Valve capable of being mechanically self-locked

Abstract

The utility model discloses a mechanical self-locking valve piece which comprises a valve plate, a valve plate sealing piece is sleeved on the outer side of the valve plate, a valve rod is connected with the lower end of the valve plate, the valve rod is connected with a top cover through a corrugated pipe, a driving seat is connected with the lower end of the valve rod, a driving seat connecting rod is connected with self-locking connecting rods on two sides, and the valve rod vertically penetrates through the top cover downwards. A first air cylinder and a second air cylinder are symmetrically arranged on the two sides of the lower end of the top cover, a driving seat is arranged at the lower end of a driving seat connecting rod, a bottom plate is arranged at the lower end of the driving seat, and the mechanical self-locking function of the transmission door is that due to the special matching relation of a connecting rod mechanism on a moving block and a sliding groove, the transmission door can be mechanically self-locked after a valve is closed in place. Therefore, even after the whole system is powered off or gas is cut off, the valve can still be kept in a closed state, and the vacuum performance of the cavity is not affected. And the low-particle and low-vibration functions are achieved, and no metal friction occurs in the flange connecting shell. The flange connecting shell is connected with the interior of the transmission door shell through a corrugated pipe, and the low-vibration function can be kept.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum valves, in particular to a valve element capable of mechanical self-locking. Background Art

[0002] The main function of the transmission gate is to transmit various products while maintaining the established vacuum requirements. It mainly works between various process chambers. At present, the most common occasions for transmission gates are wafer transmission in the semiconductor industry and transmission of organic panels such as liquid crystals. The common feature of these products is that they are easily damaged by contaminated particles, so the most important characteristic of the transmission gate is low particle property. The particles of metal valves are mainly generated by the friction between metal parts, which will produce various metal debris. Therefore, to improve the low particle property of the transmission gate, it is necessary to avoid metal friction as much as possible. At present, most domestic transmission gates have a straight up and down movement of the valve plate, which will cause metal friction between the valve plate and the shell. Therefore, most domestic semiconductor equipment companies currently use imported low-particle transmission gates, which not only increases the cost of the enterprise, but also faces the risk of supply interruption due to foreign technology blockades. Therefore, with the rise of domestic substitution, the current transmission gate market will have great prospects.

[0003] Currently, the transmission gates that are widely used in the traditional vacuum field mostly adopt the following design:

[0004] 1. The valve plate is directly driven up and down by a single-acting cylinder and sealed by a traditional valve core structure;

[0005] 2. While the single-acting cylinder is used to drive the valve plate to move up and down, the valve plate sealing ring is changed to a special-shaped structure for extrusion sealing;

[0006] However, the above design has the following problems:

[0007] 1. When the valve is switched on and off, the metal surface of the valve core is in direct contact with the metal surface of the valve body, which is easy to wear and produce dust and pollution particles;

[0008] 2. The material of the special-shaped sealing ring is rubber, which is prone to severe wear after multiple extrusions, thereby generating contamination particles;

[0009] 3. Both types of transmission doors mentioned above are not provided with a self-locking mechanism. When there is no gas source, they cannot remain closed, thereby affecting the vacuum degree in the cavity. Utility Model Content

[0010] In order to overcome the deficiencies of the prior art, the utility model solves the problems in the prior art that metal valves are easily worn to produce dust and pollution particles, special-shaped sealing rings are easily worn to produce pollution particles, and a self-locking mechanism is not provided, resulting in the inability to maintain a closed state.

[0011] A mechanically self-locking valve component includes a valve plate, a valve plate seal is sleeved on the outer side of the valve plate, a valve stem is connected to the lower end of the valve plate, the valve stem is connected to a top cover through a bellows, the lower end of the valve stem is connected to a drive seat, the drive seat connecting rod connects the self-locking connecting rods on both sides, the valve stem vertically passes through the top cover downward, a first cylinder and a second cylinder are symmetrically arranged on both sides of the lower end of the top cover, a drive seat is arranged at the lower end of the drive seat connecting rod, and a bottom plate is arranged at the lower end of the drive seat.

[0012] Furthermore, guide rails are arranged on both sides of the self-locking connecting rod.

[0013] Furthermore, the first cylinder and the second cylinder are composed of a piston rod, the upper end of the piston rod is connected to a cylinder piston, and the cylinder surface is provided with an axial cylinder seal and a radial cylinder seal.

