Energy resolution testing device and method for 2.1-4 kev synchrotron monochromatic light

Abstract

The present application relates to a kind of energy resolution testing device and method for 2.1-4keV synchrotron monochromatic light, device includes first cavity and displacement table, Si (111) analysis crystal and detector are arranged in the first cavity, the first cavity is located on the displacement table, the displacement table is used to make the first cavity rotate around X axis, to make the first cavity switch between first form and second form.The energy resolution testing device and method for 2.1-4keV synchrotron monochromatic light of the present application, when the first cavity is in the first form, 2.1-4keV synchrotron monochromatic light is incident analysis crystal with p polarization state, thereby reducing the influence of Darwin width too large, and accurately measure the energy resolution of synchrotron monochromatic light.

Description

Technical Field

[0001] This invention relates to the field of energy resolution testing of synchrotron radiation monochromatic light, and more specifically to an apparatus and method for testing the energy resolution of synchrotron radiation monochromatic light of 2.1-4 keV. Background Technology

[0002] With the development of synchrotron radiation sources, beamline methodologies are constantly evolving. The development of spectroscopic beamlines, in particular, necessitates higher energy resolution for monochromatic light. This is primarily because XAFS (X-ray Absorption Spectroscopy) experiments require high energy resolution. For EXAFS (Extended X-ray Absorption Spectroscopy), the required energy resolution is typically close to the natural bandwidth of the element's absorption edge. For XANES (Near-edge X-ray Absorption Spectroscopy), the required energy resolution is less than the natural bandwidth of the absorption edge (ideally less than one-third). Synchrotron radiation experimental stations can utilize mid-energy (2.1-4 keV) X-ray photons to analyze the K-edge absorption of elements of interest in environmental and biological sciences, such as phosphorus, sulfur, chlorine, potassium, and calcium, as well as the L-edge absorption of elements of interest in energy and materials sciences, such as foil, palladium, and gold. Therefore, determining the accurate energy resolution of synchrotron monochromatic light using accurate and efficient testing methods in the mid-energy range (2.1-4 keV) to ensure the successful implementation of XAFS methodologies has significant scientific importance and practical value.

[0003] Existing energy resolution testing methods mainly involve irradiating an analytical crystal with synchrotron monochromatic light emitted from a monochromator to produce Bragg diffraction, then rotating the analytical crystal to obtain a rocking curve, from which the Darwin width (i.e., half-width at half-maximum) can be obtained, and then the energy resolution of the synchrotron monochromatic light can be obtained from the Darwin width.

[0004] For synchrotron monochromatic light in the mid-energy range (2.1-4 keV) emitted by high-power synchrotron radiation sources (such as undulators and oscillators), Si crystals are the preferred spectroscopic element. However, in this energy range, high-index crystals cannot achieve effective diffraction of monochromatic light, so only low-index crystals (such as Si(111)) can be used for absorption spectroscopy experiments. Similarly, the analytical crystals used to detect the energy resolution of the monochromatic light can only be low-index crystals. When conducting experiments, the Darwin width of the monochromatic light under s-polarization is usually collected, which is usually greater than or equal to the Darwin width of the monochromator crystal. This will greatly reduce the reliability of the energy resolution test. Summary of the Invention

[0005] The purpose of this invention is to provide an energy resolution testing device and method for synchrotron radiation monochromatic light of 2.1-4 keV, which allows synchrotron radiation monochromatic light to be incident on an analytical crystal in a p-polarized state, thereby obtaining the Darwin width under p-polarized light, which is smaller than the Darwin width under s-polarized light. Therefore, the influence of an excessively large Darwin width can be reduced, and the energy resolution of synchrotron radiation monochromatic light can be accurately measured.

[0006] Based on the above objectives, the present invention provides an energy resolution testing device for 2.1-4keV synchrotron radiation monochromatic light, including a first cavity and a displacement stage. The first cavity is provided with an analytical crystal and a detector. The analytical crystal is a Si(111) crystal. The first cavity is located on the displacement stage. The displacement stage is used to rotate the first cavity around the X-axis so that the first cavity switches between a first mode and a second mode.

