Portable multi-mode LIBS (Laser-induced Breakdown Spectroscopy) rapid detection device

Abstract

The utility model discloses a portable multi-mode LIBS (laser-induced breakdown spectroscopy) rapid detection device, and relates to the technical field of LIBS detection. The portable multi-mode LIBS rapid detection device comprises a power supply module, a motor driving module, a pulse laser light source, a pulse laser light source power supply case, a spectrograph, an upper computer module, a light path module and a displacement module which are arranged in a shell, the motor driving module is used for driving a motor of the three-axis displacement table; the pulse laser light source and the pulse laser light source power supply case are used for transmitting and controlling pulse laser; the spectrograph is used for collecting plasma information of the sample excited by the laser; the upper computer module is used for sending operation instructions to the motor driving module, the pulse laser light source and the spectrograph and receiving spectrum and image information; the light path module is used for turning and focusing a laser light path and acquiring an image of an industrial camera; the displacement module is used for bearing a sample and performing X-Y-Z three-axis displacement; according to the utility model, on-site rapid detection can be carried out on a sample, and the detection precision of equipment is ensured while the portability is ensured.

Description

Technical Field

[0001] The utility model relates to the technical field of LIBS detection, in particular to a portable multi-modal LIBS rapid detection device. Background Art

[0002] Laser-Induced Breakdown Spectroscopy (LIBS) is a technique that uses focused ultrashort laser pulses to generate a high-temperature plasma on the sample surface. When the plasma cools, it produces emission lines corresponding to different elements. Analysis of these lines allows for qualitative and quantitative analysis of substances. Currently, LIBS detection devices are primarily built in laboratories, requiring sample crushing, sieving, and tableting, which limits the technology's timeliness. Furthermore, the LIBS systems built in laboratories are bulky and require a high level of installation and operating environment, making it difficult to achieve on-site real-time detection, limiting the technology's portability. Furthermore, handheld portable instruments suffer from low laser energy, low detection sensitivity, and low accuracy, making it difficult to guarantee on-site real-time detection.

[0003] Prior art has not proposed a multi-module LIBS rapid detection device, making it difficult to extract more sample information within a limited space. Furthermore, prior art has not yet achieved integrated control of all LIBS detection equipment, significantly limiting operational convenience. Utility Model Content

[0004] The purpose of the utility model is to provide a portable multi-modal LIBS rapid detection device to solve the problems existing in the above-mentioned prior art.

[0005] To achieve the above purpose, the present invention provides the following solutions:

[0006] The utility model provides a portable multi-modal LIBS rapid detection device, comprising:

[0007] Power supply module, used to power the entire LIBS detection system;

[0008] Motor drive module, used to drive the motor of the three-axis translation stage;

[0009] Pulse laser light source and pulse laser light source power supply chassis, used for pulse laser emission and control;

[0010] Spectrometer, used to collect plasma information excited by the laser;

[0011] The host computer module is used to issue operating instructions to the motor drive module, pulse laser light source and spectrometer, and receive spectrum and image information;

[0012] Optical path module, used for turning and focusing the laser light path and image acquisition by industrial cameras;

[0013] The displacement module is used to carry the sample and perform XYZ displacement to adjust the sample focus and laser striking position.

[0014] Preferably, the power module, motor drive module, pulse laser light source, pulse laser light source power chassis, spectrometer, host computer module, optical path module and displacement module are all installed in a casing, and the casing size is less than 515×470×325mm.

[0015] Preferably, a support frame is provided in the casing, and the support frame includes a top plate, a support plate, a bottom plate and a partition plate. The support plate is vertically arranged and supported on the bottom of the top plate, the bottom plate is arranged at the bottom of the top plate and located on the left side of the support plate, the partition plate is arranged between the top plate and the bottom plate, the upper area is provided with a pulse laser light source, a spectrometer and an optical path module installed on the top of the top plate, the upper computer module is installed at the top front end of the top plate, and the laser power supply chassis is arranged on the partition plate and located in the interlayer between the top plate and the partition plate. The power module, motion control card, and motor driver are arranged on the top of the base plate and located in the interlayer between the partition and the base plate; the right side of the support plate is the sample detection chamber, and the displacement module is arranged in the sample detection chamber; the top of the sample detection chamber is provided with a 90° direct annular light source, and the surface of the light source is provided with a diffusion plate, which can make the lighting effect evenly distributed and improve the lighting effect; the sample detection chamber is provided with a dust suction device for removing dust splashed by the laser hitting the sample, thereby eliminating the impact of dust splashing on the LIBS signal.

