Laser device and control method

Abstract

The laser device (10) of the present application is provided with: six first laser devices (101 to 106) each outputting blue laser light for preheating an object (400); and a second laser device (201) outputting infrared laser light for main heating of the object (400), at least one of the relative positional relationship of the six first irradiation positions of the blue laser light in the object (400) and the second irradiation position of the infrared laser light in the object (400) and the positions of the plurality of first irradiation positions being changeable.

Description

Technical Field

[0001] This disclosure relates to laser devices and control methods. Background Technology

[0002] Japanese Patent Application Publication No. 2018-202478 discloses a technique that uses a reflector that allows a first laser to pass through while reflecting a second laser, so that a first laser output from a fiber laser and a second laser output from a semiconductor laser with a wavelength different from the first laser are overlapped and irradiated onto the workpiece. Through this reflector, the first and second lasers overlap in a coaxial manner. Summary of the Invention

[0003] In the aforementioned techniques, the beam profile generated by lasers of two colors has not been adequately studied.

[0004] This disclosure was made to solve such a technical problem, and its purpose is to provide a technique that can adjust the beam profile of two or more lasers.

[0005] The laser device disclosed herein includes a plurality of first light sources and a plurality of second light sources. Each of the plurality of first light sources outputs a first laser for preheating an object. The second light source outputs a second laser for formally heating the object. Furthermore, at least one of the relative positional relationship between the first irradiation position of each of the plurality of first lasers and the second irradiation position of the second laser in the object, and the position of each of the plurality of first irradiation positions, is changeable.

[0006] The laser device disclosed herein includes a first light source and a second light source. The first light source outputs a first laser for preheating an object. The second light source outputs a second laser for formally heating the object. Furthermore, the relative positional relationship between the first irradiation position of the first laser and the second irradiation position of the second laser in the object can be changed.

[0007] The laser device disclosed herein includes a first light source and a plurality of second light sources. The first light source outputs a first laser for preheating an object. Each of the plurality of second light sources outputs a second laser for formally heating the object. Furthermore, at least one of the relative positions of the first irradiation position of the first laser on the object and the respective second irradiation positions of the plurality of second lasers on the object, and the respective positions of the plurality of second irradiation positions, can be changed.

[0008] The laser device disclosed herein includes multiple first light sources, second light sources, a first optical system, and a second optical system. Each of the multiple first light sources outputs a first laser for preheating an object. The second light sources output a second laser for formally heating the object. The first optical system focuses the first laser. The second optical system focuses the second laser. The first optical system and the second optical system are offset from each other along their optical axes.

[0009] The control method of the laser device disclosed herein includes: outputting a first laser for preheating an object; outputting a second laser for formally heating the object; and changing at least one of the relative positional relationship between the first irradiation position of each of the plurality of first lasers in the object and the second irradiation position of the second laser in the object, and the position of each of the plurality of first irradiation positions.

[0010] The above and other objects, features, aspects and advantages of the present invention will be set forth in connection with the present invention through the following detailed description relating to the invention, which will be understood in conjunction with the accompanying drawings. Attached Figure Description

[0011] Figure 1 This is a diagram showing an example of the configuration of a laser device according to this embodiment.

[0012] Figure 2 This is a block diagram illustrating the hardware configuration of the control device according to this embodiment.

[0013] Figure 3 This is a perspective view of the main components of the laser device 10 according to this embodiment.

[0014] Figure 4 This is a diagram showing an example of a condenser lens.

[0015] Figure 5 It is a diagram showing the change in relative positional relationships.

[0016] Figure 6 It is a diagram showing changes in individual locations.

[0017] Figure 7 This is a diagram illustrating an example of the first pattern.

[0018] Figure 8 This is a diagram illustrating an example of the second mode.

[0019] Figure 9 This is a diagram illustrating an example of mode 3.

[0020] Figure 10 This is a diagram illustrating an example of mode 4.

[0021] Figure 11This is a flowchart illustrating an example of the processing steps performed by the control device 500.

[0022] Figure 12 This is a diagram showing a modified example of a condenser lens. Detailed Implementation

[0023] Hereinafter, embodiments of the present disclosure will be described in detail with reference to the accompanying drawings. Furthermore, the same or corresponding parts in the drawings will be given the same reference numerals, and their descriptions will not be repeated.

