Apparatus, method and use of apparatus for calibrating, installing and / or checking optoelectronic systems

Abstract

Device (1) for producing a light-sensitive system (10), in particular an inactive light-sensitive system (10), characterized by an imaging device (2) with at least one imaging apparatus (20), wherein the at least one imaging apparatus (20) has a radiation penetration plane (SE) and an optical axis (O), and the at least one imaging apparatus (20) is designed to generate electromagnetic radiation which extends along an optical path and passes through the imaging apparatus (20) in the radiation penetration plane (SE), and for the imaging of an evaluation image of a light-sensitive device (11) of the light-sensitive system (10) to be produced, the electromagnetic radiation is reflected at the light-sensitive device (11) along the optical path and imaged in a first focal plane (B1) in the imaging apparatus (20), and for the detection of the evaluation image of the light-sensitive device (11), the electromagnetic radiation of the optical path is detected in the first focal plane (B1); and a first holding device (3a) with a first holding plane (Ha) for holding an optical device (12) of the light-sensitive system (10) to be produced in the first holding plane (Ha); and a second holding device (3b) with a second holding plane (Hb) for holding the light-sensitive device (11) in the second holding plane (Hb); wherein in the operating state, the first holding device (3a) with the first holding plane (Ha) and / or the second holding device (3a) with the second holding plane (Ha) are movably arranged relative to the imaging device (2).

Description

Technical Field

[0001] This invention relates to apparatus, methods, and applications for manufacturing photosensitive systems. In particular, it relates to photosensitive systems manufactured inactive (unactivated photosensitive systems) using the apparatus and methods. The invention particularly relates to apparatus, methods, and applications for manufacturing unactivated photosensitive systems for cameras. Background Technology

[0002] Photosensitive systems are used, for example, as camera modules in mobile phones, in vehicle assistance systems, as cameras in consumer electronics devices, or in medical technology. Furthermore, photosensitive systems are also sensors in lidar systems. In this application, a photosensitive system is particularly understood as a functional optical system, which includes one or more photoelectric converters. The increasing demand for improved image quality achievable with photosensitive systems, coupled with the growing miniaturization of these systems, places higher demands on the quality, time, and cost of their manufacturing.

[0003] Known apparatuses and methods for manufacturing photosensitive systems require the forced activation of the photosensitive system for manufacturing. Activation requires connecting the photosensitive system to one or more electronic contacts to supply electrical power to the system and to read one or more electrical signals as data (the activated photosensitive system). In such known apparatuses and methods, the photosensitive system to be manufactured itself forms a measuring mechanism that provides the data necessary for manufacturing the photosensitive system. In particular, the data is used to orient the optical elements of the photosensitive system to be manufactured, such as one or more optical lenses, relative to the photosensitive element of the photosensitive system to be manufactured, such as a camera chip mounted on a carrier. For orienting, it is known that, for example, the optical elements are movably positioned in a holding device and manipulated by the photosensitive element according to the detected data using an adjustment device, so as to obtain the desired imaging quality of the test structure using the photosensitive system to be manufactured.

[0004] Known devices and methods for manufacturing photosensitive systems, which activate the photosensitive system and use it as a measuring mechanism in its manufacturing process, are relatively expensive due to the high cost of the hardware required for power supply and data transmission. In particular, the connection of the photosensitive device to one or more electrical contacts required for manufacturing the photosensitive system in known devices and methods is relatively time-intensive. Furthermore, the imaging quality of the photosensitive device typically used in manufacturing photosensitive systems and its typically low image frequency detection test structure remains relatively long. Therefore, in devices and methods that use the photosensitive system to be manufactured as a measuring mechanism, the relatively long manufacturing time for the photosensitive system must be taken into account. Moreover, relatively low image quality is achieved with the photosensitive system to be manufactured, especially for mobile terminal devices. Therefore, the accuracy of the orientation of the optical device relative to the photosensitive device and thus the quality of the optical system to be manufactured using known devices and methods are limited. This is based on the inventors' knowledge that manufacturing an activated photosensitive system only requires a low acquisition rate of one or more measurement signals, and in this respect, the modulation rate is limited by the modulation commands to be generated to maintain the movement of the device. Summary of the Invention

[0005] Therefore, the object of the present invention is to provide applications of apparatus, methods, and devices for manufacturing photosensitive systems that reduce or eliminate one or more of the aforementioned disadvantages and / or improve upon existing technical solutions. In particular, the object of the present invention is to provide applications of apparatus, methods, and devices for manufacturing photosensitive systems that enable more cost-effective manufacturing of photosensitive systems. Furthermore, in particular, the object of the present invention is to provide applications of apparatus, methods, and devices for manufacturing photosensitive systems that enable the manufacture of high-quality photosensitive systems. Furthermore, in particular, the object of the present invention is to provide applications of apparatus, methods, and devices for manufacturing photosensitive systems that enable faster manufacturing of photosensitive systems.

[0006] The objective is achieved according to the first aspect of the invention and according to embodiments of the invention.

[0007] It should be understood that any of the device features and method steps described herein, as well as preferred embodiments, are preferably configured simultaneously or sequentially for the manufacture of a unique photosensitive system and for the manufacture of multiple photosensitive systems, not only independently of each other but also in association with each other. In this regard, manufacturing, especially calibrating, installing, and / or inspecting a photosensitive system includes manufacturing, especially calibrating, installing, and / or inspecting a unique or multiple photosensitive system. It should be understood in particular that the photosensitive system to be manufactured has unique or multiple optical devices and / or unique or multiple photosensitive devices.

[0008] A photosensitive system, particularly an inactive photosensitive system, for manufacturing optoelectronic systems, especially for projection and / or imaging optoelectronic systems, preferably includes an imaging device, a first holding device, and a second holding device. The imaging device includes at least one imaging element. The at least one imaging element has a ray-penetrating plane and an optical axis. Preferably, the imaging element is configured to generate and, in particular, shape electromagnetic rays that extend along the optical path and pass through the imaging element in the ray-penetrating plane. Furthermore, the imaging device is preferably configured to image an evaluation image of the photosensitive element and / or test structure of the photosensitive system to be manufactured onto a first focal plane of the imaging device by means of electromagnetic rays reflected at the photosensitive element. For this purpose, electromagnetic rays emitted from the imaging device at the ray-penetrating plane are reflected at the photosensitive element in the operating state. The electromagnetic rays reflected by the photosensitive element re-enter the imaging device through the ray-penetrating plane in the operating state. Furthermore, the imaging device is particularly configured to detect the evaluation image imaged in the first focal plane. The first holding device preferably has a first holding plane in which the optical elements of the photosensitive system to be manufactured can be positioned for manufacturing. The second holding device preferably has a second holding plane in which a photosensitive device can be disposed for manufacturing. In particular, the first holding device is movably disposed relative to the imaging device via the first holding plane and / or the second holding device via the second holding plane. Specifically, in the operating state, the first holding device is movably disposed relative to the imaging device via the first holding plane and / or the second holding device via the second holding plane.

[0009] Preferably, the first holding device includes a first device axis extending orthogonally to a first holding plane. Furthermore, the second holding device preferably includes a second device axis extending orthogonally to a second holding plane. In particular, the first and / or second device axes are orthogonal to the ray penetration plane of at least one imaging device. It is also preferable that the first and / or second device axes are oriented at an angle to at least one imaging device.

[0010] The evaluation image is particularly an imaging of the reflection of the photosensitive device and / or test structure or calibration mark. The test structure and / or calibration mark are preferably a checkerboard pattern, a Siemens star pattern, a cross shape, an H-structure, etc. In particular, the test structure can be a structure of a radiation source unit such as an LED. The test structure is particularly advantageous for manufacturing photosensitive systems with specular reflection photosensitive devices. Specular reflection photosensitive devices particularly have reflective surfaces. Calibration marks are particularly used for calibrating the optical device relative to the photosensitive device. Preferably, one or more calibration marks are disposed in the edge region or outer region of the photosensitive device. Preferably, one or more calibration marks are disposed on the carrier of the photosensitive device. Furthermore, one or more calibration marks are disposed adjacent to the photosensitive device in the operating state. In particular, one or more calibration marks are disposed on the first and / or second holding device. Calibration marks are particularly physical, set-in, or introduced reference structures.

[0011] In particular, the test structure is the photosensitive device of the photosensitive system to be manufactured. In the preferred embodiment, the optical functional structure of the photosensitive device is used as a reference for manufacturing the photosensitive system. This has the particular advantage of eliminating the need for a reference to the device relative to a mark or other test structure.

[0012] The photosensitizing system to be manufactured particularly includes optoelectronic or optoelectronic systems. Optoelectronic systems are configured to convert the daylight generated by electrons and / or the energy generated by electrons into light emission, especially electromagnetic radiation. Optoelectronic systems are configured to convert light emission, especially electromagnetic radiation, into electronic daylight or electrical energy. In particular, a distinction should be made between imaging and projection systems within the photosensitizing system to be manufactured. Imaging systems are, for example, cameras or telescopes. Projection systems are, for example, dot pattern projectors for face and / or gesture recognition in mobile terminal devices.

[0013] The photosensitive system to be manufactured is, in particular, a combination of a projection system (transmitting unit) and an imaging system (receiving unit). Such a photosensitive system is, for example, a lidar sensor. In particular, the photosensitive system to be manufactured can also include two or more projection systems and / or two or more imaging systems.

[0014] Such a photosensitive system to be manufactured, particularly an inactive photosensitive system to be manufactured, includes a photosensitive device and an optical device. The optical device can include one or more lenses. In particular, the one or more lenses can be spherical and / or aspherical and / or free-form lenses. For example, converging lenses, meniscus lenses, and scattering lenses are known as spherical lenses. Preferred converging lenses are, for example, biconvex lenses, plano-convex lenses, or concave-convex lenses. Preferred scattering lenses are, for example, convex-concave lenses, plano-concave lenses, or biconcave lenses. The optical device can particularly include a combination of multiple different lenses, particularly multiple different combinations of spherical and / or aspherical and / or free-form lenses. In particular, the optical device can be configured such that it focuses electromagnetic rays in one direction at infinity or at a finite distance onto a focal plane. Furthermore, the optical device is preferably configured such that it focuses electromagnetic rays in the opposite direction at infinity or at a finite distance onto another focal plane. In particular, the optical device can be configured as an objective lens. The photosensitive device particularly includes the chip and / or circuit board of an image sensor or camera. Preferably, the photosensitive device includes an image sensor or camera chip disposed on a carrier. In particular, the photosensitive device can be, for example, a CCD chip, a CMOS chip, a VCSEL array, a SPAD array, an InGaAs chip, a microbolometer, or a similar component for detecting and / or generating electromagnetic radiation.

[0015] Manufacturing a photosensor system preferably includes calibrating and / or installing and / or inspecting the photosensor system. Manufacturing a photosensor system particularly includes calibrating an optical device relative to a photosensor and / or installing the optical device at the photosensor and / or inspecting the calibrated and / or installed photosensor system. Specifically, manufacturing a photosensor system includes calibrating and / or installing and / or inspecting the photosensor system relative to one or more other already calibrated and / or installed and / or inspected photosensor systems. In particular, manufacturing a photosensor system includes calibrating and / or installing and / or inspecting the photosensor device relative to the optical device of the photosensor system to be manufactured relative to one or more other already calibrated and / or installed and / or inspected photosensor systems, especially relative to their optical devices and / or photosensor devices.

[0016] In operation, calibration includes calibrating the optical device relative to the photosensitive device; moving the optical device and the photosensitive device; or moving the optical device relative to the photosensitive device which is fixed in position; or moving the photosensitive device relative to the optical device which is fixed in position. This applies to the first and second holding devices of the device if necessary corrections are required. In particular, calibration includes translational orientation of the optical device and rotational orientation of the photosensitive device. It is also preferable that calibration includes rotational orientation of the optical device and translational orientation of the photosensitive device. It is also preferable that calibration includes rotational and translational orientation of not only the optical device but also the photosensitive device.

[0017] During calibration, the first holding device along with the optical device to be calibrated is oriented relative to the second holding device along with the photosensitive device to be calibrated, and / or vice versa. Specifically, during calibration, an evaluation image of the photosensitive system to be calibrated for at least one corresponding imaging device is examined. In particular, calibration includes detecting the imaging quality of the evaluation image for the at least one corresponding imaging device. Imaging quality, for example, is the imaging sharpness of the evaluation image. Preferably, the evaluation image is an image of a single photosensitive system to be manufactured. Particularly preferred is that the evaluation image is a superposition of two or more images of two or more photosensitive systems to be manufactured. During calibration, the orientation and / or position of the optical device and the photosensitive device relative to each other are specifically set. Calibration is preferably performed based on the evaluation image to be tested for the at least one corresponding imaging device, particularly based on the image quality to be tested for the corresponding evaluation image. Preferably, calibration is performed based on values ​​derived from a mathematical evaluation of the superposition of two evaluation images. In particular, calibration is performed using common methods of industrial image processing or based on features extracted therefrom. Typically, two or more images of the test structure are evaluated and / or superimposed here. In particular, calibration is performed based on the difference between the two test structures in the evaluation images generated by superimposing the two images. Specifically, calibration is based on evaluating the imaging quality of the corresponding evaluation images according to the orientation and / or position of the movable first and / or second holding devices relative to the imaging device fixed in position during operation. To this end, in operation, the orientation and / or position of the movable first and / or second holding devices relative to the imaging device fixed in position during operation is adjusted, and the imaging quality of the corresponding evaluation images is detected with respect to the fixed imaging device based on the adjustment of the movable first and / or second holding devices.

