A multi-field coupling material processing device

Abstract

The present application discloses a multi-field coupling material processing device, including: a processing cavity, the processing cavity having a processing inner cavity; a material storage part for storing materials to be processed and capable of entering and exiting the processing cavity; a force application system capable of applying pressure to the materials to be processed located in the processing inner cavity; a temperature system capable of heating the materials to be processed located in the processing inner cavity so that the materials to be processed have different temperatures; an electric field system capable of applying an electric field to the materials to be processed located in the processing inner cavity; an atmosphere system capable of changing the atmosphere state of the processing inner cavity so that the materials to be processed located in the processing inner cavity are in different atmosphere environments. The above-mentioned multi-field coupling material processing device can simultaneously apply multiple physical fields to the materials to be processed during the processing process, thereby avoiding the transfer of the materials to be processed between different devices and improving the yield and performance of the product.

Description

Technical Field

[0001] The invention relates to the technical field of material processing and synthesis, and in particular to a multi-field coupling material processing device. Background Art

[0002] In recent years, with the progress of materials science, more and more organic polymer materials have been synthesized and applied, and the synthesis and processing routes have also become diversified. For example, PVDF (polyvinylidene fluoride) is widely used in flexible piezoelectric sensing, bionics and other fields. When processing PVDF, powder is usually synthesized first, and then a dense crystalline film is synthesized by hot pressing, thermal evaporation, casting and other means. If you want to obtain a PVDF film with piezoelectric properties, you need to continue to stretch, quench, polarize and other treatments on the film, which is a relatively cumbersome step.

[0003] However, existing material synthesis equipment cannot apply multiple physical fields to the material at the same time. Most processing equipment is a single field control device, such as only heating or only applying an electric field. As a result, the product needs to be repeatedly transferred between different devices during the processing, causing the raw materials to be oxidized and contaminated, and to have surface or internal defects, resulting in reduced yield and performance degradation. Summary of the invention

[0004] In view of this, the present invention provides a multi-field coupling material processing device, which can simultaneously apply multiple physical fields to the material to be processed during the processing process, avoiding the transfer of the material to be processed between different devices and improving the yield and performance of the product.

[0005] In order to achieve the above object, the present invention provides the following technical solutions:

[0006] A multi-field coupling material processing device, comprising:

[0007] A processing cavity, wherein the processing cavity has a processing inner cavity;

[0008] A material storage part used for storing materials to be processed and capable of entering and exiting the processing cavity;

[0009] A force application system capable of applying pressure to the material to be processed located in the processing inner cavity;

[0010] A temperature system capable of heating the material to be processed in the processing inner cavity so that the material to be processed has different temperatures;

[0011] An electric field system capable of applying an electric field to the material to be processed located in the processing cavity;

[0012] An atmosphere system capable of changing the atmosphere state of the processing inner chamber so that the material to be processed located in the processing inner chamber is in a different atmosphere environment.

[0013] Preferably, in the above-mentioned multi-field coupling material processing device, the processing chamber is a pressure-resistant chamber, and the processing chamber has at least a transparent portion.

[0014] Preferably, in the above-mentioned multi-field coupling material processing device, the processing chamber is provided with an access window allowing the material storage member to enter and exit, and the access window is provided with an operating door capable of realizing the opening and sealing closure of the access window.

[0015] Preferably, in the above-mentioned multi-field coupling material processing device, the force application system includes a hydraulic force application component and a hydraulic controller, wherein:

[0016] The hydraulic force application assembly includes: a hydraulic drive component disposed in the processing inner cavity; a pressure head connected to the hydraulic drive component, and the pressure head can apply pressure to the material to be processed in the material storage member under the drive of the hydraulic drive component;

[0017] The hydraulic controller is arranged outside the processing chamber and controls the hydraulic driving component through a hydraulic control wire.

[0018] Preferably, in the above-mentioned multi-field coupling material processing device, the hydraulic drive component is arranged on the top wall of the processing cavity, or is arranged on a bracket located in the processing inner cavity, and the bracket is arranged on the bottom wall of the processing cavity.

[0019] Preferably, in the above-mentioned multi-field coupling material processing device, the temperature system includes an electric heating component and a temperature controller, wherein:

[0020] The electric heating component is located in the processing inner cavity and is arranged in the material storage part to heat the material to be processed stored in the material storage part;

[0021] The temperature controller is arranged outside the processing chamber and controls the electric heating component through a temperature control wire.

