Processing equipment

Abstract

To provide a processing apparatus that can perform information sharing with high accuracy.SOLUTION: A processing apparatus 1 comprises: a holding table 10 that holds a workpiece 200; a processing unit 20 that executes processing on the workpiece 200 held on the holding table 10; a display unit 110 that displays various types of information; and a control unit 100. The control unit 100 includes a moving image input section 101 that receives input of moving images acquired by an imaging apparatus 70 picking up images, a moving image storage section 102 that stores the moving images input to the moving image input section 101, and a moving image playback section 103 that plays back the moving images stored in the moving image storage section 102. The moving image input section 101 causes the display unit 110 to display the moving images input from the imaging apparatus 70, and the moving image playback section 103 causes the display unit 110 to display moving images to be played back.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to a processing apparatus.

Background Art

[0002] A semiconductor wafer on which a plurality of devices such as IC (integrated circuit) and LSI (Large Scale Integration) are formed is ground on the back surface by a grinding apparatus to form a predetermined thickness, and then divided into individual device chips by a processing apparatus such as a dicing apparatus or a laser processing apparatus. Each of the divided device chips is used in electric devices such as mobile phones and personal computers.

[0003] In recent years, with the expansion of the functions of processing apparatuses used in such a series of semiconductor manufacturing processes, the operation methods, maintenance methods, and trouble - handling methods for various processes have become complicated.

[0004] Conventionally, under such circumstances, when a user such as an operator who uses these processing apparatuses does not know the maintenance method or the trouble - handling method, etc., they would either re - read several thick manuals to find the relevant part or ask a skilled person who is familiar with the processing apparatus. However, it may take an enormous amount of time to find the relevant part by reading the thick manual, and even if the relevant part is found, it is often difficult to understand intuitively. Also, when relying on a skilled person, the skilled person is not always available, and there is a problem that a lot of time is spent until the problem is solved.

[0005] In order to solve the above - mentioned problems, technologies have been devised, such as a technology that can store and display a maintenance method pre - created in a processing apparatus (for example, see Patent Document 1), and a technology that can leave a memo for other operators by making arbitrary writings or storing and playing back voices in the processing apparatus (for example, see Patent Document 2 and Patent Document 3).

Prior Art Documents

[0006] [Patent Document 1] Japanese Patent Publication No. 2010-49466 [Patent Document 2] Japanese Patent Publication No. 2014-231123 [Patent Document 3] Japanese Patent Publication No. 2020-183001 [Overview of the project] [Problems that the invention aims to solve]

[0007] However, when new functions were added to the processing equipment, maintenance methods and troubleshooting procedures were not stored in the system, requiring operators to receive training each time. Furthermore, it was sometimes difficult to convey the detailed operation of the equipment through written or voice-based information sharing.

[0008] The present invention has been made in view of the above facts, and its purpose is to provide a processing apparatus that enables highly accurate information sharing. [Means for solving the problem]

[0009] To solve the above-mentioned problems and achieve the objective, the present invention provides a processing apparatus for processing a workpiece, comprising: a holding table for holding the workpiece; a processing unit for processing the workpiece held on the holding table; a display unit for displaying various information; and a control unit for controlling each component, wherein the control unit includes a video input unit for inputting video captured and acquired by an imaging device; a video storage unit for storing the video input to the video input unit; and a video playback unit for playing back the video stored in the video storage unit, wherein the video input unit displays the video input from the imaging device on the display unit, the video playback unit displays the video to be played back on the display unit, and the video storage unit, upon receiving a press of the "Record" button image displayed on the display unit, begins storing the video input from the imaging device.。

[0010] In the processing apparatus, the control unit may include a video editing unit that enables editing of the video stored in the video storage unit. In the aforementioned processing apparatus, the video editing unit may, upon receiving, in order, a "partial deletion" button image for deleting a portion of the video displayed on the display unit, a "start point setting" button image for setting the start point of the portion of the video to be deleted, and a "end point setting" button image for setting the end point of the portion of the video to be deleted, delete the portion between the still image of the video that was displayed when the "start point setting" button image was pressed and the still image of the video that was displayed when the "end point setting" button image was pressed. In the aforementioned processing apparatus, when the video editing unit receives a press of a "text input" button image for inputting text into a video displayed on the display unit, it may insert the text entered from the input unit into a predetermined position in the video and store the video with the inserted text in the video storage unit. In the aforementioned processing apparatus, the control unit may start and stop imaging by the imaging device when the processing operation is started or finished. In the aforementioned processing apparatus, the control unit may start imaging with the imaging device triggered by the detection result of a sensor that detects the movement speed of a unit that moves the holding table and the processing unit relative to each other. In the aforementioned processing apparatus, the control unit may start imaging with the imaging device triggered by the detection result of the sensor that detects the fall of the workpiece. In the aforementioned processing apparatus, the control unit may start and stop imaging by triggering the display of an operation screen indicating an operation that may be prone to operational errors. In the aforementioned processing apparatus, the control unit may start and stop imaging by the opening and closing of the cover. In the aforementioned processing apparatus, the control unit may start and stop imaging by the imaging device when a specific screen operation of the display unit is performed. [Effects of the Invention]

[0011] This invention has the effect of enabling highly accurate information sharing. [Brief explanation of the drawing]

[0012] [Figure 1] Figure 1 is a perspective view showing an example of the configuration of a processing apparatus according to Embodiment 1. [Figure 2] Figure 2 shows an example of the display screen for the top menu displayed on the display unit of the processing device shown in Figure 1. [Figure 3] Figure 3 shows an example of the video selection screen displayed on the display unit when the "Video Data" button image in the top menu shown in Figure 2 is pressed. [Figure 4] Figure 4 shows the video and other content displayed on the display unit when the "Record" button image on the video selection screen shown in Figure 3 is pressed. [Figure 5] Figure 5 shows the video data selection screen that appears on the display unit when the "Play" and "Edit" button images on the video selection screen shown in Figure 3 are pressed. [Figure 6]FIG. 6 is a diagram showing a display screen displayed on a display unit when a "play" button image of a selected image of the video shown in FIG. 3 is pressed and a button image whose video name on the video data selection screen shown in FIG. 5 is "flange cleaning" is pressed. [Figure 7] FIG. 7 is a diagram showing a display screen displayed on a display unit when an "edit" button image of a selected image of the video shown in FIG. 3 is pressed and a button image whose video name on the video data selection screen shown in FIG. 5 is "flange cleaning" is pressed.