[0018] Preferably, in order to determine one or more adjustment signals for the movably positioned first and / or second holding devices, the detected image quality of the corresponding evaluation image is transformed into the frequency domain. In particular, the detected image quality, such as the image sharpness of the evaluation image, can be transformed into the frequency domain, for example, by means of a Fourier transform. The maximum frequency in the frequency domain here corresponds particularly to the highest image sharpness, for which the orientation and / or position of the movably positioned first and / or second holding devices are known. Preferably, the image having a majority frequency share in the frequency range of the upper examination corresponds to the image with the best image sharpness, for which the orientation and / or position of the movably positioned first and / or second holding devices are known. Preferably, the adjustment signal can be obtained from a value derived from a mathematical evaluation of the superposition of two evaluation images. In particular, the adjustment signal can be obtained by means of common methods of industrial image processing based on features extracted therefrom. Furthermore, the adjustment signal can also be obtained from the positional difference between test structures extracted from the evaluation images within the image range.

[0019] Based on this, preferably, one or more adjustment signals are obtained to calibrate the optical device relative to the photosensitive device and / or relative to another photosensitive system, or vice versa. Furthermore, the adjustment signals can be obtained from values ​​extracted from the evaluation image within the image range.

[0020] One of the imaging devices in at least one imaging device is preferably configured such that its optical axis is substantially, especially after optical device calibration relative to the photosensitive device, oriented parallel to and preferably concentrically with the first and / or second device axes. In particular, one of the imaging devices in at least one imaging device is preferably configured such that its optical axis is substantially, especially after optical device calibration relative to two or more photosensitive devices, oriented preferably concentrically with the first and / or second device axes. Furthermore, it is preferred that at least one additional imaging device in at least one imaging device is configured such that its optical axis is oriented at an angle to the first and / or second device axes. It is particularly understood that the respective at least one imaging device detects different regions of the photosensitive device in order to create a photosensitive system. Specifically, at least one imaging device whose optical axis is oriented parallel to and preferably concentrically with the first and / or second device axes detects the center of the photosensitive device, while at least one additional imaging device in at least one imaging device whose respective optical axis is oriented at an angle to the first and / or second device axes detects the edge regions of the photosensitive device. This preferred embodiment has the particular advantage that the optical device and the photosensitive device of the photosensitive system to be manufactured are translated and rotated relative to each other by means of a first and / or a second holding device.

[0021] In particular, during calibration, the offset required for mounting is considered. This offset is necessary, for example, to compensate for shrinkage caused by the joint and / or to set a system at infinity and subsequently imaged to a finite distance. Furthermore, an offset is particularly needed for calibration to focus from a plane containing non-optical functional structures in the photosensitive device of the photosensitive system to the desired optical functional structure of the photosensitive device of the photosensitive system to which a typically high frequency fraction has been detected. Additionally, an offset is also needed to achieve the desired distance between two test structures in the evaluation image, for example, to account for parallax effects. This offset can also be adapted to compensate for image warping effects and to account for imaging sharpness gradients in the on-axis and off-axis regions of the photosensitive system.

[0022] It should be understood that the offset of the device is set, in particular, by translational and / or rotational movement or adjustment of the first and / or second holding devices. Specifically, the offset is set substantially along and / or about two independent axes in the first and / or second holding planes. Furthermore, it is preferable to move and / or adjust the offset substantially orthogonal to the first and / or second holding planes, particularly along a third independent axis. Preferably, the offset is also set about the third independent axis.

[0023] During installation, the first holding device, together with the optical device to be installed, is held in a predetermined orientation and / or position relative to the second holding device, together with the photosensitive device to be installed. Specifically, during installation, the optical device and the photosensitive device are connected, for example, by bonding. Specifically, during installation, the optical device and the photosensitive device can be connected in a form-fitting and / or force-fitting and / or material-fitting manner. Specifically, the installation includes bonding, brazing, and / or welding for connecting the optical device and the photosensitive device. Preferably, the installation includes hardening of the connection, especially UV hardening.

[0024] During inspection, the calibrated and / or installed photosensitive system is examined. In particular, during inspection, an evaluation image of the photosensitive system to be inspected is examined, along with the corresponding imaging device. In particular, examining the corresponding evaluation image includes checking the imaging sharpness of the corresponding evaluation image. In particular, during inspection, the orientation and / or position of the calibrated and / or installed optical and photosensitive devices relative to each other are checked. Preferably, the superposition of two evaluation images is evaluated mathematically and / or through image processing. In particular, during inspection, the difference between the positions of the first and second test structures in the evaluation image can be examined. When multiple photosensitive systems are manufactured simultaneously or sequentially using equipment, such evaluation images are generated, in particular, by superimposing multiple evaluation images.

[0025] It should be noted that during inspection, the manufactured photosensitive system is disposed in either the first or second holding device. Preferably, the manufactured photosensitive system is disposed in the second holding device for inspection purposes.

[0026] The operating state refers to the state in which the device according to the invention is in operation. The operating state of the device according to the invention includes a working state and preferably a positioning state. Furthermore, the operating state preferably includes a logistics state and / or preferably a maintenance state. The working state of the device according to the invention particularly includes manufacturing the photosensitive system. In particular, the working state of the device according to the invention includes calibrating and / or installing and / or inspecting the photosensitive system.

[0027] In the positioning state of the device according to the invention, the imaging device is movably disposed. Specifically, in the positioning state, the imaging device is movably disposed in a plane parallel to the first and / or second holding planes. Specifically, in the positioning state, the first and / or second holding devices are fixedly disposed and the imaging device is movably disposed. Specifically, the device includes an imaging drive device and / or an imaging support device and / or an imaging control device for moving the imaging device.

[0028] In the logistics configuration of the device according to the invention, the optical devices and photosensitive devices are preferably provided and transported to corresponding holding devices, and the manufactured photosensitive system is output. Transport and / or output can be performed piece by piece, in batches, or continuously. Preferably, multiple optical devices and / or multiple photosensitive devices can be transported simultaneously. In particular, the logistics configuration also includes arranging the optical devices and photosensitive devices in the corresponding holding devices.

[0029] The maintenance status of the device according to the invention can in particular include the maintenance and upkeep status of the various components of the device according to the invention.

[0030] In particular, the various elements, devices, units and / or apparatuses of the device according to the invention are configured and / or function differently from each other in the working state and, for example, in the positioning state and / or logistics state and / or maintenance state.

[0031] The first and / or second holding devices are configured to hold optical devices and / or photosensitive devices. In particular, the corresponding holding devices are configured to hold and / or accommodate optical devices or photosensitive devices in a form-fitting and / or force-fitting manner. According to a first aspect of the invention, the device is characterized in particular by the fact that the first holding device is configured to accommodate a photosensitive device, and the second holding device is configured to accommodate an optical device. In particular, the corresponding holding devices can be configured to accommodate a reservoir having one or more optical devices and / or a reservoir having one or more photosensitive devices. Preferably, the first and / or second holding devices are configured as reservoirs for accommodating optical devices and / or photosensitive devices and for providing a means of manufacturing a photosensitive system. It is also preferable to separately feed optical devices or photosensitive devices to the corresponding holding devices. In particular, the corresponding holding devices are configured to feed optical devices and / or photosensitive devices to the holding devices for manufacturing a photosensitive system and output them after manufacturing the photosensitive system. The reservoir is preferably configured to accommodate or temporarily store one or more photosensitive devices and / or one or more optical devices for manufacturing a photosensitive system. In particular, the first and / or second holding devices can be configured to accommodate two or more optical devices and / or two or more photosensitive devices. Specifically, by means of such first and / or second holding devices capable of accommodating two or more optical devices and / or two or more photosensitive devices, two or more photosensitive systems can be manufactured simultaneously and / or sequentially, independently and in relation to each other. Specifically, a functional relationship between the photosensitive systems and each other is established for this purpose. In particular, it is also possible to sequentially mount multiple optical devices onto a carrier unit having multiple photosensitive devices by moving the imaging device and moving the first and / or second holding devices. Preferably, the imaging device and the first and / or second holding devices are moved such that they move in the same direction at the same speed, i.e., their positions relative to each other are fixed during movement. This is particularly preferred when the photosensitive system to be manufactured is, for example, part of a dual-camera or triple-camera system.

[0032] Preferably, multiple photosensitive systems, preferably projection systems and imaging systems, or especially two imaging systems, should be manufactured sequentially.

[0033] Preferably, in the operating state, the first holding device and the second holding device are movably arranged relative to the imaging device, wherein the imaging device is fixedly positioned. This is particularly preferred when multiple photosensitive systems, especially projection systems and imaging systems, especially lidar systems, preferably two or more imaging systems, such as multi-camera systems, are manufactured sequentially or simultaneously. Furthermore, it is preferable that, in the operating state, the first holding device is movably arranged relative to the second holding device and the imaging device, wherein the second holding device and the imaging device are fixedly positioned. In particular, it is preferable that, in the operating state, the second holding device is movably arranged relative to the first holding device and the imaging device, wherein the first holding device and the imaging device are fixedly positioned. Preferably, the first holding device and / or the second holding device are movably translatable along an optical axis. In particular, the first and / or the second holding devices are movably translatable transversely to the optical axis. In particular, the first and / or the second holding devices are rotatably movable. Preferably, the first and / or the second holding devices are rotatably movable about two or three axes orthogonally oriented to each other. In particular, the first and / or second holding devices are movably disposed relative to the ray-penetrating plane of at least one imaging device. Specifically, the first and / or second holding devices are movably disposed for translation and / or rotation relative to the ray-penetrating plane of at least one imaging device.

[0034] The device according to the invention is configured such that, after manufacturing a first photosensitive system in an operational state, it switches to a positioning state and moves an imaging device optically oriented relative to the first photosensitive system, such that it is oriented relative to a second (still) photosensitive system to be manufactured. To manufacture the second photosensitive system, the device switches back to the operational state. In particular, the device according to the invention is configured to, after switching back to the operational state, calibrate at least one additional photosensitive system, especially at least one additional optical device and another photosensitive device, relative to each other and with respect to the already calibrated and / or installed photosensitive system. For calibration relative to the already calibrated and / or installed photosensitive system, the already calibrated and / or installed photosensitive system should also be calibrated, preferably using a virtual test structure stored from evaluation images of the test structure of the already calibrated and / or installed photosensitive system (after calibration), or where evaluation images recorded simultaneously or sequentially by the same imaging device are superimposed.

[0035] In particular, the first holding plane of the first holding device is configured relative to the second holding plane of the second holding device such that an optical device, which can be placed in the first holding device, focuses the optical path of the electromagnetic rays onto a focal plane, the optical path being located, in particular, in a photosensitive device, which can be placed in the second holding device and reflects the electromagnetic rays toward the ray-penetrating plane of at least one imaging device. The reflected electromagnetic rays pass through the ray-penetrating plane of at least one imaging device and enter at least one imaging device.

[0036] Equipment, apparatus, units, and components are particularly movable when their orientation and / or position relative to a fixedly positioned apparatus, unit, or component is spatially variable. Equipment, apparatus, units, and components are particularly fixed in position when their orientation and / or position is spatially immutable. Equipment, apparatus, units, and components are particularly fixed in position when they are not movable.

[0037] The imaging apparatus preferably comprises two, three, four, five, or six imaging devices. In particular, the imaging apparatus can also comprise more than six imaging devices. Preferably, the imaging apparatus comprises 7, 8, 9, 10, 11, 12, or more imaging devices. Each imaging device can include a ray-penetrating plane and an optical axis. The optical axis of at least one imaging device is preferably orthogonal to the ray-penetrating plane. Preferably, a first portion of at least one imaging device is aligned with a first photosensitive system to be manufactured, and a second portion of at least one imaging device is aligned with a second photosensitive system to be manufactured. Furthermore, it is advantageous that the imaging apparatus be movably configured to manufacture multiple photosensitive systems to be manufactured relative to each other sequentially and / or simultaneously.

[0038] The apparatus for manufacturing an inactive photosensitive system is characterized in particular by the fact that the evaluation image to be detected is not detected by means of the photosensitive system to be manufactured. The apparatus according to the invention, based on the first aspect, is characterized in particular by the fact that, in the operating state, the inactive photosensitive system to be manufactured, especially its photosensitive device, is not connected to one or more electrical contacts, i.e., it is not supplied with electrical power and does not constitute a means for data transmission. Preferably, the inactive photosensitive system to be manufactured is not activated during manufacturing. This inactive photosensitive system is not supplied with electrical power, especially during its manufacturing process. Furthermore, this inactive photosensitive system is not in contact with electrical contacts, especially for data transmission, during its manufacturing process. In particular, in the operating state, during the manufacturing of the inactive photosensitive system, no signals or data related to the photosensitive system or photosensitive device to be manufactured are detected for manufacturing purposes, such as those relating to image sharpness, which is used to manufacture the photosensitive system, especially for the orientation of the optical device relative to the photosensitive device.

[0039] In this regard, the device according to the invention preferably does not include terminals for transmitting electrical energy and / or electrical signals as data of the photosensitive system to be manufactured. In particular, the device is characterized in that, in the operating state of the device, data of the photosensitive system to be manufactured, especially its photosensitive device, is not used for the orientation of the optical device relative to the photosensitive device. In particular, the device according to the invention is characterized in that, in the operating state of the device, the first or second holding device is configured to house the photosensitive device, wherein the photosensitive device is configured to reflect electromagnetic rays in the operating state of the device, wherein the reflected rays pass through the ray-penetrating plane of at least one imaging device and enter into at least one imaging device and are detected there.

