Optimization Method of Microscope Objective and Electronic Device

Abstract

The present application provides an optimization method for a microscope objective lens and an electronic device, relating to the field of microscopic imaging technology. The method includes: obtaining initial design parameters of the microscope objective lens; respectively calculating the imaging quality of the microscope objective lens and the total ghost image intensity of the microscope objective lens based on a Köhler illumination system according to the initial design parameters of the microscope objective lens; constructing a preset lens evaluation function according to the imaging quality and the total ghost image intensity of the microscope objective lens, and iteratively calculating the target design parameters of each target lens when the imaging quality meets a first preset requirement and the total ghost image intensity meets a second preset requirement. Compared with the existing method determined through multiple experiments, the optimization efficiency can be improved, and through the introduction of the preset lens evaluation function, comprehensive evaluation can be realized to ensure the optimization effect.

Description

Technical Field

[0001] This application relates to the field of microscopic imaging technology, and particularly to an optimization method for a microscopic objective lens and an electronic device. Background Art

[0002] As an important precision detection and imaging means, the Köhler illumination microscopic imaging system has been widely used in fields such as biomedicine, machine vision, precision manufacturing, and industrial quality inspection. However, in this optical system, the reflection of the light source light on the microscopic objective lens cannot be avoided. If the reflected light converges near the image plane, additional light spots will be generated on the image plane, forming ghost images, which will affect the shooting and detection of the target.

[0003] In the existing ghost image elimination methods, mainly the optimization personnel optimize through multiple experiments according to the optimization experience. However, due to the lack of a unified optimization standard, there is often a problem of low optimization efficiency of the microscopic objective lens. Summary of the Invention

[0004] The purpose of this application is to provide an optimization method for a microscopic objective lens and an electronic device, which can improve the optimization efficiency and ensure the optimization effect, aiming at the deficiencies in the above-mentioned existing technologies.

[0005] To achieve the above purpose, the technical solutions adopted in the embodiments of this application are as follows:

[0006] In a first aspect, the present invention provides an optimization method for a microscopic objective lens, and the method includes:

[0007] Obtain the initial design parameters of the microscopic objective lens;

[0008] According to the initial design parameters of the microscopic objective lens, calculate the imaging quality of the microscopic objective lens and the total ghost image intensity of the microscopic objective lens under the Köhler illumination system respectively. The microscopic objective lens includes m target lenses, and the m target lenses include n mirror surfaces, where m is an integer greater than 1 and n > m;

[0009] According to the imaging quality and total ghost image intensity of the microscopic objective lens, construct a preset lens evaluation function, and iteratively calculate the target design parameters of each target lens when the imaging quality meets the first preset requirement and the total ghost image intensity meets the second preset requirement. The target design parameters of each target lens include at least one of the following: radius of curvature, refractive index, Abbe number, thickness, and relative setting position of each target lens in the microscopic objective lens.

[0010] In an alternative embodiment, the calculating the imaging quality of the microscopic objective lens according to the initial design parameters of the microscopic objective lens includes:

[0011] According to the initial design parameters of the microscopic objective lens, obtain the initial technical index parameters of the microscopic objective lens;

[0012] Calculate the imaging quality of the microscope objective according to the initial technical specification parameters and preset weight factors of the microscope objective.

[0013] In an alternative embodiment, the calculating the total ghost image intensity of the microscope objective based on the Köhler illumination system according to the initial design parameters of the microscope objective includes:

[0014] Calculate the ghost image intensity corresponding to each mirror surface in the microscope objective according to the initial design parameters of the microscope objective;

[0015] Calculate the total ghost image intensity of the microscope objective according to the ghost image intensity corresponding to each mirror surface in the microscope objective and the ghost image weight factor corresponding to each mirror surface.

[0016] In an alternative embodiment, the calculating the ghost image intensity corresponding to each mirror surface in the microscope objective according to the initial design parameters of the microscope objective includes:

[0017] According to the initial design parameters of the microscope objective, respectively obtain the factor of the light flux ratio for forming a ghost image in the coaxial Köhler illumination beam based on the Köhler illumination system and the maximum image height of the coaxial Köhler illumination beam introducing a ghost image on each mirror surface;

[0018] Calculate the ghost image intensity corresponding to each mirror surface in the microscope objective according to the preset transmittance of the lens, the factor of the light flux ratio, and the maximum image height.

[0019] In an alternative embodiment, the obtaining the factor of the light flux ratio for forming a ghost image in the coaxial Köhler illumination beam based on the initial design parameters of the microscope objective includes:

[0020] According to the initial design parameters of the microscope objective, obtain the maximum angle subtended by the coaxial Köhler illumination beam introducing a ghost image on the entrance pupil plane of the microscope objective for each mirror surface;

[0021] Calculate the factor of the light flux ratio for forming a ghost image in the coaxial Köhler illumination beam based on the maximum angle subtended and the divergence angle of the coaxial Köhler illumination beam on the objective pupil plane of the microscope objective.

[0022] In an alternative embodiment, the obtaining the maximum image height of the coaxial Köhler illumination beam introducing a ghost image on each mirror surface according to the initial design parameters of the microscope objective includes:

[0023] When the imaging path of the microscope objective lens is a preset ideal lens, obtain the first ray transfer matrix when the light passes through the preset ideal lens, and according to the initial design parameters of the microscope objective lens, respectively obtain the second ray transfer matrix when the light passes through each mirror surface in the microscope objective lens, and the third ray transfer matrix when the light is transmitted from each mirror surface in the microscope objective lens through a preset uniform medium to the next mirror surface;

[0024] According to the first ray transfer matrix, the second ray transfer matrix, and the third ray transfer matrix, calculate the maximum image height of the ghost image introduced by the coaxial Köhler illumination beam on each mirror surface;

[0025] The obtaining the maximum angular spread of the coaxial Köhler illumination beam introducing the ghost image on the entrance pupil surface of the microscope objective lens according to the initial design parameters of the microscope objective lens includes:

[0026] According to the first ray transfer matrix, the second ray transfer matrix, and the third ray transfer matrix, calculate the maximum angular spread of the coaxial Köhler illumination beam introducing the ghost image on the entrance pupil surface of the microscope objective lens.