Embodiment for Implementing the Invention

[0013] An embodiment (embodiment) for implementing the present invention will be described in detail while referring to the drawings. The present invention is not limited by the content described in the following embodiments. Further, the constituent elements described below include those that can be easily assumed by those skilled in the art and those that are substantially the same. Furthermore, the configurations described below can be combined as appropriate. Also, various omissions, substitutions, or changes in the configuration can be made without departing from the gist of the present invention.

[0014] 〔Embodiment 1〕 A processing apparatus according to Embodiment 1 of the present invention will be described based on the drawings. FIG. 1 is a perspective view showing a configuration example of the processing apparatus according to Embodiment 1.

[0015] (Workpiece) The processing apparatus 1 shown in Figure 1 according to Embodiment 1 is a cutting apparatus for cutting a workpiece 200. The workpiece 200 to be processed by the processing apparatus 1 shown in Figure 1 is a wafer such as a disc-shaped semiconductor wafer or optical device wafer with a substrate 201 made of silicon, sapphire, gallium, etc. The workpiece 200 has multiple intersecting division lines 203 set on its surface 202, and a device 204 is formed in the region partitioned by the division lines 203. The device 204 is, for example, an integrated circuit such as an IC (Integrated Circuit) or LSI (Large Scale Integration), an image sensor such as a CCD (Charge Coupled Device) or CMOS (Complementary Metal Oxide Semiconductor), or a memory (semiconductor memory device).

[0016] In Embodiment 1, as shown in Figure 1, the workpiece 200 is supported within the opening of the annular frame 210 by an adhesive tape 209 attached to the back surface 206 of the front surface 202, which is disc-shaped with a diameter larger than the outer diameter of the workpiece 200 and has an annular frame 210 attached to its outer edge. The workpiece 200 is divided into individual devices 204 by cutting along the division line 203.

[0017] (Processing equipment) The processing apparatus 1 shown in Figure 1 is a cutting apparatus that holds the workpiece 200 on a holding table 10 and cuts (equivalent to processing) along the planned division line 203 with a cutting blade 21 to divide the workpiece 200 into individual devices 204.

[0018] As shown in Figure 1, the processing apparatus 1 comprises a holding table 10 that holds the workpiece 200 by suction on a holding surface 11, a cutting unit 20 which is a processing unit that cuts the workpiece 200 held on the holding table 10, an imaging unit 30 which photographs the workpiece 200 held on the holding table 10, and a control unit 100. As shown in Figure 1, the processing apparatus 1 is equipped with two cutting units 20, that is, a two-spindle dicer, a so-called facing dual type cutting apparatus.

[0019] Furthermore, the machining apparatus 1 includes a moving unit 40 that moves the holding table 10 and the cutting unit 20 relative to each other. The moving unit 40 includes at least a machining feed unit 41 that feeds the holding table 10 in the X-axis direction parallel to the horizontal direction, an indexing feed unit 42 that feeds the cutting unit 20 in the Y-axis direction parallel to the horizontal direction and perpendicular to the X-axis direction, a cutting feed unit 43 that feeds the cutting unit 20 in the Z-axis direction parallel to the vertical direction and perpendicular to both the X-axis and Y-axis directions, and a rotational moving unit 44 that rotates the holding table 10 around an axis parallel to the Z-axis direction. In other words, the moving unit 40 moves the holding table 10 and the cutting unit 20 relative to each other in the X-axis direction, Y-axis direction, Z-axis direction, and around the axis.

[0020] The machining feed unit 41 moves the holding table 10 and the rotational movement unit 44 in the X-axis direction, which is the machining feed direction, thereby moving the cutting unit 20 and the holding table 10 relatively along the X-axis direction. The indexing feed unit 42 moves the cutting unit 20 in the Y-axis direction, which is the indexing feed direction, thereby moving the cutting unit 20 and the holding table 10 relatively along the Y-axis direction. The depth of cut feed unit 43 moves the cutting unit 20 in the Z-axis direction, which is the depth of cut feed direction, thereby moving the cutting unit 20 and the holding table 10 relatively along the Z-axis direction.

[0021] The rotary movement unit 44 is supported by the machining feed unit 41 and supports the holding table 10, and is arranged to move freely in the X-axis direction together with the holding table 10. The rotary movement unit 44 rotates the holding table 10 around its axis, thereby rotating the cutting unit 20 and the holding table 10 relative to each other around their axes.

[0022] The machining feed unit 41, indexing feed unit 42, and cutting feed unit 43 are equipped with a well-known ball screw rotatably mounted around its axis, a well-known motor for rotating the ball screw around its axis, and a well-known guide rail for supporting the holding table 10 or cutting unit 20 so that it can move in the X-axis, Y-axis, or Z-axis direction. The rotary movement unit 44 is equipped with a motor for rotating the holding table 10 around its axis.

[0023] The holding table 10 is disc-shaped, and its holding surface 11 for holding the workpiece 200 is made of porous ceramic or the like. The holding table 10 is also provided by a machining feed unit 41 so as to be movable across the machining area below the cutting unit 20 and the loading / unloading area where the workpiece 200 is loaded and unloaded, separated from below the cutting unit 20, thereby allowing it to move in the X-axis direction. The holding table 10 is also provided by a rotational movement unit 44 so as to be rotatable around an axis parallel to the Z-axis direction.

