Cutting device

Abstract

This invention provides a cutting device that easily solves the problem caused by aluminum adhering to a mounting base. The cutting device includes: a chuck table for holding the workpiece; and a cutting unit for cutting the workpiece, the cutting unit being equipped with a hub cutter, the hub cutter having an annular abrasive fixed to the outer periphery of an annular base having a central opening; the cutting unit also includes: a spindle; a mounting base fixed to the front end of the spindle, having an annular connecting surface centered on the spindle's axis and an external thread at the front end; an annular mounting seat connected to the connecting surface of the mounting base, having an annular support surface supporting one side of the annular base of the hub cutter; a connecting mechanism connecting the annular mounting seat to the connecting surface; and a nut engaged with the external thread of the mounting base.

Description

Technical Field

[0001] This invention relates to a cutting device. Background Technology

[0002] As disclosed in Patent Documents 1, 2 and 3, in a cutting apparatus, a hub cutter is fixed to the front end of a spindle, and the hub cutter, which rotates by rotating the spindle, is used to cut a wafer held on a chuck table.

[0003] Regarding the wheel hub cutting tool, after electrodepositing the abrasive onto the outer periphery of the annular aluminum substrate, the outer periphery of the aluminum substrate is removed, leaving only the abrasive to form the annular abrasive. Therefore, no coating or other processing is performed on the aluminum substrate.

[0004] Furthermore, when mounting the hub cutter onto the spindle, the hub cutter is positioned on the mounting base fixed to the front end of the spindle, and the nut is screwed into the front end of the mounting base, thereby using the nut and the mounting base to clamp and fix the aluminum base.

[0005] Patent Document 1: Japanese Patent Application Publication No. 2019-150906

[0006] Patent Document 2: Japanese Patent Application Publication No. 2000-190155

[0007] Patent Document 3: Japanese Patent Application Publication No. 2000-061804

[0008] Sometimes, aluminum adheres to the mounting base due to the installation of hub tools. When other cutting tools are mounted on the mounting base with aluminum adhering to it, the following problem occurs: the cutting tools become eccentric and rotate in this state, resulting in a larger kerf width formed on the wafer during cutting.

[0009] Therefore, an end-face correction method is implemented to remove aluminum by grinding the support surface of the mounting base using an abrasive. This end-face correction involves several steps: mounting the abrasive for grinding the support surface of the mounting base on the chuck table, moving the spindle in the axial direction, bringing the support surface of the mounting base into contact with the abrasive, and moving the mounting base and the abrasive relative to each other in a direction parallel to the support surface. Therefore, this method is time-consuming. Summary of the Invention

[0010] Therefore, the object of the present invention is to provide a cutting device that can easily solve the problems caused by aluminum adhering to the mounting base.

[0011] According to one aspect of the present invention, a cutting device is provided, comprising: a chuck table for holding a workpiece; and a cutting unit for cutting the workpiece, the cutting unit being equipped with a hub cutter having an annular abrasive fixed on the outer periphery of an annular base, the annular base having an opening at the center; the cutting unit comprising: a spindle; a mounting base fixed to the front end of the spindle, having an annular connecting surface centered on the axis of the spindle and an external thread at the front end; an annular mounting seat connected to the connecting surface of the mounting base, having an annular support surface supporting one side of the annular base of the hub cutter; a connecting mechanism connecting the annular mounting seat to the connecting surface; and a nut screwed into the external thread of the mounting base, the nut screwed into the external thread and the annular mounting seat clamping and fixing the annular base of the hub cutter by means of the nut screwed into the external thread and the annular mounting seat.

[0012] Preferably, the connecting mechanism comprises: a pin including a neck and a head, the neck protruding from the connecting surface of the mounting base along the axis of the main shaft, the head being formed at the front end of the neck; a hole formed in the ring mounting for the head of the pin to be inserted; and an arc-shaped elongated hole connected to the hole in the direction of rotation and formed with a width smaller than the diameter of the hole. When the pin is inserted into the hole, the elongated hole allows the ring mounting and the mounting base to rotate relative to each other about the axis of the main shaft. Inserting the pin into the hole formed in the ring mounting causes the ring mounting and the mounting base to rotate relative to each other, thereby enabling the connection between the mounting base and the ring mounting.

