Stator module and robot system

Abstract

Stator modules are disclosed. A stator module can include a stator body, a working surface supported relative to the stator body, and a plurality of electrical conductors, each of the plurality of electrical conductors extending along a respective portion of the working surface and operable to generate a magnetic field for causing a magnetized mover to move relative to the working surface in the magnetic field in response to electricity through the electrical conductor. Robotic systems including such stator modules are also disclosed.

Description

[0001] Cross-references to related applications

[0002] This application claims the benefit and priority of U.S. Provisional Patent Application No. 62 / 948,335, filed December 16, 2019, and U.S. Provisional Patent Application No. 63 / 081,584, filed September 22, 2020, the entire contents of which are incorporated herein by reference. Technical Field

[0003] This disclosure generally relates to stator modules and robot systems. Background Technology

[0004] Robotic systems are known. However, known robotic systems may have some drawbacks. Summary of the Invention

[0005] According to one embodiment, a stator module is disclosed, comprising: a stator body; a working surface supported relative to the stator body, the working surface extending in width along a first dimension between opposing first and second exposed sides of the stator module, the working surface further extending in length along a second dimension between opposing first and second ends of the stator module, the second dimension being different from the first dimension, the length being greater than the width; and a plurality of electrical conductors, each of the plurality of electrical conductors extending along a corresponding portion of the working surface and operable to generate a magnetic field so as to magnetize a mover in response to a current passing through the electrical conductor. The stator moves relative to the working surface in a magnetic field; at least some of the multiple electrical conductors in the first layer of multiple electrical conductors extend along the direction of the first electrical conductor; and at least some of the multiple electrical conductors in the second layer of multiple electrical conductors extend along the direction of the second electrical conductor, which is not parallel to the direction of the first electrical conductor and is separated from the direction of the first electrical conductor; at least some of the multiple electrical conductors in the first layer overlap at least partially with at least some of the multiple electrical conductors in the second layer in a direction orthogonal to the directions of the first and second electrical conductors; wherein the multiple electrical conductors and the working surface are supported relative to the stator body, such that the stator module is an integral assembly.

[0006] According to another embodiment, a stator module is disclosed, comprising: a stator body; a working surface supported relative to the stator body; and a plurality of electrical conductors, each of the plurality of electrical conductors extending along a corresponding portion of the working surface and operable to generate a magnetic field so as to move a magnetized mover relative to the working surface in the magnetic field in response to a current passing through the electrical conductor; at least some of the electrical conductors in a first layer of electrical conductors extending along a first electrical conductor direction; at least some of the electrical conductors in the first layer of electrical conductors extending along a second electrical conductor direction not parallel to the first electrical conductor direction; and at least some of the electrical conductors in the second layer of electrical conductors being separated from the first layer of electrical conductors extending along a third electrical conductor direction not parallel to the first and second electrical conductor directions.

[0007] According to another embodiment, a stator module is disclosed, comprising: a stator body; a working surface supported relative to the stator body; a motor submodule comprising a plurality of electrical conductors, each of the plurality of electrical conductors extending along a corresponding portion of the working surface and operable to generate a magnetic field so as to move a magnetized mover relative to the working surface in the magnetic field in response to a current passing through the electrical conductor; and a position sensor submodule comprising at least one position sensor operable to sense the position of the mover and define a plurality of through holes; wherein the stator body includes a surface and a plurality of protrusions, each of the plurality of protrusions extending from the surface toward the motor submodule through a corresponding through hole of the plurality of through holes of the position sensor submodule and supporting the motor submodule.

[0008] Other aspects and features will become apparent to those skilled in the art after reading the following description of illustrative embodiments in conjunction with the accompanying drawings. Attached Figure Description

[0009] Figure 1 This is a top view of a robot system according to one embodiment.

[0010] Figure 2 yes Figure 1 A cross-sectional view of the robot system.

[0011] Figure 3 A stator module according to one embodiment is illustrated schematically.

[0012] Figure 4 A stator module and control system according to one embodiment are schematically illustrated.

[0013] Figure 5 and Figure 6 A stator module according to one embodiment is shown.

[0014] Figure 7 A stator module according to another embodiment is shown.

[0015] Figure 8 A stator module according to another embodiment is shown.

[0016] Figure 9 It shows Figure 5 and Figure 7 The electromagnetic drive region of the stator module.

[0017] Figure 10 It shows Figure 9 The electrical conductors in the first layer of the electromagnetic drive region.

[0018] Figure 11 It shows Figure 9 The electrical conductor in the second layer of the electromagnetic drive region.

[0019] Figure 12 A stator module according to another embodiment is shown.

[0020] Figure 13 An embodiment is shown. Figure 12 Additional electrical conductors of the stator module.

[0021] Figure 14 A stator module and a mover according to another embodiment are shown.

[0022] Figure 15 It shows Figure 14 Products on the moving parts.

[0023] Figure 16 A stator module and a mover according to another embodiment are shown.

[0024] Figure 17 A motor submodule according to another embodiment is shown.

[0025] Figure 18 It shows Figure 17 The electrical conductors in one layer of the motor submodule.

[0026] Figure 19 An electrical conductor according to another embodiment is shown.

[0027] Figure 20 It shows Figure 17 The electrical conductors in another layer of the motor submodule.

[0028] Figure 21 This is a plan view of a magnet array of a mover according to one embodiment.

[0029] Figure 22 yes Figure 21 A front view of the magnet array of the moving part.

[0030] Figure 23 Two coordinate systems are shown that can be used to describe some embodiments.

[0031] Figure 24 The mover-stator interaction according to one embodiment is illustrated.

[0032] Figure 25 The mover-stator interaction according to another embodiment is shown.

[0033] Figure 26 The mover-stator interaction according to another embodiment is shown.

[0034] Figure 27 The mover-stator interaction according to another embodiment is shown.

[0035] Figure 28 This is a front view of a robot system according to one embodiment.

[0036] Figure 29 yes Figure 28 A top view of the robot system.

[0037] Figure 30 It is along Figure 29 The line 29-29 is the cut-off point. Figure 28 A cross-sectional view of the robot system.

[0038] Figure 31 yes Figure 28 A perspective view of the stator body of the robot system.

[0039] Figure 32 yes Figure 32 A perspective view of the position sensor submodule of the robot system. Detailed Implementation

[0040] The following references may be helpful to readers: U.S. Patent No. 6,003,230; U.S. Patent No. 6,097,114; U.S. Patent No. 6,208,045; U.S. Patent No. 6,441,514; U.S. Patent No. 6,847,134; U.S. Patent No. 6,987,335; U.S. Patent No. 7,436,135; U.S. Patent No. 7,948,122; U.S. Patent Publication No. 2008 / 0203828; WJ Kim and DLTrumper, “High-precision magnetic levitation stage for photolithography,” Precision Eng. 222 (1998), pp. 66-77; DLTrumper et al., “Magnet arrays for synchronous “Machines (Magnetic Arrays for Synchronous Motors)”, IEEE Industrial Applications Association Annual Meeting, Vol. 1, pp. 9-18, 1993; JW Jansen, CMM van Lierop, EA Lomonova, AJAVandenput, “Magnetically Levitated Planar Actuator with Moving Magnets”, IEEE Tran. Ind. App., Vol. 44, No. 4, 2008; PCT Publication No. WO2013 / 059934; PCT Publication No. WO2015 / 017933; PCT Publication No. WO2015 / 188281; PCT Publication No. WO2015 / 184553; and PCT Publication No. WO2015 / 179962.

[0041] refer to Figure 1 and Figure 2A robot system according to one embodiment includes a stator 20 and movers 100A and 100B. The stator 20 includes stator modules 200A, 200B, 200C, 200D, 200E, and 200F. For example, stator modules 200A, 200B, 200C, 200D, 200E, and 200F collectively define a working surface 30 of the stator 20, and movers 100A and 100B are movable relative to the working surface 30, as described herein. Of course, the illustrated embodiments are merely examples, and alternative embodiments may differ. For example, alternative embodiments may include more, fewer, or different stator modules, and alternative embodiments may include more, fewer, or different movers. For example, some embodiments may include only one stator module or more than one stator module. Furthermore, the working surface 30 is planar, but alternative working surfaces may be, for example, curved, cylindrical, spherical, or other shapes.

[0042] In the illustrated embodiments, various axes can be referenced to describe the robot system. For example, in the illustrated embodiments, the stator 20 can be described with reference to the Cartesian axes identified as X, Y, and Z in the figures, and the Cartesian axes identified as X, Y, and Z can be fixed relative to the stator 20 such that the X and Y axes are perpendicular to each other, the working surface 30 extends along the X and Y axes, and the Z axis is perpendicular to the working surface 30 and the X and Y axes. However, alternative embodiments may differ, and embodiments such as those described herein are not limited to or restricted to any particular axis.

[0043] For example Figure 1 As shown, embodiments such as those described herein may include stators with stator modules of different shapes. For example, as Figure 1 As shown, embodiments such as those described herein may include a stator, the stator including stator modules having working surfaces that form corresponding portions of at least some of the entire working surface of the stator, and the corresponding working surfaces of the stator modules may have different shapes.

