Sensing Winding Configuration for Inductive Position Encoders

Abstract

An inductive position encoder includes a scale, a detector and a signal processor. The scale includes a periodic pattern of signal modulation elements (SMEs) having a spatial wavelength W1 arranged along a measuring axis (MA). The detector includes a sensing element and a field generating coil that generates a varying magnetic flux. The sensing element includes a conductive loop that provides a detector signal in response to a local effect of the varying magnetic flux provided to an adjacent SME. Some or all of the conductive loops are configured according to an intra-loop shift relationship, where equal "shift ratios" of the loops are shifted W1 / 4K in opposite directions. K is an odd integer. The intra-loop shift relationship can be used to suppress K-order spatial harmonic components in the detector signal while also overcoming long-standing adverse layout issues. The intra-loop shift relationship is easily combined with a "loop width" spatial filtering technique that filters out other spatial harmonic signal components.

Description

Background of the Invention Technical Field

[0002] The present disclosure relates to measuring instruments, and more particularly, to inductive position encoders that may be used in precision measuring instruments. Background Art

[0004] Various encoder configurations can include various types of optical, capacitive, magnetic, inductive, motion and / or position transducers. These transducers can measure the movement between the readhead and the scale using various geometric configurations of transmitters and receivers in the readhead.

[0005] U.S. Patents 6,011,389 (the '389 patent), 7,239,130 ​​(the '130 patent), and 6,124,708 (the '708 patent) describe inductive current position transducers that can be used in high accuracy applications; U.S. Patents 5,973,494 (the '494 patent) and 6,002,250 (the '250 patent) describe incremental position sensing calipers and linear scales, including signal generation and processing circuitry; and U.S. Patents 5,886,519 (the '519 patent), 5,841,274 (the '274 patent), and 5,894,678 (the '678 patent) describe absolute position sensing calipers and electronic tape measures using inductive current transducers. U.S. Patent Nos. 10,520,335 (the '335 patent), 10,612,943 (the '943 patent), and 10,775,199 (the '199 patent) disclose winding configuration improvements that can be used to improve the accuracy, robustness, and ease of alignment of inductive position encoders. All of the foregoing are incorporated herein by reference in their entirety. As described in these patents and applications, inductive current transducers can be manufactured using printed circuit board technology and are largely immune to contamination. However, such systems may be limited in their ability to provide certain combinations of user desired features, such as a combination of compact size, high resolution, accuracy, low cost, robustness to contamination, robustness to misalignment, etc. Encoder configurations that provide improved combinations of such features would be desirable. Summary of the invention

[0006] This Summary is provided to introduce a selection of concepts in a simplified form that are further described below in the Detailed Description. This Summary is not intended to identify key features of the claimed subject matter, nor is it intended to be used as an aid in determining the scope of the claimed subject matter.

[0007] An electronic position encoder is provided, which can be used to measure the relative position between two elements along a measuring axis. In various specific implementations, the electronic position encoder includes a scale, a detector portion, and a signal processing configuration.

[0008] The scale extends along the measuring axis direction and includes a periodic scale pattern, which includes at least a first type of signal modulation element. The periodic scale pattern has a spatial wavelength W1. The first type of signal modulation element includes a similar conductive plate or a similar conductive loop positioned corresponding to the spatial wavelength W1 along the measuring axis direction. The detector portion is configured to be installed near the periodic scale pattern and move relative to the periodic scale pattern along the measuring axis direction. In various specific implementations, the detector portion includes a field generating coil and at least one group of corresponding sensing elements corresponding to the corresponding nominal spatial phase (for example, the spatial phase differs by 90 degrees to provide two corresponding groups of orthogonal signals, or the spatial phase differs by 120 degrees to provide three corresponding groups of three-phase signals). The field generating coil is fixed on the substrate and surrounds the internal area, which is aligned with the effective area of ​​the periodic scale pattern of the signal modulation element during operation. As used herein, in various specific implementations, the term "surrounding" can mean completely surrounding or partially surrounding. The only limitation is that the field generating coils are configured to generate a changing magnetic flux in the interior region in response to coil drive signals in a manner that supports operation according to the principles disclosed and claimed herein. Each set of corresponding sensing elements is arranged along the measurement axis direction and fixed to the substrate. The components of this set of sensing elements include conductive loops or conductive loop portions that define a sensing element effective area EffASEN corresponding to the portion of their sensing elements that is aligned with or overlaps the interior region surrounded by the field generating coils.

[0009] Each set of respective sensing elements is configured to provide a detector signal responsive to a local effect of a varying magnetic flux provided by adjacent signal modulating elements of the scale pattern and corresponding to a respective nominal spatial phase thereof. A signal processing arrangement is operatively connected to the detector portion to provide a coil drive signal and to determine a relative position between the detector portion and the scale pattern based on the detector signal input from the detector portion.

[0010] In various first-type implementations according to the principles disclosed herein (e.g., Figures 9 to 13 ), at least one set of corresponding sensing elements corresponding to the corresponding nominal spatial phase includes combined features A1, B1 and C1, and further combines at least one of features D1 or E1, defined as follows:

[0011] A1) A plurality of positive polarity loops correspond to a first winding direction or polarity, and an equal number of negative polarity loops correspond to a second winding direction or polarity opposite to the first winding direction or polarity.

[0012] B1) Each positive and negative polarity loop has a total sensing element effective area EffASEN aligned with or overlapping one or more internal regions, and is defined as having an effective y-axis dimension EffySEN along the y-axis direction, which is the sum of the dimensions of one or more internal regions perpendicular to the measuring axis direction, and most of the positive and negative polarity loops are configured to provide an average sensing element dimension DSENavg = (EffASEN / EffYSEN) along the measuring axis direction within the range of 0.33*W1+ / -15%.

[0013] C1) The positive polarity loops are configured such that their sensing element active areas are arranged in a positive polarity loop prescribed relationship (or simply the positive loop prescribed relationship) relative to the corresponding nominal spatial phases of the corresponding group of sensing elements, and the negative polarity loops are configured such that their sensing element active areas are arranged in a negative polarity loop prescribed relationship (or simply the negative loop prescribed relationship) relative to the corresponding nominal spatial phases of the corresponding group of sensing elements. The positive loop prescribed relationship includes a configuration in which a shift ratio of up to half of the total sensing element active areas of the plurality of positive polarity loops is shifted relative to the corresponding nominal spatial phase by an amount (W1) / 4K in a first direction along the measuring axis direction, and a nominally identical shift ratio of the total sensing element active areas of the plurality of positive polarity loops is shifted relative to the corresponding nominal spatial phase by an amount (W1) / 4K in a direction opposite to the first direction along the measuring axis direction, such that the two shift ratios of the total sensing element active areas of the positive polarity loop areas are shifted relative to each other by an amount (W1) / 2K, where K is one of 3, 5, 7, or 9. The negative loop prescribed relationship includes a configuration in which a shift ratio of up to half of the total sensing element effective area of ​​multiple negative polarity loops is shifted relative to the corresponding nominal spatial phase shift amount (W1) / 4K in a first direction along the measuring axis direction, and a nominally same shift ratio of the total sensing element effective area of ​​the multiple negative polarity loops is shifted relative to the corresponding nominal spatial phase shift amount (W1) / 4K in a direction opposite to the first direction along the measuring axis direction, so that the first two shift ratios of the total sensing element effective area of ​​the negative polarity loop area are shifted from each other by (W1) / 2K.

[0014] D1) each positive polarity loop and negative polarity loop comprises a sensing element active area EffASEN, wherein the sensing element active area EffASEN has a maximum size DSENmax of at most 0.45*W1 along the measuring axis direction; and

[0015] E1) The corresponding group of sensing elements corresponding to the corresponding nominal spatial phase (SETSENPh0) is configured as a two-part configuration, including: a first separated part, the first separated part includes the same number of positive polarity loops and negative polarity loops; and a second separated part, the second separated part is nominally aligned with the first part along the measuring axis direction and includes the same number of positive polarity loops and negative polarity loops as the first separated part; wherein the first separated part and the second separated part are separated by a gap located between the first part and the second part along the measuring axis direction, wherein the gap is at least as wide as one of the positive polarity loops or the negative polarity loops along the measuring axis direction, and neither the positive polarity loop effective area nor the negative polarity loop effective area of ​​the group of sensing elements is located in the gap;

[0016] The corresponding group of sensing elements corresponding to the corresponding nominal spatial phase (SETSENPh0) is thereby configured into an actual configuration, which provides one or more spatially filtered detector signals that can be used to reduce or suppress potential unwanted third spatial harmonic detector signal components and potential unwanted K-th spatial harmonic detector signal components, which spatial harmonic detector signal components might otherwise contribute to errors in the determined relative position between the detector portion and the scale pattern.

[0017] As a result of implementing features A1, B1, C1, together with at least one of features D1 and / or E1 as outlined above, the corresponding groups of sensing elements corresponding to the corresponding nominal spatial phases are configured to provide one or more spatially filtered detector signals that can be used to reduce or suppress potential unwanted third spatial harmonic signal components and unwanted potential K-th spatial harmonic signal components, which spatial harmonic detector signal components may otherwise contribute to errors in the determined relative position between the detector portion and the scale pattern. In addition, the configuration provides the spatial filtering outlined above while also providing a novel "layout-friendly" loop arrangement to address long-standing adverse layout issues, as described in more detail below. In some first type specific implementations, it may be particularly advantageous when K=5. In certain first type specific implementations, it may be advantageous when at least a majority of the positive polarity loops and the negative polarity loops are configured to provide an average sensing element size DSENavg of at least 0.29*W1 and at most 0.31*W1, as described in more detail below with respect to the various figures.

[0018] In various first type specific implementations, each corresponding positive polarity or negative polarity loop included in a group of corresponding sensing elements including features A1, B1, C1 and at least one of features D1 and / or E1 can be configured to provide a corresponding sensing element effective area EffASEN that does not overlap with the sensing element effective area EffASEN of any other corresponding positive polarity or negative polarity loop included in the corresponding group of sensing elements. This can facilitate a layout with lower manufacturing costs and / or can allow for elimination of adverse loop shape irregularities caused by layout problems that occur in prior art methods for providing spatial filtering and / or misalignment error reduction features. No configuration in the prior art can provide a comparable combination of spatial filtering performance, robustness against misalignment, and relatively ideal loop shapes throughout a group of sensing elements, as well as an economical manufacturing layout.

[0019] In some first type of specific implementations, at least a first set of corresponding sensing elements corresponding to the corresponding nominal spatial phases include features A1, B1, C1, and D1, and do not include feature E1. In some such specific implementations, the first set of corresponding sensing elements may include: a first adjacent portion, the first adjacent portion including the same number of positive polarity loops and negative polarity loops; and a second adjacent portion, the second adjacent portion nominally aligned with the first adjacent portion along the measurement axis direction, and including the same number of positive polarity loops and negative polarity loops as the first adjacent portion. The first adjacent portion and the second adjacent portion may be closer to each other than the width of one of the positive polarity or negative polarity loops along the measurement axis direction (which is why they are referred to as "adjacent" portions in this article), and the corresponding loops closest to each other in the first adjacent portion and the second adjacent portion have opposite loop polarities. In some such specific implementations, the electronic position encoder may include at least a second set of corresponding sensing elements corresponding to respective nominal spatial phases that differ by 90 degrees from the nominal spatial phases of the first set of corresponding sensing elements, wherein: the second set of corresponding sensing elements includes features A1, B1, C1, D1, and E1; the second set of corresponding sensing elements are configured such that respective loops closest to each other in their first and second separated portions have the same loop polarity; the first set of corresponding sensing elements have a first area centroid of their total sensing element active area located between their first adjacent portion and their second adjacent portion along the measuring axis; the second set of corresponding sensing elements have a second area centroid of their total sensing element active area located between their first and second separated portions along the measuring axis; and the first set of corresponding sensing elements and the second set of corresponding sensing elements are arranged such that their respective first and second area centroids are aligned at the same position along the measuring axis. Such specific implementations having aligned centroids may provide certain advantages with respect to eliminating certain errors caused by "pitch" misalignment between detector portions and scale patterns, while facilitating economical layout and manufacturing, as described in more detail below with respect to the figures. In some such specific implementations, each respective positive polarity or negative polarity loop included in one of the first or second sets of respective sensing elements is configured to provide a respective sensing element effective area EffASEN that does not overlap with the sensing element effective area EffASEN of any other respective positive polarity or negative polarity loop included in the same set of the first or second sets of respective sensing elements.

[0020] Signal Contribution In various specific implementations including two adjacent portions or two separated portions as outlined above, the electronic position encoder can be configured according to one of M1 or M2, wherein: M1) the first adjacent (or separated) portion is configured to output a first detector signal and the second adjacent (or separated) portion is configured to output a second detector signal, and the signal processor is configured to determine the relative position between the detector portion and the scale pattern based at least in part on a combination of the first signal and the second signal; or M2) the first adjacent (or separated) portion is connected in series with the second adjacent (or separated) portion to form a combined signal, and the series connection is configured so that the corresponding signals of the first portion and the second portion are added in the combined signal; and the signal processor is configured to determine the relative position between the detector portion and the scale pattern based at least in part on the combined signal. In some specific implementations, where the adjacent portions are connected in series, the first adjacent portion and the second adjacent portion can be interpreted as portions of a set of continuous and uninterrupted sensing elements.

[0021] In some first type implementations, at least a first set of corresponding sensing elements corresponding to the corresponding nominal spatial phases include features A1, B1, C1, and E1. In some such implementations, the first set of corresponding sensing elements can be configured so that the corresponding loops closest to each other in the first and second separated parts thereof have the same loop polarity. Some such specific implementations may include at least a second group of corresponding sensing elements corresponding to corresponding nominal spatial phases that differ by 90 degrees from the nominal spatial phases of the first group of corresponding sensing elements, wherein: the second group of corresponding sensing elements includes features A1, B1, C1 and E1; the second group of corresponding sensing elements is configured so that corresponding loops that are closest to each other in its first separated portion and second separated portion have opposite loop polarities; the first group of corresponding sensing elements has a first area centroid of its total sensing element effective area located between its first separated portion and second separated portion along the measuring axis; the second group of corresponding sensing elements has a second area centroid of its total sensing element effective area located between its first separated portion and second separated portion along the measuring axis; and the first group of corresponding sensing elements and the second group of corresponding sensing elements are arranged so that their respective first area centroids and second area centroids are aligned at the same position along the measuring axis direction. In some such specific implementations, each respective positive polarity or negative polarity loop included in one of the first or second sets of respective sensing elements is configured to provide a respective sensing element active area EffASEN that does not overlap with a sensing element active area EffASEN of any other respective positive polarity or negative polarity loop included in the same set of the first or second sets of respective sensing elements. In some such specific implementations, both the first set of respective sensing elements and the second set of respective sensing elements include both features D1 and E1.

[0022] In some first type of specific implementations, at least a first group of sensing elements corresponding to a corresponding nominal spatial phase includes features A1, B1, C1 and at least feature D1, and is configured according to feature C1, wherein it is configured that several pairs of adjacent positive polarity loop and negative polarity loop sensing element active areas are shifted in a first direction along the measuring axis direction by an amount (W1) / 4K, and the same number of pairs of adjacent positive polarity loop and negative polarity loop sensing element active areas are shifted in a direction opposite to the first direction along the measuring axis by an amount (W1) / 4K. Such a configuration in which the positive and negative polarity sensing loops are shifted "in pairs" may provide improved accuracy and / or robustness against misalignment (e.g., compared to shifting the positive polarity loops in a first direction and shifting the negative polarity loops in an opposite direction). In some such specific implementations, it may be advantageous if two pairs of corresponding adjacent loops located at opposite ends of the first group of corresponding sensing elements have positive polarity loop and negative polarity loop sensing element active areas shifted in the same direction in the two corresponding pairs along the measuring axis (e.g., as described in reference to FIG. 1 ). Fig.12 outlined).

[0023] The various first type implementations outlined above may be configured to use a "single-trace" scale operation having a single scale pattern trace (e.g., as described below with reference to Fig. 9 , Fig.10 , Figure 11 and Fig.12 ), or for use with a "dual trace" scale operation having two scale pattern traces (e.g., as described below with reference to Fig.13 As outlined above). In various "dual-trace" implementations, the scale pattern includes signal modulating elements arranged in a first trace and a second trace extending in a measuring axis direction, and the field generating coil is configured to surround a first inner region portion aligned with the first trace, and a second inner region aligned with the second trace. In such implementations, a set of corresponding sensing elements may include features A1, B1, C1, and at least one of features D1 and / or E1, and each conductive loop extends transversely to the measuring axis direction through the first inner region portion and the second inner region portion to define a first sensing element active region portion and a second sensing element active region portion, the first sensing element active region portion and the second sensing element active region portion corresponding to those portions of the sensing element that are aligned with or overlap the first inner region and the second inner region, respectively, whereby the detector signal appearing in each conductive loop constitutes a combination of the corresponding detector signals from its first sensing element active region portion and the second sensing element active region portion.

[0024] In some such dual-trace implementations, it may be advantageous to use a configuration in which the scale pattern may include signal modulating elements or signal modulating element portions periodically arranged in a first trace according to wavelength W1, and signal modulating elements or signal modulating element portions periodically arranged in a second trace according to wavelength W1, wherein the periodic arrangements in the first trace and the second trace are offset relative to each other by (W1) / 2. The field generating coil is configured to generate a changing magnetic flux of a first polarity in a first inner region portion, and a changing magnetic flux of an opposite second polarity in a second inner region portion.

[0025] Of course, the various advantageous features outlined above may be used in any encoder having a plurality of sets of corresponding sensing elements corresponding to a plurality of corresponding spatial phases (e.g., to provide a quadrature signal or a 3-phase signal, as outlined above). For example, in some such implementations, the plurality of sets of corresponding sensing elements corresponding to a plurality of corresponding spatial phases may each include at least features A1, B1, C1, and at least one of the plurality of sets of corresponding sensing elements may further include at least feature E1. Such implementations may thus be configured to provide a plurality of spatially filtered detector signals that may be used to reduce or suppress potential unwanted third spatial harmonic detector signal components and potential unwanted Kth spatial harmonic detector signal components that may otherwise contribute to errors in the determined relative position between the detector portion and the scale pattern. In some such implementations, each of the plurality of sets of corresponding sensing elements has an area centroid of its total sensing element active area located within its span along the measuring axis, and the plurality of sets of corresponding sensing elements may be configured with their respective area centroids positioned at nominally the same position along the measuring axis direction. Such configurations may provide robust rejection of certain misalignment errors, as described in more detail below. In some such specific implementations, each respective positive polarity or negative polarity loop included in any one of the plurality of respective groups of sensing elements is configured to provide a respective sensing element effective area EffASEN that does not overlap with the sensing element effective area EffASEN of any other respective positive polarity or negative polarity loop included in the same group of the plurality of respective groups of sensing elements.

[0026] In various second-type implementations according to the principles disclosed herein (e.g., Figure 14 to Figure 17 As shown), at least one set of corresponding sensing elements corresponding to the corresponding nominal spatial phase includes features A2 and B2, defined as follows:

[0027] A1) a plurality of positive polarity loops corresponding to a first winding direction or polarity, and an equal number of negative polarity loops corresponding to a second winding direction or polarity opposite to the first winding direction or polarity; and

[0028] B2) At least most of the positive polarity loops and at least most of the negative polarity loops are configured such that their sensing element effective areas are arranged in a specified intra-loop shift relationship relative to the corresponding nominal spatial phases of the corresponding groups of sensing elements, wherein the intra-loop shift relationship includes a configuration wherein within each such loop, an intra-loop shift ratio of up to half of the sensing element effective area is shifted by (W1) / 4K relative to the corresponding nominal spatial phase in a first direction along the measuring axis direction, and a nominally identical intra-loop shift ratio of its sensing element effective area is shifted by (W1) / 4K relative to the corresponding nominal spatial phase in a direction opposite to the first direction along the measuring axis direction, whereby the two intra-loop shift ratios are shifted by (W1) / 2K relative to each other, where K is one of 3, 5, 7 or 9.

[0029] As a result of implementing features (A2 and B2) as outlined above, respective groups of sensing elements corresponding to respective nominal spatial phases are thereby configured into an actual configuration that provides one or more spatially filtered detector signals that can be used to reduce or suppress potentially unwanted K-th order spatial harmonic detector signal components that might otherwise contribute to errors in the determined relative position between the detector portion and the scale pattern.

[0030] In some specific implementations of the second type, in the positive polarity and negative polarity loops whose sensing element active areas are configured in a prescribed intra-loop shift relationship, the intra-loop shift ratio may be nominally half of its sensing element active area. In some specific implementations of the second type, it may be particularly advantageous when all positive polarity loops and negative polarity loops are configured with their sensing element active areas arranged in a prescribed intra-loop shift relationship.

[0031] In some implementations of the second type, at least a first set of corresponding sensing elements is configured according to features A2 and B2, wherein it includes: at least a first pair of positive and negative polarity loops configured to have nominally consistent shapes for their sensing element active areas; and at least a second pair of positive and negative polarity loops configured to have nominally consistent shapes for their sensing element active areas, wherein the consistent shapes of the first and second pairs are nominally mirror images of each other, and the first and second pairs of positive and negative polarity loops are positioned adjacent to each other. In some implementations, such configurations including "mirror pairs" can provide improved accuracy and / or robustness against certain misalignments. In some such specific implementations, if the first group of corresponding sensing elements is further configured to include: at least a first end pair of positive and negative polarity loops, the at least first end pair of positive and negative polarity loops are configured to have a nominally consistent shape for the sensing element active area within the first end pair; and at least a second end pair of positive and negative polarity loops, the at least second end pair of positive and negative polarity loops are configured to have a nominally consistent shape for the sensing element active area within the second end pair, and the consistent shapes of the first end pair and the second end pair are also nominally consistent between the first end pair and the second end pair. It should be understood that the first end pair and the second end pair are located at the first end and the second end of the first group of corresponding sensing elements.

