Reticle cartridge with retention through reticle compartment wall

Abstract

The present application relates to a reticle cartridge having a retention through a reticle compartment wall. The reticle cartridge includes an outer portion including a cartridge door and a cartridge dome, and an inner portion including a bottom plate and a cover. One of the base plate or the cover includes a reticle compartment wall extending toward the other of the base plate or the cover. The reticle compartment wall includes one or more retention features. The cartridge door or the cartridge dome includes one or more actuation surfaces configured to contact the retention feature. The retention feature is configured to be moved by contact with the actuation surface. The retaining feature may be in a position, the positions are configured to secure a reticle within the inner portion of the reticle cartridge when the reticle cartridge is assembled by engaging the base plate with the cover, placing the engaged base plate and the engaged cover within the cartridge dome, and securing the cartridge door to the cartridge dome.

Description

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS

[0002] This application is a divisional application of the application patent application with the application number 202080094226.6, the title of which is “Mask Pod with Retention Through Mask Compartment Wall”, filed on December 9, 2020, the priority of which is claimed.

[0003] CROSS-REFERENCE TO RELATED APPLICATIONS

[0004] This application claims the benefit of and priority to U.S. Provisional Application No. 62 / 955,619, filed December 31, 2019, which is incorporated by reference herein in its entirety for all purposes. TECHNICAL FIELD

[0005] The present invention relates generally to mask pods for storing and transporting masks. More particularly, the present invention is directed to mask pods that include movable retention features that extend through a mask compartment wall of an inner pod for retaining a mask contained in the inner pod. BACKGROUND

[0006] Mask pods are used to store and transport masks as well as to handle masks, particularly to and from processing tools, such as lithography apparatuses. For example, mask pods include extreme ultraviolet (EUV) pods for use with EUV lithography tools. Mask pods reduce or prevent contamination or physical damage to the masks contained therein during movement, handling, and processing of the masks. Mask pods can include an outer pod and an inner pod located within the outer pod. The inner pod can include a floor and a lid that contain the masks, and the outer pod includes a pod door and a pod dome that contain the inner pod. SUMMARY

[0007] The present invention relates to mask pods that include movable retention features that extend through a mask compartment wall of an inner pod for retaining a mask contained in the inner pod.

[0008] The movable retention features allow the mask to be securely positioned within the mask pod and thus less susceptible to jostling during handling or transport. The retention features through the mask compartment wall of the inner pod of the mask pod allow the mask to be properly placed within the pod without interference from safety features prior to final closure of the mask pod and to secure the mask when the pod is closed for transport, storage, or processing.

[0009] In an embodiment, a reticle pod includes an inner portion including a lid and a base plate. One of the lid and the base plate includes a reticle compartment wall extending from the one of the lid and the base plate, the reticle compartment wall including one or more retention features. The reticle pod includes an outer portion including a pod dome and a pod door. One of the pod dome and the pod door includes one or more actuating surfaces configured to contact at least one of the one or more retention features when the lid is joined to the base plate, the pod dome is joined to the pod door, and the joined lid and the joined base plate are within the joined pod dome and the joined pod door. When the one or more actuating surfaces contact the one or more retention features, the retention features are configured to be positioned such that they contact a reticle when the reticle is located within the joined lid and the joined base plate.

[0010] In an embodiment, each of the one or more retention features is linearly movable in a direction having a component at an angle ranging from zero to ninety degrees from a plane of the reticle compartment wall.

[0011] In an embodiment, each of the one or more retention features includes a spring. In an embodiment, when the spring is in a rest position, the retention feature is in a position further from a center of the base plate than when the retention feature is contacted by one of the one or more actuating surfaces.

[0012] In an embodiment, each of the one or more retention features is linearly movable in a direction having a component at an angle ranging from zero to ninety degrees from a plane of the reticle compartment wall.

[0013] In an embodiment, each of the one or more retention features includes a contact surface configured to engage a curved or beveled edge.

[0014] In an embodiment, each of the one or more actuating surfaces is a surface configured to slide against an end of at least one of the one or more retention features.

[0015] In an embodiment, each of the one or more actuating surfaces extends from the pod dome.

[0016] In an embodiment, each of the one or more retention features includes a first end on a first side of the reticle compartment wall and a second end on a second side of the reticle compartment wall, the second side of the reticle compartment wall being opposite the first side of the reticle compartment wall, and each of the one or more retention features is rotatable about an axis in the same plane as a plane of the reticle compartment wall.

[0017] In an embodiment, each of the one or more actuation surfaces is a protrusion extending from the pod door.

[0018] In an embodiment, each of the one or more actuation surfaces contacts at least one of the one or more retention features at the second end, the first end of each of the one or more retention features contacting the reticle.