[0027] In an alternative embodiment, the obtaining the first ray transfer matrix when the light passes through the preset ideal lens includes:

[0028] Obtain the focal length of the preset ideal lens and the distance from the light incident position to the preset ideal lens;

[0029] According to the focal length and the distance, calculate the first ray transfer matrix.

[0030] In an alternative embodiment, the obtaining the second ray transfer matrix when the light passes through each mirror surface in the microscope objective lens according to the initial design parameters of the microscope objective lens includes:

[0031] According to the initial design parameters of the microscope objective lens, obtain the initial radius of curvature of each mirror surface in the microscope objective lens and the initial refractive index of the media before and after each mirror;

[0032] According to the initial radius of curvature of each mirror surface in the microscope objective lens and the initial refractive index of the media before and after each mirror, calculate the second ray transfer matrix.

[0033] In an alternative embodiment, the obtaining the third ray transfer matrix when the light is transmitted from each mirror surface in the microscope objective lens through a preset uniform medium to the next mirror surface according to the initial design parameters of the microscope objective lens includes:

[0034] According to the initial design parameters of the microscope objective lens, obtain the initial thickness of the light transmitted from each mirror surface in the microscope objective lens through the preset uniform medium to the next mirror surface;

[0035] Calculate the third light transmission matrix according to the initial thickness.

[0036] In a second aspect, the present invention provides an electronic device, including: a processor, a storage medium, and a bus. The storage medium stores machine-readable instructions executable by the processor. When the electronic device runs, the processor communicates with the storage medium through the bus. The processor executes the machine-readable instructions to perform the steps of the optimization method of the microscope objective lens according to any one of the foregoing embodiments.

[0037] The beneficial effects of this application are as follows:

[0038] In the optimization method of the microscope objective lens and the electronic device provided by the embodiments of this application, it includes: obtaining the initial design parameters of the microscope objective lens; according to the initial design parameters of the microscope objective lens, calculating the imaging quality of the microscope objective lens and the total ghost image intensity of the microscope objective lens based on the Köhler illumination system respectively. The microscope objective lens includes m target lenses, and the m target lenses include n mirrors. m is an integer greater than 1, and n > m; according to the imaging quality and the total ghost image intensity of the microscope objective lens, constructing a preset lens evaluation function, and iteratively calculating the target design parameters of each target lens when the imaging quality meets the first preset requirement and the total ghost image intensity meets the second preset requirement. The target design parameters of each target lens include at least one of the following: radius of curvature, refractive index, Abbe number, thickness, and relative setting position of each target lens in the microscope objective lens. Compared with the existing method determined through multiple experiments, the optimization efficiency can be improved, and through the introduction of the preset lens evaluation function, comprehensive evaluation can be realized to ensure the optimization effect. Description of the Drawings

[0039] In order to more clearly illustrate the technical solutions of the embodiments of this application, the following will briefly introduce the drawings required in the embodiments. It should be understood that the following drawings only show some embodiments of this application, and therefore should not be regarded as a limitation of the scope. For those of ordinary skill in the art, other related drawings can be obtained based on these drawings without creative efforts.

[0040] Figure 1 The working principle of a Köhler illumination system provided by an embodiment of this application;

[0041] Figure 2 The flowchart of an optimization method of a microscope objective lens provided by an embodiment of this application;

[0042] Figure 3 The flowchart of another optimization method of a microscope objective lens provided by an embodiment of this application;

[0043] Figure 4Schematic flowchart of another optimization method for the microscope objective lens provided by the embodiment of the present application;

[0044] Figure 5 Schematic flowchart of another optimization method for the microscope objective lens provided by the embodiment of the present application;

[0045] Figure 6 Schematic flowchart of another optimization method for the microscope objective lens provided by the embodiment of the present application;

[0046] Figure 7 External shape structure diagrams of two lenses provided by the embodiment of the application;

[0047] Figure 8 Schematic diagram of ghost image simulation of the first lens provided by the embodiment of the present application;

[0048] Figure 9 Schematic diagram of ghost image simulation of the second lens provided by the embodiment of the present application;

[0049] Figure 10 Image comparison diagram obtained by shooting with two lenses provided by the embodiment of the present application;

[0050] Figure 11 Functional module schematic diagram of an optimization device for lens parameters provided by the embodiment of the present application;

[0051] Figure 12 Schematic diagram of the structure of an electronic device provided by the embodiment of the present application. Detailed implementation manners

[0052] To make the objectives, technical solutions, and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are some, but not all, of the embodiments of the present application. Usually, the components of the embodiments of the present application described and illustrated in the accompanying drawings here can be arranged and designed in various different configurations.

[0053] Therefore, the following detailed description of the embodiments of the present application provided in the accompanying drawings is not intended to limit the scope of the present application claimed, but merely represents selected embodiments of the present application. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present application without creative efforts shall fall within the scope of protection of the present application.

[0054] It should be noted that: similar reference numerals and letters denote similar items in the following drawings. Therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

[0055] Figure 1This is the working principle of a Kohler illumination system provided by an embodiment of the present application. The Kohler illumination microscopy imaging system is an important means of precision detection and imaging. For example, Figure 1 As shown, the light source 11 emits light, and the condenser lens 12 images the light source at the position of the entrance pupil plane 131 of the microscope objective lens 13, so that the light emitted from each point on the light source can evenly cover the entrance pupil plane 131 of the microscope objective lens, laying a foundation for subsequent uniform illumination; in addition, after the light passes through the condenser lens 12, it reaches the beam splitter 14. The beam splitter 14 separates the light into reflection and transmission. Part of the light is reflected and changes the propagation direction, and the other part of the light is transmitted and continues to propagate in the original direction. In this illumination system, the reflected light will propagate towards the microscope objective lens for illuminating the sample.

[0056] During the process of illuminating the sample, the light reflected by the beam splitter 14 enters the microscope objective lens 13 and finally irradiates on the working surface 17 of the microscope objective lens 13 (i.e., the position where the sample is located). Among them, since the light source has been imaged on the entrance pupil plane 131 of the microscope objective lens 13 before, the light emitted from the entrance pupil plane 131 can evenly illuminate the sample.