[0040] In particular, the equipment used to manufacture inactive photosensitive systems has the advantage that it does not require electrical contact with the inactive photosensitive system to be manufactured. This advantageously reduces the manufacturing and maintenance costs of the equipment. Furthermore, in order to manufacture the inactive photosensitive system, the inactive photosensitive system is not connected to any electrical contacts. This significantly reduces the manufacturing time of the photosensitive system.

[0041] Advantageously, it eliminates, in particular, the hardware required for contacting, manipulating, and operating the photosensitive system to be manufactured. This can result in a significant reduction in process time and lower costs.

[0042] In particular, imaging devices with multiple imaging elements enable the manufacture of photosensitive systems with exceptionally high imaging sharpness. Furthermore, the sensitivity of the imaging device can be positively influenced in a particularly advantageous manner by the dual-ray penetration through the optics to be calibrated and / or installed, as reflections of electromagnetic rays can amplify imaging errors.

[0043] In particular, the device according to the invention is based on the inventor's concept that the manufacturing time of the photosensitive system, using conventional devices, is limited by the image rate of the photosensitive device. The advantageous configuration of the imaging device, based on its significantly higher image rate, along with its significantly higher speed, allows for the detection of evaluation images and the evaluation of those images. This reduces the manufacturing time of the photosensitive system to be manufactured in a particularly advantageous manner.

[0044] According to a first preferred embodiment, a first holding device is disposed between a second holding device and an imaging device. In particular, in this preferred embodiment, the device is oriented at a configuration suitable for reflective illumination. This preferred arrangement of the embodiment enables the particularly cost-effective and rapid fabrication of the photosensor system. Specifically, this embodiment is based on a simple, unrealized arrangement of the imaging device and the optical and photosensor devices to be manufactured.

[0045] According to another preferred embodiment of the device, at least one imaging device and a first holding device are arranged spaced apart from each other along an optical axis by a first spacing; and the first holding device and a second holding device are arranged spaced apart from each other along an optical axis by a second spacing. If the imaging device includes multiple imaging devices, the first spacing between the first holding device and the corresponding imaging device can be varied. Preferably, the first spacing between the first holding device and the corresponding imaging device is the same. The third spacing is specifically the focal length of the imaging module. The spacing is particularly the spacing between the principal plane of the imaging module and the first focal plane.

[0046] Vignetting effect particularly limits the maximum value of the first spacing. Preferably, the ratio of the third spacing to the second spacing is at least 1:1 and at most 100:1. In particular, the ratio of the third spacing to the second spacing can be at least 0.5:1. Furthermore, the ratio of the third spacing to the second spacing is preferably in the order of 1:1 to 10:1. In particular, the second spacing substantially corresponds to the focal length of the optical device of the photosensitive system to be manufactured. In particular, the first holding device is spaced apart from the second holding device after calibration and / or installation and / or inspection, such that the third focal plane of the optical device is located in the photosensitive device along the optical axis toward the second holding plane, particularly in the second holding plane of the second holding device. Preferably, the photosensitive device has a photosensitive imaging plane, wherein the photosensitive device is preferably disposed in the second holding device such that the second holding plane is located in the photosensitive imaging plane.

[0047] According to another preferred improvement, the first and / or second holding devices are configured to accommodate two or more optical devices and / or two or more photosensitive devices. Preferably, the first holding device is configured to allow the two or more optical devices to rotate and / or translate independently of each other; and / or preferably, the second holding device is configured to allow the two or more photosensitive devices to rotate and / or translate independently of each other. Furthermore, it is preferable that the device is configured to allow the imaging device to rotate and / or translate relative to the first and / or second holding devices independently of the first and / or second holding devices.

[0048] In the preferred embodiment, the first holding device is configured to allow the optical devices to rotate and / or translate independently of each other. Specifically, the first holding device can have two or more holding units, which can be independently arranged and / or supported and / or driven for rotation and / or translation. Furthermore, in the preferred embodiment, the second holding device is configured to allow the photosensitive devices to rotate and / or translate independently of each other. Specifically, the second holding device can have two or more holding units, which can be independently arranged and / or supported and / or driven for rotation and / or translation. Rotational movement includes rotation and / or pivoting of the first and / or second holding devices about three independent axes (three rotational degrees of freedom). Translational movement includes pushing and / or moving along three independent axes (three translational degrees of freedom).

[0049] The preferred embodiment has the advantage that two or more photosensitive systems can be calibrated and / or installed simultaneously or sequentially, i.e., sequentially, independently, and in relation to each other.

[0050] Furthermore, it should be understood that the imaging device is configured to simultaneously image two or more photosensitive systems to be manufactured, particularly two or more photosensitive devices of the photosensitive systems to be manufactured. In particular, an imaging device having a single imaging device is configured to simultaneously image two or more photosensitive systems to be manufactured, particularly two or more photosensitive devices of the photosensitive systems to be manufactured. Preferably, the imaging device, particularly the single imaging device, as an imaging element of the imaging module includes a converging lens. It is proposed that the X-ray source unit first illuminates the first photosensitive system to be manufactured and then illuminates the second or another photosensitive system to be manufactured. Furthermore, it is preferable to use a global illumination unit, particularly the X-ray source unit, and to individually illuminate the respective photosensitive systems to be manufactured by a switchable darkening unit, particularly a darkening unit of a rotating support. Furthermore, it is preferable that the electromagnetic rays of a X-ray source disposed outside the imaging device are coupled coaxially with the optical axis of the imaging device between the X-ray penetration plane and the first holding plane, such that they alternately illuminate the left and right photosensitive systems. Furthermore, it is preferable that the first and second photosensitive systems to be manufactured are alternately illuminated by optical fibers, which are preferably located at the optical devices of the first and second photosensitive systems to be manufactured in order to illuminate the photosensitive systems to be manufactured.

[0051] This has particular advantages: with the aid of an imaging device, especially a single imaging device, it is possible to simultaneously detect two or more photosensitive systems to be manufactured, and in particular two or more photosensitive devices of the photosensitive systems to be manufactured. Furthermore, this has the advantage that evaluation images of two or more photosensitive systems to be manufactured can be physically superimposed simultaneously in the imaging device, especially in a single imaging device, and in this respect, the virtual superposition downstream can be cancelled. This advantageously minimizes both installation time and structural complexity.

[0052] According to another preferred embodiment, the imaging apparatus is movably configured to manufacture a plurality of photosensitive systems to be manufactured relative to each other sequentially and / or simultaneously. Preferably, one or more imaging devices of the imaging apparatus are movably configured. In particular, the imaging apparatus, especially at least one imaging device, is movably configured substantially parallel to the first and / or second holding planes of the first and / or second holding devices. Alternatively or preferably, the imaging apparatus, especially at least one imaging device, is pivotally disposed and / or supported and / or driven relative to the first and / or second holding planes of the first and / or second holding devices.

[0053] Furthermore, according to a preferred improvement, at least one first portion of an imaging device is aligned with a first photosensitive system to be manufactured, and at least one second portion of an imaging device is aligned with a second photosensitive system to be manufactured. The first portion of the at least one imaging device is particularly a first region of free aperture, preferably a first sub-region. The second portion of the at least one imaging device is particularly a second region of free aperture, preferably a second sub-region. In particular, the free aperture is the free aperture of the imaging module and / or imaging element, preferably a converging lens, of the at least one imaging device.

[0054] According to another preferred embodiment, the imaging device has two imaging devices, wherein the two imaging devices are arranged such that their optical axes extend parallel to each other, wherein one of the two imaging devices is aligned with a photosensitive system to be manufactured, and the other of the two imaging devices is aligned with another photosensitive system to be manufactured.

[0055] With the aforementioned preferred embodiment, two photosensitive systems to be manufactured can be calibrated relative to themselves. In particular, calibration can be performed simultaneously and, in this respect, need not be performed sequentially. This has the advantage of saving manufacturing time when manufacturing multiple photosensitive systems. For calibrating multiple photosensitive systems, images are superimposed and compared in an imaging device for evaluation.

[0056] According to another preferred improvement of the device, the first holding plane of the first holding device is arranged substantially parallel to the ray-penetrating plane of at least one of the at least one imaging devices and / or non-parallel spaced from the ray-penetrating plane of at least one additional imaging device. In particular, at least one, especially the only one, imaging device is arranged such that its optical axis is oriented parallel to, and especially concentrically with, the axes of the first and / or second devices. Furthermore, it is preferred that at least one of the at least one imaging devices is arranged such that its optical axis is angled relative to the axes of the first and / or second devices. In particular, at least one imaging device is arranged such that its optical axis extends centrally through the optical devices arranged in the first and / or second holding devices in the operating state. In particular, at least one imaging device is arranged such that its optical axis intersects with the axes of the first and / or second devices arranged in the optical devices in the operating state.

[0057] Preferably, the sole imaging device is oriented with its ray-penetrating plane substantially parallel to the first and / or second holding planes of the first and / or second holding devices. In particular, its optical axis is oriented substantially concentrically with the axes of the first and / or second devices. This arrangement is particularly suitable for calibrating the optical device by translation relative to the photosensitive device along the optical axis of the sole imaging device. Furthermore, it is preferable that the imaging device has one or more imaging devices whose ray-penetrating planes are respectively oriented substantially at an angle to the first and / or second holding planes. This preferred arrangement is particularly suitable for calibrating the optical device by rotation relative to the photosensitive device. Preferably, the imaging devices oriented at an angle relative to the first and / or second holding devices are oriented at an angle of at least 0° and a maximum of 90° with respect to the first and / or second holding planes. In particular, the imaging devices oriented at an angle relative to the first and / or second holding planes have substantially the same distance from the first and / or second holding devices. Furthermore, it is preferable that the imaging devices oriented at an angle relative to the first and / or second holding planes are arranged on a circular track. The circular track can have a constant or varying curvature. In particular, the circular track is elliptical. Preferably, the imaging devices arranged on the circular track are spaced apart from each other at substantially the same distance. In particular, the imaging devices arranged on the circular track are positioned relative to each other at an angle of 30°, 45°, 60°, 90°, or 120° about the midpoint of the circular track. Other angles are also preferred. Specifically, the angle is related to the photosensitive system to be manufactured. Preferably, the angle is related to the aperture angle, i.e., the numerical aperture of the optical device of the photosensitive system to be manufactured, the geometry of the photosensitive device of the photosensitive system, and the position of the calibration mark.

[0058] According to a further preferred embodiment of the device, at least one imaging device includes: an imaging module having a ray-penetrating plane and having an optical axis, wherein the imaging module is configured to image at infinity or at a finite distance along the optical axis in a direction toward a second holding plane at a second focal length in a second focal plane, and to image at infinity or at a finite distance in the opposite direction at a first focal length in a first focal plane; and / or a ray source unit providing electromagnetic rays for generating and detecting evaluation images; and / or a beam splitter unit splitting at least one of the electromagnetic rays from the ray source unit. A portion is deflected toward the photosensitive system to be manufactured; and / or an image detection unit configured to detect an evaluation image of the photosensitive system to be manufactured, wherein the image detection unit is positioned in the first focal plane of the imaging module for detecting the evaluation image of the photosensitive system to be manufactured; and / or a diffuser unit for scattering electromagnetic rays from the radiation source unit; and / or a filter unit for filtering electromagnetic rays having the wavelength to be filtered; and / or a test structure device for generating a test structure on the photosensitive device of the photosensitive system to be manufactured, the test structure being reflected by the photosensitive device and detected and evaluated in the imaging device as an evaluation image. This has the particular advantage of enabling the manufacture of a photosensitive system with a photosensitive device having a low contrast and / or specular reflective surface. In particular, this preferred embodiment is preferred for signal processing.

[0059] The imaging module can include one or more imaging elements. The imaging element can be a lens. In particular, the lens can be spherical and / or aspherical and / or free-formed. For example, converging lenses, meniscus lenses, and scattering lenses are known as spherical lenses. Preferred converging lenses are, for example, biconvex, plano-convex, or concave-convex lenses. Preferred scattering lenses are, for example, convex-concave, plano-concave, or biconcave lenses. Preferably, the imaging module includes a converging lens. In particular, the imaging module is configured to convert the electromagnetic rays from the X-ray source unit into a parallel electromagnetic ray beam and to focus the reflected electromagnetic rays, which serve as a photosensitive device as an objective lens, in a first focal plane to detect and evaluate an image. Preferably, the imaging module includes a fixed-focal-length objective lens.

[0060] The beam splitter unit can preferably be a glass disk. The glass disk can, for example, be introduced at a 45° angle relative to the optical axis. The beam splitter is configured to reflect a portion of the electromagnetic rays at the glass disk, while the remainder passes through the glass disk. By applying a suitable partially reflective coating to the glass disk, the electromagnetic rays can preferably be split into two electromagnetic rays of equal intensity. Such a beam splitter unit is also known as a semi-transparent mirror. Furthermore, the beam splitter unit preferably includes a wedge prism, a thin film, a biprism, and / or a pentaprism.