[0013] Alternatively, the connecting mechanism preferably includes: a magnet disposed on one of the ring mounting base or the mounting base platform; and a magnetic body disposed on the side of the ring mounting base or the mounting base platform where the magnet is not disposed, thereby connecting the ring mounting base and the mounting base platform by magnetic force.

[0014] In addition, the connecting mechanism preferably has magnets disposed on both sides of the ring mounting base and the mounting base platform, so as to connect the ring mounting base and the mounting base platform by magnetic force.

[0015] In addition, the connecting mechanism preferably has an inner wall support portion that supports the annular inner wall surface of the ring mounting seat, and the ring mounting seat is connected to the connecting surface by the inner wall support portion.

[0016] In one aspect of the invention described above, the annular mounting base of the mounting base, having an outer peripheral portion of a support surface that supports the hub cutter, is detachable. Therefore, when aluminum from the annular base of the hub cutter adheres to the mounting base, the problem caused by aluminum adhesion can be easily solved by simply removing and replacing the annular mounting base. That is, the problem of the hub cutter becoming eccentric due to aluminum adhesion to the mounting base, resulting in a wider cut, can be easily solved.

[0017] Furthermore, since the cutting tool is fixed using a ring mount, aluminum adheres to the ring mount. By removing the aluminum adhering to the ring mount, the ring mount can be reused. Additionally, since the ring mount is connected to the mount base, the installation of the hub tool can be performed in the same manner as before. Attached Figure Description

[0018] Figure 1 It is a three-dimensional diagram of the cutting device.

[0019] Figure 2 This is an exploded 3D view of the cutting unit.

[0020] Figure 3 This is a sectional view of the cutting unit.

[0021] Figure 4 This is a 3D view of the ring mounting base.

[0022] Figure 5 This is a partially enlarged 3D view of the ring mounting base.

[0023] Figure 6 This is a perspective view showing the pin inserted into the ring mount and the ring mount rotating.

[0024] Figure 7 This is a front view showing the case where a mounting base is connected to the ring mounting bracket.

[0025] Figure 8 This is a sectional view of the cutting unit.

[0026] Figure 9 This is a front view showing the case where a mounting base is connected to the ring mounting bracket.

[0027] Label Explanation

[0028] 1: Cutting device; 10: Base; 100: Box stage; 11: L-shaped column; 12: Box; 13: Cleaning unit; 130: Rotary worktable; 131: Cleaning nozzle; 14: Workpiece unit; 140: Workpiece; 141: Frame; 142: Belt; 1400: Upper surface; 1401: Device; 1402: Pre-defined dividing line; 16: Imaging unit; 2: Chuck worktable; 20: Suction section; 200: Holding surface ; 21: Frame; 23: Fixture; 27: Cover; 28: Fold; 3: Y-axis moving mechanism; 30: Ball screw; 31: Guide rail; 33: Movable plate; 4: Z-axis moving mechanism; 40: Ball screw; 41: Guide rail; 42: Z-axis motor; 43: Lifting plate; 5: Cutting unit; 50: Spindle; 500: Internal thread; 51: Spindle housing; 53: Mounting base; 530: Flange; 531: Recess; 53 2: Connecting surface; 533: Boss; 534: External thread; 54: Hub tool; 540: Opening; 541: Annular base; 542: Grinding tool; 543: Supported surface; 55: Shaft; 56: Nut; 560: Internal thread; 57: Fastener; 570: External thread; 58: Ring mount; 580: Supporting surface; 581: Inner wall surface; 59: Connecting mechanism; 591: Pin; 592: Neck; 593: Head Part; 5931: Head thickness; 594: Hole; 595: Elongated hole; 5950: First length; 5951: Length in the thickness direction; 5952: Second length; 5953: Neck sliding groove; 5954: Head sliding groove; 590: Second connecting mechanism; 596: Inner wall support part; 5960: First gripper part; 5961: First support member; 5962: Second gripper part; 5963: Second support member. Detailed Implementation

[0029] Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings.