[0016] Preferably, a 90° direct annular light source is provided on the top of the sample detection chamber, and a diffusion plate is provided on the surface of the light source, which can make the lighting effect evenly distributed and improve the lighting effect.

[0017] Preferably, a dust suction device is provided in the sample detection chamber for sucking away dust splashed by the laser hitting the sample, thereby eliminating the influence of the dust splashing on the LIBS signal.

[0018] Preferably, the power supply module adopts external power supply, connects to 220V mains power and steps down and rectifies it into 24V current to supply power to the entire system.

[0019] Preferably, the motor drive module is composed of a motion control card and a driver, and the motion control card is connected to the host computer module in the form of a network port.

[0020] Preferably, the pulse laser light source adopts a diode-pumped, fully air-cooled, electro-optical Q-switched solid-state laser.

[0021] Preferably, the spectrometer is a single-channel or multi-channel fiber optic spectrometer, which can realize synchronous measurement of multiple spectral segments, and the fiber optic spectrometer is connected to the plasma information collection device via an optical fiber.

[0022] Preferably, the host computer module adopts an all-in-one machine with Windows operating system, which can be connected to the pulse laser light source power supply chassis, spectrometer, motion control card, and industrial camera through the network port and USB port to achieve the functions of sending control instructions and receiving data.

[0023] Preferably, the optical path module comprises a half-wave plate, a polarization beam splitter, a translation cage plate, a dichroic mirror, an industrial camera and its lens, a filter, a single convex lens, a purge gas nozzle, a vertical cage coaxial system mounting plate and a plasma spectrum information collection device;

[0024] The axes of the half-wave plate, polarization beam splitter, and dichroic mirror are located on the same straight line along the X-axis and coincide with the incident laser. The polarization beam splitter is mounted on the translation cage plate, and the half-wave plate is mounted on the outside of the polarization beam splitter. The polarization beam splitter is 135° to the X-axis, and the dichroic mirror is 45° to the X-axis.

[0025] The axes of the industrial camera and its lens, filter, dichroic mirror, and single convex lens are located on the same straight line along the Z axis and are installed from top to bottom on the top of the vertical cage coaxial system mounting plate. The plasma spectrum information collection device is arranged on one side of the vertical cage coaxial system mounting plate and forms a 45° angle with the Z axis.

[0026] The translation cage plate is arranged on the outside of the mounting cage frame of the single convex lens.

[0027] The optical path module is composed of a cage structure, in which the optical elements are fixed by cage plates and connected by aluminum columns to ensure their coaxiality;

[0028] The half-wave plate and polarization beam splitter are combined to form a variable beam splitter to adjust the splitting ratio of the transmitted polarized light. The dichroic mirror is used to reflect light above 950nm and transmit light below 950nm. The filter is used to filter lasers to prevent damage to industrial cameras. The plasma spectrum information collection device consists of a double convex lens and an optical fiber connection device.

[0029] Preferably, the displacement module includes an X-axis stepper motor, a Y-axis stepper motor and a Z-axis stepper motor for controlling the XYZ three-axis displacement of the sample stage. The XYZ three-axis displacement is realized by the control of the host computer module to complete the optical path focusing and the movement of the laser striking sample path.

[0030] Compared with the prior art, the present invention has achieved the following beneficial technical effects:

[0031] The portable multimodal LIBS rapid detection device provided by the present invention includes a power supply module, a motor drive module, a pulsed laser light source, a pulsed laser light source power supply chassis, a spectrometer, a host computer module, an optical path module and a displacement module, which are integrated together to realize integrated control of all equipment and instruments of the LIBS detection equipment, improve the convenience of operation, and achieve the purpose of on-site real-time detection; the power supply module is used for powering the entire LIBS detection system; the motor drive module is used to drive the motor of the three-axis displacement stage; the pulsed laser light source and the pulsed laser light source power supply chassis are used for pulsed laser emission and control; the spectrometer is used to collect plasma information excited by the laser; the host computer module is used to issue operation instructions to the motor drive module, the pulsed laser light source and the spectrometer and receive spectrum and image information; the optical path module is used for turning and focusing the laser light path and acquiring images with an industrial camera; the displacement module is used to carry the sample and the XYZ three-axis displacement to achieve sample focus and adjustment of the laser impact position; while ensuring portability, the detection accuracy of the equipment is also guaranteed. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0033] Figure 1 This is a schematic diagram of the structure of the portable multi-modal LIBS rapid detection device in the present invention;

[0034] Figure 2 This is a schematic diagram of the forward structure of the optical path module and the displacement module in the present utility model;

[0035] Figure 3 This is a schematic diagram of the lateral structure of the optical path module and the displacement module in the utility model;

[0036] In the figure: 100, motion control card; 110, motor driver;

[0037] 200, power module;

[0038] 300. Pulse laser light source; 310. Pulse laser light source power supply chassis;

[0039] 400, spectrometer;

[0040] 500, host computer module;

[0041] 600, optical path module; 601, half-wave plate; 602, polarization beam splitter; 603, translation cage plate; 604, industrial camera and its lens; 605, filter; 606, dichroic mirror; 607, single convex lens; 608, purge nozzle; 609, vertical cage coaxial system mounting plate; 610, fiber optic connector; 611, double convex lens;

[0042] 700, displacement module; 701, sample stage; 702, X-axis stepper motor; 703, Y-axis stepper motor; 704, Z-axis stepper motor. DETAILED DESCRIPTION

[0043] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0044] The purpose of the utility model is to provide a portable multi-modal LIBS rapid detection device to solve the problems existing in the prior art.

[0045] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the present invention is further described in detail below with reference to the accompanying drawings and specific implementation methods.

[0046] The portable multimodal LIBS rapid detection device in this embodiment is as follows: Figure 1-Figure 3 Shown, including:

[0047] Power supply module 200, used for powering the entire LIBS detection system;

[0048] Motor drive module, used to drive the motor of the three-axis translation stage;

[0049] Pulse laser light source 300 and pulse laser light source power supply chassis 310, used for pulse laser emission and control;

[0050] Spectrometer 400, used to collect plasma information excited by the laser;

[0051] The host computer module 500 is used to issue operating instructions to the motor drive module, the pulsed laser light source 300 and the spectrometer 400 and receive spectrum and image information;

[0052] Optical path module 600, used for turning and focusing the laser light path and acquiring images with industrial cameras;

[0053] The displacement module 700 is used to carry the sample and perform XYZ three-axis displacement to achieve sample focus and laser striking position adjustment.

[0054] In this specific embodiment, the power module 200, the motor drive module, the pulsed laser light source 300 and the pulsed laser light source power supply chassis 310, the spectrometer 400, the host computer module 500, the optical path module 600 and the displacement module 700 are all installed in a casing, and the casing size is less than 515×470×325mm. Specifically, a support frame is provided in the casing, and the support frame includes a top plate, a support plate, a bottom plate and a partition. The support plate is vertically arranged and supported at the bottom of the top plate, the bottom plate is arranged at the bottom of the top plate and located on the left side of the support plate, and the partition is arranged between the top plate and the bottom plate. The upper area is provided with a pulsed laser light source 300, a spectrometer 400 and an optical path module 600 installed on the top of the top plate, and the upper computer module 500 is installed at the top front end of the top plate. The laser power supply chassis is arranged on the partition and located in the interlayer between the top plate and the partition. The power supply module 200, the motion control card 100, and the motor driver 110 are arranged on the top of the bottom plate and located in the interlayer between the partition and the bottom plate; the right side of the support plate is the sample detection chamber, and the displacement module 700 is arranged in the sample detection chamber.

[0055] In this specific embodiment, a 90° direct annular light source is provided on the top of the sample detection chamber, and a diffusion plate is provided on the surface of the light source, which can make the lighting effect evenly distributed and improve the lighting effect.

[0056] In this specific embodiment, a dust suction device is provided in the sample detection chamber to remove dust splashed by the laser hitting the sample, thereby eliminating the influence of the dust splashing on the LIBS signal.