[0024] [Processing of laser devices]

[0025] The laser apparatus of this embodiment heats the workpiece by irradiating it with a laser, thereby melting and evaporating the materials constituting the workpiece for processing (specifically, welding and cutting). Depending on the material of the workpiece, sometimes the absorption rate of the wavelength of the laser used for formal heating is low, making it impossible to perform sufficient processing. Therefore, the laser apparatus of this embodiment uses a preheating laser to increase the absorption rate, and then uses a heating laser to process the area where the absorption rate has increased.

[0026] For example, a blue laser is used for preheating, and an infrared laser is used for the actual heating. In this case, if the object is a specific material, the infrared laser has a low absorptivity and will be reflected from the surface of that specific object. If the infrared laser is reflected, the specific object cannot be properly processed. The specific object is, for example, a highly reflective material made of gold, copper, or aluminum. Such a highly reflective material has the characteristic that its infrared light absorptivity increases with temperature. If the infrared light absorptivity increases, the infrared laser is properly absorbed within the highly reflective material, thus allowing for proper processing even with that highly reflective material.

[0027] Therefore, in this embodiment, by irradiating the processing area (the infrared laser irradiation area) of the highly reflective component with blue laser, the temperature of the processing area is locally raised. Then, the area with the increased temperature (i.e., the area where the infrared laser absorptivity increases) is irradiated with infrared laser. Thus, even if the object is a highly reflective component, it can be properly processed by irradiation with infrared laser. In this way, in this embodiment, blue laser is used as the laser for preheating, and infrared laser is used as the laser for formal heating. Alternatively, it is possible to use blue laser for both preheating and formal heating. However, generally speaking, the BPP (Beam Parameter Products) difference of semiconductor lasers such as blue lasers makes it impossible to obtain a small spot diameter like single-mode fiber lasers. Therefore, in this embodiment, a configuration using blue laser as the laser for formal heating is not adopted.

[0028] [Overall Structure of the Laser Device]

[0029] Figure 1 This diagram illustrates a configuration example of the laser device 10 according to this embodiment. An object 400 is disposed on a mounting table (not shown). The laser device 10 irradiates the object 400 with laser light (blue laser and infrared laser). The laser device 10 includes a first laser device group, an actuator group, a collimating lens group, a second laser device 201, an optical element 211, a condenser lens 300, a control device 500, and an input device 502. The condenser lens 300 corresponds to the "first optical system" in this disclosure.

[0030] The first laser device group consists of N (N being an integer greater than or equal to 1) first laser devices. In this embodiment, N = 6. That is, the first laser device group consists of 6 first laser devices. In this embodiment, the 6 first laser devices are first laser device 101, first laser device 102, first laser device 103, first laser device 104, first laser device 105, and first laser device 106. Each of the first laser devices 101 to 106 is, for example, a semiconductor laser device. Alternatively, the first laser devices 101 to 106 may also be composed of other laser devices. Other laser devices are, for example, solid-state laser devices. Furthermore, the first laser device corresponds to the "first light source" in this disclosure.

[0031] Each of the first laser devices 101 to 106 outputs a first laser. The first laser is typically a laser with a wavelength of 400 nm or more and 550 nm or less. For example, the first laser is a so-called blue laser or green laser. In this embodiment, the first laser is set to a blue laser. As described above, the blue laser is used to preheat the object 400.

[0032] The actuator group consists of N actuators, each corresponding to one of the N first laser devices. The actuators are also referred to as "drive mechanisms." Since N = 6 as described above, the actuator group consists of six actuators 151 to 156. The six actuators 151 to 156 are respectively configured to correspond to the six first laser devices 101 to 106. The actuators enable the output terminals of the first laser devices (e.g., described later) to... Figure 3The output end 101S of the output optical fiber shown is displaced in the XY plane, as described later. This allows the actuator to drive the first laser device, thereby changing the irradiation position of the blue laser from the first laser device corresponding to the actuator in the object 400. The actuator is, for example, composed of a piezoelectric element or a motor. Furthermore, in this embodiment, the irradiation position refers to the location in the object 400 where the laser is irradiated. The irradiation position includes both the concept of a point position irradiating the object 400 and the concept of an irradiation area having a certain area.

[0033] More specifically, actuator 151 drives the first laser device 101. Actuator 152 drives the first laser device 102. Actuator 153 drives the first laser device 103. Actuator 154 drives the first laser device 104. Actuator 155 drives the first laser device 105. Actuator 156 drives the first laser device 106.

[0034] The collimating lens group consists of N collimating lenses, each corresponding to one of the N first laser devices. Since N = 6 as described above, the collimating lens group consists of six collimating lenses 161 to 166. These six collimating lenses 161 to 166 are respectively configured to correspond to the six first laser devices 101 to 106. Each collimating lens collimates the blue laser light from the first laser device corresponding to it.