[0022] Preferably, in the above-mentioned multi-field coupling material processing device, the electric field system includes an electrode assembly and a high voltage generator, wherein:

[0023] The electrode assembly is arranged in the processing inner cavity and includes the pressure head and the material storage member which serve as different electrodes respectively, so that the material to be processed is located in the electric field formed between the pressure head and the material storage member;

[0024] The high voltage generator is arranged outside the processing chamber and provides electric energy to the pressure head and the material storage member through an electric conductor.

[0025] Preferably, in the above-mentioned multi-field coupling material processing device, the atmosphere system includes a vacuum pumping system, and the vacuum pumping system includes a vacuum pumping component arranged outside the processing chamber, and a vacuum pumping pipe connecting the vacuum pumping component and the processing inner cavity.

[0026] Preferably, in the above-mentioned multi-field coupling material processing device, the atmosphere system includes a ventilation system, and the ventilation system includes a ventilation component arranged outside the processing chamber, and a ventilation duct connecting the vacuum pumping component and the processing inner cavity.

[0027] Preferably, in the above-mentioned multi-field coupling material processing device, the hydraulic control wire, the temperature control wire, the electrical wire, the vacuum pipe and the ventilation pipe are all sealed and connected to the cavity wall of the processing cavity.

[0028] The multi-field coupling material processing device provided by the present invention has the following advantages:

[0029] 1. The superposition of more than three controllable physical fields has been achieved, specifically, the synchronous regulation of pressure, temperature, electric field and atmosphere has been achieved, which can meet multiple general process conditions at one time and is more suitable for experimental research;

[0030] 2. All physical fields are superimposed in situ in the same cavity. The materials to be processed do not need to be repeatedly transferred and placed, which greatly avoids the oxidation, contamination and repetition of the process of the materials to be processed, reduces the number of internal defects of the materials, and improves the yield and performance of the products. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without paying creative work.

[0032] Figure 1 A schematic structural diagram of a multi-field coupling material processing device provided by an embodiment of the present invention;

[0033] Figure 2 The surface potential decay curve of PTFE electret film treated at different times and temperatures.

[0034] exist Figure 1 middle:

[0035] 1-processing chamber, 2-material storage, 3-operating door, 4-hydraulic drive component, 5-pressure head, 6-hydraulic control wire, 7-hydraulic and temperature control components, 8-high voltage generator, 9-electric wire, 10-vacuum assembly, 11-vacuum pipeline, 12-ventilation assembly, 13-ventilation pipeline. DETAILED DESCRIPTION

[0036] The present invention provides a multi-field coupling material processing device, which can simultaneously apply multiple physical fields to a material to be processed during the processing process, thereby avoiding the transfer of the material to be processed between different devices and improving the yield and performance of the product.

[0037] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0038] like Figure 1 As shown, an embodiment of the present invention provides a multi-field coupling material processing device for synthesizing and processing organic polymer materials. The multi-field coupling material processing device mainly includes a processing chamber 1, a material storage member 2, a force application system, a temperature system, an electric field system and an atmosphere system, wherein: the processing chamber 1 is a component with a processing inner cavity, which is used to accommodate the material storage member 2 and the hydraulic force application component and the electric heating component described later, and provide a vacuum environment or a specific atmosphere for the material to be processed; the material storage member 2 is a component for temporarily storing the material to be processed during the processing, and its structure is preferably Figure 1 The groove structure shown in the figure works in coordination with the force application system, the temperature system and the electric field system. The material storage part 2 is preferably capable of bearing pressure, conducting electricity and conducting heat (the reason why the material storage part 2 has conducting and conducting properties is because in the following content, the material storage part 2 needs to be used as the electrode of the electrode assembly and the bearing part of the electric heating component), and the material is preferably an alloy material with good conductivity, non-corrosiveness and good pressure resistance; the force application system can apply pressure to the material to be processed located in the processing cavity; the temperature system can heat the material to be processed located in the processing cavity, so that the material to be processed can have different temperatures according to different processing techniques; the electric field system can apply an electric field to the material to be processed located in the processing cavity, so that the material to be processed can be located in the electric field; the atmosphere system can change the atmosphere state of the processing cavity, so that the material to be processed located in the processing cavity can be in different atmosphere environments according to different processing techniques.