[0007] When the first cavity is in the first configuration, the analytical crystal is configured to rotate around the Z-axis. The analytical crystal and the detector are arranged sequentially along the transmission direction of the synchrotron monochromatic light and are located in a plane parallel to the XY plane, so that the detector receives the p-polarized light diffracted by the synchrotron monochromatic light incident on the analytical crystal. When the first cavity is in the second configuration, the analytical crystal is configured to rotate around the Y-axis. The analytical crystal and the detector are arranged sequentially along the transmission direction of the synchrotron monochromatic light and are located in a plane parallel to the XZ plane, so that the detector receives the s-polarized light diffracted by the synchrotron monochromatic light incident on the analytical crystal.

[0008] Furthermore, it also includes a first vacuum tube, a second vacuum tube, and a second cavity. The second cavity is supported on a support base. Both the first vacuum tube and the second vacuum tube extend along the X-axis. One end of the first vacuum tube is connected to the first cavity, and the other end is used to receive synchrotron radiation monochromatic light. Both ends of the second vacuum tube are connected to the first cavity and the second cavity, respectively. The second cavity is provided with a valve, which is used to connect to a vacuum pump to evacuate the second cavity, the first vacuum tube, the first cavity, and the second vacuum tube through the vacuum pump.

[0009] Furthermore, the second cavity is also equipped with a vacuum gauge for measuring the vacuum level inside the second cavity.

[0010] Furthermore, the second cavity is also provided with a connector, and the detector is connected to the connector, which is used to lead out the signal of the detector.

[0011] Furthermore, the second cavity is also provided with an air inlet for ventilation into the second cavity.

[0012] Furthermore, both the first vacuum tube and the second vacuum tube are corrugated tubes.

[0013] Furthermore, when the first cavity is in the first configuration, the displacement stage is configured to allow the first cavity to rotate around the Z-axis, so that the analytical crystal can rotate around the Z-axis.

[0014] When the first cavity is in the second configuration, the displacement stage is configured to allow the first cavity to rotate about the Y-axis, so that the analytical crystal can rotate about the Y-axis.

[0015] Furthermore, the detector is a scintillator detector or a silicon detector.

[0016] The energy resolution testing device for 2.1-4keV synchrotron radiation monochromatic light of the present invention uses a displacement stage to switch the first cavity between a first mode and a second mode, thereby obtaining the Darwin width under p-polarized light and the Darwin width under s-polarized light. By selecting the smaller value of the two, a more accurate energy resolution can be obtained, thereby improving the accuracy of the test.

[0017] Another aspect of the present invention provides a method for testing the energy resolution of synchrotron radiation monochromatic light in the range of 2.1-4 keV, comprising the following steps:

[0018] S100: Provides an energy resolution testing device for synchrotron monochromatic light of 2.1-4keV as described above;

[0019] S200: The first cavity is rotated around the X-axis to the first configuration by means of the displacement stage;

[0020] S300: Rotate the analytical crystal to a position where the angle between the analytical crystal and the X-axis is the Bragg angle of the analytical crystal;

[0021] S400: Adjust the position of the first cavity so that the p-polarized light diffracted after the synchrotron monochromatic light is incident on the analytical crystal can be received by the detector;

[0022] S500: The analysis crystal is rotated multiple times around the Z-axis. After each rotation, the incident angle between the synchrotron monochromatic light and the analysis crystal, as well as the luminous flux measured by the detector at that incident angle, are obtained.

[0023] S600: The rocking curve is obtained by fitting the incident angle and the corresponding luminous flux after each rotation;

[0024] S700: Determine the Darwin width based on the swing curve, and determine the energy resolution of synchrotron monochromatic light based on the Darwin width.

[0025] Furthermore, step S400 specifically includes the following steps:

[0026] S410: A laser is emitted by a laser, which is transmitted along the X-axis to the analytical crystal. The position of the laser illuminating the analytical crystal is adjusted so that the laser is reflected by the analytical crystal and received by the detector. The position of the laser illuminating the analytical crystal is marked as the laser position.