[0019] In an embodiment, each of the one or more retention features comprises a thermoplastic material.

[0020] In an embodiment, the reticle compartment wall extends from the cover.

[0021] In an embodiment, the reticle compartment wall extends from the cover.

[0022] In an embodiment, a method of manipulating one or more retention features comprises: joining a cover to a base plate, wherein one of the cover and the base plate comprises a reticle compartment wall extending from the one of the cover and the base plate; placing the joined cover with the joined base plate in a pod dome. The method further comprises joining a pod door to the pod dome. Joining the pod door to the pod dome comprises contacting one or more actuation surfaces with one or more retention features located on the reticle compartment wall. The method further comprises moving the one or more retention features via the contacting with the one or more actuation surfaces.

[0023] In an embodiment, moving the one or more retention features comprises moving the one or more retention features linearly inward into a space bounded by the reticle compartment wall.

[0024] In an embodiment, the one or more actuation surfaces are located on the cover and are configured to slide against an end of at least one of the one or more retention features.

[0025] In an embodiment, moving the one or more retention features comprises moving the one or more retention features rotationally about an axis that is in the same plane as a plane of the reticle compartment wall.

[0026] In an embodiment, each of the one or more actuation surfaces is a protrusion extending from the pod door.

[0027] In an embodiment, the reticle compartment wall extends from the cover. BRIEF DESCRIPTION OF DRAWINGS

[0028] The following description of various illustrative embodiments can be more fully understood with the accompanying drawings.

[0029] FIG. 1 A cross-sectional view of a reticle pod is shown in accordance with an embodiment.

[0030] FIG. 2 A cross-sectional view of a reticle pod according to an embodiment is shown.

[0031] FIG. 2 A flowchart showing a method for manipulating one or more retention features according to an embodiment is shown.

[0032] While the disclosure is susceptible to various modifications and alternative forms, specific details have been shown by way of example in the drawings and will be described in detail herein. It should be understood however that the intention is not to limit the aspects of the disclosure to the particular illustrative embodiments described. Instead, the intention is to cover all modifications, equivalents, and alternatives falling within the spirit and scope of the disclosure. DETAILED DESCRIPTION

[0033] The following detailed description will be understood with reference to the accompanying drawings, wherein the same numerals in the different drawings denote the same elements. The detailed description and the drawings depict illustrative embodiments and are not intended to limit the scope of the disclosure. The illustrative embodiments depicted are merely exemplary. Selected features of any illustrative embodiment can be incorporated into an additional embodiment unless clearly stated otherwise.

[0034] As used in this specification and the appended claims, the singular forms "a," "an" and "the" include plural referents unless the content clearly dictates otherwise. As used in this specification and the appended claims, the term "or" is generally employed in its sense of "and / or" unless the content clearly dictates otherwise.

[0035] The term "about" generally refers to a range of values that are considered equivalent to the stated value (e.g., have the same function or result). In many instances, the term "about" can include values that are rounded to the nearest significant figure.

[0036] The present disclosure relates generally to reticle pods for storing and transporting reticles used in photolithography processing steps. More particularly, the present disclosure is directed to reticle pods that include movable retention features that extend through a reticle compartment wall of an inner pod for retaining a reticle housed in the inner pod.

[0037] FIG. 2 A cross-sectional view of a reticle pod 100 according to an embodiment is shown. The reticle pod 100 includes an inner portion 102 that includes a floor 104 and a lid 106. In the embodiment shown in FIG. 1 In the embodiment shown in FIG. 1, the lid 106 includes a reticle compartment wall 108. The reticle compartment wall 108 includes a reticle retainer 110. The reticle pod 100 also includes an outer portion 112 that includes a pod dome 114 and a pod door 116. In the embodiment shown in FIG. 1In the embodiment shown in the middle, the pod dome 114 includes an actuation surface 118.

[0038] The pod 100 is a box configured to store and transport reticles between different photolithography processing steps. For example, a reticle is a photolithography mask used for semiconductor wafers.

[0039] The inner portion 102 is a portion of the reticle pod 100 in which a reticle can be placed. The inner portion 102 includes an interior space 132 bounded by a floor 104 and a lid 106. The interior space 132 can be sized such that it can accommodate a reticle. One or both of the components of the inner portion 102 - the lid 106 and the floor 104 - can include a metal or an alloy, such as aluminum or another such suitable material.

[0040] The floor 104 is a portion of the inner portion 102 of the reticle pod 100. The floor 104 can be supported by the pod door 116 when the reticle pod 100 is assembled. The floor 104 can form a lower portion of the inner portion 102 of the reticle pod 100. The floor 104 can be configured such that a reticle can rest on the floor 104.

