Automated intelligent imaging microscopy system

Abstract

This invention relates to the field of optical microscopy and provides an automated intelligent imaging microscopy system, comprising: an illumination module with its optical axis in the horizontal direction; an imaging module with its optical axis in the horizontal direction and arranged along the Y-axis; the imaging module including an objective lens unit comprising multiple objectives of different magnifications arranged along the X-axis; an objective lens switching module for driving the objective lens unit to move along the X-axis; an objective lens focusing module for adjusting the distance between the corresponding objective lens and the observation surface of the sample in the Y-axis direction; a sample stage including a stage on which the sample is placed; and a control console including a controller, which is electrically connected to at least the objective lens switching module and the focusing module. Therefore, this invention can reduce the influence of gravity on optical components, improve the stability and reliability of the system, and automate objective lens switching and focusing, thereby improving operational efficiency.

Description

Technical Field

[0001] This invention relates to the field of optical microscopy, and more particularly to an automated intelligent imaging microscopy system. Background Technology

[0002] An optical microscope is an instrument that uses visible light (or ultraviolet light, etc.) as an illumination source to magnify and image tiny objects through a set of lenses for observation by the human eye or recording by a detector. The optical microscope has a history of over four hundred years. Today, whether it's a student microscope costing tens of yuan or a professional microscope costing hundreds of thousands of yuan, all use a vertical adjustment mode. Because the operation of the microscope tube or other optical components is adjusted vertically, even slight carelessness can crush the sample or damage the lens. Furthermore, gravity has a significant impact on the deformation of optical components, leading to a vertical optical path system being prone to focus loss and poor vibration resistance. Wear debris from moving parts can also easily contaminate the lenses. Manual adjustment is inefficient; even skilled operators need several minutes to perform the adjustment.

[0003] In conclusion, the existing technology obviously has inconveniences and defects in practical use, so it is necessary to improve it. Summary of the Invention

[0004] To address the aforementioned shortcomings, the present invention aims to provide an automated intelligent imaging microscopy system that lays out the optical path in a horizontal direction, thereby allowing for horizontal adjustment of optical elements, reducing the impact of gravity on optical elements, improving the stability and reliability of the system, and automating objective lens switching and focusing, thus improving operational efficiency.

[0005] To achieve the above objectives, the present invention provides an automated intelligent imaging microscopy system, comprising:

[0006] The illumination module has its optical axis in the horizontal direction, and the light it emits illuminates the observation surface of the sample;

[0007] An imaging module, whose optical axis is horizontal and along the Y-axis, receives light information from the observation surface of the sample and forms an image based on the light information; the imaging module includes an objective lens unit, which has multiple objective lenses of different magnifications arranged horizontally side by side along the X-axis; the optical axis of each objective lens is perpendicular to the observation surface of the sample.

[0008] An objective lens switching module is used to drive the objective lens unit to move along the X-axis direction so that the optical axis of the corresponding objective lens coincides with the optical axis of the imaging module; the objective lens switching module includes a first movable carrier plate that moves along the X-axis direction; the objective lens unit is connected to the first movable carrier plate;

[0009] An objective focusing module is used to adjust the distance between the corresponding objective lens and the observation surface of the sample in the Y-axis direction; the objective focusing module includes a second movable carrier plate that moves along the Y-axis direction; the illumination module, the imaging module, and the objective lens switching module are connected to the second movable carrier plate;

[0010] The sample stage includes a stage on which a placement platform is provided. A front baffle is vertically arranged on the side of the placement platform near the objective lens unit, and the front baffle is perpendicular to the optical axis of the objective lens. An observation window is provided on the front baffle. A locking slot is also provided on the placement platform, and the sample is installed in the locking slot and close to the front baffle. Light emitted by the illumination module passes through the observation window and illuminates the observation surface of the sample.

[0011] The control console includes a controller that is electrically connected to at least the objective lens switching module and the focusing module, and controls the movement of the first moving carrier and the second moving carrier.

[0012] According to the automated intelligent imaging microscopy system described above, the illumination module includes:

[0013] A dimmable lighting unit includes a lighting source and a dimming controller, wherein the dimming controller is electrically connected to the lighting source; the dimming controller is electrically connected to the controller; the dimming controller adjusts the brightness of the light emitted by the lighting source according to the instructions of the controller; the light emitted by the lighting source illuminates a light-dark field switching unit;

[0014] A bright-dark field switching unit includes a bright-dark field mechanism, a first Z-axis drive mechanism, and a first displacement sensor. The bright-dark field mechanism includes a bright field and a dark field, which are distributed along the Z-axis. The bright field includes a beam splitter, and the dark field includes a first reflector with a central cutout. The first displacement sensor senses first position information of the bright-dark field mechanism and sends it to the controller. The first Z-axis drive mechanism is electrically connected to the controller. The controller sends a control command to the first Z-axis drive mechanism based on the first position information. The first Z-axis drive mechanism drives the bright-dark field mechanism to move along the Z-axis according to the command, so that the light is emitted after passing through the beam splitter in the bright field or after passing through the first reflector in the dark field.

[0015] According to the automated intelligent imaging microscopy system described above, the illumination module further includes:

[0016] An optical processing lens unit, whose optical axis coincides with the optical axis of the illumination source, processes the light emitted by the illumination source;

[0017] The second reflector reflects the light processed by the optical processing lens unit onto the light homogenizer;

[0018] A light diffuser receives the light reflected by the second reflector and evenly projects the light onto the aperture unit;

[0019] An aperture unit is provided with multiple apertures, each with a different aperture. Each aperture is electrically connected to an aperture adjustment controller, which is electrically connected to a controller. The aperture adjustment controller controls the aperture with the corresponding aperture to move according to the controller's instructions until its optical axis coincides with the optical axis of the light diffuser. The light rays are emitted into the converging lens unit after passing through the aperture of the aperture.

[0020] The converging lens unit has its optical axis coincident with the optical axis of the aperture unit, converging the light rays to the bright-dark field switching unit.

[0021] According to the automated intelligent imaging microscopy system, the objective lens unit is positioned close to the staging platform, and the objective lenses of the objective lens unit are parfocal; the bright-dark field mechanism is positioned on the side of the objective lens unit away from the staging platform.

[0022] If the light emitted from the illumination module through the bright field passes through the center of the corresponding objective lens and directly illuminates the test surface of the sample, then the corresponding objective lens receives the light information from the test surface of the sample, and the light information enters the intermediate lens tube after passing through the beam splitter of the bright field. If the light emitted from the illumination module through the dark field passes through the outer annular channel of the corresponding objective lens and obliquely illuminates the test surface of the sample, then the corresponding objective lens receives the light information from the test surface of the sample, and the light information enters the intermediate lens tube after passing through the central cutout of the first reflector of the dark field.

[0023] The imaging module further includes:

[0024] The optical axis of the intermediate lens tube coincides with the optical axis of the corresponding objective lens.

[0025] The CCD camera has its optical axis coincident with the optical axis of the intermediate lens barrel, and receives the light information emitted from the intermediate lens barrel to form an image.

[0026] According to the automated intelligent imaging microscopy system described above, the imaging module further includes:

[0027] A camera adapter unit includes a camera adapter group, a first X-axis drive mechanism, and a second displacement sensor. The camera adapter group includes multiple camera adapters, each equipped with a lens of a different focal length. The camera adapters are arranged along the X-axis. The second displacement sensor senses second position information of the camera adapter group and sends it to the controller. The first X-axis drive mechanism is electrically connected to the controller. The controller sends a control command to the first X-axis drive mechanism based on the second position information. The first X-axis drive mechanism drives the camera adapter group to move along the X-axis to a corresponding position state according to the command. The corresponding position state includes the camera adapter group moving to a position where the corresponding camera adapter is in the optical path or the camera adapter group moving to a position where all camera adapters are out of the optical path.

[0028] The camera driving unit includes a first Y-axis driving mechanism and a third displacement sensor. The first Y-axis driving mechanism drives the CCD camera to move along the Y-axis direction. The third displacement sensor senses the third position information of the CCD camera and sends it to the controller. The first Y-axis driving mechanism is electrically connected to the controller. The controller sends a control command to the first Y-axis driving mechanism based on the position status of the camera adapter group and the third position information of the CCD camera. The first Y-axis driving mechanism drives the CCD camera to move along the Y-axis direction to a predetermined distance from the intermediate lens barrel according to the command.

[0029] According to the automated intelligent imaging microscopy system, the objective lens unit further includes an objective lens carrier and an objective lens support; the objective lens support is provided with a plurality of support frames adapted to the objective lens arranged along the X-axis direction, and each objective lens is disposed on the support frame; the objective lens support is disposed at one end of the objective lens carrier; the objective lens carrier is mounted on the first movable carrier.