[0044] For example, in Figure 1 In the embodiments, each of the stator modules 200A, 200B, 200C, 200D, 200E, and 200F has its own working surface, and as an example, Figure 1 The working surface 30A of stator module 200A, the working surface 30B of stator module 200B, and the working surface 30C of stator module 200C are shown. Figure 1In the embodiments, the corresponding working surfaces of stator modules 200A, 200B, 200C, 200D, 200E, and 200F form at least some portions of working surfaces 30, and the corresponding working surfaces of stator modules 200A, 200B, 200C, 200D, 200E, and 200F have different shapes. For example, in the illustrated embodiment, the working surfaces 30B and 30C of stator modules 200B and 200C are square, and the corresponding working surfaces of stator modules 200A, 200D, 200E, and 200F are rectangular, but of course, alternative embodiments may be different.

[0045] In other words, in the illustrated embodiment, for example, the stator module 200A and its working surface 30A have a length 201 in the dimension (along the X-axis in this embodiment) between the opposing ends / end faces 202 and 203 of the stator module 200A and its working surface 30A, and a width 204 in a different dimension (along the Y-axis in this embodiment) between the opposing exposed sides / sides 205 and 206 of the stator module 200A and its working surface 30A, and the length 201 is greater than the width 204. Sides 205 and 206 can be referred to as "exposed" because they are exposed to the environment of the stator 30, while other structures of the stator 30 or any other structures on sides 205 and 206 are not.

[0046] For example Figure 1 As shown, a stator module having one shape (or having a working surface including one shape) can be positioned against, adjacent to or abut against a stator module having a different shape (or having a working surface including different shapes), and a stator module having one orientation (or having a working surface including one orientation) can be positioned against, adjacent to or abut against a stator module having a different orientation (or having a working surface including different orientations).

[0047] For example, in Figure 1 In one embodiment, the stator module 200A is rectangular, the working surface 30A of the stator module 200A is rectangular, and the stator module 200A is positioned against, adjacent to, or abutting the side 207 of the stator module 200B, wherein the corresponding working surfaces of the stator modules 200A and 200B are adjacent to or abutting each other, and the working surfaces of the stator modules 200B and 200B are square, and the side 207 has a width (or more generally, range) 208 that is larger than the width 204.

[0048] In addition, Figure 1In one embodiment, stator module 200D is positioned against, adjacent to, or abutting against stator module 200E, wherein the corresponding working surfaces of stator modules 200D and 200E are adjacent to or abutting each other. Stator modules 200D and 200E are rectangular, but the working surfaces of stator modules 200D and 200E extend along the Y-axis, while the working surfaces of stator modules 200E and 200E extend along the X-axis. In other words, in the illustrated embodiment, the working surfaces of stator modules 200D and 200E have one orientation (along the Y-axis) and can be positioned against, adjacent to, or abutting against another stator module (stator module 200E in the illustrated embodiment), while the working surfaces of the other stator module have different orientations (along the X-axis). Of course, alternative embodiments may differ.

[0049] Generally speaking, such combinations of stator modules with different shapes allow for greater flexibility in designing or assembling different stators for different applications compared to stator modules with the same shape (e.g., square only). Furthermore, such combinations of stator modules with different shapes allow for stator assembly at a lower cost compared to stators assembled from stator modules with the same shape (e.g., square only), because, for example, rectangular stator modules such as stator modules 200A, 200D, 200E, and 200F can be extended over longer distances at a lower cost than, for example, square stator modules.

[0050] For example, Figure 3 A stator module 200 is schematically shown, which may be stator modules 200A, 200D, 200E, and 200F, or other examples of stator modules described herein. Stator module 200 includes a motor submodule 220, a position sensor submodule 230, an amplifier submodule 238, and a stator body 250 as a mechanical structure supporting the respective submodules and working surfaces. Motor submodule 220 may include electrical conductors operable to generate a magnetic field so as to move a magnetized mover (e.g., mover 100A or 100B) relative to the working surface of stator module 200 in a magnetic field along (or otherwise relative to) the working surface in response to a current passing through the conductor. Position sensor submodule 230 may include at least one position sensor operable to sense the position of such mover. Amplifier submodule 238 is operable to amplify control signals received from a system controller or module controller to control at least some of the electrical conductors of motor submodule 220. In some embodiments, amplifier submodule 238 is operable to amplify control signals received from a system controller or module controller to control each electrical conductor of motor submodule 220.

[0051] In this particular, non-limiting embodiment, the components, from top to bottom, are motor submodule 220, then position sensor submodule 230, followed by amplifier submodule 238. This specific top-to-bottom arrangement is not required, and alternative embodiments may differ. However, in some embodiments, the motor submodule should be placed as close as possible to the working surface to maximize the generated magnetic field experienced by the mover (e.g., mover 100A or 100B) above the working surface. In alternative embodiments, the arrangement of the submodules may differ, or alternative embodiments may include more, fewer, or different submodules.

[0052] Figure 4 Stator modules 200A, 200B, and 200C are schematically shown, along with a control system (or system controller or control circuit) 400 operable to control stator modules 200A, 200B, and 200C (and possibly more or fewer stator modules). Stator module 200A includes a motor submodule 220A, a position sensor submodule 230A, an amplifier submodule 238A, and a module controller 500A. Stator module 200B includes a motor submodule 220B, a position sensor submodule 230B, an amplifier submodule 238B, and a module controller 500B. Stator module 200C includes a motor submodule 220C, a position sensor submodule 230C, an amplifier submodule 238C, and a module controller 500C. Each stator module may also include a stator body (e.g., the stator body 250 described above) as a mechanical structure supporting the submodules and working surfaces of the stator module. Motor submodules 220A, 220B, and 220C may each include electrical conductors operable to generate a magnetic field so as to move magnetized movers (e.g., movers 100A and 100B) relative to the working surface of stator module 200 in a magnetic field along (or otherwise relative to) the working surface in response to a current passing through the conductors. Position sensor submodules 230A, 230B, and 230C may each include at least one position sensor operable to sense the position of such movers. Amplifier submodule 238A may include circuitry operable to amplify control signals received from module controller 500A to control the electrical conductors of motor submodule 220A; amplifier submodule 238B may include circuitry operable to amplify control signals received from module controller 500B to control the electrical conductors of motor submodule 220B; and amplifier submodule 238C may include circuitry operable to amplify control signals received from module controller 500C to control the electrical conductors of motor submodule 220B.

[0053] exist Figure 4In some embodiments, control system 400 communicates with module controller 500A via data cable 700A, module controller 500A communicates with module controller 500B via data cable 700B, and module controller 500B communicates with module controller 500C via data cable 700C. For example, such communication may involve sending or receiving one or more signals to control the amplifier submodules of the stator module or sending or receiving one or more signals representing measurements from the position sensor submodules of the stator module. In some embodiments, control system 400 may send one or more control signals representing one or more setpoints (or desired values) of current flowing through some electrical conductors as described above, and such current setpoints may be sent to one or more module controllers (e.g., module controllers 500A, 500B, and 500C), which may further generate one or more signals to one or more amplifier submodules (e.g., amplifier submodules 238A, 238B, and 238C) such that the amplifier submodules allow current to flow through the electrical conductors as described above according to the current setpoints. In some embodiments, the control system 400 may send one or more control signals representing one or more setpoints (or desired values) of the stator position to one or more module controllers (e.g., module controllers 500A, 500B, and 500C), which may further use the position setpoint and position sensor information to determine a current setpoint for the current flowing through some of the electrical conductors described above. For example, to control an amplifier submodule (e.g., amplifier submodule 238A, 238B, or 238C), the module controllers (e.g., module controllers 500A, 500B, and 500C) may send one or more control signals (e.g., one or more pulse width modulation (PWM) or analog control signals) to the amplifier submodule based on the current setpoint. Data cables 700B and 700C are external to stator modules 200A, 200B, and 200C, and generally, stator modules such as those described herein can communicate with each other using data cables external to the stator modules. Of course, alternative embodiments may differ and may include wireless communication or Figure 4 Other alternatives to the embodiments.

[0054] Generally, the stator modules described above can be integral. For example, the stator body (e.g., stator body 250) can support motor sub-modules, electrical conductors of the motor sub-modules, working surfaces, or two or more of the sub-modules such as those described herein, making the stator modules an integral assembly. Such integral assemblies can be interconnected using external data cables (e.g., data cables 700B and 700C external to stator modules 200A, 200B, and 200C) or other external connectors. Furthermore, the stator modules described herein can be units of the stator, such that the stator can be formed from stator modules, whereby the stator module is the smallest unit of the stator comprising some or all of the aforementioned sub-modules, and can operate individually or collectively as the stator.