[0039] The above-mentioned multi-field coupling material processing device can simultaneously apply force field, electric field, temperature field and change the atmosphere during the preparation of organic polymer materials, so that it can be used to process and prepare thin film materials with piezoelectric effect, ferroelectric effect, electret effect and low dielectric loss, providing solutions and equipment support for solid-phase and liquid-phase synthesis of materials, and realizing the in-situ superposition of four physical fields in the same cavity. The materials to be processed do not need to be repeatedly transferred and placed between different equipment, which greatly avoids the oxidation and contamination of raw materials and repeated processes, reduces the number of internal defects of the materials, and improves the yield and performance of the products.

[0040] Specifically, the processing chamber 1 in this embodiment is a pressure-resistant chamber, and the processing chamber 1 has at least a transparent part, that is, the processing chamber 1 has a transparent part or is completely transparent, so that the operator can better observe and control the processing process outside the processing chamber 1. The material of the working chamber is first preferably borosilicate glass or quartz, which has the characteristics of strong pressure resistance, good pressure retention performance, high transparency, and good observability, and can better meet the working requirements of the processing chamber 1. The material of the working chamber is secondly preferably aluminum alloy, titanium alloy or other opaque alloy materials.

[0041] like Figure 1 As shown, the processing chamber 1 is provided with an access window that allows the material storage member 2 to enter and exit, and the access window is provided with an operating door 3 that can realize the opening and sealing closure of the access window. That is, the operating door 3 is embedded in the processing chamber 1, and the access window and the operating door 3 are provided to facilitate the taking and placing of the material storage member 2 and the observation of the internal situation of the processing chamber 1, so the size of the access window needs to allow the material storage member 2 to pass. The material of the operating door 3 is first preferably a high-strength transparent material, such as borosilicate glass, quartz, organic glass, etc., and secondly preferably an alloy flange with an observation window. In addition, in order to ensure the sealing of the processing chamber 1, it is necessary to wrap a rubber material around the opening edge of the access window or the operating door 3 to ensure that it can be sealed and closed.

[0042] Preferably, Figure 1As shown, the force application system includes a hydraulic force application component and a hydraulic controller, wherein the hydraulic force application component includes: a hydraulic drive component 4 arranged in the processing cavity; a pressure head 5 connected to the hydraulic drive component 4, and the pressure head 5 can apply pressure to the material to be processed in the material storage part 2 under the drive of the hydraulic drive component 4. In addition, the hydraulic controller is arranged outside the processing cavity 1, and controls the hydraulic drive component 4 through the electrical connection of the hydraulic control wire 6. In this structure, the hydraulic drive component 4 can be a hydraulic cylinder, and the pressure head 5 can be fixed to the end of the piston rod of the hydraulic cylinder by rivets or threads. The material of the pressure head 5 is an alloy material with good conductivity (because the pressure head 5 also needs to be used as an electrode of the electrode assembly described later, so it needs to have good conductivity), corrosion-resistant, and good pressure resistance. Its shape can be set according to the requirements of material processing. For example, the pressure head 5 can be designed to be a cuboid, a cylinder, a truncated cone or a hemisphere.

[0043] Specifically, Figure 1 As shown, the hydraulic drive component 4 is arranged on the top wall of the processing chamber 1. Alternatively, it is arranged on a bracket located in the processing inner cavity, and the bracket is arranged on the bottom wall of the processing chamber 1 (this arrangement is not shown in the figure). That is, under the premise that the processing chamber 1 has sufficient strength, in order to simplify the structure, the hydraulic drive component 4 can be directly arranged on the top wall of the processing chamber 1; in addition, considering the stability of the equipment, the hydraulic drive component 4 can also be fixed to the bottom of the processing chamber 1 through a bracket. In this embodiment, it is preferred that the hydraulic drive component 4 can at least enable the pressure head 5 to apply a pressure of 200KG to the material to be processed.