[0057] During the imaging process, after the sample is illuminated, the light reflected or transmitted by it passes through the microscope objective lens 13 again, then is transmitted through the beam splitter 14, and then passes through the tube lens 15, and finally forms an image on the CMOS sensor 16. In this way, a clear image of the sample after being uniformly illuminated can be obtained on the CMOS sensor 16.

[0058] However, if the design of the microscope objective lens is unreasonable, the reflection of the light source light on the lens in the microscope objective lens is inevitable. If the reflected light converges near the CMOS sensor 16, additional light spots will be generated on the CMOS sensor 16, forming ghost images, which will affect the shooting and inspection of the target.

[0059] Among them, a ghost image can be understood as an additional and unwanted image that appears in addition to the expected main image. The ghost image will be superimposed on the normal image, reducing the contrast of the image and blurring the details, interfering with the observation and analysis of the target object. For example, when observing cell structures under a microscope, the ghost image may make the boundaries of the cells unclear, affecting the judgment of cell morphology and internal structure. In addition, the ghost image can produce visual illusions, misleading the observer and causing wrong judgments about the shape, position, etc. of the object. In some occasions that require precise measurement and analysis, such as industrial inspection and scientific research, the ghost image may lead to inaccurate measurement results, affecting the test conclusion and product quality control. The ghost image intensity refers to the brightness or light energy size of the ghost image.

[0060] In the prior art, in order to eliminate ghost images, multiple experiments are often tried, so the lens optimization efficiency is low.

[0061] In view of this, an optimization method for a microscope objective lens provided by an embodiment of the present application can combine the imaging quality and the total ghost image intensity of the microscope objective lens by presetting a lens evaluation function, and obtain the target design parameters of each target lens when the imaging quality meets the first preset requirement and the total ghost image intensity meets the second preset requirement through iterative calculation. Finally, the initial design parameters of the microscope objective lens can be adjusted according to the target design parameters, so as to realize the rapid optimization of the design parameters of the microscope objective lens. Compared with the existing method determined through multiple tests, the optimization efficiency and optimization effect can be improved.

[0062] Figure 2 FIG. is a schematic flowchart of an optimization method for a microscope objective lens provided by an embodiment of the present application. This method can be applied to electronic devices such as computers, servers, and processors, such as Figure 2 shown, this method may include:

[0063] Step 101, obtain the initial design parameters of the microscope objective lens.

[0064] Optionally, the initial design parameters of the microscope objective lens may include: initial curvature radius, initial refractive index, initial thickness, initial relative setting positions of each target lens in the microscope objective lens, etc., which are not limited herein. According to the actual application scenario, some initial design parameters of the microscope objective lens may be preset default values, or set according to experience.

[0065] Step 102, calculate the imaging quality of the microscope objective lens and the total ghost image intensity of the microscope objective lens based on the Köhler illumination system respectively according to the initial design parameters of the microscope objective lens.

[0066] The microscope objective lens includes m target lenses, and the m target lenses include n mirror surfaces. m is an integer greater than 1, and n > m. Among them, the relationship between n and m can be expressed as: m + 1 ≤ n ≤ 2m.

[0067] Referring to Figure 1 shown, the target lens may include 4 target lenses, and the 4 target lenses may include: 8 mirror surfaces, that is, m = 4, n = 8. It should be noted that the number of target lenses and the number of mirror surfaces in the microscope objective lens are not limited thereto.

[0068] Among them, the imaging quality of the microscope objective lens can characterize the imaging effect of the microscope, such as the clarity, contrast, and color accuracy of the imaged object, etc.; the total ghost image intensity of the microscope objective lens can characterize the brightness or light energy size of the ghost images corresponding to all target lenses in the microscope objective lens.

[0069] Step 103, construct a preset lens evaluation function according to the imaging quality and total ghost image intensity of the microscope objective lens, and iteratively calculate the target design parameters of each target lens when the imaging quality meets the first preset requirement and the total ghost image intensity meets the second preset requirement.

[0070] Among them, the target design parameters of each target lens include at least one of the following: radius of curvature, refractive index, Abbe number, thickness, and relative setting position of each target lens in the microscope objective. It can be understood that the relative setting position of each target lens in the microscope objective can characterize the relative setting positions between the target lenses.

[0071] Optionally, the preset lens evaluation function can be expressed as , where represents the lens image quality evaluation term of the microscope objective, which is used to evaluate the imaging quality; represents the ghost image intensity evaluation term, which is used to evaluate the total ghost image intensity of the display objective; represents the damping term, which is used to control the update amplitude of the design parameters of each target lens during the iterative optimization process. The damping term can be set based on the Damped Least Squares (DLS) method, which is used to control the iteration step size and avoid the algorithm falling into a local optimal solution, so as to ensure finding the global optimal solution under the requirements of high image quality and low ghost image intensity.

[0072] It should be noted that when specifically performing iterative calculations, the design parameters of each target lens corresponding to the minimum function value of the preset lens evaluation function (i.e., the function optimal solution) can be used as the target design parameters of each target lens. In addition, from this function expression, it can be seen that the preset lens evaluation function should be able to simultaneously reflect the imaging quality and the total ghost image intensity of the microscope objective. Therefore, it can comprehensively and accurately evaluate the overall performance of the microscope objective. Therefore, compared with the existing method determined through multiple experiments, it can improve the optimization efficiency, and through the introduction of the preset lens evaluation function, comprehensive evaluation can be achieved, and the optimization effect can be guaranteed.

[0073] The first preset requirement can indicate the target imaging quality of the lens, and the second preset requirement can indicate the total target ghost image intensity. In some embodiments, specifically when performing iterative calculations, the target design parameters of each target lens when the imaging quality meets the first preset requirement and the total ghost image intensity meets the second preset requirement can be iteratively calculated through the preset lens evaluation function constructed above. For example, the target design parameters of each target lens in the microscope objective under the requirements of high image quality and low ghost image intensity can be iteratively calculated.