[0055] Figure 5 and Figure 6 A stator module 200G according to one embodiment is shown. The stator module 200G includes a stator body 250G, a motor submodule 220G, and a working surface 30G. The motor submodule 220G includes two electromagnetic drive regions 221A and 221B, which are arranged in a row and covered by the working surface 30G. Alternative embodiments may include only one electromagnetic drive region or more than two electromagnetic drive regions. For example, Figure 7 A stator module 200H is shown according to one embodiment and includes three electromagnetic drive regions 221C, 221D, and 221E arranged in a row. As another example, Figure 8 A stator module 200I is illustrated according to one embodiment and includes four electromagnetic drive regions 221F, 221G, 221H, and 221I arranged in a row. In such embodiments, the Y-oriented edges (or more generally, lateral edges) of the electromagnetic drive regions may coincide with such edges of one or more adjacent electromagnetic drive regions. Stator modules 200H and 200I may otherwise be similar to stator module 200G.

[0056] Return to reference Figure 5 and Figure 6 In the illustrated embodiment, the stator body 250G has outer sides, including a first outer side 511 (normal direction -Y), a second outer side 516 (normal direction -X), a third outer side 512 (normal direction +Y), and a fourth outer side 517 (normal direction +X). The projections of the sides 511, 512, 516, and 517 onto the XY plane respectively form a first projection surface edge 211, a second projection surface edge 216, a third projection surface edge 212, and a fourth projection surface edge 217.

[0057] In the illustrated embodiment, the first electromagnetic drive region 221A has a first edge 231A, a second edge 236A, a third edge 232A, and a fourth edge 237A. Although only four edges are shown, additional edges may be used in some embodiments. The second electromagnetic drive region 221B has a fifth edge 231B, a sixth edge 236B, a seventh edge 232B, and an eighth edge 237B. Again, although only four edges are shown, additional edges may be used in some embodiments. In this embodiment, the first projection surface edge 211 coincides with the first edge 231A, the third projection surface edge 212 coincides with the third edge 232A, the second projection surface edge 216 coincides with the second edge 236A, the fourth edge 237A coincides with the sixth edge 236B, the first projection surface edge 211 coincides with the fifth edge 231B, and the third projection surface edge 212 coincides with the seventh edge 232B.

[0058] Therefore, in the illustrated embodiment, the stator module 200G, stator body 250G, and working surface 30G have a width 233 between the opposing exposed sides of the stator module 200G at the first protruding surface edge 211 and the third protruding surface edge 212, and a length 234 between the opposing ends of the stator module 200G at the second protruding surface edge 216 and the fourth protruding surface edge 217. The length 234 is greater than the width 233, so the stator module 200G can be included in the stator, similar to, for example, as shown in the example. Figure 1 The stator module 200A shown is shown.

[0059] Reference Figure 9 , Figure 10 and Figure 11 Electromagnetic drive region 221A (also in) Figure 5 and Figure 6 (As shown in the figure) includes an electrical conductor 224X (which may be referred to as a subset of the electrical conductors of the stator module 200G) in the first layer 223X of the electromagnetic drive region 221A. The electrical conductor 224X extends longitudinally relative to the working surface 30G, although alternative embodiments may include electrical conductors extending in one or more different longitudinal directions—for example, one or more curved longitudinal directions or one or more directions that may not necessarily be along the X-axis as shown. In general, the line, direction, or dimension as described herein may include a straight line or a curve, a straight line or a curved direction, or a straight line or a curved dimension.

[0060] In the illustrated embodiment, electrical conductors 224X are uniformly spaced apart from each other along the Y-axis and extend between edges 231A and 232A, but alternative embodiments may differ. Furthermore, in the illustrated embodiment, the distance between edge 231A and the electrical conductor 224X closest to edge 231A does not exceed five or ten times the width of electrical conductor 224X, and the distance between edge 232A and the electrical conductor 224X closest to edge 232A does not exceed five or ten times the width of electrical conductor 224X, but alternative embodiments may differ. Each electrical conductor 224X also extends between edges 236A and 237A, which may mean that the distance from electrical conductor 224X to edge 236A and the distance from electrical conductor 224X to edge 237A do not exceed five or ten times the width of each electrical conductor 224X.

[0061] Generally speaking, in this paper, the electrical conductor can extend between two edges, which means that the distance from the electrical conductor to each edge does not exceed five or ten times the width of the electrical conductor.

[0062] Each electrical conductor 224X extends along a corresponding portion of the working surface 30G. When current flows through an electrical conductor 224X, a magnetic field is generated around it. Therefore, each of the electrical conductors 224X is operable to generate a magnetic field so that, in response to a current 240X flowing through it, a magnetized mover (e.g., mover 100A or 100B) moves relative to the working surface 30G in the magnetic field along (or otherwise relative to) the working surface 30G. Although the current 240X is shown in the positive X direction, the actual current flow direction can be positive or negative, depending on the value of the current. The current direction indicated herein is for illustrative reference only and is not a limiting or actual flow direction.

[0063] The electromagnetic drive region 221A also includes electrical conductors 224Y in a second layer 223Y of the electromagnetic drive region 221A separated from the first layer 223X in the Z direction (or more generally, in a direction that is not parallel or orthogonal to the directions of electrical conductors 224X and 224Y). Electrical conductors 224Y extend laterally relative to the working surface 30G and may be orthogonal to electrical conductors 224X, although alternative embodiments may include electrical conductors extending in one or more different lateral directions—e.g., one or more curved lateral directions or one or more directions that may not necessarily be along the Y-axis as shown.

[0064] In the illustrated embodiment, electrical conductors 224Y are uniformly spaced apart from each other along the X-axis and extend between edges 236A and 237A, but alternative embodiments may differ. Furthermore, in the illustrated embodiment, the distance between edge 236A and the electrical conductor 224Y closest to edge 236A does not exceed five or ten times the width of electrical conductor 224Y, and the distance between edge 237A and the electrical conductor 224Y closest to edge 237A does not exceed five or ten times the width of electrical conductor 224Y, but alternative embodiments may differ. Each electrical conductor 224Y also extends between edges 231A and 232A, which may mean that the distance from electrical conductor 224Y to edge 231A and the distance from electrical conductor 224Y to edge 232A do not exceed five or ten times the width of each electrical conductor 224Y.

[0065] Each electrical conductor 224Y extends along a corresponding portion of the working surface 30G. When current flows through the electrical conductor 224Y, a magnetic field is generated around the electrical conductor 224Y. Therefore, each of the electrical conductors 224Y is operable to generate a magnetic field so as to cause a magnetized mover (e.g., mover 100A or 100B) to move relative to the working surface 30G in a magnetic field along (or otherwise relative to) the working surface 30G in response to a current 240Y flowing through that conductor.

[0066] Furthermore, the electrical conductor 224Y extends completely through a portion 235 of the width 233 of the working surface 30G, and all electrical conductors of the stator module 200G that extend laterally relative to the working surface 30G are within at least a portion of the portion 235 of the width 233 of the working surface 30G.

[0067] like Figure 9 As shown, the first layer 223X and the second layer 223Y at least partially overlap in the Z direction (or more generally, in a direction that is not parallel or orthogonal to the directions of the electrical conductors 224X and 224Y). Furthermore, although in Figure 9 The diagram illustrates two layers, while some embodiments may include only the first layer 223X or only the second layer 223Y, or some embodiments may include more than two layers. For example, some embodiments may include two or more layers similar to the first layer 223X, two or more layers similar to the second layer 223Y, or both. Of course, other embodiments may include other alternatives.

[0068] Other electromagnetic drive regions, such as electromagnetic drive regions 221B, 221C, 221D, 221E, 221F, 221G, 221H, and 221I, can be similar to electromagnetic drive region 221A. Therefore, in Figure 5 and Figure 6In the stator module 200G shown, electromagnetic drive region 221A includes a longitudinal electrical conductor (e.g., conductor 224X), and electromagnetic drive region 221B also includes a longitudinal electrical conductor (e.g., similar to conductor 224X, but different from the longitudinal electrical conductor of electromagnetic drive region 221A). Generally, electromagnetic drive regions may include electrical conductors that may differ from some or all the electrical conductors of some or all the other electromagnetic drive regions of the stator module.

[0069] The working surface 30G is generally rectangular, but alternative embodiments may differ. For example, Figure 12 A stator module 200J with a working surface 30J is shown. The stator module 200J and the working surface 30J have a bending length 209 in a dimension (a bending dimension in this embodiment) between opposite sides of the stator module 200J and the working surface 30J, and a width 214 in a different dimension (a radial dimension in this embodiment) between opposite exposed bending sides 215 and 218 of the stator module 200J and the working surface 30J, and the length 209 is greater than the width 214. The stator module 200J includes a radially extending electrical conductor 224R, which may be similar to the electrical conductor described above, or the stator module 200J may include other electrical conductors that may be similar to the electrical conductor described above and may at least partially overlap in the Z direction (or more generally, in a direction not parallel or orthogonal to the direction of the electrical conductor). For example, in some embodiments, the electrical conductors of the stator module 200J may be bent and orthogonal to the radially extending electrical conductors 224R, for example, such as... Figure 3 The bent electrical conductor 224C is shown.

