A clean room air purification system

Abstract

The utility model discloses a clean room air purification system, including sensing unit, execution unit, control unit, sensing unit and execution unit all are electrically connected with control unit, wherein, sensing unit includes temperature sensor, humidity transducer, pressure sensor, differential pressure sensor, temperature sensor and humidity transducer set up in the temperature and humidity monitoring point of clean room, pressure sensor sets up on the wall of each functional area in clean room, and differential pressure sensor sets up in the entrance and exit of clean room, execution unit includes fresh air unit, dry coil pipe electric valve, dry coil pipe, fan filter, and fresh air unit sets up at the fresh air entrance of clean room, and dry coil pipe electric valve sets up in the pipeline of dry coil pipe, and dry coil pipe sets up in the ceiling interlayer of clean room, and fan filter sets up in the clean room furred ceiling, the utility model has realized the control and adjustment to each environmental parameter in clean room, has guaranteed the production environment in clean room.

Description

Technical Field

[0001] This utility model relates to the field of air purification, specifically to a cleanroom air purification system. Background Technology

[0002] With the rapid development of high-end manufacturing industries such as semiconductors and chips, the requirements for air purification in cleanrooms are becoming increasingly stringent. Traditional cleanroom air purification systems suffer from limited control devices and sensing elements, making it impossible to control and monitor multi-dimensional parameters of the cleanroom environment and meet the demands of modern high-precision production. Utility Model Content

[0003] The purpose of this invention is to provide a cleanroom air purification system to achieve control and monitoring of multi-dimensional parameters of the cleanroom.

[0004] To solve the above-mentioned technical problems, this utility model provides a cleanroom air purification system, including a sensing unit, an execution unit, and a control unit, wherein the sensing unit and the execution unit are electrically connected to the control unit;

[0005] The sensing unit includes a temperature sensor, a humidity sensor, a pressure sensor, and a differential pressure sensor. The temperature and humidity sensors are installed at temperature and humidity monitoring points in the clean room, the pressure sensors are installed on the walls of each functional area in the clean room, and the differential pressure sensor is installed at the entrance and exit of the clean room.

[0006] The execution unit includes a fresh air handling unit, a dry coil electric valve, a dry coil, and a fan filter. The fresh air handling unit is installed at the fresh air inlet of the clean room, the dry coil electric valve is installed inside the dry coil piping, the dry coil is installed in the ceiling mezzanine of the clean room, and the fan filter is installed in the clean room ceiling.

[0007] According to the above scheme, the temperature and humidity monitoring points are arranged in a matrix on the horizontal plane inside the clean room.

[0008] According to the above scheme, the temperature and humidity monitoring points are arranged in a 5m*5m matrix.

[0009] According to the above scheme, the fresh air unit includes a filtration module and a heat recovery module; the filtration module filters impurities, and the heat recovery module exchanges latent heat between exhaust air and fresh air.

[0010] According to the above plan, the fan filter adopts a variable frequency fan.

[0011] According to the above scheme, the control unit includes a main control module and a backup control module; the backup control module is activated when the main control module fails.

[0012] According to the above scheme, a display screen is included, and the display screen is electrically connected to the control unit.

[0013] According to the above scheme, a backup execution unit is included, which is electrically connected to the control unit; the backup execution unit includes a backup fresh air handling unit, a backup dry coil electric valve, a backup dry coil, and a backup fan filter; the backup execution unit is activated when the execution unit fails.

[0014] According to the above scheme, it includes an alarm unit, which is electrically connected to an external fault analysis unit; the alarm unit will issue an alarm when it receives alarm information sent by the fault analysis unit.

[0015] Beneficial effects

[0016] This invention enables simultaneous monitoring of various environmental parameters within the cleanroom by deploying multiple environmental sensors at different locations; and controls the cleanroom's airflow, temperature, humidity, and pressure by deploying multiple actuators at different locations, thereby ensuring that the cleanroom meets the corresponding production conditions and improving production efficiency.

[0017] Furthermore, this invention achieves comprehensive monitoring of temperature and humidity in the cleanroom by distributing temperature and humidity sensors in a matrix within the cleanroom.

[0018] Furthermore, this invention improves the energy efficiency of the air purification system through the latent heat exchange function of the heat recovery module.

[0019] Furthermore, by setting a backup control module within the control unit, this invention can maintain the continued operation of the air purification system when the main control module fails and cannot function, thereby improving the stability of the air purification system.