[0030] According to the automated intelligent imaging microscopy system, the objective lens switching module further includes a second X-axis drive mechanism and a fourth displacement sensor. The fourth displacement sensor senses the fourth position information of the first moving carrier and sends it to the controller. The second X-axis drive mechanism is electrically connected to the controller. The controller sends a command to the second X-axis drive mechanism to control its operation according to the fourth position information. The second X-axis drive mechanism drives the first moving carrier to move in the X-axis direction according to the command.

[0031] According to the automated intelligent imaging microscopy system, the objective focusing module further includes a second Y-axis drive mechanism and a fifth displacement sensor. The fifth displacement sensor senses the fifth position information of the second moving carrier and sends it to the controller. The second Y-axis drive mechanism is electrically connected to the controller. The controller sends a command to the second Y-axis drive mechanism to control its operation according to the fifth position information. The second Y-axis drive mechanism drives the second moving carrier to move in the Y-axis direction according to the command.

[0032] The illumination module is mounted on the mounting plate; all components of the imaging module except the objective lens unit are mounted on the mounting plate; the mounting plate is mounted on the second movable carrier plate via support columns; there is a space between the mounting plate and the second movable carrier plate;

[0033] The second X-axis drive mechanism is mounted on the second movable carrier plate and located in the receiving space.

[0034] The automated intelligent imaging microscopy system also includes a frame base plate, on which the objective lens focusing module is mounted.

[0035] According to the automated intelligent imaging microscopy system described above, the sample stage further includes:

[0036] The frame uprights are mounted on the main base plate of the frame.

[0037] The lifting drive module includes a lifting platform, a second Z-axis drive mechanism, and a sixth displacement sensor. The second Z-axis drive mechanism is mounted on the frame platform. The sixth displacement sensor senses the sixth position information of the lifting platform and sends it to the controller. The second Z-axis drive mechanism is electrically connected to the controller. The controller sends a control command to the second Z-axis drive mechanism based on the sixth position information, and the second Z-axis drive mechanism drives the lifting platform to move along the Z-axis direction according to the command.

[0038] A translation drive module includes a translational upright plate, a third X-axis drive mechanism, a nut fitted on the lead screw of the third X-axis drive mechanism, and a seventh displacement sensor. The translational upright plate is mounted on a lifting upright plate via a guide rail arranged along the X-axis direction. The third X-axis drive mechanism is disposed on the translational upright plate, and the nut is connected to the lifting upright plate. The seventh displacement sensor senses the seventh position information of the translational upright plate and sends it to the controller. The third X-axis drive mechanism is electrically connected to the controller. The controller sends a control command to the third X-axis drive mechanism based on the seventh position information, and the third X-axis drive mechanism drives the translational upright plate to move relative to the lifting upright plate along the X-axis direction according to the command.

[0039] The platform is mounted on the translational upright plate.

[0040] According to the automated intelligent imaging microscopy system, the frame plate is positioned close to the objective lens unit, and the stage is positioned on the side away from the objective lens unit; observation areas are provided on the frame plate, the lifting plate, and the translation plate.

[0041] According to the automated intelligent imaging microscopy system, the positioning groove restricts the movement of the sample in the X-axis direction;

[0042] The stage further includes a sample loading unit, which is disposed on the placement platform. The sample loading unit includes a loading / unloading rod, a third Y-axis drive mechanism, and an eighth displacement sensor. The eighth displacement sensor senses the eighth position information of the loading / unloading rod and sends it to the controller. The third Y-axis drive mechanism is electrically connected to the controller. The controller sends a control command to the third Y-axis drive mechanism based on the eighth position information, and the third Y-axis drive mechanism drives the loading / unloading rod to move in the Y-axis direction according to the command. The loading / unloading rod connects to the sample via a suction cup, and the loading / unloading rod drives the sample to move along the Y-axis within the slot to be close to or away from the front baffle. The third Y-axis drive mechanism is electrically connected to the controller.

[0043] According to the automated intelligent imaging microscopy system, the third Y-axis drive mechanism includes:

[0044] The guide rail is provided with two rails, which are arranged along the Y-axis direction;

[0045] The slider is slidably mounted on the two guide rails;

[0046] The driver includes a lead screw motor, a lead screw, and a lead screw nut. The lead screw is connected to the lead screw motor, and the lead screw motor drives the lead screw to rotate. The lead screw nut is fitted on the lead screw and connected to the slider. The rotation of the lead screw causes the lead screw nut to move linearly in the Y-axis direction. The lead screw motor is electrically connected to the controller.

[0047] According to the automated intelligent imaging microscopy system described above, the control console also includes:

[0048] A human-machine interface controller is electrically connected to the controller; the human-machine interface controller sends instructions to the controller, the controller receives the instructions from the human-machine interface controller, and controls the operation of each module electrically connected to it according to the instructions;

[0049] A limit sensor is disposed on the side of the sample stage near the objective lens unit. The limit sensor is electrically connected to the controller. When the limit sensor detects that the objective lens unit has moved to the limit position along the Y-axis, the controller controls the objective lens focusing module to stop working.

[0050] An artificial intelligence analyzer receives images generated by the imaging module, analyzes the images and generates an analysis report, and sends the analysis report to a display; or receives multiple images generated by the imaging module, identifies a target image from the multiple images, and sends the target image to a display.

[0051] The monitor displays the analysis report or the target image.

[0052] In embodiments of the present invention, the optical axes of the illumination module and the imaging module are set in the horizontal direction, allowing operations such as switching between different magnification objectives and focusing of the objectives in the objective lens unit to be performed in the horizontal direction. This avoids focus drift due to gravity and improves system stability. The optical axis of the imaging module is set along the Y-axis, and the objectives of different magnifications in the objective lens unit are arranged sequentially along the X-axis. The objective lens switching module includes a first movable carrier plate that moves along the X-axis. The objective lens unit is connected to the first movable carrier plate, and the objective lens switching module drives the objective lens unit to move along the X-axis so that the optical axis of the corresponding objective lens coincides with the optical axis of the imaging module. The objective focusing module is used to adjust the distance between the corresponding objective lens and the observation surface of the sample in the Y-axis direction. The objective focusing module includes a second movable carrier plate that moves along the Y-axis direction. The illumination module, the imaging module, and the objective lens switching module are connected to the second movable carrier plate, so that the illumination module, the imaging module, and the objective lens switching module move as a whole with the second movable carrier plate in the Y-axis direction, thereby realizing automated focusing of the objective lens. The sample stage includes a stage, on which a placement platform is provided. A front baffle is vertically provided on the side of the placement platform near the objective lens unit, and the front baffle is perpendicular to the optical axis of the objective lens. An observation window is provided on the front baffle. A locking slot is also provided on the placement platform, and the sample is installed in the locking slot and close to the front baffle. The light emitted by the illumination module passes through the observation window and illuminates the observation surface of the sample. The sample is placed close to the front baffle, and regardless of whether the observation surface of the sample has an inclined surface, the entire observation surface is guaranteed to be in a state perpendicular to the optical axis of the objective lens. The console controller coordinates the operation of the objective lens switching module and the objective lens focusing module, thereby automating objective lens switching and focusing. Attached Figure Description

[0053] Figure 1 This is an exploded structural diagram of an automated intelligent imaging microscopy system according to an embodiment of the present invention;

[0054] Figure 2 This is a three-dimensional structural schematic diagram of an automated intelligent imaging microscopy system according to an embodiment of the present invention;

[0055] Figure 3 This is a schematic diagram of the structure of a lighting module according to an embodiment of the present invention;

[0056] Figure 4 This is a schematic diagram of the structure of a bright / dark field switching unit according to an embodiment of the present invention;

[0057] Figure 5 This is a main optical path diagram of the illumination module and imaging module according to an embodiment of the present invention;

[0058] Figure 6 This is a schematic diagram of the imaging module according to an embodiment of the present invention;

[0059] Figure 7 This is a schematic diagram showing the distance between the CCD camera and the intermediate lens barrel during clear imaging in two scenarios: with and without a camera adapter unit, according to an embodiment of the present invention.

[0060] Figure 8 This is a schematic diagram of the structure of the first movable carrier plate connecting the objective lens unit to the objective lens switching module according to an embodiment of the present invention;

[0061] Figure 9 This is a schematic diagram of the structure of the second movable carrier plate connecting the illumination module, imaging module, and objective lens switching module to the objective lens focusing module according to an embodiment of the present invention.

[0062] Figure 10 This is a schematic diagram of the structure of a sample stage according to an embodiment of the present invention;

[0063] Figure 11 This is the present invention. Figure 11 An enlarged schematic diagram of the stage in the image;

[0064] Figure 12 This is a schematic diagram of the structure of the third Y-axis drive mechanism according to an embodiment of the present invention. Detailed Implementation

[0065] To make the objectives, technical solutions, and advantages of this invention clearer, the invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the invention.

