Manufacturing system and manufacturing method for device having multiple optical elements

Abstract

A manufacturing system (1) comprises: a robot mechanism (20) that is configured to hold at least some optical elements (15) to be adjusted among multiple optical elements (12) for forming a first optical path (11) to a two-dimensional or three-dimensional base (13) on which the multiple optical elements are disposed without obstructing the first optical path, and finely adjust the positions and directions of the optical element to be adjusted; a detection device (30) that inputs laser light (33) for adjustment from a planned input position of the first optical path, and detects a light output (34) from a planned output position of the first optical path; and a fixing device (40) that finely adjusts the positions and / or directions of the optical elements to be adjusted by the robot mechanism and fixes the optical elements to be adjusted to the base in a state in which the planned light output is detected by the detection device.

Description

System and method for manufacturing a device having multiple optical elements

[0001] The present invention relates to a system and method for manufacturing an optical device having a plurality of optical elements.

[0002] International Publication WO 2022 / 054923 discloses, as an example of an apparatus having multiple optical elements, an apparatus including an optical module for providing Stokes light, pump light, and probe light for generating CARS light on a target (object, sample). The optical module includes a fiber laser module for providing first source light for converting it into the Stokes light and the pump light and second source light for converting it into the probe light, and an optical plate including multiple optical elements for converting the first source light into the Stokes light and the pump light and the second source light into the probe light. The apparatus may also include a scanning module configured to scan the target with the Stokes light, the pump light, and the probe light and acquire CARS light from the target via lenses and other optical elements, and a detector configured to detect the CARS light for analysis.

[0003] An example of the Stokes light is a laser light with a wavelength of 1085 to 1230 nm, an example of the pump light is a laser light with a wavelength of 1040 nm, an example of the probe light is a laser light with a wavelength of 780 nm, and the TD-CARS light (CARS light, time-dependent CARS, time-delayed CARS) may be scattered light with a wavelength in the range of 680 to 760 nm. The Stokes light and the pump light may include pulses on the order of 1 to 100 fS (femtoseconds) with tens to hundreds of mW. The probe light may include pulses on the order of 1 to 100 pS (picoseconds) with tens to hundreds of mW. Time-resolved coherent anti-Stokes Raman scattering or time-delayed coherent anti-Stokes Raman scattering (TD-CARS) microscopy is also known as a technique that utilizes the different time responses of virtual electronic transitions and Raman transitions to suppress non-resonant background.

[0004] An apparatus equipped with a CARS optical system is an example of an apparatus (optical apparatus, optical-related apparatus) having an optical path including multiple optical elements. In measurement, monitoring, control, and other applications in various fields, optical devices and systems including multiple optical elements are widely used, and in recent years, there has been a demand for compact, high-precision optical devices.

[0005] An example of an optical device is one in which multiple optical elements, such as mirrors, prisms, and dichroic mirrors, are mounted on an optical plate (base) to form an optical path, thereby forming an optical path for performing a predetermined function. In an example of a device equipped with the above-mentioned CARS optical system, three optical paths (arms) may be provided on the optical plate. One example of one optical path (first arm) may be an optical path that supplies Stokes light using a splitter to branch a portion of a first source light, and guides that portion to a photonic crystal fiber (PCF) and extends it to generate Stokes light. Another example of the other optical path (second arm) may be an optical path that supplies another portion of the first source light as pump light. Another example of a different optical path (third arm) may be an optical path that supplies probe light from a second source light via an SHG (second harmonic generation) and a delay module. Each optical path may include a time adjustment unit for fine-tuning the timing of pulses contained in the pump light and probe light. Each optical path may also include a free-space diffraction grating compressor for pulse compression of the laser module output, requiring a number of optical elements to be arranged in predetermined positions and orientations on the base.

[0006] Arranging multiple elements in a predetermined position, such as on a base, with a predetermined orientation (alignment) may be achieved by combining a robotic mechanism and an image processing device, thereby improving the installation accuracy of individual optical elements. However, optical elements almost always have individual differences, even if they are minute. Even if multiple optical elements are all arranged with high precision in ideal (designed, planned) positions and orientations, when they are integrated, they may not function as the predetermined (designed) optical path. Furthermore, the effects (effects, influences) of individual differences vary, and individual differences among multiple optical elements may be canceled or amplified. It is often impossible to know how individual differences affect the function of the optical path without actually arranging the elements. One example of a measure to reflect individual differences is to measure the individual differences of each optical element in advance and then fine-tune the position and orientation to reflect those individual differences. However, measuring the minute individual differences of each optical element is not particularly easy, and even if the minute individual differences among a large number of optical elements are managed, it may not necessarily be possible to manufacture an optical path that achieves the expected performance.

[0007] One aspect of the present invention is a system for manufacturing an optical device having a plurality of optical elements arranged two-dimensionally or three-dimensionally. The system includes: a robot mechanism configured to hold a plurality of optical elements or optical element groups to be adjusted, which are some of the optical elements, on a two-dimensional or three-dimensional base, with the plurality of optical elements constituting a first optical path through which at least one laser beam is input, at predetermined positions and orientations, without obstructing the first optical path, and to adjust (fine-tune) adjustment items including at least one of the positions and orientations of the plurality of optical elements or optical element groups to be adjusted; a detection device configured to input a laser beam for adjustment corresponding to at least one laser beam from a predetermined input position of the first optical path and detect an optical output from a predetermined output position of the first optical path; and a fixing device configured to fix the plurality of optical elements or optical element groups to be adjusted to the base in a state in which the detection device detects the predetermined optical output of the first optical path based on the laser beam for adjustment and in a state in which the robot mechanism has fine-tuned the adjustment items of the plurality of optical elements or optical element groups to be adjusted.