[0074] In summary, the embodiment of the present application provides an optimization method for a microscope objective lens. The method includes: obtaining the initial design parameters of the microscope objective lens; according to the initial design parameters of the microscope objective lens, calculating the imaging quality of the microscope objective lens and the total ghost image intensity of the microscope objective lens based on the Köhler illumination system respectively. The microscope objective lens includes m target lenses, and the m target lenses include n mirrors. m is an integer greater than 1, and n > m; according to the imaging quality and the total ghost image intensity of the microscope objective lens, constructing a preset lens evaluation function, and iteratively calculating the target design parameters of each target lens when the imaging quality meets the first preset requirement and the total ghost image intensity meets the second preset requirement. The target design parameters of each target lens include at least one of the following: radius of curvature, refractive index, Abbe number, thickness, and relative setting position of each target lens in the microscope objective lens. Compared with the existing method determined through multiple experiments, the optimization efficiency can be improved, and through the introduction of the preset lens evaluation function, comprehensive evaluation can be realized, ensuring the optimization effect.

[0075] In addition, the preset lens evaluation function should be able to evaluate the imaging quality and the total ghost image intensity of the microscope objective lens at the same time. Therefore, it can comprehensively and accurately evaluate the overall performance of the microscope objective lens. Therefore, compared with the ghost image elimination method that separately performs image quality optimization, ghost image evaluation, and ghost image elimination processes, the present application can improve the optimization efficiency, achieve comprehensive evaluation, and obtain better optimization effects.

[0076] Figure 3 It is a schematic flowchart of another optimization method for a microscope objective lens provided by the embodiment of the present application. In an alternative embodiment, as Figure 3 shown, the above-mentioned calculating the imaging quality of the microscope objective lens according to the initial design parameters of the microscope objective lens includes:

[0077] Step 201, obtaining the initial technical index parameters of the microscope objective lens according to the initial design parameters of the microscope objective lens.

[0078] Among them, the initial technical index parameters of the microscope objective lens may include: modulation transfer function term, RMS spot diagram radius term, coma term, field curvature term, distortion term, etc., which are not limited herein and may include other terms according to the actual application scenario.

[0079] It should be noted that each initial technical index parameter can be calculated according to the initial design parameters of the microscope objective lens. For specific calculations, relevant formulas can be referred to, which will not be elaborated herein.

[0080] Step 202, calculating the imaging quality of the microscope objective lens according to the initial technical index parameters of the microscope objective lens and the preset weight factor.

[0081] In some embodiments, when specifically calculating, the formula: can be used to calculate the imaging quality of the microscope objective lens.

[0082] Among them, represents the lens image quality evaluation item of the microscope objective lens, which is used to evaluate the imaging quality. represents the modulation transfer function item corresponding to the microscope objective lens, represents the root mean square spot diagram radius item corresponding to the microscope objective lens, represents the coma item corresponding to the microscope objective lens, represents the field curvature item corresponding to the microscope objective lens, represents the distortion item corresponding to the microscope objective lens. respectively represent the weight factors of the corresponding items. Among them, the values of the weight factors can be determined according to the design requirements. For example, if an item is more important, a larger weight factor can be set for this item.

[0083] Figure 4 is a schematic flow chart of another optimization method for the microscope objective lens provided by the embodiment of the present application. In an alternative embodiment, as Figure 4 shown, calculating the total ghost image intensity of the microscope objective lens based on the initial design parameters of the microscope objective lens includes:

[0084] Step 301: Calculate the ghost image intensity corresponding to each mirror surface in the microscope objective lens according to the initial design parameters of the microscope objective lens.

[0085] Step 302: Calculate the total ghost image intensity of the microscope objective lens according to the ghost image intensity corresponding to each mirror surface in the microscope objective lens and the ghost image weight factor corresponding to each mirror surface.

[0086] Among them, each mirror surface in the microscope objective lens can correspond to a corresponding ghost image intensity, and the ghost image intensity corresponding to each mirror surface can be determined according to the initial design parameters of the microscope objective lens; the total ghost image intensity of the microscope objective lens can be determined according to the ghost image intensity corresponding to each mirror surface and the ghost image weight factor corresponding to each mirror surface.

[0087] Optionally, the calculation of the total ghost image intensity of the microscope objective lens can refer to the calculation formula: , where represents the ghost image intensity evaluation item, which is used to evaluate the total ghost image intensity of the display objective lens. represents the ghost image weight factor corresponding to the Jth mirror surface in the microscope objective lens. represents the ghost image intensity introduced by the coaxial Kohler illumination beam on the Jth mirror surface in the microscope objective lens, where 1 ≤ J ≤ n.

[0088] Figure 5 is a schematic flow chart of another optimization method for the microscope objective lens provided by the embodiment of the present application. In an alternative embodiment, as Figure 5 shown, calculating the ghost image intensity corresponding to each mirror surface in the microscope objective lens according to the initial design parameters of the microscope objective lens includes:

[0089] Step 501: According to the initial design parameters of the microscope objective lens, respectively obtain the factor of the light flux ratio of the ghost image formed in the coaxial Köhler illumination beam and the maximum image height of the ghost image introduced by the coaxial Köhler illumination beam on each mirror surface.

[0090] Among them, the calculation of the factor of the light flux ratio of the ghost image formed in the coaxial Köhler illumination beam and the maximum image height of the ghost image introduced by the coaxial Köhler illumination beam on each mirror surface can be obtained according to the initial radius of curvature, initial refractive index, initial thickness of the microscope objective lens, and the initial relative setting positions of each target lens in the microscope objective lens.

[0091] Step 502: Calculate the ghost image intensity corresponding to each mirror surface in the microscope objective lens according to the preset transmittance of the lens, the factor of the light flux ratio, and the maximum image height.

[0092] Among them, the calculation of the ghost image intensity corresponding to each mirror surface in the microscope objective lens can refer to the following formula:

[0093]

[0094] Among them, represents the ghost image intensity introduced by the coaxial Köhler illumination beam on the Jth mirror surface in the microscope objective lens, T represents the preset transmittance of the lens, and its value can be 0.995, but not limited thereto; represents the factor of the light flux ratio of the ghost image formed based on the coaxial Köhler illumination beam in the microscope objective lens, represents the maximum image height of the ghost image introduced by the coaxial Köhler illumination beam on the Jth mirror surface in the microscope objective lens.

