Deposition source

A deposition source and shell technology, applied in the deposition source field, can solve the problems of temperature deviation, low thermal stability, etc.

CN114293150APending Publication Date: 2022-04-08SAMSUNG DISPLAY CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Current Assignee / Owner
Publication Date
2022-04-08

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Abstract

A deposition source according to an embodiment includes a deposition module and a housing that houses the deposition module, the deposition module including: a first crucible that extends in a first direction and houses a deposition material in an internal space; a plurality of nozzles arranged on the first crucible and arranged in the first direction; a heat generating component accommodating the first crucible; and a radiant heat prevention member disposed on an upper surface, an outer surface, and a lower surface of the heat generation member, the radiant heat prevention member including a plurality of reflectors and a plurality of pins respectively connecting adjacent reflectors among the plurality of reflectors, the plurality of pins being disposed so as to be offset from each other in a plane. The deposition source of the present invention prevents loss or emission of heat generated in the deposition source toward the outside of the deposition source, thereby providing a deposition source having improved reliability in a high-temperature environment.
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Description

technical field

[0001] The present invention relates to a deposition source, and more specifically, relates to a linear deposition source used in a deposition device. Background technique

[0002] The display device may include a light emitting layer between opposing electrodes. One of various methods of forming electrodes is a deposition method using a deposition apparatus. The electrodes may comprise metallic species, which may require a deposition apparatus in a high temperature environment in order to deposit the metallic species on the substrate.

[0003] As a deposition source for depositing a metal substance, there is a point-type deposition source. In order to deposit a deposition substance on a large-area substrate, a plurality of point-type deposition sources may be used, and each point-type deposition source is in the form of arranging a plurality of crucibles storing the deposition substance. Since the point-type deposition source has a small capacity for stor...

Examples

Embodiment Construction

[0042] The present invention can have various changes and various forms, and specific embodiments are illustrated in the drawings, and will be described in detail here. However, this is not intended to limit the present invention to a specific disclosed form, and it should be understood that all changes, equivalents, and substitutions included in the idea and technical scope of the present invention are included.

[0043] In this specification, when it is mentioned that a certain constituent element (or region, layer, part, etc.) is located on, connected to, or combined with another constituent element, it means that it can be directly arranged / connected / combined with other constituent elements, Alternatively, a third component may be arranged therebetween.

[0044] The same symbols refer to the same constituent elements. In addition, in each drawing, the thickness, ratio, and size of each component are exaggerated for effective description of technical content.

[0045] "An...