[0008] In this system, the results of adjustment of the optical elements by the robot mechanism are monitored in real time by a detection device, while the optical output based on the adjustment laser is monitored. Each optical element (optical component) is held on a base, e.g., a substrate with a low thermal expansion coefficient such as quartz, by the robot mechanism (transfer and placement robot), and then fixed by a fixing device. This allows for accurate manufacture of an optical device having a first optical path (optical circuit) formed by arranging multiple optical elements. Furthermore, instead of targeting fine adjustment of all of the multiple optical elements arranged on the base, the robot mechanism (robot device, robotics) is limited to an optical element or group of optical elements to be adjusted that can be operated by the robot mechanism without obstructing the first optical path, and that can absorb or compensate for individual differences among the multiple optical elements by fine-tuning adjustment items including at least one of the orientation and position of the optical elements. By limiting the objects to be adjusted by the robot mechanism, the adjustment time can be shortened and, for example, it becomes possible to simulate in advance the results of adjusting those objects in various cases. Using a program (expert system) based on the results or a learning model that uses the results as training data, it is possible to generate an apparatus equipped with a first optical path that has the expected performance efficiently in a short time.

[0009] Another aspect of the present invention is a method for manufacturing an optical device having a plurality of optical elements arranged two-dimensionally or three-dimensionally by using a manufacturing system. The manufacturing system includes a two-dimensional or three-dimensional base on which a plurality of optical elements constituting a first optical path through which at least one laser beam is input is arranged, and a robot mechanism configured to hold at least some of the optical elements or optical element groups to be adjusted without obstructing the first optical path and to fine-tune adjustment items including at least one of the positions and orientations of the plurality of optical elements or optical element groups to be adjusted, and a detection device configured to input an adjustment laser beam corresponding to at least one laser beam from a planned input position of the first optical path and detect an optical output from a planned output position of the first optical path. The method includes fixing the optical elements or optical element groups to be adjusted to the base while the detection device detects a planned optical output of the first optical path based on the adjustment laser beam and while the robot mechanism fine-tunes the adjustment items of the plurality of optical elements or optical element groups to be adjusted.

[0010] The manufacturing system may further include an alignment control device that selects optical elements or optical element groups to be adjusted (fine-adjusted) based on the optical output detected by the detection device after setting the adjustment items of the plurality of optical elements or optical element groups to be adjusted to predetermined states by the robot mechanism, and further fine-adjusts the adjustment items using the robot mechanism. The alignment control device may include a learning model that has previously learned, in a state where the adjustment items of the plurality of optical elements or optical element groups to be adjusted are set to predetermined states, deviations in optical output due to any of the positions, orientations, and individual differences of the plurality of optical elements, and selection of optical elements or optical element groups to be adjusted to be fine-adjusted by the robot mechanism and an adjustment method (adjustment procedure) to resolve these deviations.

[0011] The fixing device may include a device that simultaneously fixes a plurality of optical elements or optical element groups to be adjusted to the base. For example, the fixing device may include a combination of a UV curing resin and a UV irradiation device. The fixing device may include a device that sequentially fixes a plurality of optical elements or optical element groups to be adjusted to the base, rather than simultaneously. For example, the fixing device may fix the optical elements in the order in which individual differences in the optical elements have the greatest impact on the performance of the first optical path.

[0012] The manufacturing system may include a device for hermetically sealing a base to which a plurality of optical elements or optical element groups to be adjusted are fixed, in a state where a predetermined optical output is detected by the detection device. The hermetically sealing may be performed with an inert gas such as argon, or in a vacuum state.

[0013] The manufacturing system may include a device that externally controls the temperature of the base using infrared rays, hot air, or the like, and the base may include a temperature control device such as a heater. The optical device can be manufactured while monitoring the first optical path in real time so that predetermined performance can be obtained at the planned operating temperature of the optical device. The manufacturing system may include a device that repeatedly raises and lowers the temperature of the base before all of the optical elements or optical element groups to be adjusted are fixed, and the optical device may be manufactured while checking the reproducibility of the performance of the first optical path with respect to temperature using the optical elements placed and fixed on the base.

[0014] The optical device may include a base on which a plurality of optical elements are arranged two-dimensionally or three-dimensionally to form a first optical path, and optical blocks in which the plurality of optical elements are hermetically sealed together with the base, and each optical block may include an input port for the first optical path and an output port for the first optical path.

[0015] Fig. 1 is a block diagram showing an overview of a manufacturing system. Fig. 2 is a block diagram showing an example of an optical system. Fig. 3 is a diagram showing a wavelength plan of the optical system. Fig. 4 is a diagram showing an example of an optical device (optical plate). Fig. 5 is a diagram showing an example of an optical block. Fig. 6 is a diagram showing another example of an optical block. Fig. 7 is a diagram showing another example of an optical block. Fig. 8 is a flowchart showing an overview of a manufacturing method. MODE FOR CARRYING OUT THE INVENTION