[0095] Applying the embodiments of the present application, the ghost image intensity caused by each mirror surface in the microscope objective lens can be calculated, so as to quantify the contribution of each mirror surface to the ghost image.

[0096] In an optional implementation manner, the above-mentioned obtaining the factor of the light flux ratio of the ghost image formed based on the coaxial Köhler illumination beam according to the initial design parameters of the microscope objective lens includes:

[0097] According to the initial design parameters of the microscope objective lens, obtain the maximum opening angle of the coaxial Köhler illumination beam introducing the ghost image on each mirror surface on the entrance pupil surface of the microscope objective lens; according to the maximum opening angle and the divergence angle of the coaxial Köhler illumination beam based on the microscope objective lens on the objective pupil plane, calculate the factor of the light flux ratio of the ghost image formed based on the coaxial Köhler illumination beam.

[0098] Among them, the divergence angle of the coaxial Köhler illumination beam based on the microscope objective lens on the objective pupil plane can be a preset value, and the maximum opening angle of the coaxial Köhler illumination beam introducing the ghost image on each mirror surface on the entrance pupil surface of the microscope objective lens can be calculated according to the ray transfer matrix determined based on the initial design parameters of the microscope objective lens.

[0099] Optionally, the factor of the proportion of the light flux forming a ghost image in the coaxial Köhler illumination beam can be calculated with reference to the following formula:

[0100]

[0101] Wherein, represents the factor of the proportion of the light flux forming a ghost image in the coaxial Köhler illumination beam, represents the divergence angle of the coaxial Köhler illumination beam on the pupil plane of the microscope objective, represents the maximum angular spread of the coaxial Köhler illumination beam introducing a ghost image by the Jth mirror on the entrance pupil plane of the microscope objective.

[0102] Figure 6 is a schematic flow chart of another optimization method for a microscope objective provided by an embodiment of the present application. In an alternative embodiment, as Figure 6 shown, in the alternative embodiment, according to the initial design parameters of the microscope objective, obtaining the maximum image height of the coaxial Köhler illumination beam introducing a ghost image by each mirror and the maximum angular spread of the coaxial Köhler illumination beam introducing a ghost image by each mirror on the entrance pupil plane of the microscope objective includes:

[0103] Step 601, when the tube lens in the imaging path of the microscope objective is a preset ideal lens, obtaining the first light ray transmission matrix when the light ray passes through the preset ideal lens, and according to the initial design parameters of the microscope objective, respectively obtaining the second light ray transmission matrix when the light ray passes through each mirror in the microscope objective and the third light ray transmission matrix when the light ray passes through a preset uniform medium from each mirror in the microscope objective to the next mirror.

[0104] Among them, the construction of the first light ray transmission matrix, the second light ray transmission matrix, and the third light ray transmission matrix can be based on the matrix optics principle.

[0105] Step 602, according to the first light ray transmission matrix, the second light ray transmission matrix, and the third light ray transmission matrix, respectively calculating the maximum image height of the coaxial Köhler illumination beam introducing a ghost image by each mirror and the maximum angular spread of the coaxial Köhler illumination beam introducing a ghost image by each mirror on the entrance pupil plane of the microscope objective.

[0106] Optionally, based on the constructed light ray transmission matrix, the maximum image height of the coaxial Köhler illumination beam introducing a ghost image by each mirror and the maximum angular spread of the coaxial Köhler illumination beam introducing a ghost image by each mirror on the entrance pupil plane of the microscope objective can be calculated in combination with the maximum angular spread of the coaxial Köhler illumination beam introducing a ghost image by each mirror on the entrance pupil plane of the microscope objective.

[0107] In some embodiments, during specific calculation, the maximum image height of the coaxial Köhler illumination beam introducing a ghost image by each mirror and the maximum angular spread of the coaxial Köhler illumination beam introducing a ghost image by each mirror on the entrance pupil plane of the microscope objective can be respectively derived with reference to the formula:

[0108]

[0109] Among them, represents the maximum image height of the ghost image introduced by the coaxial Köhler illumination beam on the Jth mirror in the microscope objective lens, represents the height of the coaxial Köhler illumination beam introducing the ghost image on the Jth mirror on the CMOS plane, represents the maximum angular spread of the coaxial Köhler illumination beam introducing the ghost image on the entrance pupil plane of the microscope objective lens. P represents the first ray transfer matrix when the light passes through the preset ideal lens, the second ray transfer matrix when the light passes through the kth mirror in the microscope objective lens, represents the third ray transfer matrix when the light is transmitted from the kth mirror in the microscope objective lens through the preset homogeneous medium to the (k + 1)th mirror, where 0 ≤ k ≤ j - 1.

[0110] In an alternative embodiment, obtaining the first ray transfer matrix when the light passes through the preset ideal lens according to the initial design parameters of the microscope objective lens includes:

[0111] Obtaining the focal length of the preset ideal lens and the distance from the light incident position to the preset ideal lens; calculating the first ray transfer matrix according to the focal length and the distance.

[0112] Among them, the tube lens is the preset ideal lens. The focal length of the preset ideal lens can be obtained according to the attribute parameters of the preset ideal lens, and the distance from the light incident position to the preset ideal lens can be obtained by measurement.

[0113] Optionally, the first ray transfer matrix when the light passes through the preset ideal lens can be calculated according to the formula: where f represents the focal length of the preset ideal lens, and d represents the distance from the light incident position to the preset ideal lens.

[0114] In an alternative embodiment, obtaining the second ray transfer matrix when the light passes through each mirror in the microscope objective lens according to the initial design parameters of the microscope objective lens includes:

[0115] According to the initial design parameters of the microscope objective lens, obtaining the initial radius of curvature of each mirror surface in the microscope objective lens and the initial refractive index of the media before and after each mirror; calculating the second ray transfer matrix according to the initial radius of curvature of each mirror surface in the microscope objective lens and the initial refractive index of the media before and after each mirror.

[0116] Among them, based on the initial design parameters of the microscope objective lens, the initial radius of curvature of each mirror surface in the microscope objective lens and the initial refractive index of the media before and after each mirror can be extracted, and the second ray transfer matrix when the light passes through each mirror in the microscope objective lens can be constructed accordingly.