[0057] In this embodiment, the power module 200 is externally powered, connected to a 220V mains supply and steps down and rectifies the mains supply to a 24V current to supply power to the entire system.

[0058] In this specific embodiment, the motion control card 100 and the motor driver 110 in the motor drive module are used to receive control signals from the host computer module 500 and drive the motor to execute; specifically, the motion control card 100 communicates with the host computer module 500 through a network port and transmits the host computer's instructions to the motor driver 110, thereby realizing multi-axis coordinated control of multiple stepper motors.

[0059] In this specific embodiment, the power module 200 is used to supply power to the entire system; specifically, it is connected to a 220V mains power supply and steps down and rectifies it into a 24V current to supply power to the entire system.

[0060] In this specific embodiment, the pulse laser light source 300 and the pulse laser light source power supply chassis 310 are used to emit a pulse laser beam; specifically, the pulse laser light source 300 uses a diode-pumped, fully air-cooled electro-optical Q-switched solid-state laser with an output wavelength of 1064nm, a fundamental frequency energy output of 80mJ@20Hz, and a pulse width of <10ns. The pulse laser light source power supply chassis 310 contains a start-stop key lock, an excitation button, and a touch-sensitive laser energy adjustment desktop.

[0061] In this specific embodiment, the spectrometer 400 is used to collect plasma information excited by the laser of the sample to be analyzed. Specifically, the spectrometer 400 can be used as a single-channel or multi-channel fiber optic spectrometer 400, which can realize synchronous measurement of multiple spectral bands. The fiber optic spectrometer 400 is connected to the plasma information collection device through an optical fiber. The plasma light excited by the laser of the sample is converged into a very small light spot through the double convex lens 611, enters the optical fiber through the optical fiber connection device 610 in the plasma collection device, and is collected by the spectrometer 400.

[0062] In this specific embodiment, the host computer module 500 is used to control the sending of instructions and the reception of data. Specifically, the host computer module 500 adopts a touch-type industrial control all-in-one computer with a Windows operating system, and can be connected to the pulse laser light source power supply chassis 310, the spectrometer 400, the motion control card 100, and the industrial camera through the network port and the USB port to achieve the purpose of controlling the sending of instructions and the reception of data.

[0063] In this specific embodiment, the optical path module 600 is used to turn the laser light path, obtain sample image information, and obtain sample plasma information. Specifically, the optical path module 600 includes a half-wave plate 601, a polarization beam splitter 602, a translation cage plate 603, a dichroic mirror 606, an industrial camera and its lens 604, a filter 605, a single convex lens 607, a purge nozzle 608, a vertical cage coaxial system mounting plate 609, and a plasma spectrum information collection device.

[0064] The axes of the half-wave plate 601, polarization beam splitter 602, and dichroic mirror 606 are aligned along the X-axis and coincide with the incident laser beam. The polarization beam splitter 602 is mounted on a translation cage plate 603, and the half-wave plate 601 is mounted outside the polarization beam splitter 602. The polarization beam splitter 602 is at a 135° angle to the X-axis, and the dichroic mirror 606 is at a 45° angle to the X-axis. Specifically, the half-wave plate 601, polarization beam splitter 602, and dichroic mirror 606 are all secured by separate cage structures. The cage structure with the optical components is assembled using aluminum columns to ensure coaxiality. The half-wave plate 601 is secured by the cage plate, the polarization beam splitter 602 is secured by a 45° mount, and the dichroic mirror 606 is secured by a cage cube.

[0065] The axes of the industrial camera and its lens 604, filter 605, dichroic mirror 606, and single-convex lens 607 are aligned along the Z axis and mounted from top to bottom on the top of a vertical cage coaxial system mounting plate 609. A plasma spectrum information collection device is located on one side of the vertical cage coaxial system mounting plate 609, forming a 45° angle with the Z axis. Specifically, with the exception of the industrial camera and its lens 604, the filter 605, dichroic mirror 606, and single-convex lens 607 are all clamped and secured by separate cage structures. The cage structure with the optical components is assembled using aluminum columns to ensure coaxiality. The industrial camera and its lens 604 are secured to the cage plate via a C-Mount adapter, while the filter 605 and single-convex lens 607 are secured via the cage plate, and the dichroic mirror 606 is secured via a cage cube.

