A method for adding a map to a SITE MAP

Abstract

The present invention discloses a method for adding a SITE MAP map, the method comprising the following steps: S100, importing a SITE MAP map file; S200, importing a probe file; S300, comparing the imported SITE MAP map file and the probe file, and generating a new standard MAP map file after the comparison. The present invention abandons the manual file comparison method in the prior art, and is faster, more convenient, less prone to error, and convenient for operators to quickly and accurately perform statistics.

Description

Technical Field

[0001] The invention belongs to the field of wafer testing, and in particular relates to a method for adding a SITE MAP map. Background Art

[0002] The main purpose of wafer testing is to not package the bad chips that have been tested, so as to reduce the packaging cost. In the field of wafer testing, the probe card is the medium between the wafer and the tester. The probe card is usually placed directly on the probe station prober and connected to the tester with wiring. The purpose of the probe card is to provide a connection between the chip and the tester and complete the wafer test. The probe card is a custom connector using a universal mode, and it is usually necessary to provide targeted probe cards for different types of wafers.

[0003] Figure 1 It is a working diagram of the wafer testing link in the prior art. During wafer testing, the SITE information of probe cards of different models is different, and the yield between different SITEs is also different. In the prior art, the operator exports the actual test diagram from the MES system and generates a first excel file, and converts a text format file of the SITE information into a second excel file through the probe station prober. Then, by operating the two excel files, the diagrams of the two sheets are counted and manually checked. This means that when counting a batch of data, you must first export the actual test diagram from the MES system, and then open the SITE MAP diagram and manually compare it, which is time-consuming and prone to errors. The root cause is that, taking the prober as an example, the file generated by the TEL type prober does not have SITE MAP information, and can only be counted manually.

[0004] Therefore, this field is in urgent need of a technical solution to improve the work efficiency of personnel and to avoid operators from misreading data as much as possible. Summary of the invention

[0005] In view of this, the present invention proposes a method for adding a SITE MAP, the method comprising the following steps:

[0006] S100, import SITE MAP file;

[0007] S200, import the probe file;

[0008] S300, comparing the imported SITE MAP file and the probe file, and generating a new standard MAP file after the comparison.

[0009] Preferably,

[0010] In step S300, the principle of comparison is to prevent die missing and misalignment.

[0011] Preferably,

[0012] In step S300, the dies are compared according to a one-to-one correspondence.

[0013] Preferably,

[0014] In step S300, after comparison, the information in the probe file is merged with the information in the SITE MAP file to generate a new standard MAP file.

[0015] Preferably,

[0016] In step S100, the SITE MAP map file is in a txt text file format.

[0017] Preferably,

[0018] In step S200, the probe file is in a dat file format.

[0019] Preferably, the method further comprises the following steps:

[0020] S400. Add a new MAP to the MES system based on the new standard MAP file.

[0021] Preferably, the method further comprises the following steps:

[0022] S500. Set a SiteYieldGap checkpoint in the MES system, where the SiteYieldGap checkpoint is determined based on the number of passes per site / the number of test dies per site.

[0023] The present invention has the following technical effects:

[0024] Through the above scheme, the present invention abandons the manual file comparison method in the prior art. Compared with the prior art, the present invention is faster, more convenient, less prone to errors, and convenient for operators to quickly and accurately perform statistics. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for use in the embodiments are briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without creative work.

[0026] Figure 1 It is a working schematic diagram of a wafer testing link in the prior art;

[0027] Figure 2 is a schematic diagram of the method in one embodiment of the present invention when it is executed by corresponding tool software;

[0028] Figure 3 It is a schematic diagram of setting a SiteYieldGap card in an MES system in one embodiment of the present invention;

[0029] Figure 4 is a schematic diagram of display and screening on an MES system in one embodiment of the present invention;

[0030] Figure 5 It is a schematic diagram of the mark on the MES system when the SiteYieldGap card is triggered in one embodiment of the present invention. DETAILED DESCRIPTION

[0031] To make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the following will be combined with the appended drawings of the embodiments of the present invention. Figures 1 to 5 , the technical solutions in the embodiments of the present invention are clearly and completely described. Obviously, the described embodiments are part of the embodiments of the present invention, but not all of the embodiments. Generally, the components of the embodiments of the present invention described and shown in the drawings herein can be arranged and designed in various different configurations.

[0032] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the invention claimed for protection, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0033] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0034] In the description of the present invention, it should be noted that if the terms "upper", "lower", "inside", "outside", etc. appear to indicate an orientation or position relationship, they are based on the orientation or position relationship shown in the accompanying drawings, or are the orientation or position relationship in which the product of the invention is usually placed when used. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0035] In addition, the terms “first”, “second”, etc., if used, are merely used to distinguish between the descriptions and should not be understood as indicating or implying relative importance.

[0036] It should be noted that, in the absence of conflict, the features in the embodiments of the present invention may be combined with each other.

[0037] See also Figure 2 In one embodiment, the present invention discloses a method for adding a SITE MAP, the method comprising the following steps:

[0038] S100, import the SITE MAP file;

[0039] S200, import probe file;

[0040] S300, comparing the imported SITE MAP file and the probe file, and generating a new standard MAP file after the comparison.

[0041] For this embodiment, taking probe as an example, the file generated by TEL type probe does not have SITE MAP information, and can only be counted manually. However, the inventor innovatively combines the SITE MAP file with the probe file, and generates a new standard MAP file by comparing the two, thereby making full use of data processing technology to improve the problems caused by manual statistics in the field.

[0042] Preferably,

[0043] In step S300, the principle of comparison is to prevent die missing and misalignment.

[0044] Preferably,

[0045] In step S300, the dies are compared according to a one-to-one correspondence.

