, 50, 60) includes a second peripheral light path, the second peripheral light path including a first color wheel (801), a first parabolic reflector (802), a second color wheel (803), a third color wheel (804), and a second parabolic reflector (805) arranged in sequence.

6. The three-dimensional spatial light source system according to claim 5, wherein at least one of the plurality of peripheral light paths (30, 40, 50, 60) includes a third peripheral light path, and the third peripheral light path includes a first color wheel (901), an ellipsoidal reflector (902), and a second color wheel (903) arranged in sequence.

7. The three-dimensional spatial light source system according to claim 6, wherein at least one of the plurality of peripheral optical paths (30, 40, 50, 60) includes a fourth peripheral optical path, the fourth peripheral optical path including a first color wheel (1001) and an optical fiber (1002) arranged in sequence.

8. The three-dimensional spatial light source system according to claim 7, wherein the first color wheel (701) in the first peripheral optical path, the first color wheel (801) and the second color wheel (803) in the second peripheral optical path, the first color wheel (901) in the third peripheral optical path or the first color wheel (1001) in the fourth peripheral optical path are configured to include a fully open aperture, a light-blocking plate, a long-pass filter and a neutral density filter.

9. The three-dimensional spatial light source system according to claim 6 or 7, wherein the second color wheel (704) in the first peripheral optical path, the third color wheel (804) in the second peripheral optical path, or the second color wheel (903) in the third peripheral optical path is configured to include one of a long-pass filter or a short-pass filter, a fully open aperture, and a neutral density filter.

10. The three-dimensional spatial light source system according to claim 1, wherein the plurality of peripheral optical paths comprises a plurality of peripheral optical paths selected from the group consisting of an optical path of a light source for a spectral ellipsometric measurement system (SE), an optical path of a light source for a spectral reflective system (SR), an optical path of a light source for a sample autofocusing system (AF), and an optical path of a light source for a sample image recognition system (PR).

11. The three-dimensional spatial light source system according to any one of claims 4-7, wherein the meridional plane of the converging beam in at least one of the plurality of peripheral optical paths and the meridional plane of the beam emitted from the light source (10) are in the same plane or at an angle.

12. The three-dimensional spatial light source system according to any one of claims 1-7 and 10, wherein the light source is a broadband light source.

13. An optical measurement device, characterized in that, Includes a three-dimensional spatial light source system according to any one of claims 1-12.

14. The optical measurement device according to claim 13, wherein the optical measurement device is an elliptic polarization measurement device.

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