[0014] Furthermore, the upper ends of the first cylinder and the second cylinder are in contact with the top cover, and the piston rod is fixedly connected to the driving seat.

[0015] Furthermore, the driving seat is connected to the moving seat through a driving seat connecting rod.

[0016] Furthermore, the moving seat is fixed with a moving seat roller and the driving seat is fixed with a driving seat roller, the moving seat roller moves in the cylinder groove a, and the driving seat roller moves in the cylinder groove c.

[0017] Furthermore, the self-locking connecting rod is fixed with self-locking connecting rod rollers a and b, the self-locking connecting rod roller a moves in the cylinder groove b, and the roller b moves in the guide rail groove.

[0018] Beneficial effects of the utility model:

[0019] 1. Mechanical self-locking function of the transmission door: Due to the special cooperation between the connecting rod mechanism and the slide slot on the motion block, the transmission door will be mechanically self-locked after the valve is closed. Therefore, even if the entire system is powered off or the air is cut off, the valve can still remain in the closed state without affecting the vacuum of the cavity;

[0020] 2. Low particle and low vibration function: The motion trajectory of the valve plate switch valve of the present application is similar to a "J" shape, and no metal friction occurs in the flange connection shell. The flange connection shell is connected to the inside of the transmission door shell through a bellows to ensure the vacuum degree. Therefore, the valve can maintain low particle properties. The motion block drives the valve stem valve to switch the valve movement by relying on the connecting rod and the bearing on it to move in the established slide groove, so the valve's switch valve movement is relatively smooth and can maintain low vibration function. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a structural schematic diagram of a valve component capable of mechanical self-locking;

[0022] Figure 2It is a schematic diagram of the gas path structure of a valve that can be mechanically self-locked;

[0023] Figure 3 It is a side sectional view of a valve member capable of mechanical self-locking when the valve is in an open state;

[0024] Figure 4 The invention discloses a side sectional view of a valve member capable of mechanical self-locking when the valve is in a closed state.

[0025] In the figure: 1-valve plate, 2-valve plate seal, 3-top cover, 4-first cylinder, 5-second cylinder, 6-bellows, 7-valve stem, 8-self-locking connecting rod, 9-bottom plate, 10-guide rail, 11-drive seat, 12-drive seat connecting rod, 13-side plate, 14-moving seat, 41-axial cylinder seal, 42-cylinder piston 43-radial cylinder seal, 44-piston rod, 141-moving seat roller, 111-driving seat roller, 404-cylinder groove a, 406-cylinder groove c, 81-self-locking connecting rod roller a, 405-cylinder groove b, 82-roller b, 101-guide rail groove, 91-valve closing inlet, 92-valve opening inlet. DETAILED DESCRIPTION

[0026] The following is an explanation of the implementation of the present invention by specific specific embodiments, and those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification. Although the description of the present invention will be introduced in conjunction with the preferred embodiment, this does not mean that the features of this utility model are limited to the implementation. On the contrary, the purpose of introducing the utility model in conjunction with the implementation is to cover other options or modifications that may be extended based on the claims of the present utility model. In order to provide a deep understanding of the present utility model, many specific details will be included in the following description. The present utility model can also be implemented without using these details. In addition, in order to avoid confusion or blurring the focus of the present utility model, some specific details will be omitted in the description. It should be noted that, in the absence of conflict, the embodiments in this application and the features in the embodiments can be combined with each other. It should be noted that in this specification, similar reference numerals and letters represent similar items in the following figures, so once an item is defined in one figure, it does not need to be further defined and explained in the subsequent figures.

[0027] Unless otherwise defined, the technical terms or scientific terms used in the present invention shall have the usual meanings understood by persons with ordinary skills in the field to which the present invention belongs. The words "first", "second" and similar words used in the present invention do not indicate any order, quantity or importance, but are only used to distinguish different components. Similarly, words such as "one" or "one" do not indicate quantity restrictions, but indicate the existence of at least one. Words such as "set", "connected", "connected" and the like should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be an indirect connection through an intermediate medium, or it can be a connection between the two components. For ordinary technicians in this field, the specific meanings of the above terms in this embodiment can be understood according to specific circumstances. The directions or positional relationships indicated by “upper”, “lower”, “left”, “right”, “inner”, “bottom”, etc. are based on the directions or positional relationships shown in the accompanying drawings, or are the directions or positional relationships in which the utility model product is usually placed when in use. They are only for the convenience of describing the utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation on the utility model.