[0041] The floor 104 can include one or more reticle contacts 120. In an embodiment, the reticle contacts 120 are fixed to the interior side of the floor 104 such that they face the lid 106 when the inner portion 102 of the reticle pod 100 is assembled. In an embodiment, the reticle contacts 120 are fixed in place via a mechanical connection, such as a portion of the reticle contacts 120 being inserted into the floor 104. In an embodiment, the reticle contacts 120 are integrally formed in the floor 104. In an embodiment, there are at least three reticle contacts 120 formed in or attached to the floor 104. In an embodiment, there are four reticle contacts 120 formed in or attached to the floor 104. In an embodiment, the reticle contacts 120 are located on the floor at locations corresponding to the corners of the interior space 132 of the inner portion 102. The reticle contacts 120 include a material that is compatible with reticle materials. A compatible material includes a material that provides minimal or no particle generation when in contact with a reticle material and cannot scratch or otherwise damage a reticle. In an embodiment, the compatible material is a polymeric material. The reticle contacts 120 can include the compatible material at least at contact points configured to contact a reticle when the reticle pod 100 is assembled. In an embodiment, the reticle contacts 120 are made entirely of a polymeric material suitable for contacting a reticle. For example, suitable polymeric materials include polyether ether ketone (PEEK), polyaryletherketone (PAEK), polyethyleneimine (PEI), polyamideimide (PAI), or a conductive polymer.

[0042] The lid 106 is another portion of the inner portion 102 that is configured to interface with the base plate 104. The lid 106 can form an upper portion of the inner portion 102. The lid 106 can include features that mate or are mechanically compatible with the base plate 104. In the embodiment shown in FIG. 1 The lid 106 includes a reticle compartment wall 108 that extends from a surface of the lid 106.

[0043] In the embodiment shown in FIG. 1 The reticle compartment wall 108 extends from the lid 106. When the lid 106 and the base plate 104 are assembled to form the inner portion 102, the reticle compartment wall 108 extends from a surface of the lid 106 that faces the base plate 104. The reticle compartment wall 108 can define a perimeter of an interior space 132 of the inner portion 102 that is configured to house a reticle. In embodiments, the reticle compartment wall 108 includes one or more through-holes 122. The reticle holders 110 can extend through the through-holes 122. The reticle holders 110 can be further connected to the reticle compartment wall 108 via springs (e.g., metal springs, elastic materials such as elastomeric polymers, or other such suitable elastic connections of the reticle compartment wall 108 to the reticle holders 110). In embodiments, the connection of the reticle holders 110 to the reticle compartment wall 108 can be metal springs that extend into the through-holes 122.

[0044] The reticle holders 110 extend through the reticle compartment wall 108 at the through-holes 122. The reticle holders 110 are linearly movable. When a reticle is placed within the inner portion 102 of the reticle pod 100, the reticle holders 110 can contact the reticle in a portion of the linear range of motion of the reticle holders 110. Multiple reticle holders 110 can be distributed along the reticle compartment wall 108. In embodiments, the reticle compartment wall 108 forms a square, and at least one reticle holder 110 is disposed on each side of the square. In embodiments, the reticle compartment wall 108 forms a square, and at least two reticle holders 110 are disposed on each side of the square. In embodiments, the reticle holders 110 located on each side of a shape defined by the reticle compartment wall 108 are opposing reticle holders 110 located on opposite sides of the shape, such that a reticle will be clamped between the opposing reticle holders 110. The reticle holders 110 are configured to limit or prevent movement of a reticle within the inner portion of the reticle pod 100 when contacting the reticle as the reticle pod 100 undergoes movement (e.g., during movement and handling of the reticle pod 100, or during a jarring event such as dropping or bumping the reticle pod 100).

[0045] The reticle holder 110 includes a contact surface 124 on a side of the reticle holder 110 that is outside of the reticle compartment wall 108. The contact surface 124 is configured to contact the actuation surface 118. The contact surface 124 is configured such that contact of the actuation surface 118 exerts a force on the reticle holder 110 that includes a component that is inward toward the interior space 132 bounded by the base plate 104 and the cover 106. The contact surface 124 can have a shape that is complementary to the actuation surface 118, such as both the contact surface 124 and the actuation surface 118 being flat surfaces, or the contact surface 124 having a curved surface that is configured to match a curved actuation surface 118. For example, the contact surface 124 can be a flat surface that has a plane that is at an acute angle A relative to a direction of movement of the reticle holder 110 through the reticle compartment wall 108.

[0046] In embodiments, the reticle holder 110 includes an engagement surface 126 that is shaped to interface with a reticle. In embodiments, the engagement surface 126 includes a flat protrusion that is configured to contact an upper surface of a reticle. In embodiments, this upper surface is a surface that is opposite a surface of a reticle contact 120 included in the base plate 104. In embodiments, the engagement surface 126 includes a curved surface that corresponds to a bevel or other shape at an edge of a reticle. In embodiments, the engagement surface 126 is disposed on a section 128 that has a cross-sectional area that is larger than a cross-sectional area of a portion that extends through the through-hole 122.