[0117] Optionally, during specific calculations, reference can be made to the formula , where represents the third ray transfer matrix when the light passes through the k-th mirror in the microscope objective lens, and respectively represent the initial refractive indices of the media before and after the k-th mirror in the microscope objective lens, represents the initial radius of curvature of the k-th mirror in the microscope objective lens.

[0118] In an alternative embodiment, obtaining the third ray transfer matrix when the light passes from each mirror in the microscope objective lens through a preset homogeneous medium to the next mirror based on the initial design parameters of the microscope objective lens includes:

[0119] Based on the initial design parameters of the microscope objective lens, obtaining the initial thickness when the light passes from each mirror through a preset homogeneous medium to the next mirror; calculating the third ray transfer matrix based on the initial thickness.

[0120] Among them, based on the initial design parameters of the microscope objective lens, the initial thickness when the light passes from each mirror through a preset homogeneous medium to the next mirror can be extracted, and based on this initial thickness, the third ray transfer matrix can be constructed.

[0121] Optionally, during specific construction, reference can be made to the formula , where represents the ray transfer matrix when the light passes from the k-th mirror through a preset homogeneous medium to the (k + 1)-th mirror in the microscope objective lens, represents the thickness when the light passes from the k-th mirror through a preset homogeneous medium to the (k + 1)-th mirror in the microscope objective lens.

[0122] Table 1 is a comparison table of the optical performance design results of two lenses provided in the embodiments of the present application, Figure 7 and Figure 7 is the external structure diagram of two lenses provided in the embodiments of the present application. Among them, lens (microscope objective lens) A is not optimized using the method of the present application (i.e., the lens before optimization), and lens A includes a total of 4 lenses A1, A2, A3, and A4 from left to right. The arrangement positions and shapes of each lens are as shown in Figure 7 (a) in; lens B is optimized using the method of the present application (i.e., the optimized lens), and lens B includes a total of 4 lenses B1, B2, B3, and B4 from left to right. The arrangement positions and shapes of each lens are as shown in

[0123] It can be seen from the comparison that both lenses meet the technical requirements of lens design, and their imaging performance, distortion and other optical indicators are similar, but the setting methods of each lens in the two lenses are different.

[0124] Table 1 Comparison of the Optical Performance Design Results of Two Lenses

[0125]

[0126] Figure 8 This is the ghost image simulation schematic diagram of the first lens provided by the embodiment of the present application. As Figure 8 shown, for lens A, lens A includes 4 lenses, corresponding to 8 mirror surfaces. Among them, Figure 8 in (a)-(i) are the incoherent irradiance diagrams of the ghost images contributed by each mirror surface in lens A. It can be seen that the ghost image intensities (unit: W / cm2) corresponding to each mirror surface are respectively: 0.0048, 0.0622, 0.0010, 0.0290, 0.0148, 0.1663, 0.0018, 0.0010; Figure 8 in (i) is the incoherent irradiance diagram of the ghost image contributed by lens A. It can be seen that the total ghost image intensity of lens A is 0.2280.

[0127] Figure 9 This is the ghost image simulation schematic diagram of the second lens provided by the embodiment of the present application. For lens B, lens B includes 4 lenses, corresponding to 8 mirror surfaces. Among them, Figure 9 in (a)-(i) are the incoherent irradiance diagrams of the ghost images contributed by each mirror surface in lens B. It can be seen that the ghost image intensities (unit: W / cm2) corresponding to each mirror surface are respectively: 0.0036, 0.00, 0.0302, 0.0352, 0.0096, 0.0022, 0.0021, 0.0070; Figure 9 in (i) is the incoherent irradiance diagram of the ghost image contributed by lens B. It can be seen that the total ghost image intensity of lens B is 0.0898.

[0128] In summary, by comparing Figure 8 and Figure 9 it can be seen that the total ghost image intensity of lens A is 0.2280, and the total ghost image intensity of lens B is 0.0898. The total ghost image intensity of lens B is smaller. Therefore, the ghost images of lens B are significantly suppressed.

[0129] Figure 10 This is the image comparison diagram obtained by using two lenses in the embodiment of the present application. Among them, the shooting target is a circuit board. As Figure 10 shown in (a) of Figure 10 is the image obtained by using lens A for shooting. Among them, there is a ghost image in area S.

[0130] shown in (b) of Figure 10 is the image obtained by using lens B for shooting. There is no ghost image in area S, and the ghost images are significantly suppressed. Therefore, the method of the present application can effectively eliminate the ghost images in the image, and the optimization effect is good.

[0130] Figure 11 Schematic diagram of the functional modules of an optimization device for lens parameters provided by an embodiment of the present application. The basic principle and technical effects of this device are the same as those of the corresponding method embodiment described above. For the sake of brief description, for the parts not mentioned in this embodiment, reference can be made to the corresponding content in the method embodiment. As Figure 11 shown, this optimization device 100 includes:

[0131] An acquisition module 110, configured to acquire the initial design parameters of a microscope objective lens;

[0132] A first calculation module 120, configured to calculate the imaging quality of the microscope objective lens and the total ghost image intensity of the microscope objective lens based on a Köhler illumination system respectively according to the initial design parameters of the microscope objective lens. The microscope objective lens includes m target lenses, and the m target lenses include n mirror surfaces, where m is an integer greater than 1 and n > m;

[0133] A second calculation module 130, configured to construct a preset lens evaluation function according to the imaging quality and total ghost image intensity of the microscope objective lens, and iteratively calculate the target design parameters of each target lens when the imaging quality meets the first preset requirement and the total ghost image intensity meets the second preset requirement. The target design parameters of each target lens include at least one of the following: radius of curvature, refractive index, Abbe number, thickness, and relative setting position of each target lens in the microscope objective lens.

[0134] In an alternative embodiment, the first calculation module 120 is specifically configured to acquire the initial technical index parameters of the microscope objective lens according to the initial design parameters of the microscope objective lens;

[0135] Calculate the imaging quality of the microscope objective lens according to the initial technical index parameters of the microscope objective lens and a preset weight factor.

