Method, device and equipment for determining blade array structure of turbo molecular pump

By adjusting the turbomolecular pump blade structure step by step until the desired pumping speed and compression ratio are met, and overall fine-tuning and optimization are carried out, the problems of huge optimization search space and high computational complexity in the existing technology are solved, and a more efficient pumping speed and compression ratio balance is achieved.

CN119939822APending Publication Date: 2025-05-06BEIJING GRAND RAY TECH CO LTD
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Patent Information

Application Number
CN202510161436.7
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-02-13
Publication Date
2025-05-06

AI Technical Summary

Technical Problem

The multi-stage leaf column structure design of existing turbomolecular pumps leads to huge optimization search space and high computational complexity, making it difficult to find the best balance point between compression ratio and pumping speed.

Method used

By adding the turbomolecular pump leaf column step by step, and adjusting the parameters of each leaf column until the desired pumping speed and compression ratio are met, and finally, the overall fine-tuning optimization is carried out to determine the final leaf column structure.

Benefits of technology

Reduces design complexity, reduces the optimization search space, improves the performance of pumping speed and compression ratio, and avoids the efficiency loss of not finding the optimal balance point between compression ratio and pumping speed.

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Abstract

The invention provides a method, device and equipment for determining a blade array structure of a turbo molecular pump. The method comprises the steps that the expected pumping speed and the expected compression ratio are obtained; blade rows of the turbo molecular pump are increased step by step, and parameter adjustment is carried out on the blade rows increased in each step until a target first blade row cascade structure meeting the expected pumping speed is obtained; on the basis of the target first blade array cascade structure, turbine molecular pump blade arrays are increased step by step, and parameter adjustment is conducted on the blade arrays increased in each step until a target second blade array cascade structure meeting the expected compression ratio is obtained; and performing overall fine tuning optimization on the target second blade array cascade structure, and determining a final blade array structure. According to the effect of each stage of the turbo molecular pump blade array and the inter-stage cascading characteristic, performance improvement of the pumping speed and the compression ratio is decoupled, meanwhile, in the process of inspecting the performance of the blade array cascading structure, the optimal balance point between the compression ratio and the pumping speed can be quickly found out by optimizing the parameters of the turbo molecular pump blade array stage by stage, and the performance of the turbo molecular pump blade array is improved. And the calculation complexity is reduced.
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