[0035] More specifically, collimating lens 161 collimates the blue laser from the first laser device 101. Collimating lens 162 collimates the blue laser from the first laser device 102. Collimating lens 163 collimates the blue laser from the first laser device 103. Collimating lens 164 collimates the blue laser from the first laser device 104. Collimating lens 165 collimates the blue laser from the first laser device 105. Collimating lens 166 collimates the blue laser from the first laser device 106.

[0036] The second laser device 201 outputs a second laser. The second laser is typically a laser with a wavelength between 900 nm and 1100 nm. For example, the second laser is an infrared laser. Infrared lasers are used to formally heat the object 400. The second laser device 201 is, for example, a single-mode fiber laser device. The second laser device 201 can also be other devices. Other devices can be, for example, solid-state laser devices or CO2 laser devices. Furthermore, the infrared laser is single-mode. Furthermore, the second laser device corresponds to the "second light source" in this disclosure.

[0037] Optical element 211 alters the illumination mode of the infrared laser in object 400. Optical element 211 is, for example, a DOE (Diffractive Optical Element). Optical element 211, for example, divides the infrared laser into M parts (M being an integer greater than or equal to 2). Furthermore, control device 500 can move optical element 211 in and out of the path of the infrared laser. In this way, by moving optical element 211 in and out, control device 500 can either prevent the infrared laser from being divided or divide it. Focusing lens 212 focuses the infrared laser, adjusting its focal point. Focusing lens 212 corresponds to the "second optical system" of this disclosure.

[0038] As described above, the output terminals of each of the first laser devices 101 to 106 are capable of displacement. Furthermore, in Figure 3 In the example shown, for the sake of simplicity, only the output terminal 101S of each of the first laser devices 101 to 106 is shown. Furthermore, in this embodiment, no actuator is provided in the second laser device 201. Therefore, the output terminal 201S of the second laser device 201 is configured to remain stationary.

[0039] The control device 500 controls the first laser devices 101-106, actuators 151-156, the second laser device 201, and optical elements 211. The control device 500 controls the switching between output and non-output of the blue laser from the first laser devices 101-106, as well as the output power of the blue laser. The control device 500 also controls the switching between output and non-output of the infrared laser from the second laser device 201, as well as the output power of the infrared laser.

[0040] The control device 500 controls any one of the actuators 151 to 156 to displace the output end of the first laser device corresponding to that actuator. This displacement of the output end of the first laser device changes the incident angle of the blue laser emitted from the first laser device relative to the condenser lens 300. Through this change, the control device 500 can alter (adjust) the irradiation position of the blue laser on the object 400.

[0041] Information (commands) from the user is input to the input device 502. The input device 502 may be, for example, a mouse, keyboard, touch panel, etc. The command signal from the input device 502 is input to the control device 500. The control device 500 performs control based on the command signal.

[0042] The input information provided by the user can include, for example, the illumination mode described later. For instance, the user selects the illumination mode displayed on the display device. Through this selection, the user can input the illumination mode (pattern). Furthermore, the input information can also include actuator drive information. The drive information could be, for example, information showing the amount by which the output end of the first laser device corresponding to the actuator is displaced. The user can then use the input device to finely adjust the position of the output end of the first laser device.

[0043] Furthermore, the input information may also be configured to include information showing the switching between output and non-output of blue laser from the first laser devices 101-106. Additionally, the input information may also be configured to include information showing the switching between output and non-output of infrared laser from the second laser device 201. Furthermore, the input information may also include information showing the rotation angle of the optical element 211.

[0044] The collimated blue laser (6 blue lasers) and the infrared laser with its focus adjusted by the focusing lens 212 are incident on the condenser lens 300. In the condenser lens 300, the 6 blue lasers are focused and one infrared laser is allowed to pass through, thereby illuminating the object 400.

[0045] Furthermore, the laser device 10 can irradiate the object 400 with point-like and line-like patterns (e.g., straight lines or curves) by scanning infrared and blue lasers. When the laser device 10 scans infrared and blue lasers, the laser device 10 and the object 400 are moved relative to each other. For example, it can be configured to irradiate the object 400 with infrared and blue lasers in a line by moving the output section (not shown) of the laser device 10 (the part that outputs infrared and blue lasers). Alternatively, the laser device 10 can also be configured to irradiate the object 400 with infrared and blue lasers in a line by moving the mounting table (not shown) on which the object 400 is mounted.