[0136] In an alternative embodiment, the first calculation module 120 is specifically configured to calculate the ghost image intensity corresponding to each mirror surface in the microscope objective lens according to the initial design parameters of the microscope objective lens;

[0137] Calculate the total ghost image intensity of the microscope objective lens according to the ghost image intensity corresponding to each mirror surface in the microscope objective lens and the ghost image weight factor corresponding to each mirror surface.

[0138] In an alternative embodiment, the first calculation module 120 is specifically configured to respectively acquire a factor of the light flux ratio of the ghost image formed in the coaxial Köhler illumination beam and the maximum image height of the coaxial Köhler illumination beam introducing the ghost image on each mirror surface based on the initial design parameters of the microscope objective lens;

[0139] Calculate the ghost image intensity corresponding to each mirror surface in the microscope objective lens according to the preset transmittance of the lens, the factor of the light flux ratio, and the maximum image height.

[0140] In an alternative embodiment, the first calculation module 120 is specifically configured to obtain, according to the initial design parameters of the microscope objective lens, the maximum angular spread on the entrance pupil plane of the microscope objective lens of the coaxial Köhler illumination beam introducing ghost images on each mirror surface.

[0141] According to the maximum angular spread and the divergence angle of the coaxial Köhler illumination beam on the objective pupil plane of the microscope objective lens, calculate a factor of the light flux ratio of the ghost images formed in the coaxial Köhler illumination beam of the microscope objective lens.

[0142] In an alternative embodiment, when the preset ideal lens is in the imaging path of the microscope objective lens, the first calculation module 120 is specifically configured to obtain a first light ray transmission matrix when the light ray passes through the preset ideal lens, and respectively obtain a second light ray transmission matrix when the light ray passes through each mirror surface in the microscope objective lens and a third light ray transmission matrix when the light ray is transmitted from each mirror surface in the microscope objective lens through a preset uniform medium to the next mirror surface according to the initial design parameters of the microscope objective lens.

[0143] According to the first light ray transmission matrix, the second light ray transmission matrix, and the third light ray transmission matrix, calculate the maximum image height of the coaxial Köhler illumination beam introducing ghost images on each mirror surface and the maximum angular spread on the entrance pupil plane of the microscope objective lens of the coaxial Köhler illumination beam introducing ghost images on each mirror surface.

[0144] In an alternative embodiment, the first calculation module 120 is specifically configured to obtain the focal length of the preset ideal lens and the distance from the light ray incident position to the preset ideal lens.

[0145] Calculate the first light ray transmission matrix according to the focal length and the distance.

[0146] In an alternative embodiment, the first calculation module 120 is specifically configured to obtain the initial radius of curvature of each mirror surface in the microscope objective lens and the initial refractive index of the media before and after each mirror surface according to the initial design parameters of the microscope objective lens.

[0147] Calculate the second light ray transmission matrix according to the initial radius of curvature of each mirror surface in the microscope objective lens and the initial refractive index of the media before and after each mirror surface.

[0148] In an alternative embodiment, the first calculation module 120 is specifically configured to obtain the initial thickness of the light ray transmitted from each mirror surface in the microscope objective lens through a preset uniform medium to the next mirror surface according to the initial design parameters of the microscope objective lens.

[0149] Calculate the third light ray transmission matrix according to the initial thickness.

[0150] The above device is used to execute the method provided in the foregoing embodiment, and its implementation principle and technical effects are similar, so they will not be elaborated here.

[0151] The above modules may be one or more integrated circuits configured to implement the above method. For example: one or more application specific integrated circuits (ASICs), or, one or more microprocessors, or, one or more field programmable gate arrays (FPGAs), etc. Again, when a certain module above is implemented in the form of a processing element dispatching program code, the processing element may be a general-purpose processor, such as a central processing unit (CPU) or other processors that can call program code. Again, these modules may be integrated together and implemented in the form of a system-on-a-chip (SOC).

[0152] Figure 12 A schematic structural diagram of an electronic device provided by an embodiment of the present application, and the electronic device may be integrated into the above optimization device. As Figure 12 shown, the electronic device may include: a processor 210, a storage medium 220, and a bus 230. The storage medium 220 stores machine-readable instructions executable by the processor 210. When the electronic device runs, the processor 210 communicates with the storage medium 220 through the bus 230, and the processor 210 executes the machine-readable instructions to execute the steps of the above method embodiment. The specific implementation manner and technical effects are similar and will not be elaborated here.

[0153] Optionally, the present application further provides a storage medium, on which a computer program is stored. When the computer program is run by a processor, it executes the steps of the above method embodiment. The specific implementation manner and technical effects are similar and will not be elaborated here.

[0154] In several embodiments provided by the present application, it should be understood that the disclosed device and method may be implemented in other ways. For example, the device embodiments described above are merely illustrative. For example, the division of units is only a logical function division. In actual implementation, there may be other division methods. For example, multiple units or components may be combined or integrated into another system, or some features may be ignored or not executed. Another point, the displayed or discussed mutual coupling or direct coupling or communication connection may be through some interfaces, and the indirect coupling or communication connection of the device or unit may be in an electrical, mechanical or other form.

[0155] The units described as separation components may or may not be physically separated, and the components presented as units may or may not be physical units, that is, they may be located in one place or may be distributed across multiple network units. Some or all of the units can be selected according to actual needs to achieve the purpose of the solution of this embodiment.

[0156] In addition, in each embodiment of this application, the various functional units may be integrated into one processing unit, may exist separately as individual physical units, or two or more units may be integrated into one unit. The above integrated units can be implemented in the form of hardware or in the form of hardware plus software functional units.

[0157] The above integrated units implemented in the form of software functional units can be stored in a computer-readable storage medium. The above software functional units stored in a storage medium include several instructions for causing a computer device (which can be a personal computer, a server, or a network device, etc.) or a processor (English: processor) to execute some steps of the methods in each embodiment of this application. The aforementioned storage medium includes: various media such as USB flash drives, mobile hard disks, read-only memories (English: Read-Only Memory, abbreviated as: ROM), random access memories (English: Random Access Memory, abbreviated as: RAM), magnetic disks, or optical discs that can store program codes.

