Carrying table support

By designing the stage bracket, the free movement of the stage components is achieved by using the adjustment components and the movable mechanism, the existing ellipsoidal instruments are solved to solve the problem that it is difficult for the detection of different wafer products, and the detection effect is achieved with high precision and damage-free.

CN223021891UActive Publication Date: 2025-06-24SUZHOU GACII OPTOELECTRONICTECHNOLOGY CO LTD
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Patent Information

Application Number
CN202421197769.2
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-05-29
Publication Date
2025-06-24
Estimated Expiration
2034-05-29

AI Technical Summary

Technical Problem

Existing ellipsometers can only perform fixed-point inspection, which is difficult to adapt to wafer products of different sizes, shapes and thicknesses for film thickness detection. The adjustment process is cumbersome and easy to damage the wafer.

Method used

A stage bracket is designed, including a bracket body, a movable mechanism, an adjustment mechanism and a detection assembly. Through the cooperation of the first adjustment component and the second adjustment component, the first platform and the second platform move freely within the corresponding direction range, driving the stage assembly to move freely within the plane range, realizing position movement and detection of the wafer to be tested.

Benefits of technology

Accurate detection of wafers of different sizes and shapes, with high movement accuracy and no damage to wafer products.

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Abstract

The utility model relates to a platform deck support which comprises a support body. The movable mechanism comprises a first supporting body arranged on the support body and a first platform movably connected to the first supporting body in the first direction. The adjusting mechanism comprises a first adjusting assembly movably connected to the first platform and the support body and a second adjusting assembly movably connected to the first platform and the second platform. The detection assembly comprises a range finder arranged on one side of the carrying table assembly and a focusing assembly arranged above the carrying table assembly, and the focusing assembly is arranged on the support body in an up-down movable mode. Through the arrangement, the wafer detection device can detect the wafer to be detected, is suitable for wafers of different sizes and shapes, is high in moving precision, and does not damage wafer products in the moving process.
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