[0030] 1. Structure of the cutting device

[0031] Figure 1 The cutting device 1 shown is a cutting device that uses a cutting unit (cutting member) 5 to cut the workpiece 140. With the workpiece 140 positioned inside an annular frame 141, a strip 142 is attached to the lower surface of the frame 141 and the lower surface of the workpiece 140, thereby forming a workpiece unit 14 integrally formed from the workpiece 140, the frame 141, and the strip 142. Multiple mutually perpendicular dividing lines 1402 are formed on the upper surface 1400 of the workpiece 140, and a device 1401 is arranged in the area divided by the dividing lines 1402. The structure of the cutting device 1 will be described below.

[0032] like Figure 1As shown, the cutting device 1 has a base 10 formed in a generally L-shape. The portion of the base 10 on the +X and -Y directions side forms a box-mounting stage 100, on which a box 12 is mounted. The workpiece unit 14 is housed in the box 12.

[0033] A chuck worktable 2 is mounted on the base 10. The chuck worktable 2 has a circular plate-shaped suction part 20 and an annular frame 21 supporting the suction part 20. The upper surface of the suction part 20 serves as a holding surface 200 for holding the workpiece unit 14.

[0034] Four clamps 23 are arranged adjacent to the chuck table 2, surrounding the chuck table 2. The workpiece 140 is placed on the holding surface 200, and the frame 141 is clamped from all sides by the four clamps 23, thereby holding the workpiece unit 14 on the chuck table 2.

[0035] The chuck table 2 is connected to a rotating mechanism (rotating component) not shown. By using this rotating mechanism, the chuck table 2 can be rotated.

[0036] Furthermore, the chuck table 2 is connected to a horizontal movement mechanism (X-axis movement mechanism, horizontal movement member, not shown). Using this horizontal movement mechanism, the chuck table 2 can be moved horizontally in the X-axis direction. For example, with the workpiece 140 held on the holding surface 200 of the chuck table 2, using this horizontal movement mechanism to move the chuck table 2 horizontally in the X-axis direction allows the workpiece 140 to move in the X-axis direction.

[0037] A cover 27 is provided around the chuck worktable 2, and the cover 27 is connected to a retractable pleat 28.

[0038] When the chuck table 2 moves in the Y-axis direction, the cover 27 moves integrally with the chuck table 2 in the Y-axis direction, and the fold 28 extends and retracts.

[0039] A cleaning unit (cleaning component) 13 for cleaning the workpiece 140 after cutting is provided on the +X and +Y directions sides of the base 10. The cleaning unit 13 includes: a rotary table 130 for holding the workpiece 140; and a cleaning nozzle 131 for spraying cleaning water toward the upper surface of the rotary table 130.

[0040] With the workpiece 140 held on the upper surface of the rotary table 130, the rotary table 130 is rotated while cleaning water is sprayed from the cleaning nozzle 131, thereby enabling the workpiece 140 to be cleaned by running water.

[0041] An L-shaped column 11 is erected on the -X direction side of the base 10. A Y-axis moving mechanism (Y-axis moving component) 3 is provided on the +X direction side of the L-shaped column 11 to move the cutting unit 5 in the Y-axis direction.

[0042] The Y-axis moving mechanism 3 includes: a ball screw 30 extending along the Y-axis direction; a Y-axis motor (not shown) that rotates the ball screw 30; a pair of guide rails 31 arranged parallel to the ball screw 30; and a movable plate 33 with a nut on its side engaged with the ball screw 30, the side of the movable plate 33 slidingly contacting the guide rails 31.

[0043] When the ball screw 30 is rotated using a Y-axis motor (not shown), the movable plate 33 moves horizontally in the Y-axis direction while being guided by the guide rail 31. By moving the movable plate 33 horizontally in the Y-axis direction, the cutting unit 5 can be moved horizontally in the Y-axis direction.