[0066] The translation cage plate 603 is arranged outside the mounting cage frame of the single convex lens 607.

[0067] The optical module 600 is composed of a cage structure, in which optical components are fixed by cage plates and connected using aluminum columns to ensure their coaxiality.

[0068] The half-wave plate 601 and the polarization beam splitter 602 are combined to form a variable beam splitter to adjust the splitting ratio of the transmitted polarized light. The dichroic mirror 606 is used to reflect light above 950nm and transmit light below 950nm. The filter 605 is used to filter the laser to prevent damage to the industrial camera. The plasma spectrum information collection device consists of a double convex lens 611 and an optical fiber connection device 610.

[0069] The purge nozzle 608 supplies gas (such as compressed air or inert gas) through the gas connection port on its right side. This airflow is sprayed onto the sample surface, removing dust and impurities from the sample surface, ensuring effective contact between the laser and the sample, and improving measurement accuracy and reliability. It also prevents sample material or debris generated during the measurement process from splashing onto optical elements and other critical components, reducing the need for cleaning and maintenance and extending the life of the device.

[0070] In this specific embodiment, the displacement module 700 includes an X-axis stepper motor 702, a Y-axis stepper motor 703 and a Z-axis stepper motor 704 for controlling the X-YZ three-axis displacement of the sample stage 701. The XYZ three-axis displacement is achieved through the control of the upper computer module 500 to complete the optical path focusing and the movement of the laser striking sample path.

[0071] The portable multi-modal LIBS rapid detection device in this utility model works as follows:

[0072] After placing the sample to be tested on the sample stage 701, the power module 200 is used to power the entire machine. The host computer module 500 can receive image information acquired by the industrial camera and its lens 604, and control the Z-axis stepping motor 704 in the displacement module 700 through the motion control card 100 and the motor driver 110 to complete the sample focusing.

[0073] The pulse laser light source power supply chassis 310 is turned on. The pulse laser light source 300 emits a pulsed laser in the X-axis direction. The pulsed laser passes through the half-wave plate 601, the polarization beam splitter 602, and the dichroic mirror 606 in sequence. The dichroic mirror 606 realizes the turning of the light path, and the single convex lens 607 realizes the focusing of the light path, so that the pulsed laser hits the sample surface and stimulates plasma information. The stimulated plasma light is converged into a very small light spot by the double convex lens 611, enters the optical fiber through the optical fiber connection device 610 in the plasma collection device, and is collected by the spectrometer 400. The information is transmitted to the host computer module 500.

[0074] In particular, the upper computer module 500 can control the movement of the X-axis stepper motor 702 and the Y-axis stepper motor 703 in the displacement module 700 to achieve XY-axis translation of the sample, and the plasma information of different points of the same sample can be obtained by repeating the above steps.

[0075] This utility model uses specific examples to illustrate the principles and implementation methods of this utility model. The above examples are only used to help understand the method and core concept of this utility model. At the same time, for those skilled in the art, according to the concept of this utility model, there may be changes in the specific implementation methods and application scope. In summary, the content of this specification should not be understood as limiting the utility model.