[0066] It should be noted that references to "an embodiment," "embodiment," "example embodiment," etc., in this specification refer to the described embodiment including specific features, structures, or characteristics, but not every embodiment must include these specific features, structures, or characteristics. Furthermore, such expressions do not refer to the same embodiment. Moreover, when describing specific features, structures, or characteristics in conjunction with embodiments, whether or not explicitly described, it is indicated that incorporating such features, structures, or characteristics into other embodiments is within the knowledge of those skilled in the art.

[0067] Furthermore, certain terms are used in the specification and subsequent claims to refer to specific components or parts. Those skilled in the art will understand that manufacturers may use different names or terms to refer to the same component or part. This specification and subsequent claims do not distinguish components or parts by differences in name, but rather by differences in function. The terms "comprising" and "including" used throughout the specification and subsequent claims are open-ended and should be interpreted as "including but not limited to." Additionally, the term "connection" here includes any direct and indirect electrical connection means. Indirect electrical connection means include connections made through other means.

[0068] It should also be noted that the terms used in this invention, such as "upper," "lower," "left," "right," "front," "rear," "top," "bottom," "head," "tail," "vertical," and "horizontal," indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limiting the scope of protection of this invention.

[0069] See Figures 1-12 In one embodiment of the present invention, an automated intelligent imaging microscopy system 100 is provided, comprising:

[0070] The illumination module 10 has its optical axis in the horizontal direction, and the light it emits illuminates the observation surface of the sample 200;

[0071] The imaging module 20 has its optical axis in the horizontal direction and is set along the Y-axis. It receives light information from the observation surface of the sample 200 and forms an image based on the light information. The imaging module 20 includes an objective lens unit 21, which has multiple objective lenses 201 of different magnifications arranged horizontally side by side along the X-axis. The optical axis of each objective lens 201 is perpendicular to the observation surface of the sample 200.

[0072] The objective lens switching module 30 is used to drive the objective lens unit 21 to move along the X-axis direction so that the optical axis of the corresponding objective lens 201 coincides with the optical axis of the imaging module 20; the objective lens switching module 30 includes a first movable carrier plate 31 that moves along the X-axis direction; the objective lens unit 21 is connected to the first movable carrier plate 31.

[0073] The objective lens focusing module 40 is used to adjust the distance between the corresponding objective lens 201 and the observation surface of the sample 200 in the Y-axis direction; the objective lens focusing module 40 includes a second movable carrier plate 41 that moves along the Y-axis direction; the illumination module 10, the imaging module 20 and the objective lens switching module 30 are connected to the second movable carrier plate 41;

[0074] The sample stage 50 includes a stage 51, on which a placement platform 501 is provided. A front baffle 502 is vertically provided on the side of the placement platform 501 near the objective lens unit 21. The front baffle 502 is perpendicular to the optical axis of the objective lens 201. An observation window 5021 is provided on the front baffle 502. A positioning slot 503 is also provided on the placement platform 501. The sample 200 is installed in the positioning slot 503 and is in close contact with the front baffle 502. The light emitted by the illumination module 10 passes through the observation window 5021 and illuminates the observation surface of the sample 200.

[0075] The control console 60 includes a controller that is electrically connected to at least the objective lens switching module 30 and the focusing module, and controls the movement of the first moving carrier 31 and the second moving carrier 41.

[0076] In this embodiment, the automated intelligent imaging microscopy system 100 can be applied to scenarios requiring high-precision automated observation of solid materials, such as electronic engineering, materials science, and biomedicine. The automated intelligent imaging microscopy system 100 adopts a horizontal optical path layout, setting the optical axes of the illumination module 10 and the imaging module 20 in the horizontal direction. This allows operations such as switching between different magnification objectives 201 and focusing of the objectives 201 in the objective lens unit 21 to be performed horizontally, avoiding focus drift due to gravity and improving system stability. Furthermore, the controller employs a closed-loop control algorithm to control the operation of the objective lens switching module 30 and the objective lens focusing module 40, respectively automating the switching and focusing of the objectives 201. This not only achieves a fast and reliable dynamic response but also better ensures coaxiality of the optical path. The optical axis of the imaging module 20 is horizontal and set along the Y-axis. The objective lenses 201 of different magnifications in the objective lens unit 21 are arranged sequentially along the X-axis. The objective lens switching module 30 includes a first movable carrier plate 31 that moves along the X-axis. The objective lens unit 21 is connected to the first movable carrier plate 31. The controller controls the objective lens switching module 30 to drive the first movable carrier plate 31 to move the objective lens unit 21 along the X-axis so that the optical axis of the corresponding objective lens 201 coincides with the optical axis of the imaging module 20, thereby realizing the automation of objective lens 201 switching. The objective focusing module 40 includes a second movable carrier plate 41 that moves along the Y-axis. The illumination module 10, imaging module 20, and objective switching module 30 are connected to the second movable carrier plate 41, so that the illumination module 10, imaging module 20, and objective switching module 30 move as a whole with the second movable carrier plate 41 in the Y-axis direction. The light emitted by the illumination module 10 passes through the observation window 5021 and illuminates the observation surface of the sample 200. Since the sample 200 is set close to the front baffle 502, regardless of whether the observation surface of the sample 200 has a slope, the entire observation surface can be guaranteed to be in a state perpendicular to the optical axis of the objective lens 201. Thus, the objective focusing module 40 adjusts the distance between the corresponding objective lens 201 and the observation surface of the sample 200 in the Y-axis direction. The objective lens 201 can be automatically focused by the controller. Regarding the relationship between the X, Y, and Z axes: Three-dimensional space is represented by the X, Y, and Z axes, which are mutually perpendicular. The X-axis is the horizontal axis, representing the left-right direction; the Y-axis is the vertical axis, representing the front-back direction; and the Z-axis is the vertical axis, representing the up-down direction. The plane formed by the X and Y axes is a horizontal plane. The plane formed by the X and Z axes is a vertical plane. The optical axes are set horizontally, meaning the main optical path is parallel to the horizontal plane and passes through the center of all optical elements.

[0077] See Figures 3-5 As an optional embodiment, the lighting module 10 includes:

[0078] The dimmable lighting unit 11 includes a lighting source 111 and a dimming controller 112. The dimming controller 112 is electrically connected to the lighting source 111. The dimming controller 112 is electrically connected to the controller. The dimming controller 112 adjusts the brightness of the light emitted by the lighting source 111 according to the instructions of the controller. The light emitted by the lighting source 111 illuminates the light-dark field switching unit 12.

[0079] The bright / dark field switching unit 12 includes a bright / dark field mechanism 121, a first Z-axis drive mechanism 122, and a first displacement sensor. The bright / dark field mechanism 121 includes a bright field 1211 and a dark field 1212, which are distributed along the Z-axis. The bright field 1211 includes a beam splitter 12111, and the dark field 1212 includes a first reflector 12121, which has a central hollow section 12122. The first displacement sensor senses the brightness / dark field. The first position information of the dark field mechanism 121 is sent to the controller; the first Z-axis drive mechanism 122 is electrically connected to the controller. The controller sends a command to the first Z-axis drive mechanism 122 to control its operation according to the first position information. The first Z-axis drive mechanism 122 drives the bright and dark field mechanisms 121 to move along the Z-axis direction according to the command, so that the light is emitted after passing through the beam splitter 12111 of the bright field 1211 or after passing through the first reflector 12121 of the dark field 1212.

[0080] In this embodiment, the main function of the illumination module 10 is illumination. Its role is to provide a direct (bright field 1211, light perpendicular to the observation surface) or indirect (dark field 1212, light at a fixed angle to the observation surface) light source with adjustable brightness that can uniformly illuminate the observation surface of the sample 200, ensuring that both the bright and dark areas of the observation surface of the sample 200 receive appropriate illuminance, without glare or halo, so that the camera can capture clear images. The illumination source 111 can be an LED illumination source 111. The dimming controller 112 receives instructions from the controller and automatically adjusts the brightness of the illumination source 111 using digital technology according to the instructions, achieving automatic control. The upper part of the bright / dark field mechanism 121 is the dark field 1212, and the lower part is the bright field 1211. The switching between bright field 1211 and dark field 1212 adopts a vertical lifting switching method. This is achieved by driving the bright and dark field mechanism 121 to rise or fall along the Z-axis through the first Z-axis drive mechanism 122. The operation of the first Z-axis drive mechanism 122 is controlled by a controller. The controller uses a closed-loop control algorithm in conjunction with a high-precision displacement sensor to achieve sub-micron level automatic control and ensure coaxial optical path. The displacement sensor senses the position information of the bright and dark field mechanism 121 and sends it to the controller, enabling rapid switching response and accurate positioning. Furthermore, switching only requires moving the bright and dark field mechanism 121 up and down, resulting in a vibration-free switching process. The controller sends control commands to the first Z-axis drive mechanism 122 based on the first position information. The first Z-axis drive mechanism 122 operates according to the commands, controlling the movement speed of the bright and dark field mechanism 121 or controlling the start or stop of its movement. When the controller determines that the bright and dark field mechanism 121 is about to reach its endpoint based on the first position information, it can reduce the movement speed of the bright and dark field mechanism 121. Of course, in order to prevent the movement of the light and dark field mechanism 121 from exceeding the safe range in case of accidents, a limit sensor can be set to feed back to the controller whether the light and dark field mechanism 121 has moved to the limit position. The limit sensor can be a contact type or a non-contact type. When it senses that the light and dark field mechanism 121 has reached the limit position, the controller controls the first Z-axis drive mechanism 122 to stop working to avoid collision with other mechanism components.