[0061] The radiation source unit is preferably a substantially point-like light source. Preferably, the radiation source unit is an LED, optical fiber, or incandescent filament. Particularly preferably, the radiation source unit generates monochromatic electromagnetic radiation. In particular, the radiation source unit is a visible light source. The radiation source unit is particularly configured to couple electromagnetic radiation into the optical path via a beam splitter of the imaging device. Specifically, the coupled electromagnetic radiation exits the imaging device via a radiation-penetrating plane and is reflected by a photosensitive device, re-entering the imaging device via the radiation-penetrating plane.

[0062] The diffuser unit is configured to control electromagnetic rays. More specifically, the diffuser unit is configured to uniformly illuminate the photosensitive system to be manufactured. Preferably, the diffuser unit is disposed in the focal plane B1. In particular, the device can supplement and / or alternatively have a slit-structured disk for the diffuser unit.

[0063] The filter unit is configured to filter electromagnetic rays of specific wavelengths. In particular, the filter unit is preferably configured to not filter electromagnetic rays only in a narrow wavelength range. The narrow wavelength range is preferably between at least 10 nm, 20 nm, 50 nm, 100 nm, or 200 nm and a maximum of 10 nm, 20 nm, 50 nm, 100 nm, or 200 nm. In particular, the filter unit is configured to filter long-wavelength electromagnetic rays. In particular, the filter unit is configured not to filter electromagnetic rays with wavelengths in the ultraviolet range and smaller. Such a filter unit that does not filter electromagnetic rays only in a narrow wavelength range and / or does not filter electromagnetic rays with wavelengths in the ultraviolet range and smaller enables imaging of evaluation images with significantly higher imaging sharpness. In particular, with the aid of such a filter unit, structural imaging, detection, and / or evaluation of photosensitive devices or test structures can be achieved with significantly higher imaging sharpness. The filter unit is particularly disposed between the radiation source unit and the beam splitter unit. Alternatively or supplementally, the filter unit can be positioned between the beam splitter unit and the image detection unit.

[0064] The test structure, particularly the test image, is generated by the test structure device. The test structure device couples the test structure into the optical path of the electromagnetic rays. The test structure device is particularly configured to generate a test structure that images the optical device of the photosensitive system to be manufactured onto the photosensitive device of the photosensitive system to be manufactured. Preferably, the test structure device is disposed between the ray source unit and the beam splitter unit. Preferably, the test structure device is disposed in the focal plane B1. In particular, the test structure device can be disposed in the focal plane of the imaging module. Preferably, a diffuser unit is disposed between the test structure device and the ray source unit. In particular, the diffuser unit and the test structure device are disposed after the ray distributor on the side of the first focal plane of the imaging module facing the ray source unit. In particular, the test structure device can be configured on the surface of the diffuser unit, which is preferably located after the beam splitter on the side of the first focal plane of the imaging module facing the ray source unit. Preferably, the test structure device is disposed next to the diffuser unit along the electromagnetic rays.

[0065] Preferably, the light source unit and / or image detection unit and / or beam splitter unit include a test structure device. Furthermore, it is preferable that the test structure device is a separate device from the imaging device. This is particularly relevant for the photosensitive system to be manufactured, which is a projection photosensitive system.

[0066] According to a further preferred embodiment of the device, the imaging apparatus includes: a collimator, preferably a focusable collimator, and especially an autocollimator. This preferred embodiment is based particularly on common constructions used in imaging apparatuses. In this regard, the preferred embodiment is particularly cost-effective and simple to operate.

[0067] In another preferred embodiment, the image detection unit includes: a camera for detecting an evaluation image generated by the optoelectronic system to be manufactured from at least one imaging device; and / or, in particular, a power electronics module for processing and transmitting the corresponding evaluation image detected by the image detection unit; and / or, in particular, an image sensor for detecting the corresponding evaluation image generated by the optoelectronic system to be manufactured.

[0068] The camera particularly includes an image sensor disposed in an imaging plane. The image sensor is particularly a chip. The camera is particularly configured such that the imaging plane is orthogonal to the optical axis. Furthermore, the camera can be configured such that the imaging plane is substantially not orthogonal to the first and / or second device axes.

[0069] In particular, the image detection unit is fixedly positioned relative to the imaging module. Preferably, the camera is positioned relative to the imaging module such that its imaging plane is spaced apart from the imaging module by a first focal length. In particular, the camera is positioned relative to the imaging module such that the first focal plane of the imaging module is located within the imaging plane of the camera. Preferably, the image sensor is positioned relative to the imaging module such that its imaging plane is spaced apart from the imaging module by a first focal length. In particular, the image sensor is positioned relative to the imaging module such that the first focal plane of the imaging module is located within the imaging plane of the image sensor.

[0070] Furthermore, preferably, the image detection unit and the imaging module are fixedly positioned relative to the second holding device. In this preferred embodiment, the photosensitive system to be manufactured can be manufactured by adjusting the first holding device, particularly by calibration and / or installation and / or inspection.

[0071] The preferred embodiment has the particular advantage of manufacturing a photosensitive system, especially calibrating a photosensitive system, without connecting the photosensitive device of the photosensitive system to a power supply device and / or a control device for signal transmission.

[0072] The power electronics module is particularly configured to detect an evaluation image of the photosensitive device of the photosensitive system to be manufactured. Preferably, the power electronics module is configured to evaluate the detected evaluation image. In particular, the power electronics module is configured to determine the imaging sharpness of the detected evaluation image. Furthermore, the power electronics module is particularly configured to generate a signal for orienting the first holding device relative to the second holding device. The orienting signal is generated particularly based on the separately detected evaluation images. The orienting signal is in particular an adjustment signal. The evaluation image for evaluation particularly includes evaluating the imaging sharpness. The evaluation is preferably a modulation transfer function. The power electronics module preferably includes an application-specific integrated circuit (ASIC) and / or a field-programmable gate array (FPGA) and / or a microcontroller (PIC) for evaluating the evaluation image to be detected. In particular, the power electronics module is configured to provide an adjustment signal to the adjustment device according to the evaluation for adjusting the orientation and / or position of the first and / or second holding devices relative to the ray penetration plane of at least one imaging device.

[0073] Specifically, the power electronics module is configured to determine the difference between the positions of the first test structure and the second test structure. The position of the first test structure is derived from an evaluation image simultaneously detected and / or stored by the photosensitive system after calibration. The second test structure is derived from a second evaluation image detected by a separate photosensitive system to be manufactured. In particular, the evaluation of the evaluation image also includes evaluating the difference between the positions of the first and second test structures. Furthermore, the evaluation also includes forming a vector difference between the real and / or virtual test structures in the detected evaluation image.

[0074] It should be understood that, in the context of this application, power electronic modules particularly relate to rapid signal processing and the generation of conditioning and control signals for faster calibration. A similar power electronic module is, for example, the autofocus unit of a specular reflection camera. Power electronic modules are particularly capable of enabling rapid execution of measurement, conditioning, and control processes.

[0075] The power electronics module is preferably connected to the camera and / or adjustment device via signal technology for adjusting the orientation and / or position of the first and / or second holding devices relative to the ray penetration plane of at least one imaging device. In particular, the power electronics module can be integrated into the camera.

[0076] In particular, the image detection unit may include an autofocus function module configured to evaluate the detected evaluation image and provide adjustment signals to the adjustment device based on the evaluation to adjust the orientation and / or position of the first and / or second holding device relative to the ray penetration plane of at least one imaging device.

[0077] According to another preferred embodiment, the device according to the invention includes an adjustment device for adjusting the orientation and / or position of a first holding plane of a first holding device and / or a second holding plane of a second holding device relative to the ray penetration plane of at least one imaging device, wherein the adjustment device preferably has a driving device. In particular, the driving device includes at least one piezoelectric actuator and / or electromagnetic actuator and / or parallel kinematics.

[0078] The adjusting device is configured to set the orientation and position of the first and second holding devices relative to each other. Specifically, the adjusting device is configured to set the orientation and position of the movable first holding device relative to the fixedly positioned second holding device. Furthermore, the adjusting device is preferably configured to set the orientation and position of the fixedly positioned first holding device relative to the movable second holding device. It is also preferable that the adjusting device sets the orientation and position of the movable first holding device relative to the movable second holding device. Particularly preferable is that the first holding device is translatably movable and the second holding device is rotatably movable, or vice versa. In particular, the adjusting device is connected to the movable holding devices.

[0079] In the operating state of the device, the adjustment device is specifically configured to set the orientation and position of the optical device held in the first holding device and the photosensitive device held in the second holding device relative to each other. Preferably, the second holding device is fixedly positioned relative to the imaging device in the operating state, and the first holding device is movably positioned relative to both the imaging device and the second holding device. In this preferred configuration, the adjustment device is configured to set the orientation and position of the first holding device relative to the second holding device by moving the first holding device.

[0080] The adjusting device preferably has one or more axes. These axes can be stacked. In particular, the one or more axes are linear axes and / or angular axes. The one or more axes are preferably orthogonal to each other. In particular, the adjusting device can have or be parallel kinematics, enabling the movement, especially free movement, of the pivot point. In particular, the adjusting device can be or include parallel kinematics. In particular, the parallel kinematics is a six-legged parallel mechanism (Hexapod).

[0081] Preferably, the adjustment device is further configured to hold the first and / or second holding devices in a fixed position and orientation, particularly in a position and orientation in which the optical devices are oriented relative to the photosensitive devices, such that the photosensitive devices are imaged by means of an evaluation image having the required imaging quality. In particular, the adjustment device is configured to hold multiple optical devices and / or photosensitive devices to detect one or more evaluation images.

[0082] In the preferred embodiment, the photosensitive system can be manufactured quickly, accurately, and cost-effectively in a particularly suitable manner.

[0083] In another preferred embodiment, the device includes: a support device configured to support the first holding device and / or the second holding device in a translational and / or rotational manner relative to the imaging device in an operating state; and / or a drive device configured to drive the first holding device and / or the second holding device in a translational and / or rotational manner in an operating state.

[0084] Preferably, the support device is configured to support the first holding device and / or the second holding device relative to the imaging device in a translational and / or rotational manner. In particular, the support device and / or drive device is configured to support and / or move the holding device along one, two, or three linear axes in a translational manner and / or support and / or move it about one, two, or three linear axes in a rotational manner. Preferably, the two or three linear axes are orthogonally oriented to each other. In particular, the support device and / or drive device is configured such that the support device and / or drive device have up to six degrees of freedom. The support device and / or drive device can also have more than six degrees of freedom.

[0085] In particular, the support device and / or drive device are configured to independently translate and / or rotate two or more optical devices and / or photosensitive devices disposed in the first and / or second holding devices.

[0086] According to another preferred embodiment, the device according to the invention further includes a bonding device configured to connect, in particular, adhesively connect, the photosensitive device and the optical device to each other. The bonding device is particularly configured to establish a welded, brazed, and / or adhesive connection between the optical device and the photosensitive device. In particular, the bonding device is configured for UV bonding. Preferably, the bonding device includes a UV bonding unit.

[0087] In another preferred embodiment, the device includes: an evaluation device for evaluating an evaluation image detected by at least one imaging device, wherein the evaluation device is preferably coupled to the imaging device, particularly an image detection unit, and / or an adjustment device and / or a bonding device in a signal technology manner; and / or particularly a power electronics module for processing and transmitting the evaluation image detected by the corresponding image detection unit; and / or particularly a control unit for controlling the adjustment device and / or for controlling the bonding device based on the result of evaluating the corresponding evaluation image detected; wherein the control unit particularly includes an autofocus function module for automatically focusing the device in an operating state.

[0088] The evaluation unit is preferably configured to perform the following steps: detecting a corresponding evaluation image; and / or evaluating the corresponding evaluation image; and / or determining one or more adjustment signals for controlling the first and / or second holding device based on the result of evaluating the corresponding evaluation image; and / or providing one or more adjustment signals for manipulation. In particular, evaluating the corresponding evaluation image includes evaluating the imaging sharpness of the corresponding evaluation image. Evaluating the imaging sharpness particularly includes transforming the evaluation image to the frequency domain and analyzing the frequency domain of the evaluation image. Specifically, the transformation of imaging sharpness is performed using a Fourier transform.

[0089] In particular, the evaluation unit is configured to evaluate the evaluation image of the photosensitive system to be manufactured, detected by the imaging device, and in particular to detect calibration marks outside the photosensitive device or in the edge region of the photosensitive device and derive adjustment instructions. In particular, the evaluation unit is configured to perform the step of generating illumination.

[0090] In particular, the power electronics module is configured for evaluating the corresponding evaluation image. Specifically, the power electronics module includes the features, functions, and other characteristics of the power electronics module that preferably includes an image detection unit, as described previously. Preferably, not only the image detection unit but also the evaluation unit has a power electronics module.

[0091] In particular, the control unit is configured to determine one or more adjustment signals for controlling the first and / or second holding devices and / or provide them to the adjustment devices, especially the drive devices, in a signaling manner.

[0092] A data evaluation unit is or includes a digital data processing unit, such as a personal computer, workstation, real-time machine control device, and / or electronic circuit.

[0093] According to a second aspect of the invention, the objective is achieved according to embodiments of the invention.

[0094] According to a second aspect of the invention, a method for manufacturing a photosensitive system, particularly for manufacturing an inactive photosensitive system, optoelectronic and / or optoelectronic system, especially for projection and / or imaging optoelectronic systems, preferably comprises the steps of: providing an apparatus according to a first aspect of the invention and / or a preferred embodiment thereof; and / or providing and disposing of a photosensitive device in a second holding device, particularly providing and disposing of two or more photosensitive devices in a second holding device; and / or providing and disposing of an optical device in a first holding device, particularly providing and disposing of two or more optical devices in a first holding device.