[0046] Preferably,

[0047] In step S300, after comparison, the information in the probe file is merged with the information in the SITE MAP file to generate a new standard MAP file.

[0048] Preferably,

[0049] In step S100, the SITE MAP map file is in a txt text file format.

[0050] Preferably,

[0051] In step S200, the probe file is in a dat file format.

[0052] Preferably,

[0053] In step S100, after each wafer is measured, the SITE MAP file is obtained.

[0054] Preferably,

[0055] In step S200, the probe file is obtained by running a file of SITE information through the probe station prober.

[0056] Preferably,

[0057] After each wafer is tested, a new standard MAP is obtained based on its SITE MAP file and probe file and added to the actual test map in the MES system. Then, the BIN and SITE are further screened and tested in MES to count the sitegap of each wafer and export the site test report.

[0058] That is to say, the present invention can facilitate operators to count site gaps.

[0059] Preferably, the method further comprises the following steps:

[0060] S400. Add a new MAP to the MES system based on the new standard MAP file.

[0061] Preferably, the method further comprises the following steps:

[0062] S500. Set a SiteYieldGap checkpoint in the MES system, where the SiteYieldGap checkpoint is determined based on the number of passes per site / the number of test dies per site.

[0063] Exemplary, the algorithm for setting the SiteYieldGap is:

[0064] SiteYieldGap = Max(SiteYield)-Min(SiteYield), where SiteYield = number of passes per site / number of test dies per site. Figure 3 It is a schematic diagram of setting the SiteYieldGap card in the MES system in an embodiment of the present invention, and single or multiple selections are possible: single piece Hold, whole batch Hold, generate QDN.

[0065] More preferably, the method further comprises the steps of:

[0066] S600 , parse the probe file content to obtain the following parameters: the range of the test area of ​​the device template, the number of test dies, and the number of peripheral mark dies.

[0067] In this way, the present invention can conveniently provide the above parameters to the project so as to be set on the MES system.

[0068] See also Figure 2 In another embodiment, the method further comprises the steps of:

[0069] S700. After executing steps S100 and S200, the following parameters are obtained: minimum coordinate x, minimum coordinate y, maximum coordinate x, maximum coordinate y, original minimum coordinate x, original minimum coordinate y, original maximum coordinate x, original maximum coordinate y, total number of Mark points included, total number of excluding Mark points, total number of BIN 1, total number of other BINs, batch, and piece number.

[0070] In another embodiment, after step S700, the method further includes the following steps:

[0071] S800: Generate a coordinate range.

[0072] In another embodiment, after step S300, the method further includes the following steps:

[0073] S900, copy the standard MAP diagram.

[0074] In another embodiment, after step S800, the method further includes the following steps:

[0075] S1000. Copy the coordinate range.

[0076] Figure 4 It is a schematic diagram of displaying and filtering on the MES system in one embodiment of the present invention; it shows that the present invention can count BIN and SITE and display and filter them on the MES system;

[0077] Figure 5 It is a schematic diagram of the identification on the MES system when the SiteYieldGap card is triggered in one embodiment of the present invention; after the triggering, the relevant information can be checked through the corresponding identification on the MES system.

[0078] In summary, the method disclosed in the present invention abandons the method of manually comparing files in the prior art. Compared with the prior art, the present invention is faster, more convenient, less prone to errors, and facilitates operators to quickly and accurately perform statistics.

[0079] The above is only a specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Any changes or substitutions that can be easily thought of by a person skilled in the art within the technical scope disclosed by the present invention should be included in the protection scope of the present invention. Therefore, the protection scope of the present invention should be based on the protection scope of the claims.

Claims

1. A method for adding a SITE MAP, the method comprising the following steps: S100, import SITE MAP file; S200, import the probe file; S300, comparing the imported SITE MAP file and the probe file, and generating a new standard MAP file after the comparison; S400, based on the new standard MAP file, add the new MAP to the MES system; S500, setting a SiteYieldGap checkpoint in the MES system, wherein the SiteYieldGap checkpoint is determined according to the number of passes per site / the number of test dies per site; S600, parse the probe file content to obtain the following parameters: the range of the test area of ​​the device template, the number of test dies, and the number of peripheral mark dies; S700, after executing the steps S100 and S200, the following parameters are obtained: minimum coordinate x, minimum coordinate y, maximum coordinate x, maximum coordinate y, original minimum coordinate x, original minimum coordinate y, original maximum coordinate x, original maximum coordinate y, total number of Mark points included, total number of excluding Mark points, total number of BIN 1, total number of other BINs, batch, and piece number; S800, generating a coordinate range; S900, copy the standard MAP; S1000, copy coordinate range; in, In step S200, the probe file is obtained by running a probe station prober to generate a file of SITE information; After each wafer is tested, a new standard MAP is obtained based on its SITE MAP file and probe file and added to the actual test map in the MES system. Then, the BIN and SITE of the test are further screened in MES to calculate the sitegap of each wafer and export the site test report. SiteYieldGap = Max(SiteYield)-Min(SiteYield), where SiteYield = number of passes per site / number of test dies per site; The method counts BIN and SITE and displays and filters them on the MES system; when the SiteYieldGap card is triggered, it is marked on the MES system, and after it is triggered, the relevant information is checked through the corresponding mark on the MES system; in, In step S300, the principle of comparison is: preventing die missing and misalignment; In step S300, the dies are compared according to a one-to-one correspondence; In step S300, after comparison, the information in the probe file is merged with the information in the SITE MAP file to generate a new standard MAP file.

2. The method of claim 1, wherein: In step S100, the SITE MAP map file is in a txt text file format.

3. The method of claim 1, wherein: In step S200, the probe file is in a dat file format.

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