[0032] In some second type of implementations, each sensing element included in a set of corresponding sensing elements configured to include features A2 and B2 can have a total sensing element active area EffASEN aligned with or overlapping one or more internal regions, which can be defined as having an effective y-axis size EffySEN along the y-axis direction, which is the sum of the sizes of the one or more internal regions perpendicular to the measurement axis direction. It may be advantageous in various implementations if at least most of such sensing elements are configured to provide an average sensing element size DSENavg=(EffASEN / EffYSEN) along the measurement axis direction within the range 0.33*W1+ / -15%, as described in more detail below with respect to the various figures. In various such implementations, K can be 5, 7, or 9. In such specific implementations, the corresponding group of sensing elements configured to include features A2 and B2 is thereby configured to provide a detector signal that can be used to reduce potential unwanted third spatial harmonic detector signal components and potential unwanted K-th spatial harmonic detector signal components, which may otherwise contribute to errors in the determined relative position between the detector portion and the scale pattern. In some such specific implementations, it may be particularly advantageous when K=5. In some specific implementations, each corresponding positive polarity or negative polarity loop included in the corresponding group of sensing elements configured to include features A2 and B2 can be configured to provide a corresponding sensing element effective area EffASEN that does not overlap with the sensing element effective area EffASEN of any other corresponding positive polarity or negative polarity loop included in the corresponding group of sensing elements.

[0033] In some second type of specific implementations, at least a first group of corresponding sensing elements corresponding to the corresponding nominal spatial phase is configured according to features A2 and B2, wherein it includes a two-part configuration, the configuration including: a first separation part, the first separation part including the same number of positive polarity loops and negative polarity loops; and a second separation part, the second separation part is nominally aligned with the first part along the measurement axis direction and includes the same number of positive polarity loops and negative polarity loops as the first separation part; wherein the first separation part and the second separation part are separated by a gap located between the first part and the second part along the measurement axis direction, and the gap is at least as wide as one of the positive polarity loops or the negative polarity loops along the measurement axis direction, and neither the positive polarity loop active area nor the negative polarity loop active area of ​​the group of sensing elements is located in the gap. In some such specific implementations, the first group of corresponding sensing elements is configured so that the corresponding loops closest to each other in its first separation part and second separation part have the same loop polarity. In some such specific implementations, the electronic position encoder also includes at least a second group of corresponding sensing elements corresponding to corresponding nominal spatial phases that differ by 90 degrees from the nominal spatial phases of the first group of corresponding sensing elements, and the second group of corresponding sensing elements is configured according to features A2 and B2, wherein it is configured in a two-part configuration. In some specific implementations, the two-part configuration may include two "adjacent parts", or in other specific implementations, two "separated parts". The following description describes these two cases by referring to alternative characteristics associated with the "separated parts" in parentheses. The two-part configuration may include: a first adjacent (separated) part, the first adjacent (separated) part including the same number of positive polarity loops and negative polarity loops; and a second adjacent (separated) part, the second adjacent (separated) part is nominally aligned with the first adjacent (separated) part along the measuring axis direction, and includes the same number of positive polarity loops and negative polarity loops as the first adjacent (separated) part. The first adjacent (separated) portion and the second adjacent (separated) portion are positioned closer to each other along the measuring axis than the width of one of the positive polarity or negative polarity loops (which is why they are referred to herein as "adjacent" portions), and the corresponding loops of the first adjacent (separated) portion and the second adjacent (separated) portion that are closest to each other have opposite loop polarity. The first group of corresponding sensing elements has a first area centroid of its total sensing element active area located between its first separated portion and second separated portion along the measuring axis, and the corresponding second group of sensing elements has a second area centroid of its total sensing element active area located between its first adjacent (separated) portion and second adjacent (separated) portion along the measuring axis. In some such specific implementations, the first and second groups of corresponding sensing elements can be arranged so that their respective first and second area centroids are aligned at the same position along the measuring axis.Such implementations with aligned centroids may provide certain advantages with respect to eliminating certain errors due to "pitch" misalignment between detector portions and scale patterns, while facilitating economical layout and manufacturing, as described in more detail below with respect to the various figures. In some such implementations, each respective positive or negative polarity loop included in one of the first or second sets of respective sensing elements is configured to provide a respective sensing element active area EffASEN that does not overlap with the sensing element active area EffASEN of any other respective positive or negative polarity loop included in the same set of the first or second sets of respective sensing elements.

[0034] In various second type implementations including two adjacent portions or two separated portions as outlined above, the electronic position encoder may be configured according to one of M1 or M2, wherein: M1) the first adjacent (or separated) portion is configured to output a first detector signal, and the second adjacent (or separated) portion is configured to output a second detector signal, and the signal processor is configured to determine the relative position between the detector portion and the scale pattern based at least in part on a combination of the first signal and the second signal; or M2) the first adjacent (or separated) portion is connected in series with the second adjacent (or separated) portion to form a combined signal, and the series connection is configured so that the corresponding signals of the first and second portions are added in the combined signal; and the signal processor is configured to determine the relative position between the detector portion and the scale pattern based at least in part on the combined signal. In some implementations, where the adjacent portions are connected in series, the first adjacent portion and the second adjacent portion may be interpreted as portions of a set of continuous and uninterrupted sensing elements.

[0035] The various second type implementations outlined above may be configured to use a "single-trace" scale operation having a single scale pattern trace (e.g., as described below with reference to Fig.14 , Fig.15 and Fig.16 ), or for use with a "dual trace" scale operation having two scale pattern traces (e.g., as described below with reference to Fig.17In various second type "dual trace" implementations, the scale pattern includes signal modulating elements arranged in first and second traces extending in the measuring axis direction, and the field generating coils are configured to surround a first inner region portion aligned with the first trace, and a second inner region aligned with the second trace. In such implementations, a set of corresponding sensing elements may include features A2 and B2, and may include conductive loops, each extending through the first and second inner region portions transverse to the measuring axis direction to define first and second sensing element active region portions, the first and second sensing element active region portions corresponding to those portions of the sensing element aligned with or overlapping the first and second inner regions, respectively, wherein the detector signal appearing in each conductive loop constitutes a combination of the corresponding detector signals from its first and second sensing element active region portions.

[0036] In some such second type dual trace implementations, it may be advantageous to use a configuration such as the following: the scale pattern may include signal modulating elements or signal modulating element portions periodically arranged in a first trace according to wavelength W1, and signal modulating elements or signal modulating element portions periodically arranged in a second trace according to wavelength W1, wherein the periodic arrangements in the first and second traces are offset relative to each other by (W1) / 2. The field generating coil is configured to generate a changing magnetic flux of a first polarity in a first inner area portion, and a changing magnetic flux of an opposite second polarity in a second inner area portion.

[0037] As mentioned above and described in more detail below with respect to the various figures, many different implementations of the second type can be configured such that each conductive loop or conductive loop portion included in a set of corresponding sensing elements including features A2 and B2 can include a corresponding sensing element effective area EffASEN that does not overlap with any other corresponding sensing element effective area EffASEN of any other conductive loop or conductive loop portion included in the same corresponding set of sensing elements. This may be particularly advantageous in some implementations of the second type for facilitating economical layout and manufacturing while providing a relatively ideal combination of spatially filtered detector signals and suppression of misalignment errors, as outlined above and described in more detail below. No configuration in the prior art is able to provide a comparable combination of features and performance advantages.

[0038] Of course, any of the second type of implementations outlined above may be used in any encoder having multiple sets of corresponding sensing elements corresponding to multiple corresponding spatial phases (e.g., to provide a quadrature signal or a 3-phase signal), as outlined above. In such implementations, each of the multiple sets of corresponding sensing elements corresponding to the multiple sets of corresponding spatial phases is configured to include features A2) and B2), and is thereby configured to provide a spatially filtered detector signal that can be used to reduce or suppress potential unwanted K-th order spatial harmonic detector signal components that may otherwise contribute to errors in the determined relative position between the detector portion and the scale pattern. In some such implementations, each of the multiple sets of corresponding sensing elements has an area centroid of its total sensing element active area located within its span along the measuring axis, and the multiple sets of corresponding sensing elements are configured with their respective area centroids arranged at the same position along the measuring axis direction. This may be advantageous for reducing certain misalignment errors that may otherwise occur, as outlined previously and described in more detail below. As indicated above, in some such specific implementations, each conductive loop or conductive loop portion included in the corresponding set of sensing elements including features A2 and B2 may include a corresponding sensing element effective area EffASEN, which does not overlap with any other corresponding sensing element effective area EffASEN of any other conductive loop or conductive loop portion included in the same corresponding set of sensing elements. In some such specific implementations, each sensing element included in the multiple groups of corresponding sensing elements has a total sensing element effective area EffASEN aligned with or overlapping one or more internal regions, and is defined as having an effective y-axis size EffYSEN along the y-axis direction, which is the sum of the sizes of the one or more internal regions perpendicular to the measuring axis direction, and at least most of the sensing elements included in the multiple groups of corresponding sensing elements are configured to provide a sensing element average size DSENavg=(EffASEN / EffYSEN) along the measuring axis direction within the range of 0.33*W1+ / -15%, whereby the electronic position encoder is configured to provide multiple spatially filtered detector signals that can be used to reduce or suppress unwanted potential third spatial harmonic detector signal components and unwanted potential K-order spatial harmonic detector signal components, which spatial harmonic detector signal components may otherwise contribute to errors in the determined relative position between the detector portion and the scale pattern. BRIEF DESCRIPTION OF THE DRAWINGS

[0039] Figure 1 is an exploded isometric view of a hand tool type caliper utilizing an inductive electronic position encoder including a detector portion and a scale.

[0040] Figure 2is a plan view schematically illustrating certain features of a representative prior art inductive electronic position encoder, presented as background information relevant to the various principles disclosed herein.

[0041] Figure 3 It can be used for example Figure 1 A plan view of a specific implementation of a detector portion and scale pattern in an electronic position encoder is shown, in which a signal modulation element according to the principles disclosed herein is combined with previously known "less than ideal" sensing elements, along with various dimensions that can characterize their features according to the principles disclosed herein.

[0042] Figure 4 yes Figure 3 An enlarged isometric view of a portion of a detector portion and a scale pattern shown in , including a qualitative representation of magnetic flux and flux coupling characteristics that may be associated with the operation of a signal modulating element in such a position encoder.

[0043] Figure 5A and Figure 5B is a schematic diagram of a Figure 3 Plan views of certain aspects of respective signal modulation element and sensing element implementations of those shown, including additional examples of certain exemplary dimensions that may characterize them in accordance with the principles disclosed herein.

[0044] Figure 6 , Figure 7 and Figure 8 are plan views illustrating various specific implementations of sensing elements and scale patterns, the sensing elements and scale patterns being similar to those described herein with reference to Figures 9 to 12 The disclosed sensing element configuration principle is compatible and applicable to applications such as Figure 1 Detector portions and scale patterns in an electronic position encoder are shown, along with examples of the various dimensions that can characterize them.

[0045] Fig. 9 is a plan view illustrating certain aspects of a first set of sensing elements corresponding to a first spatial phase, which is a first exemplary configuration of a set of sensing elements configured according to the first type of prescribed relationship principles disclosed herein to provide a spatially filtered signal for use such as Figure 1 A detector portion of an electronic position encoder is shown, along with a first compatible field generating coil configuration and a scale pattern, and includes various dimensions that may characterize a sensing element configuration in accordance with the principles disclosed herein.

[0046] Fig.10 is a plan view illustrating certain aspects of a second set of sensing elements corresponding to a second spatial phase, the second set of sensing elements being similar to Fig. 9 The first set of sensing elements is shown, superimposed on Fig. 9A phantom representation of the first set of sensing elements is shown to illustrate an operating quadrature configuration where the spatial phases of the first and second sets of sensing elements differ by 90 degrees.

[0047] Fig.11A is a plan view illustrating certain aspects of a second set of sensing elements corresponding to a second spatial phase, which is a second exemplary configuration of a set of sensing elements configured according to the first type of prescribed relationship principle disclosed herein, together with Fig. 9 For illustration purposes, the first and second groups are shown in FIG. Fig.11A The first and second sets of sensing elements are offset in the vertical direction to better illustrate their respective characteristics and alignment relative to each other along the measurement axis in an operational orthogonal configuration, wherein the spatial phase of the first set of sensing elements differs by 90 degrees from the spatial phase of the second set of sensing elements.

[0048] Fig. 11B is a plan view illustrating certain aspects of a first set of sensing elements corresponding to a first spatial phase, which is a third exemplary configuration of a set of sensing elements configured according to the first type of prescribed relationship principle disclosed herein, together with Fig.11A For illustration purposes, the first and second groups are shown in Fig. 11B The first and second sets of sensing elements are offset in the vertical direction to better illustrate their respective characteristics and alignment relative to each other along the measurement axis in an operational orthogonal configuration, wherein the spatial phase of the first set of sensing elements differs by 90 degrees from the spatial phase of the second set of sensing elements.

[0049] Fig.12 1 is a plan view illustrating certain aspects of a first group of sensing elements and a second group of sensing elements corresponding to respective spatial phases, which are fourth and fifth exemplary configurations of a group of sensing elements configured according to the first type of prescribed relationship principle disclosed herein. For illustration purposes, the first and second groups are Fig.12 The first and second sets of sensing elements are offset in the vertical direction to better illustrate their respective characteristics and alignment relative to each other along the measurement axis in an operational orthogonal configuration, wherein the spatial phase of the first set of sensing elements differs by 90 degrees from the spatial phase of the second set of sensing elements.

[0050] Fig.13 is a plan view illustrating certain aspects of a first set of sensing elements corresponding to a first spatial phase, which is a sixth exemplary configuration of a set of sensing elements configured according to the first type of prescribed relationship principles disclosed herein to provide a spatially filtered signal for use such as Figure 1 A detector portion of an electronic position encoder is shown, along with a second compatible field generating coil configuration and a scale pattern, and includes various dimensions that can characterize a sensing element configuration in accordance with the principles disclosed herein.

[0051] Fig.14 is a plan view illustrating certain aspects of a first set of sensing elements corresponding to a first spatial phase, which is a first exemplary configuration of a set of sensing elements configured according to the second type of prescribed relationship principles disclosed herein to provide a spatially filtered signal for use such as Figure 1 The detector portion of the electronic position encoder shown, together with Fig. 9 A first compatible field generating coil configuration and scale pattern is shown and includes various dimensions that can characterize a sensing element configuration according to the principles disclosed herein.

[0052] Fig.15 is a plan view illustrating certain aspects of a first set of sensing elements corresponding to a first spatial phase, which is a second exemplary configuration of a set of sensing elements configured according to the second type of prescribed relationship principle disclosed herein to provide a spatially filtered signal for use such as Figure 1 The detector portion of the electronic position encoder shown, together with Fig. 9 and Fig.14 A first compatible field generating coil configuration and scale pattern is shown and includes various dimensions that can characterize a sensing element configuration according to the principles disclosed herein.

[0053] Fig.16 is a plan view illustrating certain aspects of a second set of sensing elements corresponding to a second spatial phase, which is a third exemplary configuration of a set of sensing elements configured according to the second type of prescribed relationship principle disclosed herein, together with Fig.15 For illustration purposes, the first and second groups are shown in FIG. Fig.16 The first and second sets of sensing elements are offset in the vertical direction to better illustrate their respective characteristics and alignment relative to each other along the measurement axis in an operational orthogonal configuration, wherein the spatial phase of the first set of sensing elements differs by 90 degrees from the spatial phase of the second set of sensing elements.

[0054] Fig.17 is a plan view illustrating certain aspects of a first set of sensing elements corresponding to a first spatial phase, which is a fourth exemplary configuration of a set of sensing elements configured according to the second type of prescribed relationship principles disclosed herein to provide a spatially filtered signal for use such as Figure 1 The detector portion of the electronic position encoder shown, together with Fig.13 A second compatible field generating coil configuration and scale pattern is shown and includes various dimensions that can characterize a sensing element configuration in accordance with the principles disclosed herein. DETAILED DESCRIPTION

[0055] Figure 11 is an exploded isometric view of a hand tool type caliper 100, including a scale member 172 and a slider assembly 120. The scale member 172 may include a spar having a generally rectangular cross section, which includes a scale 170 located in a groove therein. The slider assembly 120 may include a base 140, an electronics assembly 160, and a cover 150, described in more detail below. The electronics assembly 160 may include a detector portion 167 and a signal processing arrangement 166 disposed on a substrate 162. An elastomeric seal (not shown) may be compressed between the cover 150 and the substrate 162 to exclude contamination from the circuits and connections. The scale 170, the detector portion 167, and the signal processing arrangement 166 work together to provide an inductive electronic position encoder that can be used to measure the relative position between two elements (e.g., between the scale member 172 and the slider assembly 120) along a measuring axis direction MA.

[0056] In various specific implementations, the scale 170 extends along a measuring axis direction MA (e.g., corresponding to the x-axis direction) and includes a signal modulating scale pattern 180, which includes signal modulating elements SME fabricated on a scale substrate (e.g., using known printed circuit fabrication methods). In various specific implementations shown herein, the signal modulating scale pattern 180 may alternatively be referred to as a periodic scale pattern 180, which is periodic in nature. Figure 1 In the illustrated embodiment, a cover layer 174 of known type (e.g., 100 μm thick) covers the scale 170 (e.g., Figure 1 ).

[0057] In various specific implementations, the mechanical structure and operation of the caliper 100 can be similar to the mechanical structure and operation of certain existing electronic calipers, such as the electronic calipers in commonly assigned U.S. Patent Nos. 5,901,458; and / or 6,400,138 and / or RE37490, each of which is incorporated herein by reference in its entirety. The claws 176 and 178 near the first end of the ruler member 172 and the movable claws 146 and 148 on the slider assembly 120 are used to measure the size of the object in a known manner. The measured size can be displayed on a digital display 158, which is mounted in the cover 150 of the electronic assembly 160. If desired, the cover 150 can also include an on / off switch 154 and other optional control buttons, which actuate circuits or components included in the electronic assembly 160. The base 140 of the slider assembly 120 may include various known elements configured to guide it along the mating edge of the scale member 172 to ensure proper alignment when the slider assembly 120 is moved relative to the scale 170 to make a measurement.

[0058] like Figure 1 As shown, the detector portion 167 may include a field generating coil FGC and a group of sensing elements SETSEN arranged along the measuring axis direction MA. In a specific illustrative example, the detector portion 167 may be arranged parallel to and facing the scale 170, and the front of the detector portion 167 facing the scale 170 may have a gap of the order of 0.5 mm with the scale 170 (and / or the scale pattern 180) along the Z-axis direction. The front of the detector 167 (e.g., its constituent conductors) may be covered with an insulating coating. The structure and operation of the field generating coil FGC and the sensing element SETSEN group are described in more detail below.

[0059] It should be understood that Figure 1 The caliper 100 shown in is one of a variety of applications in which electronic position encoders are typically implemented, which have been developed over the years to provide a relatively optimized combination of compact size, low power operation (e.g., long battery life), high resolution and high accuracy measurement, low cost, robustness to contamination, etc. For example, other applications that may be more challenging in terms of improved evolution accuracy, cost-effective design and manufacturing include medium to high accuracy digital "dial" indicators (e.g., providing accuracy of approximately 10 microns and 1 micron, respectively). In any of these applications, even small improvements in any of these factors are highly desirable, but difficult to achieve, especially in view of the design constraints imposed in order to achieve commercial success in various applications. The principles disclosed and claimed herein provide improvements in many of these factors for various applications.

[0060] Figure 2 is a plan view schematically illustrating certain features of a representative prior art inductive electronic position encoder shown in the previously incorporated '389 patent, presented as background information related to various principles disclosed elsewhere herein. Figure 2 Reference numeral annotations are also included to show comparable reference numerals or symbols used to designate comparable elements in other figures included herein. In the following brief description based on the disclosure of the '389 patent, comparable reference numerals in other figures of the present disclosure are shown in parentheses after the original reference numerals from the '389 patent. Figure 2 A full description of the relevant can be found in the '389 patent. Therefore, only a brief description including the teachings from the '389 patent that are relevant to the present disclosure is included here. To the extent the inventors have been able to determine, the following reference Figure 2 The teachings outlined represent conventional reasoning and conventional design practices known in the art and / or used in commercial inductive electronic position encoders.

[0061] As disclosed in the '389 patent, such as Figure 2The transducer shown in comprises at least two substantially coplanar conductor or winding paths. The transmitter winding 102 (FGC) forms a large planar loop. The receiver winding 104 (SETSEN) is arranged in a zigzag or sinusoidal pattern in substantially the same plane as the transmitter winding 102 in one direction as indicated by the arrows and then in the opposite direction as indicated by the arrows, so that the windings cross themselves as shown to form interleaved alternating loops 106 (SEN+) and 108 (SEN-). As a result, each of the alternating loops 106 (SEN+) and 108 (SEN-) of the receiver winding 104 (SETSEN) has a different winding direction or polarity than the adjacent loops. By applying an alternating (varying) current to the transmitter winding 102 (FGC), the transmitter winding generates a time-varying magnetic field extending through the loops 106 (SEN+) and 108 (SEN-) of the receiver winding 104 (SETSEN).

[0062] If a conductive object (e.g., conductive plate 114 (SME) is included, Figure 2 The scale pattern 112 in the figure is outlined with short dashed lines, and the scale or scale pattern 112 (180) ( Figure 2 As a conductive object (outlined by the edges of the long and short dashed lines indicating alternating lines) moves closer to the transducer, the changing magnetic field generated by the transmitter winding 102 (FGC) will induce eddy currents in the conductive object, which in turn establishes a magnetic field in the object that counteracts the changing transmitter magnetic field. As a result, the magnetic flux received by the receiver winding 104 (SETSEN) is altered or interrupted, causing the receiver winding to output a non-zero EMF signal (voltage) 104 at the output terminals V+ and V- of the receiver winding, which will change polarity as the conductive object moves between the positive polarity "+" loop 106 (SEN+) and the negative polarity "-" loop 108 (SEN-).

[0063] In this prior art example, the distance between the positions of two loops of the same polarity (e.g., between the position of loop 106 (SEN+) to the position of the next loop 106 (SEN+)) is defined as the spacing or wavelength 110 (W1) of the transducer. It can be seen that each loop 106 (SEN+) and / or 108 (SEN-) therefore has a length or maximum dimension of 0.5*W1 along the measurement axis direction 300. If the above-mentioned conductive object (e.g., conductive plate 114 (SME)) is close to the receiver winding 104 (SETSEN) and the position along the measurement axis 300 (MA) is continuously changed, then due to the periodic polarity alternation of the loops 106 (SEN) and 108 (SEN) and the local interruption of the transmission magnetic field caused by the conductive object (e.g., conductive plate 114 (SME)), the AC amplitude of the signal output from the receiver winding (SETSEN) will continuously and periodically change with the wavelength 110 (W1).