Claims

1. A portable multimodal LIBS rapid detection device, characterized in that: include: Power supply module, used to power the entire LIBS detection system; Motor drive module, used to drive the motor of the three-axis translation stage; Pulse laser light source and pulse laser light source power supply chassis, used for pulse laser emission and control; Spectrometer, used to collect plasma information excited by the laser; The host computer module is used to issue operating instructions to the motor drive module, pulse laser light source and spectrometer, and receive spectrum and image information; Optical path module, used for turning and focusing the laser light path and image acquisition by industrial cameras; Displacement module, used to carry samples and perform XYZ displacement to achieve sample focus and laser impact position adjustment; The optical path module includes a half-wave plate, a polarization beam splitter, a translation cage plate, a dichroic mirror, an industrial camera and its lens, a filter, a single convex lens, a purification gas nozzle, a vertical cage coaxial system mounting plate and a plasma spectrum information collection device; The axes of the half-wave plate, polarization beam splitter, and dichroic mirror are located on the same straight line along the X-axis and coincide with the incident laser. The polarization beam splitter is mounted on the translation cage plate, and the half-wave plate is mounted on the outside of the polarization beam splitter. The polarization beam splitter is 135° to the X-axis, and the dichroic mirror is 45° to the X-axis. The axes of the industrial camera and its lens, filter, dichroic mirror, and single convex lens are located on the same straight line along the Z axis and are installed from top to bottom on the top of the vertical cage coaxial system mounting plate. The plasma spectrum information collection device is arranged on one side of the vertical cage coaxial system mounting plate and forms a 45° angle with the Z axis. The translation cage plate is arranged on the outside of the mounting cage frame of the single convex lens. The optical path module is composed of a cage structure, in which the optical elements are fixed by cage plates and connected by aluminum columns to ensure their coaxiality; The half-wave plate and polarization beam splitter are combined to form a variable beam splitter to adjust the splitting ratio of the transmitted polarized light. The dichroic mirror is used to reflect light with a wavelength above 950nm and transmit light with a wavelength below 950nm. The filter is used to filter lasers to prevent damage to industrial cameras. The plasma spectrum information collection device consists of a double convex lens and an optical fiber connection device.

2. The portable multimodal LIBS rapid detection device according to claim 1, characterized in that: The power module, motor drive module, pulse laser light source, pulse laser light source power chassis, spectrometer, host computer module, optical path module and displacement module are all installed in a casing, and the casing size is less than 515×470×325mm.

3. The portable multimodal LIBS rapid detection device according to claim 2, characterized in that: A support frame is provided in the casing, and the support frame includes a top plate, a support plate, a bottom plate and a partition plate. The support plate is vertically arranged and supported on the bottom of the top plate, the bottom plate is arranged at the bottom of the top plate and is located on the left side of the support plate, the partition plate is arranged between the top plate and the bottom plate, the pulse laser light source, the spectrometer and the optical path module are installed on the top of the top plate, the upper computer module is installed at the top front end of the top plate, the laser power supply chassis is arranged on the partition plate and is located in the interlayer between the top plate and the partition, and the power supply module The block, motion control card, and motor driver are arranged on the top of the base plate and are located in the interlayer between the partition and the base plate; the right side of the support plate is the sample detection chamber, and the displacement module is arranged in the sample detection chamber; the top of the sample detection chamber is provided with a 90° direct annular light source, and the surface of the light source is provided with a diffusion plate, which can make the lighting effect evenly distributed and improve the lighting effect; the sample detection chamber is provided with a dust suction device for removing dust splashed by the laser hitting the sample, thereby eliminating the impact of dust splashing on the LIBS signal.

4. The portable multimodal LIBS rapid detection device according to claim 1, characterized in that: The power supply module adopts external power supply, connects to 220V mains power and steps down and rectifies it into 24V current to supply power to the entire system.

5. The portable multimodal LIBS rapid detection device according to claim 1, characterized in that: The motor drive module is composed of a motion control card and a driver. The motion control card is connected to the host computer module in the form of a network port.

6. The portable multimodal LIBS rapid detection device according to claim 1, characterized in that: The pulse laser light source adopts a diode-pumped, fully air-cooled, electro-optical Q-switched solid laser.

7. The portable multimodal LIBS rapid detection device according to claim 1, characterized in that: The spectrometer is a single-channel or multi-channel fiber optic spectrometer, which can realize synchronous measurement of multiple spectral segments. The fiber optic spectrometer is connected to the plasma information collection device via an optical fiber.

8. The portable multimodal LIBS rapid detection device according to claim 7, characterized in that: The host computer module adopts an all-in-one machine with Windows operating system, which is connected to the pulse laser light source power supply chassis, spectrometer, motion control card, and industrial camera through the network port and USB port to achieve the functions of sending control instructions and receiving data.

9. The portable multimodal LIBS rapid detection device according to claim 1, characterized in that: The displacement module includes an X-axis stepper motor, a Y-axis stepper motor and a Z-axis stepper motor for controlling the XYZ displacement of the sample stage. The XYZ displacement is realized through the control of the host computer module to complete the optical path focusing and the movement of the laser striking sample path.

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