[0044] like Figure 1 As shown, the temperature system includes an electric heating component and a temperature controller, wherein: the electric heating component is located in the processing cavity, and is arranged in the material storage part 2 to heat the material to be processed stored in the material storage part 2; the temperature controller is arranged outside the processing cavity 1, and controls the electric heating component through the temperature control wire. Specifically, a accommodating space is arranged at the bottom of the material storage part 2, and the electric heating component is arranged in the accommodating space. When the electric heating component is powered on to generate heat, it can directly heat the material storage part 2, thereby allowing the material to be processed stored in the material storage part 2 to be fully heated. This arrangement can improve the heating efficiency of the material to be processed. In addition, the electric heating component is, for example, a resistance wire, an electric heating tube, etc.

[0045] In addition, in order to simplify the structure, the hydraulic controller and the temperature controller are integrated into one to form a hydraulic and temperature control assembly 7, such as Figure 1 This hydraulic and temperature control component 7 can comprehensively control the pressure and position of the hydraulic cylinder and the pressure head 5 and the heating temperature of the electric heating component inside the storage part 2, and provide electric energy to the hydraulic force application component and the electric heating component.

[0046] like Figure 1 As shown, the electric field system includes an electrode assembly and a high-voltage generator 8, wherein: the electrode assembly is arranged in the processing cavity, and includes a pressure head 5 and a material storage piece 2 as different electrodes, so that the material to be processed is located in the electric field formed between the pressure head 5 and the material storage piece 2; the high-voltage generator 8 is arranged outside the processing cavity 1, and provides electric energy to the pressure head 5 and the material storage piece 2 through an electric conductor 9. In order to simplify the structure, and also to better apply an electric field to the material to be processed, the present embodiment preferably directly uses the existing pressure head 5 and the material storage piece 2 as positive and negative electrodes respectively, and the function of the adjustable high-voltage generator 8 is to apply a variable AC and DC electric field during material processing, wherein the voltage range of AC and DC is between 100V-50KV, and the frequency of AC should be greater than 1HZ. The electric conductor 9 electrically connected to the high-voltage generator 8 needs to select a high-voltage resistant shielded wire, and the positive and negative electrodes of the high-voltage generator 8 are respectively connected to the pressure head 5 and the material storage piece 2 through a clamp. In addition, for the personal safety of the operator, the power of the high voltage generator 8 in this embodiment is preferably less than 50W, with grounding and logic protection functions, and the power is cut off when the operating door 3 is opened. As for the supply of AC and DC, it can be flexibly adjusted according to the experimental conditions, for example: AC or DC polarization is used when polarizing piezoelectric materials, and DC corona discharge is used when making electret materials.

[0047] like Figure 1 As shown, the atmosphere system includes a vacuum system, which includes a vacuum assembly 10 disposed outside the processing chamber 1, and a vacuum pipe 11 connecting the vacuum assembly 10 and the processing inner chamber. Specifically, when the vacuum degree of the processing inner chamber is required to be in a relatively low range, the vacuum assembly 10 may only include a mechanical pump, and when the vacuum degree of the processing inner chamber is required to be in a relatively high range, the vacuum assembly 10 may be composed of a mechanical pump, a molecular pump, and an ionization vacuum gauge. The vacuum pipe 11 is preferably a vacuum bellows, and preferably can provide 10 vacuum to the processing inner chamber through the vacuum of the vacuum assembly 10. -1 Pa vacuum environment.

[0048] In addition, if Figure 1 As shown, the atmosphere system also includes a ventilation system, which includes a ventilation component 12 arranged outside the processing chamber 1, and a ventilation pipe 13 connecting the vacuum pump component 10 and the processing inner cavity. The ventilation component 12 can provide a specific atmosphere to the processing inner cavity, for example, it can provide common experimental gases such as air, oxygen, nitrogen or helium to the processing inner cavity, and control the opening and closing of the ventilation pipe 13 and the gas flow rate inside it through a flow meter and a switch valve.

[0049] In addition, in order to ensure the sealing performance of the processing chamber 1, the hydraulic control wire 6, temperature control wire, electric wire 9, vacuum pipe 11 and ventilation pipe 13 are all sealed and connected to the wall of the processing chamber 1. That is, the through holes reserved on the chamber for the wires and pipes to enter and exit need to be filled with rubber seals to ensure that there are gaps between the through holes and the wires and pipes.