[0044] A Z-axis moving mechanism (Z-axis moving member) 4, which moves the cutting unit 5 in the Z-axis direction, is provided on the side of the movable plate 33 in the +X direction. The Z-axis moving mechanism 4 includes: a ball screw 40 extending along the Z-axis direction; a Z-axis motor 42 that rotates the ball screw 40; a pair of guide rails 41 arranged parallel to the ball screw 40; and a lifting plate 43, the side of which is screwed with a nut to the ball screw 40, and the side of the lifting plate 43 is in sliding contact with the guide rails 41. The cutting unit 5 is supported on the lifting plate 43.

[0045] When the ball screw 40 is rotated by the Z-axis motor 42, the lifting plate 43 moves in the Z-axis direction while being guided by the guide rail 41. By moving the lifting plate 43 up and down in the Z-axis direction, the cutting unit 5 supported on the lifting plate 43 can move up and down in the Z-axis direction.

[0046] A camera unit 16 is supported on the side of the lifting plate 43 in the +X direction. By using the camera unit 16 to photograph the predetermined dividing line 1402 of the workpiece 140, the cutting unit 5 can be aligned according to the photographed predetermined dividing line 1402.

[0047] like Figure 2 As shown, the cutting unit 5 includes: a spindle 50; a mounting base 53 fixed to the front end of the spindle 50; a ring mounting seat 58 connected to the connecting surface 532 of the mounting base 53; a nut 56 that pushes the hub cutter 54, which is mounted on the mounting base 53 through the ring mounting seat 58, toward the mounting base 53; and a fastener 57.

[0048] The spindle 50 is, for example, cylindrical and protected by a spindle housing 51. The spindle 50 is connected to an electric motor (not shown) that rotates the spindle 50 about a center 55 in the Y-axis direction. An internal thread 500 is formed at the front end of the spindle 50.

[0049] The hub tool 54 has: an aluminum annular base 541 with a central opening 540; and an annular abrasive 542 fixed to the outer periphery of the annular base 541. The abrasive 542 is electrodeposited on the outer periphery of the annular base 541.

[0050] The mounting base 53 has a circular flange portion 530 and a cylindrical boss portion 533 formed in the center of the flange portion 530 and protruding in the -Y direction.

[0051] like Figure 3 As shown, the flange portion 530 has a recess 531 on its outermost radial peripheral side, recessed towards the +Y direction. The surface of the recess 531 on the -Y direction side forms an annular connecting surface 532 that connects to the ring mounting seat 58. The center of the connecting surface 532 is... Figure 2 The spindle 50 shown is aligned with the axis 55. In addition, an external thread 534 is formed on the front end of the outer side of the boss portion 533.

[0052] The ring mounting base 58 is a metal component formed in a ring shape, having a support surface 580 that supports one side of the ring-shaped base 541, namely the supported surface 543, and a connected surface 582 that faces the connecting surface 532.

[0053] An internal thread 560 corresponding to the external thread 534 of the mounting base 53 is formed on the inner surface of the nut 56. In addition, an external thread 570 corresponding to the internal thread 500 of the spindle 50 is formed on the fastener 57.

[0054] like Figure 3 As shown, the cutting unit 5 has a connecting mechanism 59 that connects the ring mounting base 58 to the connecting surface 532. The connecting mechanism 59 has, for example, two pins 591, each having: a neck 592 that protrudes from the connecting surface 532 of the mounting base 53 in a direction (-Y direction) toward the axis 55 of the spindle 50; and a head 593 formed at the front end of the neck 592.

[0055] Two pins 591 are arranged at equal intervals on the circumference of the connecting surface 532 of the mounting base 53, for example. The pins 591 are fixed to the connecting surface 532 of the mounting base 53 such that the straight line connecting the two pins 591 passes through the center of the connecting surface 532 of the mounting base 53. The outer diameter of the head 593 of the pin 591 is formed to be larger than the outer diameter of the neck 592.