[0070] Generally, each electrical conductor can have a different current setpoint (or desired value) based on a suitable commutation law—for example, but not limited to, three-phase sinusoidal commutation. For example, multiple electrical conductors can be connected in series at their ends.

[0071] Generally, it can be determined that the current flowing through the electrical conductors described above causes the magnetized mover (e.g., mover 100A or 100B) to move along the working surface of a stator module or along or relative to the working surface of a stator comprising more than one stator module (e.g., ...). Figure 1 and Figure 2 The working surface 30 shown can move with one, two, three, four, five, or six degrees of freedom. For example, it can be determined that a current passing through an electrical conductor as described above can cause a magnetized mover to move from the working surface of one stator module to the working surface of another stator module.

[0072] For example, Figure 14A mover 100 (having one or more bearing units 140, each bearing unit having a bearing surface 141) and a stator 200 (having one or more bearing units 240, which may be tracks, each track having a bearing surface 241) according to one embodiment are illustrated. During operation, the mover 100 can operate in a suspended state, wherein the mover 100 is controlled by the stator 200 to maintain a sufficient working clearance 40 to ensure that there is no contact between the mover bearing surface 141 and the stator bearing surface 241, such that the bearing support clearance is positive. When operating in the suspended state, in this particular embodiment, the Y-direction movement of the mover can be restricted by the stator bearing unit 240, which may protrude above the stator working surface 30. During operation using this particular stator embodiment, the mover 100 can operate in a landing or engaged state where the working clearance 40 decreases until the mover bearing surface 141 contacts the stator bearing surface 241 (making the bearing support clearance 50 approximately zero). When operating in this state, the movement of the mover 100 is restricted in five degrees of freedom, thereby limiting the movement of the mover 100 to the X direction. In such embodiments, the electrical conductors of the stator 200 may extend laterally relative to the stator working surface 30 (e.g., electrical conductor 224Y), although the length of such electrical conductors may be shorter than that of electrical conductor 224Y.

[0073] As described above, for example, rectangular stator modules such as stator modules 200A, 200D, 200E, 200F, and 200G can extend over longer distances at a lower cost than square stator modules. Furthermore, rectangular stator modules can more easily allow products to extend wider than the stator modules themselves. For example, Figure 15 An installation according to one embodiment is shown. Figure 14 The product 150 is on the mover 100. The product 150 has two ends 170A and 170B, which extend wider than the stator 100. In some embodiments, a high-force or high-energy processing station (e.g., stamping, welding, or laser processing) can be configured to process the product 150 at the two ends 170A and 170B.

[0074] Figure 16 It shows Figure 14An alternative to the mover 100 and stator 200. Generally, the bearing surfaces 141 and 241 of the mover and stator bearing units 140 and 240 can be curved, planar geometric, triangular, cylindrical, spherical, or some combination sufficient to guide the movement of the mover and / or support the mover 100 (along the Z direction) in a landing state. It may be necessary to maintain a certain contact area between the two mating bearing units to minimize wear during operation. The corresponding bearing units of the mover 100 and stator 200 can be matched together to achieve the desired performance. The bearings can utilize sliding or rolling contact during operation. In some embodiments, the two mating surfaces may not be in direct contact with each other during high-speed movement, and a fluid film, such as air or fluid, may exist between them. Such pneumatic bearings can help significantly reduce wear on bearing surfaces without the large amount of electrical energy required for magnetic levitation. The mating bearing units can be made of materials such as, but not limited to, ceramics, glass, plastics, appropriately surface-treated metals, or other suitable materials with smooth surfaces.

[0075] Figure 17 A motor submodule according to another embodiment is shown. Figure 17 The motor submodule includes the components described above and Figure 10 The electrical conductors in the first layer 223X shown above and Figure 11 The conductors in the second layer 223Y (separated from the first layer 223X in the Z direction or more generally in a direction not parallel or orthogonal to the directions of the conductors in the first layer 223X and the second layer 223Y), the third layer 223α (separated from the first layer 223X and the second layer 223Y in the Z direction or more generally in a direction not parallel or orthogonal to the directions of the conductors in the first layer 223X, the second layer 223Y and the third layer 223a), and the conductors in the fourth layer 223β, which is separated from the first layer 223X, the second layer 223Y and the third layer 223a. Figure 17 As shown, the first layer 223X, the second layer 223Y, the third layer 223a, and the fourth layer 223β at least partially overlap in the Z direction (or more generally, in a direction that is not parallel or orthogonal to the direction of the electrical conductors of the first layer 223X, the second layer 223Y, the third layer 223a, and the fourth layer 223β).

[0076] Figure 18The diagram shows electrical conductors 224α1 in sub-sector 225α1, 224α2 in sub-sector 225α2, 224α3 in sub-sector 225α3, and 224α4 in sub-sector 225α4 of the third layer 223α. Conductor 224α1 extends around the Z-axis at an angle α1 to the X-axis; conductor 224α2 extends around the Z-axis at an angle α2 to the X-axis; conductor 224α3 extends around the Z-axis at an angle α3 to the X-axis; and conductor 224α4 extends around the Z-axis at an angle α4 to the X-axis. Figure 18 The electrical conductors in the circuit are linear, but in other embodiments they may be curved or include one or more curved segments. Furthermore, although... Figure 18 Four sub-sectors are shown, but alternative embodiments may include more or fewer sub-sectors, such as two or more. Generally, the conductor of one such sub-sector may not be parallel to the conductor of another such sub-sector, and the conductors of such sub-sectors may be located in a common layer. Furthermore, for example, the conductor of such sub-sectors may not be parallel to the conductors of another layer—for example, the conductors of the first layer 223X, the second layer 223Y, or both. For example, the currents 240α1, 240α2, 240α3, and 240α4 in conductors 224α1, 224α2, 224α3, and 224α4 can be controlled as described above. In the illustrated embodiment, α2 = α1 + 90°, α3 = α1, α4 = α2, and α1 is between 15° and 45°, for example, 30°, although alternative embodiments may differ; for example, α1 may differ from α3, and α2 may differ from α4. Figure 18 In each sub-sector 225α1, 225α2, 225α3, and 225α4, the current setpoint of each conductor can be determined by the position of the mover's magnet array relative to the conductors, according to a suitable commutation law—for example, but not limited to, three-phase sinusoidal commutation. The spacing (or pitch) of the conductors in the lateral direction can be designed based on the spatial period of the mover's magnet array and the multiple conductor phases within one magnet array spatial period. For example, for a three-phase design, the pitch can be approximately the spatial period of the magnet array divided by 3n, where n is an integer. For example, if the magnet array spatial period is 60 millimeters (mm), the conductor pitch can be close to 5 mm, 10 mm, or 20 mm.

[0077] exist Figure 18 In the illustrated embodiment, electrical conductors 224α1 and 224α3 partially overlap along their lengths in a plane including the directions in which they extend, but are spaced apart from each other in a direction transverse to their lengths in such a plane. Similarly, in Figure 18In the illustrated embodiment, electrical conductors 224α2 and 224α4 partially overlap along their lengths in a plane including the direction in which they extend, but are spaced apart from each other in a direction transverse to their lengths in such a plane. Of course, alternative embodiments may differ.

[0078] As described above, in other embodiments, Figure 18 The electrical conductors in the circuit are linear, but can be curved or include one or more bends, for example, as shown in the diagram. Figure 19 As shown. In Figure 19 In one embodiment, the first sub-sector 225α1 includes a plurality of first curved conductors 224α1 extending along a first curved direction. The second sub-sector 225α2 includes a plurality of second curved conductors 224α2 extending along a second curved direction. The third sub-sector 225α3 includes a plurality of third conductors 224α3 extending along a third curved direction. The fourth sub-sector 225α4 includes a plurality of fourth conductors 224α4 extending along a fourth curved direction. Conductors 224α1, 224α2, 224α3, and 224α4 can be driven by an amplifier submodule with appropriate currents 240α1, 240α2, 240α3, and 240α4, respectively. The curves in the curved directions can typically be gradual, and the angle between the tangents at the start and end points is typically less than 45°. Although Figure 18 Four sub-sectors are shown, but alternative embodiments may include more or fewer sub-sectors, such as two or more. In the illustrated embodiment, the curve direction may be approximated as following a corresponding linear direction, where α2 = α1 + 90°, α3 = α1, α4 = α2, and α1 is between 15° and 45°, for example, 30°, although alternative embodiments may differ; for example, α1 may differ from α3, and α2 may differ from α4.

[0079] exist Figure 19 In the illustrated embodiment, electrical conductors 224α1 and 224α3 partially overlap along their lengths in a plane including the directions in which they extend, but are spaced apart from each other in a direction transverse to their lengths in such a plane. Similarly, in Figure 19 In the illustrated embodiment, electrical conductors 224α2 and 224α4 partially overlap along their lengths in a plane including the direction in which they extend, but are spaced apart from each other in a direction transverse to their lengths in such a plane. Of course, alternative embodiments may differ.

