A vacuum pumping device and method for nuclear fusion device

Abstract

The present invention belongs to the field of nuclear fusion vacuum technology, and specifically relates to a vacuum pumping device and method for a nuclear fusion device, the device comprising a pipeline water cooling structure component, a multi-angle bellows compensation structure component, a vacuum measurement interface, a pumping pipeline, a sealing flange 1 and a sealing flange 2, wherein the sealing flange 1 is connected to one end of the pumping pipeline, the vacuum measurement interface, the pipeline water cooling structure component and the multi-angle bellows compensation structure component are fixedly connected to the outer wall of the pumping pipeline in sequence, and the other end of the pumping pipeline is connected to the sealing flange 2. The present invention can prevent the vacuum pumping equipment from leaking and damaging the vacuum equipment due to aging and failure of the sealing surface material caused by heat conduction and heat radiation during high-temperature baking of the vacuum chamber, and can compensate and correct the radial, lateral and polar angle deviations caused by welding deformation of the vacuum chamber window flange and the connecting pipeline within a certain range, so as to meet the installation accuracy requirements of the rear-end connecting equipment.

Description

Technical Field

[0001] The invention belongs to the field of nuclear fusion vacuum technology, and in particular relates to a vacuum pumping device and method for a nuclear fusion device. Background Art

[0002] In order to ensure long-term safe operation of future fusion devices, it is necessary to ensure that the vacuum chamber that generates and maintains plasma operation is an ultra-high vacuum environment with a vacuum degree of 10 -5 Pa level. The function of the vacuum pumping system is to provide a vacuum environment for the fusion reaction. Therefore, the system is required to operate safely and reliably during the fusion device experiment. At present, most fusion devices must be baked at a high temperature of more than 300 degrees before the experiment to remove residual moisture in the vacuum chamber wall, and the rubber sealing materials of the vacuum pumping equipment cannot work normally for a long time at high temperature; in addition, the vacuum chamber window and connecting pipes will cause a slight angle deviation during welding, which will affect the installation accuracy of the subsequent equipment. At present, large-scale nuclear fusion vacuum chamber pumping devices at home and abroad generally extend the length of the pumping pipe to increase the baking heat conduction distance and increase the heat dissipation area to protect the rubber sealing material from working within the normal working range. This method has high requirements for installation space and has the disadvantages of low pipe heat dissipation speed.

[0003] Therefore, it is necessary to provide a vacuum pumping device and method for a nuclear fusion device to solve the deficiencies in the prior art. Summary of the invention

[0004] The purpose of the present invention is to provide a vacuum pumping device and method for a nuclear fusion device in view of the deficiencies of the above-mentioned prior art, so as to solve the problems of vacuum pumping equipment leakage and damage due to aging and failure of sealing surface materials of vacuum pumping equipment caused by heat conduction and heat radiation during high-temperature baking of the vacuum chamber, and the radial, lateral and polar angular deviations caused by welding deformation of the vacuum chamber window flange and connecting pipeline can be compensated and corrected within a certain range, so as to meet the installation accuracy requirements of the back-end connecting equipment.

[0005] The technical solution of the present invention is:

[0006] A vacuum pumping device for a nuclear fusion device, the device comprises a pipeline water cooling structure component, a multi-angle bellows compensation structure component, a vacuum measurement interface, an exhaust pipeline, a sealing flange 1 and a sealing flange 2, wherein the sealing flange 1 is connected to one end of the exhaust pipeline, the vacuum measurement interface, the pipeline water cooling structure component and the multi-angle bellows compensation structure component are fixedly connected to the outer wall of the exhaust pipeline in sequence backwards, and the other end of the exhaust pipeline is connected to the sealing flange 2.

[0007] The pipeline water cooling structure component is made of 316L stainless steel material and is provided with three circles of water flow guide grooves inside.

[0008] A sealing quick-connection is welded on the pipeline water cooling structure component for the intake and outflow of cooling water.