[0095] In a first preferred embodiment, the method for manufacturing a photosensitive system particularly includes the following steps: calibrating an optical device relative to a photosensitive device; and / or installing the optical device calibrated relative to the photosensitive device; and / or inspecting the optical device installed relative to the photosensitive device.

[0096] The calibration steps specifically include the following steps: providing electromagnetic rays to image an evaluation image of the photosensitive system to be manufactured in at least one imaging device; and / or imaging an evaluation image of the photosensitive system to be manufactured in at least one imaging device; and / or detecting the evaluation image in at least one imaging device; and / or evaluating the respective detected evaluation images; and / or adjusting the first holding device together with the optical device disposed therein and / or the second holding device together with the photosensitive device disposed therein, based on the evaluation of the respective detected evaluation images. It should be understood that the calibration steps are performed iteratively, in particular.

[0097] The method specifically includes the step of determining the imaging quality, particularly the imaging sharpness, of an evaluation image detected by at least one imaging device.

[0098] The evaluation of the evaluation image specifically includes evaluating the imaging sharpness of the evaluation image detected by the corresponding imaging device. The evaluation of imaging sharpness is particularly performed by analyzing the modulation transfer function of the imaging sharpness of the evaluation image detected by the corresponding imaging device. Furthermore, the evaluation preferably includes identifying and / or detecting edge regions of the photosensitive device. Identification specifically includes recognizing one or more edges or calibration marks directly surrounding the photosensitive device based on the evaluation of the evaluation image.

[0099] In particular, the evaluation is performed using an imaging apparatus having two or more imaging devices, wherein a first imaging device is oriented relative to a first and / or second holding device such that the ray-penetrating plane is substantially parallel to the first and / or second holding plane, and another imaging device is oriented relative to the first and / or second holding device such that its corresponding ray-penetrating plane is angled relative to the first and / or second holding plane. The evaluation includes: evaluating imaging sharpness by analyzing the modulation transfer function of the imaging sharpness of the evaluation image detected by the first imaging device to determine one or more adjustment signals for translating the first and / or second holding device along one or more axes; and / or evaluating imaging sharpness by analyzing the modulation transfer function of the imaging sharpness of the evaluation image detected by another imaging device to determine one or more adjustment signals for rotating the first and / or second holding device about one or more axes.

[0100] Adjustments to the first holding device, together with the optical elements disposed therein, and / or the second holding device, together with the photosensitive elements disposed therein, are performed primarily based on an evaluation of the specific imaging sharpness of the respective detected evaluation images. In particular, adjustments to the first and / or second holding devices can be associated with the evaluation of multiple evaluation images detected by multiple imaging devices. Specifically, adjustments to the first and / or second holding devices are performed translationally along one or more axes and / or rotationally about one or more axes.

[0101] Preferably, the adjustment of the first and / or second retaining devices is performed in multiple steps. In particular, the first or second retaining devices can be adjusted along one or more translation axes. Furthermore, the adjustment of the first and / or second retaining devices can be performed rotatably about one or more axes.

[0102] Adjustments can be made, in particular, based on the imaging quality of a single evaluation image or based on the corresponding imaging quality of multiple evaluation images. Specifically, the step of rotatably adjusting the first and / or second holding devices is performed based on the imaging sharpness of the evaluation image detected in the edge region of the photosensitive device. Preferably, the translation adjustment step is performed along two spatial directions orthogonal to the axes of the first and / or second holding devices, particularly based on the detected evaluation image, and preferably based on the position of one or more reference marks, which are not located on one or more edges of the photosensitive device and / or optical device. In particular, the step of rotatably adjusting the first and / or second holding devices is performed based on the imaging sharpness of the detected evaluation image, particularly the evaluation image of the edge region of the imaging device, in the optical system to be manufactured, where the ray-penetrating plane of the imaging device is not oriented parallel to the first and / or second holding plane. An adjustment signal for rotatably adjusting the first and / or second holding devices is derived from the difference in imaging quality of the evaluation image in the edge region of the photosensitive device. In particular, by means of calibration marks preferably placed directly next to the photosensitive device, the optical and photosensitive devices of the photosensitive system to be manufactured can be calibrated relative to each other along the translation direction. Alternatively or preferably, the edges of the photosensitive device can be used for this purpose. The position and / or orientation are preferably evaluated by means of an evaluation unit by evaluating separately detected evaluation images, and a correction motion is calculated and performed. The correction motion can be performed by translational and / or rotational movements. The correction motion can include a superposition of multiple translational and / or multiple rotational movements.

[0103] The installation process preferably includes connecting, particularly joining, the optical device and the photosensitive device. The connection process particularly includes material-fitting and / or force-fitting and / or shape-fitting connections. Preferably, the connection process includes bonding and curing, particularly UV curing.

[0104] The inspection process preferably includes the following steps: providing electromagnetic rays to image an evaluation image of the photosensitive system to be manufactured in at least one imaging device; and / or imaging an evaluation image of the calibrated and / or installed photosensitive system in at least one imaging device; and / or detecting the evaluation image in at least one imaging device; and / or evaluating the detected evaluation image.

[0105] Furthermore, it is preferable that the method for manufacturing the photosensitive system includes moving the imaging device to sequentially and / or simultaneously manufacture multiple photosensitive systems to be manufactured relative to each other. The moving imaging device is particularly a moving imaging device that is substantially parallel to the first and / or second holding plane of the first and / or second holding device. Furthermore, it is preferable that the moving imaging device is particularly a moving imaging device that is substantially orthogonal to the first and / or second holding plane of the first and / or second holding device. In particular, the moving imaging device is a moving imaging device that translates and / or rotates relative to the first and / or second holding plane of the first and / or second holding device.

[0106] In another preferred embodiment, detecting and evaluating an image in at least one imaging device includes the steps of: positioning an optical device at infinity relative to the imaging device and / or the photosensitive device; and / or positioning the optical device at a desired position and / or desired orientation relative to the imaging device and / or the photosensitive device. In particular, the optical device can be positioned at the desired position and / or desired orientation relative to the imaging device and / or the photosensitive device by setting one or more offset values.

[0107] In a further preferred improvement, evaluating the separately detected evaluation images includes the steps of: determining the frequency characteristics of the detected evaluation images; and / or comparing the detected evaluation images with evaluation images detected by a photosensitive system calibrated and / or installed according to the method described above, wherein, in particular, the evaluation images are detected simultaneously or sequentially in at least one imaging device respectively; wherein, in particular, the comparison of the simultaneously detected evaluation images is based on a physical superposition in at least one imaging device respectively; and / or, in particular, the comparison of the simultaneously or sequentially detected evaluation images is based on a virtual superposition in at least one imaging device respectively; and / or comparing the detected evaluation images and / or the detected evaluation images... The determined frequency characteristics of the image are compared with the desired desired state; and / or an adjustment signal for adjusting the first and / or second holding device is generated based on the following: namely, a comparison of the detected evaluation image with a detected evaluation image of a photosensitive system calibrated and / or installed according to the method described above, and / or a comparison of the detected frequency characteristics and / or a comparison of the determined offset, and / or a comparison of the detected evaluation image with the desired desired state, provided that the detected evaluation image does not correspond to the desired desired state; and / or a comparison of the determined frequency characteristics of the detected evaluation image with the desired desired state, provided that the frequency characteristics of the detected evaluation image do not correspond to the desired desired state.

[0108] It is particularly important to understand that the manufacturing method is iteratively performed until the detected evaluation image and / or the determined frequency characteristics of the detected evaluation image correspond to the desired state. Preferably, the calibration method for the photosensitive system ends when the detected evaluation image and / or the determined frequency characteristics of the detected evaluation image correspond to the desired state. If the detected evaluation image and / or the determined frequency characteristics of the detected evaluation image do not correspond to the desired state, it is particularly preferred that the steps for calibrating the photosensitive system are repeated or repetitively performed. In this regard, the method for calibrating the photosensitive system is particularly understood as an iterative method for calibrating the photosensitive system.

[0109] The desired state refers to the desired setting of an optical device relative to a photosensitive system to be manufactured, particularly to be calibrated. Preferably, the desired state is the desired frequency characteristics and / or desired imaging sharpness to be achieved by means of the photosensitive system to be manufactured, particularly to be calibrated. Preferably, the desired state is a range of desired states having an upper limit and a lower limit. In particular, the frequency characteristics of the detected evaluation image and / or the detected evaluation image correspond to the desired state when they are within the range of desired states, particularly between the upper and lower limits.

[0110] The preferred embodiments particularly include a simulation step to determine one or more offset values. These one or more offset values ​​are determined, in particular, before the manufacture of the photosensor system begins, for example, by an optical designer. Particularly advantageously, in the preferred embodiments, the checks performed according to the preferred embodiments described above are optional. The desired position and / or desired orientation, particularly the position and / or orientation of the first holding device relative to the second holding device and / or relative to at least one imaging device, is where the imaging sharpness of the evaluation image in the respective at least one imaging device is maximized.

[0111] According to another preferred embodiment, the method is characterized in that the photosensitive device of the photosensitive system to be manufactured is not activated during calibration and / or installation and / or inspection.

[0112] According to a third aspect of the invention, the objective is achieved according to embodiments of the invention.

[0113] A third aspect of the invention relates to an apparatus according to one of the embodiments described above for manufacturing photosensitive systems, particularly for manufacturing inactive photosensitive systems, optoelectronic and / or optoelectronic systems, especially for projection and / or imaging optoelectronic systems. In particular, the apparatus included in one of the preferred embodiments described above is used for calibrating and / or installing and / or inspecting photosensitive systems. Furthermore, the application of the apparatus in one of the preferred embodiments described above is suitable for calibrating and / or installing and / or inspecting inactive photosensitive systems.

[0114] For the advantages, variations and details of other aspects and improvements of the invention, reference is also made to the description above of the corresponding features of the apparatus or other aspects for manufacturing photosensitive systems.

[0115] Embodiments of the invention are now described below with reference to the accompanying drawings. The drawings do not necessarily show the embodiments to scale; rather, they are arranged schematically and / or slightly distorted where this is beneficial for explanation. Reference is made to the relevant prior art to supplement the teachings directly apparent from the drawings. It is to be understood that various modifications and changes in form and detail relating to one embodiment are possible without departing from the general conception of the invention. Features of the invention disclosed in the specification, drawings, and claims are important for improvements to the invention, both individually and in arbitrary combinations. Furthermore, all combinations consisting of at least two features disclosed in the specification, drawings, and / or claims fall within the scope of the invention. The general conception of the invention is not limited to the detailed form or details of the preferred embodiments shown and described below, nor is it limited to the subject matter restricted compared to the subject matter claimed in the claims. Values ​​within the given measurement ranges and their boundaries should also be disclosed as boundary values ​​and are freely usable and claimable. For simplicity, the same reference numerals are used hereinafter for the same or similar parts or parts having the same or similar functions. Attached Figure Description

[0116] Other advantages, features, and details of the invention will become apparent from the following description of preferred embodiments and from the accompanying drawings, which show:

[0117] Figure 1 A schematic diagram showing a preferred embodiment of an apparatus for manufacturing a photosensitive system;

[0118] Figure 1a A schematic diagram showing a side view of another preferred embodiment of the apparatus for manufacturing a photosensitive system;

[0119] Figure 1bA schematic diagram showing a side view of another preferred embodiment of the apparatus for manufacturing a photosensitive system;

[0120] Figure 1c -e illustrates a schematic diagram of different preferred embodiments for alternately illuminating two photosensitive systems to be manufactured;

[0121] Figure 1f A schematic diagram showing a side view of another preferred embodiment of the apparatus for manufacturing a photosensitive system;

[0122] Figure 2 A schematic diagram showing a side view of another preferred embodiment of the apparatus for manufacturing a photosensitive system;

[0123] Figure 3 A schematic diagram showing a side view of another preferred embodiment of the apparatus for manufacturing a photosensitive system;

[0124] Figure 4 A schematic diagram showing a side view of another preferred embodiment of the apparatus for manufacturing a photosensitive system;

[0125] Figure 5 Showing according to Figure 4 A schematic top view of a preferred embodiment of an apparatus for manufacturing a photosensitive system;

[0126] Figure 6 A schematic diagram showing a top view of the photosensitive device of the photosensitive system to be manufactured;

[0127] Figure 7 A schematic flowchart illustrating a first preferred method for manufacturing a photosensitive system is shown;

[0128] Figure 8 A schematic flowchart of another preferred method for manufacturing a photosensitive system is shown. Detailed Implementation

[0129] Figure 1This is a schematic side view of a preferred embodiment of an apparatus 1 for manufacturing a photosensor system 10. The apparatus 1, schematically shown, includes an imaging device 2 and first and second holding devices 3a and 3b. In this preferred embodiment, the imaging device 2 includes a single imaging element 20. The imaging element 20 has a ray-penetrating plane SE, with an optical axis O oriented substantially orthogonally to the ray-penetrating plane. The first and second holding devices 3a and 3b each have first and second holding planes Ha and Hb, respectively, which are oriented substantially parallel to the ray-penetrating plane SE. In particular, the first holding device 3a, having the first holding plane Ha, is spaced apart from the ray-penetrating plane SE by a first spacing A1. The second holding device 3b, having the second holding plane Hb, is spaced apart from the first holding plane Ha by a second spacing A2.