[0056] In addition, such as Figure 4As shown, the connecting mechanism 59 has: a hole 594 formed in the ring mounting base 58; and an elongated hole 595 that extends in an arc shape from the hole 594 toward the rotational direction of the ring mounting base 58. The hole 594 and the elongated hole 595 are recessed from the connected surface 582 in the thickness direction of the ring mounting base 58, and four holes 594 and four elongated holes 595 are formed at equal intervals on the circumference of the ring mounting base 58.

[0057] exist Figure 5 In order to illustrate the features of hole 594 and elongated hole 595, a partially enlarged view of the ring mount 58 and pin 591 is shown. Figure 5 As shown, hole 594 has an outer diameter that allows the head 593 of pin 591 to be inserted, and also has a depth in the Y-axis direction that can accommodate the head 593 and the neck 592. The width of elongated hole 595 in the direction perpendicular to the arc direction is narrower than the diameter of hole 594.

[0058] The elongated hole 595 is composed of a neck sliding groove 5953 formed on the side of the connected surface 582 and a head sliding groove 5954 formed on the inner side (-Y direction side) of the annular mounting base 58 in the thickness direction, which is larger than the neck sliding groove 5953. The width of the head sliding groove 5954 is a first length 5950, and the width of the neck sliding groove 5953 is a second length 5952. The first length 5950 is a length slightly larger than the outer diameter of the circle of the head 593, and the second length 5952 is a length smaller than the outer diameter of the head 593 and slightly larger than the outer diameter of the neck 592.

[0059] In addition, the depth, i.e. the length, 5951 of the head sliding groove 5954 is slightly larger than the thickness 5931 of the head 593.

[0060] The connecting mechanism 59 consists of a pin 591, a hole 594 that engages with the pin 591, and an elongated hole 595, forming a so-called hook-and-hang ceiling component.

[0061] When connecting the ring mounting base 58 to the mounting base 53, insert the head 593 and neck 592 of the pin 591. Figure 4 The hole 594 in the ring mounting base 58, as shown, allows the ring mounting base 58 to rotate relative to the mounting base 53. Thus, as... Figure 6 As shown, the head 593 of pin 591 slides in the head sliding groove 5954 of elongated hole 595, moving to the end of elongated hole 595 located on the opposite side of hole 594. Thus, as... Figure 7 As shown, the ring mounting base 58 is fixed to the mounting base 53 by the so-called suspended ceiling. At this time, as... Figure 5 As shown, since the second length 5952 of the elongated hole 595 is smaller than the outer diameter of the head 593 of the pin 591, the pin 591 is in a state where it will not disengage relative to the elongated hole 595 in the +Y direction.

[0062] Furthermore, the number of pins 591, holes 594, and elongated holes 595 in the connecting mechanism 59 is not limited to the aforementioned numbers.

[0063] exist Figure 8 The image shows the assembly and mounting of various components of the cutting unit 5. Figure 8 In this configuration, with the ring mounting base 58 connected to the mounting base 53, the mounting base 53 is fixed to the front end of the spindle 50. Furthermore, the annular base 541 of the hub cutter 54 penetrates the boss portion 533 of the mounting base 53 and is supported on the support surface 580 of the ring mounting base 58. Additionally, the hub cutter 54 is pushed from the side of the ring mounting base 58 opposite to the support surface 580 (the -Y direction side) by the nut 56, and the internal thread 560 of the nut 56 engages with the external thread 534 of the boss portion 533. That is, the hub cutter 54 is clamped by the ring mounting base 58 and the nut 56. Furthermore, the external thread 570 of the fastener 57 engages with the internal thread 500 of the spindle 50, making the mounting base 53, the hub cutter 54, and the nut 56 a single unit.

[0064] 2. Operation of the cutting device

[0065] The operation of the cutting device 1 when it is used to cut the workpiece 140 is described below.

[0066] When using the cutting device 1 to cut the workpiece 140, firstly, take out a sheet stored in... Figure 1 The workpiece unit 14 in the box 12 shown is placed on the holding surface 200 of the chuck table 2. Then, the frame 141 is clamped from all sides using four clamps 23, thereby fixing the workpiece unit 14 to the chuck table 2. Thus, the workpiece 140 is held on the holding surface 200 of the chuck table 2.