[0016] 1 shows an outline of a system (manufacturing system) 1 for manufacturing an optical device (optical-related device) 10 having one or more optical paths in which multiple optical elements are arranged two-dimensionally or three-dimensionally on a two-dimensional or three-dimensional base. This manufacturing system 1 includes a robot mechanism (robot device, robotic device) 20, a detection device 30, a fixing device 40, and an alignment control device (alignment controller) 50 that is responsible for overall control of the manufacturing system 1. The alignment control device 50 may include computer resources such as a CPU and memory, and may be controlled by a control program 57. The robot mechanism 20 holds a plurality of optical elements or optical element groups 15 to be adjusted (hereinafter, referred to as "optical elements to be adjusted") that are part of the plurality of optical elements (optical components) 12 on a two-dimensional or three-dimensional base (support base) 13 on which the plurality of optical elements 12 constituting the first optical path 11 of the optical device 10 to be manufactured are arranged at predetermined positions and orientations, without interfering with the first optical path 11, and includes a mechanism capable of fine-tuning adjustment items including the position and orientation of the optical elements 15, i.e., at least one of X, Y, Z, and θ (three-dimensional position and angle (orientation) including height). An example of the robot mechanism (robot device) 20 is a multi-axis robot. For example, the robot mechanism 20 may include a handling mechanism 22, such as an arm, manipulator, or tool, moved by an actuator arranged to grasp each optical element 15 to be adjusted without interfering with the input and output directions of at least one laser beam thereto, and an image processing device 24 capable of accurately determining the position and angle of the optical element 15 to be adjusted.

[0017] The robot mechanism 20 may include a device for gripping and setting all optical elements 12 constituting the first optical path 11 to predetermined positions and orientations (X-Y-Z and θ, length, width, height, and angle). The robot mechanism 20 may be a device for gripping and determining the position and orientation of the optical element 15 to be adjusted after fixing the optical elements 12 to the base 13 at predetermined positions and orientations. The base 13 may be machined or formed in a flat or three-dimensional (stereoscopic) shape, and may be pre-formed or processed into a wall surface extending vertically, horizontally, diagonally, or even upside down (like a ceiling), a partition, or a shape with irregularities. The robot mechanism 20 may also include a handling mechanism 22 for attaching the optical element 15 to be adjusted to the two-dimensional or three-dimensional base 13 from various directions, such as up, down, left, right, front, and back.

[0018] The detection device 30 may include a laser supply device (laser source module) 31 that inputs, from a planned input position of the first optical path 11, laser light for alignment adjustment (temporary laser light, adjustment laser light) 33 that corresponds to the laser light (to be input to the first optical path 11) to be processed by the first optical path 11, and a detector (sensor) 32 that detects optical output 34 from a planned output position of the first optical path 11. The fixing device 40 fixes the optical element 15 to be adjusted to the base 13 in a state in which the detection device 30 has detected the planned optical output 34 of the first optical path 11 (in accordance with the design of the first optical path 11) based on the adjustment laser light 33, and in a state in which the position and / or orientation of the optical element 15 to be adjusted has been adjusted (fine-tuned) by the robot mechanism 20. The fixing device 40 uses the robot mechanism 20 to set (temporarily position) the optical element 15 to be adjusted at a designed position on the base 13 in a designed state (orientation) so as to realize the first optical path 11, and then fixes the optical element 15 to be adjusted to the base 13 in a state in which it has been fine-tuned so that its function as the first optical path 11 is confirmed by the detection results of the detection device 30.

[0019] If the detection device 30 does not obtain the expected optical output by simply holding the optical element (optical component) 15 to be adjusted in the position and orientation designed by the robot mechanism 20, the alignment control device 50 causes the robot mechanism 20 to further fine-tune adjustment items, including the position and / or orientation (X-Y-Z and / or θ, length, width, height, and / or angle) of the optical element 15 to be adjusted, in accordance with a predetermined program or protocol. After the inspection device 30 obtains the expected optical output, the alignment control device 50 fixes the optical element 15 to be adjusted to the base 13 using the fixing device 40. This manufacturing system 1 includes a mechanism (multi-axis robot) 20 that adjusts the position, direction, and height of the optical component 15 to within a specified direction standard using a light beam (laser light) of a wavelength used by a system including the optical device (optical-related device) 10 to be manufactured. The optical device 10 can be manufactured by fixing the optical component 15 while maintaining the adjusted position of the optical axis of the optical component 15. That is, in this manufacturing system 1, an optical device 10 is manufactured with high precision and efficiency by adhesively fixing optical components (optical elements) 15 to a substrate (e.g., quartz) 13 having a low thermal expansion coefficient using a robot mechanism (transfer and placement robot) 20 while monitoring the input and output of the optical device 10 in real time, thereby enabling a device having an optical path 11 in free space (in a gas or vacuum) to be manufactured with high precision and efficiency.

[0020] The alignment control device 50 may include a function (adjustment target selection device) 55 that selects an optical element 15 whose position and / or orientation is to be further fine-tuned by the robot mechanism 20 based on the optical output 34 detected by the detection device 30 after the position and / or orientation of the optical element 15 to be adjusted is set to a planned (predetermined) state by the robot mechanism 20, i.e., a state that configures the designed first optical path 11. This function 55 may include a learning model 51 that has previously learned the relationship between deviations in optical output due to any of the positions, orientations, and individual differences of the multiple optical elements 12 when the position and / or orientation of the optical element 15 to be adjusted is set to a predetermined state, and adjustment procedures (adjustment methods) for resolving the deviations. The learning model (AI, artificial intelligence) 51 may be a learning model that has previously learned, with the adjustment items (positions and / or orientations) of the multiple optical elements or optical element groups 15 to be adjusted set to predetermined states, deviations (errors) in the light output 34 caused by any of the positions, orientations, and individual differences of the multiple optical elements 12 mounted on the base 13, and the selection and adjustment procedure (adjustment method) of the optical elements 15 to be adjusted (optical elements or optical element groups to be fine-tuned) to be fine-tuned by the robot mechanism 20 to resolve these deviations (errors).