[0130] Figure 1 The device 1 is shown in its operational state. In this operational state, a photosensitive device 11 and an optical device 12 of the photosensitive system 10 to be manufactured are already disposed in the corresponding holding devices 3a and 3b. The optical device 12 is positioned at infinity relative to the imaging device 2 and images the photosensitive device 11 to infinity. The photosensitive device 11 and the optical device 12 are transported to the corresponding holding devices 3a and 3b in the preceding process steps, in the material flow state of device 1. Specifically, in the operational state, the optical device 12 and the photosensitive device do not contact one or more electronic contacts used for power supply and / or data transmission in order to manufacture an inactive photosensitive system. Figure 1 In the preferred embodiment schematically shown, an optical device 12 is disposed in a first holding device 3a and a photosensitive device 11 is disposed in a second holding device 3b. The first and second holding devices 3a and 3b are configured to hold and accommodate the optical device 12 and / or the photosensitive device 11. In particular, the optical device 12 and / or the photosensitive device 11 are force-fitted and / or form-fittedly disposed in or accommodated by the respective holding devices 3a and 3b in an operational state. For example, the respective holding devices include grippers and / or vacuum clamps for holding the optical device 12 or the photosensitive device 11 in the respective holding devices 3a and 3b.

[0131] exist Figure 1 The imaging device 20 of the schematically shown apparatus 1 has an imaging module 21, which is substantially disposed in the ray-penetrating plane SE and oriented concentrically with the optical axis O. In the preferred embodiment, the imaging module 21 is a converging lens. Figure 1In the preferred embodiment shown, the imaging module 21 is configured to image electromagnetic rays at infinity along the optical axis O toward the first or second holding planes Ha, Hb. In a direction opposite to the first or second holding planes Ha, Hb, the imaging module 21 is configured to image electromagnetic rays at a finite distance along the optical axis O in the first focal plane B1 of the imaging module 21.

[0132] In the current embodiment, the optical device 12 of the photosensitive system 10 to be manufactured is a converging lens, and the photosensitive device 11 of the photosensitive system 10 to be manufactured is an image sensor mounted on a carrier. The first and second holding devices 3a and 3b are specifically configured such that, in the operating state, the converging lens 11 and the image sensor 12 mounted in the respective holding devices 3a and 3b are substantially held in the respective holding planes Ha and Hb. The converging lens is specifically configured to focus electromagnetic rays emitted from the imaging device 20 in a direction toward the second holding plane Hb in a third focal plane B3. In particular, the image sensor of the photosensitive device 11 is oriented in the second holding plane Hb. Preferably, in the working state for manufacturing a photosensitive system, the first holding device 3a together with the converging lens 12 disposed therein and the second holding device 3b together with the photosensitive device 12 disposed therein are oriented relative to each other such that the second spacing A2 substantially corresponds to the focal length of the converging lens 12 of the photosensitive system 10 to be manufactured, that is, the third focal plane B3 of the converging lens 12 is located in the image sensor of the photosensitive device 11 in the second holding plane Hb.

[0133] exist Figure 1 The imaging device 20, schematically shown, is configured to generate electromagnetic rays. The electromagnetic rays exit the imaging device 20 through an imaging module 21 disposed in the ray-penetrating plane SE. The imaging module 21 of the imaging device 20 is configured to image the electromagnetic rays at infinity. The imaging device 20 is further configured to focus the electromagnetic rays reflected by the image sensor of the photosensitive device 11 and focused at infinity by the converging lens 12 in the direction toward the ray-penetrating plane SE into a first focal plane B1 to image an evaluation image by means of the imaging module 21 and to detect the evaluation image. Based on the imaging quality of the detected evaluation image, in operation, the first holding device 3a, together with the converging lens 12 disposed therein, is calibrated in orientation and position relative to the second holding device 3b, together with the image sensor of the photosensitive device 11 disposed therein.

[0134] For calibration, in Figure 1The first holding device 3a of the device 1, schematically shown, is movably disposed relative to the imaging device 2 and the second holding device 3b, while the imaging device 2 and the second holding device 3b are fixedly disposed. The first holding device 3a is particularly capable of translational movement along the optical axis O and rotational movement about the optical axis O. Furthermore, the first holding device 3a is capable of translational movement along and rotational movement about two other axes (not shown). The optical axis O and the two other axes are orthogonally oriented to each other. The orientation and / or position of the converging lens relative to the image sensor can be set by the translational movement of the first holding device 3a along one of the three axes and / or by the rotational movement about one of the three axes. If the desired imaging quality is achieved in the orientation and / or position of the photosensitive device 11 relative to the optical device 12, then the device 1 is configured such that the first holding device 3a is fixedly held relative to the second holding device 3b in the orientation and / or position for mounting, i.e., for connecting the optical device 12 and the photosensitive device 11.

[0135] Figures 1a to 1f A preferred embodiment of the device is shown. The device in... Figures 1a to 1f The preferred embodiment shown is based on the device's... Figure 1 The implementation method is shown in the figure. Figures 1a to 1f The implementation shown is the same as that in Figure 1 The embodiments shown have two first holding devices 3a and two second holding devices 3b, respectively. Figures 1a to 1f The device shown is configured to manufacture two photosensitive systems.

[0136] exist Figure 1a The device 1 shown has a movable imaging device 2. The imaging device 2 is movable and substantially parallel to the first and / or second holding planes Ha, Hb of the first and / or second holding devices 3a, 3b. Firstly, it is manufactured in... Figure 1a The photosensitive system 10 is shown on the left. If the photosensitive system on the left has already been manufactured, the imaging device 2 moves from the position on the left (continuous line) to the position on the right (dashed line) to relative to the already manufactured... Figure 1a The first photosensitive system shown on the left is used to manufacture the second photosensitive system 10. For this purpose, the image stored by the already manufactured photosensitive system 10 is virtually superimposed on the image of the photosensitive system 10 to be manufactured and the photosensitive system to be manufactured is calibrated according to it via the first and / or second holding devices 3a, 3b.

[0137] In addition, Figure 1a The imaging device 2 shown, in particular at least one imaging element 20 of the imaging device 2, pivots relative to the photosensitive system 10 to be manufactured in a track-like manner. Figure 1a The pivoting imaging device 20 is schematically shown in the middle (dotted line) on the right.

[0138] exist Figure 1b The device 1 shown is configured to simultaneously detect two photosensitive systems to be manufactured using an imaging device. It can be proposed that the imaging device 20 of the imaging device 2 is movable, and in particular, pivotable. Figure 1b The diagram schematically shows the pivoting position (dotted line) of one of the two imaging devices 20 of the imaging device 2 in a track-like manner. It is also preferable that the second imaging device 20 of the imaging device 2 also pivots. In the preferred embodiment, the first photosensor system (in...) is first manufactured... Figure 1b (in the middle on the left) and then—this need not be as in Figure 1a The imaging device 2 is moved as shown in the embodiment illustrated—the second photosensitive system to be manufactured (in...) Figure 1b Imaging (on the right). For this purpose, a first portion of at least one imaging device 20 is aligned with a first photosensitive system to be manufactured, and a second portion of at least one imaging device 20 is aligned with a second photosensitive system to be manufactured. The first and second portions of at least one imaging device 20 specifically correspond to the first and second sub-regions of the free aperture of the imaging module 21 of the corresponding imaging device 20, particularly the first and second sub-regions of the free aperture of the imaging device 20 configured as a converging lens.

[0139] In order to be based on Figure 1b The device 1 shown in the diagram manufactures a photosensitive system by alternately illuminating the left and right photosensitive systems, and substantially superimposing the image of the calibrated and / or installed photosensitive system on the left and the image of the photosensitive system to be manufactured on the right in an imaging device, and calibrating the photosensitive systems to be calibrated and / or installed via the first and / or second holding devices 3a, 3b accordingly. Preferably, the imaging device 20 of such an imaging device 2 includes a converging lens as the imaging element 21.

[0140] Figure 1c-1e Different preferred embodiments are illustrated using an imaging device 2 having a single imaging element 20 as an example, in order to alternately illuminate the first (on the left in the figure) and second (on the right in the figure) photosensitive systems. This illumination concept can also be applied to device 1, whose imaging device 1 has two or more imaging elements 20, as shown, for example in… Figure 1b As illustrated in the diagram.

[0141] Figure 1c A preferred schematic embodiment of the device 1 with a rotating support shading unit 13a is shown. The rotating support shading unit 13a alternately blocks the light-sensitive system on the left and right sides from the radiation source unit 22 (in Figure 1c Electromagnetic rays generated (not shown in the image). Figure 1dA preferred schematic embodiment of the device 1 is shown, wherein the X-ray source 13b is disposed outside the imaging device 1 and its electromagnetic ray z scans coaxially across the X-ray penetration plane SE and is coupled into the first holding plane Ha, such that it alternately illuminates the left and right photosensitive systems. Figure 1d A preferred schematic embodiment of device 1 is shown, wherein the left and right photosensitive systems are alternately illuminated by optical fiber 13c, wherein the light is preferably coupled into the optical fiber at the optical device 12 of the photosensitive system 10 to be manufactured.

[0142] Figure 1f The illustrated device 1 is configured to simultaneously detect two photosensitive systems 10 to be manufactured. In this preferred embodiment, the imaging device 2 of the illustrated device 1 has two imaging elements 20. In this preferred configuration, the two imaging elements 20 are arranged substantially parallel to each other. Specifically, the two imaging elements 20 of the imaging device 2 are arranged such that their optical axes O are oriented substantially parallel to each other. Figure 1c The apparatus shown includes two imaging devices 20 whose optical axes O are substantially orthogonal to the first and / or second holding planes. It should be understood that it is also preferable that the two imaging devices are arranged obliquely relative to the first and / or second holding planes Ha, Hb with respect to the optical axis O. In this oblique orientation of the two imaging devices 20, their optical axes O are oriented parallel to each other. Figure 1f The pivot position of imaging device 2 is schematically shown in the diagram (dotted line).

[0143] With the help of Figure 1f The device 1 shown is particularly capable of manufacturing two photosensitive systems simultaneously. However, by using device 1 which has more than two imaging devices 20 and more than two first and second holding devices 3a, 3b, it is also possible to manufacture more than two photosensitive systems.

[0144] For manufacturing two or more photosensitive systems, an image of the photosensitive system to be manufactured is detected. For manufacturing a photosensitive system that is yet to be calibrated and / or installed, the image of the photosensitive system to be manufactured is virtually superimposed with the image of the already manufactured photosensitive system. The orientation of the photosensitive system 10 to be calibrated and / or installed, especially the first and / or second holding device, relative to the already manufactured photosensitive system occurs simultaneously. This has the advantage of eliminating image storage and saving manufacturing time.

[0145] Figure 2 Another preferred embodiment of the apparatus 1 for manufacturing a photosensitive system is shown. This preferred embodiment of apparatus 1 is based on the fact that apparatus 1... Figure 1The preferred embodiment, schematically shown, has its imaging device 20 focusing at infinity in the direction of the first or second holding plane Ha, Hb via an imaging module. Figure 2 The device 1 shown schematically in the diagram is related to... Figure 1 The device 1 schematically shown in the diagram includes, differently, an imaging apparatus 20 having an imaging module 21, which focuses at a finite distance in a second focal plane B2 at a finite distance, oriented toward a first or second holding plane Ha, Hb. Figure 2 The device 1 schematically shown is particularly suitable for manufacturing a photosensitive system having an optical device 12, which, in operation, is disposed in a first holding device that focuses electromagnetic rays reflected by the photosensitive device 11 toward the ray-penetrating plane SE onto a focal plane. In the device 1, the first holding device 3a, together with the optical device 12 disposed therein in operation, is arranged relative to the imaging device such that the direction of the focal plane of the optical device toward the ray-penetrating plane SE corresponds to a second focal plane B2. Furthermore, in Figure 2 The preferred embodiment schematically shown includes a test structure device 25. This embodiment is particularly suitable for manufacturing a photosensitive system 10, which includes a low-contrast or specular reflective photosensitive device 11. Typically, in the preferred embodiment shown, electromagnetic rays are preferably distributed for illuminating and utilizing the work of the test structure device (not shown).

[0146] Device 1 in Figure 3 Another preferred embodiment, schematically shown, includes an imaging device 2, first and second holding devices 3a and 3b, an adjustment device 4, an evaluation device 5, a support device 6, and a coupling device 7.

[0147] exist Figure 3 A preferred embodiment of the apparatus 1 for manufacturing a photosensor system 10, schematically shown in the diagram, includes an imaging device 2 having two identical imaging elements 20. The first imaging element 20 is configured according to the device 1... Figure 1 The preferred embodiment of the imaging apparatus 20 is schematically illustrated. In particular, the first and second holding devices 3a, 3b are arranged according to the first and second holding planes Ha, Hb. Figure 1 The preferred embodiment is schematically illustrated. The second imaging device 20 of the imaging device 2 is arranged at an angle relative to the first imaging device 20, and particularly relative to the first and / or second holding planes Ha, Hb of the corresponding holding devices 3a, 3b. Both imaging devices 20 include an imaging module 21, a radiation source unit 22, a beam splitter unit 23, and an image detection unit 24. The image detection unit 24 includes a camera 24a, power electronics 24b, and an image sensor 24c.