[0028] In order to make the purpose, technical solution and advantages of the present invention more clear, the implementation mode of the present invention will be further described in detail below with reference to the accompanying drawings.

[0029] In this embodiment, as shown in the attached Figure 1-2 As shown, a mechanically self-locking valve component includes a valve plate 1, a valve plate seal 2 is sleeved on the outer side of the valve plate 1, a valve stem 7 is connected to the lower end of the valve plate 1, the valve stem 7 is connected to the top cover 3 through a bellows 6, a drive seat 14 is connected to the lower end of the valve stem 7, a drive seat connecting rod 12 is connected to the self-locking connecting rods 8 on both sides, the valve stem 7 vertically passes through the top cover 3 downward, a first cylinder 4 and a second cylinder 5 are symmetrically arranged on both sides of the lower end of the top cover 3, a drive seat 11 is arranged at the lower end of the drive seat connecting rod 12, and a bottom plate 9 is arranged at the lower end of the drive seat 11.

[0030] Furthermore, guide rails 10 are provided on both sides of the self-locking connecting rod 8 .

[0031] Furthermore, the first cylinder 4 and the second cylinder 5 are composed of a piston rod 44, the upper end of the piston rod 44 is connected to a cylinder piston 42, and the surface of the cylinder 42 is provided with an axial cylinder seal 41 and a radial cylinder seal 43.

[0032] Furthermore, the upper ends of the first cylinder 4 and the second cylinder 5 are in contact with the top cover 3 , and the piston rod 44 is fixedly connected to the driving seat 11 .

[0033] Furthermore, the driving seat 11 is connected to the moving seat 14 through the driving seat connecting rod 12 .

[0034] Furthermore, it also includes a moving seat roller 141 fixed on the moving seat 14 and a driving seat roller 111 fixed on the driving seat 11, the moving seat roller 141 moves in the cylinder groove a404, and the driving seat roller 111 moves in the cylinder groove c406.

[0035] Furthermore, the self-locking connecting rod 8 is fixed with self-locking connecting rod rollers a and b, the self-locking connecting rod roller a81 moves in the cylinder groove b(405, and the roller b82 moves in the guide rail groove 101.

[0036] The gas circuit structure of this application is as follows:

[0037] like Figure 2 As shown, the 911 gas circuit is used to connect the valve closing inlet and the 912 gas circuit. The 912 gas circuit is connected to the 101 gas circuit, and the 101 gas circuit is a built-in gas circuit of the guide rail 10, which is used to connect the 501 gas circuit. The 501 gas circuit is the forward push gas circuit of the cylinder 5, which pushes the piston 43 to move upward. The 921 gas circuit is used to connect the valve opening inlet and the 922 gas circuit. The 922 gas circuit is connected to the 102 gas circuit, and the 102 gas circuit is also a built-in gas circuit of the guide rail 10, which is used to connect the 502 gas circuit. The 502 gas circuit is the reverse push gas circuit of the cylinder 5, which pushes the piston 43 to move downward.

[0038] The specific workflow of this application is as follows:

[0039] like Figure 3~4 As shown, the valve closing process: first, the valve closing inlet 91 of the base 9 takes in air, and then reaches the air path 501 from the air paths 911, 912, and 101 in sequence, and starts to push the cylinder piston 42 to drive the cylinder piston rod 44 to move upward. At the same time, the driving seat 11 is also driven to move upward, and the moving seat 14 is driven to move upward through the driving seat connecting rod 12. When the moving seat roller 141 moves to the limit position of the cylinder groove a (404), the moving seat 14, the valve stem 7, and the valve plate 1 can no longer move upward in the longitudinal direction, but at this time the driving seat 11 is still driven by the first cylinder 4 and the second cylinder 5, and the driving seat connecting rod 12 rotates to push the moving seat 14 and then drives the valve plate 1 to be pressed horizontally, that is, the valve closing process of the transmission valve member is completed.