[0027] S420: A fluorescent target is set on the surface of the analytical crystal so that the synchrotron monochromatic light forms a fluorescent spot on the surface of the analytical crystal after passing through the fluorescent target. The height of the first cavity is adjusted so that the fluorescent spot coincides with the laser position.

[0028] The energy resolution testing method for 2.1-4keV synchrotron radiation monochromatic light of the present invention uses a displacement stage to position the first cavity in a first configuration, so that the synchrotron radiation monochromatic light is incident on the analysis crystal in a p-polarized state. This can obtain a rocking curve with a smaller Darwin width, thereby obtaining a more accurate energy resolution and improving the accuracy of the test. Attached Figure Description

[0029] Figure 1 This is a schematic diagram of the energy resolution testing device for 2.1-4keV synchrotron radiation monochromatic light according to an embodiment of the present invention, when the first cavity is in the first configuration.

[0030] Figure 2 This is a schematic diagram of the energy resolution testing device for 2.1-4keV synchrotron radiation monochromatic light according to an embodiment of the present invention, when the first cavity is in the second configuration.

[0031] Figure 3 This is an enlarged view of the first cavity of the energy resolution testing device for 2.1-4keV synchrotron radiation monochromatic light according to an embodiment of the present invention, when it is in the first configuration.

[0032] Figure 4 This is an enlarged view of the first cavity of the energy resolution testing device for 2.1-4keV synchrotron monochromatic light according to an embodiment of the present invention when it is in the second configuration.

[0033] Figure 5 A schematic diagram of the rocking curves of p-polarized and s-polarized synchrotron monochromatic light according to an exemplary embodiment of the present invention.

[0034] Figure 6 This is a flowchart of a method for testing the energy resolution of synchrotron monochromatic light of 2.1-4 keV according to another embodiment of the present invention. Detailed Implementation

[0035] The preferred embodiments of the present invention are given below with reference to the accompanying drawings and described in detail.

[0036] like Figure 1and Figure 2 As shown, this embodiment of the invention provides an energy resolution testing device for 2.1-4 keV synchrotron radiation monochromatic light, including a first cavity 10 and a displacement stage 20. The first cavity 10 contains an analytical crystal 30 and a detector 40. The first cavity 10 is mounted on the displacement stage 20, which is used to rotate the first cavity 10 around the X-axis, thereby switching the first cavity 10 between a first mode and a second mode. When the first cavity 10 is in the first mode, as... Figure 3 As shown, the analytical crystal 30 and detector 40 are both located in a plane parallel to the XY plane, and are arranged sequentially along the transmission direction of synchrotron monochromatic light (e.g., X-rays) (i.e., the direction parallel to the X-axis). In this way, the synchrotron monochromatic light can illuminate the analytical crystal 30, and its p-polarized light will be received by the detector 40, thus achieving p-polarized incidence of the synchrotron monochromatic light onto the analytical crystal 30. The analytical crystal 30 can rotate around the Z-axis to obtain the swing curve of the p-polarized light (i.e., the swing curve of the monochromatic light in the p-polarization direction). When the first cavity 10 is in the second configuration, as... Figure 4 As shown, the analytical crystal 30 and detector 40 are both located in a plane parallel to the XZ plane, and are arranged sequentially along the transmission direction of the synchrotron monochromatic light. This allows the synchrotron monochromatic light to illuminate the analytical crystal 30, and its s-polarized light to be received by the detector 40, thus achieving s-polarization of the synchrotron monochromatic light into the analytical crystal 30. The analytical crystal 30 can rotate around the Y-axis to obtain a rocking curve. After obtaining the rocking curve, its Darwin width (half-width at half maximum) can be calculated, and then the energy resolution of the synchrotron monochromatic light can be calculated using the Darwin width.

[0037] In some embodiments, the energy resolution can be calculated using the following formula:

[0038]

[0039] in, Here, E is the energy resolution, E is the photon energy of synchrotron monochromatic light, ΔE is the energy per step of the monochromator during spectral scanning, θ is the Bragg angle of the analytical crystal at 30°, w is the Darwin width, and δ is the vertical angular divergence of the synchrotron monochromatic light.