[0050] Specifically, the process of processing organic polymer materials using the above-mentioned multi-field coupling material processing device is as follows:

[0051] Example 1

[0052] Hot electret treatment of PTFE film

[0053] The operation process is:

[0054] 1. Take the material storage part 2 out of the processing chamber 1, cut the PTFE film into the same size as the bottom wall of the groove of the material storage part 2, and evenly spread it on the bottom wall of the groove;

[0055] 2. Open the operating door 3, put the material storage piece 2 into the processing cavity and make it below the pressure head 5, and align the pressure head 5 with the center of the PTFE film. At the same time, ensure that the electric heating component is tightly embedded in the material storage piece 2, and check whether the positive and negative electrodes of the high-voltage generator 8 are connected to the pressure head 5 and the material storage piece 2 respectively;

[0056] 3. Close the operating door 3, turn on the mechanical pump of the vacuum system, and vacuum the inner cavity of the processing;

[0057] 4. After the mechanical pump has been running for 3 minutes, turn off the mechanical pump, open the ventilation system, and inject pure oxygen into the processing cavity. When the pressure in the processing cavity is close to atmospheric pressure, stop oxygen delivery;

[0058] Fifth, open the hydraulic and temperature control assembly 7, and control the pressure head 5 to stop at 0.5 cm-1 cm from the surface of the PTFE film, but do not apply pressure, and at the same time, the electric heating component heats the storage member 2 to 150° C. and keeps it warm;

[0059] 6. Turn on the adjustable high voltage generator 8 and select the DC high voltage mode, and adjust the voltage of the high voltage generator 8 from low to high until the voltage increases to the highest voltage value that does not break down the film;

[0060] 7. After maintaining the above voltage and temperature for 1 hour, stop heating without removing the electric field, wait for the storage member 2 to cool to room temperature and then turn off the adjustable high voltage generator 8;

[0061] 8. Open the ventilation system and introduce nitrogen into the processing cavity to the standard atmospheric pressure, then stop introducing nitrogen. After the temperature of the storage piece 2 has dropped to room temperature and the high-voltage generator 8 has been powered off, open the operating door 3 and take out the storage piece 2 and the material inside it.

[0062] The electret film material treated with the above-mentioned thermal electret treatment can have a higher surface potential and a longer electrical storage time than the electret material treated at room temperature. Figure 2 The attenuation of surface potential of PTFE electret film treated at different times and temperatures.

[0063] Example 2

[0064] Synthesis of PVDF films with high crystallinity and high piezoelectric coefficient

[0065] The operation process is:

[0066] 1. Weigh 2g PVDF powder and 10ml ethanol, mix them evenly in a beaker and stir for 15 minutes;

[0067] 2. Pour the mixture of PVDF and ethanol into the storage part 2, fix it with a clamp and put it into a shaker, and shake it at a frequency of 100 rpm for 15 minutes;

[0068] 3. Open the operating door 3, put the material storage piece 2 into the processing cavity and make it under the pressure head 5, and align the pressure head 5 with the center of the PVDF film. At the same time, ensure that the electric heating component is tightly embedded in the material storage piece 2, and check whether the positive and negative electrodes of the high-voltage generator 8 are connected to the pressure head 5 and the material storage piece 2 respectively;

[0069] 4. Close the operating door 3, turn on the mechanical pump of the vacuum system, vacuum the inner cavity, and keep the mechanical pump turned on during the preparation process;

[0070] 5. Turn on the temperature controller and let the electric heating component heat the storage part 2 to raise the temperature of the storage part 2 to 50-60°C. Observe that the ethanol in the storage part 2 gradually decreases until it is completely evaporated, and the PVDF powder forms a uniform thin layer with a thickness of about 500μm in the storage part 2;

[0071] 6. Control the pressure head 5 to descend through the hydraulic controller to pressurize the PVDF powder. The average pressure needs to be higher than 1.5 MPa. Meanwhile, continue to heat the storage part 2 to raise its temperature to 190°C.

[0072] 7. Turn on the adjustable high voltage generator 8, gradually increase the output voltage to 20KV, and confirm that there is no direct air breakdown discharge or material breakdown discharge between the two electrodes;

[0073] 8. After heating the storage part 2 for 30 minutes, cool it down to 70°C, continue to maintain the temperature, pressure and electric field for 1 hour, and then stop keeping warm until the storage part 2 cools down to room temperature;

[0074] 9. Turn off the adjustable high-voltage generator 8, raise the pressure head 5, turn off the mechanical pump, open the ventilation system to introduce nitrogen into the processing cavity to the standard atmospheric pressure, then stop introducing nitrogen. After the temperature of the storage part 2 has dropped to room temperature and the high-voltage generator 8 has been powered off, open the operating door 3 and take out the storage part 2 and the material inside it.