[0047] In embodiments, a section 130 of the reticle holder 110 that extends through the through-hole 122 can include at least a portion that has a shape such as an ellipse or one or more features such as tabs or notched sections that maintain an orientation of the reticle holder 110 relative to the reticle compartment wall 108.

[0048] In embodiments, the reticle holder 110 can include on a surface one or more features to connect the reticle holder 110 to a spring or elastic material, such as a flange to be contacted by a spring or a groove configured to receive an elastic material.

[0049] The outer portion 112 of the reticle pod 100 is configured to enclose the inner portion 102. The outer portion 112 can include or be made entirely of a polymeric material. The outer portion includes a pod dome 114 and a pod door 116. In embodiments, the pod dome 114 and the pod door 116 are secured to one another by latches to form the outer portion 112. In embodiments, the outer portion 112 includes an interior space 134 sized to accommodate the inner portion 102, and the outer portion 112 contacts the inner portion 102 while the pod door 116 and the pod dome 114 are secured to one another. The contact between the outer portion 112 and the inner portion 102 when the outer portion 112 is assembled can secure the inner portion 102 within the outer portion 112. This contact can be provided by one or more protrusions, recesses, or other such features on the pod dome 114 and the pod door 116 on surfaces facing the interior space 134 of the outer portion 112. In embodiments, at least one of the components of the outer portion 112 includes a protrusion that includes an actuation surface 118.

[0050] The pod dome 114 is a portion of the outer portion 112 of the reticle pod 100. The pod dome 114 can include one or more features configured to contact the lid 106 when the reticle pod 100 is assembled. The pod dome 114 can further include one or more protrusions that include one or more actuation surfaces 118. The pod dome 114 includes an interior space. The interior space can include a first interior space 134 sized to accommodate the inner portion 102 of the reticle pod 100 and a second space (not shown) at an end of the pod dome 114 configured to accommodate the pod door 116. The second space can be defined by a lip (not shown). The portion of the pod dome 114 surrounding the second space can include one or more slots or other openings configured to receive a portion of a latch to secure the pod dome 114 to the pod door 116 to form the outer portion 112 of the reticle pod 100.

[0051] The pod door 116 is another portion of the outer portion 112 of the reticle pod 100. The pod door 116 is configured to combine with the pod dome 114 to form the outer portion 112 of the reticle pod 100. The pod door 116 can be sized so that it fits in the space of the pod dome 114 so that it closes an end of the pod dome 114. The pod door 116 can be joined to the pod dome 114 by one or more latches. The pod door 116 can be removed from the pod dome 114 when the latches are not engaged with the pod dome 114.

[0052] In FIG. 1In the embodiment shown in the middle, actuation surface 118 is disposed on a protrusion from pod dome 114. For example, actuation surface 118 can be a sliding surface configured to contact a reticle holder 110 at a contact surface 124 of the reticle holder. When actuation surface 118 contacts the reticle holder at contact surface 124, the reticle holder 110 can be driven inward with respect to an interior space formed by bottom plate 104 and cover 106. In embodiments, actuation surface 118 and contact surface 124 are opposing faces of a wedge, such that sliding of actuation surface 118 against contact surface 124 causes inward movement of reticle holder 110.

[0053] FIG. 2 A cross-sectional view of a reticle pod 200 according to an embodiment is shown. Reticle pod 200 includes an inner portion 202 including a bottom plate 204 and a cover 206. In FIG. 2 In the embodiment shown in the middle, bottom plate 204 includes a reticle compartment wall 208. Reticle compartment wall 208 includes a reticle holder 210. Reticle pod 200 also includes an outer portion 212 including a pod dome 214 and a pod door 216. In FIG. 2 In the embodiment shown in the middle, pod door 216 includes an actuation surface 218.

[0054] Reticle pod 200, as described above for reticle pod 100, is a pod configured to store a reticle during shipping, handling and processing, particularly for processing such as photolithography (e.g., extreme ultraviolet (EUV)). For example, a reticle is a photolithographic mask for a semiconductor wafer.

[0055] Inner portion 202 is a portion of reticle pod 200 in which a reticle can be placed. Inner portion 202 includes an interior space 230 bounded by bottom plate 204 and cover 206. Interior space 230 can be sized such that it can accommodate a reticle. One or both of the components of inner portion 202— cover 206 and bottom plate 204— can include a metal or alloy, such as aluminum or another such suitable material.