[0021] In the robot mechanism 20, the combination of the handling mechanism 22, the image processing device 24, etc., allows the optical element 15 to be adjusted to be positioned and oriented with high precision relative to the base 13 at the designed position and orientation. However, in most cases, there are small individual differences among the optical elements 12 that make up the optical path 11. For this reason, even if the multiple optical elements 12 are all positioned at the intended (ideal design) positions and orientations, the accumulation of small individual differences, such as differences in the angle, position, and refractive index of the surfaces of the optical elements 12, may prevent the first optical path 11 from functioning properly. Furthermore, the effect (sensitivity) of the individual differences among the optical elements 12 varies, and the individual differences among the multiple optical elements 12 may be canceled out or amplified. Therefore, it is often impossible to know how the individual differences affect the function of the optical path without actually arranging the elements (components). In the manufacturing system 1 of this example, the positioning (orientation, alignment) of the optical element 12 is fixed while detecting the output light 34 from the first optical path 11 in real time, thereby enabling the first optical path 11 to exhibit the specified performance, including individual differences between the optical elements 12.

[0022] There is not necessarily a single solution for fine-tuning the position and orientation of the optical elements 15 relative to the base 13 so that the first optical path 11 exhibits the expected (predetermined) performance. Furthermore, the detection results of the detection device 30 may not necessarily limit the optical elements 15 to be repositioned or reoriented. Fine-tuning the position and orientation of a certain optical element 15 to be adjusted may degrade the performance of the first optical path 11, or fine-tuning the alignment of other optical elements 15 may not necessarily converge the performance of the first optical path 11 to the expected range. The learning model 51 can learn in advance numerous alignment procedures that have successfully converged the performance of the first optical path 11 to the expected range, such as the order and amount of adjustment of the optical elements 15 to be fine-tuned. The alignment control device 50 may converge the performance of the first optical path 11 to the expected range using a trial-and-error method. By using the learning model 51, the alignment control device 50 can fine-tune the optical element 15 to be adjusted more efficiently and in a shorter time so as to reliably obtain the intended performance of the first optical path 11.

[0023] The fixing device 40 may fix all of the optical elements 15 to be adjusted to the base 13 at once after the adjustment of the optical elements 15 to be adjusted is completed and the performance of the first optical path 11 is obtained, and while the robot mechanism 20 is holding (maintaining and supporting) the optical elements 15 to be adjusted. Optical elements not to be adjusted may be fixed in advance, or the robot mechanism 20 may support the optical elements not to be adjusted in a predetermined state and fix them together with the optical elements 15 to be adjusted. One example of a method for simultaneously fixing all of the optical elements 15 is a combination of UV resin and a UV irradiation device. The optical elements 15 to be adjusted may be placed on the base 13 via UV resin, and the fixing device 40 may irradiate all of the optical elements 15 with UV after adjustment is completed. During the process of converging the performance of the first optical path 11 to a predetermined range by sequentially moving one or more optical elements 15, the optical elements 15 whose alignment has been determined may be sequentially fixed to the base 13. The fixing device 40 may have a function of irradiating UV light on each optical element 15 to be adjusted, or may have a function of irradiating UV light on the entire base 13. Fixing methods that can be adopted by the fixing device 40 may include adhesive (including UV), welding, or mechanical methods such as screw fastening. When an adhesive is used, it may be one that has low deposition shrinkage when hardened and a small rate of volume change due to heat.

[0024] The manufacturing system 1 may further include a temperature control device 60 that controls the temperature of the base 13 and a hermetic sealing device (packaging device) 70 that hermetically seals the base 13, including the base 13 to which the optical elements 12 are fixed, to form an optical block (package). The temperature control device 60 may supply a heat-generating element, such as infrared rays or hot air (warm air), to the base (support base) 13 during fine-tuning of the optical elements 15, or may be a temperature control device such as a heater pre-attached to or built into the base 13. The temperature control device 60 may set the temperature of the base 13 to the operating temperature of the optical device 10 until the alignment of the optical elements 15 is fine-tuned and fixed to the base 13. The operating temperature may be the average value of the outside air temperature, or may be set to a temperature that the outside air temperature does not reach, such as 40 degrees, to minimize the impact of fluctuations in the outside air temperature on the performance of the optical path 11. The temperature control device 60 may also repeatedly raise and lower the temperature of the base 13 before all of the optical elements 15 to be adjusted are fixed.

[0025] The alignment control device 50 may use the detection device 30 to check fluctuations in the performance of the first optical path 11 due to the temperature of the base 13 and the effects of temperature history by repeatedly fluctuating the temperature. The learning model 51 may be trained to determine the final position and orientation of the optical element 15 to be adjusted so as to minimize the effects of temperature, and the alignment control device 50 may be equipped with a function (confirmation device) 56 that confirms and then fixes the final position and orientation of the optical element 15 to be adjusted so as to minimize the effects of temperature. The base (support substrate, substrate) 13 is preferably a material with a low thermal expansion coefficient that is not easily affected by temperature changes, such as quartz, invar, alumina, or Zerodur. The base 13 may also be made of other materials with a low expansion coefficient (including zero expansion coefficient).

[0026] The hermetic seal device (sealing device) 70 may include a metal or resin cover (housing) surrounding the first optical path 11 after all optical elements (optical components) 12, including the optical element 15 to be adjusted, are fixed to the base 13, and the atmosphere (air) inside the housing is replaced with an inert gas such as argon or nitrogen, followed by hermetic sealing to prevent deterioration of each optical element 12. The sealing device 70 may include a hermetic seal on the base 13, or within the base 13, with the inside of the sealing housing being a vacuum atmosphere. By creating a vacuum atmosphere around the first optical path 11, heat transfer between the first optical path 11 and the outside world may be minimized, providing an environment in which temperature fluctuations in the outside world are less likely to affect the numerous optical elements 12 that make up the first optical path 11. In the manufacturing system 1, even while the hermetic sealing device is performing the above-mentioned processing, the detection device 30 can measure the light output 34 from the first optical path 11 in real time, and the processing (manufacturing process) can be carried out while confirming in real time that there is no change in the condition of the optical element 15 to be adjusted which is fixed to the base 13.