[0046] Figure 2 This is a block diagram illustrating the hardware configuration of the control device 500. The control device 500 comprises a CPU (Central Processing Unit) 560, ROM (Read Only Memory) 562, RAM (Random Access Memory) 564, HDD (Hard Disk Drive) 566, hardware I / F 170, and input I / F 572 as its main components. These components are interconnected via a data bus.

[0047] Hardware I / F 170 is an interface for controlling hardware group 190. Hardware group 190 consists of first laser devices 101-106, actuators 151-156, second laser device 201, and optical element 211. Input I / F 572 is an interface for communicating with input device 502.

[0048] ROM 562 stores the program executed by CPU 560. RAM 564 temporarily stores data generated by the execution of the program in CPU 560. RAM 564 can function as a temporary data storage device used as a working area. HDD 562 is a non-volatile storage device. Alternatively, a semiconductor storage device such as flash memory can be used instead of HDD 566.

[0049] Furthermore, the program stored in ROM 562 can also be stored on a recording medium and distributed as a program product. Alternatively, the program can be provided by an information provider as a program product that can be downloaded via the so-called Internet. Control device 500 reads the program provided by the recording medium or the Internet. Control device 500 stores the read program in a designated storage area (e.g., ROM 562). CPU 560 performs the aforementioned display processing by executing the stored program.

[0050] Recording media are not limited to DVD-ROM (Digital Versatile Disk Read Only Memory), CD-ROM (compact disc read-only memory), FD (Flexible Disk), and hard disk. They can also be magnetic tape, cassette tape, optical discs (MO (Magnetic Optical Disc) / MD (Mini Disc) / DVD (Digital Versatile Disc)), optical cards, mask ROM, EPROM (Electrically Programmable Read-Only Memory), EEPROM (Electrically Erasable Programmable Read-Only Memory), flash memory ROM, and other semiconductor memories that permanently carry programs. Furthermore, recording media are non-transitory media that allow computers to read programs, etc.

[0051] Figure 3 This is a perspective view of the main components of the laser device 10 and the object 400. Figure 3In the diagram, the first laser devices 101-106 and the second laser device 201 are shown through the shape of optical fibers. Figure 3 As shown, the output direction of the blue laser from the first laser devices 101-106 (and the output direction of the infrared laser from the second laser device 201) is also referred to as the Z-axis direction. In this embodiment, the output directions of the blue laser from the first laser devices 101-106 and the infrared laser from the second laser device 201 are both along the Z-axis direction. That is, preferably, the optical axis of the infrared laser and the optical axes of the six blue lasers are parallel to each other along the Z-axis direction. Furthermore, the height direction of the object 400 located at a predetermined position is defined as the Y-axis direction, and the width direction of the object is defined as the X-axis direction. The XY plane described above is a plane perpendicular to the Z-axis direction. Furthermore, the condenser lens 300 and the focusing lens 212 are offset from each other in the Z-axis direction.

[0052] exist Figure 3 In this example, the condenser lens 300 has a circular cross-section. Furthermore, a hole 306 is provided in the center of the condenser lens 300. In this embodiment, the hole 306 has a circular cross-section. The infrared beam passing through the focusing lens 212 passes through the hole 306 and illuminates the object 400. Thus, the hole 306 is a transmitting portion that allows infrared laser light to pass through.

[0053] In addition, such as Figure 3 As shown, in the condenser lens 300, the incident positions of the six blue lasers and the infrared lasers are different. Furthermore, in... Figure 3 In this example, the incident position of the infrared laser is the center of the condenser lens 300, but it can also be other positions (such as the end of the condenser lens 300).

[0054] Furthermore, the incident positions of the blue laser from the first laser device 101 and the blue laser from the first laser device 102 within the condenser lens 300 are symmetrically positioned. Similarly, the incident positions of the blue laser from the first laser device 103 and the blue laser from the first laser device 104 within the condenser lens 300 are symmetrically positioned. Furthermore, the incident positions of the blue laser from the first laser device 105 and the blue laser from the first laser device 106 within the condenser lens 300 are symmetrically positioned.

[0055] Figure 4 This is a diagram showing an example of a condenser lens 300. The condenser lens 300 includes a lens body 302 and a first layer 304 formed on the surface of the lens body 302. Figure 4The diagram shows an example where the first layer 304 is formed on one side of the condenser lens 300, but it can also be formed on both sides of the condenser lens 300. The first layer 304 is a layer with low reflectivity for blue laser light. The first layer 304 is, for example, a dielectric multilayer film. The first layer 304 is, for example, composed of a stack of titanium dioxide (TiO2) and silicon dioxide (SiO2). The number of stacks can be 1 or more. Furthermore, if the first layer 304 is formed over the entire surface area of ​​the lens body 302, infrared laser light will not properly incident on the condenser lens 300. Therefore, in this embodiment, a transmission portion (a hole 306 in this embodiment) for allowing infrared laser light to pass through is formed in a designated area of ​​the condenser lens 300 (the central area in this embodiment). As a result, both blue laser light and infrared laser light can be incident on the condenser lens 300.