[0024] The holding table 10 has a holding surface 11 connected to a suction source (not shown), and the holding surface 11 is sucked from the suction source, thereby sucking and holding the workpiece 200 placed on the holding surface 11. In Embodiment 1, the holding table 10 sucks and holds the back side 206 of the workpiece 200 via adhesive tape 209. In addition, as shown in Figure 1, multiple clamping parts 12 for clamping the annular frame 210 are provided around the holding table 10.

[0025] The cutting unit 20 is a machining unit in which a cutting blade 21 is mounted on a spindle 23 and cuts a workpiece 200 held on a holding table 10. Each cutting unit 20 is provided to move in the Y-axis direction by an indexing feed unit 42 and to move in the Z-axis direction by a depth-of-cut feed unit 43 relative to the workpiece 200 held on the holding table 10.

[0026] The cutting unit 20 is mounted on a gate-shaped support frame 3 that is erected from the main body 2 of the device, via an indexing feed unit 42 and a depth feed unit 43. The cutting unit 20 allows the cutting blade 21 to be positioned at any position on the holding surface 11 of the holding table 10 by the indexing feed unit 42 and the depth feed unit 43.

[0027] The cutting unit 20 includes a cutting blade 21, a spindle housing 22 that is movable in the Y-axis and Z-axis directions by indexing feed unit 42 and depth feed unit 43, a spindle 23 that is rotatably mounted on the spindle housing 22 and has the cutting blade 21 attached to its tip, and a spindle motor (not shown) that rotates the spindle 23 around its axis.

[0028] The cutting blade 21 is an extremely thin cutting wheel having a substantially ring shape. The cutting blade 21 is fixed to the tip of the spindle 23. In Embodiment 1, the cutting blade 21 is a so-called hub blade comprising an annular circular base and an annular cutting edge disposed on the outer edge of the circular base for cutting the workpiece 200. The cutting edge is made of abrasive grains such as diamond or CBN (Cubic Boron Nitride) and a bonding material (binder) such as metal or resin, and is formed to a predetermined thickness. In this invention, the cutting blade 21 may also be a so-called washer blade composed only of a cutting edge.

[0029] Furthermore, the axes of the cutting blade 21 and spindle 23 of the cutting unit 20 are set parallel to the Y-axis direction.

[0030] The imaging unit 30 is fixed to the cutting unit 20 so as to move integrally with the cutting unit 20. The imaging unit 30 is equipped with an image sensor that captures the area to be divided of the workpiece 200 held on the holding table 10 before cutting. The image sensor is, for example, a CCD (Charge-Coupled Device) image sensor or a CMOS (Complementary MOS) image sensor. The imaging unit 30 captures the workpiece 200 held on the holding table 10 to obtain an image for performing alignment, such as aligning the workpiece 200 with the cutting blade 21, and outputs the obtained image to the control unit 100.

[0031] Furthermore, the processing apparatus 1 includes an X-axis position detection unit (not shown) for detecting the position of the holding table 10 in the X-axis direction, a Y-axis position detection unit (not shown) for detecting the position of the cutting unit 20 in the Y-axis direction, and a Z-axis position detection unit for detecting the position of the cutting unit 20 in the Z-axis direction. The X-axis position detection unit and the Y-axis position detection unit can be configured with a linear scale parallel to the X-axis direction or the Y-axis direction and a reading head. The Z-axis position detection unit detects the position of the cutting unit 20 in the Z-axis direction using motor pulses. The X-axis position detection unit, the Y-axis position detection unit, and the Z-axis position detection unit output the position of the holding table 10 in the X-axis direction and the position of the lower end of the cutting edge of the cutting unit 20 in the Y-axis direction or the Z-axis direction to the control unit 100.

[0032] In Embodiment 1, the X-axis, Y-axis, and Z-axis positions of the holding table 10 and cutting unit 20 of the processing device 1 are determined based on a predetermined reference position (not shown). In Embodiment 1, the X-axis, Y-axis, and Z-axis positions are determined by the distances in the X-axis, Y-axis, and Z-axis directions from the reference position. In Embodiment 1, the XY coordinate (a coordinate shown by the distance in the X-axis direction from the reference position indicating the X-axis position and the distance in the Y-axis direction from the reference position indicating the Y-axis position) of the processing device 1 may indicate an arbitrary position of the workpiece 200 held on the holding surface 11 of the holding table 10.

[0033] Furthermore, the processing apparatus 1 includes a cassette elevator 60 on which a cassette 50 containing multiple workpieces 200 before and after cutting is placed, and which raises and lowers the cassette 50 in the Z-axis direction, and a transport unit (not shown) which loads workpieces 200 into and out of the cassette 50 and transports the workpieces 200 between the cassette 50 and the holding table 10.

[0034] The control unit 100 controls each component of the processing device 1 to cause the processing device 1 to perform processing operations on the workpiece 200. The control unit 100 is a computer having an arithmetic processing unit with a microprocessor such as a CPU (central processing unit), a storage device with memory such as ROM (read-only memory) or RAM (random access memory), and an input / output interface device. The arithmetic processing unit of the control unit 100 performs calculations according to the computer program stored in the storage device and outputs control signals for controlling the processing device 1 to each component of the processing device 1 via the input / output interface device.

[0035] Furthermore, the control unit 100 is connected to an imaging device 70, which is separate from the imaging unit 30. The imaging device 70 is installed at any position on the processing apparatus 1. The imaging device 70 is equipped with an image sensor that captures images of any position on the processing apparatus 1. The image sensor is, for example, a CCD (Charge-Coupled Device) image sensor or a CMOS (Complementary MOS) image sensor. The imaging device 70 captures a video of any position on the processing apparatus 1 and outputs the captured video to the control unit 100.