[0040] Valve opening process: First, the valve opening inlet 92 of the base 9 takes in air, and then the air path 502 is reached from the air paths 921, 922, and 102 in sequence, and the air cylinder piston 42 starts to drive the air cylinder piston rod 44 to move downward. At the same time, the drive seat 11 is also driven to move downward, and the drive seat connecting rod 12 is first driven to restore, and the valve plate 1 also returns to the horizontal original position at the same time. Then, the first cylinder 4 and the second cylinder 5 continue to drive the drive seat 11 to move downward. When the air cylinder piston 42 moves to the limit position, the transmission valve component completes the valve opening process.

[0041] When the transmission valve is in the process of closing the valve, the two rollers a, b81, and 82 of the self-locking connecting rod 8 initially move in the guide rail groove 101. As the valve closing process proceeds, the roller a81 moves into the cylinder groove b405, while the roller b82 remains in the guide rail groove 101. The self-locking connecting rod state at this time realizes the self-locking of the transmission valve of the present application.

[0042] Beneficial effects of the utility model:

[0043] 1. Mechanical self-locking function of the transmission door: Due to the special cooperation between the connecting rod mechanism and the slide slot on the motion block, the transmission door will be mechanically self-locked after the valve is closed. Therefore, even if the entire system is powered off or the air is cut off, the valve can still remain in the closed state without affecting the vacuum of the cavity;

[0044] 2. Low particle and low vibration function: The motion trajectory of the valve plate switch valve of the present application is similar to a "J" shape, and no metal friction occurs in the flange connection shell. The flange connection shell is connected to the inside of the transmission door shell through a bellows to ensure the vacuum degree. Therefore, the valve can maintain low particle properties. The motion block drives the valve stem valve to switch the valve movement by relying on the connecting rod and the bearing on it to move in the established slide groove, so the valve's switch valve movement is relatively smooth and can maintain low vibration function.

[0045] The above shows and describes the basic principle and main features of the utility model and the advantages of the utility model. Those skilled in the art should understand that the utility model is not limited by the above embodiments. The above embodiments and descriptions are only for explaining the principle of the utility model. Without departing from the spirit and scope of the utility model, the utility model may have various changes and improvements, which fall within the scope of the utility model to be protected. The scope of protection claimed by the utility model is defined by the attached claims and their equivalents.

Claims

1. A mechanically self-locking valve, characterized in that: The valve plate (1) comprises a valve plate seal (2) sleeved on the outer side of the valve plate (1), a valve stem (7) connected to the lower end of the valve plate (1), the valve stem (7) being connected to a top cover (3) via a bellows (6), a moving seat (14) connected to the lower end of the valve stem (7), a drive seat connecting rod (12) connecting self-locking connecting rods (8) on both sides, the valve stem (7) vertically passes through the top cover (3), a first cylinder (4) and a second cylinder (5) are symmetrically arranged on both sides of the lower end of the top cover (3), a drive seat (11) is arranged at the lower end of the drive seat connecting rod (12), and a bottom plate (9) is arranged at the lower end of the drive seat (11).

2. A mechanically self-locking valve according to claim 1, characterized in that: It also includes guide rails (10) arranged on both sides of the self-locking connecting rod (8).

3. A mechanically self-locking valve according to claim 1, characterized in that: The first cylinder (4) and the second cylinder (5) are composed of a piston rod (44), the upper end of the piston rod (44) is connected to a cylinder piston (42), and the surface of the cylinder piston (42) is provided with an axial cylinder seal (41) and a radial cylinder seal (43).

4. A mechanically self-locking valve according to claim 1, characterized in that: The upper ends of the first cylinder (4) and the second cylinder (5) are in contact with the top cover (3), and the piston rod (44) is fixedly connected to the drive seat (11).

5. A mechanically self-locking valve according to claim 1, characterized in that: It also includes a drive seat (11) connected to a moving seat (14) via a drive seat connecting rod (12).

6. A mechanically self-locking valve according to claim 1, characterized in that: The moving seat (14) is also provided with a moving seat roller (141) fixed thereon, and the driving seat (11) is provided with a driving seat roller (111) fixed thereon, wherein the moving seat roller (141) moves in a cylinder groove a (404), and the driving seat roller (111) moves in a cylinder groove c (406).

7. A mechanically self-locking valve according to claim 1, characterized in that: The self-locking connecting rod (8) is also provided with self-locking connecting rod rollers a and b, wherein the self-locking connecting rod roller a (81) moves in the cylinder groove b (405), and the roller b (82) moves in the guide rail groove (101).

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