[0027] As described above, the manufacturing system 1 of this embodiment includes a function for fixing optical components (optical elements) 12 to the base (support base) 13. During fixing, the position, orientation, and height of the optical components are confirmed in real time using light rays of a wavelength that forms the optical path 11, and the axis (optical axis) of the output light beam of the optical element 12 is adjusted to within a specified direction. In one example of an optical device 10 to be manufactured, the alignment of the most critical optical element 12 on the base 13, including rotation and tilt, is required to be within 3 μRad. The manufacturing system 1 determines the placement while monitoring the final optical output 34 in real time, thereby enabling the individual optical elements 12, including the optical element 15 to be adjusted, to be fixed to the base 13 with sufficient accuracy.

[0028] The manufacturing system 1 has a robot mechanism (multi-axis robot) 20, which fixes the optical components 15 while maintaining the adjusted position of the optical axis of each optical element 15. Fixing methods may include adhesive (including UV), welding, or screwing. If an adhesive is used, it is desirable to use an adhesive that exhibits low deposition shrinkage upon curing and a small rate of thermal volume change. The base (support base, support substrate) 13 is desirably made of a material with a low thermal expansion coefficient. Examples of materials for a base (substrate) with a low thermal expansion coefficient include quartz, invar, alumina, and Zerodur. Furthermore, the base 13 may be made of a single substrate that constitutes the entire system provided as the optical device 10, or may be made of multiple substrates. For example, the optical device 10 to be manufactured may be manufactured by the manufacturing system 1 as multiple optical devices (subdevices, optical blocks) 10 for each functional block, and the desired optical device 10 may be manufactured by combining these subdevices (optical blocks) using the manufacturing system 1.

[0029] The manufacturing system 1 may be a system in which the robot mechanism 20, the detection device 30, the fixing device 40, the alignment control device 50, the temperature control device 60, and the hermetic sealing device 70 are attached (fixed) to a common body (chassis) 5 to be integrated. The manufacturing system 1 may further include other devices such as a device (robot) that carries in and out the optical device 10 to be manufactured, a device and image processing device that positions the optical device 10, and an inspection device that checks the performance of the optical device 10 after manufacture.

[0030] 2 shows an example of an optical system including the optical device 10 manufactured by the manufacturing system 1. The optical system 100 includes an optical module 110 for supplying a Stokes beam 151, a pump beam 152, and a probe beam 153 for generating a CARS beam 155 on a target (object, sample) 150. The optical module 110 includes a fiber laser module 130 for supplying a first source beam 131 for converting the first source beam 131 into the Stokes beam 151 and the pump beam 152, and a second source beam 132 ... fiber laser module 130 for supplying an optical plate (optical plate, optical device) 200 including a plurality of optical elements 229 for converting the first source beam 131 into the Stokes beam 151 and the pump beam 152, and the second source beam 132 into the probe beam 153. The optical plate 200 is a device in which multiple optical elements 229 are arranged on a base 228, and the entire device can be manufactured and provided as an optical device 10, or only a part of it, such as a compressor, can be manufactured and provided as an optical device 10.

[0031] The optical system 100 may further include a scanning module 140 configured to scan the target 150 with the Stokes beam 151, the pump beam 152, and the probe beam 153 and acquire CARS light 155 from the target 150 via a lens 145 and other optical elements, and a detector (spectrometer) 143 configured to detect the CARS light 155 for analysis. The system 100 may include a controller (processor) 160 for controlling the entire system 100. The controller 160 may include other functions such as a laser control module 161 and an analyzer 162.

[0032] Scanning module 140 may be a fingertip scanning interface module, a non-invasive sampler, an invasive sampler, a flow path, or a wearable scanning interface, and each type of scanning interface may be interchangeable.

[0033] 3 shows an example of a wavelength plan for the CARS optical system 100. The Stokes light 151 is incident on a first range R1 (400 cm) of wavelengths from 1085 to 1230 nm. －１ ~1500cm －１ The pump light 152 includes a second range R2 with a wavelength of 1040 nm, the probe light 153 includes a third range R3 with a wavelength of 780 nm, and the TD-CARS light (CARS light, time-dependent CARS, time-delayed CARS) 155 includes a wavelength range R5 of 680 to 760 nm. The Stokes light 151 and the pump light 152 may include pulses on the order of 1 to 100 fS (femtoseconds) with powers of tens to hundreds of mW. The probe light 153 may include pulses on the order of 1 to 10 pS (picoseconds) with powers of tens to hundreds of mW. Time-resolved coherent anti-Stokes Raman scattering or time-delayed coherent anti-Stokes Raman scattering (TD-CARS) microscopy is also known as a technique for suppressing non-resonant background by utilizing the different time responses of virtual electronic transitions and Raman transitions. In order to provide an optical system 100 that can easily apply such a measurement method to various applications, an optical device 10 in which multiple optical elements are aligned with high precision is required.