[0064] The '389 patent emphasizes that if the conductive object (e.g., conductive plate 114 (SME)) is much smaller or larger than loop 106 and / or 108 (SEN+, SEN-), then the amplitude of the signal output will be weak and it will be difficult to obtain high accuracy. If the length of the conductive object is approximately equal to half of the wavelength 110 (W1) (i.e., when the object is likely to completely coincide with loop 106 or 108 (SEN+ or SEN-)), then the signal output will have a large amplitude and is therefore most sensitive to the position of the conductive object (e.g., conductive plate 114 (SME)). Therefore, the disclosure (of the '389 patent) preferably employs a conductive object (e.g., conductive plate 114 (SME)) having a length (along the x-axis direction) equal to half of the wavelength 110 (W1).

[0065] It should be understood that Figure 2 The transmitter winding 102 (FGC) and the receiver winding 104 (SETSEN) shown in and described above are elements designated herein as the detector portion (e.g., Figure 1 167) is an example of a prior art implementation of the detector portion 167 shown in FIG. The scale or scale pattern 112 (180) is designated herein as a scale pattern (e.g., Figure 1 An example of a prior art implementation of a scale pattern 180) is shown in FIG.

[0066] Figure 3 In such Figure 1 A plan view of a specific implementation of a detector portion 367 and scale pattern 380 that may be used in an electronic position encoder is shown, wherein for clarity, a signal modulation element SME in accordance with the principles disclosed herein is shown in conjunction with a previously known "less than ideal" sensing element SEN. Figure 3Various dimensions that may characterize the signal modulation element SME and the sensing element SEN according to the principles disclosed herein are also introduced. Figure 6 , Figure 7 and Figure 8 Further description of more ideal sizes and shapes of the sensing element SEN according to the principles disclosed herein. Figures 9 to 13 and Figure 14 to Figure 17 Desirable alternative configurations and / or prescribed relationships for arranging the positions and / or shapes of sensing elements SEN according to the principles disclosed herein are further described.

[0067] The various features of the detector portion 367 and the scale pattern 380 are configured to satisfy the various design principles disclosed and claimed herein, particularly with respect to the signal modulation element SME. It should be appreciated that Figure 3 Certain numbered components 3XX may correspond to and / or provide Figure 1 and / or Figure 2 Similar numbered components 1XX provide similar operation or functionality (e.g., detector portion 367 provides similar operation or functionality as detector portion 167) and may be similarly understood unless otherwise noted.

[0068] Figure 3 May be viewed as partly representative, partly schematic. Figure 3 The lower portion of FIG. 3 shows an enlarged portion of the detector portion 367 and the scale pattern 380. Figure 3 In the drawings, various elements described below are represented by their shapes or outlines and are shown superimposed on each other to emphasize certain geometric relationships. It should be understood that various elements can be located on different manufacturing layers located in different planes along the z-axis direction, providing various operating gaps and / or insulating layers as needed, which will be apparent to those of ordinary skill in the art based on the following description and incorporated references. Throughout the drawings of the present disclosure, it should be understood that the illustrated x-axis, y-axis, and / or z-axis dimensions of one or more elements may be exaggerated for clarity, but it should be understood that they are not intended to contradict the various dimensional design principles and relationships disclosed and claimed herein.

[0069] The illustrated portion of the scale pattern 380 includes a first type of signal modulation element SME, which is shown in dashed outline and with dot fill. The periodic scale pattern 380 has a spatial wavelength W1. In this specific implementation, the first type of signal modulation element SME includes similar conductive plates (e.g., as formed by areas manufactured on a printed circuit board, or as formed by raised areas extending from a conductive substrate). However, in other specific implementations, they may include similar conductive loops (e.g., as formed by traces on a printed circuit board), as described in more detail below. In either case, they are positioned along the measuring axis direction MA corresponding to the spatial wavelength W1. The scale pattern 380 is typically located on the scale (e.g., Figure 1 The y-direction extremes of most signal modulation elements SME are hidden in Figure 3 In the illustrated implementation, the scale pattern 380 is located below the first elongated portion EP1 and the second elongated portion EP2 of the field generating coil FGC (e.g., as in the '335, '943, and '199 patents). It should be appreciated that the scale pattern 380 moves relative to the detector portion 367 during operation, such as Figure 1 Visible in.

[0070] exist Figure 3 In the example of , the scale pattern 380 has a nominal scale pattern width dimension NSPWD along the y-axis direction and includes generally rectangular signal modulating elements SME arranged periodically along the measuring axis direction MA (e.g., corresponding to the x-axis direction). However, more generally, the scale pattern 380 may include various alternative spatial modulation patterns including alternative signal modulating element configurations, as long as the pattern has spatial characteristics that vary as a function of position along the x-axis direction, thereby providing a position-dependent detector signal (also referred to as a detector signal component in some specific implementations) generated in a sensing element SEN (e.g., SEN14) of a set of sensing elements SETSEN in the detector portion 367.

[0071] In various specific implementations, the detector portion 367 is configured to be mounted near the scale pattern 380 and to move along the measuring axis direction MA relative to the scale pattern 380. The detector portion includes field generating coils FGC and a set of sensing elements SETSEN, which can be configured in a variety of alternatives for use in combination with various corresponding signal processing schemes in various specific implementations, as will be understood by those skilled in the art. Figure 3 A single representative set of sensing elements SEN1-SEN24 is shown. In this specific implementation, the single representative set of sensing elements SEN1-SEN24 includes sensing loop elements (or sensing coil elements or sensing winding elements) connected in series. In this specific implementation, adjacent loop elements are connected according to known methods (e.g., Figure 4) are connected by conductor configurations on various layers of the PCB (e.g., connected by feedthroughs) such that they have opposite winding polarities. That is, if a first loop responds to a changing magnetic field with a positive polarity detector signal contribution, then an adjacent loop responds with a negative polarity detector signal contribution. Positive polarity detector signal contributions Loops having positive polarity detector signal contributions may be designated herein as SEN+ sensing elements, and loops having negative polarity detector signal contributions may be designated herein as SEN- sensing elements in various contexts herein. In this specific implementation, the sensing elements are connected in series such that their detector signals or signal contributions are summed, and the "summed" detector signals are output to a signal processing configuration (not shown) at detector signal output connections SDS1 and SDS2.

[0072] although Figure 3 A single set of sensing elements is shown to avoid visual confusion, but it should be understood that in various implementations, it is advantageous to configure the detector to provide one or more sets of additional sensing elements (e.g., similar to SETSEN) at different spatial phase positions (e.g., to provide orthogonal signals), as will be understood by one of ordinary skill in the art. However, it should be understood that the configuration of sensing elements described herein is merely exemplary and not limiting. As an example, in some implementations, separate sensing element loops may output separate signals to corresponding signal processing configurations, such as disclosed in U.S. Patent No. 9,958,294, which is incorporated herein by reference in its entirety. More generally, in various implementations, various known sensing element configurations may be used in conjunction with the principles disclosed and claimed herein to be used in conjunction with various known scale patterns and signal processing schemes.

[0073] The various components of the set of sensing elements SETSEN and the field generating coils FGC may be fixed to a substrate (e.g. Figure 1The field generating coil FGC can be described as surrounding an inner region INTA having a nominal coil region length dimension NCALD in the x-axis direction and a nominal coil region width dimension of approximately YSEP in the y-axis direction. The inner region INTA is aligned with the periodic scale pattern 380 of the signal modulation element SME during operation, substantially as shown. In the illustrated specific implementation, the field generating coil FGC includes a single turn around the inner region INTA. However, it should be understood that in various other specific implementations, the field generating coil FGC may include multiple turns, and / or meander to operatively surround (e.g., operatively partially surround) an inner region INTA aligned with the scale pattern 380, and operatively surround (e.g., operatively partially surround) other inner regions aligned with scale traces including other scale patterns, as disclosed in the incorporated references. In any case, in operation, the field generating coil FGC generates a changing magnetic flux in the inner region INTA in response to a coil drive signal. In the illustrated implementation, the first connection portion CP1 and the second connection portion CP2 may be used to transfer the signal from the signal processing configuration (eg, Figure 1 The coil drive signal of the signal processing configuration 166) is connected to the field generating coil FGC.

[0074] The set of sensing elements SETSEN (eg, sensing elements SEN1 - SEN24 ) are arranged along the x-axis direction (eg, corresponding to the measuring axis direction MA) and fixed on a substrate (eg, Figure 1 On the substrate 162). Figure 3 As shown, the components of this set of sensing elements include conductive loops or conductive loop portions (e.g., SEN1-SEN24), which define a sensing element effective area EffASEN corresponding to a portion of the sensing element aligned with or overlapping an inner area INTA surrounded by the field generating coil FGC (i.e., a portion of the sensing element aligned with or overlapping a dimension YSEP of INTA). In various specific implementations, the sensing element effective area EffASEN aligned with or overlapping the inner area INTA can be described as having an effective y-axis dimension EffYSEN along the y-axis direction perpendicular to the measuring axis direction, and a maximum dimension DSENmax along the measuring axis direction (x-axis direction). Figure 3 In the particular implementation shown, the effective y-axis dimension EffYSEN is equal to YSEP because the maximum sensing element dimension YSENMAX of each sensing element SEN along the y-axis direction exceeds YSEP, and therefore its effective area EffASEN extends to the entire dimension YSEP. The maximum dimension DSENmax along the measurement axis direction is nominally 0.5*W1. However, these characteristics are specific to this implementation and are not limiting, and may be optional (or undesirable) in various implementations, as described below with reference to Figure 5B, Figure 6 , Figure 7 and Figure 8 Described in more detail.

[0075] It is useful to further characterize the sensing element active area EffASEN by the average sensing element size DSENavg along the measurement axis = (EffASEN / EffYSEN). Figure 3 In the particular implementation shown, DSENavg is the same as DSENmax because the cell active area EffASEN has parallel sides perpendicular to the x-axis. However, this need not be the case in all implementations, as described below with reference to Figure 5B , Figure 6 , Figure 7 and Figure 8 Describe in more detail.

[0076] The components of a set of sensing elements SETSEN are configured to provide a detector signal responsive to a local effect on a changing magnetic flux provided by adjacent signal modulation elements SME (e.g., one or more signal modulation elements SME) of the scale pattern 380. The signal processing arrangement (e.g., Figure 1 The signal processing arrangement 166 etc. of the detector portion 367 may be configured to determine the position of a set of sensing elements SETSEN relative to the scale pattern 380 based on the detector signals input from the detector portion 367. In general, the field generating coils FGC and the set of sensing elements SETSEN etc. may operate according to known principles (e.g., for inductive encoders), such as those described in the incorporated references.

[0077] In various specific implementations, the field generating coil FGC and the sensing element SEN are insulated from each other (e.g., such as being located in different layers of a printed circuit board, etc.). In one such specific implementation, the maximum sensing element y-axis dimension YSENmax of the sensing element SEN is advantageously greater than the nominal coil area width dimension YSEP and extends beyond the inner edge of the elongated portion EP1 or EP2 by an amount defined as the overlap dimension. In addition, the field generating coil FGC can be advantageously configured such that the trace width of the elongated portions EP1 and EP2 along the y-axis direction is greater than the corresponding overlap dimension. In various specific implementations, the elongated portions EP1 and EP2 can be manufactured on a first layer of a printed circuit board, and the sensing element SEN can include a conductive loop manufactured in one or more layers of the printed circuit board, the conductive loop including a layer different from the first layer at least in the vicinity of the overlap dimension. However, as further described below, such specific implementations are merely exemplary and not restrictive.

[0078] As previously indicated, in some implementations, the field generating coil FGC may include one or more conductive traces fabricated on a printed circuit board, and the members SEN of a set of sensing elements SETSEN may include a magnetic flux sensing loop or loop portion formed by conductive traces fabricated on a printed circuit board. Figure 1 As described above, in various specific implementations, the detector portion 367 may be included in various types of measuring instruments (e.g., calipers, micrometers, gauges, linear scales, etc.). For example, the detector portion 367 may be fixed to a sliding member, and the scale pattern 380 may be fixed to a beam or spar member having a measuring axis coinciding with the x-axis direction. In such a configuration, the sliding member may be movably mounted on the beam or spar member and may be movable along the measuring axis direction MA in a plane extending along the x-axis direction and the y-axis direction, wherein the z-axis direction is orthogonal to the plane.

[0079] about Figure 3 The enlarged cross section of the detector portion 367 and the scale pattern 380 illustrated in the lower portion shows three exemplary components SEN14, SEN15 and SEN16 of a set of sensing elements SETSEN and two exemplary signal modulation elements SME, bounded by a portion of the field generating coil FGC. In this specific implementation, the sensing elements can be formed by traces manufactured on the first and second layers of the circuit board, with an insulator layer in between. The "first layer" traces are shown as solid lines, and the "second layer" traces are shown as dashed lines. The small arrows indicate the direction of the current induced in the traces by the changing magnetic field generated by the magnetic field generating coil FGC. It can be seen that the sensing element SEN14 can be characterized as a "SEN+" positive polarity loop due to its associated current direction, and the adjacent sensing element SEN15 can be characterized as a "SEN-" negative polarity loop due to its associated "opposite polarity" current direction. The next adjacent sensing element SEN16 can be characterized as a "SEN+" positive polarity loop again, and so on.

[0080] DSME is the average size along the measurement axis MA of the "active area" EffRSME of the (first type) signal modulation element SME. The active area EffRSME of the signal modulation element SME is defined herein as the part that is aligned with or overlaps the y-axis dimension of the inner area INTA. The active area EffRSME produces the main signal modulation effect in the sensing element SEN. Figure 3 In the example shown in FIG. 1 , it can be seen that this is part of the signal modulation element SME, which is Figure 3 The specific implementation shown in the figure coincides with the span of the dimension YSEP along the y-axis direction. In various specific implementations, the average dimension DSME of the signal modulation element SME can be considered as the area of ​​the effective area EffRSME of the signal modulation element SME divided by the y-axis dimension of the effective area EffRSME. Figure 5A , Figure 5B , Figure 6 , Figure 7 and Figure 8 Other examples of dimensions DSME for other configurations of the signal modulation element SME are shown in .

[0081] As previously referenced Figure 2 As outlined, a sensing element such as the sensing element SEN conventionally has a maximum dimension DSENmax of 0.5*W1 along the measuring axis. Such dimensions may be advantageous in various specific implementations. In addition, as previously described with reference to Figure 2 As outlined above, signal modulation elements such as signal modulation elements SME conventionally have an average width dimension DSME of 0.5*W1. Contrary to conventional prior art design practices outlined above, the present inventors have discovered that certain performance characteristics can be improved when the signal modulation element SME is configured to have an average width dimension DSME that is significantly larger than 0.5*W1, such as Figure 3 For example, in various implementations, it may be advantageous if DSME is at least 0.55*W1 and at most 0.8*W1. In some such implementations, it may be most advantageous if DMSE is at least 0.66*W1 or 0.7*W1 or more. Figure 4 Some reasons for this are described.

[0082] Furthermore, the inventors have discovered that, in order to mitigate certain errors that would otherwise occur, and to obtain optimal accuracy in various applications, it is most desirable to use them in conjunction with unconventional sensing elements SEN that are configured so that their sensing element average size DSENavg falls within a range significantly less than 0.5*W1. For example, in various specific implementations, it may be desirable if the sensing element average size DSENavg is at least 0.285*W1 and at most 0.315*W1. The unconventional combination of characteristics outlined above provides advantageous detector signal characteristics (e.g., providing a better signal-to-noise ratio (S / N) and / or a reduced error component in the detector signal) compared to configurations according to prior art design principles.

[0083] Figure 4 yes Figure 3 , including a qualitative representation of magnetic flux and flux coupling characteristics that may be associated with the operation of a signal modulation element SME in such a position encoder. Figure 4 Various considerations are shown as to why the signal modulation element SME may advantageously be configured to have an average width dimension DSME of at least 0.55*W1 and at most 0.8*W1 in various specific implementations.

[0084] Figure 4 The response of the signal modulation element SME to the generated varying magnetic field GCMF provided by the field generating coils FGC as previously outlined is shown. Figure 4 As shown, the coil drive signal current Igen applied in the field generating coil FGC generates a changing magnetic field GCMF, which is inductively coupled to the signal modulation element SME. The signal modulation element SME is Figure 4 In response to the coupled changing magnetic field GCMF, an induced current Iind is generated in the signal modulation element SME, which generates a flux line (the flux line includes Figure 4 The illustrated flux lines represent the central magnetic flux CF represented by the central magnetic flux line CFL, and the fringe magnetic flux MF represented by the closed fringe magnetic flux lines MFL1-MFL3, shown as a conductive loop surrounding the signal modulation element SME.

[0085] In general, it should be understood that the components of a set of sensing elements SETSEN generate a signal (or signal components) responsive to the induced changing magnetic flux as indicated in the above summary. In particular, the generated signal is responsive to the amount of magnetic flux effectively coupled through its internal loop area to generate a signal component or signal component that is in Figure 4 The sensing element SEN14 in the circuit is represented as current Isense. Figure 4 As shown, in various embodiments, the detector portion 367 and the scale pattern 380 can be approximately planar (e.g., they can include or be formed on an approximately planar substrate), and the detector portion 367 can be configured to be mounted approximately in parallel to the periodic scale pattern 380 with a nominal operating gap GapZ ​​between their respective conductors. For example, in various embodiments, the nominal operating gap Z can be at least 0.075*W1 to facilitate practical assembly and alignment tolerances. In some such embodiments, the nominal operating gap can be at least 0.15*W1. As shown in FIG. Figure 4 As shown, the central magnetic flux CF will generally be effectively coupled through the sensing element SEN14 within the practical range of the operating gap. However, due to the operating gap, at least some of the marginal magnetic flux MF may not be effectively coupled through the sensing element SEN14. For example, at a relatively large size of the operating gap GapZ, such as Figure 4 As exaggerated in FIG. 1 , none of the edge flux lines MFL1-MFL3 couples through the sensing element SEN14 and contributes to the current Isense. As a result, for Figure 4 In the configuration qualitatively described in FIG. 1 , the signal sensed by the sensing element SEN14 modulates the effective width Weff of the element SME (given by Figure 4The dotted line in the figure corresponds only to the coupled central magnetic flux line CFL. Figure 4 It can be seen from FIG. 1 that even if the operating gap GapZ ​​is reduced, for example by coupling the edge flux lines MFL3 through the sensing element SEN14 , the effective width Weff will still be smaller than the average size DSME of the signal modulation element SME.

[0086] Therefore, with the above reference Figure 2 Contrary to the teachings of the conventional prior art outlined, the signal modulation element SME advantageously has an average size DSME greater than the desired effective width Weff, so that when it moves past the sensing element SEN along the measurement axis direction, it has an effective width Weff that produces a desired maximum signal change and / or a desired relative displacement of the signal curve. For example, in some specific implementations, the size Weff may be desired to be approximately 0.5*W1, which, according to the discussion above, means that when using the actual operating gap GapZ, the average size DSME of the signal modulation element SME may be desired to be at least 0.6*W1, or 0.66*W1, or 0.7*W1, or more in some such specific implementations.

[0087] It should be understood that when the signal modulation element SME is a conductive plate rather than a Figure 4 When the conductive loop is shown, a distribution of "concentric" eddy currents can be generated in such conductive plates in response to the generated changing magnetic field GCMF. These eddy currents are operationally similar to Figure 4 However, if the average size DSME of the conductive plate is Figure 4 If the conductive loop SME shown is the same, then due to the distributed "concentric" pattern of eddy currents, their "equivalent current position" will be located somewhere inside the edge of the conductive plate, resulting in an even smaller effective width Weff associated with a conductive loop of similar size. Therefore, in addition to using relatively large average size values ​​DSME when a relatively large operating gap is used between the detector portion 367 and the scale pattern 380, it may be particularly desirable for the conductive plate type signal modulation element SME to have an average size DSME close to the larger end of the desired range outlined above. For example, the inventors have found that an average size DSME between 0.7*W1 and 0.8*W1 is advantageous in some such specific implementations.

[0088] As a further consideration, with respect to the relationship of the desired signal distribution relative to the displacement, it should be understood that the undesired spatial harmonics included in the signal distribution generally depend on the shape of the signal modulation elements SME and their effective width Weff and the shape and width of the sensing elements SEN, and the operating gap between them. For example, in a detector and scale configuration similar to those outlined above, when the effective width Weff is approximately 0.5*W1, even spatial harmonics are largely eliminated from the detector signal. However, odd spatial harmonics corresponding to 0.33*W1, etc. may remain. It has been suggested in U.S. Patent Application No. 16 / 021,528, published as US2020 / 0003581, that configuring the signal modulation element SME to provide an effective width Weff of 0.66*W1 may tend to suppress odd spatial harmonics corresponding to 0.33*W1. Alternatively, the inventors have recently learned that it has been suggested in the previously incorporated '708 patent that configurations of signal modulation elements having an actual width of 5 / 6*W1 (approximately 0.83*W1), with or without time slots of width 1 / 6*W1 between them, may tend to suppress odd spatial harmonics corresponding to 0.33*W1. It should be noted that this does not take into account the interpretation of the effective width Weff outlined above, and therefore is not possible to operate as described in the '708 patent. In any case, these configurations do not actually provide the expected or desired level of spatial filtering. Given the high accuracy that previously known state of the art inductive position encoders have achieved, these configurations do not provide the expected or predicted level of spatial filtering, and do not desirably improve or advance the state of the art in the art.

