A visual inspection device and method for macro and micro motion platforms

Abstract

The invention discloses a visual detection device and method for a macro-micro motion platform, which solves the problem in the prior art that the high-precision and large-stroke detection of the macro-micro motion platform cannot be satisfied at the same time. By setting the adjustment platform, the micro-motion The platform is always within the field of view of the microscope to improve the detection accuracy; the technical solution is: including an air-floating platform as a support, a macro-micro motion platform is installed above the air-floating platform through an adjustment platform, and a CCD camera is fixed on one side of the adjustment platform. A microscope, the objective lens of the microscope corresponds to the top of the macro-micro motion platform; the movement of the macro-motion platform is compensated by controlling and adjusting the motion of the platform, so that the micro-motion platform is always within the field of view of the microscope.

Description

technical field

[0001] The invention relates to the technical field of precision positioning, in particular to a visual detection device and method for macro and micro motion platforms. Background technique

[0002] The macro and micro motion platform is an effective means to achieve large stroke and high precision. However, to achieve high-precision motion control, high-precision feedback is required. Conventional detection methods, such as grating rulers, are difficult to achieve high-precision detection in a large stroke range due to the limitation of sensor bandwidth, and there is an irreconcilable contradiction between stroke and precision. Although laser interferometers can achieve large strokes and high-precision measurements, they are expensive, difficult to meet general engineering needs, and are easily affected by the external environment. For example, when vibration occurs, the deflection of the beam affects the measurement accuracy.

[0003] Vision technology ...

Examples

Embodiment Construction

[0041] It should be pointed out that the following detailed description is exemplary and intended to provide further explanation to the present application. Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs.

[0042] It should be noted that the terminology used here is only for describing specific implementations, and is not intended to limit the exemplary implementations according to the present application. As used herein, unless the context clearly dictates otherwise, the singular is intended to include the plural, and it should also be understood that when the terms "comprising" and / or "comprising" are used in this specification, they mean There are features, steps, operations, means, components and / or combinations thereof.

[0043] As introduced in the background technology, there are deficiencies in the prior art that cannot satisfy t...

technical field

[0001] The invention relates to the technical field of precision positioning, in particular to a visual detection device and method for macro and micro motion platforms. Background technique

[0002] The macro and micro motion platform is an effective means to achieve large stroke and high precision. However, to achieve high-precision motion control, high-precision feedback is required. Conventional detection methods, such as grating rulers, are difficult to achieve high-precision detection in a large stroke range due to the limitation of sensor bandwidth, and there is an irreconcilable contradiction between stroke and precision. Although laser interferometers can achieve large strokes and high-precision measurements, they are expensive, difficult to meet general engineering needs, and are easily affected by the external environment. For example, when vibration occurs, the deflection of the beam affects the measurement accuracy.

[0003] Vision technology ...

Examples

Embodiment Construction

[0041] It should be pointed out that the following detailed description is exemplary and intended to provide further explanation to the present application. Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs.

[0042] It should be noted that the terminology used here is only for describing specific implementations, and is not intended to limit the exemplary implementations according to the present application. As used herein, unless the context clearly dictates otherwise, the singular is intended to include the plural, and it should also be understood that when the terms "comprising" and / or "comprising" are used in this specification, they mean There are features, steps, operations, means, components and / or combinations thereof.

[0043] As introduced in the background technology, there are deficiencies in the prior art that cannot satisfy t...

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