Black aluminum oxide ceramic and method for producing the same
By combining CoO, Cr2O3, and MoO3 ternary coloring with rare earth oxide sintering aids, and high-temperature humidified hydrogen and nitrogen sintering, the problems of insufficient blackness, poor thermal shock resistance, and low bonding strength of black alumina ceramics have been solved. This has resulted in a ceramic material with high light-shielding properties, high thermal shock resistance, and high strength, which is suitable for high-end semiconductor packaging.
Patent Information
- Application Number
- CN202610792462.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2026-06-03
- Publication Date
- 2026-07-17
AI Technical Summary
Existing black alumina ceramics have problems in high-end semiconductor packaging, such as insufficient black purity, poor thermal shock resistance, low metal-ceramic interface bonding strength, insufficient bending strength, and unstable performance due to the volatility of MoO3, making it difficult to meet the stringent requirements of high-temperature co-fired ceramics.
A ternary coloring system of CoO, Cr2O3, and MoO3 is adopted, combined with talc and rare earth oxides as sintering aids. The ceramic is prepared by high-temperature sintering at 1550℃~1650℃ in a humidified mixed atmosphere of hydrogen and nitrogen. This forms magnesium aluminum spinel and rare earth oxides to strengthen the grain boundaries, thereby improving the density and interfacial bonding strength of the ceramic.
It achieves high-purity black color, excellent light-shielding properties, thermal shock resistance, bending strength, and high metal-ceramic bonding strength in black alumina ceramics, meeting the long-term reliability requirements of high-end semiconductor packaging.
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Abstract
Citation Information
Patent Citations
Black aluminum oxide ceramic and preparation method thereof
CN117843350A