[0089] As disclosed herein, the inventors have discovered certain configurations of the sensing element SEN that can be used in combination with the configuration of the signal modulation element SME outlined above to remedy the shortcomings of the spatial filtering outlined above. Figure 6 , Figure 7 and Figure 8 Various desirable configurations of the sensing element SEN shape are described in detail and are referred to below. Figures 9 to 13 and Figure 14 to Figure 17 Various desired configurations according to the prescribed relationship of the position and / or shape of the sensing element SEN are described in detail. However, before that, reference is made to Figure 5A and Figure 5B The examples shown are to clarify the definitions or explanations of certain dimensions and terms used in the description. Figure 5A and Figure 5B is a schematic diagram of a Figure 3 Plan views of certain aspects of respective signal modulation element and sensing element implementations of those shown, including additional examples of certain exemplary dimensions that may characterize them in accordance with the principles disclosed herein.

[0090] Figure 5A and Figure 5B is a plan view schematically showing a specific implementation of a corresponding inductive electronic position encoder, which illustrates the previously referenced Figure 3 Further examples of the dimensions and terms DSENmax, DSENavg, DSME, EffRSME, EffASEN and EffYSEN are outlined. The dimension YSEG is also introduced and explained. It should be understood that Figure 5A and Figure 5B Certain numbered components 5XX may correspond to and / or provide similar Figure 3 Like numbered components 3xx have similar operations or functions and may be understood similarly unless otherwise noted.

[0091] Figure 5A and Figure 5B Shown as applied to Figure 5A The non-straight boundary contour of the signal modulation element SME and Figure 5B The spatial wavelength W1 of the non-rectilinear boundary profile of the sensing element in FIG. 4 and the dimensions and terms outlined previously. The previously outlined effective area EffRSME of the signal modulation element SME is indicated by the dashed fill within the zone or region of the signal modulation element SME, falling within its boundaries shown by the dashed outline and aligned with or overlapping the internal area INTA. DSME is the average size of the effective area EffRSME of the signal modulation element SME along the measurement axis direction MA. In various specific implementations, the average size DSME can be regarded as the area of ​​the effective area EffRSME of the signal modulation element SME divided by the y-axis direction size of the effective area EffRSME. For convenience and consistency of definition, for a conductive plate type signal modulation element SME, the relevant size may correspond to the edge of the SME, and for a conductive loop type signal modulation element SME, the relevant size may correspond to the centerline of the conductor. For Figure 5A and Figure 5B In the specific implementation shown, the y-axis dimension of the effective area EffRSME is the same as the dimension YSEP, because the dimension YSEP of the inner area INTA of the field generating coil FGC is smaller than the y-axis dimension of the signal modulation element SME and is included therein. However, this is not necessarily the case in all specific implementations (for example, Figure 7 As shown), and the previous definition of the effective area EffRSME is more general, including the case where the y-axis dimension of the effective area EffRSME is smaller than the dimension YSEP.

[0092] The previously outlined active area EffASEN of the sensing element SEN is indicated by the diagonal fill within the area of ​​the sensing element SEN, falling within its boundaries shown in solid outline and aligned with or overlapping the interior area INTA. As previously outlined, DSENmax is the maximum sensing element width dimension of the active area EffASEN of the sensing element SEN along the x-axis or measurement axis direction MA. DSENavg is the average sensing element width dimension, defined as DSENavg=EffASEN / EffYSEN. As previously outlined, EffYSEN is the y-axis dimension of the sensing element active area EffASEN. Figure 5A and Figure 5B In the particular implementation shown, the effective y-axis dimension EffYSEN is equal to YSEP because the maximum sensing element dimension of each sensing element SEN along the y-axis direction exceeds YSEP, and the effective area EffASEN therefore extends to the entire dimension YSEP. Figure 5A In the particular implementation shown in , the active area EffASEN has parallel sides perpendicular to the x-axis direction and has a dimension YSEG spanning YSEP, so that DSENavg is the same as DSENmax. For convenience, YSEG is defined as the y-direction dimension of the conductor segments defining the sensing elements SEN spaced apart from each other at the maximum dimension DSENmax and extending straight along the y-axis direction. For Figure 5B In the particular implementation shown in , the active area EffASEN has a configuration having a dimension DSENmax in its middle along the y-axis direction, but its sides taper or curve so that it becomes narrower toward the top and bottom of the active area EffASEN. Therefore, as shown, DSENavg is slightly less than DSENmax. For convenience and consistency of definition, when determining DSENavg = EffASEN / EffYSEN, the relevant dimension of the sensing element SEN can correspond to the centerline of its defining conductor. Figure 5A and Figure 5B In the specific implementation shown, DSENmax is nominally 0.5*W1. However, this value is not limiting (e.g., as described below). Figure 8 According to the following reference Figure 6 , Figure 7 and Figure 8 The principle of overview, Figure 5A and Figure 5B The size DSENavg of the configuration of the sensing element SEN shown in FIG. 5 is not preferred and is presented only to clarify the definition or determination of DSENavg. Figure 5BThe dimension CCSEN shown is the center-to-center spacing of the sensing elements SEN along the x-axis. In various embodiments, it may be advantageous if CCSEN is 0.5*W1, regardless of the shape or dimension DSENavg of the sensing elements SEN.

[0093] Figure 5A and Figure 5B Also illustrated is a dimension DSPC, which is equal to W1 minus DSME. A first approach is described, and the dimension DSPC can be described as corresponding to the "non-signal modulation space" between the first type of signal modulation elements SME. However, a second approach applicable to various other specific implementations of periodic scale patterns is described more generally, and the dimension DSPC can be described as corresponding to a second type of signal modulation element located between the first type of signal modulation elements SME along the measuring axis direction. Compared with the first type of signal modulation element SME, the second type of signal modulation element is configured to have a relatively small effect on the changing magnetic flux. For example, in some specific implementations, the second type of signal modulation element includes a non-conductive material area. In some such specific implementations, the second type of signal modulation element includes a non-conductive scale substrate area, wherein the first type of signal modulation element SME includes a conductor manufactured and / or fixed on the non-conductive scale substrate. As another example, in some specific implementations, the second type of signal modulation element may include a "deeper recessed" area of ​​conductive material used to form the scale pattern and the first type of signal modulation element SME may include a "non-recessed" area of ​​conductive material.

[0094] Returning now to the discussion of filtering out the third spatial harmonic error component (whose period is 0.33*W1) from the sensing element signal, as previously mentioned, the inventors have discovered certain configurations of the sensing element SEN that can be used in combination with the configuration of the signal modulation element SME outlined above to compensate for the shortcomings of the spatial filtering outlined above. It is known in the prior art to attempt to filter out the third spatial harmonic error component from the sensing element signal in various ways. One approach is to configure the sensing element to be a sinusoidal shape, theoretically including only the fundamental spatial frequency corresponding to W1. However, due to various practical considerations and / or manufacturing limitations and / or assembly or gap variations, this does not completely suppress the third spatial harmonic error component. Another approach is to arrange the set of sensing elements SETSEN with a spatial phase of 0.33*W1 from each other, and process the resulting signal to remove the third spatial harmonic error component. This approach is relatively effective, but in many applications, for practical reasons, it is desirable to provide orthogonal signals from the set of sensing elements SETSEN (i.e., at a spatial phase distance of 0.25*W1), which may make it difficult or impractical to arrange the set of sensing elements SETSEN at a spatial phase distance of 0.33*W1 (e.g., due to layout limitations or interference).

[0095] In order to address the problems and deficiencies inherent in the approach outlined above, the inventors have discovered that a configuration of sensing elements SEN providing a sensing element average size DSENavg in a particularly advantageous range can be used in combination with the configuration of the signal modulation element SME outlined above to substantially filter out and / or suppress third spatial harmonic error components. Surprisingly, for certain detector portions and / or sensing element configurations in certain encoders, the particularly advantageous range does not include 0.33*W1, which might have been expected based on obvious theoretical considerations. For example, as disclosed herein, when the sensing element SEN is configured to provide a sensing element average size DSENavg of at least 0.285*W1 and at most 0.315*W1, for a practical range and operating gap of wavelength W1, some detector portions and / or sensing element configurations are particularly advantageous for use in combination with signal modulation elements SME having an average size DSME of at least 0.55*W1 and at most 0.8*W1. Reference is made below to Figure 6 , Figure 7 and Figure 8 Various desirable configurations of such sensing elements SEN are described in detail.

[0096] Figure 6 , Figure 7 and Figure 8 1 is a plan view showing various specific implementations of a sensing element SEN including a signal modulation element SME and a scale pattern 680. Figures 9 to 12 The sensing element configuration principles disclosed herein are compatible or can be used independently. In any case, the specific implementations disclosed are suitable for use in applications such as Figure 1 The detector portion 667 (and / or 767, or 867) and the scale pattern 680 in the electronic position encoder are shown. Figure 6 , Figure 7 and Figure 8 Also included are examples of various dimensions that may characterize important features of the sensing element SEN. To aid understanding of the layout of the conductors in the sensing element SEN, their loop polarity is indicated by current flow arrows in their conductor segments and / or by "+" and / or "-" symbols located inside their loops and / or as a suffix (+) or (-) in the label, in accordance with the convention used in the following figures. It should be understood that Figure 6 , Figure 7 and Figure 8 Certain numbered and / or named components in may correspond to Figure 5A and Figure 5B Similar numbered or named components of and / or operate similarly and may be understood similarly unless otherwise noted. Therefore, only certain differences of the sensing element SEN and the signal modulation element SME will be emphasized in the following description.

[0097] Figure 6 The specific implementation shown includes something like Figure 5A and Figure 5B The signal modulation elements SME of those shown have an effective area EffRSME of average size DSME of approximately 0.75*W1 (in this particular implementation).

[0098] The sensing element SEN comprises a conductor on a first manufacturing layer (shown in solid outline) and a conductor on a second manufacturing layer (shown in dashed outline), which are connected by a feedthrough FT according to known methods (e.g., as described in the incorporated references). In this specific implementation, the field generating coil FGC is manufactured on a third manufacturing layer so as to insulate it from the feedthrough FT. Figure 6 As shown, the conductor of the sensing element SEN includes y-axis segments having a short y-axis dimension YSEG and spaced apart along the x-axis by DSENmax=0.5*W1, and a segment tapering from the y-axis segment to the feedthrough FT. The associated trapezoidal active area EffASEN (denoted by Figure 6 ) has a y-axis dimension EffySEN, which is equal to YSEP in this specific implementation. In various specific implementations using sensing element shapes and signal modulation elements SME similar to this, it was unexpectedly determined that it may be advantageous when the sensing element SEN is configured so that DSENavg=EffASEN / EffYSEN is at least 0.285*W1 and at most 0.315*W1. In some specific implementations, it may be particularly desirable if DSENavg is at least 0.29*W1 and at most 0.31*W1. For a given DSENmax selection, various values ​​of DSENavg can be provided by appropriately configuring the dimension YEG and the position of the feedthrough and adjacent conductors. In some such specific implementations, the y-axis dimension YSEG can be zero. Although DSENmax is nominally 0.5*W1 in the particular implementation illustrated, the conductors of the various layers may be configured to include overlapping x-axis direction segments about dimension YSEG and between adjacent sense elements SEN so that DSENmax may be less than 0.5*W1 if desired.

[0099] Figure 7 Includes certain numbered and / or named components that may correspond to Figure 6 (as well as Figure 5A and Figure 5B ) and / or operate similarly and may be understood similarly unless otherwise noted. Therefore, only certain differences between the sensing element SEN and the signal modulation element SME will be emphasized in the following description. Figure 7 The specific implementation shown includes something like Figure 6The signal modulation elements SME of those shown have an effective area EffRSME with an average size DSME of approximately 0.75*W1 (in this particular implementation).

[0100] The sensing element SEN is similar to Figure 6 , and comprises conductors on a first manufacturing layer (shown in solid outline) and conductors on a second manufacturing layer (shown in dashed outline), which are connected by a feedthrough FT according to known methods (e.g., as described in the incorporated references). However, the feedthrough FT is located within the inner area INTA. This has the advantage that in this specific implementation the field generating coils FGC can be manufactured on the first and / or second manufacturing layers, which reduces the manufacturing cost of the detector portion 767. The disadvantage is that the effective area EffASEN of the sensing element SEN may be smaller than Figure 6 In the implementation shown, this may reduce signal strength. However, this may be a desirable tradeoff in some applications. Figure 7 The hatched fill in (indicated in FIG. 1 ) has a y-axis dimension EffySEN that is less than YSEP in this specific implementation. In various specific implementations using sensing element shapes and signal modulation elements SME similar to this, it was unexpectedly determined that it may be advantageous when the sensing element SEN is configured so that DSENavg = EffASEN / EffYSEN is at least 0.285*W1 and at most 0.315*W1. In some specific implementations, it may be particularly desirable if DSENavg is at least 0.29*W1 and at most 0.31*W1. For a given DSENmax selection, various DESNavg values ​​can be provided by appropriately configuring the dimension YEG and the positions of the feedthrough and adjacent conductors. Although DSENmax is nominally 0.5*W1 in the specific specific implementation illustrated, the conductors of the various layers can be configured to include overlapping x-axis direction segments near the dimension YSEG and between adjacent sensing elements SEN so that DSENmax can be less than 0.5*W1 if desired. For a specific implementation of similar shape, when DSENmax is 0.5*W1 or less, the size YSEG may need to be at least 0.14*EffYSEN or larger so that DESNavg is at least 0.285*W1.

[0101] Figure 8 Includes certain numbered and / or named components that may correspond to Figure 6 (as well as Figure 5A and Figure 5B ) and / or operate similarly and may be understood similarly unless otherwise indicated. Therefore, only certain differences between the sensing element SEN and the signal modulation element SME will be emphasized in the following description. Figure 8 The specific implementation shown in includes something like Figure 6 The signal modulation elements SME, those shown in , have an effective area EffRSME whose average dimension DSME is approximately 0.75*W1 (in this particular implementation).

[0102] The sensing element SEN is similar to Figure 6 , and comprises conductors on a first manufacturing layer (shown in solid outline) and conductors on a second manufacturing layer (shown in dashed outline), which are connected by a feedthrough FT according to known methods (e.g., as described in the incorporated references). In this specific implementation, the field generating coil FGC is manufactured on a third manufacturing layer so as to insulate it from the feedthrough FT. Figure 8 As shown, the conductor of the sensing element SEN includes y-axis directional segments having a long y-axis dimension YSEG (longer than and spanning the dimension YSEP of the inner area INTA) and spaced apart along the x-axis by DSENmax, and segments connecting these segments to the feedthrough FT. The associated rectangular active area EffASEN (denoted by Figure 8 ) has a y-axis dimension EffySEN, which is equal to YSEP in this specific implementation. In this specific implementation, DSENavg = DESNmax. In various specific implementations using a sensing element shape and a signal modulation element SME similar to this, it was unexpectedly determined that it may be advantageous when the sensing element SEN is configured so that DSENmax and DSENavg are at least at least 0.285*W1 and at most 0.315*W1. In some specific implementations, it may be particularly desirable if DSENmax and DSENavg are at least 0.29*W1 and at most 0.31*W1. Figure 8 The specific implementation shown in may be less sensitive to unwanted signal variations that may otherwise occur due to various misalignment errors.

[0103] With respect to the advantageous ranges of the size DSME of the signal modulation element SME disclosed above, for many practical applications using the maximum practical gap allowed by signal strength considerations, the most advantageous value of DSME may be at least 0.66*W1, or 0.7*W1 or more. For example, in various specific implementations, a value of 0.75*W1 for DSME has proven to be particularly advantageous. However, as suggested by the previous discussion, this may depend to some extent on the specific wavelength W1, the specific operating gap and operating frequency, and the specific shape and configuration of the signal modulation element SME.

[0104] With respect to the advantageous ranges of the size DSENavg of the sensing element SEN disclosed above, for many practical applications using the maximum practical gap allowed by signal strength considerations and the most advantageous value of DSME outlined above (e.g., DSME=0.75*W1), the most advantageously combined value of DSENavg may be in the range of 0.29*W1 to 0.31*W1, at least for applications using the same configuration as described above with reference to FIG. Figures 6 to 9 Specific implementations of sensing element shapes and signal modulation element SMEs similar to those outlined. In some such specific implementations, DSENavg = 0.30*W1 has proven to be particularly advantageous. However, as suggested by the previous discussion, this depends to some extent on the specific wavelength W1, and the specific operating gap, and the specific size DSME, as well as the shape and configuration of the signal modulation element SME.

[0105] It should be understood that the third spatial harmonic error content in the signal from a set of signal modulation elements SETSEN is extremely sensitive to the selection of dimensions within the above disclosed range. For example, for actual variations in manufacturing dimensions and / or variations in operating gaps associated with a set of signal modulation elements SETSEN, it is desirable to select the dimension DESNavg so that it excludes the third spatial harmonic error content in the signal. Surprisingly, when using sensing element shapes and signal modulation elements SME similar to those outlined above, the inventors have found that in a specific implementation configured to provide a value of 0.3*W1 for DSENavg, the error component associated with the third spatial harmonic error content is uniformly insensitive to variations in the dimension DSME of the signal modulation elements SEN in the range of DSME=0.72*W1 to DSME=0.79*W1. Conversely, if the value DSENavg changes by as little as 10% from this value (e.g., to 0.27*W1 or 0.33*W1), the error component associated with the third-order spatial harmonic error content will increase by a factor of 10 or more for variations in the sensing element SEN in the range of DSME=0.72*W1 to DSME=0.79*W1, which is unacceptable.

[0106] One possible explanation as to why the disclosed favorable range for the dimension DSENavg differs significantly from the “naive” expected value of 0.33* is that error components arising from scale position dependent impedance variations in the detector are affected by DSENavg. Such position dependent impedance variations may be on the order of 1% and are unknown or not considered in the prior art. It is possible that the favorable range for DSENavg disclosed herein “adjusts” or tunes these impedance variations so that when their signal component constituents are “aliased” to combine with other sources of third spatial harmonic error content, the sum of the effects is to negate the third spatial harmonic error content. Such subtle effects and associated design characteristics have not been considered in the prior art. It should be understood that although the above has been addressed with respect to the above references, the prior art does not consider the effects of these subtle effects and associated design characteristics. Figures 6 to 8 The detector portion and signal modulation element implementations similar to those outlined above are used to verify and determine particularly advantageous values ​​of DSENavg, but such values ​​are exemplary only and not limiting. For example, other detector portion and / or signal modulation element implementations may result in different advantageous ranges of DSENavg values, for example, possibly due to different error components caused by impedance changes in the detector portion that are dependent on the scale position, as outlined above. Therefore, it should be understood that according to the following reference Figures 9 to 17 Specific detector portions configured according to the disclosed first or second type of prescribed relationship principles may benefit from using specific DSENavg values ​​that fall outside the range of 0.285*W1 to 0.315*W1. For example, a DSENavg value somewhere within the larger range of 0.33*W1+ / -15% may be used to substantially reduce or suppress unwanted third spatial harmonic detector signal components in various detector portions configured according to the disclosed first or second type of prescribed relationship principles below. In particular, when such detector portions are configured to substantially reduce or suppress unwanted third spatial harmonic detector signal components using DSENavg values ​​somewhere within the range of 0.33*W1+ / -15%, and are additionally configured to reduce or suppress unwanted fifth (or seventh or ninth) spatial harmonic detector signal components according to the disclosed first or second type of prescribed relationship principles as outlined below, an unprecedented level of spatial filtering is provided to suppress unwanted spatial harmonics. Furthermore, this unprecedented level of spatial filtering is provided by using a simpler, higher performance, and more economical to manufacture layout of the detector portion.

[0107] Figures 9 to 13 is a partially representative, partially schematic plan view illustrating certain aspects of various exemplary configurations of a set of sensing elements SETSEN configured or arranged according to the prescribed relationship principles of the first type disclosed herein, such that the sensing elements SETSEN are positioned to provide a spatially filtered signal for use such as Figure 1The detector portion X67 (e.g., 967, 1367, etc.) in the electronic position encoder shown, together with the corresponding compatible field generating coil configuration FGC and the scale pattern X80 (e.g., 980, 1380, etc.), and includes various dimensions that can characterize the first type of prescribed relationship principle for positioning its sensing element SETSEN. According to the convention used in this article, a specific implementation that conforms to the first type of prescribed relationship principle (described in more detail below) can be referred to as a first type of specific implementation.

[0108] References below Figures 9 to 13 The principles outlined are advantageous for positioning the sensing element SEN to spatially filter out potential fifth (or seventh or ninth) harmonic components in the detector signal, and are particularly advantageous when used in conjunction with a sensing element SEN shaped to spatially filter out potential third harmonic components in the detector signal in accordance with the principles outlined above. However, it should be understood that the following reference to Figures 9 to 13 The outlined principles for positioning the sensing element SEN to spatially filter out potential harmonic error components are not limited thereto. More generally, these principles can be used in conjunction with various other sensing elements SEN and signal modulation elements SME (eg, as known in the art) and still provide significant benefits.

[0109] Conventionally, the sensing elements SEN are positioned periodically along the measurement according to wavelength W1, as previously outlined. In particular, the positive polarity loops of the sensing elements SEN are typically uniformly located at a center-to-center-to-center spacing of W1 or a multiple of W1, and the negative polarity loops of the sensing elements SEN are typically uniformly located at a center-to-center-to-center spacing of W1 or a multiple of W1. In addition, the positions of the positive polarity loops and the negative polarity loops are typically uniformly offset from each other by (W1) / 2 along the measurement axis direction. Such positions and spacings are believed to be optimal for signal strength and for spatially filtering out potential even spatial harmonics (e.g., 2nd, 4th, etc.) in the detector signal. However, the inventors have discovered that in order to provide spatial filtering to mitigate certain additional error components that may otherwise occur, in order to obtain optimal accuracy in various applications, it may be desirable to use different positions and / or spacings for the sensing elements SEN, as described in more detail below.

[0110] Fig. 9 is a plan view illustrating certain aspects of a first set of sensing elements SETSEN-Ph0 (also referred to as SETSEN for short) corresponding to a first spatial phase Ph0, which is a first exemplary configuration of a set of sensing elements configured according to the first type of prescribed relationship principle disclosed herein to provide a spatially filtered signal for use such as Figure 1The detector portion of an electronic position encoder is shown, along with a first compatible field generating coil configuration FGC and a scale pattern 980, and includes various dimensions that can characterize a sensing element configuration according to the principles disclosed herein. Fig. 9 Includes certain numbered and / or named components that may correspond to Figure 2 , Figure 3 and Figure 8 Similar numbered or named components of and / or operate similarly and may be understood similarly unless otherwise noted. Therefore, only certain differences in the location of the sensing element SEN of the detector portion 967 will be emphasized in the following description.