[0081] See Figures 3-5 As an optional embodiment, the lighting module 10 further includes:

[0082] The optical processing lens unit 13 has its optical axis coincident with the optical axis of the illumination source 111, and processes the light emitted by the illumination source 111.

[0083] The second reflector 14 reflects the light processed by the optical processing lens unit 13 onto the light diffuser 15;

[0084] The light diffuser 15 receives the light reflected by the second mirror 14 and evenly projects the light onto the aperture unit;

[0085] The aperture unit is provided with multiple apertures 161, each aperture 161 having a different aperture. Each aperture 161 is electrically connected to an aperture adjustment controller 162, which is electrically connected to a controller. The aperture adjustment controller 162 controls the aperture 161 with the corresponding aperture to move according to the controller's instructions until its optical axis coincides with the optical axis of the light diffuser 15. After passing through the aperture of the aperture 161, the light is emitted to the converging lens unit 17.

[0086] The converging lens unit 17 has its optical axis coincident with the optical axis of the aperture unit, converging the light to the bright and dark field switching unit 12.

[0087] In this embodiment, the optical processing lens unit 13 processes the light emitted from the illumination source 111, for example, by collimation. After processing, the light is concentrated and parallel to the optical axis. The processed light then illuminates the second reflector 14, which refracts the light onto the light diffuser 15. The aperture unit optionally includes two apertures 161 with different apertures. Light passing through different apertures 161 can obtain different light spots. Each aperture 161 is controlled by an aperture adjustment controller 162, a digital controller that controls the corresponding aperture 161 to operate according to imaging requirements, aligning its optical axis with the optical axis of the light diffuser 15. Apertures 161 that are not needed are removed from the optical path. The converging lens unit 17 converges the light to the bright / dark field switching unit 12.

[0088] The working process of lighting module 10 is as follows:

[0089] The illumination source 111 is powered by the dimming controller 112 and emits light. After being processed by the optical processing lens unit 13, the light is refracted 90 degrees by the second reflector 14. The refracted light then passes sequentially through the light diffuser 15, the aperture unit, the converging lens unit 17, and the bright / dark field mechanism 121. During operation, the bright field 1211 or dark field 1212 is switched by vertically raising and lowering the bright / dark field mechanism 121 according to the needs of image observation. The bright field 1211 is equipped with a beam splitter 12111, and the light passes through the center of the objective lens 201 and shines directly on the sample 200. The dark field 1212 is equipped with a centrally hollowed-out reflector 12121, and the light is obliquely incident on the sample 200 from the outer annular channel (non-central area of ​​the objective lens 201) of the objective lens 201 in a ring shape. After exiting the bright field 1211 or dark field 1212, the light passes through the objective lens 201 and illuminates the observation surface of the observed sample 200.

[0090] See Figure 2 , Figure 6 as well as Figure 11As an optional embodiment, the objective lens unit 21 is positioned close to the lofting platform 501, and the objective lenses 201 of the objective lens unit 21 are parfocal; the bright and dark field mechanism 121 is positioned on the side of the objective lens unit 21 away from the lofting platform 501.

[0091] If the light emitted from the illumination module 10 through the bright field 1211 passes through the center of the corresponding objective lens 201 and directly hits the test surface of the sample 200, then the corresponding objective lens 201 receives the light information from the test surface of the sample 200. The light information enters the intermediate lens tube 22 after passing through the beam splitter 12111 of the bright field 1211. If the light emitted from the illumination module 10 through the dark field 1212 passes through the outer annular channel of the corresponding objective lens 201 and obliquely hits the test surface of the sample 200, then the corresponding objective lens 201 receives the light information from the test surface of the sample 200. The light information enters the intermediate lens tube 22 after passing through the central hollow 12122 of the first reflector 12121 of the dark field 1212.

[0092] Imaging module 20 also includes:

[0093] The optical axis of the intermediate lens tube 22 coincides with the optical axis of the corresponding objective lens 201;

[0094] The CCD camera 23 (Charge-Coupled Device Camera) has its optical axis coincident with the optical axis of the intermediate lens barrel 22, and receives the light information emitted by the intermediate lens barrel 22 and forms an image.

[0095] In this embodiment, the imaging module 20 is used to obtain images of the sample 200 at different magnifications. Multiple objectives 201 with different magnifications are provided on the objective lens unit 21. The objectives 201 of the objective lens unit 21 are set to be parfocal, so that when switching between objectives 201 with different magnifications, only fine focusing or no focusing is needed for the imaging module 20 to obtain a clear image. The intermediate lens barrel 22 is a multi-lens combination lens used to ensure parfocality and optical path consistency, so that the optical axis of the objective lens 201 coincides with the optical axis of the imaging module 20. The intermediate lens barrel 22 is selected according to the parfocal distance of the objective lens 201.

[0096] The optical path of imaging module 20 is as follows:

[0097] The optical information of the observation surface of the sample 200 passes sequentially through the objective lens 201 of the objective lens unit 21 with the corresponding magnification, the beam splitter 12111 of the bright field 1211 or the central hollow 12122 of the first mirror 12121 of the dark field 1212, enters the intermediate lens tube 22, and finally forms an image on the CCD image sensor of the camera. By adjusting the state of the above devices (different magnifications of the objective lens 201, switching between bright field 1211 and dark field 1212), different images can be captured.

[0098] See Figures 6-7 As an optional embodiment, the imaging module 20 further includes:

[0099] The camera adapter unit 24 includes a camera adapter group 241, a first X-axis drive mechanism 242, and a second displacement sensor. The camera adapter group 241 includes multiple camera adapters, each equipped with a lens of a different focal length. The camera adapters are arranged along the X-axis. The second displacement sensor senses the second position information of the camera adapter group 241 and sends it to the controller. The first X-axis drive mechanism 242 is electrically connected to the controller. The controller sends a control command to the first X-axis drive mechanism based on the second position information. The first X-axis drive mechanism 242 drives the camera adapter group 241 to move along the X-axis to a corresponding position state. The corresponding position state includes the camera adapter group 241 moving to the point where the corresponding camera adapter is in the optical path or the camera adapter group 241 moving to the point where all camera adapters are out of the optical path.

[0100] The camera driving unit 25 includes a first Y-axis driving mechanism 251 and a third displacement sensor. The first Y-axis driving mechanism 251 drives the CCD camera 23 to move along the Y-axis direction. The third displacement sensor senses the third position information of the CCD camera 23 and sends it to the controller. The first Y-axis driving mechanism 251 is electrically connected to the controller. The controller sends a command to the first Y-axis driving mechanism 251 to control its operation according to the position status of the camera adapter group 241 and the third position information of the CCD camera 23. The first Y-axis driving mechanism 251 drives the CCD camera 23 to move along the Y-axis direction to a preset distance from the intermediate lens barrel 22 according to the command.