[0036] In particular, it is desirable that the imaging device 70 capture video of the inside of the processing device 1 from the outside, capturing trouble points, maintenance points, and points where functions have been added to the processing device 1. A video is an image consisting of, for example, 30 still images acquired continuously per second, and by displaying, for example, 30 still images in sequence, the moving state of any position of the processing device 1 can be displayed. The imaging device 70 is, for example, a well-known USB (Universal Serial Bus) camera or a stereo camera.

[0037] Furthermore, the processing apparatus 1 includes a display unit 110 connected to the control unit 100, which is composed of a liquid crystal display device that displays various information such as the status of processing operations and images, and an input unit 120 used by the operator when registering processing conditions, etc. The display unit 110 is controlled by the arithmetic processing unit of the control unit 100 and displays various information stored in the storage device of the control unit 100. The display unit 110 includes, for example, a display panel such as a liquid crystal display or an organic electro-luminescence display, and a touch panel superimposed on the display panel. The input unit 120 is composed of a touch panel provided on the display unit 110 and an external input device such as a keyboard.

[0038] The control unit 100 includes a video input unit 101, a video storage unit 102, a video playback unit 103, and a video editing unit 104. When the imaging device 70 is connected to the control unit 100, the video input unit 101 receives the video captured and acquired by the imaging device 70. The video input unit 101 displays the video input from the imaging device 70 on the display unit 110.

[0039] The video storage unit 102 stores the video input to the video input unit 101. The video playback unit 103 plays the video stored in the video storage unit 102. The video playback unit 103 displays the video to be played on the display unit 110. The video editing unit 104 makes the video stored in the video storage unit 102 editable.

[0040] The functions of the video input unit 101, the video playback unit 103, and the video editing unit 104 are realized by the arithmetic processing unit performing calculations according to the computer program stored in the memory device. The function of the video storage unit 102 is realized by the aforementioned memory device.

[0041] Next, the display screens shown on the display unit 110 will be explained based on the drawings. Figure 2 is a diagram showing an example of the display screen of the top menu shown on the display unit of the processing apparatus shown in Figure 1. Figure 3 is a diagram showing an example of the display screen of the video selection screen that is displayed on the display unit when the "Video Data" button image of the top menu shown in Figure 2 is pressed. Figure 4 is a diagram showing the videos etc. that are displayed on the display unit when the "Record" button image of the video selection screen shown in Figure 3 is pressed. Figure 5 is a diagram showing the video data selection screen that is displayed on the display unit when the "Play" button image of the video selection screen shown in Figure 3 is pressed and the button image of the video name "Flange Cleaning" on the video data selection screen shown in Figure 5 is pressed. Figure 6 is a diagram showing the display screen that is displayed on the display unit when the "Play" button image of the video selection image shown in Figure 3 is pressed and the button image of the video name "Flange Cleaning" on the video data selection screen shown in Figure 5 is pressed.

[0042] The display unit 110 is controlled by the control unit 100 to display the top menu 130 shown in Figure 2. The top menu 130 is displayed on the display unit 110 after the power of the processing device 1 is turned on and before processing operations are performed. In the main area 111 in the center of the top menu 130 shown in Figure 2, button images 131, 132, 133, 134, 135, 136, 137, and 138 for each mode, "Full Automation," "Manual Operation," "Device Data," "Blade Maintenance," "Operator Maintenance," "Machine Maintenance," "Engineering Maintenance," and "Video Data," are displayed for selection. In the software keyboard area 112 below, button images for item keys such as "Blade Setup" and "Device Data" are displayed for selection. Nothing is displayed in the input area 113.

[0043] When the control unit 100 receives a press of the "Video Data" button image 138 on the top menu 130 shown in Figure 2, the display unit 110 is controlled by the control unit 100 and displays the video selection screen 140 as shown in Figure 3. This video selection screen 140 is a screen where the user can select whether to store (i.e., record) a video input from the imaging device 70, play a video stored in the video storage unit 102, or edit a video stored in the video storage unit 102.

[0044] The video selection screen 140 displays, in the main area 111, selectable buttons for: "Record" (141) to select to store (i.e., record) the video input from the imaging device 70; "Play" (142) to select to play back the video stored in the video storage unit 102; and "Edit" (143) to select to edit the video stored in the video storage unit 102. The video selection screen 140 also displays a "Back" (144) in the input area 113 to return to the top menu 130.

[0045] When the video input unit 101 of the control unit 100 receives a press of the "Record" button image 141 on the video selection screen 140 shown in Figure 3, the display unit 110 is controlled by the video input unit 101 of the control unit 100, and the video 151 captured and acquired by the imaging device 70 is displayed in the main area 111, as shown in Figure 4. In addition, the display screen 150, which displays the video 151 input from the imaging device 70 shown in Figure 4 in the main area 111, displays a "Record" button image 152 for storing the video 151 in the video storage unit 102, a "Stop" button image 153 for stopping the recording of the video 151, and a "Video Name Input" button image 154 for associating a "Video Name" with the video stored in the video storage unit 102 and storing it in the video storage unit 102, in the input area 113. Furthermore, the display screen 150 shown in Figure 4 displays a "back" button image 155 in the input area 113 to return to the video selection screen 140.

[0046] As described above, when the video input unit 101 receives a press of the "Record" button image 141 on the video selection screen 140 shown in Figure 3, it displays the video 151 input from the imaging device 70 on the main area 111 of the display unit 110. Furthermore, when the control unit 100 receives a press of the "Back" button image 144 on the input area 113 of the video selection screen 140, the display unit 110 displays the top menu 130.

[0047] Furthermore, when the video storage unit 102 receives a press of the "Record" button image 152 in the input area 113 of the display screen 150, which displays the video 151 input from the imaging device 70 shown in Figure 4 in the main area 111 via the video input unit 101 of the control unit 100, the video storage unit 102 starts storing (i.e., recording) the video 151 input from the imaging device 70. When the video storage unit 102 receives a press of the "Stop" button image 153 from the video input unit 101 of the control unit 100, and stops storing (i.e., recording) the video 151 input from the imaging device 70, the video storage unit 102 receives a press of the "Enter video name" button image 154, and stores the video name input from the input unit 120 in association with the stored video 151.