[0009] The multi-angle bellows compensation structure assembly includes a bellows and an adjustable support link, which are respectively welded to the exhaust pipe. The support link is adjusted to stretch or compress the bellows, thereby performing angle compensation correction on the sealing flange 2 and the exhaust pipe.

[0010] The sealing flange is made of metal, one end of which is welded to the exhaust pipe, and the other end is sealed and connected to the vacuum exhaust equipment through fluororubber.

[0011] The second sealing flange is made of metal and is sealed and connected to the vacuum chamber.

[0012] The vacuum pumping method for a vacuum pumping device for a nuclear fusion device comprises the following steps:

[0013] Step (1) During the installation of the vacuum exhaust pipeline, the bellows is adjusted and the angle compensation is corrected by the supporting connecting rod in the multi-angle bellows compensation structure assembly;

[0014] Step (2) turning on the vacuum exhaust equipment, and during the baking process in the vacuum chamber, continuously introducing 0.2 MPa, 10 degree cooling water into the pipeline water cooling structure assembly until the baking process is completed;

[0015] Step (3) After the plasma physical discharge experiment is completed, the vacuum pumping equipment is turned off.

[0016] The present invention has the following beneficial effects:

[0017] (1) The present invention can prevent the vacuum equipment from leaking and being damaged due to aging and failure of the sealing surface material of the vacuum pumping equipment caused by heat conduction and heat radiation during high-temperature baking of the vacuum chamber.

[0018] (2) The present invention can compensate and correct the radial, lateral and polar angular deviations caused by welding deformation of the vacuum chamber window flange and the connecting pipe within a certain range, thereby meeting the installation accuracy requirements of the back-end connecting equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a schematic diagram of the structure of a vacuum pumping tool designed by the present invention and applied to a nuclear fusion device;

[0020] Among them: 1-pipe water cooling structure assembly; 2-multi-angle bellows compensation structure assembly; 3-vacuum measurement interface; 4-exhaust pipeline; 5-sealing flange one; 6-bellows; 7-support connecting rod; 8-sealing flange two; 9-sealing quick interface. DETAILED DESCRIPTION

[0021] The present invention is further described below in conjunction with the embodiments and drawings:

[0022] like Figure 1 As shown, the present invention provides a vacuum exhaust device for a nuclear fusion device, which includes a pipeline water cooling structure component 1, a multi-angle bellows compensation structure component 2, a vacuum measurement interface 3, an exhaust pipe 4, a sealing flange 1 5 and a sealing flange 2 8, wherein the sealing flange 1 5 is welded to one end of the exhaust pipe 4, the vacuum measurement interface 3, the pipeline water cooling structure component 1 and the multi-angle bellows compensation structure component 2 are welded to the outer wall of the exhaust pipe 4 in sequence, and the other end of the exhaust pipe 4 is welded to the sealing flange 2 8.

[0023] The sealing flange 5 is made of metal, one end of which is welded to the exhaust pipe 4, and the other end is sealed and connected to the vacuum exhaust equipment through fluororubber.

[0024] The sealing flange 2 8 is made of metal and is sealed to the vacuum chamber.

[0025] The pipeline water cooling structure component 1 is made of 316L stainless steel material and is provided with three circles of water flow guide grooves inside;

[0026] The multi-angle bellows compensation structure assembly 2 includes a highly elastic stainless steel bellows 6 and an adjustable supporting connecting rod 7 made of 316L stainless steel material.

[0027] When the sealing flange 8 and the exhaust pipe 4 are deformed due to welding or the vacuum chamber baking causes radial, lateral and polar angle deviations, the bellows 6 can be stretched or compressed by adjusting the position of the supporting connecting rod 7 to perform angle compensation correction, thereby meeting the installation accuracy requirements of the rear-end connection equipment and ensuring the normal operation of the vacuum equipment;

[0028] The cooling water is connected and discharged through the sealing quick joint 9.