[0056] The base plate 204 can include one or more reticle contacts 220. In embodiments, the reticle contacts 220 are secured to the inner side of the base plate 204 such that they face the lid 206 when the inner portion 202 of the reticle pod 200 is assembled. In embodiments, the reticle contacts 220 are secured in place by, for example, a mechanical connection (e.g., portions of the reticle contacts 220 are pressed through holes formed in the base plate 204). In embodiments, the reticle contacts 220 are integrally formed in the base plate 204. In embodiments, there are at least three reticle contacts 220 formed in or attached to the base plate 204. In embodiments, there are four reticle contacts 220 formed in or attached to the base plate 204. In embodiments, the reticle contacts 220 are located on the base plate at positions corresponding to corners of the interior space 230 of the inner portion 202. The reticle contacts 220 include a material that is compatible with reticle materials. Compatible materials include materials that provide minimal or no particle generation when in contact with reticle materials and that cannot scratch or otherwise damage reticle materials. In embodiments, the compatible material is a polymeric material. The reticle contacts 220 can include the compatible material at least at contact points configured to contact a reticle when the reticle pod 200 is assembled. In embodiments, the reticle contacts 220 are made entirely of a polymeric material suitable for contacting a reticle. For example, suitable polymeric materials include polyether ether ketone (PEEK), polyaryletherketone (PAEK), polyethyleneimine (PEI), polyamideimide (PAI), or a conductive polymer.

[0057] The lid 206 is another portion of the inner portion 202 that is configured to interface with the base plate 204. The lid 206 can form an upper portion of the inner portion 202. The lid 206 can include features that mate or are mechanically compatible with the base plate 204. In embodiments, the lid 206 includes a reticle compartment wall 208 extending from a surface of the lid 206. FIG. 2 In the embodiment shown in FIG. 1, the lid 206 includes a reticle compartment wall 208 extending from a surface of the lid 206.

[0058] In the embodiment shown in FIG. 1, the lid 206 includes a reticle compartment wall 208 extending from a surface of the lid 206. FIG. 2 In the embodiment shown in FIG. 1, the reticle compartment wall 208 extends from the lid 206. When the lid 206 and the base plate 204 are assembled to form the inner portion 202, the reticle compartment wall 208 extends from a surface 234 of the lid 206 that faces the base plate 204. In alternative embodiments, the reticle compartment wall 208 can extend from the base plate 204 toward the lid 206. The reticle compartment wall 208 can define a perimeter of the interior space 230 of the inner portion 202 that is configured to house a reticle. In embodiments, the reticle compartment wall 208 includes one or more through-holes 222. The reticle holder 210 can extend through the through-holes 222. The through-holes 222 can be, for example, circular, square, or rectangular in cross-section.

[0059] In the embodiment shown in FIG. 1, the lid 206 includes a reticle compartment wall 208 extending from a surface of the lid 206. FIG. 2In the embodiment shown in the middle, the reticle holder 210 includes a first end 224 on a first side of the reticle compartment wall 208 and a second end 226 on a second side of the reticle compartment wall 208 opposite the first side. The reticle holder 210 is attached to the reticle compartment wall 208 via a hinge 228 within a through-hole 222. The reticle holder 210 is sufficiently rigid such that when a force is applied to the first end 224, the reticle holder rotates about the hinge 228, causing the second end 226 to move. In embodiments, the reticle holder 210 is flexible such that when the second end 226 contacts a reticle, the reticle holder 210 can flex.

[0060] The first end 224 is on a side of the reticle compartment wall 208 that is outside of the interior space 230 bounded by the floor 204 and the lid 206. The first end 224 extends away from the reticle compartment wall 208 such that when the inner portion 202 is within the outer portion 212, the first end can be contacted by a feature included on a portion of the outer portion 212, such as the pod dome 214 or the pod door 216.

[0061] The second end 226 is on a side of the reticle compartment wall 208 that is inside of the interior space 230 bounded by the floor 204 and the lid 206. The reticle holder 210 is configured such that the second end 226 can be rotated into a position where it will contact a reticle that is within the interior space 230 bounded by the floor 204 and the lid 206. The second end 226 can be configured to contact a reticle on a surface of the reticle that is opposite a surface of the reticle contact 220 in the floor 204.

[0062] The hinge 228 is a hinge that joins the reticle holder 210 to the reticle compartment wall 208. The hinge 228 is within the through-hole 222. In embodiments, 228 includes projections from the reticle holder 210 that are opposite each other and corresponding holes formed in the through-hole 222 that are configured to receive the projections. In embodiments, the hinge 228 includes a projection that extends from a surface of the through-hole 222 into the reticle holder 210. The hinge 228 can be oriented such that an axis of rotation about the hinge 228 is in the same plane as the reticle compartment wall 208.