[0148] In the preferred embodiment, the X-ray source unit 22 is a point-shaped X-ray source of visible electromagnetic rays. In another preferred embodiment, the X-ray source unit 22 can also emit invisible light. The electromagnetic rays generated by the X-ray source unit 22 are directed onto the beam splitter unit 23 during operation. A diffuser unit 26 for scattering the electromagnetic rays is disposed between the beam splitter 23 and the X-ray source unit 22. The beam splitter unit 23 is disposed between the imaging module 21 and the image detection unit 24. The beam splitter unit 23 deflects a portion of the electromagnetic rays toward the imaging module 21. The electromagnetic rays generated by the X-ray source unit 22 and deflected by the beam splitter unit 23 pass through the imaging module 21 disposed on the X-ray penetration plane SE and exit from the imaging device 20. In the current preferred embodiment of device 1, the imaging module 21 is configured to focus the electromagnetic rays emitted from the imaging device at infinity. The optical device 12 of the photosensitive system to be manufactured focuses the electromagnetic rays focused at infinity onto the photosensitive device, as is the case for device 1. Figure 1 The preferred embodiments illustrated herein are as described above.

[0149] The imaging module 21 of the imaging device 20 is further configured to focus electromagnetic rays reflected by the photosensitive device 12 in the first focal plane B1 during operation. In the device 1... Figure 2 In the preferred embodiment schematically shown, the image detection unit 24 of the imaging device is configured such that the image sensor 24c of the image detection unit 24 is positioned relative to the imaging module 21 such that the image sensor 24c of the image detection unit 24 is located in the first focal plane B1 of the imaging module 21. The image sensor 24c of the image detection unit 24 detects an evaluation image of electromagnetic rays reflected by the photosensitive device 11. A filter unit 27 is provided between the beam splitter unit 23 and the image detection unit for filtering electromagnetic rays with specific wavelengths. Particularly preferably, the filter unit 27 is capable of allowing short-wavelength electromagnetic rays, especially only in a narrow wavelength range, to pass toward the image detection unit. This advantageously improves the imaging sharpness or contrast of the corresponding evaluation image. The power electronics module 24b is particularly capable of determining the imaging quality of the detected evaluation image and providing one or more adjustment signals for controlling the adjustment device 4 based on the determined imaging quality. Preferably, the power electronics module 24b is directly coupled to the adjustment device (not shown) in a signal technology manner. In particular, the power electronics module 24b can obtain the adjustment signal and provide it to the adjustment device 4 by means of the common autofocus function of the image detection unit 24.

[0150] Device 1 in Figure 3The preferred embodiment, schematically shown, includes an evaluation device 5, particularly an integrated electronic circuit 5a and a control unit 5b. A power electronics module 24b is configured to determine the imaging quality of the detected evaluation image and, based on the determined imaging quality, provide one or more adjustment signals for controlling the adjustment device 4. The control unit is configured to transmit one or more adjustment signals to the adjustment device 4, which is coupled in a signal technology manner. The adjustment device 4 includes a drive device 4a, which preferably includes one or more piezoelectric or electromagnetic actuators. Other actuators are preferably feasible, either supplementarily or alternatively, in this preferred embodiment. The drive device 4a drives a first holding device 3a according to one or more adjustment signals. According to the adjustment signals, the orientation and / or position of the first holding device 3a relative to the second holding device 3b are changed until the evaluation image of the photosensitive device 11 of the photosensitive system 10 to be manufactured is calibrated relative to the optical device 12 of the photosensitive system 10 to be manufactured, thereby obtaining the desired imaging quality.

[0151] In order to calibrate the first holding device 3a relative to the second holding device 3b, device 1 in Figure 3 The preferred embodiment schematically shown includes a support device configured to support a first holding device 3a, such that the first holding device 3a, in operation, allows the optical device to be translated and rotated about three mutually orthogonal axes. For calibration, it is preferable that the first holding device 3a is translatably set and the second holding device is rotatably set, or vice versa. It is also preferable that the two holding devices 3a, 3b have up to six degrees of freedom.

[0152] The bonding device is configured to mount the calibrated photosensitive system 10. In particular, the bonding device is configured to connect the optical element 12 of the calibrated photosensitive system 10 and the photosensitive element 11 of the calibrated photosensitive system 10 to each other in a bonding manner during operation.

[0153] Device 1 in Figure 4 Side view and in Figure 5 The preferred embodiment, schematically shown in a top view, includes an imaging device 2 having four identical imaging elements 20. The first imaging element 20 is determined according to the device 1 in... Figure 1 The preferred embodiment of the imaging apparatus 20 is schematically shown in the diagram. In particular, the first and second holding devices 3a and 3b, having first and second holding planes Ha and Hb, are configured according to... Figure 1 The preferred embodiment is schematically illustrated. Three common imaging devices 20 are preferably arranged at an angle relative to the first imaging device 20 on a circular track. Figure 5 (The dotted line in the middle).

[0154] exist Figure 6 The diagram shows a top view of the photosensitive device 11 of the photosensitive system 10 to be manufactured. Figure 6 The photosensitive device shown in the figure is based on Figure 4 and 5 The device 1 is manufactured. A third focal plane B3 is schematically shown in a top view of the photosensitive device 11, the third focal plane being respectively connected to... Figure 4 and 5 The imaging devices 20 of the apparatus are schematically shown in the diagram. The corresponding third focal plane B3 is a corresponding detection area for the four imaging devices 20, which are detected to generate corresponding evaluation images and their evaluations. The cross-shaped markings set in the detection areas are calibration marks, which are physically introduced directly next to the photosensor.

[0155] according to Figure 4-6 The schematically shown device 1 allows for the calibration of the photosensitive device 11 relative to the optical device 12. This is achieved first by aligning the photosensitive device 11 orthogonally to the center of the photosensitive device 11. Figure 6 Coarse calibration is performed on the focal plane B3 shown. In coarse focusing, the distance between the optical device 12 and the photosensitive device 11 is roughly calibrated. Based on three calibration marks, the photosensitive device 11 is translated relative to the optical device 12 and oriented relative to each other along two axes. Subsequently, the photosensitive device 11 can be oriented about two mutually orthogonal axes located in the focal plane B3. For this purpose, preferably, the imaging sharpness in the edge regions of the photosensitive device 11 is detected and the photosensitive device is calibrated, i.e., rotated about the two said axes, until the imaging sharpness in the edge regions is at least approximately, preferably substantially equal. In particular, during calibration, the symmetry of the modulation transfer function (Modulations übertragungsfunktion) in the corresponding edge regions is sought. It is also preferable that the two previously mentioned steps are performed in reverse order. Subsequently, fine calibration is preferred. In fine calibration, in the current embodiment, the Modulations übertragungsfunktion is determined in four detection regions and the determined Modulations übertragungsfunktion values ​​are finely calibrated according to a preferred order. Alternatively, it is preferable to calibrate the photosensitive device 11 relative to the optical device 12 during fine calibration, thereby maximizing the imaging sharpness of the imaging device 20 in the central detection area. However, it is also preferable to finely calibrate the photosensitive device 11 relative to the optical device 12, thereby maximizing the imaging sharpness of one or more imaging devices 20 that detect an edge region in the edge region of the photosensitive device 11.

[0156] Figure 7A schematic flowchart illustrating a first preferred embodiment of a method 100 for manufacturing a photosensor system 10 is shown. This preferred embodiment of method 100 is particularly suitable for manufacturing an inactive photosensor system 10. The preferred embodiment includes the step of providing 101 of an apparatus 1 for manufacturing the photosensor system 10, for example, the apparatus 1 in… Figures 1 to 6 One of the preferred embodiments, schematically illustrated and described above, is shown in the diagram. A preferred embodiment of method 100 includes, as an additional step, providing and placing the photosensitive device 12 in a second holding device 3b. As an additional step, a preferred embodiment of method 100 includes providing and placing the photosensitive device 12 in a first holding device 3a. In this preferred embodiment, the photosensitive device 11 and the optical device 12 of the photosensitive system 10 to be manufactured are conveyed to device 1. For this purpose, the photosensitive device 11 and the optical device 12 are conveyed to the corresponding holding devices 3a, 3b. Figure 7 The flowchart shown schematically describes the logistics status of device 1.

[0157] exist Figure 8 The flowchart schematically shown illustrates another preferred embodiment of method 100. This preferred embodiment of method 100 is based on the method 100 in... Figure 7 The preferred embodiment is shown in the figure. To supplement the steps of providing 101 for the apparatus 1 for manufacturing the photosensitive system 10, providing and placing the photosensitive device 12 in the second holding device 3b, and providing and placing the optical device 12 in the first holding device 3a, the method is as follows: Figure 8 The preferred embodiment schematically shown includes the steps of calibrating the optical device relative to the photosensitive device 110 and / or installing the optical device calibrated relative to the photosensitive device 120 and / or inspecting the optical device installed relative to the photosensitive device 130.

[0158] Calibration 110 can include one or more subordinate method steps. A first preferred subordinate method step of calibration 110 is to provide electromagnetic rays 111 to image an evaluation image of the photosensitive device 11 or test structure of the photosensitive system 10 to be manufactured. Another optional subordinate method step of calibration 110 includes imaging the evaluation image of the photosensitive device 11 of the photosensitive system 10 to be manufactured 112 in the ray transmission plane (SE) of at least one imaging device 20. Furthermore, calibration 110 can include detecting 113 the evaluation image in the ray transmission plane (SE) of at least one imaging device 20. In particular, the method of calibration 110 includes evaluating 114 the detected evaluation image. Finally, a fifth preferred subordinate method step of calibration 110 is to adjust 115 the first holding device 3a together with the optical device 12 disposed therein and / or the second holding device 3b together with the photosensitive device 11 disposed therein, based on the evaluation of the detected evaluation image. Preferably, the steps of calibration 110 are performed iteratively.

[0159] The installation step 120 specifically includes connecting the optical device 12 to the photosensitive device 11 of the photosensitive system 10 to be manufactured. In particular, during the installation or calibration step, it is necessary to compensate for shrinkage, such as shrinkage of the connection, during the installation process by offsetting the offset. Shrinkage of the connection is caused, for example, by heat input during welding, brazing, or bonding. Such shrinkage occurs, for example, during bonding when the adhesive used for bonding undergoes a phase transition from a liquid to a solid aggregated state.

[0160] The inspection step 130 includes one or more optional subordinate method steps. The inspection step 130 particularly includes providing electromagnetic rays 111 to image the photosensitive device 11 of the photosensitive system 10 to be manufactured as an evaluation image. Furthermore, inspection 130 includes imaging 112 of the photosensitive device 11 of the calibrated and / or mounted photosensitive system 10 in the ray penetration plane SE of at least one imaging device 20 as an evaluation image. Additionally, inspection 130 can include detection 113 of the evaluation image of at least one imaging device 20. Particularly preferred is to inspect the evaluation image with evaluation 114 as a subordinate method step.

[0161] The steps of evaluating the evaluation images detected by 114 specifically include the following steps: determining the frequency characteristics of the detected evaluation images; and / or comparing the detected evaluation images with the detected evaluation images of a photosensitive system that has been calibrated and / or installed according to the method described above; wherein, in particular, the evaluation images are detected simultaneously or sequentially in at least one imaging device 20 respectively; wherein, in particular, the comparison of the simultaneously detected evaluation images is based on a physical superposition in each at least one imaging device 20; and / or, in particular, the comparison of the simultaneously or sequentially detected evaluation images is based on a virtual superposition in each at least one imaging device 20; and / or comparing the specific frequency characteristics of the detected evaluation images and / or the detected evaluation images with a desired desired state.

[0162] The step of evaluating the evaluation images detected by 114 specifically includes generating adjustment signals for adjusting the first and / or second holding devices. The generation of adjustment signals is particularly based on: comparing the detected evaluation image with a detected evaluation image of a photosensitive system that has been calibrated and / or installed according to the previously described method, and / or comparing determined frequency characteristics, and / or comparing determined offsets; and / or comparing the detected evaluation image with a desired desired state, provided that the detected evaluation image does not correspond to the desired desired state; and / or comparing the determined frequency characteristics of the detected evaluation image with the desired desired state, provided that the frequency characteristics of the detected evaluation image do not correspond to the desired desired state.

[0163] Furthermore, it is preferable that the method further includes the step of moving the imaging device 2 (not shown) to sequentially and / or simultaneously manufacture a plurality of photosensitive systems 10 to be manufactured relative to each other.

[0164] List of reference numerals in the attached diagram: 1. Equipment for manufacturing photosensitive systems 2 Imaging equipment 3a / 3b First and second holding devices

[0165] 4. Adjustment equipment

[0166] 4a drive device

[0167] 5. Evaluation equipment

[0168] 5A Integrated Electronic Circuits

[0169] 5b control unit

[0170] 6 Supporting equipment

[0171] 7. Joining equipment

[0172] 10 Photosensitive System

[0173] 11 Photosensitive devices

[0174] 12 optical devices

[0175] 13a Shading Unit

[0176] 13b X-ray source

[0177] 13c optical fiber

[0178] 20 At least one imaging device

[0179] 21 Imaging Module

[0180] 22-ray source unit

[0181] 23 beam splitter units

[0182] 24 image detection units

[0183] 24a camera

[0184] 24b Power Electronics Module

[0185] 24c image sensor

[0186] 25 Test Structure Equipment

[0187] 26 diffuse scatterer units

[0188] 27 filter units

[0189] 100 Methods for manufacturing photosensitive systems

[0190] 101 provides equipment for manufacturing photosensitive systems.