[0101] In this embodiment, the camera adapter assembly 241 includes several different camera adapters, each with a built-in lens of a different focal length. Driven by the first X-axis drive mechanism 242, the camera adapter assembly 241 moves left and right along the X-axis. During operation, the appropriate combination of camera adapter and objective lens 201 is selected according to different magnification requirements to obtain the corresponding magnification. The relationship between the total magnification Mtotal, the magnification Mobjective of the objective lens 201, and the magnification Mfit of the camera adapter is: Mtotal = Mobjective × Mfit. Of course, without the camera adapter installed, Mtotal = Mobjective. Therefore, a suitable camera adapter is switched according to the actual application requirements. The controller sends a control command to the first X-axis drive mechanism 242 based on the second position information fed back by the second displacement sensor. The controller, in conjunction with the high-precision second displacement sensor, uses a closed-loop feedback algorithm to control the operation of the first X-axis drive mechanism 242, which can better achieve optical path coaxiality. The first X-axis drive mechanism 242, based on the command, can control the moving speed of the camera adapter assembly 241, or control the start or stop of its movement. When the controller determines that the camera adapter assembly 241 is about to reach its endpoint based on the second position information, it can reduce the moving speed of the camera adapter assembly 241. The CCD camera 23 is driven by the first Y-axis drive mechanism 251, which can drive the CCD camera 23 to move back and forth in the Y-axis direction. When the camera adapter is not used, the distance between the CCD camera 23 and the intermediate lens barrel 22 is L1; when a certain camera adapter is used, the distance between the CCD camera 23 and the intermediate lens barrel 22 is L2. To obtain a clear image, L1 and L2 are different values; therefore, the CCD camera 23 needs to move in the Y-axis direction to correspond to different imaging positions. Similarly, when using different camera adapters, the CCD camera 23 also needs to move in the Y-axis direction, and the value of L2 varies depending on the camera adapter located in the optical path. The first Y-axis drive mechanism 251 is electrically connected to the controller to realize the automatic adjustment of the CCD camera 23. The controller sends a control command to the first Y-axis drive mechanism 251 based on the third position information of the CCD camera 23 fed back by the third displacement sensor and the position status of the camera adapter group 241 (different camera adapters are selected in different position states of the camera adapter group 241, or no camera adapter is used, and the distance between the CCD camera 23 and the intermediate lens barrel 22 is different for clear imaging). The controller works with the high-precision third displacement sensor and uses a closed-loop feedback algorithm to control the operation of the first Y-axis drive mechanism 251, so that the CCD camera 23 moves precisely and achieves sub-micron level autofocus. The first Y-axis drive mechanism 251 can control the moving speed of the CCD camera 23 or control the CCD camera 23 to start or stop moving, etc. When the controller determines that the CCD camera 23 is about to reach the end position based on the third position information, it can reduce the moving speed of the CCD camera 23.To prevent the camera adapter assembly 241 and the CCD camera 23 from moving beyond the safe range in case of accidents, multiple limit sensors can be set. The operation of the limit sensors and the controller is similar to that of the aforementioned embodiments, and will not be described again here.

[0102] See Figure 8 As an optional embodiment, the objective lens unit 21 further includes an objective lens carrier 202 and an objective lens support 203; the objective lens support 203 is provided with a plurality of support frames adapted to the objective lenses 201 arranged along the X-axis direction, and each objective lens 201 is disposed on the support frame; the objective lens support 203 is disposed at one end of the objective lens carrier 202; the objective lens carrier 202 is mounted on the first movable carrier 31.

[0103] In this embodiment, different magnification objectives 201 are used to obtain images at different magnifications. Each objective 201 is fixedly mounted via an objective lens support 203 to ensure stability during movement. An objective lens carrier 202 is fixedly mounted on a first movable carrier 31. Multiple objectives 201 with different magnifications (e.g., 5×, 10×, 20×, 50×, 100×, etc.) are horizontally and parallelly fixed at one end of the objective lens carrier 202 via the objective lens support 203. During installation, the optical path axes of each objective lens 201 are adjusted to maintain them on the same plane and perpendicular to the observation surface of the sample 200. By driving the first movable carrier 31 to move via the objective lens switching module 30, and moving the objective lens carrier 202 left and right along the X-axis, automatic switching of the objectives 201 with different magnifications can be achieved, thus obtaining high-quality images at different magnifications.

[0104] See Figures 8-9 As an optional embodiment, the objective lens switching module 30 also includes a second X-axis drive mechanism 32 and a fourth displacement sensor. The fourth displacement sensor senses the fourth position information of the first moving carrier plate 31 and sends it to the controller. The second X-axis drive mechanism 32 is electrically connected to the controller. The controller sends a command to the second X-axis drive mechanism 32 to control its operation according to the fourth position information. The second X-axis drive mechanism 32 drives the first moving carrier plate 31 to move in the X-axis direction according to the command.

[0105] In this embodiment, the objective lens switching module 30 drives the first movable carrier plate 31 to move in the X-axis direction via the second X-axis drive mechanism 32, which in turn moves the objective lens unit 21 in the X-axis direction. The operation of the second X-axis drive mechanism 32 is controlled by a controller. The controller can receive the position information of the objective lens unit 21 sent by a high-precision displacement sensor. Based on a closed-loop control algorithm and the position information, the controller controls the operation of the second X-axis drive mechanism 32 to ensure coaxiality of the optical path. The cooperation between the fourth displacement sensor and the controller is similar to that in the previous embodiment and will not be described again here. To prevent the movement of the first movable carrier plate 31 from exceeding the safe range in case of accidents, at least one limit sensor can be set. The operation of the limit sensor and the controller is similar to that in the previous embodiment and will not be described again here.

[0106] See Figure 9 As an optional embodiment, the objective lens focusing module 40 further includes a second Y-axis drive mechanism 42 and a fifth displacement sensor. The fifth displacement sensor senses the fifth position information of the second moving carrier and sends it to the controller. The second Y-axis drive mechanism 42 is electrically connected to the controller. The controller sends a command to the second Y-axis drive mechanism 42 to control its operation according to the fifth position information. The second Y-axis drive mechanism 42 drives the second moving carrier 41 to move in the Y-axis direction.

[0107] The illumination module 10 is mounted on the mounting plate 71; all components of the imaging module 20 except the objective lens unit 21 are mounted on the mounting plate 71; the mounting plate 71 is mounted on the second movable carrier plate 41 via the support column 72; there is a receiving space 73 between the mounting plate 71 and the second movable carrier plate 41.

[0108] The second X-axis drive mechanism 32 is mounted on the second movable carrier plate 41 and is located in the receiving space 73.

[0109] In this embodiment, to obtain a clear image, the distance M between the objective lens 201 and the sample 200 needs to be adjusted to find the optimal imaging object distance, which is the purpose of the objective lens focusing module 40. Therefore, after switching between different objective lenses 201, the objective lens 201 needs to be able to move back and forth in the Y-axis direction to achieve a clear image. The objective lens focusing module 40 adopts an overall translational focusing design. Thus, the second Y-axis drive mechanism 42 of the objective lens focusing module 40 drives the second moving carrier plate 41 to move in the Y-axis direction, and the second moving carrier plate 41 drives the illumination module 10, imaging module 20, and objective lens switching module 30 to move as a whole in the Y-axis direction to achieve focusing. The second Y-axis drive mechanism 42 is electrically connected to the controller, using a high-precision displacement sensor to provide real-time position information. Combined with a closed-loop control algorithm, sub-micron level autofocus is achieved, avoiding the risk of collision between the sample 200 and the objective lens 201 during focusing, while simultaneously improving focusing speed and accuracy. To ensure that the illumination module 10, imaging module 20, and objective lens switching module 30 move together as a whole during the focusing process of objective lens 201, these components are mounted together on the second movable carrier plate 41. Specifically, the illumination module 10 is mounted on the mounting plate 71; all components of the imaging module 20, except for the objective lens unit 21, are mounted on the mounting plate 71. Support columns 72 support the mounting plate 71, and multiple support columns 72 can be provided to ensure the stability of the mounting plate 71. The support columns 72 support the mounting plate 71, creating a receiving space 73 between the mounting plate 71 and the second movable carrier plate 41, facilitating the movement of the objective lens switching module 30 with the objective lens unit 21 in the X-axis direction. The second X-axis drive mechanism 32 of the objective lens switching module 30 is mounted on the second movable carrier plate 41 and located within the receiving space 73. The cooperation between the fifth displacement sensor and the controller is similar to that in the previous embodiment and will not be described again here.

[0110] As an optional embodiment, the automated intelligent imaging microscopy system 100 also includes a frame base plate 70, on which the objective lens focusing module 40 is mounted. The objective lens focusing module 40 is securely mounted on the frame base plate 70 to ensure stability during the focusing process.

[0111] See Figure 10 As an optional embodiment, the sample stage 50 further includes:

[0112] The frame upright plate 52 is mounted on the frame base plate 70;

[0113] The lifting drive module 53 includes a lifting plate 531, a second Z-axis drive mechanism 532, and a sixth displacement sensor. The second Z-axis drive mechanism 532 is mounted on the frame plate 52. The sixth displacement sensor senses the sixth position information of the lifting plate 531 and sends it to the controller. The second Z-axis drive mechanism 532 is electrically connected to the controller. The controller sends a control command to the second Z-axis drive mechanism 532 according to the sixth position information, and the second Z-axis drive mechanism 532 drives the lifting plate 531 to move along the Z-axis direction according to the command.