[0048] Thus, the video storage unit 102 stores the video 151 input to the video input unit 101 and stores the video name input from the input unit 120 in association with the video 151. Furthermore, when the display unit 110 receives a press of the "back" button image 155 in the input area 113 of the display screen 150, which displays the video 151 input from the imaging device 70 shown in Figure 4 in the main area 111 of the video input unit 101, the display unit 110 displays the video selection screen 140.

[0049] Furthermore, the video 151 displayed in the main area 111 of the display screen 150 shown in Figure 4 includes the word "LIVE" 156, indicating that the video 151 input from the imaging device 70 is displayed in real time. In addition, the video 151 displayed in the main area 111 of the display screen 150 shown in Figure 4 is a video acquired by the imaging device 70 when it captures the work of replacing the holding table 10. For this reason, the video name associated with the video 151 displayed in the main area 111 of the display screen 150 shown in Figure 4 when it is stored in the video storage unit 102 is, for example, "Holding Table Replacement". In this invention, it is desirable that the video 151 stored in the video storage unit 102 of the processing device 1 be a video that prompts a warning not found in the manual of the processing device 1 due to aging deterioration, etc., a video explaining a new function, a video showing what happens when a problem occurs, or a video showing work such as inspection or assembly.

[0050] When the control unit 100 receives a press of the "Play" button image 142 on the video selection screen 140 shown in Figure 3, the display unit 110 is controlled by the control unit 100 and displays the video data selection screen 160 as shown in Figure 5. The video data selection screen 160 is a screen that displays button images 161 and 162 of the "video name" associated with the videos 151 and 171 (shown in Figures 4 and 6) stored in the video storage unit 102.

[0051] In the example shown in Figure 5, the video data selection screen 160 displays two selectable button images in the main area 111: a button image 161 with the video name "Holding Table Replacement" and a button image 162 with the video name "Flange Cleaning". The button image 161 with the video name "Holding Table Replacement" selects the video 151 with the video name "Holding Table Replacement", and is linked to the video 151 with the video name "Holding Table Replacement". The button image 162 with the video name "Flange Cleaning" selects the video 171 (shown in Figure 6) with the video name "Flange Cleaning", and is linked to the video 171 with the video name "Flange Cleaning".

[0052] Video 151, titled "Holding Table Replacement," is a video captured by the imaging device 70 showing the process of replacing the holding table 10. Video 171, titled "Flange Cleaning," is a video captured by the imaging device 70 showing the process of cleaning the end face 25 that supports the cutting blade 21 of the flange 24 (shown in Figure 6), which is attached to the tip of the spindle 23 of the cutting unit 20 and secures the cutting blade 21. The video data selection screen 160 displays a "Back" button image 163 in the input area 113 to return to the video selection screen 140.

[0053] When the video playback unit 103 of the control unit 100 receives a press of either button image 161 or 162 on the video data selection screen 160 shown in Figure 5, the video playback unit 103 plays the video 151 or 171 associated with the pressed button image 161 or 162 and displays it in the main area 111. For example, when the video playback unit 103 of the control unit 100 receives a press of button image 162 on the video data selection screen 160 shown in Figure 5, the video playback unit 103 of the control unit 100 controls the display unit 110, and as shown in Figure 6, the video 171 stored in the video storage unit 102 and named "Flange Cleaning" is displayed in the main area 111. Furthermore, the display screen 170, which displays the video 171 named "Flange Cleaning" stored in the video storage unit 102 shown in Figure 6 in the main area 111, displays a "Play" button image 172 for playing the video 171 and a "Stop" button image 173 for stopping the playback of the video 171 in the input area 113. In addition, the display screen 170 shown in Figure 6 displays a "Back" button image 174 in the input area 113 for returning to the video data selection screen 160.

[0054] As described above, when the video playback unit 103 receives a press of either button image 161 or 162 indicating the video name on the video data selection screen 160 shown in Figure 5, it displays the first still image of the video 151 or 171 stored in the video storage unit 102 associated with the pressed button image 161 or 162 in the main area 111 of the display unit 110. For example, when the video playback unit 103 receives a press of button image 162 for the video name "Flange Cleaning" on the video data selection screen 160 shown in Figure 5, it displays the first still image of the video 171 for "Flange Cleaning" stored in the video storage unit 102 associated with the pressed button image 162 in the main area 111 of the display unit 110. In addition, when the control unit 100 receives a press of the "Back" button image 163 in the input area 113 of the video data selection screen 160 shown in Figure 5, the display unit 110 displays the video selection screen 140.

[0055] Furthermore, when the video playback unit 103 receives a press of the "Play" button image 172 in the input area 113 of the display screen 170, which displays the first still image of the video 151, 171 stored in the video storage unit 102 associated with either of the pressed button images 161, 162 in the main area 111, it starts playing the video 151, 171 and displays the video 151, 171 in the main area 111. When the video playback unit 103 receives a press of the "Stop" button image 173 in the input area 113 of the display screen 170, it stops playing the video 151, 171 and displays the still image of the video 151, 171 at the time the "Stop" button image 173 was pressed in the main area 111.

[0056] For example, when the video playback unit 103 receives a press of the button image 162 for "Flange Cleaning" on the video data selection screen 160, it displays the first still image of the "Flange Cleaning" video 171 stored in the video storage unit 102 in the main area 111. When the video playback unit 103 receives a press of the button image 172 for "Play" in the input area 113 of the display screen 170, it starts playing the video 171 named "Flange Cleaning" and displays the video 171 in the main area 111. When the video playback unit 103 receives a press of the button image 173 for "Stop" in the input area 113 of the display screen 170, it stops playing the video 171 named "Flange Cleaning" and displays the still image in the main area 111 of the video 171 named "Flange Cleaning" at the time the "Stop" button image 173 was pressed.

