A microstructure array precision machining machine tool with adaptive matching of dynamic characteristics

An adaptive matching, microstructure array technology, applied in the direction of microstructure technology, microstructure device, manufacturing microstructure device, etc., can solve the problems of limited punching accuracy, limited punching accuracy, and large variation of punching force of punching machines, and achieves improved The effect of machining efficiency, improving machining accuracy and reducing motion deviation

CN104485290BActive Publication Date: 2017-10-27GUANGDONG UNIV OF TECH
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Publication Date
2017-10-27

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Abstract

A microstructure array precision processing machine tool with adaptive matching of dynamic characteristics, including a Y-direction movement mechanism, an X-direction movement mechanism and a Z-direction precision stamping mechanism, the X-direction movement mechanism is fixed on the base through an X-direction bracket, and the Z The X-direction precision stamping mechanism is installed on the X-direction rail of the X-direction movement mechanism through the X&Z linkage platform and the X&Z composite guide rail slider, and realizes the X-direction movement under the X-direction drive of the X-direction movement mechanism; the workpiece is placed on the on the Y-direction motion platform of the Y-direction motion mechanism, and realize the Y-direction motion through the Y-direction motion mechanism. The Z-direction precision stamping mechanism can fine-tune the dynamic characteristics according to different stamping frequencies to obtain consistent dynamic response performance, and can realize position-force switching compound control to achieve consistent processing of microstructure arrays. The invention proposes a precision micro stamping machine tool which shortens alignment time, reduces motion deviation, and improves processing efficiency and processing accuracy.
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Description

Technical field

[0001] The invention relates to a precision motion platform, in particular to a microstructure array precision processing machine tool with adaptive dynamic characteristics matching. Background technique

[0002] In the field of semiconductor packaging, it is often necessary to process some precision microstructures on the workpiece. Precision stamping machine is a processing equipment that completes the above-mentioned procedures. The current problems of stamping equipment include: (1) the stamping accuracy of the stamping machine is limited; (2) the processing efficiency of the stamping machine is not high; (3) the process adjustment of the stamping equipment is more complicated. In the prior art micro-stamping machine tool, a Z-direction precision stamping mechanism is set on the conventional XY platform. In the Z-direction precision stamping mechanism, piezoelectric ceramic actuators and elastic devices are used to drive the micro-stamping head to process a m...

Examples

Embodiment Construction

[0027] The technical solutions of the present invention will be further described below in conjunction with the drawings and specific implementations.

[0028] A microstructure array precision processing machine tool with adaptive dynamic characteristics, comprising a Y-direction movement mechanism 1, an X-direction movement mechanism 2 and a Z-direction precision stamping mechanism 3. The X-direction movement mechanism 2 is fixed to a base through an X-direction bracket 201 101, the Z-direction precision stamping mechanism 3 is installed on the X-direction rail 203 of the X-direction movement mechanism 2 through the X&Z linkage platform 205 and the X&Z composite guide rail slider 206, and is mounted on the X-direction guide rail 203 of the X-direction movement mechanism 2 Driven to achieve X-direction movement;

[0029] The workpiece is placed on the Y-direction movement platform 105 of the Y-direction movement mechanism 1, and the Y-direction movement is realized by the Y-directi...