[0080] Figure 20The diagram shows electrical conductors 224β1 in sub-sector 225β1, 224β2 in sub-sector 225β2, 224β3 in sub-sector 225β3, and 224β4 in sub-sector 225β4 of the third layer 223β. Conductor 224β1 extends about the Z-axis at an angle β1 to the X-axis, conductor 224β2 extends about the Z-axis at an angle β2 to the X-axis, conductor 224β3 extends about the Z-axis at an angle β3 to the X-axis, and conductor 224β4 extends about the Z-axis at an angle β4 to the X-axis. Figure 20 The electrical conductors in the circuit are linear, but in other embodiments they may be curved or include one or more curved segments. Furthermore, although... Figure 20 Four sub-sectors are shown, but alternative embodiments may include more or fewer sub-sectors, such as two or more. Generally, the conductor of one such sub-sector may not be parallel to the conductor of another such sub-sector, and the conductors of such sub-sectors may be located in a common layer. Furthermore, the conductor of such sub-sectors may not be parallel to the conductors of another layer—for example, the conductors of the first layer 223X, the second layer 223Y, the third layer 223α, or two or more of these layers. For example, the currents 240β1, 240β2, 240β3, and 240β4 in conductors 224β1, 224β2, 224β3, and 224β4 may be controlled as described above. In the illustrated embodiment, β2 = β1 + 90°, β3 = β1, β4 = β2, and β1 is between 45° and 75°, for example, 60°, although alternative embodiments may differ; for example, β1 may differ from β3, and β2 may differ from β4.

[0081] exist Figure 20 In the illustrated embodiment, electrical conductors 224β1 and 224β3 partially overlap along their lengths in a plane including the directions in which they extend, but are spaced apart from each other in a direction transverse to their lengths in such a plane. Similarly, in Figure 18 In the illustrated embodiment, electrical conductors 224β2 and 224β4 partially overlap along their lengths in a plane including the direction in which electrical conductors 224β2 and 224β4 extend, but are spaced apart from each other in a direction transverse to their lengths in such a plane. Of course, alternative embodiments may differ.

[0082] Furthermore, in the Z direction (or more generally, in a direction that is not parallel or orthogonal to the directions of the electrical conductors of the first layer 223X, the second layer 223Y, the third layer 223α, and the fourth layer 223β), sub-sector 225β1 may at least partially overlap with sub-sectors 225α1 and 225α2, sub-sector 225β2 may at least partially overlap with sub-sectors 225α2 and 225α3, sub-sector 225β3 may at least partially overlap with sub-sectors 225α3 and 225α4, and sub-sector 225β4 may at least partially overlap with sub-sectors 225α4 and 225α1.

[0083] Generally speaking, such as Figure 1 Embodiments of the motor submodule include electrical conductors that extend along portions of the working surface within 15° of each other or along at least four different directions and at least partially overlap in directions that are not parallel to or orthogonal to the directions of the electrical conductors.

[0084] like Figures 21 to 27 As shown, Figure 17 The motor submodule can significantly extend the range of controllable rotational motion around the Z-axis.

[0085] Figure 21 A specific embodiment of a mover 100 is shown. The mover 100 includes a magnet assembly comprising four magnet arrays 110A, 110B, 110C, and 110D. Each of the magnet arrays 110A, 110B, 110C, and 110D includes a plurality of linearly elongated magnetized segments (e.g., permanent magnets), the magnetization direction of each magnetized segment being orthogonal to its elongation direction. For example, magnet array 110A includes magnetized segments 120A1, 120A2, 120A3, and 120A4, such as... Figure 21 and Figure 22 As shown. Figure 22 As shown, magnetization segments 120A1, 120A2, 120A3, and 120A4 may have magnetization directions 121A1, 121A2, 121A3, and 121A4, respectively. Each such magnetization segment may include multiple magnet plates that may be oriented in a specific pattern to generate a strong magnetic force on the bottom side of the mover. In this particular non-limiting embodiment, each magnet array includes four magnets, but alternative embodiments may include more, fewer, or different magnets.

[0086] Figure 23Two coordinate systems are illustrated, which can describe some embodiments. As described above, the Cartesian axes, identified as X, Y, and Z, can be fixed relative to the stator, and the Cartesian axes, identified as Xm, Ym, and Zm, can be fixed relative to a mover such as mover 100. However, alternative embodiments may differ, and embodiments such as those described herein are not limited to or restricted to any particular axis. The relative angle between the stator and mover axes X and Xm when projected onto the XY plane of the stator working surface can be defined as θm. In other embodiments, this angle θm can be used to describe the relative orientation between the two coordinate systems.

[0087] Figure 24 The image illustrates a mover-stator interaction according to one embodiment, in which magnet arrays 110A and 110C interact with electrical conductor 224X, and magnet arrays 110B and 110D interact with electrical conductor 224Y. In such an embodiment, electrical conductors 224X and 224Y can rotate the mover 100 about 15° about the Z-axis in either direction, such that -15° < θm < 15°.

[0088] Figure 25 A mover-stator interaction according to another embodiment is illustrated, wherein magnet array 110A interacts with electrical conductor 224α1, magnet array 110B interacts with electrical conductor 224α2, magnet array 110C interacts with electrical conductor 224α3, and magnet array 110D interacts with electrical conductor 224α4. Similarly, in such an embodiment, electrical conductors 224α1, 224α2, 224α3, and 224α4 can rotate the mover 100 about the Z-axis in any direction about the Z-axis by approximately 15°, such that α1 - 15° < θm < αl + 15°.

[0089] Therefore, magnet arrays 110A and 110C can interact with electrical conductor 224X, and magnet arrays 110B and 110D can interact with electrical conductor 224Y to cause mover 100 to move from... Figure 24 The orientation shown is towards Figure 25 The orientation is rotated as shown, and then the magnet arrays 110A, 110B, 110C, and 110D can interact with the electrical conductors 224α1, 224α2, 224α3, and 224α4 to orient the mover 100 towards... Figure 25 The orientation rotation shown allows control of the electrical conductors 224X, 224Y, 224α1, 224α2, 224α3, and 224α4 to cause the mover 100 to rotate from... Figure 24 The orientation shown is rotated to Figure 25 The orientation shown.

[0090] Figure 26A mover-stator interaction according to another embodiment is illustrated, in which magnet array 110A interacts with electrical conductor 224β1, magnet array 110B interacts with electrical conductor 224β2, magnet array 110C interacts with electrical conductor 224β3, and magnet array 110D interacts with electrical conductor 224β4. Similarly, in such an embodiment, electrical conductors 224β1, 224β2, 224β3, and 224β4 can cause the mover 100 to rotate about 15° about the Z-axis in any direction about the Z-axis, such that β1 - 15° < θm < β1 + 15°.

[0091] Therefore, magnet arrays 110A, 110B, 110C, and 110D can interact with electrical conductors 224α1, 224α2, 224α3, and 224α4 to cause mover 100 to move from Figure 25 The orientation shown is towards Figure 26 The orientation is rotated as shown, and then the magnet arrays 110A, 110B, 110C, and 110D can interact with the electrical conductors 224β1, 224β2, 224β3, and 224β4 to orient the mover 100 towards... Figure 26 The orientation rotation shown allows control of the electrical conductors 224α1, 224α2, 224α3, 224α4, 224β1, 224β2, 224β3, and 224β4, thereby controlling the mover 100 from... Figure 25 The orientation shown is rotated to Figure 26 The orientation shown.

[0092] Figure 27 The image illustrates a mover-stator interaction according to one embodiment, in which magnet arrays 110A and 110C interact with electrical conductor 224Y, and magnet arrays 110B and 110D interact with electrical conductor 224X. In such an embodiment, electrical conductors 224X and 224Y can cause the mover 100 to rotate about 15° about the Z-axis in either direction, such that 75° < θm < 105°.

[0093] Therefore, magnet arrays 110A, 110B, 110C and 110C and 110D can interact with electrical conductors 224β1, 224β2, 224β3 and 224β4 to cause mover 100 to move from Figure 26 The orientation shown is towards Figure 27 The orientation is rotated as shown, and then magnet arrays 110A and 110C can interact with electrical conductor 224Y, and magnet arrays 110B and 110D can interact with electrical conductor 224X to orient the mover 100 towards... Figure 27The orientation rotation shown allows control of the electrical conductors 224β1, 224β2, 224β3, 224β4, 224X, and 224Y to cause the mover 100 to rotate from... Figure 26 The orientation shown is rotated to Figure 27 The orientation shown.

[0094] As in Figures 24 to 27 As shown in the example, Figure 17 The motor submodule can make the mover 100 rotate around the Z-axis (or around the axis including the Z-axis). Figure 17 The working surfaces of the stator module of the motor submodule are rotated 90° (orthogonal or non-parallel axes). More generally, Figure 17 The motor submodule can be repeated Figures 24 to 27 A variation of the example is used to make the mover 100 rotate around the Z-axis (or around the axis including the Z-axis). Figure 17 The working surfaces of the stator module of the motor submodule (orthogonal or non-parallel axes) can be rotated to any rotational position.