[0040] By switching the first cavity 10 between a first mode and a second mode using the displacement stage 20, synchrotron monochromatic light can be incident on the analysis crystal 30 in p-polarized and s-polarized states, respectively. This yields the rocking curves under p-polarized light and s-polarized light, resulting in different Darwin widths and thus different energy resolutions. In this way, the smaller of the two Darwin widths can be selected for calculating the energy resolution, avoiding a Darwin width for energy resolution calculation that is greater than or equal to the Darwin width of the monochromator crystal. This minimizes the influence of the analysis crystal 30's own Darwin width on the monochromator crystal, resulting in a more accurate energy resolution of the monochromatic light.

[0041] In some embodiments, the analytical crystal 30 may be a silicon crystal. Based on the energy of the synchrotron monochromatic light and the crystal plane index of the analytical crystal 30, the first cavity 10 can be positioned in either a first or a second configuration to perform energy resolution testing, thereby obtaining accurate test results. For example, when the energy of the synchrotron monochromatic light is in the high-energy range (>6 keV) and the crystal plane index of the silicon crystal is high, the first cavity 10 can be positioned in the second configuration, allowing the synchrotron monochromatic light to be incident on the analytical crystal 30 in an s-polarized state; when the energy of the synchrotron monochromatic light is in the medium-energy range (2.1-4 keV) and the crystal plane index of the analytical crystal 30 is low, for example, (1 1 1), the first cavity 10 can be positioned in the first configuration, allowing the synchrotron monochromatic light to be incident on the analytical crystal 30 in a p-polarized state.

[0042] In some embodiments, the energy resolution testing device may further include a first vacuum tube 51, a second vacuum tube 52, and a second cavity 60. The second cavity 60 is supported on a support base 70. Both the first vacuum tube 51 and the second vacuum tube 52 extend along the X-axis. One end of the first vacuum tube 51 is connected to the first cavity 10, and the other end is used to receive synchrotron radiation monochromatic light. Both ends of the second vacuum tube 52 are connected to the first cavity 10 and the second cavity 20, respectively. A valve 61 (e.g., an angle valve) may be provided on the second cavity 60. The valve 61 is used to connect to a vacuum pump to evacuate the second cavity 60, the second vacuum tube 52, the first cavity 10, and the first vacuum tube 51 to achieve a vacuum environment, allowing the synchrotron radiation monochromatic light to transmit within the vacuum environment. A vacuum gauge 62 may also be provided on the second cavity 60 to measure the vacuum level within the second cavity 60. A connector (e.g., a BNC connector) 63 may also be provided on the second cavity 60. The detector 40 is connected to the connector 63, which is used to extract the signal from the detector 40. The second cavity 60 may also be provided with an air inlet 64 for ventilation into the second cavity 60.

[0043] In some embodiments, both the first vacuum tube 51 and the second vacuum tube 52 are vacuum bellows.

[0044] In some embodiments, detector 40 may be a scintillator detector, a silicon detector (e.g., a photodiode), or any other suitable detector.

[0045] In some embodiments, the displacement stage 20 can be a six-axis displacement stage, which allows the first cavity 10 to perform six degrees of freedom of motion. The analytical crystal 30 and the detector 40 are both fixed within the first cavity 10 so that their relative positions remain constant. By rotating the first cavity 10 with six degrees of freedom using the displacement stage 20, the analytical crystal 30 and the detector 40 can perform six degrees of freedom of motion. For example, when the first cavity 10 is in a first configuration, the displacement stage 20 can rotate the first cavity 10 around the Z-axis, thereby causing both the analytical crystal 30 and the detector 40 to rotate around the Z-axis; when the first cavity is in a second configuration, the displacement stage 20 can rotate the first cavity 10 around the Y-axis, thereby causing both the analytical crystal 30 and the detector 40 to rotate around the Y-axis.

[0046] Understandably, this is done to show the internal structure of the first cavity 10. Figures 1 to 4 The first cavity 10 is omitted from the text. In fact, the first cavity 10 is a closed cavity.