[0075] Finally, the parts of the material with relatively complete crystallization retained after cutting and processing were washed with ethanol and coated with metal film on both sides. The piezoelectric performance of the coated PVDF composite piezoelectric material was tested, and the piezoelectric constant d33=32PC / N was obtained, which is 20% higher than the performance of products manufactured by the same single-step process flow.

[0076] In this specification, each part of the structure is described in a progressive manner, and the structure of each part focuses on the differences from the existing structure. The overall and partial structures of the multi-field coupling material processing device can be obtained by combining the structures of the above multiple parts.

[0077] The above description of the disclosed embodiments enables one skilled in the art to implement or use the present invention. Various modifications to these embodiments will be apparent to one skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but rather to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A multi-field coupling material processing device, characterized in that: Capable of preparing organic polymer materials into thin film materials, including: A processing cavity, wherein the processing cavity has a processing inner cavity; A material storage part used for storing materials to be processed and capable of entering and exiting the processing cavity; A force application system capable of applying pressure to the material to be processed located in the processing inner cavity; A temperature system capable of heating the material to be processed in the processing inner cavity so that the material to be processed has different temperatures; An electric field system capable of applying an electric field to the material to be processed located in the processing cavity; An atmosphere system capable of changing the atmosphere state of the processing inner cavity so that the material to be processed located in the processing inner cavity is in a different atmosphere environment; The force application system includes a hydraulic force application component and a hydraulic controller, wherein: the hydraulic force application component includes: a hydraulic drive component arranged in the processing cavity; a pressure head connected to the hydraulic drive component, and the pressure head can apply pressure to the material to be processed in the material storage part under the drive of the hydraulic drive component; the hydraulic controller is arranged outside the processing cavity and controls the hydraulic drive component through a hydraulic control wire; The electric field system includes an electrode assembly and a high-voltage generator, wherein: the electrode assembly is arranged in the processing cavity, and includes the pressure head and the storage piece which serve as different electrodes respectively, so that the material to be processed is located in the electric field formed between the pressure head and the storage piece; the high-voltage generator is arranged outside the processing cavity, and provides electrical energy to the pressure head and the storage piece through an electrical conductor.

2. The multi-field coupling material processing device according to claim 1, characterized in that: The processing chamber is a pressure-resistant chamber, and the processing chamber has at least a transparent portion.

3. The multi-field coupling material processing device according to claim 1, characterized in that: The processing cavity is provided with an inlet and outlet window for allowing the material storage member to enter and exit, and the inlet and outlet window is provided with an operating door capable of realizing the opening and sealing closure of the inlet and outlet window.

4. The multi-field coupling material processing device according to claim 1, characterized in that: The hydraulic drive component is arranged on the top wall of the processing cavity, or is arranged on a bracket located in the processing inner cavity, and the bracket is arranged on the bottom wall of the processing cavity.

5. The multi-field coupling material processing device according to claim 1, characterized in that: The temperature system comprises an electric heating component and a temperature controller, wherein: The electric heating component is located in the processing inner cavity and is arranged in the material storage part to heat the material to be processed stored in the material storage part; The temperature controller is arranged outside the processing chamber and controls the electric heating component through a temperature control wire.

6. The multi-field coupling material processing device according to claim 1, characterized in that: The atmosphere system includes a vacuum pumping system, and the vacuum pumping system includes a vacuum pumping component arranged outside the processing chamber, and a vacuum pumping pipeline connecting the vacuum pumping component and the processing inner cavity.

7. The multi-field coupling material processing device according to claim 1, characterized in that: The atmosphere system includes a ventilation system, and the ventilation system includes a ventilation component arranged outside the processing chamber, and a ventilation pipeline connecting the ventilation component and the processing inner chamber.

8. The multi-field coupling material processing device according to claim 1, characterized in that: The hydraulic control wire, the temperature control wire, the electric wire, the vacuum pipe and the ventilation pipe are all sealed and connected with the cavity wall of the processing cavity.

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