[0114] The translation drive module 54 includes a translation plate 541, a third X-axis drive mechanism 542, a nut 543 fitted on the lead screw of the third X-axis drive mechanism 542, and a seventh displacement sensor. The translation plate 541 is mounted on a lifting plate 531 via a guide rail arranged along the X-axis direction. The third X-axis drive mechanism 542 is mounted on the translation plate 541, and the nut 543 is connected to the lifting plate 531. The seventh displacement sensor senses the seventh position information of the translation plate 541 and sends it to the controller. The third X-axis drive mechanism 542 is electrically connected to the controller. The controller sends a control command to the third X-axis drive mechanism 542 according to the seventh position information, and the third X-axis drive mechanism 542 drives the translation plate 541 to move relative to the lifting plate 531 along the X-axis direction according to the command.

[0115] The platform 51 is mounted on the translational vertical plate 541.

[0116] In this embodiment, the sample stage 50 is not only used to support the sample 200, but also to move the sample 200 in the vertical plane to achieve full-area scanning, using a fixed optical path and a movable stage 51. The process is as follows: the sample 200 is placed on the stage 51, which is mounted on a translational plate 541. The translational plate 541 is driven by a third X-axis drive mechanism 542 to move left and right along the X-axis. The motor of the third X-axis drive mechanism 542 drives its lead screw to rotate, and the nut 543 is fixed by a lifting plate 531. The lead screw and motor slide relative to the nut 543. The translational plate 541 is mounted on the lifting plate 531 via a guide rail set along the X-axis. Guided by the guide rail, when the motor operates, the third X-axis drive mechanism 542 drives the translational plate 541 to move relative to the lifting plate 531 along the X-axis, enabling observation of different points in the width direction of the sample 200. Driven by the second Z-axis drive mechanism 532, the lifting plate 531 can move the translation plate 541 and the stage 51 up and down along the Z-axis, enabling observation of different points on the sample 200 in the height direction. The second Z-axis drive mechanism 532 is mounted on the frame plate 52, which is erected on the frame base plate 70. The sixth and seventh displacement sensors work in a similar manner to the aforementioned embodiments, and will not be described again here. To prevent the lifting plate 531 and the translation plate 541 from moving beyond the safe range in case of accidents, multiple limit sensors can be installed. The working method of the limit sensors and the controller is similar to that of the aforementioned embodiments, and will not be described again here.

[0117] As an optional embodiment, the frame plate 52 is positioned close to the objective lens unit 21, and the stage 51 is positioned on the side away from the objective lens unit 21; observation areas are provided on the frame plate 52, the lifting plate 531, and the translation plate 541.

[0118] In this embodiment, the stage 51 and the objective lens unit 21 are separated by a frame plate 52, a lifting plate 531 and a translation plate 541. The light information of the sample 200 on the stage 51 is fed back to the objective lens unit 21 by opening an observation area.

[0119] See Figures 11-12 As an optional embodiment, the locking groove 503 restricts the movement of the sample 200 in the X-axis direction;

[0120] The stage 51 also includes a sample loading unit 55, which is mounted on the placement platform 501. The sample loading unit 55 includes a loading / unloading rod 551, a third Y-axis drive mechanism 552, and an eighth displacement sensor. The eighth displacement sensor senses the eighth position information of the loading / unloading rod 551 and sends it to the controller. The third Y-axis drive mechanism 552 is electrically connected to the controller. The controller sends a command to the third Y-axis drive mechanism 552 to control its operation based on the eighth position information. The third Y-axis drive mechanism 552 drives the loading / unloading rod 551 to move in the Y-axis direction according to the command. The loading / unloading rod 551 connects to the sample 200 through a suction cup. The loading / unloading rod 551 moves the sample 200 along the Y-axis in the slot 503 to be close to or away from the front baffle 502. The third Y-axis drive mechanism 552 is electrically connected to the controller.

[0121] In this embodiment, a front baffle 502 is vertically mounted on one end of the lofting platform 501 near the objective lens unit 21, and an observation window 5021 is opened on the front baffle 502. The sample loading unit 55 can hold the sample 200 tightly against the front baffle 502. Specifically, the lofting platform 501 has a locking groove 503, and the sample loading unit 55 is mounted on the lofting platform 501. The sample loading unit 55 consists of a loading / unloading rod 551 and a third Y-axis drive mechanism 552. The third Y-axis drive mechanism 552 can drive the loading / unloading rod 551 to move back and forth along the Y-axis. The sample 200 is placed in the locking groove 503 and is constrained by the locking groove 503 to move laterally along the X-axis, and can only move back and forth along the Y-axis within the locking groove 503. The loading / unloading rod 551, through the third Y-axis drive mechanism 552, tightly presses the sample 200 against the front baffle along the Y-axis, completing the loading of the sample 200, thereby ensuring that the observation surface of the sample 200 is tightly against the observation window 5021. Regardless of whether the observation surface of the sample 200 has an incline, the entire observation surface is ensured to be perpendicular to the optical axis of the objective lens 201, preventing focus drift when the stage 51 moves. The third X-axis drive mechanism 542 driving the translation plate 541, in conjunction with the second Z-axis drive mechanism 532 driving the lifting plate 531, enables full-area scanning of the sample 200 in the vertical plane. The third X-axis drive mechanism 542 and the second Z-axis drive mechanism 532 are controlled by a controller. High-precision displacement sensors provide feedback on position information, enabling high-precision positioning and continuous motion control. The observation of the sample 200 can also be automatically completed according to a preset path. After observation, the third Y-axis drive mechanism 552 reverses, the loading / unloading rod 551 moves backward, and the vacuum suction cup of the loading / unloading rod 551 carries the sample 200 out, completing the unloading operation. The cooperation between the eighth displacement sensor and the controller is similar to that in the previous embodiment and will not be described again here. To prevent the loading / unloading lever 551 from moving beyond the safe range in case of accidents, at least one limit sensor can be set. The operation of the limit sensor and the controller is similar to that in the previous embodiment, and will not be described again here.

[0122] See Figure 12 As an optional embodiment, the third Y-axis drive mechanism 552 includes:

[0123] There are two guide rails 5521, which are set along the Y-axis.

[0124] Slider 5522 is slidably mounted on two guide rails 5521;

[0125] The driver includes a lead screw motor 5523, a lead screw 5524, and a lead screw nut 5525. The lead screw 5524 is connected to the lead screw motor 5523, and the lead screw motor 5523 drives the lead screw 5524 to rotate. The lead screw nut 5525 is fitted on the lead screw 5524 and connected to the slider 5522. The rotation of the lead screw 5524 causes the lead screw nut 5525 to move linearly in the Y-axis direction. The lead screw motor 5523 is electrically connected to the controller.

[0126] In this embodiment, the driver is the power device for moving the lead screw nut 5525. The lead screw nut 5525 is connected to the slider 5522, and the lead screw nut 5525 will move linearly along the guide rail 5521. A movable carrier plate can be connected to the lead screw nut 5525 or the slider 5522 to move components on the movable carrier plate. Specifically, the slider 5522 is slidably fitted onto the two guide rails 5521. The driver includes a lead screw motor 5523, a lead screw 5524, and a lead screw nut 5525. The rotation of the lead screw motor 5523 drives the lead screw 5524 to rotate. Since the lead screw nut 5525 is connected to the slider 5522, the lead screw 5524 drives the lead screw nut 5525 to move linearly along the guide rail 5521. The lead screw nut 5525 can be integrated with the movable carrier plate, driving the movable carrier plate to move linearly with the lead screw nut 5525. This secures the driven component to the movable carrier plate, allowing the driven component to move back and forth along the guide rail 5521. Alternatively, a lead screw motor 5523 can be connected to the slider 5522. With the lead screw nut 5525 fixed, the lead screw motor 5523 drives the lead screw 5524, causing the entire assembly of the lead screw motor 5523 and the lead screw 5524 to move linearly along the guide rail 5521. The rotation direction, speed, and number of revolutions of the lead screw motor 5523 are controlled by a controller.

[0127] The first X-axis drive mechanism 242, the second X-axis drive mechanism 32, the third X-axis drive mechanism 542, the first Y-axis drive mechanism 251, the second Y-axis drive mechanism 42, the first Z-axis drive mechanism 122, and the second Z-axis drive mechanism 532 in the above embodiments of the present invention can all adopt a structure similar to the third Y-axis drive mechanism 552, and will not be described in detail here. Furthermore, any of the above drive mechanisms is not limited to the structure combining the lead screw, lead screw nut, and lead screw motor of the driver in this embodiment. For example, linear motors and pneumatic cylinders can also drive objects to perform reciprocating linear motion, and can be selected according to requirements.

[0128] As an optional embodiment, console 60 also includes:

[0129] The human-machine interface controller is electrically connected to the controller. The human-machine interface controller sends commands to the controller, and the controller receives the commands from the human-machine interface controller and controls the operation of each module electrically connected to it according to the commands.