[0034] The optical plate 200 provided as the optical device 10 may be an optical device having a plurality of optical elements 229, such as mirrors, prisms, and dichroic mirrors, mounted on a base 228 to configure optical paths. The optical plate 200 may be provided with three optical paths (arms) 121, 122, and 123. The optical path (first arm) 121 includes optical elements such as a splitter 121s that supplies a portion of the first source light 131 as Stokes light 151 and a photonic crystal fiber (PCF) 121a that extends the light. The optical path (second arm) 122 includes optical elements that supply another portion of the first source light 131 as pump light 152. The optical path (third arm) 123 includes optical elements that supply probe light 153 from the second source light 132 via an SHG 123a and a delay module. In addition, the optical paths 122 and 123 may each include multiple optical elements for fine-tuning the timing of the pulses contained in the pump light 152 and the probe light 153, and multiple optical elements for bundling the Stokes light 151, the pump light 152, and the probe light 153.

[0035] The optical plate 200 may further include compressors 171 and 172 for compressing (pulse compressing) the first source light 131, centered at 1030 nm, and the second source light 132, centered at 1560 nm, respectively, supplied from the fiber laser module 130. One example of the compressors 171 and 172 is a free-space grating compressor. The fiber laser module 130 includes a chirped pulse amplification (CPA) device, in which short laser pulses are first stretched and then amplified, and therefore must finally be compressed back to their short pulse duration. The higher the amplification factor, the greater the pulse stretching required to avoid damage and nonlinear effects that distort the pulse envelope. The compressors 171 and 172 are provided in the optical plate 200 to reverse the pulse stretching before supplying the laser light 131 and 132 to the respective arms 121, 122, and 123.

[0036] FIG. 4 shows an example of the arrangement of multiple optical elements 229 constituting the optical plate 200. This optical plate 200 has multiple optical elements 229 arranged on a base 228, constituting three optical paths (arms, first optical paths) 121, 122, and 123. Optical elements marked with "F" in the figure indicate optical elements that are fixed in a predetermined (designed) position and orientation by the manufacturing system 1 and are not adjusted. Optical elements marked with "A" in the figure are adjustable (adjustable) optical elements whose position and / or orientation (adjustment items) are adjusted by the manufacturing system 1. It is desirable to have a small number of optical elements to be adjusted. On the other hand, by adjusting (fine-tuning) the position and / or orientation of the optical elements to be adjusted, individual differences among the optical elements as a whole must be absorbed or compensated for, thereby ensuring the intended (designed) performance of the optical plate 200. On the other hand, optical elements whose performance as the optical plate 200 changes significantly or does not change at all depending on their position or orientation may be unsuitable for adjustment. The optical element to be adjusted may be determined when simulating the performance of the optical plate 200, or may be selected from optical elements whose sensitivity to position and orientation is suitable for adjustment.

[0037] For example, compressors 171 and 172 each include, as optical elements, a grating (diffraction grating) 710 and a first prism 711 and a second prism 712, respectively, provided on either side of the grating to fold the optical path. The second prism 712 is positioned to fold the light in a direction perpendicular to the first prism 711. Compressors 171 and 172 of this example have a compact and simple configuration, yet achieve compression performance equivalent to or better than that of conventional compressors having multiple gratings. Compressor 172 may also include a third prism 713 in addition to first prism 711 to further fold the optical path. Compressors 171 and 172 each further include, as optical elements, an input port 720, an output port 730, and reflective elements (reflective surfaces, mirrors) 721 and 722. The input port 720 and the output port 730 may be optical connectors such as optical fibers, or may be transmissive optical elements such as filters, lenses, prisms, and light-transmitting plates.

[0038] For example, of the seven optical elements 12 (710 to 730) that make up the compressor 171, optical elements 711, 720, and 722 can be designated as optical elements 15 to be adjusted, as indicated by "A," and the other optical elements 710, 712, 721, and 730 can be designated as optical elements 14 that are not to be adjusted and are fixed by default, as indicated by "F."

[0039] The optical plate 200 including a large number of optical elements 229 can be manufactured and assembled into multiple optical modules. For example, each of the compressors 171 and 172 can be manufactured as an optical block (sub-device, optical package, optical device) 10 (10a) by the manufacturing system 1 of this example. Furthermore, these optical blocks 10a (171, 172) can be mounted on a base 228 together with other optical elements by the manufacturing system 1 of this example, and a single optical plate 200 can be manufactured and provided as an optical device 10.

[0040] 5 to 7 show an example in which a 1030 nm compressor 171 is manufactured as a functional unit optical device (optical block) 10 a as a part of the functional block of the first optical path 11 by the manufacturing system 1 .

[0041] In the optical block 10a shown in Figure 5, several optical elements are fixed three-dimensionally (at different installation heights) on a base 13 via pedestals 13a. The pedestals 13a are fixed to the base 13 in advance with UV resin, and the base 13 may be three-dimensionally processed. The pedestals 13a and the optical elements mounted thereon may be integrated, and the position and orientation of the pedestals 13a may be finely adjusted by a robot mechanism 20. By employing a base 13 having a three-dimensional shape, it is possible to include optical paths that intersect three-dimensionally in the first optical path 11, or multiple optical paths separated in the height direction, and to use not only the bottom surface but also the wall surface as a location for installing optical elements. This allows the optical block 10a including the complex first optical path 11 to be manufactured and provided as a compact optical device 10.

[0042] Furthermore, of the seven optical elements 12 (710 to 730) constituting the compressor 171, optical elements 710, 712, 721, and 730 are optical elements 14 that are initially fixed and not subject to adjustment, and only optical elements 711, 720, and 722 are optical elements 15 that are subject to adjustment, and are adjusted by the robot mechanism 20 while monitoring the optical output 34 with the detection device 30. This allows the compressor 171 with the expected performance to be manufactured and provided as an optical block 10a by the manufacturing system 1. Furthermore, this optical block 10a is provided with a hermetic seal 700 provided by the hermetic sealing device 70 so as to surround the first optical path 11, and can be provided as an optical block 10a that can maintain the expected performance for a long period of time. This optical block 10a includes an input port 720 of the first optical path 11 that functions as a compressor 171, and an output port 730 of the first optical path 11, and can be manufactured and provided as an optical plate 200 by being mounted on a base 228 together with other compressors 172 and other optical elements as shown in FIG. 4.