[0029] At present, most fusion devices must be baked at a temperature of more than 300 degrees before conducting experiments to remove residual moisture in the vacuum chamber wall. The maximum working temperature of the equipment sealing material is 150 degrees. When the vacuum chamber is baked from room temperature to 300 degrees, no cooling water is introduced into the pipeline water cooling structure component 1. After the vacuum chamber baking temperature is maintained at 300 degrees for 72 hours, the temperature of the surface of the sealing flange 5 is 180 degrees, which exceeds the maximum working temperature of 150 degrees of the equipment sealing material.

[0030] For example, if 0.2MPa, 10-degree cooling water is continuously introduced at the beginning of baking, and the baking temperature in the vacuum chamber is maintained at 300 degrees for 72 hours, the temperature on the surface of the sealing flange 5 is 80 degrees, which is lower than the 150-degree maximum working temperature of the equipment sealing material, thereby achieving the purpose of protecting the safe operation of the rear-end connected vacuum equipment.

[0031] The present invention also provides a vacuum pumping method for a vacuum pumping device of a nuclear fusion device, the method comprising the following steps:

[0032] Step (1) During the installation of the vacuum exhaust pipe 4, the bellows 6 is adjusted and the angle compensation is corrected by the supporting connecting rod 7 in the multi-angle bellows compensation structure assembly 2;

[0033] Step (2) During the baking process in the vacuum chamber, 0.2 MPa, 10 degree cooling water is continuously introduced into the pipeline water cooling structure component 1 until the baking process is completed;

[0034] Step (3) After the plasma physical discharge experiment is completed, the vacuum pumping equipment is turned off.

[0035] The present invention is described in detail above in conjunction with the embodiments, but the present invention is not limited to the above embodiments, and various changes can be made within the knowledge of ordinary technicians in the field without departing from the purpose of the present invention. The contents not described in detail in the present invention can adopt the existing technology.

Claims

1. A vacuum pumping device for a nuclear fusion device, characterized in that: The device comprises a pipeline water cooling structure component (1), a multi-angle bellows compensation structure component (2), a vacuum measurement interface (3), an exhaust pipeline (4), a sealing flange 1 (5) and a sealing flange 2 (8), wherein the sealing flange 1 (5) is connected to one end of the exhaust pipeline (4), the vacuum measurement interface (3), the pipeline water cooling structure component (1) and the multi-angle bellows compensation structure component (2) are fixedly connected to the outer wall of the exhaust pipeline (4) in sequence in a rearward direction, and the other end of the exhaust pipeline (4) is connected to the sealing flange 2 (8); The pipeline water cooling structure component (1) is made of 316L stainless steel material and is provided with three circles of water flow guide grooves inside; The pipeline water cooling structure assembly (1) is welded with a sealing quick-connection (9) for the intake and outflow of cooling water; The multi-angle bellows compensation structural assembly (2) comprises a bellows (6) and an adjustable supporting connecting rod (7), wherein the bellows (6) and the adjustable supporting connecting rod (7) are respectively welded to the exhaust pipe (4), and the supporting connecting rod (7) is adjusted to stretch or compress the bellows (6), thereby performing angle compensation correction on the sealing flange 2 (8) and the exhaust pipe (4).

2. A vacuum pumping device for a nuclear fusion device according to claim 1, characterized in that: The sealing flange 1 (5) is made of metal, one end of which is welded to the exhaust pipe (4), and the other end is sealed and connected to the vacuum exhaust equipment through fluororubber.

3. A vacuum pumping device for a nuclear fusion device according to claim 2, characterized in that: The sealing flange 2 (8) is made of metal and is sealed to the vacuum chamber.

4. A vacuum pumping method for a vacuum pumping device for a nuclear fusion device according to claim 3, characterized in that: The method comprises the following steps: Step (1) During the installation of the vacuum exhaust pipe (4), the bellows (6) is adjusted and the angle compensation is corrected by the supporting connecting rod (7) in the multi-angle bellows compensation structure assembly (2); Step (2) turning on the vacuum exhaust equipment, and during the baking process in the vacuum chamber, continuously introducing 0.2 MPa, 10 degree cooling water into the pipeline water cooling structure component (1) until the baking process is completed; Step (3) After the plasma physical discharge experiment is completed, the vacuum pumping equipment is turned off.

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