[0067] Next, with the workpiece 140 held on the holding surface 200 of the chuck table 2, the chuck table 2 (not shown) is moved in the -X direction using a horizontal moving mechanism to position the workpiece 140 below the imaging unit 16. Then, the imaging unit 16 is used to capture an image of the pre-division line 1402, and the Y-axis moving mechanism 3 is moved appropriately in the Y-axis direction based on the captured image of the pre-division line 1402 to align the cutting unit 5 with respect to the Y-axis direction of the pre-division line 1402.

[0068] Additionally, using an electric motor (not shown) or similar device, the spindle housed in the spindle housing 51 is powered (in... Figure 1 (Not shown in the diagram) Rotates. Thus, the hub cutter 54 rotates.

[0069] Furthermore, while the hub cutter 54 is rotating, the Z-axis movement mechanism 4 moves the cutting unit 5 in the -Z direction, causing the rotating hub cutter 54 to come into contact with the predetermined dividing line 1402 of the workpiece 140. A horizontal movement mechanism (not shown) moves the workpiece 140, held on the chuck table 2, in the -X direction. Thus, the workpiece 140 and the hub cutter 54 move relative to each other in the X-axis direction, cutting the workpiece 140 along the predetermined dividing line 1402.

[0070] After cutting along a predetermined dividing line 1402, the Z-axis moving mechanism 4 is used to raise the cutting unit 5 in the +Z direction, causing the hub tool 54 to retract above the workpiece 140. The horizontal moving mechanism is then used to move the chuck table 2 in the +X direction, positioning it at the start of the cutting process.

[0071] Furthermore, for example, after using the Y-axis moving mechanism 3 to move the cutting unit 5 in the Y-axis direction by an interval of adjacent pre-division lines 1402, the hub cutter 54 is similarly made to cut into the pre-division lines 1402, thereby performing cutting machining on the adjacent pre-division lines 1402.

[0072] In this way, after all the predetermined dividing lines 1402 formed in the same direction on the workpiece 140 have been cut, for example, the chuck table 2 is rotated by 90 degrees using a rotary mechanism (not shown), and then the cutting process is performed in the same way, thereby cutting all the predetermined dividing lines 1402 on the workpiece 140. Thus, all the predetermined dividing lines 1402 formed on the workpiece 140 are cut.

[0073] In the cutting unit 5 of the cutting device 1, such as Figure 8 As shown, an annular mounting base 58 is provided between the annular base 541 of the hub cutter 54 and the mounting base 53, so aluminum from the annular base 541 will adhere to the annular mounting base 58. Therefore, aluminum can be prevented from adhering to the connecting surface 532 of the mounting base 53.

[0074] Previously, the mounting base 53 was replaced after a specified number of cutting operations. However, in the cutting unit 5, the ring mounting base 58 is replaced with a new ring mounting base. The ring mounting base 58 is cheaper than the mounting base 53, thus offering the advantage of better cost-effectiveness.

[0075] Alternatively, after a specified number of cutting operations using the cutting unit 5, the ring mounting base 58 can be temporarily removed for cleaning.

[0076] The cutting device 1 can also replace the connecting mechanism 59 described above and have... Figure 9The second connecting mechanism 590, as shown, has an inner wall support portion 596. The inner wall support portion 596 has a first gripper portion 5960 and a first support member 5961 provided on the outer periphery of the mounting base 53, and a second gripper portion 5962 and a second support member 5963 provided on the opposite side of the first gripper portion 5960 relative to the center of the mounting base 53. The first gripper portion 5960 and the second gripper portion 5962 are positioned such that the line connecting them passes through the center of the mounting base 53.

[0077] A spring mechanism (not shown) is provided inside the first gripper 5960 and the second gripper 5962.