[0095] Of course, the above embodiments are merely examples, and alternative embodiments may include other electrical conductors in one or more other same or different layers.

[0096] Figure 28 , Figure 29 and Figure 30 The illustration shows a robot system according to another embodiment, including a stator module 200 and a mover 100. The stator module 200 includes a working surface 30 and a motor submodule 220, which may be similar to the motor submodule described above and may include multiple electrical conductors in one or more layers as described above. The stator module 200 also includes a stator body 250 supporting the stator module and the working surface.

[0097] like Figure 30 and Figure 31 As shown, protrusions 251 (also shown as protrusions 251A, 251B, 251C, and 251D) protrude from surface 252 of stator body 250 toward motor submodule 220. Protrusions 251 may be attached directly or indirectly (by means of attachment such as, but not limited to, adhesive, potting, soldering, or tin soldering) to support motor submodule 220 relative to stator body 250. While protrusions 251 are shown as circular, alternative embodiments may include other shapes, such as, for example, squares, rectangles, triangles, octagons, or hexagons.

[0098] like Figure 30 and Figure 32As shown, the stator module 200 includes a position sensor submodule 230, which includes a planar position sensor body 239 defining a through-hole 232. The through-hole 232 is positioned to receive a corresponding protrusion in the protrusion 251 when the position sensor submodule 230 is positioned between a surface 252 (from which a protrusion 251 protrudes) and the motor submodule 220. The position sensor submodule 230 positions at least one position sensor 231 on the position sensor body 239. Generally, one or more position sensors 231 can sense the position of the mover 100 based on one or more physical principles, such as, but not limited to, optical, capacitive, eddy current, inductive, magnetic, resistive, or a combination of two or more of these physical principles.

[0099] Generally, the protrusion 251 can transmit force from the motor submodule 220 to the portion of the stator body 250 on the side opposite the position sensor submodule 230 and the motor submodule 220. The portion of the stator body 250 on the side opposite the position sensor submodule 230 and the motor submodule 220 can be relatively large, and the protrusion 251 allows the motor submodule 220 to be supported by this relatively large portion of the stator body 250, while allowing the position sensor submodule 230 to be relatively close to the motor submodule 220. Furthermore, any force applied to the motor submodule 220 by the mover 100 can be directly transmitted to the stator body 250 on the side opposite the position sensor submodule 230 and the motor submodule 220, without being transmitted to the position sensor submodule 230 itself. In other words, the protrusion 251 can create load paths between the motor submodule 220 and the stator body 250 on the side of the position sensor submodule 230 opposite to the motor submodule 230. These load paths do not need to transfer the load to the position sensor submodule 230, which can protect the position sensor submodule 230 from receiving potentially destructive load forces, thereby reducing the mechanical stress on the position sensor submodule 230 and avoiding damage to the position sensor submodule 230.

[0100] Generally, embodiments such as those described herein can cause one or more parts to move, for example, but not limited to, one or more biological samples, one or more devices, one or more drugs (which may be in a suitable container), one or more products being assembled, one or more blanks, one or more materials, or a combination of two or more of these. Therefore, embodiments such as those described herein can be magnetically movable devices or movable robotic systems that may include one or more movable robotic devices. For example, embodiments such as those described herein can be used for the automation of various processes, including packaging in which workpieces need to be transported, sorted, weighed, or packaged. Therefore, robotic systems such as those described herein can be used, for example, as assembly systems or as other systems, for example, for packaging, conveying, printing, inspection, analysis, or filling.

[0101] This disclosure includes the following additional examples as further illustration of embodiments of this disclosure, and these examples are not intended to limit the scope of this disclosure.

[0102] 1. A stator module, comprising:

[0103] Stator body;

[0104] A working surface extending a width in a first dimension between opposing first and second exposed sides of the stator module, the working surface further extending a length in a second dimension between opposing first and second ends of the stator module, the second dimension being different from the first dimension, the length being greater than the width; and

[0105] A plurality of electrical conductors, each of which extends along a corresponding portion of the working surface and is operable to generate a magnetic field so that a magnetized mover moves relative to the working surface in the magnetic field in response to a current passing through the conductor.

[0106] At least some of the plurality of electrical conductors in the first layer of electrical conductors extend along the direction of the first electrical conductor; and

[0107] At least some of the electrical conductors in the second layer of electrical conductors are separated from the first layer of electrical conductors and extend along a direction of the second electrical conductor that is not parallel to the direction of the first electrical conductor.

[0108] At least some of the plurality of electrical conductors in the first layer of electrical conductors at least partially overlap with at least some of the plurality of electrical conductors in the second layer of electrical conductors in a direction orthogonal to the direction of the first electrical conductor and the direction of the second electrical conductor;

[0109] The plurality of electrical conductors and the working surface are supported relative to the stator body, making the stator module an integral assembly.

[0110] 2. The stator module according to Example 1, wherein at least some of the plurality of electrical conductors extend laterally relative to the working surface and completely span at least a portion of the width of the working surface.

[0111] 3. The stator module according to Example 2, wherein all electrical conductors of the stator module extending laterally along a corresponding portion of the working surface and relative to the working surface are within at least a portion of the width of the working surface.

[0112] 4. The stator module according to Example 2, wherein all electrical conductors of the stator module extending laterally along a corresponding portion of the working surface and relative to the working surface extend completely across the width of the working surface by at least a portion thereof.

[0113] 5. The stator module according to Example 2, 3 or 4, wherein the working surface covers a single row of electromagnetic drive regions, each of the single row of electromagnetic drive regions comprising a corresponding subset of the plurality of electrical conductors extending across at least a portion of the width of the working surface.

[0114] 6. The stator module according to Example 5, wherein each conductor of a corresponding subset of the plurality of electrical conductors in each of the single-row electromagnetic drive regions extends substantially across the electromagnetic drive region.

[0115] 7. The stator module according to Example 5 or 6, wherein the single-row electromagnetic drive region comprises two electromagnetic drive regions.

[0116] 8. The stator module according to Example 5, 6 or 7, wherein the single-row electromagnetic drive region comprises four electromagnetic drive regions.

[0117] 9. The stator module according to Example 5, 6, or 7, wherein each electromagnetic drive region of the single-row electromagnetic drive region includes:

[0118] A corresponding subset of the plurality of electrical conductors in the first layer of electrical conductors; and

[0119] A corresponding subset of the at least some of the electrical conductors in the second layer of electrical conductors.

[0120] 10. The stator module according to any one of Examples 2 to 9, wherein at least some of the plurality of electrical conductors extend longitudinally relative to the working surface.

[0121] 11. The stator module according to Example 10, wherein at least some of the plurality of electrical conductors extending laterally relative to the working surface are orthogonal to at least some of the plurality of electrical conductors extending longitudinally relative to the working surface.

[0122] 12. A stator module according to Example 10 or 11, which is directly or indirectly subordinate to Example 5, wherein each electromagnetic drive region of the single row of electromagnetic drive regions includes a corresponding subset of a plurality of electrical conductors extending longitudinally relative to the working surface.

[0123] 13. The stator module according to Example 12, wherein the respective subset of a plurality of electrical conductors extending longitudinally relative to the working surface of each of the single-row electromagnetic drive regions is different from the respective subset of the plurality of electrical conductors extending longitudinally relative to the working surface of each other electromagnetic drive region of the single-row electromagnetic drive region.

[0124] 14. The stator module according to any one of Examples 1 to 13, wherein each of the plurality of electromagnetic drive regions abuts against at least one adjacent electromagnetic drive region among the plurality of electromagnetic drive regions.

[0125] 15. The stator module according to any one of Examples 1 to 14, wherein the stator module is generally rectangular.

[0126] 16. The stator module according to any one of Examples 1 to 15, wherein the working surface is generally rectangular.

[0127] 17. The stator module according to any one of Examples 1 to 14, wherein:

[0128] The working surface is located in a plane;

[0129] The working surface is at least partially curved within the plane;

[0130] The width is the width between the at least partially curved sides of the working surface; and

[0131] The length includes at least one bending length.

[0132] 18. The stator module according to any one of Examples 1 to 17, wherein the stator module further includes at least one guide member positioned to guide the mover to move relative to the stator module along the length of the working surface.

[0133] 19. The stator module according to Example 18, wherein the at least one guide includes at least one track.

[0134] 20. A stator module, comprising:

[0135] Stator body;

[0136] The working surface that is supported relative to the stator body;

[0137] A plurality of electrical conductors, each of which extends along a corresponding portion of the working surface and is operable to generate a magnetic field so that a magnetized mover moves relative to the working surface in the magnetic field in response to a current passing through the conductor.