[0057] When the control unit 100 receives a press of the "Edit" button image 143 on the video selection screen 140 shown in Figure 3, the display unit 110 is controlled by the control unit 100 and displays the video data selection screen 160 as shown in Figure 5. When the video editing unit 104 of the control unit 100 receives a press of either button image 161 or 162 on the video data selection screen 160 shown in Figure 5, the video editing unit 104 controls the display unit 110 to display the videos 151 or 171 associated with the pressed button image 161 or 162 in the main area 111.

[0058] For example, when the video editing unit 104 of the control unit 100 receives a press of the button image 162 for the video name "Flange Cleaning" on the video data selection screen 160 shown in Figure 5, the video editing unit 104 of the control unit 100 controls the display unit 110, and as shown in Figure 7, the video 171 stored in the video storage unit 102 and named "Flange Cleaning" is displayed in the main area 111. In addition, the display screen 180, which displays the video 171 stored in the video storage unit 102 and named "Flange Cleaning" in the main area 111 as shown in Figure 7, displays a "Play" button image 181 for playing the video 171, a "Stop" button image 182 for stopping the playback of the video 171, and a "Reverse Playback" button image 183 for playing the video 171 in reverse in the input area 113. Reverse playback means playing the video 171 toward the first still image of the video 171.

[0059] Furthermore, the display screen 180 shown in Figure 7 displays a "partial deletion" button image 184 for deleting a portion of the video 171, a "start point setting" button image 185 for setting the start point of the portion of the video 171 to be deleted, a "end point setting" button image 186 for setting the end point of the portion of the video 171 to be deleted, a "text input" button image 187 for entering text or other information into the video 171, and a "back" button image 188 for returning to the video data selection screen 160 in the input area 113.

[0060] Thus, when the video editing unit 104 receives a press of either button image 161 or 162 indicating the video name on the video data selection screen 160 shown in Figure 5, it displays the first still image of the video 151 or 171 stored in the video storage unit 102 associated with the pressed button image 161 or 162 in the main area 111 of the display unit 110. For example, when the video playback unit 103 receives a press of button image 162 for the video name "Flange Cleaning" on the video data selection screen 160 shown in Figure 5, it displays the first still image of the "Flange Cleaning" video 171 stored in the video storage unit 102 associated with the pressed button image 162 in the main area 111 of the display unit 110.

[0061] Furthermore, when the video editing unit 104 receives a press of the "Play" button image 181 in the input area 113 of the display screen 180, which displays the first still image of the videos 151 and 171 stored in the video storage unit 102 associated with either of the pressed button images 161 or 162 in the main area 111, it starts playing the videos 151 and 171 and displays them in the main area 111. When the video editing unit 104 receives a press of the "Stop" button image 182 in the input area 113 of the display screen 180, it stops playing the videos 151 and 171 and displays the still image of the video 151 and 171 at the time the "Stop" button image 182 was pressed in the main area 111. When the video editing unit 104 receives a press of the "reverse playback" button image 183 in the input area 113 of the display screen 180, it plays videos 151 and 171 in reverse and displays the reversed videos 151 and 171 in the main area 111.

[0062] For example, when the video editing unit 104 receives a press of the button image 162 for "Flange Cleaning" on the video data selection screen 160, it displays the first still image of the "Flange Cleaning" video 171 stored in the video storage unit 102 in the main area 111. When the video editing unit 104 receives a press of the button image 181 for "Play" in the input area 113 of the display screen 180, it starts playing the video 171 named "Flange Cleaning" and displays the video 171 in the main area 111. When the video editing unit 104 receives a press of the button image 182 for "Stop" in the input area 113 of the display screen 180, it stops playing the video 171 named "Flange Cleaning" and displays the still image in the main area 111 at the time the "Stop" button image 182 for the video 171 named "Flange Cleaning" was pressed. When the video editing unit 104 receives a press of the "Reverse Playback" button image 183 in the input area 113 of the display screen 180, it plays video 171, whose video title is "Flange Cleaning," in reverse, and displays the reversed video 171, also titled "Flange Cleaning," in the main area 111.

[0063] Furthermore, when the video editing unit 104 displays videos 151, 171 or still images of videos 151, 171 in the main area 111, and receives the press of the "partial deletion" button image 184, the press of the "start point setting" button image 185, and the press of the "end point setting" button image 186 in sequence, it deletes the still images of videos 151, 171 that were displayed in the main area 111 when the "start point setting" button image 185 was pressed, and the still images of videos 151, 171 that were displayed in the main area 111 when the "end point setting" button image 186 was pressed. When the video editing unit 104 receives a press of the "Text Input" button image 187 while displaying videos 151, 171 or still images of videos 151, 171 in the main area 111, it inserts the text entered from the input unit 120 into predetermined positions in videos 151, 171, and saves the videos 151, 171 with the inserted text into the video storage unit 102.

[0064] In Embodiment 1, the video editing unit 104 performs "partial deletion," which involves deleting a portion of the videos 151 and 171, and "text input," which involves inserting text at predetermined positions in the videos 151 and 171. However, the present invention is not limited to these, and any operation that edits the videos 151 and 171, such as inserting other videos or still images, may be performed. Furthermore, in the present invention, the video editing unit 104 may also allow an operator to insert desired handwritten characters or figures into the videos 151 and 171 by manipulating the main area 111 while the videos 151 and 171 are displayed in the main area 111.