[0130] A limit sensor is installed on the side of the sample stage 50 near the objective lens unit 21. The limit sensor is electrically connected to the controller. When the limit sensor detects that the objective lens unit 21 has moved to the limit position along the Y-axis, the controller controls the objective lens focusing module 40 to stop working.

[0131] The artificial intelligence analyzer receives images formed by the imaging module 20, analyzes the images and generates an analysis report, and sends the analysis report to the display; or it receives multiple images formed by the imaging module 20, identifies the target image from the multiple images, and sends the target image to the display.

[0132] The monitor displays analysis reports or target images.

[0133] In this embodiment, the console 60 supports automated operation. Users can input task parameters (such as objective lens magnification, observation area, imaging mode, analysis indicators, etc.) via a human-machine interface. These parameters can be preset through intelligent programming. This allows the controller to automate the operation of various components, executing the entire process of "switching objective lens 201 → moving stage 51 to position sample 200 → adjusting light source brightness and switching aperture 161 → switching bright field 1211 / dark field 1212 mode → camera positioning → autofocus → image acquisition → image analysis (including measurement, stitching, defect identification, etc.) → generating a standardized experimental report." This reduces manual intervention; after sample 200 is loaded, multiple clear images with different modes, magnifications, and target points can be generated within seconds. Manual operation is also supported to meet personalized needs in special scenarios. The controller can control the operation of each moving drive mechanism based on the position information fed back by the displacement sensor and the closed-loop control algorithm, thereby achieving sub-micron level control over the movement of the objective lens 201 during switching, focusing, and the stage 51. The controller also performs task scheduling and coordinates the work of each module. The limit sensor can sense the objective lens unit 21 in a non-contact or contact manner. When the limit sensor detects that the objective lens unit 21 has moved to its limit position, the controller controls the objective lens focusing module 40 to stop working. At this time, the second moving carrier plate 41 stops moving, and the illumination module 10, imaging module 20, and objective lens switching module 30 mounted on the second moving carrier plate 41 also stop moving, thereby further preventing the objective lens unit 21 from colliding with the sample 200. Of course, not only can the limit sensor prevent the objective lens unit 21 from colliding, but other moving parts can also be prevented from moving out of the safe range in case of accidents by setting limit sensors. The AI ​​analyzer relies on the software's AI recognition function to select the target images needed by the observer. The software's training mode and self-learning function gradually establish a complete underlying logic database, making users feel that it becomes easier and smarter with use. The synchronous automatic generation of detection reports further reduces operation time.

[0134] In summary, the embodiments of the present invention set the optical axes of the illumination module and the imaging module in the horizontal direction, allowing operations such as switching between different magnification objectives and focusing of the objectives in the objective lens unit to be performed in the horizontal direction. This avoids focus drift due to gravity and improves the stability of the system. The optical axis of the imaging module is set along the Y-axis, and the objectives of different magnifications in the objective lens unit are arranged sequentially along the X-axis. The objective lens switching module includes a first movable carrier plate that moves along the X-axis. The objective lens unit is connected to the first movable carrier plate, and the objective lens switching module drives the objective lens unit to move along the X-axis so that the optical axis of the corresponding objective lens coincides with the optical axis of the imaging module. The objective focusing module is used to adjust the distance between the corresponding objective lens and the observation surface of the sample in the Y-axis direction. The objective focusing module includes a second movable carrier plate that moves along the Y-axis direction. The illumination module, the imaging module, and the objective lens switching module are connected to the second movable carrier plate, so that the illumination module, the imaging module, and the objective lens switching module move as a whole with the second movable carrier plate in the Y-axis direction, thereby realizing automated focusing of the objective lens. The sample stage includes a stage, on which a placement platform is provided. A front baffle is vertically provided on the side of the placement platform near the objective lens unit, and the front baffle is perpendicular to the optical axis of the objective lens. An observation window is provided on the front baffle. A locking slot is also provided on the placement platform, and the sample is installed in the locking slot and close to the front baffle. The light emitted by the illumination module passes through the observation window and illuminates the observation surface of the sample. The sample is placed close to the front baffle, and regardless of whether the observation surface of the sample has an inclined surface, the entire observation surface is guaranteed to be in a state perpendicular to the optical axis of the objective lens. The console controller coordinates the operation of the objective lens switching and focusing modules, automating both processes. This ensures a safe and reliable structure, with the sample's observation surface directly aligned with the horizontal objective lens, avoiding the risk of sample-objective collisions associated with traditional lifting stage focusing, and preventing lens contamination from moving parts. The support structure employs a multi-column reinforcement design, supporting the mounting plate on which the illumination module, imaging module, and other optical components are mounted, ensuring stable installation and smooth, interference-free movement of the optical path system. The horizontal optical path design reduces the impact of gravity on optical component deformation, improving imaging stability and consistency. Rapid electrical switching between bright and dark fields eliminates crosstalk and optical path obstruction, adapting to the observation needs of different samples, resulting in a stable and efficient optical path. From objective lens switching, sample positioning, light source adjustment, focusing and imaging to data analysis, results evaluation, and report generation, the entire process is automated, significantly reducing human error and improving observation efficiency. The camera adapter kit works with multiple lenses of different magnifications, offering strong flexibility and adaptability to quickly meet the process requirements of different fields such as electronic circuits, semiconductors, and biomedicine; the CCD camera automatically moves back and forth to compensate for focal plane shift, ensuring image clarity at different magnifications.The console boasts outstanding intelligent analysis capabilities, integrating image stitching, defect detection, and dimensional measurement functions with AI software. It supports the automatic generation of standardized reports containing original images, measurement data, and analysis conclusions, making it compatible with industrial online inspection and scientific research automation platforms.

[0135] Of course, the present invention may have other various embodiments. Without departing from the spirit and essence of the present invention, those skilled in the art can make various corresponding changes and modifications according to the present invention, but these corresponding changes and modifications should all fall within the protection scope of the appended claims.

Claims

1. An automated intelligent imaging microscopy system, characterized in that, include: The illumination module has its optical axis in the horizontal direction, and the light it emits illuminates the observation surface of the sample; An imaging module, whose optical axis is horizontal and along the Y-axis, receives light information from the observation surface of the sample and forms an image based on the light information; the imaging module includes an objective lens unit, which has multiple objective lenses of different magnifications arranged horizontally side by side along the X-axis; the optical axis of each objective lens is perpendicular to the observation surface of the sample. An objective lens switching module is used to drive the objective lens unit to move along the X-axis direction so that the optical axis of the corresponding objective lens coincides with the optical axis of the imaging module; The objective lens switching module includes a first movable carrier plate that moves along the X-axis direction. The objective lens unit is connected to the first movable carrier plate; An objective lens focusing module is used to adjust the distance between the corresponding objective lens and the observation surface of the sample in the Y-axis direction; the objective lens focusing module includes a second movable carrier plate that moves along the Y-axis direction; The illumination module, the imaging module, and the objective lens switching module are connected to the second movable carrier plate; The sample stage includes a stage on which a placement platform is provided. A front baffle is vertically arranged on the side of the placement platform near the objective lens unit, and the front baffle is perpendicular to the optical axis of the objective lens. An observation window is provided on the front baffle. A locking slot is also provided on the placement platform, and the sample is installed in the locking slot and close to the front baffle. Light emitted by the illumination module passes through the observation window and illuminates the observation surface of the sample. The control console includes a controller that is electrically connected to at least the objective lens switching module and the focusing module, and controls the movement of the first moving carrier and the second moving carrier.

2. The automated intelligent imaging microscopy system according to claim 1, characterized in that, The lighting module includes: A dimmable lighting unit includes a lighting source and a dimming controller, wherein the dimming controller is electrically connected to the lighting source; the dimming controller is electrically connected to the controller; the dimming controller adjusts the brightness of the light emitted by the lighting source according to the instructions of the controller; the light emitted by the lighting source illuminates a light-dark field switching unit; A bright-dark field switching unit includes a bright-dark field mechanism, a first Z-axis drive mechanism, and a first displacement sensor. The bright-dark field mechanism includes a bright field and a dark field, which are distributed along the Z-axis. The bright field includes a beam splitter, and the dark field includes a first reflector with a central cutout. The first displacement sensor senses first position information of the bright-dark field mechanism and sends it to the controller. The first Z-axis drive mechanism is electrically connected to the controller. The controller sends a control command to the first Z-axis drive mechanism based on the first position information. The first Z-axis drive mechanism drives the bright-dark field mechanism to move along the Z-axis according to the command, so that the light is emitted after passing through the beam splitter in the bright field or after passing through the first reflector in the dark field.