[0063] The outer portion 212 of the reticle pod 200 is configured to enclose the inner portion 202. The outer portion 212 can include or be made entirely of a polymeric material. The outer portion 212 includes a pod dome 214 and a pod door 216. In embodiments, the pod dome 214 and the pod door 216 are secured to one another by a latch to form the outer portion 212. In embodiments, the outer portion 212 includes an interior space 232 sized to accommodate the inner portion 202, and the outer portion 212 contacts the inner portion 202 while the pod door 216 and the pod dome 214 are secured to one another. The contact between the outer portion 212 and the inner portion 202 when the outer portion 212 is assembled can secure the inner portion 202 within the outer portion 212. This contact can be provided by one or more protrusions, recesses, or other such features on the pod dome 214 and the pod door 216 on surfaces facing the interior space 232 of the outer portion 212. In embodiments, at least one of the components of the outer portion 212 includes a protrusion that includes an actuation surface 218.

[0064] The pod dome 214 is a portion of the outer portion 212 of the reticle pod 200. The pod dome 214 can include one or more features configured to contact the lid 206 when the reticle pod 200 is assembled. The pod dome 214 can include an interior space 232 sized to accommodate the inner portion 202 of the reticle pod 200 and an opening (not shown) at an end of the pod dome 214 configured to accommodate the pod door 216. The opening can be defined by a lip (not shown). The portion of the pod dome 214 that surrounds the second space can include one or more slots or other openings configured to receive a portion of a latch to secure the pod dome 214 to the pod door 216 to form the outer portion 212 of the reticle pod 200.

[0065] The pod door 216 is another portion of the outer portion 212 of the reticle pod 200. The pod door 216 is configured to combine with the pod dome 214 to form the outer portion 212 of the reticle pod 200. The pod door 216 can be sized so that it fits in the space of the pod dome 214 so that it closes an end of the pod dome 214. The pod door 216 can be engaged to the pod dome 214 by one or more latches. The pod door 216 can be removed from the pod dome 214 when the latches are not engaged with the pod dome 214. The pod door 216 can further include one or more protrusions that include one or more actuation surfaces 218.

[0066] In FIG. 2In the embodiment shown in the middle, one or more actuation surfaces 218 are disposed on one or more protrusions from the pod door 216. The actuation surfaces 218 are configured to contact the first end 224 when the pod door 216 is engaged with the pod dome 214 or secured to one another. Contact between the actuation surfaces 218 and the first end 224 of the reticle holder 210 pushes the first end 224, thereby rotating the reticle holder about the hinge 228. This rotation moves the second end 226 into a position where it can contact a reticle located within the inner portion 202 of the reticle pod 200. Contact between the second end 226 and the reticle can secure the reticle, for example, by pinching the reticle between at least a portion of the second end 226 and a reticle contact 220 included in the base plate 204. In embodiments, the actuation surfaces 218 themselves can be actuated, for example, by being moved to protrude outward from the pod door 216 by being acted upon, for example, by components of a latching mechanism included in the pod door 216.

[0067] FIG. 3 A flowchart of a method for moving one or more reticle contacts according to embodiments is shown. The method 300 includes engaging a cover to a base plate 302, engaging a pod door to a pod dome 304, contacting one or more actuation surfaces to one or more retention features located on a reticle compartment wall 306, and moving one or more retention features via contact with the one or more actuation surfaces 308.

[0068] A cover is engaged to a base plate 302. For example, the cover can be the cover 106 or 206 described above. For example, the base plate can be the base plate 104 or 204 described above. In embodiments, a reticle is placed on the base plate prior to engaging the cover to the base plate at 302. In embodiments, engaging the cover to the base plate includes placing the cover on the base plate such that a reticle compartment wall, for example, the reticle compartment wall 108, rests on the base plate. In embodiments, engaging the cover to the base plate includes placing the cover on a reticle compartment wall, for example, the reticle compartment wall 208, extending from the base plate. Engaging the cover to the base plate 302 can include aligning the cover and the base plate with one another such that they are in the same orientation. The orientation can be the alignment of interfacing features on one or both of the cover and the base plate.

[0069] A pod door is engaged to a pod dome 304. For example, the pod door can be the pod door 116 or 216 described above. For example, the pod dome can be the pod dome 114 or 214 described above. The pod door and the pod dome 304 can be engaged such that the cover and the base plate engaged at 302 are contained within the pod dome and the pod door. After engaging the pod door to the pod dome 304, the pod door and the pod dome can be secured to one another via one or more latches. The pod door and the pod dome can be engaged 304 by placing the pod dome over the pod door such that the pod door is located within a space defined by the pod dome.