[0111] Briefly, the sensing elements SEN are similar in general shape and their active area EffASEN and their size DSENavg to Figure 8 Those shown in . Fig. 9 In the particular implementation illustrated in , DSENavg is approximately 0.3*W1, however, as previously explained, this is merely exemplary and not limiting in various implementations of the first type. The sensing element SEN includes a conductor on a first manufacturing layer (shown in solid outline) and a conductor on a second manufacturing layer (shown in dashed outline), which are connected by a feedthrough FT (e.g., an inner layer feedthrough insulated from the field generating coil configuration FGC) according to known methods (e.g., as described in the incorporated references). Fig. 9 At certain locations in the figure, the "non-loop" portions of conductors on different layers are aligned with each other, and only a single conductor layer is shown. The presence of hidden "aligned" conductors can be inferred by a person skilled in the art. In this specific implementation, the field generating coil FGC is manufactured on a third manufacturing layer to insulate it from the feedthrough FT and the conductors connected to it. To aid understanding of the layout of the conductors in the sensing element SEN, their loop polarity is indicated by current flow arrows in their conductor segments and / or by "+" and / or "-" symbols located inside their loops and / or as a suffix (+) or (-) in the label, according to the convention used in the following figures.

[0112] like Fig. 9 As implied, the scale extends along the measuring axis direction (MA) and includes a periodic scale pattern 980, which includes signal modulation elements SME and has a spatial wavelength W1. The detector portion 967 is configured to be mounted near the periodic scale pattern 980 and there is relative movement between them along the measuring axis direction MA. The detector portion 967 includes field generating coils FGC and at least one set of corresponding sensing elements SETSEN corresponding to corresponding nominal spatial phases. Fig. 9In the specific implementation shown, a set of corresponding sensing elements SETSEN includes two subgroups or parts SETSEN-Ph0sub1 and SETSENPh0sub2, and corresponds to a corresponding nominal spatial phase Ph0, as described in more detail below. The field generating coil surrounds the internal area INTA, which is aligned with the effective area EffRSME of the signal modulation element SME during operation. A set of corresponding sensing elements SETSEN is arranged along the measurement axis direction and fixed on the substrate. The components of this set of sensing elements include conductive loops or conductive loop parts, which define the sensing element effective area EffASEN, and the effective area EffASEN corresponds to the part of their sensing elements that is aligned or overlapped with the internal area INTA. This set of sensing elements SETSEN is configured to provide a detector signal, which responds to the local effect of the changing magnetic flux provided by the adjacent signal modulation elements SME of the scale pattern 980, and corresponds to its corresponding nominal spatial phase Ph0. The signal processing arrangement is operably connected to the detector portion to provide the coil drive signal and to determine the relative position between the detector portion and the scale pattern based on the detector signal input from the detector portion, as previously outlined herein.

[0113] In the following reference Figures 9 to 13 In various specific implementations of the first type of the disclosed detector signal configured to provide a spatially filtered detector signal, at least a first set of respective sensing elements SETSEN corresponding to respective nominal spatial phases comprises combined features A1, B1, and C1, and further combined features D1 or E1, defined as follows:

[0114] A1) A plurality of positive polarity loops correspond to a first winding direction or polarity, and an equal number of negative polarity loops correspond to a second winding direction or polarity opposite to the first winding direction or polarity.

[0115] B1) Each positive and negative polarity loop has a total sensing element effective area EffASEN aligned with or overlapping one or more internal regions, and is defined as having an effective y-axis dimension EffySEN along the y-axis direction, which is the sum of the dimensions of one or more internal regions perpendicular to the measuring axis direction, and at least most of the positive and negative polarity loops are configured to provide an average sensing element dimension DSENavg = (EffASEN / EffYSEN) along the measuring axis direction within the range of 0.33*W1+ / -15%.

[0116] C1) The positive polarity loops are configured such that their sensing element active areas are arranged in a positive polarity loop prescribed relationship (or simply the positive loop prescribed relationship) relative to the corresponding nominal spatial phases of the corresponding group of sensing elements, and the negative polarity loops are configured such that their sensing element active areas are arranged in a negative polarity loop prescribed relationship (or simply the negative loop prescribed relationship) relative to the corresponding nominal spatial phases of the corresponding group of sensing elements. The positive loop prescribed relationship includes a configuration in which a shift ratio of up to half of the total sensing element active areas of the plurality of positive polarity loops is shifted by (W1) / 4K relative to the corresponding nominal spatial phase in a first direction along the measuring axis direction, and a nominally identical shift ratio of the total sensing element active areas of the plurality of positive polarity loops is shifted by (W1) / 4K relative to the corresponding nominal spatial phase in a direction opposite to the first direction along the measuring axis direction, such that the two shift ratios of the total sensing element active areas of the positive polarity loop areas are shifted by (W1) / 2K relative to each other, where K is one of 3, 5, 7, or 9. The negative loop prescribed relationship includes a configuration in which a shift ratio of up to half of the total sensing element effective area of ​​multiple negative polarity loops is shifted relative to the corresponding nominal spatial phase shift amount (W1) / 4K in a first direction along the measuring axis direction, and a nominally same shift ratio of the total sensing element effective area of ​​the multiple negative polarity loops is shifted relative to the corresponding nominal spatial phase shift amount (W1) / 4K in a direction opposite to the first direction along the measuring axis direction, so that the first two shift ratios of the total sensing element effective area of ​​the negative polarity loop area are shifted from each other by (W1) / 2K.

[0117] D1) Each of the positive and negative polarity loops comprises a sensing element active area EffASEN having a maximum dimension DSENmax of at most 0.45*W1 along the measuring axis direction.

[0118] E1) The corresponding group of sensing elements corresponding to the corresponding nominal spatial phase (SETSENPh0) is configured as a two-part configuration, including: a first separation part, the first separation part includes the same number of positive polarity loops and negative polarity loops; and a second separation part, the second separation part is nominally aligned with the first part along the measuring axis direction, and includes the same number of positive polarity loops and negative polarity loops as the first separation part; wherein the first and second separation parts are separated by a gap located between the first part and the second part along the measuring axis direction, wherein the gap is at least as wide as one of the positive polarity loop or the negative polarity loop along the measuring axis direction, and neither the positive polarity loop effective area nor the negative polarity loop effective area of ​​the group of sensing elements is located in the gap.

[0119] As a result of implementing the combined features A1, B1 and C1 and at least one of the features D1 or E1, as outlined above, the respective set of sensing elements SETSEN corresponding to the respective nominal spatial phases are thereby configured into an actual configuration that provides one or more spatially filtered detector signals that can be used to reduce or suppress potentially unwanted third spatial harmonic detector signal components and potentially unwanted K-th spatial harmonic detector signal components that might otherwise contribute to errors in the determined relative position between the detector portion and the scale pattern. In some first type of specific implementations, it may be particularly advantageous when K=5, as described in more detail below with respect to the various figures. In some first type of specific implementations, it may be advantageous when at least a majority of the positive and negative polarity loops SEN are configured to provide an average sensing element size DSENavg of at least 0.29*W1 and at most 0.31*W1, although the ranges are exemplary only for certain specific implementations and are not limiting.

[0120] Figures 9 to 13 (and below Figure 14 to Figure 17 ) each comprises a "reference grid" indicating the positions of several instances of a corresponding spatial phase Ph0 (also called and / or designated as a nominal spatial phase Ph0nom), separated by a wavelength W1, to more clearly illustrate how each set of sensing elements SETSEN is configured according to the principles outlined above. For the same purpose, the position of the center of the active area EffASEN of each sensing element SEN is indicated by the position of the dashed center line CLSEN.

[0121] Return to Fig. 9 Further discussion of the specific implementation shown is based on Fig. 9 The reference grid and centerline indicators shown are shown by checking Fig. 9 will understand, Fig. 9 The set of sensing elements SETSEN shown implements the features A1, B1, C1 and D1 outlined above. A brief description follows.

[0122] exist Fig. 9 In the specific implementation shown, a corresponding set of sensing elements SETSEN includes two similar sub-groups or parts SETSEN-Ph0sub1 and SETSENPh0sub2, corresponding to the corresponding nominal spatial phase Ph0. The corresponding set of sensing elements SETSEN includes a plurality of positive polarity loops (indicated by "+" inside the loop) corresponding to a first winding direction or polarity, and the same number of negative polarity loops (indicated by "-" inside the loop) corresponding to a second winding direction or polarity opposite to the first. Fig. 9In the particular implementation shown, the two subgroups or portions SETSEN-Ph0sub1 and SETSENPh0sub2 also individually include the same number of positive polarity and negative polarity loops.

[0123] The first half of the total sensing element effective area of ​​the positive polarity loops of the sensing element SETSEN located in the positive polarity loops SEN2 and SEN4 (i.e., the first half of the sum of their sensing element effective areas EffASEN) is shifted by an amount (W1) / 4K relative to the nominal spatial phase Ph0 in the first direction along the measuring axis direction MA, and the second half of the total sensing element effective area EffASEN of the positive polarity loops located in the positive polarity loops SEN5 and SEN7 is shifted by an amount (W1) / 4K relative to the nominal spatial phase Ph0nom in the direction opposite to the first direction along the measuring axis direction MA. As a result, the first half and the second half of the total sensing element effective area of ​​the positive polarity loop area are shifted relative to each other by (W1) / 2K along the measuring axis direction.

[0124] The first half of the total sensing element effective area EffASEN of the negative polarity loops located in the negative polarity loops SEN1 and SEN3 is shifted by (W1) / 4K in the first direction along the measuring axis direction MA relative to the offset (W1) / 2 from the nominal spatial phase Ph0nom, and the second half of the total sensing element effective area EffASEN of the negative polarity loops located in the negative polarity loops SEN6 and SEN8 is moved in the direction opposite to the first direction along the measuring axis direction MA relative to the offset (W1) / 2 from the nominal spatial phase Ph0nom. As a result, the first half and the second half of the total sensing element effective area of ​​the negative polarity loop area are shifted by (W1) / 2K relative to each other along the measuring axis direction. Fig. 9 In the particular implementation shown, the shifts shown correspond to K=5, which is merely exemplary and not limiting, as indicated previously in the description of feature C1.

[0125] exist Fig. 9 In the particular implementation shown, the average sensing element size DSENavg (=EffASEN / EffYSEN) is shown to fall within the range 0.33*W1+ / -15%, which is consistent with the previous description of principle or feature B1.

[0126] As a result of implementing features A1, B1 and C1 as outlined above, Fig. 9The corresponding sensing element SETSEN group shown in corresponding to the corresponding nominal spatial phase Ph0 is thereby configured to provide one or more detector signals that can be used to reduce or suppress potential unwanted third spatial harmonic signal components (based on B1 above) for spatial filtering, and also reduce or suppress potential unwanted K-th spatial harmonic signal components (based on C1 above), which otherwise may contribute to errors in the determined relative position between the detector portion and the scale pattern.

[0127] Regarding the specific implementation of feature D1, Fig. 9 In the specific implementation shown, the maximum sensing element size DSENmax is the same as the average sensing element size DSENavg, which is approximately 0.33*W1. This is less than the requirement of feature D1, which is 0.45*W1. Fig. 9 One aspect of the utility of feature D1 in the illustrated implementation is illustrated by the layout of sensing elements SEN4 and SEN5, which in the illustrated implementation are displaced toward each other by an amount (W1 / 10). It will be appreciated that if sensing elements SEN4 and SEN5 had a wider maximum dimension DESNmax, then the layout of their conductors would overlap and / or interfere between them, requiring layout adjustments and / or sensing area irregularities or distortions (e.g., such as those described in the '130 patent) to facilitate positioning of feedthroughs and / or provide insulation between various conductors, etc. The '130 patent purports to provide an aligned center of mass so as to preclude errors due to "pitch" misalignment (i.e., rotation of the detector portion or scale about the Z axis). Its solution requires a number of problematic layout adjustments and sensing area irregularities (e.g., such as those described in the '130 patent). Figure 8 ), because it uses a sensing element with a nominal maximum size of W / 2 to achieve its teachings. Even with careful attention, there is usually some adverse impact on manufacturing cost, accuracy and / or misalignment sensitivity due to the irregularities of such layouts and sensing areas. In contrast, by Fig. 9 In the configuration shown, feature D1 is implemented, no sensing element SEN in a set of sensing elements SETSEN has a sensing element active area EffASEN that overlaps or interferes with any other sensing element SEN, and although the sensing elements SEN are shifted according to the principles disclosed herein, layout irregularities, sensing element irregularities and their related adverse effects are avoided.

[0128] exist Fig. 9In the specific implementation shown, the set of sensing elements SETSEN is configured as a two-part configuration, wherein the set of sensing elements SETSEN includes: a first adjacent part SETSEN-Ph0sub1, which includes a plurality of (2) positive polarity loops (SEN1 and SEN3) and the same number of (2) negative polarity loops (SEN2 and SEN4); and a second adjacent part SETSEN-Ph0sub2, which includes a number of (2) positive polarity loops (SEN5 and SEN7) and the same number of (2) negative polarity loops (SEN6 and SEN8). The first adjacent part and the second adjacent part are closer to each other along the measurement axis than the width of one of the positive or negative polarity loops (which is why they are referred to as "adjacent" parts in this article), and the corresponding loops in the first and second adjacent parts that are closest to each other (i.e., SEN4 and SEN5) have opposite loop polarities. However, this type of implementation is merely exemplary and not restrictive. Alternative two-part configurations are disclosed further below. Fig.10 11 discusses the area centroid CEN-SETSEN-Ph0 of a set of sensing elements SETSEN.

[0129] With respect to signal processing associated with various two-part configurations, in various specific implementations including a first and a second part (e.g., two adjacent parts or two separate parts as further outlined below), the electronic position encoder may be configured according to one of the methods M1 or M2, as described below:

[0130] Method M1): the first part is configured to output a first detector signal (e.g., a voltage signal V0 across the detector signal output connections SDS1 and SDS2), and the second part is configured to output a second detector signal (e.g., a voltage signal V0′ across the detector signal output connections SDS1′ and SDS2′), and the signal processor is configured to determine a relative position between the detector part and the scale pattern based at least in part on a combination of the first and second signals; or

[0131] Method M2): The first part is connected in series with the second part to form a combined signal, and the series connection is configured so that the corresponding signals of the first and second parts are added in the combined signal; and the signal processor is configured to determine the relative position between the detector part and the scale pattern based at least in part on the combined signal.

[0132] An exemplary implementation of the series connection according to M2 may refer to the aligned trace zone ATZ, such as Fig. 9as shown. In particular, the feedthrough illustrated in the alignment trace zone ATZ can be eliminated, and the “solid” traces of the sensing elements SEN4 and SEN5 contacting the alignment trace zone ATZ can be connected on their shared metal layer by traces crossing the alignment trace zone ATZ. Similarly, the “dashed” traces of the sensing elements SEN4 and SEN5 contacting the alignment trace zone ATZ can be connected on their shared metal layer by traces crossing the alignment trace zone ATZ. If the two connecting traces in the two layers are aligned with each other, then no loop area is created and no significant signal interference will occur. When this type of series connection is used, the detector signal output connection pair SDS1 and SDS2 or SDS1′ and SDS2′ (for example, Fig. 9 and / or shown in other figures herein) can be omitted and the associated connection points on the sensing element loop associated therewith can be reconfigured to achieve continuity of conductors in the same manner as the other “no connection” sensing element loops shown in the figures. Fig.16 This type of series connection is shown in FIG. 1 , which shows a series connection between adjacent parts SETSEN-Ph90sub1 and SETSEN-Ph90sub2 (i.e., between their corresponding sensing elements SEN4 and SEN5). In the case where adjacent parts are connected in series, in some specific implementations, the resulting set of sensing elements SETSEN can be visually represented as a set of continuous and uninterrupted sensing elements (e.g., as shown in FIG. 1 ). Fig.16 ). In this case, it should be understood that such a set of sensing elements SETSEN may be interpreted as a single continuous group in some cases, or in some cases, it may be interpreted as a first adjacent portion and a second adjacent portion connected to create a continuous and uninterrupted set of sensing elements. In some specific implementations, a series connection may be made between a suitable one of the detector signal output connections SDS1 or SDS2 and a suitable one of the detector signal output connections SDS1′ or SDS2′. Other alternative configurations of the series connection will be apparent to those of ordinary skill in the art. It should be understood that the two-part signal processing and / or series connection alternatives outlined above are generally applicable to Figures 9 to 17 Any of the compatible two-part configurations shown in any of the. It should be understood that if Fig.10 If a series connection is provided in the alignment trace zone ATZ between SEN4 and SEN5 in each set of sensing elements shown, then each of them can visually appear and / or be seen as a continuous and uninterrupted sensing element, as outlined above. In this case, it should be understood that Fig.10 Each set of sensing elements in can be considered to include features A1, B1, C1 and D1, but not feature E1.

[0133] Fig.10is a plan view showing the phase corresponding to the second spatial phase Ph90 (in Fig.10 The second set of sensing elements SETSEN-Ph90 (referred to as SETSEN in some contexts below) is configured similarly or identically to the first set of sensing elements SETSEN-Ph0, such as Fig. 9 shown (except for its spatial phase), and therefore will not be described in detail here. Fig.10 The sensing element SEN label shown in the figure is centered on the sensing element of the second set of sensing elements SETSEN-Ph90. It is superimposed on the corresponding Fig. 9 The illustrated first set of sensing elements SETSEN-Ph0 of the first spatial phase Ph0 is de-emphasized to illustrate an operating quadrature configuration, wherein the spatial phases of the first set of sensing elements SETSEN-Ph0 and the second set of sensing elements SETSEN-Ph90 differ by 90 degrees. Fig.10 Includes certain numbered and / or named components that may correspond to and / or be related to Fig. 9 Components with similar numbers or names operate similarly or identically and can be understood similarly unless otherwise specified. Therefore, in the following description, only certain relationships between the first group of sensing elements SETSEN-Ph0 and the second group of sensing elements SSETSEN-Ph90 are emphasized.

[0134] like Fig.10 As shown, the second set of sensing elements SETSEN-Ph90 has a corresponding spatial phase Ph0 that is 90 degrees different from the spatial phase of the first set of sensing elements SETSEN (i.e., shifted 90 degrees to the right). It should be understood that each of the first set of sensing elements SETSEN-Ph0 and the second set of sensing elements SETSEN-Ph90 includes detector signal output connections SDS1 and SDS2 and SDS1′ and SDS2′, similar to Fig. 9 those shown in Fig.10 and others are omitted in the following figure to avoid visual clutter. The first set of sensing elements SETSEN-Ph0 and the second set of sensing elements SETSEN-Ph90 operate together to output orthogonal signals that include a high degree of spatial filtering according to the principles outlined above to provide very high accuracy position measurement. The first set of sensing elements SETSEN-Ph0 and the second set of sensing elements SETSEN-Ph90 both include features A1, B, C1 and D1, thus providing the above reference Fig. 9 Overview of the various advantages. Fig.10It will be appreciated that the layout and performance advantages associated with a particular implementation of these features extend to a "quadrature layout of a superposition of a first set of sensing elements SETSEN-Ph0 and a second set of sensing elements SETSEN-Ph90. That is, it will be appreciated that the first set of sensing elements SETSEN-Ph0 and the second set of sensing elements SETSEN-Ph90 are easily arranged in a desired phase relationship without any of their conductors interfering with each other and without requiring any irregularities or differences in the shapes of the sensing elements SEN. Thus, the layout and performance advantages outlined previously are provided in a fully operational quadrature encoder layout, such as Fig.10 shown.

[0135] Fig.10 One aspect of the specific implementation shown in may not be ideal in some applications. In particular, Fig.10 As shown, because the first group of sensing elements SETSEN-Ph0 and the second group of sensing elements SETSEN-Ph90 are substantially similar or identical, and neither the first group SETSEN-Ph0 nor the second group of sensing elements SETSEN-Ph90 includes feature E1, the area centroid CEN-SETSEN-Ph90 of the second group of sensing elements SETSEN-Ph90 is misaligned by a 90 degree spatial phase shift (i.e., W1 / 4) relative to the area centroid CEN-SETSEN-Ph0 of the first group of sensing elements SETSEN-Ph0. As taught in the '130 patent, when the area centroids of two different groups of sensing elements corresponding to two different spatial phases are misaligned, then the spacing misalignment of their associated detectors (e.g., detector portion 967) or scales (e.g., scale pattern 980) will result in differences in their respective operating gaps and signal strengths. In various applications, such spacing misalignment can be static or dynamic. In any case, static or dynamic differences in signal strength between the two quadrature signals (or three tri-phase signals) either require more complex signal processing (eg, undesirably expensive and / or slow signal processing) or result in undesirable measurement errors. Fig.11A The specific implementation shown addresses these potential issues.

[0136] Fig.11A is a plan view showing the phase corresponding to the second spatial phase Ph90 (in Fig.11A Certain aspects of a second set of sensing elements SETSEN-Ph90 (referred to as SETSEN in some contexts below) designated as Ph90nom in the present invention. It is a second exemplary configuration of a set of sensing elements configured according to the first type of prescribed relationship principle disclosed herein. It corresponds to Fig. 9 The first set of sensing elements SETSEN-Ph0 of the first spatial phase Ph0 shown together in Fig.11AFor illustration purposes, the first group of sensing elements SETSEN-Ph0 and the second group of sensing elements SETSEN-Ph90 are shown in FIG. Fig.11A , to better illustrate their respective characteristics and alignment relative to each other along the measurement axis. They are shown arranged in an operational orthogonal configuration along the measurement axis, with the first set of sensing elements SETSEN-Ph0 and the second set of sensing elements SETSEN-Ph90 being 90 degrees out of spatial phase. It should be understood that in a practical encoder, they are not offset from each other along the "Y-axis" direction. Instead, they are superimposed on each other, similar to Fig.10 A first set of sensing elements and a second set of sensing elements are shown.

