Protective member forming method and protective member forming apparatus

By using a combination of resin film and liquid resin on the front of the substrate, the problem of uneven expansion of the liquid resin caused by the unevenness of the substrate is solved, and stable support and high-quality protection of the substrate during the grinding process are achieved.

CN112349606BActive Publication Date: 2025-10-17DISCO CORP
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Patent Information

Application Number
CN202010782702.5
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Priority Date
2019-08-07
Filing Date
2020-08-06
Publication Date
2025-10-17
Estimated Expiration
2040-08-06

AI Technical Summary

Technical Problem

When the front surface of the substrate has unevenness, it is difficult to evenly spread the liquid resin in the existing technology, resulting in unstable fixation of the protective component, affecting the substrate support during the grinding process and generating uneven residue.

Method used

A resin film is used to cover the front of the substrate, and the pressure is reduced by the exhaust part to make the resin film and the substrate close together. After providing liquid resin, it is expanded and hardened using a flat pressing surface to form a protective component including the resin film, liquid resin and covering film.

Benefits of technology

It effectively inhibits the uneven expansion of liquid resin, ensures stable support of the substrate during the grinding process, avoids concave and convex residues, and improves grinding quality.

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Abstract

Provided are a protective member forming method and a protective member forming apparatus that suppress generation of unevenness of a liquid resin when forming a protective member containing a hardened liquid resin on a front surface of a substrate having a concavo-convex on the front surface. The protective member forming method of forming a protective member on a front surface of a substrate having a concavo-convex on the front surface includes: a resin film close contact step of covering the front surface of the substrate with a resin film so that the resin film is close contacted with the substrate in imitation of the concavo-convex of the front surface of the substrate; a liquid resin supply step of supplying a liquid resin capable of being hardened to an area of an upper surface of the resin film close contacted with the substrate that overlaps the substrate; a pressing step of pressing the liquid resin with a flat pressing surface through a cover film so that the liquid resin spreads on the resin film; and a hardening step of hardening the liquid resin spread on the resin film in the pressing step, thereby forming the protective member containing the resin film, the hardened liquid resin, and the cover film on the front surface of the substrate.
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