[0065] In this way, the video editing unit 104 makes the videos 151 and 171 stored in the video storage unit 102 editable. Furthermore, when the video editing unit 104 of the control unit 100 receives a press of the "back" button image 188 in the input area 113 of the display screen 180 shown in Figure 7, the display unit 110 displays the video data selection screen 160. Thus, the display unit 110 of the processing apparatus 1 can display the videos 151 and 171 captured by the imaging device 70 in live format, and the control unit 100 can record and play back the videos 151 and 171 captured by the imaging device 70.

[0066] In the processing apparatus 1 with the configuration described above, processing conditions are set in the control unit 100, the cassette 50 containing the workpiece 200 is installed in the cassette elevator 60, and when the control unit 100 receives an instruction to start the processing operation, the processing operation begins.

[0067] When the processing operation starts, the processing device 1, with the control unit 100 controlling the transport unit, takes one workpiece 200 from the cassette 50 and places it on the holding surface 11 of the holding table 10 in the loading / unloading area via adhesive tape 209. During the processing operation, the processing device 1 holds the workpiece 200 to the holding surface 11 by suction via the adhesive tape 209 and clamps the annular frame 210 with the clamping section 12.

[0068] In the processing apparatus 1, the control unit 100 rotates the spindle 23 around its axis, the control unit 100 controls the movement unit 40 to move the holding table 10 to below the imaging unit 30, and the imaging unit 30 images the workpiece 200 held by suction on the holding table 10 to perform alignment. During the processing operation, the processing apparatus 1 controls the movement unit 40 and the like based on the processing conditions, moving the cutting blade 21 and the workpiece 200 relatively along the planned division line 203, and cutting the workpiece 200 by cutting the cutting blade 21 into the planned division line 203 until it reaches the adhesive tape 209.

[0069] The processing device 1 cuts along the division lines 203 of the workpiece 200 according to the processing conditions, dividing the workpiece 200 into individual devices 204. Once the processing device 1 has cut all of the division lines 203 of the workpiece 200, it moves the holding table 10 from the processing area towards the loading / unloading area.

[0070] The processing device 1 stops the movement of the holding table 10 in the loading / unloading area, stops the suction holding of the workpiece 200 on the holding table 10, and releases the clamp of the clamping unit 12. The processing device 1 has a control unit 100 that controls the transport unit to load the workpiece 200 after cutting from the holding table 10 into the cassette 50. The processing device 1 terminates the processing operation when all the workpieces 200 in the cassette 50 have been cut.

[0071] The processing apparatus 1 according to Embodiment 1 described above includes a control unit 100 which includes a video input unit 101 that displays the videos 151 and 171 captured by the imaging device 70 on a display unit 110, a video storage unit 102 that stores the videos 151 and 171 input to the video input unit 101, and a video playback unit 103 that plays back the videos 151 and 171 stored in the video storage unit 102 and displays them on the display unit 110.

[0072] For this reason, when the processing device 1 adds a new function, it can store videos 151 and 171 captured by the imaging device 70 in the video storage unit 102 while viewing them on the display unit 110, thereby enabling the storage of appropriate videos of maintenance methods and troubleshooting procedures in the video storage unit 102. Furthermore, by reviewing the videos stored in the video storage unit 102, the operator of the processing device 1 can easily grasp the detailed operation of the processing device 1, including maintenance methods and troubleshooting procedures, which would be difficult to share through text or voice alone.

[0073] Therefore, the processing device 1 has the effect of enabling highly accurate information sharing.

[0074] In particular, since the processing device 1 can share its operation via video when requesting additional functions or when troubleshooting, the user's requests and problems can be easily communicated to others, which can help in making better suggestions and solving problems. Furthermore, by recording videos of inspections and operations during the assembly of the processing device 1, it can be useful in investigating the cause of problems when they occur. In addition, the processing device 1 can capture images of the operation of functions under development, which makes it easier for others who are unfamiliar with the function to visualize it by watching the video when troubleshooting or adding new functions.

[0075] Furthermore, the processing apparatus 1 offers a high degree of flexibility because the imaging device 70 captures video at any desired position. Also, if the imaging device 70 is a stereo camera, the processing apparatus 1 can obtain clearer video with a wider field of view than a monocular camera.

[0076] It should be noted that the present invention is not limited to the above embodiments. That is, it can be implemented with various modifications without departing from the core of the present invention. In Embodiment 1, the processing apparatus 1 is a cutting apparatus, but in the present invention, it is not limited to a cutting apparatus, and may be various processing apparatuses such as a grinding apparatus equipped with a grinding unit which is a processing unit for grinding the workpiece 200, a grinding apparatus equipped with a polishing unit which is a processing unit for polishing the workpiece 200, or a laser processing apparatus equipped with a laser irradiation unit which is a processing unit for laser processing the workpiece 200. Furthermore, in the present invention, the workpiece 200 is not limited to a wafer, but may be a plate-shaped object such as various package substrates, ceramic substrates, or glass substrates.

[0077] Furthermore, while the above embodiment describes an example in which the "video data" button image 138 is displayed in the main area 111 of the top menu 130, the present invention is not limited to this. For example, even when the "full automation" button image 131 or the "manual operation" button image 132 is selected, the "video data" button image 138 may be displayed in an area different from the main area 111 (for example, the input area 113 or the software keyboard area 112) so that it can be selected.

[0078] Furthermore, in this invention, the control unit 100 may verify the operator's ID (identification) and set the target audience for displaying and editing privileges for the videos 151 and 171 for each ID, i.e., each operator. In addition, the videos 151 and 171 that are played back and edited may include various information such as text, audio, still images, graphics, and the date and time of capture.

[0079] Furthermore, the processing device 1 may capture the operator's ID (identification) with an imaging device and analyze the ID using image recognition, or it may capture the operator with an imaging device and perform facial recognition to change the screen displayed according to the operator, for example, to show a screen for experienced operators and a screen for beginners.