[0078] When no external force is applied to the first gripper 5960, the first support member 5961 protrudes from the outer periphery of the mounting base 53 in the -X direction. When a force in the +X direction is applied to the first gripper 5960 from this state, pressing the first gripper 5960 in the +X direction, the first support member 5961 moves in the +X direction and is housed inside the mounting base 53. Then, when the force in the +X direction applied to the first gripper 5960 is released, the first gripper 5960 and the first support member 5961 move in the -X direction and return to their original positions.

[0079] Similarly, when no external force is applied to the second gripper 5962, the second support member 5963 protrudes from the outer periphery of the mounting base 53 in the +X direction. When the second gripper 5962 is pressed in the -X direction from this state, the second support member 5963 moves in the -X direction and is housed inside the mounting base 53. When the force applied to the second gripper 5962 in the -X direction is released, the second gripper 5962 and the second support member 5963 move in the +X direction and return to their original positions.

[0080] exist Figure 9 The diagram shows the first support member 5961 protruding from the outer periphery of the mounting base 53 in the -X direction, and similarly, the second support member 5963 protruding from the outer periphery of the mounting base 53 in the +X direction. Thus, the inner wall surface 581 of the ring mounting seat 58 is supported by the first support member 5961 and the second support member 5963, and the mounting base 53 is connected to the ring mounting seat 58.

[0081] For example, when replacing the ring mounting base 58 and removing it from the mounting base 53, the first gripper 5960 is pressed in the +X direction to house the first support member 5961 inside the mounting base 53, and the second gripper 5962 is pressed in the -X direction to house the second support member 5963 inside the mounting base 53. This releases the inner wall surface 581 of the ring mounting base 58 from its state of being supported by the first support member 5961 and the second support member 5963, allowing the ring mounting base 58 to be removed from the mounting base 53.

[0082] The connecting mechanism 59 may also be provided with a magnet (not shown) on either or both of the ring mounting base 58 or the mounting base 53, with a magnetic body provided on the side of the ring mounting base 58 and the mounting base 53 where the magnet is not provided.

[0083] That is, for example, it can also be structured as follows: In Figure 2 The ring mounting base 58 shown is equipped with a magnet, and a magnetic body is provided in the connecting surface 532 of the mounting base 53. Alternatively, for example, the structure could have a magnet in the connecting surface 532 of the mounting base 53 and a magnetic body in the ring mounting base 58. Alternatively, for example, the structure could have magnets provided in both the connecting surfaces 532 of the ring mounting base 58 and the mounting base 53. In such a structure, the ring mounting base 58 and the mounting base 53 can be connected using magnetic force.

Claims

1. A cutting apparatus, wherein the cutting apparatus has: a chuck table that holds a workpiece; and a cutting unit that cuts the workpiece, the cutting unit being provided with a hub cutter that has a ring-shaped grinding tool fixed to the outer periphery of a ring-shaped base having an opening in the center, the cutting unit has: a spindle; a seat base that is fixed to the front end of the spindle, has a ring-shaped joint surface centered on the axis of the spindle, and has external threads at the front end; a ring-shaped ring seat that is joined to the joint surface of the seat base, has a ring-shaped support surface that supports one face of the ring-shaped base of the hub cutter; a joint mechanism that joins the ring seat to the joint surface; and a nut that is screwed to the external threads of the seat base, the joint mechanism has: a pin that is composed of a neck that protrudes from the joint surface of the seat base in the direction of the axis of the spindle and a head that is formed at the front end of the neck, the head having a larger diameter than the neck; a hole that is formed in the ring seat, the hole into which the head of the pin is inserted; and an arcuate long hole that, in a state in which the pin is inserted into the hole, allows the ring seat to rotate with respect to the seat base about the axis of the spindle, the long hole being connected to the hole in the direction of rotation, the long hole has: a neck sliding groove that is formed on the joint surface side, has a width that is narrower than the diameter of the hole, and allows the neck of the pin to slide; and a head sliding groove that has the same width as the diameter of the hole, the head sliding groove allowing the head of the pin to slide, the hub cutter and the ring seat are clamped and fixed by the nut and the joint surface of the seat base by screwing the nut to the external threads. ​

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