A white light interferometric thickness and distance sensor with real-time wavelength dynamic calibration
By employing a time-division multiplexing optical path architecture and a sub-pixel calibration method, the measurement accuracy problem of spectral domain white light interferometer sensors in complex environments was solved, achieving highly integrated and low-cost real-time wavelength dynamic calibration, and improving the long-term measurement stability and absolute accuracy of the sensor.
Patent Information
- Application Number
- CN202610840816.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2026-06-11
- Publication Date
- 2026-07-17
AI Technical Summary
Existing spectral domain white light interferometer sensors suffer from decreased measurement accuracy due to relative positional shifts in the internal gratings, lenses, and detector arrays of spectrometers under complex environments, making real-time high-precision measurements impossible. Furthermore, existing calibration methods cannot simultaneously meet the requirements of compact structure, low cost, and high precision.
By employing a time-division multiplexing optical path architecture and a lightweight real-time subpixel calibration method, the measurement optical path module and the calibration optical path module work alternately, and the same broadband spectrometer is used for time-division acquisition. Combined with the Lyot second-level depolarization structure and FP etalon for spectral calibration, dynamic compensation of the pixel-wavelength mapping coefficient is achieved.
This technology improves the long-term measurement stability and absolute accuracy of the sensor without increasing hardware costs, eliminates errors caused by environmental temperature drift and mechanical micro-variations, and enhances the anti-interference capability of the spectrometer.
Smart Images
Figure CN122408599A_ABST