[0043] 6 shows an example of an optical block (optical device) 10a manufactured by the manufacturing system 1. In this example, interference between optical paths intersecting three-dimensionally is controlled by cutting a portion of the optical element 722. The robot mechanism 20 of the manufacturing system 1 is configured to be able to handle the optical element 722 so as not to interfere with the optical paths intersecting three-dimensionally.

[0044] 7 shows an example of an optical block (optical device) 10a manufactured by the manufacturing system 1. In this example, the base 13 has a three-dimensional shape with a recess (groove) 13b formed in a portion thereof, and an optical element 722 is disposed in the recess 13b to control interference between optical paths that intersect three-dimensionally and between some optical elements and light beams.

[0045] 8 shows an example of a method (manufacturing method) for manufacturing the optical device 10 using the manufacturing system 1. This manufacturing method 80 may be provided as a control method for the manufacturing system 1, or may be provided by recording it on a recording medium as a control program 57 for the alignment control device 50, which includes computer resources. In step 81, the manufacturing system 1 places optical components (optical elements or optical element groups) 12 for configuring the first optical path 11 on the base (support base) 13 of the optical device 10 using the robot mechanism 20. In step 82, the alignment control device 50 causes the detection device 30 to detect optical outputs 34 from the intended output positions for adjustment laser beams 33 corresponding to at least one laser beam input from the intended input positions of the first optical path 11, and in step 83, determines whether adjustment is necessary based on the detection results. If the optical output 34 is not as expected, in step 84, the alignment control device 50 selects optical elements to be further adjusted from the multiple optical elements 15 to be adjusted using the optical output 34, and in step 85, the robot mechanism 20 adjusts (fine-tunes) the position and / or orientation (X-Y-Z and / or θ, length, width, height and / or angle) which are adjustment items of the optical elements 15 to be adjusted.

[0046] In step 86, similarly to step 83, the optical output 34 is checked, and steps 84 and 85 are repeated until the optical output 34 falls within the expected range. This process may be performed using a learning model 51 that has previously learned the relationship between deviations in the optical output 34 caused by any of the positions, orientations, and individual differences of the multiple optical elements 15 and adjustment methods (adjustment procedures) for the optical elements 15 to resolve those deviations, with the adjustment items of the optical elements 15 to be adjusted set to expected states.

[0047] If the optical output 34 falls within the predetermined range in step 86, the temperature control device 60 controls the temperature of the base 13 in step 87, and the result of the optical output 34 is checked again in step 88. If the optical output 34 falls within the predetermined range, the fixing device 40 fixes the optical element 15 to be adjusted to the base 13 in step 89, with the optical output 34 of the first optical path 11 detected to be within the predetermined range, and with the robot mechanism 20 fine-tuning the adjustment items of the optical element 15 to be adjusted. Furthermore, in step 90, the hermetic sealing device 70 applies a hermetic seal to surround the first optical path 11 including the adjusted optical element 15, thereby manufacturing the optical device 10.

[0048] The above discloses a system 1 for manufacturing an optical device (optical-related device, light-related device) having a plurality of optical elements arranged two-dimensionally or three-dimensionally, the manufacturing system 1 including a robot mechanism 20 that holds an optical element or optical element group 15 to be adjusted, at least a part of the plurality of optical elements 12, relative to a two-dimensional or three-dimensional base 13 on which a plurality of optical elements 12 are arranged to form a first optical path 11, without obstructing the first optical path 11, and that can fine-tune the position and orientation of the optical element or optical element group 15 to be adjusted; a detection device 30 that inputs a predetermined laser light from a predetermined input position of the first optical path 11 and detects the optical output from a predetermined output position of the first optical path; and a fixing device 40 that, when the detection device 30 detects the predetermined optical output, fine-tunes the position and / or orientation of the optical element or optical element group 15 to be adjusted by the robot mechanism 20, and fixes the optical element or optical element group 15 to the base 13.

[0049] In this manufacturing system 1, a robot mechanism 20 is used to position each optical element 15 and finely adjust its position and / or orientation, so that the optical elements 12, including the optical element 15 to be adjusted, can be positioned not only two-dimensionally but also three-dimensionally, facing any direction of front, back, up, down, left, or right, thereby providing an optical device 10 in which the optical elements 12 are arranged three-dimensionally. In this optical device 10, it is no longer necessary to design the first optical path 11 based on a plane or a hierarchy, so the optical path can be designed three-dimensionally and flexibly, and an optical device 10 including a complex optical path 11 can be designed and manufactured compactly. Therefore, the optical device 10 has a base 13 on which multiple optical elements 12 are arranged three-dimensionally to form the first optical path.

[0050] The above also discloses a method (a method for controlling a manufacturing system) for manufacturing an optical device 10 having a plurality of optical elements 12 arranged in two or three dimensions, particularly three dimensions, by a manufacturing system 1. The plurality of optical elements 12, including the optical element 15 to be adjusted, are held by a robot mechanism 20 on a two-dimensional or three-dimensional, particularly three-dimensional, base 13 without obstructing the first optical path 11, and the optical elements 12, including the optical element 15 to be adjusted, can be fixed to the base 13 while a detection device detects a predetermined optical output. Furthermore, for the optical device 10 having the base 13 on which the plurality of optical elements 12 are arranged in three dimensions to form the first optical path 11, a hermetically sealed optical block 10a may be manufactured including the first optical path 11, and the optical block 10a may include an input port and an output port for the first optical path 11.