[0020] Furthermore, this invention enables visual management of actuators and sensors within the cleanroom through the provided display screen, thereby improving the monitoring efficiency of the cleanroom.

[0021] Furthermore, by providing a backup execution unit, this invention can maintain the continued operation of the air purification system in the event of a failure during execution in the execution unit, thereby further improving the stability of the air purification system.

[0022] Furthermore, this utility model uses an alarm unit to issue alarms based on external fault information, prompting managers to promptly inspect and troubleshoot the air purification system, thereby further improving the stability of the air purification system. Attached Figure Description

[0023] Figure 1 This is a schematic diagram of the structure of a cleanroom air purification system according to an embodiment of the present invention;

[0024] Figure 2This is a schematic diagram of the sensor unit layout according to an embodiment of the present invention;

[0025] Figure 3 This is a schematic diagram showing the connection between the sensing unit and the control unit according to an embodiment of the present invention.

[0026] In the diagram: 1-Fresh air handling unit, 2-Dry coil, 3-Fan filter, 4-Temperature sensor, 5-Humidity sensor, 6-Pressure sensor, 7-Differential pressure sensor, 8-Control unit, 9-Electric valve. Detailed Implementation

[0027] To make the objectives, technical solutions, and advantages of the embodiments of this disclosure clearer, the technical solutions of the embodiments of this disclosure will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this disclosure. All other embodiments obtained by those skilled in the art based on the described embodiments of this disclosure without creative effort are within the scope of protection of this disclosure.

[0028] This embodiment discloses a cleanroom air purification system, including a sensing unit, an execution unit, and a control unit 8, wherein the sensing unit and the execution unit are electrically connected to the control unit 8;

[0029] The sensing unit includes a temperature sensor 4, a humidity sensor 5, a pressure sensor 6, and a differential pressure sensor 7. The temperature sensor 4 and humidity sensor 5 are installed at the temperature and humidity monitoring points in the clean room, the pressure sensor 6 is installed on the walls of each functional area in the clean room, and the differential pressure sensor 7 is installed at the entrance and exit of the clean room.

[0030] The execution unit includes a fresh air handling unit 1 (MAU), a dry coil 2 electric valve 9, a dry coil 2 (DCC), and a fan filter 3 (FFU). The fresh air handling unit 1 is installed at the fresh air inlet of the clean room, the dry coil 2 electric valve 9 is installed in the duct of the dry coil 2, the dry coil 2 is installed in the ceiling mezzanine of the clean room, and the fan filter 3 is installed in the ceiling of the clean room.

[0031] Among them, the fresh air unit 1 pre-treats the fresh air, the dry coil 2 regulates the temperature and humidity, and the fan filter unit achieves high-efficiency air filtration.

[0032] In this embodiment, the control unit 8 receives sensing data from the high-precision temperature sensor 4 and humidity sensor 5, and adjusts the electric valve 9 of the dry coil 2 using a PID control algorithm to achieve variable flow control of the dry coil 2. This allows the indoor temperature and humidity fluctuations to be controlled within ±0.5℃ and ±2%RH. It should be understood that the PID control algorithm is an existing algorithm; the control effect of this invention is mainly achieved through the special arrangement of the temperature sensor 4 and humidity sensor 5.

[0033] The placement of pressure sensor 6 and differential pressure sensor 7 enables pressure gradient monitoring in various areas of the cleanroom, ensuring that air flows in the preset direction.

[0034] The dry coil 2 is connected to the chilled water pipe via a quick-connect flange. The control unit 8 controls the electric valve 9 on the chilled water pipe to achieve variable flow control. Under the control of the control unit 8, the electric valve 9 achieves linear adjustment of the valve opening.

[0035] Each fan filter 3 is equipped with an independent frequency converter, which is controlled by the control unit 8;

[0036] All kinds of sensing elements in the sensing unit are transmitted to the control unit 8 through shielded cables.

[0037] Furthermore, the temperature and humidity monitoring points are arranged in a matrix on the horizontal plane inside the clean room.

[0038] Furthermore, the temperature and humidity monitoring points are arranged in a 5m*5m matrix to achieve accurate and comprehensive monitoring of temperature and humidity.

[0039] Furthermore, the fresh air unit 1 includes a filter module and a heat recovery module; the filter module filters impurities, and the heat recovery module exchanges latent heat between exhaust air and fresh air, thereby reducing system energy consumption; in this embodiment, the filter module adopts a modular design that is easy to disassemble and replace, and the rotor of the heat recovery module is driven by a motor, enabling continuous operation for 24 hours, and the surface of the rotor is coated with an anti-corrosion coating, which can extend the service life of the rotor.