[0137] Fig.11A Includes certain numbered and / or named components that may correspond to and / or be related to Fig. 9 and / or Fig.10 Like numbered or named components of the present invention operate similarly or identically and may be understood similarly unless otherwise noted. Fig.11A In the following description only certain differences in the configuration of the second set of sensing elements SETSEN-Ph90 will be emphasized.

[0138] Fig.11A The second set of sensing elements SETSEN-Ph90 shown is specifically implemented with Fig.10 The differences between the specific implementations shown can be briefly described as follows. The first set of sensing elements SETSEN-Ph0 can be considered relative to their Fig. 9 and Fig.10 The second part of the SETSEN-Ph90sub2 sensing elements SEN5-SEN8 can be considered relative to their Fig.10 The first part of the SETSEN-Ph90sub1 has the sensing elements SEN1-SEN4 relative to their Fig.10 In particular, the descriptions of Fig.10 The positions in which they are laid out are Fig.11A The specific implementation shown has been shifted to the left by (W1) / 2 and the output signal connection is now provided at the rightmost sensing element SEN4. Fig.10 Conceptual continuity with Figure 11, they remain associated with the traces of the positive polarity loop. According to the previous description, there is no difference between the operation of the first part SETSEN-Ph90sub1 in terms of the relative position of the signal outputs, such as Fig.10 and Figure 11. In addition, Fig.11AThe first set of sensing elements SETSEN-Ph0 and the second set of sensing elements SETSEN-Ph90 shown include features A1, B, C1 and D1, thus providing the above reference Fig.10 An overview of the various advantages.

[0139] Importantly, for applications that may include pitch misalignment, Fig.11A One aspect of the specific implementation shown is Fig.10 The specific implementation shown is more ideal. In particular, if Fig.11A As shown, due to the first part SETSEN-Ph90sub1 relative to its Fig.10 The position in the image is shifted to the left by (W1) / 2, and the total area centroid CEN-SETSEN-Ph90 of the second group of sensing elements SETSEN-Ph90 is shifted to the left by (W1) / 4, so that it is aligned with the area centroid CEN-SETSEN-Ph0 of the first group of sensing elements SETSEN-Ph0. As taught in the '130 patent, when the area centroids of two different groups of sensing elements corresponding to two different spatial phases are aligned, then their corresponding operating gaps and signal strengths will be equally affected by any static or dynamic spacing misalignment, which eliminates most of the error components that may be generated due to spacing misalignment.

[0140] Fig.11A The specific implementation of the first group of sensing elements SETSEN-Ph0 and the second group of sensing elements SETSEN-Ph90 shown may not refer to Fig.10A full description is as follows. The first set of sensing elements SETSEN-Ph0 corresponds to the first spatial phase Ph0 and includes features A1, B1, C1 and D1 (but not E1). It is configured as a two-part configuration, in which it includes: a first adjacent part SETSEN-Ph0sub1, the part including a certain number (2) of positive polarity loops (SEN1 and SEN3) and the same number (2) of negative polarity loops (SEN2 and SEN4); and a second adjacent part SETSEN-Ph0sub2, the part including a certain number (2) of positive polarity loops (SEN5 and SEN 7) and the same number (2) of negative polarity loops (SEN6 and SEN8). The first adjacent part and the second adjacent part are closer to each other along the measuring axis direction than the width of one of the positive or negative polarity loops (this is why they are referred to as "adjacent" parts in this article), and the corresponding loops closest to each other in the first adjacent part and the second adjacent part (i.e., SEN4 and SEN5) have opposite loop polarities. The second set of sensing elements SETSEN-Ph90 corresponds to the second nominal spatial phase Ph90 and includes features A1, B1, C1, D1 and E1. It is configured as follows including feature E1: it is a two-part configuration, including: a first separated part SETSEN-Ph90sub1, the part including the same number (2) of positive polarity loops (SEN2 and SEN4) and negative polarity loops (SEN1 and SEN3); and a second separated part SETSEN-Ph90sub2, the part is nominally aligned with the first part SETSEN-Ph90sub1 along the measuring axis direction, and includes the same number (2) of positive polarity loops (SEN5 and SEN7) and negative polarity loops (SEN6 and SEN8) as the first separated part SETSEN-Ph90sub1. The first portion SETSEN-Ph90sub1 and the second portion SETSEN-Ph90sub2 are separated by a gap located between the first portion and the second portion along the measuring axis direction, wherein the gap is at least as wide as one of the positive polarity or negative polarity loop SEN along the measuring axis direction. The positive polarity loop effective area EffASEN or the negative polarity loop effective area EffASEN in the second set of sensing elements SETSEN-Ph90 is not located in the gap.

[0141] The first group of sensing elements SETSEN-Ph0 and the second group of sensing elements SETSEN-Ph90 can be further described as follows. The second group of sensing elements SETSEN-Ph90 corresponds to a nominal spatial phase Ph90, which is 90 degrees different from the nominal spatial phase Ph0 of the first group of corresponding sensing elements SETSEN-Ph0. The second group of sensing elements SETSEN-Ph90 is configured so that the corresponding loops (e.g., SEN4 and SEN5) closest to each other in its first separated part SETSEN-Ph90sub1 and second separated part SETSEN-Ph90sub2 have the same loop polarity. The first group of sensing elements SETSEN-Ph0 has a first area centroid CEN-SETSEN-Ph0 of its total sensing element active area located between its first adjacent part SETSEN-Ph0sub1 and second adjacent part SETSEN-Phosub2 along the measuring axis. The second set of corresponding sensing elements SETSEN-Ph90 has a second area centroid CEN-SETSEN-Ph90 of its total sensing element active area located between its first separated portion SETSEN-Ph90sub1 and second separated portion SETSEN-Ph90sub2 along the measuring axis. The first set of sensing elements and the second set of sensing elements are arranged with their respective first area centroid CEN-SETSEN-Ph0 and second area centroid CEN-SETSEN-Ph90 aligned at the same position along the measuring axis direction.

[0142] As previously outlined, when the area centroids of two different sets of sensing elements corresponding to two different spatial phases are aligned, then their respective operating gaps and signal strengths will be equally affected by any static or dynamic spacing misalignment, which eliminates most of the error contributions that may arise due to spacing misalignment. According to a useful perspective, it should be understood that because the second set of sensing elements SETSEN-Ph90 includes feature E1, it includes a gap (i.e., the gap illustrated between SEN4 and SEN5), which facilitates rearranging and / or repositioning certain loops or sensing elements SEN (or products thereof) so as to reposition the area centroids of one set of sensing elements SETSEN in a desired relationship relative to their nominal spatial phases so that the area centroids of multiple sets of sensing elements SETSEN can be realigned in an operational configuration.

[0143] By inspection Fig.11A It can be appreciated that compared to the area centroid alignment technique disclosed in the '130 patent, Fig.11AThe first set of sensing elements SETSEN-Ph0 and the second set of sensing elements SETSEN-Ph90 shown are easy to lay out in a desired phase relationship and with their area centroids aligned without any of their conductors interfering with each other and without any irregularities or differences in the shape of any of their sensing elements SEN. Fig.11A The combination of features A1, B1, C1, D1 and E1 shown and disclosed provides the previously referenced Fig. 9 and Fig.10 Outlining the layout and performance advantages, this also provides the benefits associated with aligning area centroids.

[0144] It should be understood that in Fig.11A In the specific implementation shown, each respective positive polarity or negative polarity loop (e.g., each sensing element SEN) included in one of the first set of respective sensing elements SETSEN-Ph0 or the second set of respective sensing elements SETSEN-Ph90 is configured to provide a respective sensing element active area EffASEN that does not overlap with the sensing element active area EffASEN of any other respective positive polarity or negative polarity loop included in the same set of the first set of respective sensing elements or the second set of respective sensing elements. It should be appreciated that the above reference to Fig. 9 , Fig.10 and Fig.11A The first type of specific implementations outlined can provide unprecedented levels of spatial filtering to suppress multiple unwanted spatial harmonic signal components using a layout of detector portions that is simpler, higher performing, and more economical to manufacture than prior art spatial filtering detectors (e.g., those disclosed in the '130 patent).

[0145] Fig. 11B is a plan view showing the first spatial phase Ph0 (in Fig. 11B This is a third exemplary configuration of a set of sensing elements configured according to the first type of prescribed relationship principle disclosed herein. It corresponds to Fig.11A The second set of sensing elements SETSEN-Ph90 of the second spatial phase Ph90 shown in FIG. Fig. 11B For illustration purposes, the first group of sensing elements SETSEN-Ph0 and the second group of sensing elements SETSEN-Ph90 are shown in FIG. Fig. 11B, to better illustrate their respective characteristics and alignment relative to each other along the measurement axis. They are shown arranged in an operational orthogonal configuration along the measurement axis, with the spatial phases of the first set of sensing elements SETSEN-Ph0 and the second set of sensing elements SETSEN-Ph90 being 90 degrees different. It should be understood that in a practical encoder, they are not offset from each other along the "Y-axis" direction. Instead, they are superimposed on each other, similar to Fig.10 A first set of sensing elements and a second set of sensing elements are shown. Fig. 11B Certain numbered and / or named components are included that may correspond to and / or operate similarly or identically to similarly numbered or named components of FIG. 11 , and may be similarly interpreted unless otherwise noted. Fig. 11B The second set of sensing elements SETSEN-Ph90 in Fig.11A The description in has not changed. Therefore, in Fig. 11B In the following description of FIG. 1 , only certain differences in the configuration of the first set of sensing elements SETSEN-Ph0 will be emphasized.

[0146] Fig. 11B The specific implementation of the first set of sensing elements SETSEN-Ph0 shown is similar to Fig. 11B The differences between the specific implementations shown can be briefly described as follows. Fig.11A The position in Fig. 11B In the specific implementation shown, the first portion SETSEN-Ph0sub1 has been shifted to the left by (W1) / 2, while the second portion SETSEN-Ph0sub2 has been shifted to the right by (W1) / 2. Output signal connections are now provided at the sensing elements SEN4 and SEN6 so that they remain associated with the traces of the positive polarity loop to achieve the same Fig.11A Based on the previous description, in terms of the relative position of the signal output, Fig. 11B and 11A The first set of sensing elements SETSEN-Ph0 is shown with no distinction between the two.

[0147] Fig. 11B The specific implementation of the first group SETSEN-Ph0 and the second group SETSEN-Ph90 of sensing elements shown can be fully described as follows. The second group of sensing elements SETSEN-Ph90 corresponds to the second spatial phase Ph90 and includes features A1, B1, C1, D1 and E1, and the loops (e.g., SEN4 and SEN5) closest to each other in the first separated part SETSEN-Ph90sub1 and the second separated part SETSEN-Ph90sub2 have the same loop polarity. All of these are relative to their Fig.11A The description in has not changed. Instead, except Fig.11AThe first set of sensing elements SETSEN-Ph0 corresponding to the first nominal spatial phase Ph0 now comprises, in addition to the features A1, B1, C1, D1 included in , the feature E1. It is clear that it comprises the feature E1 because it comprises a first separated portion SETSEN-Ph90sub1 and a second separated portion SETSEN-Ph90sub2, which are separated by a gap, the gap being at least as wide as one of the positive polarity or negative polarity loop SEN. The positive polarity loop active area EffASEN or the negative polarity loop active area EffASEN of the second set of sensing elements SETSEN-Ph90 is not located in the gap.

[0148] The first group of sensing elements SETSEN-Ph0 and the second group of sensing elements SETSEN-Ph90 can be further described as follows. The second group of sensing elements SETSEN-Ph90 corresponds to a nominal spatial phase Ph90, which is 90 degrees different from the nominal spatial phase Ph0 of the first group of corresponding sensing elements SETSEN-Ph0. The first group of sensing elements SETSEN-Ph0 is configured so that the corresponding loops (e.g., SEN4 and SEN5) closest to each other in its first separated part SETSEN-Ph0sub1 and second separated part SETSEN-Ph0sub2 have opposite loop polarities. The first group of sensing elements SETSEN-Ph0 has a first area centroid CEN-SETSEN-Ph0 of its total sensing element active area located between its first adjacent part SETSEN-Ph0sub1 and second adjacent part SETSEN-Ph0sub2 along the measuring axis. The second set of corresponding sensing elements SETSEN-Ph90 has a second area centroid CEN-SETSEN-Ph90 of its total sensing element active area located between its first separated portion SETSEN-Ph90sub1 and second separated portion SETSEN-Ph90sub2 along the measuring axis. The first set of sensing elements and the second set of sensing elements are arranged with their respective first area centroid CEN-SETSEN-Ph0 and second area centroid CEN-SETSEN-Ph90 aligned at the same position along the measuring axis direction.

[0149] The foregoing description shows that by including the feature E1 in one of the two corresponding sets of sensing elements (e.g. Fig.11A ) or two groups (such as Fig. 11B ), it helps to align the area centroids of the two corresponding sets of sensing elements. Based on the above description, it will be understood that Fig. 11B The specific implementation shown in the above reference Fig.11A All the various advantages outlined.

[0150] Fig.121 is a plan view illustrating certain aspects of a first set of sensing elements SETSEN-Ph0 and a second set of sensing elements SETSEN-Ph90 corresponding to a first spatial phase Ph0 and a second spatial phase Ph90, which are a fourth exemplary configuration and a fifth exemplary configuration of a set of sensing elements configured according to the first type of prescribed relationship principle disclosed herein. For illustration purposes, the first set SETSEN-Ph0 and the second set SETSEN-Ph90 are Fig.12 In the embodiment of the present invention, the first set of sensing elements are offset from each other in the vertical direction to better illustrate their respective characteristics and alignment relative to each other along the measurement axis in the operational orthogonal configuration, where the spatial phase Ph0 of the first set of sensing elements and the spatial phase Ph90 of the second set of sensing elements differ by 90 degrees. It should be understood that in a practical encoder, they are not offset from each other in the "Y-axis" direction. Instead, they are superimposed on each other, similar to Fig.10 A first set of sensing elements and a second set of sensing elements are shown. Fig. 11B Includes certain numbered and / or named components that may correspond to and / or be related to Fig.11A Like numbered or named components of the present invention operate similarly or identically and may be understood similarly unless otherwise noted. Fig.12 In the following description only certain differences in the configuration of the first set SETSEN-Ph0 and the second set SETSEN-Ph90 will be emphasized.

[0151] Fig.12 The specific implementation of the first group of sensing elements SETSEN-Ph0 and the second group of sensing elements SETSEN-Ph90 shown in FIG. Fig.11A The differences between the specific implementations shown can be briefly described as follows. Fig.12 In each set of sensing elements shown, the sensing element pairs SEN1 and SEN2 of their first part SETSEN-Ph0sub1 and SETSEN-Ph90sub1 are shifted to the left by (W1) / 4K relative to their nominal spatial phase, instead of Fig.11A In contrast, Fig.12 In each set of sensing elements shown, the sensing element pairs SEN5 and SEN6 of their second part SETSEN-Ph0sub2 and SETSEN-Ph90sub2 are shifted to the right by (W1) / 4K relative to their nominal spatial phase, instead of Fig.11A Shift left like that.

[0152] As outlined above and Fig. 11BAs shown, in any one of the first group of sensing elements SETSEN-Ph0 or the second group of sensing elements SETSEN-Ph90, the specific implementation of the "shifted pair" of sensing elements SEN can be fully described in any of the following groups of sensing elements. According to a first aspect of the specific implementation, the first (second) group of sensing elements SETSEN-Ph0 (SETSEN-Ph90) corresponding to the corresponding nominal spatial phase Ph0 (Ph90) includes features A1, B1, C1 and D1, and is configured according to feature C1, wherein a plurality of pairs of adjacent positive polarity loop and negative polarity loop sensing element effective areas are configured to be shifted by an amount (W1) / 4K in a first direction along the measurement axis direction, and the same number of pairs of adjacent positive polarity loop and negative polarity loop sensing element effective areas are shifted by an amount (W1) / 4K in a direction opposite to the first direction along the measurement axis.

[0153] The first set of sensing elements SETSEN-Ph0 or the second set of sensing elements SETSEN-Ph90 can be further described as follows. According to a second aspect of a specific implementation, two pairs of corresponding adjacent loops at opposite ends of the first set of sensing elements (e.g., pairs SEN1 and SEN2, and pairs SEN7 and SEN8) have positive polarity loops and negative polarity loops in the two corresponding pairs of sensing element active areas shifted in the same direction along the measuring axis.

[0154] also, Fig.12 The second set of sensing elements SETSEN-Ph90 is shown to include feature E1 in addition to features A1, B, C1, and D1, and the area centroids CEN-SETSEN-Ph0 and CEN-SETSEN-Ph90 are aligned.

[0155] Based on the above description, it will be understood that Fig.12 The specific implementation shown in the above reference Fig.11A All the various advantages outlined. It can provide the following additional advantages. As previously indicated, Fig.11A The advantage provided by the aligned area centroids of the specific implementation shown is that the corresponding operating gaps and signal strengths of the first group of sensing elements and the second group of sensing elements will be similarly affected by any static or dynamic spacing misalignment, which eliminates most of the error contributions that may otherwise arise due to spacing misalignment. However, it should be understood that all sensing elements SEN on the left half of the specific implementation are shifted by a spatial phase shift of (W1) / 4K in the corresponding first direction, and all sensing elements SEN on the right half of the specific implementation are shifted by a spatial phase shift of (W1) / 4K in the corresponding opposite direction. The signal contributions of the left and right halves will become unbalanced due to static or dynamic spacing misalignment. As a result, the signal contributions of opposite spatial phase shifts from the left and right halves will become unbalanced to a certain extent, resulting in a small position error sensitivity to spacing misalignment. In contrast, in Fig.12In the implementation shown, the sensing element pair SEN moves in two directions in the right and left halves of the implementation, thereby reducing or eliminating spatial phase errors caused by static or dynamic spacing misalignment. As an instructive example, it should be understood that because Fig.12 In the specific implementation shown, the sensing elements SEN1 and SEN8 at opposite ends of the left and right halves are shifted in the same direction by (W1) / 4K, so the amplitude and spatial phase of their total signal composition are not nominally changed by the pitch misalignment.

[0156] It should be understood that even without using the second aspect, the first aspect outlined above can provide some of the advantages outlined above in certain specific implementations. However, in various specific implementations, it may be most advantageous to use the first aspect and the second aspect in combination, such as Fig.12 shown.

[0157] Fig.13 is a plan view illustrating certain aspects of a set of respective sensing elements SETSEN-Ph90 corresponding to a respective spatial phase Ph90, which is a sixth exemplary configuration of a set of sensing elements configured according to the prescribed relationship principle of the first type disclosed herein to provide a spatially filtered signal for use such as Figure 1 The detector portion of the electronic position encoder is shown, together with the second compatible field generating coil configuration FGC and the scale pattern 1380, and includes various dimensions that can characterize the sensing element configuration according to the principles disclosed herein. Fig.13 Includes certain numbered and / or named components that may correspond to and / or be related to Fig. 9 and Fig.12 Like numbered or named components of the present invention operate similarly or identically and may be understood similarly unless otherwise noted. In particular, Fig.13 and Fig.12 The configurations of the set of sensing elements SETSEN-Ph90 shown are similar in that they all implement features A1, B1, C1, D1 and E1 in a similar manner and all implement the above referenced Fig.12 The first and second aspects of the "shifted pair" configuration are outlined in a similar manner. Therefore, in the following description only certain differences in the characteristics of this set of sensing elements SETSEN-Ph90 related to their adaptation to operate together in the detector portion 1367 in conjunction with the "dual trace" field generating coil FGC and the scale pattern 1380 will be emphasized.

[0158] The detector portion 1367 is arranged in a "dual trace" configuration, which can be understood based on the brief description below, and can also be understood based on a similar specific implementation disclosed in U.S. Patent No. 10,775,199 (the '199 patent), which is incorporated herein by reference in its entirety. In short, the scale pattern 1380 includes signal modulation elements SME arranged in a first trace FPT and a second trace SPT extending along a measuring axis direction MA, respectively, as shown. The field generating coil FGC is configured to have a first portion surrounding a first inner area portion FINTA aligned with the first trace FPT and a second portion surrounding a second inner area SINTA aligned with the second trace SPT. The connections and currents between the portions of the field generating coil FGC will be based on Fig.13 The example current flow arrows are shown for understanding.

[0159] In this specific implementation, according to the previously disclosed principles, the first group of sensing elements SETSEN-Ph0 includes two separate parts SETSEN-Ph90sub1 and SETSEN-Ph90sub2. As will be understood by a person skilled in the art, their layout includes minor adjustments for better compatibility with dual-trace specific implementations. The first group of sensing elements SETSEN-Ph0 corresponding to the nominal spatial phase Ph0nom includes sensing elements SEN, which include conductive loops, each of which extends transversely to the measuring axis direction MA through the first inner area part FINTA and the second inner area part SINTA to define a first sensing element effective area part FEffASEN and a second sensing element effective area part SEffASEN corresponding to the parts of the sensing element SEN that are aligned with or overlapped with the first inner area part FINTA and the second inner area part SINTA, respectively. Therefore, the detector signal appearing in each conductive loop constitutes a combination of the corresponding detector signals from its first sensing element effective area part FEffASEN and the second sensing element effective area part SEffASEN. With Fig. 9 Compared to the previous description of the present invention, the sum of the first sensing element active area portion FEWASEN and the second sensing element active area portion SEWASEN of the sensing element SEN may be interpreted as the sensing element active area EWASen.

[0160] exist Fig.13In the specific implementation shown, the scale pattern 1380 includes signal modulation elements SME (or signal modulation element portions SME) periodically arranged in the first trace FPT according to the wavelength W1 and signal modulation elements SME (or signal modulation element portions SME) periodically arranged in the second trace SPT according to the wavelength W1, wherein the periodic arrangements in the first trace FPT and the second trace SPT are offset relative to each other by (W1) / 2. In addition, the field generating coil FGC is configured to generate a changing magnetic flux of a first polarity in the first inner area portion FINTA, and a changing magnetic flux of an opposite second polarity in the second inner area SINTA.