[0047] In an exemplary embodiment, the analytical crystal 30 is a silicon crystal with a crystal plane index of (1 11) and the energy of the synchrotron monochromatic light is 2.5 keV. The analytical crystal 30 is rotated when the first cavity 10 is in a first state and a second state, respectively, thereby obtaining the following... Figure 5 The two rocking curves shown are as follows: the black curve represents the rocking curve under p-polarized light, and the red curve represents the rocking curve under s-polarized light. The horizontal axis represents the incident angle of monochromatic light, and the vertical axis represents reflectivity. The Darwin width of the rocking curve under p-polarized light is 9.4 × 10⁻⁶. -5 The Darwin width of the rocking curve under s-polarized light is 2.1 × 10⁻⁶. -4 Therefore, it can be seen that the Darwin width under p-polarized light is smaller than that under s-polarized light. By utilizing the Darwin width under p-polarized light, a more accurate energy resolution can be obtained.

[0048] The energy resolution testing device for 2.1-4keV synchrotron radiation monochromatic light in this embodiment of the invention uses a displacement stage 20 to switch the first cavity 10 between a first mode and a second mode, thereby obtaining the Darwin width under p-polarized light and the Darwin width under s-polarized light. By selecting the smaller value of the two, a more accurate energy resolution can be obtained, thereby improving the accuracy of the test.

[0049] like Figure 6 As shown, another embodiment of the present invention provides a method for testing the energy resolution of synchrotron monochromatic light in the range of 2.1-4 keV, which includes the following steps:

[0050] S100: Provides an energy resolution testing device for 2.1-4keV synchrotron radiation monochromatic light according to the above embodiments.

[0051] S200: The first cavity 10 is rotated around the X-axis to the first configuration by means of the displacement stage 20.

[0052] S300: Rotate the analytical crystal 30 to the Bragg angle with the X-axis.

[0053] Crystal 30 is analyzed to be a silicon crystal with a crystal plane index of (1 1 1) and a Bragg angle of 52.3 degrees.

[0054] S400: Adjust the position of the first cavity 10 so that the p-polarized light diffracted after the synchrotron monochromatic light is incident on the analytical crystal 30 can be received by the detector 40.

[0055] The energy of monochromatic light from synchrotron radiation is 2.1-4 keV.

[0056] In some embodiments, step S400 specifically includes:

[0057] S410: A laser is emitted by a laser and transmitted along the X-direction to the analytical crystal 30. The position of the laser illuminating the analytical crystal 30 is adjusted so that the laser is reflected by the analytical crystal 30 and received by the detector 40. The position of the laser illuminating the analytical crystal 30 is marked as the laser position.

[0058] S420: A fluorescent target is set on the surface of the analytical crystal 30 so that the synchrotron monochromatic light forms a fluorescent spot on the surface of the analytical crystal 30 after passing through the fluorescent target. The height of the first cavity 10 is adjusted so that the fluorescent spot coincides with the laser position.

[0059] In some embodiments, the height of the first cavity 10 can be adjusted by the displacement stage 20 so that the fluorescence point and the laser position coincide.

[0060] S500: The analysis crystal 30 is rotated multiple times around the Z-axis. After each rotation, the incident angle between the synchrotron monochromatic light and the analysis crystal 30 and the luminous flux measured by the detector 40 corresponding to that incident angle are obtained.

[0061] In some embodiments, the analytical crystal 30 can be rotated multiple times at preset angular intervals (e.g., 0.5 radians), and the incident angle after each rotation can be calculated based on the rotation angle, rotation direction, and initial Bragg angle.

[0062] S600: The rocking curve is obtained by fitting the incident angle and the corresponding luminous flux after each rotation.

[0063] In some embodiments, the incident angle can be used as the abscissa and the corresponding luminous flux as the ordinate to obtain multiple sets of data. Gaussian fitting of these data yields a swing curve. Alternatively, the reflectivity corresponding to the incident angle can be calculated based on the luminous flux (i.e., the emitted luminous flux) and the incident luminous flux, where reflectivity = emitted luminous flux / incident luminous flux. Then, the swing curve is obtained by using the incident angle as the abscissa and the corresponding reflectivity as the ordinate.

