Workpiece holding mechanism and processing device

CN113707592BActive Publication Date: 2026-07-24DISCO CORP
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
DISCO CORP
Filing Date
2021-05-14
Publication Date
2026-07-24

AI Technical Summary

Technical Problem

In the prior art, when using adhesive tape to hold plate-shaped workpieces, there are problems such as high cost and difficulty in properly holding miniaturized chips, and magnetic covers are prone to causing the workpieces to be attracted and difficult to remove.

Method used

Employing a holding base and release component with magnets, and by setting concave and convex structures or a peeling accelerator layer on the cover plate, combined with a fluid supply and an ejector, the workpiece is held by magnetic force and easily removed by fluid expansion and negative pressure.

Benefits of technology

It enables proper holding and easy removal of the workpiece, reduces costs, and improves the applicability and operational efficiency of the holding mechanism.

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Abstract

The present invention provides a workpiece holding mechanism and a processing device that enable proper holding and easy removal of a workpiece. The workpiece holding mechanism has a holding base having a holding surface corresponding in shape and size to a workpiece containing a material exhibiting strong magnetism; a magnet provided to the holding surface of the holding base to generate an attractive force between the magnet and the workpiece; and a release member that applies a force in a direction away from the holding surface to the workpiece held on the holding surface side of the holding base by the attractive force generated between the magnet and the workpiece, the release member having a cover sheet that covers the holding surface and a fluid supply portion that supplies a fluid between the holding surface and the cover sheet, and on the side of the cover sheet opposite the holding surface, a concave-convex structure that inhibits adsorption of the workpiece to the cover sheet or a layer containing a release promoter that facilitates peeling of the workpiece from the cover sheet is provided.
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