3. The automated intelligent imaging microscopy system according to claim 2, characterized in that, The lighting module also includes: An optical processing lens unit, whose optical axis coincides with the optical axis of the illumination source, processes the light emitted by the illumination source; The second reflector reflects the light processed by the optical processing lens unit onto the light homogenizer; A light diffuser receives the light reflected by the second reflector and evenly projects the light onto the aperture unit; An aperture unit is provided with multiple apertures, each aperture having a different aperture size. Each aperture is electrically connected to an aperture adjustment controller, which is electrically connected to a controller. The aperture adjustment controller controls the aperture of the corresponding aperture to move according to the controller's instructions until its optical axis coincides with the optical axis of the light diffuser. The light rays are emitted into the converging lens unit after passing through the aperture of the aperture. The converging lens unit has its optical axis coincident with the optical axis of the aperture unit, converging the light rays to the bright-dark field switching unit.

4. The automated intelligent imaging microscopy system according to claim 2, characterized in that, The objective lens unit is positioned close to the lofting platform, and the objective lenses of the objective lens unit are parfocal; the bright-dark field mechanism is located on the side of the objective lens unit away from the lofting platform. If the light emitted from the illumination module through the bright field passes through the center of the corresponding objective lens and directly illuminates the test surface of the sample, then the corresponding objective lens receives the light information from the test surface of the sample, and the light information enters the intermediate lens tube after passing through the beam splitter of the bright field. If the light emitted from the illumination module through the dark field passes through the outer annular channel of the corresponding objective lens and obliquely illuminates the test surface of the sample, then the corresponding objective lens receives the light information from the test surface of the sample, and the light information enters the intermediate lens tube after passing through the central cutout of the first reflector of the dark field. The imaging module further includes: The optical axis of the intermediate lens tube coincides with the optical axis of the corresponding objective lens. The CCD camera has its optical axis coincident with the optical axis of the intermediate lens barrel, and receives the light information emitted from the intermediate lens barrel to form an image.

5. The automated intelligent imaging microscopy system according to claim 4, characterized in that, The imaging module further includes: A camera adapter unit includes a camera adapter group, a first X-axis drive mechanism, and a second displacement sensor. The camera adapter group includes multiple camera adapters, each equipped with a lens of a different focal length. The camera adapters are arranged along the X-axis. The second displacement sensor senses second position information of the camera adapter group and sends it to the controller. The first X-axis drive mechanism is electrically connected to the controller. The controller sends a control command to the first X-axis drive mechanism based on the second position information. The first X-axis drive mechanism drives the camera adapter group to move along the X-axis to a corresponding position state according to the command. The corresponding position state includes the camera adapter group moving to a position where the corresponding camera adapter is in the optical path or the camera adapter group moving to a position where all camera adapters are out of the optical path. The camera driving unit includes a first Y-axis driving mechanism and a third displacement sensor. The first Y-axis driving mechanism drives the CCD camera to move along the Y-axis direction. The third displacement sensor senses the third position information of the CCD camera and sends it to the controller. The first Y-axis driving mechanism is electrically connected to the controller. The controller sends a control command to the first Y-axis driving mechanism based on the position status of the camera adapter group and the third position information of the CCD camera. The first Y-axis driving mechanism drives the CCD camera to move along the Y-axis direction to a predetermined distance from the intermediate lens barrel according to the command.

6. The automated intelligent imaging microscopy system according to claim 1, characterized in that, The objective lens unit also includes an objective lens carrier and an objective lens support; the objective lens support is provided with a plurality of support frames adapted to the objective lens along the X-axis direction, and each objective lens is mounted on the support frame; The objective lens support is disposed at one end of the objective lens carrier; the objective lens carrier is mounted on the first movable carrier.

7. The automated intelligent imaging microscopy system according to claim 1, characterized in that, The objective lens switching module further includes a second X-axis drive mechanism and a fourth displacement sensor. The fourth displacement sensor senses the fourth position information of the first moving carrier and sends it to the controller. The second X-axis drive mechanism is electrically connected to the controller. The controller sends a command to the second X-axis drive mechanism to control its operation according to the fourth position information. The second X-axis drive mechanism drives the first moving carrier to move in the X-axis direction according to the command.

8. The automated intelligent imaging microscopy system according to claim 7, characterized in that, The objective lens focusing module also includes a second Y-axis drive mechanism and a fifth displacement sensor. The fifth displacement sensor senses the fifth position information of the second moving carrier and sends it to the controller. The second Y-axis drive mechanism is electrically connected to the controller. The controller sends a command to the second Y-axis drive mechanism to control its operation according to the fifth position information. The second Y-axis drive mechanism drives the second moving carrier to move in the Y-axis direction according to the command. The illumination module is mounted on the mounting plate; all components of the imaging module except the objective lens unit are mounted on the mounting plate; the mounting plate is mounted on the second movable carrier plate via support columns; there is a space between the mounting plate and the second movable carrier plate; The second X-axis drive mechanism is mounted on the second movable carrier plate and located in the receiving space.

9. The automated intelligent imaging microscopy system according to claim 1, characterized in that, It also includes the frame base plate, on which the objective lens focusing module is mounted.

10. The automated intelligent imaging microscopy system according to claim 9, characterized in that, The sample stage further includes: The frame uprights are mounted on the main base plate of the frame. The lifting drive module includes a lifting plate, a second Z-axis drive mechanism, and a sixth displacement sensor. The second Z-axis drive mechanism is mounted on the frame upright plate; The sixth displacement sensor senses the sixth position information of the lifting plate and sends it to the controller; The second Z-axis drive mechanism is electrically connected to the controller; the controller sends a control command to the second Z-axis drive mechanism according to the sixth position information, and the second Z-axis drive mechanism drives the lifting plate to move along the Z-axis direction according to the command; A translation drive module includes a translational upright plate, a third X-axis drive mechanism, a nut fitted on the lead screw of the third X-axis drive mechanism, and a seventh displacement sensor. The translational upright plate is mounted on a lifting upright plate via a guide rail arranged along the X-axis direction. The third X-axis drive mechanism is disposed on the translational upright plate, and the nut is connected to the lifting upright plate. The seventh displacement sensor senses the seventh position information of the translational upright plate and sends it to the controller. The third X-axis drive mechanism is electrically connected to the controller. The controller sends a control command to the third X-axis drive mechanism based on the seventh position information, and the third X-axis drive mechanism drives the translational upright plate to move relative to the lifting upright plate along the X-axis direction according to the command. The platform is mounted on the translational upright plate.

11. The automated intelligent imaging microscopy system according to claim 10, characterized in that, The frame stand is positioned close to the objective lens unit, and the stage is positioned on the side away from the objective lens unit; observation areas are provided on the frame stand, the lifting stand, and the translation stand.

12. The automated intelligent imaging microscopy system according to claim 1, characterized in that, The slot restricts the movement of the sample in the X-axis direction; The stage also includes a sample loading unit, which is disposed on the placement platform. The sample loading unit includes a loading / unloading rod, a third Y-axis drive mechanism, and an eighth displacement sensor. The eighth displacement sensor senses the eighth position information of the loading / unloading rod and sends it to the controller. The third Y-axis drive mechanism is electrically connected to the controller. The controller sends a control command to the third Y-axis drive mechanism based on the eighth position information, and the third Y-axis drive mechanism drives the loading / unloading rod to move in the Y-axis direction according to the command. The loading / unloading rod connects to the sample via a suction cup, and the loading / unloading rod moves the sample along the Y-axis within the slot to be close to or away from the front baffle.

13. The automated intelligent imaging microscopy system according to claim 12, characterized in that, The third Y-axis drive mechanism includes: The guide rail is provided with two rails, which are arranged along the Y-axis direction; The slider is slidably mounted on the two guide rails; The driver includes a lead screw motor, a lead screw, and a lead screw nut. The lead screw is connected to the lead screw motor, and the lead screw motor drives the lead screw to rotate. The lead screw nut is fitted on the lead screw and connected to the slider. The rotation of the lead screw causes the lead screw nut to move linearly in the Y-axis direction. The lead screw motor is electrically connected to the controller.

14. The automated intelligent imaging microscopy system according to claim 1, characterized in that, The console also includes: A human-machine interface controller is electrically connected to the controller; the human-machine interface controller sends instructions to the controller, the controller receives the instructions from the human-machine interface controller, and controls the operation of each module electrically connected to it according to the instructions; A limit sensor is disposed on the side of the sample stage near the objective lens unit. The limit sensor is electrically connected to the controller. When the limit sensor detects that the objective lens unit has moved to the limit position along the Y-axis, the controller controls the objective lens focusing module to stop working. An artificial intelligence analyzer receives images generated by the imaging module, analyzes the images and generates an analysis report, and sends the analysis report to a display; or receives multiple images generated by the imaging module, identifies a target image from the multiple images, and sends the target image to a display. The monitor displays the analysis report or the target image.

Images