[0138] At least some of the electrical conductors in the first layer of electrical conductors of the plurality of electrical conductors extend along the direction of the first electrical conductor;

[0139] At least some of the plurality of electrical conductors in the first layer of electrical conductors extend along a second electrical conductor direction that is not parallel to the direction of the first electrical conductor; and

[0140] At least some of the electrical conductors in the second layer of the plurality of electrical conductors are separated from the first layer of electrical conductors extending along the direction of the third electrical conductor, which is not parallel to the directions of the first and second electrical conductors.

[0141] 21. The stator module according to Example 20, wherein the direction of the first electrical conductor is orthogonal to the direction of the second electrical conductor.

[0142] 22. The stator module according to Example 20 or 21, wherein the direction of the first electrical conductor is linear.

[0143] 23. The stator module according to Examples 20, 21 or 22, wherein the direction of the second electrical conductor is linear.

[0144] 24. The stator module according to Examples 20, 21, 22 or 23, wherein the direction of the third electrical conductor is curved.

[0145] 25. The stator module according to any one of Examples 20 to 24, wherein the at least some electrical conductors extending along the first electrical conductor direction at least partially overlap with the at least some electrical conductors extending along the third electrical conductor direction in a direction orthogonal to the first electrical conductor direction and the second electrical conductor direction.

[0146] 26. The stator module according to any one of Examples 20 to 25, wherein the at least some electrical conductors extending along the second electrical conductor direction at least partially overlap with the at least some electrical conductors extending along the third electrical conductor direction in a direction orthogonal to the second electrical conductor direction and the third electrical conductor direction.

[0147] 27. The stator module according to any one of Examples 20 to 26, wherein at least some of the plurality of electrical conductors are located in a third layer of electrical conductors separated from the first layer of electrical conductors and the second layer of electrical conductors, and extend along a fourth electrical conductor direction that is not parallel to the directions of the first electrical conductor, the second electrical conductor, and the third electrical conductor.

[0148] 28. The stator module according to Example 27, wherein the direction of the third electrical conductor is orthogonal to the direction of the fourth electrical conductor.

[0149] 29. The stator module according to Example 27 or 28, wherein the direction of the fourth electrical conductor is curved.

[0150] 30. The stator module according to Examples 27, 28 or 29, wherein the at least some electrical conductors extending along the first electrical conductor direction at least partially overlap with the at least some electrical conductors extending along the fourth electrical conductor direction in a direction orthogonal to the first electrical conductor direction and the fourth electrical conductor direction.

[0151] 31. The stator module according to Examples 27, 28, 29 or 30, wherein the at least some electrical conductors extending along the second electrical conductor direction at least partially overlap with the at least some electrical conductors extending along the fourth electrical conductor direction in a direction orthogonal to the second electrical conductor direction and the fourth electrical conductor direction.

[0152] 32. A stator module, comprising:

[0153] Stator body;

[0154] The working surface that is supported relative to the stator body;

[0155] A motor submodule comprising a plurality of electrical conductors, each of which extends along a corresponding portion of the working surface and is operable to generate a magnetic field so that a magnetized mover moves relative to the working surface in the magnetic field in response to a current passing through the electrical conductor.

[0156] A position sensor submodule includes at least one position sensor, the position sensor being operable to sense the position of the mover and define a plurality of through holes;

[0157] The stator body includes a surface and a plurality of protrusions, each of the plurality of protrusions extending from the surface toward the motor submodule through a corresponding through hole in the plurality of through holes of the position sensor submodule and supporting the motor submodule.

[0158] 33. The stator module according to Example 32, wherein the position sensor submodule includes a position sensor body that defines the plurality of through holes and supports the at least one position sensor.

[0159] 34. The stator module according to Example 33, wherein the position sensor body is planar.

[0160] 35. The stator module according to Examples 32, 33 or 34, wherein the plurality of protrusions are spaced apart from each other in at least two dimensions.

[0161] 36. The stator module according to Examples 32, 33 or 34, wherein the plurality of protrusions are arranged in at least two rows and at least two columns.

[0162] 37. A robot system comprising at least one stator module, the stator module including a first stator module according to any one of Examples 32 to 36.

[0163] 38. A robot system comprising at least one stator module, the stator module including a first stator module according to any one of Examples 20 to 31.

[0164] 39. A robot system comprising at least one stator module, the stator module including a first stator module according to any one of Examples 1 to 19.

[0165] 40. The robot system according to Example 39, wherein the at least one stator module further includes a second stator module, the second stator module comprising:

[0166] Stator body;

[0167] A working surface, the working surface being supported relative to the stator body and having a side portion adjacent to the first stator module, wherein the side portion of the working surface of the second stator module has a wider range than the working surface of the first stator module; and

[0168] A plurality of electrical conductors, each of which extends along a corresponding portion of the working surface and is operable to generate a magnetic field so that a magnetized mover moves relative to the working surface in the magnetic field in response to a current passing through the conductor.

[0169] The robot system is operable to move a magnetized mover between the working surfaces of the first stator module and the second stator module in response to a current passing through at least one of the plurality of electrical conductors of the first stator module and the second stator module.

[0170] 41. The robot system according to Example 40, wherein the side of the working surface of the second stator module is adjacent to the first end of the first stator module.

[0171] 42. The robot system according to Example 40 or 41, wherein the side of the working surface of the second stator module abuts against the first end of the first stator module.

[0172] 43. The robot system according to Examples 40, 41 or 42, wherein the first stator module abuts against the second stator module.

[0173] 44. The robot system according to Examples 40, 41, 42 or 43, wherein the second stator module includes a plurality of electromagnetic drive regions, each electromagnetic drive region of the second stator module including a corresponding subset of the plurality of electrical conductors of the second stator module.

[0174] 45. The robot system according to Example 44, wherein the plurality of electromagnetic drive regions of the second stator module are located in corresponding rows of multiple rows and corresponding columns of multiple electromagnetic drive regions of the second stator module.

[0175] 46. ​​The robot system according to Example 44, wherein the plurality of electromagnetic drive regions of the second stator module are arranged in a single row.

[0176] 47. The robot system according to any one of Examples 40 to 46, wherein the working surface of the second stator module has a width and a length equal to the width.

[0177] 48. The robot system according to any one of Examples 40 to 46, wherein the working surface of the second stator module has a width and a length greater than the width.

[0178] 49. The robot system according to Example 48, wherein the side portion of the working surface of the second stator module extends along the width of the working surface of the second stator module.

[0179] 50. The robot system according to Example 48, wherein the side portion of the working surface of the second stator module extends along the length of the working surface of the second stator module.

[0180] 51. The robot system according to any one of Examples 40 to 50, wherein, in the second stator module:

[0181] At least some of the plurality of electrical conductors are located in a first layer of electrical conductors extending along the direction of the first electrical conductor;

[0182] At least some of the plurality of electrical conductors are located in a second layer of electrical conductors separated from the first layer of electrical conductors, the second layer of electrical conductors extending along a direction not parallel to the direction of the first electrical conductor; and

[0183] At least some of the plurality of electrical conductors in the first layer overlap at least partially with at least some of the plurality of electrical conductors in the second layer in a direction orthogonal to the first and second electrical conductor directions.

[0184] 52. The stator module according to Example 51, which is directly or indirectly subordinate to Example 44, wherein, in the second stator module, each of the plurality of electromagnetic drive regions includes:

[0185] A corresponding subset of the plurality of electrical conductors in the first layer of electrical conductors; and

[0186] A corresponding subset of the at least some of the electrical conductors in the second layer of electrical conductors.

[0187] 53. The robot system according to any one of Examples 38 to 52, wherein each of the at least one stator module further includes a corresponding position sensor submodule operable to sense the position of the mover.

[0188] 54. The robot system according to any one of Examples 33 to 53 further includes the mover.

[0189] 55. The robot system according to Example 54, wherein the mover comprises a plurality of permanent magnets.

[0190] 56. The robot system according to Example 55, wherein:

[0191] At least some of the plurality of permanent magnets are magnetized in the first magnetization direction;

[0192] At least some of the permanent magnets are magnetized in a second magnetization direction that is not parallel to the first magnetization direction.

[0193] 57. The robot system according to Examples 54, 55 or 56, which are indirectly dependent on Example 19, wherein the mover includes at least one roller operable to roll on the at least one track, such that the at least one roller rolls on the at least one track to guide the mover to move relative to the stator module along the length of the working surface.

[0194] 58. The robot system according to Examples 54, 55 or 56, which are indirectly dependent on Example 19, wherein the mover includes at least one slider operable to slide on the at least one track, such that the at least one roller rolls on the at least one track to guide the mover to move relative to the stator module along the length of the working surface.

[0195] 59. The robot system according to Examples 54, 55 or 56, which are indirectly subordinate to Example 19, wherein the mover includes at least one contact surface roller operable to contact the at least one track, such that the at least one contact surface contacts the at least one track to guide the mover to move relative to the stator module along the length of the working surface.

[0196] 60. The robot system according to any one of Examples 33 to 59 further includes a control system operable to control, at least directly or indirectly, the current flowing through each of the plurality of electrical conductors of each of the at least one stator module to cause the mover to move relative to the at least one stator module.

[0197] 61. The robot system according to Example 60, wherein the control system is a control circuit.