[0161] The essence of the combined detector signal is composed of Fig.13 The paired symbols "+, +" or "+, -" or "-, -" or "-, +" inside each sensing element SEN used in combination with any overlapping signal modulation element SME are illustrated. The first symbol in the pair represents the loop polarity of the sensing element, and the second symbol in the pair represents the polarity of the magnetic flux generated in the corresponding internal area portion. As an example, in sensing element SEN2, the signal composition from the first sensing element effective area portion FEffASEN is a nominal positive polarity composition, which is not reduced by the overlapping signal modulation element SME. The signal composition from the second sensing element effective area portion FEffASEN will be a nominal negative polarity composition (due to the negative polarity flux), however, the composition is reduced or substantially eliminated by the overlapping signal modulation element SME. As a result, the net signal composition of the sensing element SEN2 for the illustrated scale position is a net positive signal composition. The signal composition of other sensing elements SEN, and / or the signal composition of other scale positions, can be understood by analogy with the aforementioned explanation and / or the detailed description in the '199 patent.

[0162] As indicated previously, for a dual trace implementation, the sum of the first sense element active area portion FEWASEN and the second sense element active area portion SEWASEN of a sense element SEN can be interpreted as its sense element active area EWASen. This interpretation is applicable to determining the sense element average size DSENavg outlined in principle or feature B1 for a dual trace configuration.

[0163] Regarding another aspect of the interpretation, for the average sensing element size DSENavg outlined in the principle or characteristic B1 of the dual trace configuration, for each sensing element, its sensing element effective area EffASEN is aligned or overlapped with two inner areas (e.g., FINTA and SINTA), which can be defined as having an effective y-axis size EffySEN along the y-axis direction, i.e., the sum of the sizes of one or more inner areas (e.g., FINTA and SINTA) perpendicular to the measuring axis direction MA. Fig.13In the particular implementation shown, the sensing element average size DSENavg (=EffASEN / EffYSEN) according to the above interpretation is shown to fall within the range 0.33*W1+ / -15%, which is consistent with the previous description of principle or feature B1.

[0164] It should be understood that this article refers to Fig.13 As shown and below Fig.17 The first or second type of specific implementations disclosed by the dual-trace configuration further shown are exemplary only and not limiting. More generally, with the benefit of the present disclosure and the teachings of this article, one of ordinary skill in the art can modify various spatial filtering configurations for various other dual-trace specific implementations, such as those disclosed in the '199 patent, based on the first or second type of prescribed relationship principles or features disclosed and claimed herein.

[0165] It should be understood that in the above reference Figures 9 to 13 The disclosed set of sensing elements SETSEN in the various specific implementations of the first type illustrated and described are exemplary only and not limiting. For example, any set of sensing elements SETSEN can be changed to include additional sensing elements SEN (or fewer, in certain disclosed specific implementations), provided that they are shaped and positioned so that the resulting set of sensing elements SETSEN includes the prescribed relationship features A1, B1, C1 and at least one of the features D1 and E1, as outlined above.

[0166] Furthermore, although feature D1 is already included in Figures 9 to 13 In each of the specific implementations shown in , but not necessarily in all specific implementations, as long as the feature E1 is included in at least one set of corresponding sensing elements. Fig.11A In a specific example, if the shift direction of all sensing elements SEN in a set of sensing elements SETSEN-Ph0 is reversed, and Fig.11A All sensing elements SEN shown in FIG. Figure 6The electronic position encoder is replaced by the sensing element SEN shown (whose maximum size DSENmax is approximately 0.5*W1), then the resulting encoder can be described as follows: comprising multiple groups of corresponding sensing elements (e.g., SETSEN-Ph0 and SETSEN-Ph90) corresponding to multiple corresponding spatial phases (e.g., Ph0 and Ph90), each of which includes features A1, B1, C1, (e.g., SETSEN-Ph0 includes neither feature D1 nor E1), and at least one of the multiple groups of corresponding sensing elements further includes at least feature E1 (e.g., SETSEN-Ph90), and the electronic position encoder is thereby configured to provide multiple spatially filtered detector signals that can be used to reduce or suppress potentially unwanted third spatial harmonic detector signal components and potentially unwanted Kth (fifth) spatial harmonic detector signal components, which spatial harmonic detector signal components may otherwise contribute to errors in the determined relative position between the detector portion and the scale pattern. The resulting encoder can be further described as follows: each of the plurality of sets of corresponding sensing elements (e.g., SETSEN-Ph0 and SETSEN-Ph90) has an area centroid of its total sensing element active area located within its span along the measuring axis; and the plurality of sets of corresponding sensing elements are configured such that their respective area centroids are positioned at nominally the same position along the measuring axis direction. In addition, the resulting encoder can be configured such that each respective positive polarity or negative polarity loop included in any one of the plurality of sets of corresponding sensing elements is configured to provide a respective sensing element active area EffASEN that does not overlap with the sensing element active area EffASEN of any other respective positive polarity or negative polarity loop included in the same group of the plurality of sets of corresponding sensing elements.

[0167] If desired, a similar three-phase encoder may also be configured to include three groups of sensing elements including characteristics A1 , B1 , and C1 , wherein at least two groups of sensing elements include characteristic E1 .

[0168] While preferred specific implementations of the first type have been illustrated and described, many variations on the illustrated and described arrangements of features will be apparent to those skilled in the art based on this disclosure.

[0169] Figure 14 to Figure 17 is a partially representative, partially schematic plan view illustrating certain aspects of various exemplary configurations of a set of sensing elements SETSEN configured or arranged according to the second type of prescribed relationship principles disclosed herein, such that the sensing elements SEN are shaped to provide spatially filtered signals for use such as Figure 1Detector portions (e.g., 1467, 1567, 1767) in an electronic position encoder are shown. Compatible field generating coil configurations FGC and scale patterns (e.g., 980, 1380) are also illustrated. According to the conventions used herein, implementations that conform to the second type of prescribed relationship principle (described in more detail below) may be referred to simply as second type implementations.

[0170] The following will refer to Figure 14 to Figure 17 The principles outlined are advantageous for shaping and arranging the sensing elements SEN in various optional specific implementations to spatially filter out potential third, fifth, seventh, or ninth spatial harmonic components in the detector signal, and are particularly advantageous for shaping the sensing elements SEN to spatially filter out potential fifth spatial harmonic components when used in conjunction with determining the size of the sensing elements SEN according to the principles outlined above, such that their size DSENavg is configured to spatially filter out potential third harmonic components in the detector signal. However, their application is not limited to the specific implementations disclosed below. More generally, these principles can be used in combination with various other configurations of the group of sensing elements SETSEN and signal modulation elements SME in addition to those disclosed herein (e.g., as known in the prior art) and still provide significant benefits.

[0171] Fig.14 is a plan view illustrating certain aspects of a first set of sensing elements SETSEN-Ph90 (hereinafter referred to as SETSEN in some contexts) corresponding to a first spatial phase Ph90, which is a first exemplary configuration of a set of sensing elements configured according to the second type of prescribed relationship principle disclosed herein to provide a spatially filtered signal for use in, for example, Figure 1 The detector portion of the electronic position encoder shown, together with Fig. 9 A first compatible field generating coil configuration FGC and scale pattern 980 is shown and includes various dimensions that may characterize a sensing element configuration according to the principles disclosed herein. Fig.14 Includes certain numbered and / or named components which may correspond and / or be related to the previous figures, particularly Fig. 9 and / or Fig.11A Like numbered or named components of the present invention operate similarly or identically and may be understood similarly unless otherwise noted. Fig.13 The overall operation of the specific implementation shown in FIG. 1 and the various elements therein can be performed by referring to the above Fig. 9 and Fig.11A (and others, if applicable) by analogy. Fig.14 and Fig.11A The most significant difference between the set of sensing elements SETSEN-Ph90 shown is that Fig.14The shape of each sensing element SEN shown in FIG. 1 includes two "in-loop" shift ratios that are shifted by a specified amount in opposite directions in order to provide the desired spatial filtering within each sensing element SEN. When this feature is implemented in the second type of implementation, the desired spatial filtering can be achieved without implementing the desired principle or feature C1 in the first type of implementation. Because Fig.14 and Fig.11A The overall sensing operation of the set of sensing elements SETSEN-Ph90 shown in FIG. 1 is similar in other respects, so only the following description will emphasize Fig.14 and Fig.11A The configuration of the set of sensing elements SETSEN-Ph90 shown in FIG. 9A has certain aspects related to the shape of the sensing elements SEN and the ratio of the in-loop shifts they comprise.

[0172] In the following reference Figure 14 to Figure 17 In various specific implementations of the disclosed second type configured to provide a spatially filtered detector signal, at least a first set of respective sensing elements corresponding to respective nominal spatial phases include characteristics A2 and B2, defined as follows.

[0173] A2) A plurality of positive polarity loops corresponding to a first winding direction or polarity, and an equal number of negative polarity loops corresponding to a second winding direction or polarity opposite to the first winding direction or polarity.

[0174] B2) at least a majority of the positive polarity loops and at least a majority of the negative polarity loops are configured such that their sensing element active areas are arranged in a specified intra-loop shifted relationship relative to the respective nominal spatial phases of the respective groups of sensing elements, wherein:

[0175] The intra-loop shift relationship includes a configuration wherein within each such loop, an intra-loop shift ratio of up to half of its sensing element active area is shifted relative to a corresponding nominal spatial phase by (W1) / 4K in a first direction along the measuring axis direction, and a nominally identical intra-loop shift ratio of its sensing element active area is shifted relative to a corresponding nominal spatial phase by (W1) / 4K in a direction opposite to the first direction along the measuring axis direction, whereby the two intra-loop shift ratios are shifted relative to each other by (W1) / 2K, where K is one of 3, 5, 7, or 9;

[0176] The corresponding set of sensing elements corresponding to the corresponding nominal spatial phase (SETSENPh0) is thereby configured into an actual configuration which provides one or more spatially filtered detector signals that can be used to reduce or suppress potentially unwanted K-th order spatial harmonic detector signal components which might otherwise contribute to errors in the determined relative position between the detector portion and the scale pattern.

[0177] As a result of implementing features A2 and B2 as outlined above, the respective sets of sensing elements SETSEN corresponding to the respective nominal spatial phases are thereby configured as an actual configuration providing one or more spatially filtered detector signals that can be used to reduce or suppress potentially unwanted K-th order spatial harmonic detector signal components that might otherwise contribute to errors in the determined relative position between the detector portion and the scale pattern.

[0178] Figure 14 to Figure 17 Each includes a “reference grid” as previously described herein, with the center positions of the first trace active area FEffASEN and the second trace active area SEffASEN of each sensing element SEN indicated by the position of the dashed center line CLSEN to illustrate how each sensing element SEN is configured according to feature B2, as described in more detail below.

[0179] Return to Fig.14 Further discussion of the specific implementation shown is based on Fig.14 The reference grid and centerline indicators shown should be understood as follows: Fig.14 The set of sensing elements SETSEN shown satisfies the configuration principles or features A2 and B2 outlined above, as follows. Fig.14 In the specific implementation shown, the corresponding set of sensing elements SETSEN-Ph90 corresponding to the corresponding nominal spatial phase Ph90 includes a plurality of positive polarity loops (indicated by "+" inside the loop) corresponding to a first winding direction or polarity, and an equal number of negative polarity loops (indicated by "-" inside the loop) corresponding to a second winding direction or polarity opposite to the first polarity. Fig.14In the specific implementation shown, all positive polarity loops and all negative polarity loops are configured such that their sensing element active areas EffASEN are arranged in a prescribed intra-loop shift relationship relative to the corresponding nominal spatial phase Ph90nom of the corresponding set of sensing elements SETSEN-Ph90. The intra-loop shift relationship includes a configuration in which, within each such loop SEN, up to half of its sensing element active area intra-loop shift ratio ILSP is shifted relative to the corresponding nominal spatial phase Ph90nom in a first direction along the measuring axis direction MA by an amount (W1) / 4K, and the nominally identical intra-loop shift ratio ILSP of its sensing element active area (e.g., SEffASEN) is shifted relative to the corresponding nominal spatial phase Ph90nom in a direction opposite to the first direction along the measuring axis direction by an amount (W1) / 4K, whereby the two intra-loop shift ratios ILSP (e.g., FEffASEN and SEffASEN) are shifted relative to each other by (W1) / 2K, where K is one of 3, 5, 7, or 9. Each of these sensing elements SEN is configured to combine two spatially filtered detector signal components of K-th spatial harmonics that are 180 degrees out of phase with each other (e.g., by two intra-loop shift ratios ILSP (i.e., FEffASEN and SEffASEN), thereby nominally eliminating or suppressing such K-th spatial harmonic signal components in their combined signal composition.

[0180] exist Fig.14 In the particular implementation shown, the in-loop shift ratio ILSP (e.g., FEWASEN and / or SEWASEN) of the sensing element SEN is nominally half of its sensing element active area EWASEN, which can provide optimal spatial filtering. However, as implied in the definition of feature B2, in some implementations, the spatial filtering provided may still be sufficient, where the in-loop shift ratio ILSP is less than half of the sensing element active area EWASEN.

[0181] exist Fig.14 In the particular implementation shown, all positive polarity loops SEN and negative polarity loops SEN are configured such that their sensing element active areas (e.g., EffASEN=FEffASEN+SEffASEN) are arranged in a specified intra-loop shift relationship, which can provide the best spatial filtering. However, as implied in the definition of feature B2, in some implementations, the spatial filtering provided may still be sufficient, where only the majority of the positive polarity and negative polarity loops are configured such that their sensing element active areas are arranged in a specified intra-loop shift relationship.

[0182] Fig.14The total sensing element active area EffASEN of the sensing element SEN shown is defined as previously outlined herein. It refers to the area of ​​the sensing element SEN associated with one or more internal regions (e.g., Fig.14 The area within the sensing element SEN that is aligned or overlapped with the 1NTA in the y-axis direction may be defined as having an effective y-axis dimension EffySEN along the y-axis direction, wherein the effective y-axis dimension EffySEN is one or more inner areas perpendicular to the measuring axis direction MA (e.g., Fig.14 The sum of the dimensions of INTA). Fig.14 In the second type of implementation shown, K=5, and the sensing elements SEN are configured to provide an average sensing element size DSENavg in the range of 0.33*W1+ / -15% along the measurement axis direction, whereby a group of corresponding sensing elements corresponding to the corresponding nominal spatial phase (SETSENPh0) are thereby configured to provide one or more spatially filtered detector signals that can be used to reduce potential unwanted third spatial harmonic detector signal components and potential unwanted fifth spatial harmonic detector signal components. However, as previously indicated, this implementation is merely exemplary and not restrictive. In various other implementations, K can be 5, 7 or 9. In such implementations, the corresponding group of sensing elements configured to include features A2 and B2 are thereby configured to provide a detector signal that can be used to reduce potential unwanted third spatial harmonic detector signal components and potential unwanted K-order spatial harmonic detector signals that may otherwise contribute to errors in the determined relative position between the detector portion and the scale pattern.

[0183] exist Fig.14 In the particular implementation shown, a set of sensing elements SETSEN-Ph90 includes two similar subgroups or portions SETSEN-Ph0sub1 and SETSENPh0sub2 arranged in mirror symmetry relative to each other. One advantage of this configuration, compared to using one of the portions SETSEN-Ph0sub1 and SETSENPh0sub2 alone, is that it can reduce or eliminate position error sensitivity to lateral offset misalignment (i.e., misalignment of the detector portion 1667 and / or the scale pattern 980 by translation in the Y-axis direction). However, such a two-part configuration is merely exemplary and not restrictive. For example, either of the portions SETSEN-Ph0subl or SETSENPh0sub2 individually includes features A2 and B2 and can be used individually (e.g., as is, or by replicating the pattern of their sensing elements SEN to increase their length), and the spatial filtering advantages outlined above will still be obtained in various implementations.

[0184] Fig.15is a plan view illustrating certain aspects of a first set of sensing elements SETSEN-Ph90 (hereinafter referred to as SETSEN in some contexts) corresponding to a first spatial phase Ph90, which is a second exemplary configuration of a set of sensing elements configured according to the second type of prescribed relationship principle disclosed herein to provide a spatially filtered signal for use such as Figure 1 The detector portion of the electronic position encoder shown, together with Fig.14 A first compatible field generating coil configuration FGC and a scale pattern 980 are shown. Fig.15 Includes certain numbered and / or named components that may correspond to and / or be related to Fig.14 Components of the same or similar number or name operate similarly or identically and can be understood similarly unless otherwise stated. Therefore, in the following description, only the Fig.15 and Fig.14 Some differences in the configurations shown.

[0185] in short, Fig.15 The overall operation of the specific implementation shown and the various elements therein can be understood by referring to Fig.14 (and others, as applicable) by analogy. Fig.15 and Fig.14 The only significant difference between the set of sensing elements SETSEN-Ph90 shown is that Fig.15 The orientation of some of the sensing elements SEN shown is similar to Fig.14 In particular, the pair of sensing elements SEN1 and SEN2 and the pair of sensing elements SEN5 and SEN6 are reversed or "flipped" compared to the orientation shown. Fig.14 The orientation shown is inverted or flipped.

[0186] Fig.15 The specific implementation of a set of sensing elements SETSEN-Ph90 shown in FIG. Fig.14 The case is fully described as follows. A first set of corresponding sensing elements SETSEN-Ph90 is configured according to features A2 and B2, wherein it includes at least a first pair of positive and negative polarity loops (e.g., SEN1-SEN2 pair, or SEN 7-SEN8 pair) configured to have a nominally consistent shape for their sensing element active area EffASEN; and at least a second pair of positive and negative polarity loops (e.g., SEN3-SEN4 pair, or SEN 5-SEN6 pair) configured to have a nominally consistent shape for their sensing element active area, wherein the consistent shapes of the first and second pairs are nominally mirror images of each other, and the first and second pairs of positive and negative polarity loops are adjacent to each other (e.g., SEN1-SEN2 and SEN3-SEN4 pairs, or SEN5-SEN6 and SEN7-SEN8 pairs).

[0187] and Fig.14 Such a configuration including a "mirror pair" may provide improved accuracy and / or robustness to certain misalignments and / or combinations of misalignments compared to the configuration shown. For example, it may reduce position error sensing for pitch misalignment combined with lateral offset or pitch misalignment combined with yaw misalignment (i.e., rotation of detector 1767 or scale pattern 980 about the Z axis).

[0188] Fig.15 The specific implementation of a set of sensing elements SETSEN-Ph90 shown in can be further described as follows. The first set of corresponding sensing elements SETSEN-Ph90 includes: a first end pair of positive and negative polarity loops (e.g., SEN1-SEN2 pair), the first end pair of positive and negative polarity loops are configured to have a nominally consistent shape for the sensing element effective area EffASEN within the first end pair; and at least a second end pair of positive and negative polarity loops (e.g., SEN7-SEN8 pair), the at least second end pair of positive and negative polarity loops are configured to have a nominally consistent shape for the sensing element effective area EffASEN within the second end pair, and the consistent shape of the first end pair and the second end pair is also nominally consistent between the first end pair and the second end pair. It should be understood that the first end and the second end pair are located at the first end and the second end of the first set of corresponding sensing elements SETSEN-Ph90.

[0189] In some specific implementations, when further comprising as outlined above and Fig.15 The advantages of the configuration including a "mirror pair" can be enhanced when the identical end pair shown in FIG. 1 is included. However, it should be understood that the configuration including and not including the identical end pair (e.g., with additional sensing elements and comparison Fig.15 A "mirror pair" configuration (more mirror pairs as shown) can still provide the significant advantages as outlined above.

[0190] Fig.16 is a diagram corresponding to the second spatial phase Ph0 (in Fig.16 1 is a plan view of certain aspects of a second set of sensing elements SETSEN-Ph0 (designated as Ph0nom in FIG. 1 ). It is a third exemplary configuration of a set of sensing elements configured according to the second type of prescribed relationship principle disclosed herein. It corresponds to Fig.15 The first set of sensing elements SETSEN-Ph90 of the second spatial phase Ph90 shown together in Fig.16 For illustration purposes, the first group of sensing elements SETSEN-Ph90 and the second group of sensing elements SETSEN-Ph0 are shown in FIG. Fig.16They are shown arranged in an operational orthogonal relationship along the measuring axis, with the spatial phases of the first set of sensing elements SETSEN-Ph0 and the second set of sensing elements SETSEN-Ph90 being 90 degrees apart. It should be understood that in a practical encoder, they are not offset from each other along the "Y-axis" direction. Instead, they are superimposed on each other, similar to Fig.10 A first set of sensing elements and a second set of sensing elements are shown. Fig.16 Includes numbered and / or named components that may correspond to and / or be related to Fig.15 Like numbered or named components operate similarly or identically and may be understood similarly unless otherwise noted. Fig.16 The first set of sensing elements SETSEN-Ph90 in Fig.15 The description in has not changed. Therefore, in Fig.16 In the following description only certain aspects of the configuration of the second set of sensing elements SETSEN-Ph0in will be emphasized.

[0191] Fig.16 The difference between the implementation of the second set of sensing elements SETSEN-Ph0 and the first set of sensing elements SETSEN-Ph90 shown can be simply described as follows: the first part SETSEN-Ph0sub1 has been shifted to the right by (W1) / 4 compared to the first part SETSEN-Ph90sub1, and the second part SETSEN-Ph0sub2 has been shifted to the left by (W1) / 44 compared to the first part SETSEN-Ph90sub1. The final effective loop polarity of its sensing element SEN is as follows Fig.16 The output signal connection is provided on the sensing element SEN5 so that it remains associated with the trace of the positive polarity return to achieve the same Fig.15 Only one output signal connection location is required because Fig.16 In the specific implementation shown, the first part SETSEN-Ph0sub1 and the second part SETSEN-Ph0sub2 are aligned in the trace zone ATZ with reference to Fig. 9 The approach outlined previously is via series connection.