[0158] It should be noted that in this article, relational terms such as "first" and "second" are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variant thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements not only includes those elements, but also includes other elements not expressly listed, or also includes elements inherent to such process, method, article or device. Without further limitation, an element defined by the statement "including one..." does not exclude the existence of additional identical elements in the process, method, article or device including the element.

[0159] The above are only the preferred embodiments of the present application and are not intended to limit the present application. For those skilled in the art, various modifications and variations can be made to the present application. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included within the protection scope of the present application. It should be noted that similar reference numerals and letters denote similar items in the following drawings. Therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings. The above are only the preferred embodiments of the present application and are not intended to limit the present application. For those skilled in the art, various modifications and variations can be made. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included within the protection scope of the present application.

Claims

1. A method for optimizing a microscope objective lens, characterized in that: The method comprises: Obtaining initial design parameters of the microscope objective; According to the initial design parameters of the microscope objective lens, the imaging quality of the microscope objective lens and the total ghost image intensity of the microscope objective lens under the Kohler illumination system are calculated respectively, wherein the microscope objective lens includes m target lenses, and the m target lenses include n mirror surfaces, wherein m is an integer greater than 1, and n>m; According to the imaging quality and total ghost image intensity of the microscope objective lens, a preset lens evaluation function is constructed, and the target design parameters of each target lens are iteratively calculated when the imaging quality meets the first preset requirement and the total ghost image intensity meets the second preset requirement, and the target design parameters of each target lens include at least one of the following: radius of curvature, refractive index, Abbe number, thickness, and relative setting position of each target lens in the microscope objective lens; The total ghost image intensity of the microscope objective lens under the Kohler illumination system is calculated according to the initial design parameters of the microscope objective lens, including: According to the initial design parameters of the microscope objective lens, respectively obtaining factors of the ratio of the luminous flux forming ghost images in the coaxial Kohler illumination beam under the Kohler illumination system and the maximum image height of the ghost images introduced by the coaxial Kohler illumination beam on each mirror surface; Calculating the ghost image intensity corresponding to each mirror surface in the microscope objective lens according to the preset transmittance of the lens, the factor and the maximum image height; The total ghost image intensity of the microscope objective lens is calculated according to the ghost image intensity corresponding to each mirror surface in the microscope objective lens and the ghost image weight factor corresponding to each mirror surface.

2. The method according to claim 1, characterized in that The step of calculating the imaging quality of the microscope objective lens according to the initial design parameters of the microscope objective lens comprises: According to the initial design parameters of the microscope objective lens, obtaining the initial technical index parameters of the microscope objective lens; The imaging quality of the microscope objective lens is calculated according to the initial technical indicator parameters of the microscope objective lens and the preset weight factor.

3. The method according to claim 1, characterized in that: The step of obtaining a factor of a ratio of a light flux of the microscope objective lens that forms a ghost image in a coaxial Kohler illumination beam according to the initial design parameters of the microscope objective lens comprises: According to the initial design parameters of the microscope objective lens, the maximum opening angle of the coaxial Kohler illumination light beam on the entrance pupil plane of the microscope objective lens for introducing ghost images on each mirror surface is obtained; According to the maximum opening angle and the divergence angle of the microscope objective lens based on the coaxial Kohler illumination beam on the objective lens pupil plane, a factor of the light flux ratio of the microscope objective lens based on the coaxial Kohler illumination beam forming a ghost image is calculated.

4. The method according to claim 3, characterized in that: The method of obtaining the maximum image height of ghost images introduced by the coaxial Kohler illumination beam on each mirror surface according to the initial design parameters of the microscope objective lens comprises: When the tube lens in the imaging path of the microscope objective lens is a preset ideal lens, a first light transmission matrix when the light passes through the preset ideal lens is obtained, and according to the initial design parameters of the microscope objective lens, a second light transmission matrix when the light passes through each mirror surface in the microscope objective lens and a third light transmission matrix when the light is transmitted from each mirror surface in the microscope objective lens through a preset uniform medium to the next mirror surface are respectively obtained; Calculating the maximum image height of the ghost image introduced by the coaxial Kohler illumination light beam on each mirror surface according to the first light transmission matrix, the second light transmission matrix and the third light transmission matrix; The method of obtaining the maximum opening angle of the coaxial Kohler illumination light beam on the entrance pupil plane of the microscope objective lens that introduces ghost images on each mirror surface according to the initial design parameters of the microscope objective lens comprises: The maximum opening angle of the coaxial Kohler illumination light beam with ghost images introduced by the mirror on the entrance pupil plane of the microscope objective is calculated according to the first light transmission matrix, the second light transmission matrix and the third light transmission matrix.

5. The method according to claim 4, characterized in that The first light transmission matrix when the acquired light passes through the preset ideal lens includes: Obtaining the focal length of the preset ideal lens and the distance from the light incident position to the preset ideal lens; The first light transmission matrix is ​​calculated according to the focal length and the distance.

6. The method according to claim 4, characterized in that The step of obtaining a second light transmission matrix when light passes through each mirror surface in the microscope objective lens according to the initial design parameters of the microscope objective lens comprises: According to the initial design parameters of the microscope objective lens, the initial radius of curvature of each mirror surface in the microscope objective lens and the initial refractive index of the medium in front of and behind each mirror are obtained; The second light transmission matrix is ​​calculated according to the initial curvature radius of each mirror surface in the microscope objective and the initial refractive index of the medium before and after each mirror.

7. The method according to claim 4, characterized in that The method of obtaining a third light transmission matrix when light is transmitted from each mirror surface in the microscope objective lens through a preset uniform medium to a next mirror surface according to the initial design parameters of the microscope objective lens comprises: According to the initial design parameters of the microscope objective lens, the initial thickness of the light in the microscope objective lens transmitted from each mirror surface through the preset uniform medium to the next mirror surface is obtained; The third light transmission matrix is ​​calculated according to the initial thickness.

8. An electronic device, characterized in that: include: A processor, a storage medium and a bus, wherein the storage medium stores machine-readable instructions executable by the processor, and when the electronic device is running, the processor communicates with the storage medium via the bus, and the processor executes the machine-readable instructions to perform the steps of the optimization method of the microscope objective lens as described in any one of claims 1 to 7.

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