[0198] 62. The robot system according to Example 60 or 61, wherein the control system is operable to operate to control, at least directly or indirectly, the current flowing through at least some of the plurality of electrical conductors of the first stator module to cause the mover to move longitudinally relative to the first stator module between a first end and a second end of the first stator module.

[0199] 63. The robot system according to Examples 60, 61 or 62, wherein each of the at least one stator module further includes at least one amplifier, the amplifier being operable to amplify a control signal generated at least in part based on at least one signal received from the control system to control each of the plurality of electrical conductors of each of the at least one stator module, thereby causing the mover to move relative to the at least one stator module.

[0200] 64. The robot system according to any one of Examples 33 to 63, wherein the stator body of each of the at least one stator module is an integral body supporting the plurality of electrical conductors of the stator module.

[0201] 65. The robot system according to any one of Examples 33 to 64, wherein each of the at least one stator module includes a circuit shared by the plurality of electrical conductors of the stator module, and is operable to control the current flowing through each of the plurality of electrical conductors of the stator module.

[0202] 66. The robot system according to Example 65, wherein, in each of the at least one stator module, the circuit is housed within the stator body.

[0203] 67. The robot system according to any one of Examples 33 to 66, wherein each of the at least one stator module includes a communication device operable to transmit data between the stator module and one or more other stator modules.

[0204] 68. The robot system according to Example 67, wherein, in each of the at least one stator module, the communication device is housed within the stator body.

[0205] Although specific embodiments have been described and shown, these embodiments should be considered illustrative only and not as limiting of the invention constructed according to the appended claims.

Claims

1. A stator module, comprising: Stator body; The working surface is supported relative to the stator body and extends a width in a first dimension between opposing first and second exposed sides of the stator module. The working surface further extends a length in a second dimension between opposing first and second ends of the stator module, the second dimension being different from the first dimension, and the length being greater than the width. as well as A plurality of electrical conductors, each of which extends along a corresponding portion of the working surface and is operable to generate a magnetic field so that a magnetized mover moves relative to the working surface in the magnetic field in response to a current passing through the conductor. At least some of the plurality of electrical conductors in the first layer of electrical conductors extend along the direction of the first electrical conductor; and At least some of the electrical conductors in the second layer of electrical conductors are separated from the first layer of electrical conductors and extend along a direction of the second electrical conductor that is not parallel to the direction of the first electrical conductor. At least some of the plurality of electrical conductors in the first layer of electrical conductors at least partially overlap with at least some of the plurality of electrical conductors in the second layer of electrical conductors in a direction orthogonal to the direction of the first electrical conductor and the direction of the second electrical conductor; Wherein, at least some of the plurality of electrical conductors extend laterally relative to the working surface between the opposing first and second exposed sides of the stator module and completely span at least a portion of the width of the working surface, such that for each of the at least some electrical conductors extending laterally relative to the working surface between the opposing first and second exposed sides of the stator module and completely spanning at least a portion of the width of the working surface, the distance of that electrical conductor to each of the opposing first and second exposed sides of the stator module does not exceed ten times the width of that electrical conductor. The plurality of electrical conductors and the working surface are supported relative to the stator body, making the stator module an integral assembly.

2. The stator module according to claim 1, wherein, All electrical conductors of the stator module that extend laterally relative to the working surface along a corresponding portion of the working surface and between opposing first and second exposed sides of the stator module are within at least a portion of the width of the working surface.

3. The stator module according to claim 1, wherein, The working surface covers a single row of electromagnetic drive regions, each of the single row of electromagnetic drive regions comprising a corresponding subset of the plurality of electrical conductors extending across at least a portion of the width of the working surface, and wherein each of the single row of electromagnetic drive regions comprises: A corresponding subset of the plurality of electrical conductors in the first layer of electrical conductors; and A corresponding subset of the at least some of the electrical conductors in the second layer of electrical conductors.

4. The stator module according to claim 3, wherein, Each conductor of the respective subset of the plurality of electrical conductors in each of the single-row electromagnetic drive regions extends across the electromagnetic drive region.

5. The stator module according to claim 3, wherein, The single-row electromagnetic drive region includes two electromagnetic drive regions.

6. The stator module according to claim 3, wherein, The single-row electromagnetic drive region includes four electromagnetic drive regions.

7. The stator module according to claim 3, wherein, The lateral edge of the electromagnetic drive region relative to the working surface coincides with the lateral edge of one or more adjacent electromagnetic drive regions relative to the working surface.

8. The stator module according to claim 3, wherein, The stator body has a first outer surface and a second outer surface; The single-row electromagnetic drive region includes a first electromagnetic drive region and a second electromagnetic drive region. The first electromagnetic drive region and the second electromagnetic drive region have corresponding edges that coincide with the projection of the first outer surface onto the plane; as well as The first electromagnetic drive region and the second electromagnetic drive region have corresponding edges that coincide with the projection of the second outer surface onto the plane.

9. The stator module according to claim 8, wherein, The projections of the first outer surface and the second outer surface onto the plane are typically parallel.

10. The stator module according to claim 3, wherein, Each of the plurality of electromagnetic drive regions abuts against at least one adjacent electromagnetic drive region among the plurality of electromagnetic drive regions.

11. The stator module according to claim 1, wherein, At least some of the plurality of electrical conductors extend longitudinally relative to the working surface.

12. The stator module according to claim 11, wherein, The working surface covers a single row of electromagnetic drive regions, each electromagnetic drive region comprising a corresponding subset of the plurality of electrical conductors that completely span at least a portion of the width of the working surface, wherein each electromagnetic drive region in the single row of electromagnetic drive regions comprises a corresponding subset of the plurality of electrical conductors that extend longitudinally relative to the working surface.

13. The stator module according to claim 12, wherein, The corresponding subset of multiple electrical conductors extending longitudinally relative to the working surface of each electromagnetic drive region in the single-row electromagnetic drive region is different from each corresponding subset of multiple electrical conductors extending longitudinally relative to the working surface of each other electromagnetic drive region in the single-row electromagnetic drive region.

14. The stator module according to claim 1, wherein, The stator module and the working surface are generally rectangular.

15. The stator module according to claim 1, wherein: The working surface is located in a plane; The working surface is at least partially curved in the plane; The width is the width between the at least partially curved sides of the working surface; and The length includes at least one bending length.

16. A robot system comprising at least one stator module, the at least one stator module including a stator module as a first stator module according to any one of claims 1 to 15, wherein the at least one stator module further includes a second stator module, the second stator module comprising: Stator body; The working surface is supported relative to the stator body and has a side adjacent to the first stator module, wherein the side of the working surface of the second stator module has a wider range than the working surface of the first stator module. and A plurality of electrical conductors, each of which extends along a corresponding portion of the working surface and is operable to generate a magnetic field so that a magnetized mover moves relative to the working surface in the magnetic field in response to a current passing through the conductor. The robot system is operable to cause the magnetized mover to move between the working surfaces of the first stator module and the second stator module in response to a current passing through at least one of the plurality of electrical conductors of the first stator module and the second stator module.

17. The robot system according to claim 16, wherein, The second stator module includes multiple electromagnetic drive regions, and each electromagnetic drive region of the second stator module includes a corresponding subset of multiple electrical conductors of the second stator module.

18. The robot system according to claim 17, wherein, In the second stator module: At least some of the plurality of electrical conductors are in a first layer of electrical conductors extending along the direction of the first electrical conductor; At least some of the plurality of electrical conductors are located in a second layer of electrical conductors that extends along a direction not parallel to the direction of the first electrical conductor and is separated from the first layer of electrical conductors; and At least some of the plurality of electrical conductors in the first layer of electrical conductors at least partially overlap with at least some of the plurality of electrical conductors in the second layer of electrical conductors in a direction orthogonal to the directions of the first and second electrical conductors.

19. The robot system according to claim 18, wherein, In the second stator module, each of the plurality of electromagnetic drive regions includes: A corresponding subset of the plurality of electrical conductors in the first layer of electrical conductors; and A corresponding subset of the at least some of the electrical conductors in the second layer of electrical conductors.

20. The robot system according to claim 17, wherein, The multiple electromagnetic drive regions in the second stator module are located in a single row.

21. A stator module, comprising: Stator body; The working surface that is supported relative to the stator body; A plurality of electrical conductors, each of which extends along a corresponding portion of the working surface and is operable to generate a magnetic field so that a magnetized mover moves relative to the working surface in the magnetic field in response to a current passing through the conductor. At least some of the electrical conductors in the first layer of electrical conductors of the plurality of electrical conductors extend along the direction of the first electrical conductor; At least some of the plurality of electrical conductors in the first layer of electrical conductors extend along a second electrical conductor direction that is not parallel to the direction of the first electrical conductor; and At least some of the electrical conductors in the second layer of the plurality of electrical conductors are separated from the first layer of electrical conductors extending along the direction of the third electrical conductor, which is not parallel to the direction of the first electrical conductor and not parallel to the direction of the second electrical conductor.

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