[0191] 102 provides a photosensitive device and will be disposed in the second holding device.

[0192] 103 provides an optical device and sets it in the first holding device.

[0193] 110 Calibration of optical devices relative to photosensitive devices

[0194] 111 provides imaging rays for evaluation images of the photosensitive system to be manufactured.

[0195] 112 Imaging an evaluation image of the photosensitive system to be manufactured in the plane of the ray penetration of at least one imaging device.

[0196] 113 Detect and evaluate images in the ray-penetrating plane of at least one imaging device.

[0197] 114 Evaluation images of the detection, and / or

[0198] 115 Adjust the first holding device and / or the second holding device based on the evaluation of the detected evaluation image.

[0199] 120. Install optical devices calibrated relative to the photosensitive device.

[0200] 121 Connecting, especially joining, optical devices with photosensitive devices

[0201] 130. Inspect the optical device mounted relative to the photosensitive device. A1 / A2 First and second spacing SE rays penetrate the plane Ha / Hb First and Second Holding Planes O Optical axis

Claims

1. An apparatus for manufacturing at least two optically sensitive systems (10) in one of an optoelectronic system and an optoelectronic system, wherein each optically sensitive system to be manufactured comprises at least one optical device and at least one optically sensitive device, characterized in that, The device is provided with: - an imaging device (2) with at least one imaging apparatus (20), wherein the at least one imaging apparatus (20) has a ray penetration plane (SE) and an optical axis (O) and the at least one imaging apparatus (20) is designed for o generating electromagnetic radiation which extends along an optical path and which passes through the imaging apparatus (20) in the ray penetration plane (SE), and o imaging an evaluation image of the electromagnetic radiation reflected at the light-sensitive device (11) in a first focal plane (B1) of the imaging apparatus (20), and o detecting the evaluation image imaged in the first focal plane (B1); and - a first holding device (3a) with a first holding plane (Ha) for holding at least two of the optical devices (12) of the at least two light-sensitive systems (10) to be manufactured in the first holding plane (Ha); and - a second holding device (3b) with a second holding plane (Hb) for holding at least two of the light-sensitive devices (11) of the at least two light-sensitive systems to be manufactured in the second holding plane (Hb); wherein - at least one of the first holding device (3a) with the first holding plane (Ha) and the second holding device (3b) with the second holding plane (Hb) is movably arranged relative to the imaging device (2), and - the imaging apparatus is designed as at least one of: o translationally movable relative to at least one of the first holding plane and the second holding plane of the respective one of the first holding device and the second holding device, and o rotationally movable relative to at least one of the first holding plane and the second holding plane of the respective one of the first holding device and the second holding device.

2. The device according to claim 1, characterized in that the first holding device (3a) is arranged between the second holding device (3b) and the imaging device (2).

3. The device according to claim 1 or 2, wherein the first holding device and / or the second holding device are designed to accommodate two or more optical devices and / or two or more light-sensitive devices, wherein - the first holding device (3a) is designed such that two or more optical devices (12) are rotationally and / or translationally movable independently of one another; and / or - the second holding device (3b) is designed such that two or more light-sensitive devices (11) are rotationally and / or translationally movable independently of one another.

4. The device according to claim 1 or 2, characterized in that - the imaging device (2) is movably designed in order to manufacture a plurality of light-sensitive systems to be manufactured relative to one another successively and / or simultaneously; and / or - a first portion of the at least one imaging apparatus is aligned to a first light-sensitive system to be manufactured and a second portion of the at least one imaging apparatus is aligned to a second light-sensitive system to be manufactured; and / or ​ ​ - the imaging device (2) has two imaging means (20), wherein the two imaging means (20) are arranged such that their optical axes (O) run parallel to each other, wherein one of the two imaging means (20) is aligned to one photosensitive system to be manufactured and the other of the two imaging means (20) is aligned to another photosensitive system to be manufactured.

5. The device according to claim 1 or 2, characterized in that the first holding plane (Ha) of the first holding device (3a) is arranged essentially parallel with respect to a ray penetration plane (SE) of at least one imaging means (20) and / or is arranged spaced apart non-parallel with respect to a ray penetration plane (SE) of at least one further imaging means of the at least one imaging means (20).

6. The device according to claim 1 or 2, characterized in that the at least one imaging device (2) comprises: - an imaging module (21) in which the ray penetration plane (SE) is arranged and which has an optical axis (O), wherein the imaging module (21) is configured to o image in a second focal plane (B2) in a direction towards the second holding plane (Hb) at infinity or at a finite distance with a second focal length and o image in the first focal plane in the opposite direction at infinity or at a finite distance with a first focal length; and / or - a ray source unit (22) which provides electromagnetic rays for generating and detecting the evaluation images; and / or - a beam splitter unit (23) which deflects at least a portion of the electromagnetic rays of the ray source unit (22) towards the photosensitive system (10) to be manufactured; and / or - an image detection unit (24) which is configured to detect the evaluation images of the photosensitive system (10) to be manufactured, wherein the image detection unit (24) is arranged in the first focal plane of the imaging module (21) for detecting the evaluation images of the photosensitive system (10) to be manufactured; and / or - a diffuse scatterer unit (26) for scattering the electromagnetic rays of the ray source unit (22); and / or - a filter unit (27) for filtering electromagnetic rays having a wavelength to be filtered; and / or - a test structure device (25) for generating test structures on the photosensitive means (11) of the photosensitive system (10) to be manufactured.

7. The device according to claim 1 or 2, characterized in that the imaging device (2) comprises a collimator.

8. The device according to claim 6, characterized in that the image detection unit (24) comprises: - a camera (24a) for detecting the evaluation images generated by the optoelectronic system to be manufactured of the respective at least one imaging means; and / or - a power electronics module (24b) for processing and transmitting the respective evaluation images detected by the image detection unit (24); and / or - an image sensor (24c) for detecting a corresponding evaluation image generated by the optoelectronic system to be manufactured.

9. The apparatus according to claim 1 or 2, characterized in that an adjustment apparatus (4) is provided for adjusting the orientation and / or position of the first holding plane (Ha) of the first holding apparatus (3a) and / or of the second holding plane (Hb) of the second holding apparatus (3b) relative to the ray penetration plane (SE) of the at least one imaging device (20).

10. The apparatus according to claim 1 or 2, characterized in that a support apparatus (6) is provided, which is designed to support the first holding apparatus (3a) and / or the second holding apparatus (3b) translationally and / or rotationally relative to the imaging apparatus (2) in the operating state; and / or a drive apparatus (4a) is provided, which is designed to drive the first holding apparatus (3a) and / or the second holding apparatus (3b) translationally and / or rotationally in the operating state.

11. The apparatus according to claim 1 or 2, characterized in that a joining apparatus (7) is provided, which is designed to connect the photosensitive device (11) and the optical device (12) to one another.

12. The apparatus according to claim 1 or 2, characterized in that an evaluation apparatus (5) is provided for evaluating the detected evaluation images of the at least one imaging device, wherein the evaluation apparatus (5) is coupled in a signal-technical manner to the imaging apparatus (2).

13. The apparatus according to claim 6, characterized in that an evaluation apparatus (5) is provided for evaluating the detected evaluation images of the at least one imaging device, wherein the evaluation apparatus (5) is coupled in a signal-technical manner to the image detection unit (24).

14. The apparatus according to claim 9, characterized in that an evaluation apparatus (5) is provided for evaluating the detected evaluation images of the at least one imaging device, wherein the evaluation apparatus (5) is coupled in a signal-technical manner to the adjustment apparatus (4).

15. The apparatus according to claim 11, characterized in that an evaluation apparatus (5) is provided for evaluating the detected evaluation images of the at least one imaging device, wherein the evaluation apparatus (5) is coupled in a signal-technical manner to the joining apparatus.

16. The apparatus according to claim 6, characterized in that an evaluation apparatus (5) is provided for evaluating the detected evaluation images of the at least one imaging device, wherein the evaluation apparatus (5) has a power electronics module (24b) for processing and transmitting the evaluation images detected by the corresponding image detection unit (24).

17. The apparatus according to claim 9, characterized in that an evaluation apparatus (5) is provided for evaluating the detected evaluation images of the at least one imaging device, wherein the evaluation apparatus (5) has a control unit (5b) for controlling the adjustment apparatus (4) in accordance with the results of the evaluation of the corresponding evaluation images.

18. The apparatus according to claim 11, characterized in that An evaluation device (5) is provided for evaluating the detected evaluation images of the at least one imaging device, wherein the evaluation device (5) has a control unit (5b) for controlling the joining device.

19. The apparatus according to claim 7, characterized in that The imaging device (2) comprises a focusable collimator.

20. The apparatus according to claim 7, wherein the imaging device (2) comprises an automatic collimator.

21. The apparatus according to claim 9, wherein the adjusting device (4) has a drive device (4a).

22. The apparatus according to claim 17, wherein the control unit comprises an autofocus function module for automatic focusing of the apparatus in the working state.

23. A method (100) for manufacturing at least two optically sensitive systems (10) in one of an optoelectronic system and an optoelectronic system, wherein the optically sensitive systems to be manufactured comprise at least one optical device and at least one optically sensitive device, characterized in that, The method is provided with the following steps: - providing (101) an apparatus (1) according to claim 1; - providing at least two photosensitive devices (11) and arranging them in the second holding device (3b); and - providing at least two optical devices (12) and arranging them in the first holding device (3a); and - moving in at least one of a translatable and a rotatable manner relative to at least one of a first holding plane and a second holding plane of a respective one of the first holding device and the second holding device.

24. The method (100) according to claim 23, characterized in that provided with the following steps: - calibrating (110) the optical devices (12) relative to the photosensitive devices (11); and / or - installing (120) the calibrated optical devices (12) relative to the photosensitive devices (11); and / or - checking (130) the installed optical devices (12) relative to the photosensitive devices (11); and / or - moving the imaging device (2) in order to manufacture a plurality of photosensitive systems to be manufactured relative to each other successively and / or simultaneously.

25. The method (100) according to claim 24, wherein the step of calibrating (110) comprises: o providing (111) electromagnetic radiation for imaging evaluation images in the respective at least one imaging device, and / or o imaging (112) the evaluation images in the respective at least one imaging device (20), and / or o detecting (113) the evaluation images (112) in the respective at least one imaging device (20), and / or o evaluating (114) the respective detected evaluation images, and / or o adjusting (115) the first holding device (3a) together with the optical devices (12) arranged therein and / or the second holding device (3b) together with the photosensitive devices (11) arranged therein in accordance with the evaluation of the respective detected evaluation images.

26. The method (100) according to claim 24, wherein the step of installing (120) comprises: o connecting (121) or joining the optical devices (12) with the photosensitive devices (11).

27. The method (100) according to claim 24, wherein the step of checking (130) comprises: o providing (111) electromagnetic radiation for imaging an evaluation image in respectively at least one imaging device, and / or o imaging (112) the evaluation image of the calibrated and / or installed photosensitive system (10) in respectively at least one imaging device (20), and / or o detecting (113) the evaluation image in respectively at least one imaging device (20), and / or o evaluating (114) respectively the detected evaluation image.

28. The method (100) according to claim 25 or 27, characterized in that - detecting (113) the evaluation image in respectively at least one imaging device (20) comprises the following steps: o setting the optical device (12) at infinity with respect to the imaging apparatus (2) and / or the photosensitive device (11); and / or o setting the optical device (12) in a desired position and / or a desired orientation with respect to the imaging apparatus (2) and / or the photosensitive device (11); and / or - evaluating (114) respectively the detected evaluation image comprises the following steps: o determining a frequency characteristic of the detected evaluation image; and / or o comparing the detected evaluation image with a detected evaluation image of a photosensitive system that has been calibrated and / or installed according to the method according to claim 24; and / or o comparing the detected evaluation image and / or the determined frequency characteristic of the detected evaluation image with a desired desired state; and / or o generating an adjustment signal for adjusting the first and / or second holding device • comparing the detected evaluation image with a detected evaluation image of a photosensitive system that has been calibrated and / or installed according to the method according to claim 24 and / or comparing the determined frequency characteristic and / or comparing the determined deviation; and / or • comparing the detected evaluation image with a desired desired state as long as the detected evaluation image does not correspond to the desired desired state; and / or • comparing the determined frequency characteristic of the detected evaluation image with a desired desired state as long as the frequency characteristic of the detected evaluation image does not correspond to the desired desired state.

29. The method (100) according to claim 28, wherein the evaluation images are detected in respectively at least one imaging device (20) simultaneously or sequentially.

30. The method (100) according to claim 28, wherein the comparison of the simultaneously detected evaluation images is based on a physical superimposition in respectively at least one imaging device (20).

31. The method (100) according to claim 28, wherein the comparison of the detected evaluation images is based on a virtual superimposition in respectively at least one imaging device (20) simultaneously or sequentially.

32. The method (100) according to any one of claims 24 to 27, characterized in that the photosensitive device (11) of the photosensitive system (10) to be manufactured is inactive during the calibration (110) and / or the installation (120) and / or the checking (130).

33. Use of a device (1) according to any one of claims 1 to 22 for the manufacture of a photosensitive system (10).

34. Use according to claim 33, wherein the photosensitive system (10) is a photoelectronic system for projection and / or imaging.

35. Use according to claim 33, wherein the photosensitive system (10) is an inactive photosensitive system, a photoelectronic and / or optoelectronic system.

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