[0070] One or more actuation surfaces are brought into contact with one or more retention features located on a reticle compartment wall 306. The one or more actuation surfaces can be present on a pod dome or a pod door. The one or more actuation surfaces can be configured to contact the retention features when the pod door is engaged with the pod dome at 304. The one or more actuation surfaces can be configured to contact the retention features when the pod dome is secured with the pod door via a latch. For example, the actuation surfaces can be sliding surfaces configured to contact sliding surfaces on the retention features. In an embodiment, the sliding surfaces are included on protrusions from the pod dome. For example, the actuation surfaces can be contact points configured to contact ends of the retention features that extend outside the reticle compartment wall at the ends. In an embodiment, the contact points are located on protrusions from the pod door.

[0071] The one or more retention features are moved via contact with the one or more actuation surfaces 308. In an embodiment, the actuation surfaces drive the retention features (e.g., reticle holders 110) to move linearly inward into a space bounded by the reticle compartment wall. In an embodiment, the actuation surfaces are sliding surfaces that contact corresponding sliding surfaces on the retention features such that the retention features move inward into the space bounded by the reticle compartment wall. In an embodiment, the actuation surfaces drive rotational movement of the one or more retention features. The rotational movement can be about an axis that is in the same plane as the plane of the reticle compartment wall. The rotational movement can cause reticle contact points on the retention features to rotate such that the reticle contact points move in a direction that has a component toward the floor. In an embodiment, the retention features include one end located on a first side of the reticle compartment wall, a second end located on an opposite side of the reticle compartment wall, and a hinge that joins the retention feature to the reticle compartment wall. The actuation surfaces press against one end of the retention feature, driving rotation about the hinge. Rotation about the hinge causes the second end to move, for example, toward the floor. When the retention features are moved at 308 by contact with the actuation surfaces, the retention features can be in positions that will contact a reticle within an interior space bounded by the lid and the floor. Contact of the one or more retention features with the reticle can secure the reticle within the reticle pod. The securing of the reticle can further include contact with a reticle contact point formed in or attached to the floor.

[0072] ASPECT:

[0073] It is to be understood that any of aspects 1-14 can be combined with any of aspects 15-20.

[0074] Aspect 1. A reticle pod comprising:

[0075] an interior portion including a lid and a floor, one of the lid and the floor including a reticle compartment wall extending from the one of the lid and the floor, the reticle compartment wall including one or more retention features; and

[0076] an outer portion comprising a box dome and a box door, one of the box dome and the box door comprising one or more actuation surfaces configured to contact at least one of the one or more retention features when the lid is joined to the base plate, the box dome joined to the box door, and the joined lid and the joined base plate within the joined box dome and the joined box door,

[0077] wherein when the one or more actuation surfaces contact the one or more retention features, the retention features are configured to be positioned such that they can contact a reticle when the reticle is located within the joined lid and the joined base plate.

[0078] Aspect 2. The reticle pod of Aspect 1, wherein each of the one or more retention features is linearly movable in a direction having a component having an angle ranging from zero degrees to ninety degrees from a plane of the reticle compartment wall.

[0079] Aspect 3. The reticle pod of Aspect 2, wherein each of the one or more retention features comprises a spring.

[0080] Aspect 4. The reticle pod of Aspect 3, when the spring is in a rest position, the retention feature is in a position further from a center of the base plate than when the retention feature is contacted by one of the one or more actuation surfaces.

[0081] Aspect 5. The reticle pod of any of Aspects 2-4, wherein each of the one or more retention features is linearly movable in a direction having an angle ranging from zero degrees to ninety degrees from a plane of the reticle compartment wall.

[0082] Aspect 6. The reticle pod of any of Aspects 2-5, wherein each of the one or more retention features comprises a contact surface configured to engage a curved or beveled edge.

[0083] Aspect 7. The reticle pod of any of Aspects 2-6, wherein each of the one or more actuation surfaces is a surface configured to slide against an end of at least one of the one or more retention features.

[0084] Aspect 8. The reticle pod of Aspect 7, wherein each of the one or more actuation surfaces extends from the box dome.

[0085] Aspect 9. The reticle pod of Aspect 1, wherein:

[0086] Each of the one or more retention features includes a first end on a first side of the reticle compartment wall and a second end on a second side of the reticle compartment wall, the second side of the reticle compartment wall being opposite the first side of the reticle compartment wall, and each of the one or more retention features is rotatable about an axis that is in the same plane as a plane of the reticle compartment wall.

[0087] Aspect 10. The reticle pod of aspect 9, wherein each of the one or more actuating surfaces is a protrusion extending from the pod door.

[0088] Aspect 11. The reticle pod of aspect 10, wherein when each of the one or more actuating surfaces contacts at least one of the one or more retention features at the second end, the first end of each of the one or more retention features contacts the reticle.

[0089] Aspect 12. The reticle pod of any of aspects 1-11, wherein each of the one or more retention features includes a thermoplastic material.

[0090] Aspect 13. The reticle pod of any of aspects 1-12, wherein the reticle compartment wall extends from the bottom plate.