[0040] Furthermore, the fan filter 3 adopts a variable frequency fan, which enables the fan filter 3 to achieve multi-level adjustment of airflow according to the control command of the control unit 8 (it can achieve stepless speed regulation within the speed range of 0~100%), thereby achieving differentiated airflow supply and meeting diverse cleanliness requirements.

[0041] Furthermore, the control unit 8 includes a main control module and a backup control module (in this embodiment, both the main control module and the backup control module are PLC controllers); the backup control module is activated when the main control module fails (in this embodiment, the switching can be completed within 50ms), thereby reducing downtime and improving system stability.

[0042] Furthermore, it includes a display screen, which is electrically connected to the control unit 8.

[0043] Furthermore, a backup execution unit is included, which is electrically connected to the control unit 8. The backup execution unit includes a backup fresh air unit 1, a backup dry coil 2, an electric valve 9, a backup dry coil 2, and a backup fan filter 3. The backup execution unit is activated when the execution unit fails. In other embodiments of this utility model, the backup execution unit can also be activated when the contamination level in the clean room exceeds the standard (or when the pressure sensor 6 detects a sudden drop in pressure in a certain area, or when the temperature sensor 4 and humidity sensor 5 detect that the ambient temperature and humidity exceed the set threshold). The backup execution unit is in a hot standby state and can be quickly put into operation when needed (activated within 2 seconds).

[0044] Furthermore, it includes an alarm unit, which is electrically connected to an external fault analysis unit; the alarm unit issues an alarm when it receives an alarm message sent by the fault analysis unit; in this embodiment, the fault analysis unit sends an alarm message when it detects that the pollution level in the clean room exceeds the standard or that the equipment of the air purification system malfunctions.

[0045] It should be noted that, depending on the implementation needs, the various steps / components described in this application can be broken down into more steps / components, or two or more steps / components or parts of the operation of steps / components can be combined into new steps / components to achieve the purpose of this utility model.

[0046] Those skilled in the art will readily understand that the above description is merely a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A cleanroom air purification system, characterized in that, It includes a sensing unit, an execution unit, and a control unit, with the sensing unit and the execution unit both electrically connected to the control unit; The sensing unit includes a temperature sensor, a humidity sensor, a pressure sensor, and a differential pressure sensor. The temperature and humidity sensors are installed at temperature and humidity monitoring points in the clean room, the pressure sensors are installed on the walls of each functional area in the clean room, and the differential pressure sensor is installed at the entrance and exit of the clean room. The execution unit includes a fresh air handling unit, a dry coil electric valve, a dry coil, and a fan filter. The fresh air handling unit is installed at the fresh air inlet of the clean room, the dry coil electric valve is installed inside the dry coil piping, the dry coil is installed in the ceiling mezzanine of the clean room, and the fan filter is installed in the clean room ceiling.

2. The cleanroom air purification system according to claim 1, characterized in that, Temperature and humidity monitoring points are arranged in a matrix on the horizontal plane inside the clean room.

3. The cleanroom air purification system according to claim 2, characterized in that, The temperature and humidity monitoring points are arranged in a 5m*5m matrix.

4. The cleanroom air purification system according to claim 1, characterized in that, The fresh air handling unit includes a filtration module and a heat recovery module; the filtration module filters impurities, and the heat recovery module exchanges latent heat between the exhaust air and the fresh air.

5. The cleanroom air purification system according to claim 1, characterized in that, The fan filter uses a variable frequency fan.

6. The cleanroom air purification system according to claim 1, characterized in that, The control unit includes a main control module and a backup control module; the backup control module is activated when the main control module fails.

7. The cleanroom air purification system according to claim 1, characterized in that, Includes a display screen, which is electrically connected to the control unit.

8. The cleanroom air purification system according to claim 1, characterized in that, It includes a backup execution unit, which is electrically connected to the control unit; the backup execution unit includes a backup fresh air handling unit, a backup dry coil electric valve, a backup dry coil, and a backup fan filter; the backup execution unit is activated when the execution unit fails.

9. The cleanroom air purification system according to claim 1, characterized in that, It includes an alarm unit, which is electrically connected to an external fault analysis unit; the alarm unit issues an alarm when it receives an alarm message sent by the fault analysis unit.

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