[0192] Fig.16The specific implementation of the first set of sensing elements SETSEN-Ph0 and the second set of sensing elements SETSEN-Ph90 shown can be fully described as follows. The first set of sensing elements SETSEN-Ph90 corresponding to the nominal spatial phase Ph90 is configured according to features A2 and B2, wherein it comprises a two-part configuration, including: a first separated part SETSEN-Ph90sub1, the part comprising the same number of positive polarity loops and negative polarity loops; and a second separated part SETSEN-Ph90sub2, the part being nominally aligned with the first part SETSEN-Ph90sub1 along the measuring axis direction and comprising the same number of positive polarity loops and negative polarity loops as the first separated part. The first part SETSEN-Ph90sub1 and the second part SETSEN-Ph90sub2 are separated by a gap located in the measuring axis direction therebetween, and the gap is at least as wide as one of the positive polarity or negative polarity loops in the measuring axis direction MA, and neither the positive polarity loop effective area EffASEN nor the negative polarity loop effective area EffASEN of the first group of corresponding sensing elements SETSEN-Ph90 is located in the gap. The first group of corresponding sensing elements SETSEN-Ph90 is configured so that the corresponding loops of the first and second separated parts thereof that are closest to each other (i.e., SEN4 and SEN5) have the same loop polarity.

[0193] Fig.16 The specific implementation shown also includes a second set of sensing elements SETSEN-Ph0 corresponding to a nominal spatial phase Ph0, which is 90 degrees different from the nominal spatial phase Ph90. The second set of sensing elements SETSEN-Ph0 is configured according to features A2 and B2, wherein it is also configured as a two-part configuration. The two-part configuration includes: a first adjacent part SETSEN-Ph0sub1, which includes the same number of positive polarity loops and negative polarity loops; and a second adjacent part SETSEN-Ph0sub2, which is nominally aligned with the first adjacent part SETSEN-Ph0sub1 along the measurement axis direction and includes the same number of positive polarity loops and negative polarity loops as the first adjacent part SETSEN-Ph0sub1. The first adjacent part SETSEN-Ph0sub1 and the second adjacent part SETSEN-Ph0sub2 are closer to each other along the measurement axis direction MA than the width of one of the positive polarity or negative polarity loops. The corresponding loops in the first and second adjacent sections (ie, SEN4 and SEN5) that are closest to each other have opposite loop polarities.

[0194] like Fig.16As shown, the first group of sensing elements SETSEN-Ph90 has a first area centroid CEN-SETSEN-Ph90 whose total sensing element active area is located between its first separated portion SETSEN-Ph90sub1 and second separated portion SETSEN-Ph90sub2 along the measuring axis MA, and the second group of sensing elements SETSEN-Ph0 has a second area centroid CEN-SETSEN-Ph0 whose total sensing element active area is located between its first adjacent portion SETSEN-Ph0sub1 and second adjacent portion SETSEN-Ph0sub2 along the measuring axis MA. The first group of sensing elements SETSEN-Ph90 and the second group of sensing elements SETSEN-Ph0 are arranged such that their respective first area centroid CEN-SETSEN-Ph90 and second area centroid CEN-SETSEN-Ph0 are arranged at the same position along the measuring axis direction, as shown. Fig.16 shown.

[0195] It should be understood that based on the previous description, Fig.16 The illustrated implementation is configured to provide one or more spatially filtered detector signals that can be used to reduce potentially unwanted third spatial harmonic detector signal components and potentially unwanted K-th spatial harmonic detector signal components that might otherwise contribute to errors in the determined relative position between the detector portion and the scale pattern. In addition, it includes aligned area centroids and other features to exclude position measurement errors associated with various types of misalignment. In addition, each corresponding positive polarity or negative polarity loop (e.g., each sensing element SEN) included in one of the first set of corresponding sensing elements SETSEN-Ph90 or the second set of corresponding sensing elements SETSEN-Ph9 is configured to provide a corresponding sensing element effective area EffASEN that does not overlap with the sensing element effective area EffASEN of any other corresponding positive polarity or negative polarity loop included in the same set of the first set or the second set of corresponding sensing elements.

[0196] Generally speaking, it should be understood that the above reference Fig.14 , Fig.15 and Fig.16 The second type of implementation outlined can provide an unprecedented level of spatial filtering to suppress multiple unwanted spatial harmonic signal components using a layout of detector portions that is simpler, higher performing, and more economical to manufacture than prior art spatial filtering detectors.

[0197] Fig.17is a plan view illustrating certain aspects of a first set of sensing elements SETSEN-Ph90 corresponding to a respective first spatial phase Ph90, which is a fourth exemplary configuration of a set of sensing elements configured according to the second type of prescribed relationship principle disclosed herein to provide a spatially filtered signal for use such as Figure 1 The detector portion of the electronic position encoder shown, together with Fig.13 A second compatible field generating coil configuration FGC and a scale pattern 1380 are shown. Fig.17 is a "dual-trace" configuration that includes certain numbered and / or named components that may correspond to Fig.13 Similar numbered or named components of the illustrated dual trace configurations and / or similar operation may be similarly understood unless otherwise noted. Fig.17 The configuration of the set of sensing elements SETSEN-Ph90 shown in the reference is similar to Fig.15 and Fig.16 The set of sensing elements SETSEN-Ph90 illustrated and described is similar in that both implement features A2 and B2 and the sensing elements SETSEN are arranged in a similar manner. Fig.17 The layout of the conductors of the sensing element SEN has been adapted to cooperate with the dual trace field generating coil configuration FGC and the scale pattern 1380, as can be seen from the above Fig.13 The description is understood by analogy.

[0198] Based on the previous description of the similarity with the previous figure, it can be achieved by Fig.13 , Fig.14 , Fig.15 and Fig.16 The analogy of the previous description is to understand Fig.17 The specific implementation and its various advantages shown are shown in detail. Therefore, it is not necessary to describe it in further detail here.

[0199] It should be understood that the above reference Figure 13 to Figure 17 The set of sensing elements SETSEN in various specific implementations of the second type illustrated and described is exemplary only and not limiting. For example, any set or sub-set or portion of sensing elements SETSEN can be extended to include additional sensing elements SEN, provided that they are shaped and configured so that the resulting set of sensing elements SETSEN conforms to the prescribed relationship characteristics A2 and B2, as outlined above.

[0200] In addition, although the various specific implementations disclosed above include sensing elements including sensing element active areas that do not overlap with any other sensing element active areas of any other conductive loops or conductive loop portions included in their respective groups of sensing elements, such specific implementations are merely exemplary and not restrictive. In general, features A2 and B2 can be implemented in any desired arrangement of sensing elements, including overlapping arrangements commonly used in the prior art. In such specific implementations, sensing elements including features A2 and B2 can provide additional spatial filtering of K-order spatial harmonics as outlined above to enhance such specific implementations.

[0201] As an example, although the various specific implementations disclosed above are illustrated as corresponding to K=5 and including sensing elements having an average sensing element size DSENavg within the range of 0.33*W1+ / -15%, it is apparent to one of ordinary skill in the art that such combinations are merely exemplary and not restrictive.

[0202] As another example, Fig.16 The set of sensing elements SETSEN-Ph0 shown can be similar to the reference Fig.16 The set of sensing elements SETSEN-Ph0 shown in the described manner modifies the gap between its parts so that they comprise two "split" parts providing a quadrature encoder configuration. Fig.16 The general configuration shown of the first set of sense elements SETSEN-Ph0 and the second set of sense elements SETSEN-Ph90 is exemplary only and not limiting.

[0203] As another example, it is possible to configure each of the groups of sensing elements in a three-phase encoder in a manner similar to any of the various implementations of the second type outlined above. In such implementations, each of the multiple groups of corresponding sensing elements corresponding to the multiple groups of corresponding spatial phases is thereby configured to include features A2) and B2), and is thereby configured to provide a spatially filtered detector signal that can be used to reduce or suppress potential unwanted K-th order spatial harmonic detector signal components that may otherwise contribute to errors in the determined relative position between the detector portion and the scale pattern.

[0204] Although preferred specific implementations of the second type have been illustrated and described, many variations of the illustrated and described arrangements of features will be apparent to those skilled in the art based on this disclosure. Various alternative forms may be used to implement the prescribed relationship features A2 and B2 disclosed herein.

[0205] It should be understood that the principles disclosed and claimed herein can be easily and desirably combined with various features disclosed in the incorporated references and various features disclosed in the commonly assigned co-pending applications. U.S. Patent Application No. 16 / 826,842, entitled "TRANSMITTER AND RECEIVER CONFIGURATION FOR AN INDUCTIVE POSITION ENCODER", filed on March 23, 2020, is incorporated herein by reference in its entirety. The various implementations described above can be combined to provide further implementations. All U.S. patents and U.S. patent applications mentioned in this specification are incorporated herein by reference in their entirety. If it is necessary to adopt the concepts of various patents and applications to provide additional implementations, then various aspects of the implementations can be modified. These and other changes can be made to the implementations according to the detailed description above. In general, in the claims below, the terms used should not be interpreted as limiting the claims to the specific implementations disclosed in the specification and claims, but should be interpreted as including all possible implementations and the full range of equivalents enjoyed by these claims.

Claims

1. An electronic position encoder for measuring the relative position of two elements along a measuring axis, the electronic position encoder comprising: a scale extending in the direction of the measuring axis, the scale comprising a periodic scale pattern, the periodic scale pattern comprising at least a first type of signal modulating element having an active area aligned with or overlapping an inner area of ​​the field generating coil, wherein the periodic scale pattern has a spatial wavelength W1 and a first type of signal modulating element, the first type of signal modulating element comprising a conductive plate or conductive loop positioned in the direction of the measuring axis corresponding to the spatial wavelength W1; A detector portion, the detector portion being configured to be installed near the periodic scale pattern and to move relative to the periodic scale pattern along the measurement axis direction, the detector portion comprising: a field generating coil fixed to a substrate, the field generating coil surrounding an inner region, the inner region being aligned with the active region of the periodic scale pattern of a signal modulating element during operation, the field generating coil generating a varying magnetic flux in the inner region in response to a coil drive signal; and a set of corresponding sensing elements corresponding to corresponding nominal spatial phases, the set of corresponding sensing elements being arranged along the measuring axis direction and fixed to the substrate, the members of the set of corresponding sensing elements comprising conductive loops or conductive loop portions defining a sensing element effective area EffASEN corresponding to a portion of the sensing element aligned with or overlapping the inner area, wherein the set of corresponding sensing elements are configured to provide corresponding detector signals responsive to a local influence on a changing magnetic flux provided by an adjacent signal modulating element of the scale pattern and corresponding to a corresponding nominal spatial phase; and a signal processing arrangement operatively connected to the detector portion to provide the coil drive signal and to determine a relative position between the detector portion and the scale pattern based on a detector signal input from the detector portion, in At least a first set of respective sensing elements corresponding to respective nominal spatial phases comprises characteristics A2 and B2, defined as follows: A2) a plurality of positive polarity loops corresponding to a first winding direction or polarity, and an equal number of negative polarity loops corresponding to a second winding direction or polarity opposite to the first winding direction or polarity; and B2) most or all of the positive polarity loops and most or all of the negative polarity loops are configured such that their sensing element active areas are arranged in a specified intra-loop shifted relationship relative to the respective nominal spatial phases of the set of respective sensing elements, wherein: The intra-loop shift relationship includes a configuration wherein within each such loop, an intra-loop shift ratio of up to half of its sensing element active area is shifted relative to the corresponding nominal spatial phase by (W1) / 4K in a first direction along the measurement axis direction, and a nominally identical intra-loop shift ratio of its sensing element active area is shifted relative to the corresponding nominal spatial phase by (W1) / 4K in a direction opposite to the first direction along the measurement axis direction, whereby the intra-loop shift ratios are shifted relative to each other by (W1) / 2K, wherein K is one of 3, 5, 7, or 9; The respective sensing elements corresponding to the respective nominal spatial phases are thereby configured in an actual configuration which provides one or more spatially filtered detector signals which may be used to reduce or suppress potentially unwanted K-th order spatial harmonic detector signal components which might otherwise contribute to errors in the determined relative position between the detector portion and the scale pattern.

2. The electronic position encoder according to claim 1, wherein in B2, the positive polarity loop and the negative polarity loop are configured such that their sensing element effective areas are arranged in the prescribed in-loop shift relationship, and the in-loop shift ratio is nominally half of their sensing element effective areas.

3. The electronic position encoder according to claim 1, wherein in B2, all of the positive polarity loop and the negative polarity loop are configured such that their sensing element effective areas are arranged in a shifted relationship within the prescribed loop.

4. An electronic position encoder according to claim 1, wherein at least a first set of corresponding sensing elements are configured according to said features A2 and B2, wherein they include: at least a first pair of positive and negative polarity loops configured to have nominally consistent shapes for their sensing element active areas; and at least a second pair of positive and negative polarity loops configured to have nominally identical shapes for their sensing element active areas, wherein the identical shapes of the first and second pairs are nominally mirror images of each other, and the first and second pairs of positive and negative polarity loops are positioned adjacent to each other.

5. The electronic position encoder of claim 4, wherein the first set of corresponding sensing elements is further configured to include: at least a first end pair of positive and negative polarity loops, the at least first end pair of positive and negative polarity loops being configured to have a nominally consistent shape for a sensing element active area within the first end pair; and at least a second end pair of positive and negative polarity loops, the at least second end pair of positive and negative polarity loops being configured to have a nominally consistent shape for a sensing element active area within the second end pair, and the consistent shapes of the first end pair and the second end pair are also nominally consistent between the first end pair and the second end pair, and the first end pair and the second end pair are located at a first end and a second end of the corresponding sensing element group. The electronic position encoder according to claim 1 , wherein K=5.

7. An electronic position encoder according to claim 6, wherein each sensing element included in a group of corresponding sensing elements configured to include the features A2 and B2 has a total sensing element effective area EffASEN aligned with or overlapping one or more internal regions, and is defined as having an effective y-axis size EffYSEN along the y-axis direction, the size being the sum of the sizes of the one or more internal regions perpendicular to the measuring axis direction, and most or all of the sensing elements included in the group of corresponding sensing elements are configured to provide a sensing element average size DSENavg=(EffASEN / EffYSEN) along the measuring axis direction in a range between 0.33*W1*(1-15%) and 0.33*W1*(1+15%), whereby the corresponding sensing elements are configured to provide one or more spatially filtered detector signals that can be used to reduce unwanted potential third spatial harmonic detector signal components and unwanted potential fifth spatial harmonic detector signal components, which spatial harmonic detector signal components may otherwise contribute to errors in the determined relative position between the detector portion and the scale pattern.

8. An electronic position encoder according to claim 7, wherein each corresponding positive polarity or negative polarity loop included in the corresponding group of sensing elements configured to include the features A2 and B2 is configured to provide a corresponding sensing element effective area EffASEN, and the corresponding sensing element effective area EffASEN does not overlap with the sensing element effective area EffASEN of any other corresponding positive polarity or negative polarity loop included in the first group of corresponding sensing elements.

9. An electronic position encoder according to claim 1, wherein at least a first set of respective sensing elements corresponding to respective nominal spatial phases are configured according to said features A2 and B2, wherein it comprises a two-part configuration, said two-part configuration comprising: A first separation portion, the first separation portion comprising an equal number of positive polarity loops and negative polarity loops; as well as a second separation portion, the second separation portion being nominally aligned with the first separation portion along the measurement axis direction and comprising the same number of positive polarity loops and negative polarity loops as the first separation portion, Wherein, the first separation portion and the second separation portion are separated by a gap located between the first separation portion and the second separation portion along the measuring axis direction, and the gap is at least as wide as one of the positive polarity loop or the negative polarity loop along the measuring axis direction, and neither the positive polarity loop effective area nor the negative polarity loop effective area of ​​the first group of corresponding sensing elements is located within the gap.

10. The electronic position encoder according to claim 9, configured to include one of M1 or M2, wherein: M1) the first separate portions of the first set of corresponding sensing elements are configured to output a first detector signal, and the second separate portions of the first set of corresponding sensing elements are configured to output a second detector signal, and the signal processing arrangement is configured to determine the relative position between the detector portions and the scale pattern based at least in part on a combination of the first detector signal and the second detector signal; or M2) The first separated parts of the first group of corresponding sensing elements are connected in series with the second separated parts of the first group of corresponding sensing elements to form a combined signal, and the series connection is configured so that the corresponding signals of the first separated parts and the second separated parts are added in the combined signal; and the signal processing configuration is configured to determine the relative position between the detector part and the scale pattern based at least in part on the combined signal.

11. The electronic position encoder according to claim 9, wherein: The first set of corresponding sensing elements are configured so that the loops in the first and second separated parts thereof that are closest to each other have the same loop polarity; and The electronic position encoder further comprises at least a second set of corresponding sensing elements corresponding to respective nominal spatial phases that differ by 90 degrees from the nominal spatial phases of the first set of corresponding sensing elements, and the second set of corresponding sensing elements are configured to include the features A2 and B2, wherein they are configured in a two-part configuration comprising: a first adjacent portion, the first adjacent portion including an equal number of positive polarity loops and negative polarity loops; and a second adjacent portion, the second adjacent portion being nominally aligned with the first adjacent portion along the measurement axis direction and including the same number of positive polarity loops and negative polarity loops as the first adjacent portion; wherein the first adjacent portion and the second adjacent portion are closer to each other along the measuring axis direction than the width of one of the positive polarity or the negative polarity loop, and the corresponding loops of the first adjacent portion and the second adjacent portion that are closest to each other have opposite loop polarities; the first set of respective sensing elements having a first area centroid of their total sensing element active area located along the measurement axis between the first and second separated portions thereof; the second set of respective sensing elements having a second area centroid of their total sensing element active area located along the measurement axis between the first and second separated portions thereof; And the first group and the second group of corresponding sensing elements are arranged so that their corresponding first area centroids and second area centroids are located at the same position along the measurement axis direction.

12. An electronic position encoder according to claim 11, wherein each corresponding positive polarity or negative polarity loop included in one of the first group or the second group of corresponding sensing elements is configured to provide a corresponding sensing element effective area EffASEN, and the corresponding sensing element effective area EffASEN does not overlap with the sensing element effective area EffASEN of any other corresponding positive polarity or negative polarity loop included in the same group of the first group or the second group of corresponding sensing elements.

13. The electronic position encoder according to claim 9, wherein: The electronic position encoder further comprises a second set of corresponding sensing elements corresponding to respective nominal spatial phases that differ by 90 degrees from the nominal spatial phases of the first set of corresponding sensing elements, and the second set of corresponding sensing elements are configured according to the features A2 and B2, wherein they are configured in a two-part configuration comprising: a first separation portion, the first separation portion comprising an equal number of positive polarity loops and negative polarity loops; and a second separation portion, the second separation portion being nominally aligned with the first separation portion along the measurement axis direction and including the same number of positive polarity loops and negative polarity loops as the first separation portion; wherein the first separation portion and the second separation portion are closer to each other along the measurement axis direction than the width of one of the positive polarity or the negative polarity loop; the first set of respective sensing elements having a first area centroid of their total sensing element active area located along the measurement axis between the first and second separated portions thereof; the second set of respective sensing elements having a second area centroid of their total sensing element active area located along the measurement axis between the first and second separated portions thereof; and the first and second groups of respective sensing elements are arranged such that their respective first area centroids and second area centroids are located at the same position along the measurement axis direction; The second group of corresponding sensing elements are configured such that the loops in the first and second separated parts thereof that are closest to each other have the same loop polarity.

14. The electronic position encoder according to claim 1, wherein: The scale pattern includes signal modulating elements arranged in a first trace and a second trace extending in the direction of the measuring axis; The field generating coil is configured to surround a first interior region portion aligned with the first trace and a second interior region aligned with the second trace; At least one set of corresponding sensing elements corresponding to the corresponding nominal spatial phases includes the features A2 and B2, and includes sensing elements, the sensing elements including conductive loops, each conductive loop extending through the first and second inner area portions transversely to the measuring axis direction to define a first sensing element active area portion and a second sensing element active area portion, the first sensing element active area portion and the second sensing element active area portion corresponding to those portions of the sensing element aligned with or overlapping the first inner area portion and the second inner area portion, respectively, wherein the detector signal generated in each conductive loop constitutes a combination of the detector signals from its first sensing element active area portion and the second sensing element active area portion.

15. The electronic position encoder according to claim 14, wherein: The scale pattern comprises signal modulating elements or signal modulating element portions periodically arranged in the first trace according to the wavelength W1, and signal modulating elements or signal modulating element portions periodically arranged in the second trace according to the wavelength W1, wherein the periodic arrangements in the first and second traces are offset relative to each other by (W1) / 2; as well as The field generating coils are configured to generate a changing magnetic flux of a first polarity in the first interior region portion and a changing magnetic flux of an opposite second polarity in the second interior region.

16. The electronic position encoder of claim 1, wherein: Multiple groups of corresponding sensing elements corresponding to multiple corresponding spatial phases each include the features A2 and B2, and the electronic position encoder is thereby configured to provide multiple spatially filtered detector signals that can be used to reduce or suppress potential unwanted K-th order spatial harmonic detector signal components, which spatial harmonic detector signal components may otherwise contribute to errors in the determined relative position between the detector portion and the scale pattern.

17. An electronic position encoder according to claim 16, wherein: Each of the plurality of respective groups of sensing elements has an area centroid of its total sensing element active area located within its span along the measurement axis; The plurality of groups of corresponding sensing elements are configured such that their corresponding area centroids are located at the same position along the measuring axis direction.

18. An electronic position encoder according to claim 17, wherein: Each respective positive polarity or negative polarity loop included in any one of the plurality of groups of respective sensing elements is configured to provide a respective sensing element active area EffASEN that does not overlap with a sensing element active area EffASEN of any other respective positive polarity or negative polarity loop included in the same group of the plurality of groups of respective sensing elements.

19. An electronic position encoder according to claim 18, wherein: Each sensing element included in the multiple groups of corresponding sensing elements has a total sensing element effective area EffASEN aligned with or overlapping one or more internal regions, and is defined as having an effective y-axis size EffYSEN along the y-axis direction, which is the sum of the sizes of the one or more internal regions perpendicular to the measuring axis direction, and most or all of the sensing elements included in the multiple groups of corresponding sensing elements are configured to provide a sensing element average size DSENavg = (EffASEN / EffYSEN) in the range between 0.33*W1*(1-15%) and 0.33*W1*(1+15%) along the measuring axis direction, whereby the electronic position encoder is configured to provide multiple spatially filtered detector signals that can be used to reduce or suppress unwanted potential third spatial harmonic detector signal components and unwanted potential K-order spatial harmonic detector signal components, which spatial harmonic detector signal components may otherwise contribute to errors in the determined relative position between the detector portion and the scale pattern.

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