[0051] Furthermore, while particular embodiments of the present invention have been described above, various other embodiments and modifications may be devised by those skilled in the art without departing from the scope and spirit of the present invention, and such other embodiments and modifications are within the scope of the following claims, which define the present invention.

Claims

1. A system for manufacturing an optical device having multiple optical elements arranged in two or three dimensions, A robotic mechanism configured to hold a plurality of optical elements or groups of optical elements that are to be adjusted, without obstructing the first optical path, on a two-dimensional or three-dimensional base in which the plurality of optical elements constituting a first optical path into which at least one laser beam is input, the plurality of optical elements constituting a first optical path are arranged in predetermined positions and orientations, and to fine-tune adjustment items including at least one of the positions and orientations of the plurality of optical elements or groups of optical elements to be adjusted, A detection device configured to input adjustment laser light corresponding to at least one laser beam from the planned input position of the first optical path and to detect the optical output from the planned output position of the first optical path, A fixing device configured to fix the plurality of optical elements or groups of optical elements to be adjusted to the base while the detection device detects the planned optical output of the first optical path based on the adjustment laser light, and while the robot mechanism fine-tunes the adjustment items of the plurality of optical elements or groups of optical elements to be adjusted, A system comprising: a detection device that detects the planned optical output, and a packaging device that packages the plurality of optical elements or groups of optical elements to be adjusted, including the base on which they are fixed.

2. In claim 1, A system further comprising an alignment control device configured to select an optical element or group of optical elements to be adjusted, after the robotic mechanism has set the adjustment items of the plurality of optical elements or groups of optical elements to be adjusted to a predetermined state, and the robotic mechanism further fine-tunes the adjustment items based on the light output detected by the detection device.

3. In claim 2, The alignment control device is a system that includes a learning model that has been pre-learned of the deviation of the optical output caused by any of the position, orientation, and individual differences of the plurality of optical elements, and the selection and adjustment procedure of the optical elements or optical element group to be adjusted, which are to be fine-tuned by the robotic mechanism to resolve these deviations, with the adjustment items of the plurality of optical elements or optical element groups to be adjusted set to a predetermined state.

4. In any of claims 1 to 3, The fixing device is a system that includes a device for simultaneously fixing the plurality of optical elements or groups of optical elements to be adjusted to the base.

5. In any of claims 1 to 3, The fixing device is a system that includes a device for sequentially fixing the plurality of optical elements or groups of optical elements to be adjusted to the base.

6. In any of claims 1 to 5, The packaging apparatus is a system that, while the detection device has detected the planned optical output, hermetically seals the plurality of optical elements or groups of optical elements to be adjusted, including the base on which they are fixed.

7. In any of claims 1 to 6, A system having a device for externally controlling the temperature of the base.

8. In any of claims 1 to 7, The aforementioned base is a system including a temperature control device.

9. In claim 7 or 8, A system having a device that repeatedly raises and lowers the temperature of the base before all of the optical elements or groups of optical elements to be adjusted are fixed in place.

10. A method for manufacturing an optical device having multiple optical elements arranged in two or three dimensions using a manufacturing system, The manufacturing system includes a robotic mechanism configured to hold at least some of the optical elements or groups of optical elements to be adjusted within a two-dimensional or three-dimensional base on which the plurality of optical elements constituting a first optical path into which at least one laser beam is input, without obstructing the first optical path, and to fine-tune adjustment items including at least one of the position and orientation of the plurality of optical elements or groups of optical elements to be adjusted. The system includes a detection device configured to input adjustment laser light corresponding to at least one laser beam from the planned input position of the first optical path and to detect the optical output from the planned output position of the first optical path, This method is With the detection device detecting the planned optical output of the first optical path based on the adjustment laser light, and with the robot mechanism fine-tuning the adjustment items of the plurality of optical elements or groups of optical elements to be adjusted, the optical elements or groups of optical elements to be adjusted are fixed to the base. A method comprising detecting the planned optical output using the detection device, and then packaging the plurality of optical elements or groups of optical elements to be adjusted, including the base on which they are fixed.

11. In claim 10, A method further comprising setting the adjustment items of the plurality of optical elements or groups of optical elements to be adjusted to a predetermined state using the robotic mechanism, and then, based on the light output detected by the detection device, selecting an optical element or group of optical elements to be further adjusted from among the plurality of optical elements or groups of optical elements, and adjusting the adjustment items of the optical elements or groups of optical elements using the robotic mechanism.

12. In claim 11, The manufacturing system has a learning model that has been pre-learned of the deviation in the optical output detected by the detection device due to any of the position, orientation, or individual differences of the multiple optical elements or groups of optical elements, and the adjustment procedure to resolve it, with the adjustment items of the multiple optical elements or groups of optical elements set to a predetermined state. The adjustment described above is a method that includes adjusting using the learning model described above.

13. In any of claims 10 to 12, The method for fixing includes simultaneously fixing the plurality of optical elements or groups of optical elements to be adjusted to the base.

14. In any of claims 10 to 12, The fixing method includes sequentially fixing the plurality of optical elements or groups of optical elements to be adjusted to the base.

15. In any of claims 10 to 14, The packaging method comprises hermetically sealing the base on which the optical element or group of optical elements to be adjusted is fixed, while the detection device has detected the planned light output.

16. In any of claims 10 to 15, A method comprising repeatedly raising and lowering the temperature of the base before all of the optical elements or groups of optical elements to be adjusted are fixed in place.