[0064] S700: Determine the Darwin width based on the rocking curve, and determine the energy resolution of synchrotron monochromatic light based on the Darwin width.

[0065] The Darwin width is half the width and height of the wobble curve. After obtaining the Darwin width, the energy resolution can be obtained according to the above formula (1).

[0066] The energy resolution testing method for 2.1-4keV synchrotron radiation monochromatic light in this embodiment of the invention uses a displacement stage 20 to position the first cavity 10 in a first configuration, so that the synchrotron radiation monochromatic light is incident on the analysis crystal 30 in a p-polarized state. This can obtain a rocking curve with a smaller Darwin width, thereby obtaining a more accurate energy resolution and improving the accuracy of the test.

[0067] It should be noted that the present invention (e.g., inventive concepts, etc.) has been described in the specification of this patent document and / or illustrated in the figures according to exemplary embodiments; embodiments of the present invention are presented by way of example only and are not intended to limit the scope of the invention. The structure and / or arrangement of elements of the inventive concept embodied in the present invention as described in the specification and / or illustrated in the figures are merely illustrative. Although exemplary embodiments of the present invention have been described in detail in this patent document, it will be readily understood by those skilled in the art that equivalents, modifications, variations, etc., of the subject matter of the exemplary and alternative embodiments are possible and are considered to be within the scope of the present invention; all such subject matter (e.g., modifications, variations, embodiments, combinations, equivalents, etc.) are intended to be included within the scope of the present invention. It should also be noted that various modifications, variations, substitutions, equivalents, alterations, omissions, etc., may be made in the configuration and / or arrangement of the exemplary embodiments (e.g., in terms of concept, design, structure, apparatus, form, assembly, construction, means, function, device, process / method, steps, sequence of process / method steps, operation, operating conditions, performance, materials, composition, combination, etc.) without departing from the scope of the invention; all such subject matter (e.g., modifications, variations, embodiments, combinations, equivalents, etc.) is intended to be included within the scope of the invention. The scope of the invention is not intended to be limited to the subject matter described in the specification and / or figures of this patent document (e.g., details, structure, function, materials, behavior, steps, sequence, apparatus, results, etc.). Considering that the claims of this patent document will be properly interpreted to cover the full scope of the subject matter of the invention (e.g., including any and all such modifications, variations, embodiments, combinations, equivalents, etc.); it should be understood that the terminology used in this patent document is for the purpose of providing a description of the subject matter of exemplary embodiments and not as a limitation on the scope of the invention.

[0068] It should also be noted that, according to exemplary embodiments, the present invention may include conventional techniques (e.g., techniques implemented and / or integrated in exemplary embodiments, modifications, variations, combinations, equivalents, etc.), or may include any other applicable techniques (now and / or in the future) with the ability to perform the functions and processes / operations described in the specification and / or illustrated in the figures. All such techniques (e.g., techniques implemented in the manner of embodiments, modifications, variations, combinations, equivalents, etc.) are considered to be within the scope of the present invention of this patent document.

Claims

1. An energy resolution testing device for synchrotron radiation monochromatic light of 2.1-4 keV, characterized in that, The device includes a first cavity and a displacement stage. The first cavity is a sealed cavity, and an analytical crystal and a detector are disposed inside the first cavity. The analytical crystal is a Si (111) crystal. The first cavity is located on the displacement stage, and the displacement stage is used to rotate the first cavity around the X-axis so that the first cavity can switch between a first mode and a second mode. The analytical crystal and the detector are both fixed inside the first cavity so that their relative positions remain fixed at all times. When the first cavity is in the first configuration, the analytical crystal is configured to rotate around the Z-axis. The analytical crystal and the detector are arranged sequentially along the transmission direction of the synchrotron monochromatic light and are located in a plane parallel to the XY plane, so that the detector receives the p-polarized light diffracted by the synchrotron monochromatic light incident on the analytical crystal. When the first cavity is in the second configuration, the analytical crystal is configured to rotate around the Y-axis. The analytical crystal and the detector are arranged sequentially along the transmission direction of the synchrotron monochromatic light and are located in a plane parallel to the XZ plane, so that the detector receives the s-polarized light diffracted by the synchrotron monochromatic light incident on the analytical crystal. It also includes a first vacuum tube, a second vacuum tube, and a second cavity. The second cavity is supported on a support base. Both the first vacuum tube and the second vacuum tube extend along the X-axis. One end of the first vacuum tube is connected to the first cavity, and the other end is used to receive synchrotron monochromatic light. Both ends of the second vacuum tube are connected to the first cavity and the second cavity, respectively. The second cavity is provided with a valve, which is used to connect to a vacuum pump to evacuate the second cavity, the first vacuum tube, the first cavity, and the second vacuum tube.