[0080] Furthermore, the processing device 1 may be equipped with a barcode reader or the like to read the ID of the cassette 50 and set the corresponding recipe data. For this reason, in the present invention, the processing device 1 may be able to read the ID of the cassette 50 at a timing specified by the attached imaging device and automatically set the corresponding recipe data. There are multiple types of barcodes, such as one-dimensional barcodes and QR codes (registered trademark), but the same imaging device can handle them even if the operation changes. In addition, the processing device 1 can also handle reading the ID of the annular frame 210 with the attached imaging device by adding the same imaging device, eliminating the need to prepare barcodes for each operation.

[0081] Furthermore, in this invention, if the video 151 and 171 captured by the imaging device 70 are constantly stored, the file size of the video 151 and 171 will increase. Therefore, recording may be started and stopped by triggering some movement within the imaging field of view of the imaging device 70, or some operation in the processing device 1 (for example, a transition to a pre-specified screen, or a screen operation by an operator).

[0082] For example, as a first option, the processing apparatus 1 may install an imaging device 70 connected to the control unit 100 on a transport unit or the like to record data, and start and stop imaging with the imaging device 70 triggered by the start and end of the processing operation. In this case, the processing apparatus 1 can analyze the video when a problem occurs and take countermeasures.

[0083] For example, as a second option, the processing device 1 may start and stop imaging with the imaging device 70 based on the detection results of sensors that detect the movement speed of each unit 41, 42, 43, and 44, and sensors that detect the fall of the workpiece 200. In this case, the processing device 1 can automatically stop the processing operation when an alarm is generated if the operation delay exceeds a certain period of time.

[0084] Furthermore, as a third option, the processing device 1 may, in operations where operational errors such as kerf check errors or blade replacements are likely, specify a screen and use the display of the corresponding screen as a trigger to start and stop imaging by the imaging device 70. In this case, the processing device 1 can determine the difference between the images before and after imaging and generate an alarm. Specifically, this can avoid problems such as forgetting to install the cutting blade 21 or leaving replacement jigs inside the processing device 1, which could damage the workpiece 200 or the processing device 1.

[0085] Alternatively, as a fourth option, the processing device 1 may start and stop imaging with the imaging device 70 triggered by opening and closing the cover that covers the main body 2 of the device. In this case, the processing device 1 can determine the difference between the images before and after imaging and generate an alarm. Specifically, the processing device 1 has an operation where it opens the device cover to remove the workpiece 200 and resume mass production in cases such as the workpiece 200 falling or a vacuum abnormality in the transport unit. However, there is a problem in that the workpiece 200 is sometimes left inside the processing device when production resumes, resulting in damage to the workpiece 200. By determining the difference between the images before and after imaging, it is possible to prevent forgetting to remove the workpiece 200.

[0086] Alternatively, as a fifth option, the processing device 1 may install multiple imaging devices 70 in positions visible to the operator and within the processing device, and start and stop imaging with the imaging devices 70 when the screen operation of a specific display unit 110 on the touch panel is changed (for example, a designated screen such as the cutting blade 21 replacement screen or the error recovery screen). In this case, if an operator error occurs, the processing device 1 can record who performed the operation and the circumstances at the time of the error. Furthermore, by automatically editing the video captured in this case and placing it at the beginning of the videos from the first, second, third, and fourth options exemplified above into a single video, it becomes possible to record "who did what". [Explanation of symbols]

[0087] 1 Processing equipment 10 Retention Table 20 Cutting Units (Processing Units) 100 control units 101 Video Input Section 102 Video Memory Unit 103 Video Playback Section 104 Video Editing Department 110 Display Unit 151,171 videos 200 Workpiece

Claims

1. A processing device for processing a workpiece, A holding table for holding the workpiece, A processing unit for processing a workpiece held on the holding table, A display unit that displays various types of information, It comprises a control unit that controls each component, The control unit is, A video input unit that receives video footage acquired by the imaging device, A video storage unit that stores the video input to the video input unit, The system includes a video playback unit that plays back a video stored in the video storage unit, The video input unit displays the video input from the imaging device on the display unit, and the video playback unit displays the video to be played on the display unit. The processing apparatus is characterized in that, upon receiving a press of the "Record" button image displayed on the display unit, the video storage unit starts storing the video input from the imaging device.

2. The control unit is, The processing apparatus according to claim 1, characterized in that it includes a video editing unit that enables editing of videos stored in the video storage unit.

3. The processing apparatus according to claim 2, characterized in that when the video editing unit sequentially receives a press of a "partial delete" button image for deleting a portion of a video displayed on the display unit, a press of a "start point setting" button image for setting the start point of the portion of the video to be deleted, and a press of an "end point setting" button image for setting the end point of the portion of the video to be deleted, it deletes the space between the still image of the video that was displayed when the "start point setting" button image was pressed and the still image of the video that was displayed when the "end point setting" button image was pressed.

4. The processing apparatus according to claim 2, characterized in that when the video editing unit receives a press of a "text input" button image for inputting text into a video displayed on the display unit, it inserts the text entered from the input unit into a predetermined position in the video and stores the video with the inserted text in the video storage unit.

5. The processing apparatus according to claim 1, characterized in that the control unit starts and stops imaging of the imaging device when triggered by the start and end of the processing operation.

6. The processing apparatus according to claim 1, characterized in that the control unit starts imaging with the imaging device triggered by the detection result of a sensor that detects the movement speed of a unit that moves the holding table and the processing unit relative to each other.

7. The processing apparatus according to claim 1, characterized in that the control unit starts imaging with the imaging device triggered by the detection result of a sensor that detects the fall of the workpiece.

8. The processing apparatus according to claim 1, characterized in that the control unit starts and stops imaging of the imaging device when the display of an operation screen where an operation error is suspected is triggered.

9. The processing apparatus according to claim 1, characterized in that the control unit starts and stops imaging of the imaging device when the cover is opened or closed.

10. The processing apparatus according to claim 1, characterized in that the control unit starts and stops imaging of the imaging device when a specific screen operation of the display unit is performed.

Images