[0091] Aspect 14. The reticle pod of any of aspects 1-12, wherein the reticle compartment wall extends from the lid.

[0092] Aspect 15. A method of manipulating one or more retention features, comprising:

[0093] engaging a lid to a bottom plate, wherein one of the lid and the bottom plate includes a reticle compartment wall extending from the one of the lid and the bottom plate,

[0094] placing the engaged lid and the engaged bottom plate in a pod dome;

[0095] engaging a pod door to the pod dome, wherein engaging the pod door to the pod dome includes contacting one or more actuating surfaces with one or more retention features located on the reticle compartment wall and moving the one or more retention features via the contacting with the one or more actuating surfaces.

[0096] Aspect 16. The method of aspect 15, wherein moving the one or more retention features includes moving the one or more retention features linearly inward into a space bounded by the reticle compartment wall.

[0097] Aspect 17. The method of aspect 16, wherein the one or more actuating surfaces are located on the lid and are configured to slide against an end of at least one of the one or more retention features.

[0098] Aspect 18. The method of any of aspects 15-17, wherein moving the one or more retention features comprises a rotational movement of the one or more retention features about an axis that is in the same plane as a plane of the reticle compartment wall.

[0099] Aspect 19. The method of aspect 18, wherein the one or more actuation surfaces are protrusions extending from the cassette door.

[0100] Aspect 20. The method of any of aspects 15-19, wherein the reticle compartment wall extends from the cover.

[0101] The examples disclosed in this application are to be considered in all respects as illustrative and not restrictive; the scope of the application being indicated by the appended claims rather than by the foregoing description; and all changes which come within the meaning and range of equivalency of the claims are intended to be embraced therein.

Claims

1. A photomask box, comprising: The interior portion includes a cover and a base plate, one of the cover and the base plate including a photomask compartment wall extending from the one of the cover and the base plate, the photomask compartment wall including retaining features; and The outer portion includes a box dome and a box door, one of which includes an actuating surface configured to contact the retaining feature when the cover is engaged with the base plate, the box dome is engaged with the box door, and the cover and base plate are located within the engaged box dome and the engaged box door. The retaining feature includes a first end located outside the wall of the photomask chamber and a second end located inside the wall of the photomask chamber. The retaining feature is configured such that contact between the actuating surface and the first end of the retaining feature causes the retaining feature to rotate about an axis, and the second end of the retaining feature contacts the photomask when the photomask is located within the bonded cover and the bonded base plate.

2. The photomask box according to claim 1, wherein the axis is in the same plane as the wall of the photomask compartment.

3. The photomask box according to claim 1, wherein the retaining feature is attached to the photomask compartment wall via a hinge.

4. The photomask box according to claim 3, wherein the hinge is located within a through hole in the wall of the photomask compartment.

5. The photomask box according to claim 4, wherein the cross-sectional shape of the through hole in the wall of the photomask compartment is circular, square or rectangular.

6. The photomask housing according to claim 4, wherein the hinge includes one or more protrusions configured to engage with one or more holes on the surface of the through-hole formed in the wall of the photomask compartment.

7. The photomask box according to claim 1, wherein the retaining feature is rigid, such that contact at the first end causes rotation at the second end.

8. The photomask housing according to claim 1, wherein the retaining feature is configured to flex when the second end contacts the photomask.

9. The photomask box of claim 1, wherein the photomask compartment wall further includes a second retaining feature, and wherein one of the box dome and the box door includes a second actuating surface configured to contact the second retaining feature.

10. A method for manipulating one or more retaining features, comprising: The cover is joined to the base plate, wherein one of the cover and the base plate includes a light shield compartment wall extending from the one of the cover and the base plate; Place the joined cover and joined base plate inside the box dome; Engaging the box door to the box dome, wherein engaging the box door to the box dome includes contacting one or more actuating surfaces with one or more retaining features located on the wall of the photomask compartment to restrict or prevent movement of the photomask; as well as The one or more retaining features are moved by contact with the one or more actuating surfaces. Moving one or more retaining features includes rotating the one or more retaining features about an axis.

11. The method of claim 10, wherein rotating the one or more retaining features comprises contacting a first end of the retaining feature with the actuating surface such that a second end of the retaining feature contacts the photomask located within the bonded cover and the bonded base plate.

12. The method of claim 10, wherein the one or more actuating surfaces are located on the cover and configured to contact a first end of at least one of the one or more retaining features.

13. The method of claim 10, wherein the rotational movement of the one or more retaining features occurs about an axis in the same plane as the plane of the photomask chamber wall.

14. The method of claim 10, wherein the one or more actuating surfaces are protrusions extending from the door.

15. The method of claim 10, wherein the photomask compartment wall extends from the cover.

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