2. The energy resolution testing device for 2.1-4 keV synchrotron radiation monochromatic light according to claim 1, characterized in that, The second cavity is also equipped with a vacuum gauge for measuring the vacuum level inside the second cavity.

3. The energy resolution testing device for 2.1-4 keV synchrotron radiation monochromatic light according to claim 1, characterized in that, The second cavity is also provided with a connector, and the detector is connected to the connector, which is used to lead out the signal of the detector.

4. The energy resolution testing device for 2.1-4 keV synchrotron radiation monochromatic light according to claim 1, characterized in that, The second cavity is also provided with an air inlet for ventilation into the second cavity.

5. The energy resolution testing device for 2.1-4 keV synchrotron radiation monochromatic light according to claim 1, characterized in that, Both the first vacuum tube and the second vacuum tube are corrugated tubes.

6. The energy resolution testing device for 2.1-4 keV synchrotron radiation monochromatic light according to claim 1, characterized in that, When the first cavity is in the first configuration, the displacement stage is configured to allow the first cavity to rotate around the Z-axis, so that the analytical crystal can rotate around the Z-axis. When the first cavity is in the second configuration, the displacement stage is configured to allow the first cavity to rotate about the Y-axis, so that the analytical crystal can rotate about the Y-axis.

7. The energy resolution testing device for 2.1-4 keV synchrotron radiation monochromatic light according to claim 1, characterized in that, The detector is a scintillator detector or a silicon detector.

8. A method for measuring the energy resolution of synchrotron radiation monochromatic light in the 2.1-4 keV range, characterized in that, Includes the following steps: S100: Provides an energy resolution testing device for 2.1-4keV synchrotron radiation monochromatic light as described in any one of claims 1-7; S200: The first cavity is rotated around the X-axis to the first configuration by means of the displacement stage; S300: Rotate the analytical crystal to a position where the angle between the analytical crystal and the X-axis is the Bragg angle of the analytical crystal; S400: Adjust the position of the first cavity so that the p-polarized light diffracted after the synchrotron monochromatic light is incident on the analytical crystal can be received by the detector; S500: The analysis crystal is rotated multiple times around the Z-axis. After each rotation, the incident angle between the synchrotron monochromatic light and the analysis crystal, as well as the luminous flux measured by the detector at that incident angle, are obtained. S600: The rocking curve is obtained by fitting the incident angle and the corresponding luminous flux after each rotation; S700: Determine the Darwin width based on the swing curve, and determine the energy resolution of synchrotron monochromatic light based on the Darwin width.

9. The method for testing the energy resolution of 2.1-4 keV synchrotron monochromatic light according to claim 8, characterized in that, Step S400 specifically includes the following steps: S410: A laser is emitted by a laser, which is transmitted along the X-axis to the analytical crystal. The position of the laser illuminating the analytical crystal is adjusted so that the laser is reflected by the analytical crystal and received by the detector. The position of the laser illuminating the analytical crystal is marked as the laser position. S420: A fluorescent target is set on the surface of the analytical crystal so that the synchrotron monochromatic light forms a fluorescent spot on the surface of the analytical crystal after passing through the fluorescent target. The height of the first cavity is adjusted so that the fluorescent spot coincides with the laser position.

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