[0056] Furthermore, as described above, the infrared laser can be segmented by the optical element 211. Regardless of whether the infrared laser is segmented, the diameter of the aperture 306 is set such that all the infrared laser light can pass through the aperture 306.

[0057] [Change of irradiation location]

[0058] The laser device 10 of this embodiment can change the relative positional relationship between the first irradiation position of each of the six blue lasers and the second irradiation position of the infrared laser in the object 400. In this embodiment, the control device 500 changes the relative positional relationship by controlling actuators 151 to 156.

[0059] Figure 5 It is a diagram used to illustrate changes in relative positional relationships. In Figure 5 The diagram shows the first irradiation positions 101A to 106A of blue laser light in object 400 and the second irradiation position 102A of infrared laser light in object 400. The first irradiation positions 101A to 106A are the irradiation positions of blue laser light output from the first laser device 101 to the first laser device 106, respectively. Furthermore, the second irradiation position 201A is the irradiation position of infrared laser light output from the second laser device 201.

[0060] The laser device 10 can change the relative positional relationship between the first irradiation positions 101A to 106A and the second irradiation position 201A. As described above, the output terminal 201S of the second laser device 201 is configured to remain stationary. Therefore, the laser device 10 can change (move) the first irradiation positions 101A to 106A based on the second irradiation position 201A.

[0061] Furthermore, in the laser device 10, each of the six first irradiation positions 101A to 106A can be changed individually. Each of the first irradiation positions 101A to 106A is also referred to as an "individual position". By changing the individual positions, the area formed by the first irradiation positions 101A to 106A can be changed. Figure 6 This diagram shows the displacement possible at each of the six first irradiation positions 101A to 106A (individual positions). Figure 6 In the example, an elliptical region is shown as the area formed by the first irradiation positions 101A to 106A. Figure 5 In the example, the region formed by the overlap of a portion of each of the first irradiation positions 101A to 106A is shown. By changing the individual positions, it is possible to... Figure 5 The area shown is changed to another shape (in) Figure 6 (In the example, the area is elliptical). In this way, the user can change the area formed by the first irradiation positions 101A to 106A. Furthermore, for example, the user can change the area to a rectangular shape, etc.

[0062] In this embodiment, the laser device 10 is configured to be able to change (adjust) both the aforementioned relative positional relationship and the aforementioned individual positions. As a variation, the laser device 10 may also be configured to be able to change (adjust) either the aforementioned relative positional relationship or the aforementioned individual positions.

[0063] In this embodiment, the control device 500 can change the position of the target object by driving actuators 151 to 156. Specifically, the control device 500 can change (move) the first irradiation positions 101A to 106A by driving actuators 151 to 156.

[0064] Alternatively, the laser device 10 may be configured to allow for individual modification of the first irradiation positions 101A to 106A and the second irradiation position 201A. Furthermore, the laser device 10 may also be configured to allow modification of the second irradiation position 201A based on the first irradiation positions 101A to 106A.

[0065] Furthermore, the control device 500 can change the relative positional relationship based on a preset illumination mode. Here, the illumination mode includes modes 1 to 4. Additionally, data related to the illumination mode is stored in advance, for example, in the aforementioned ROM 562.

[0066] Figure 7 This is a diagram illustrating an example of pattern 1. (As shown...) Figure 7As shown, the first mode is a mode in which the first irradiation positions 101A to 106A overlap with the second irradiation position 201A. The first mode is a mode in which the timing of the blue laser irradiating the object 400 (the arrival time of the blue laser) is the same as the timing of the infrared laser irradiating the object 400 (the arrival time of the infrared laser).

[0067] Figure 8 This is a diagram illustrating an example of mode 2. In mode 2, as... Figure 8 As shown in (A), firstly, at least one of the six blue lasers is irradiated. Figure 8 In example (A), since six first irradiation positions 101A to 106A are shown, it demonstrates the situation where all six lasers are irradiated. Then, while maintaining the irradiation of this blue laser, after a predetermined time, as... Figure 8 As shown in (B), infrared laser is irradiated at the first irradiation positions 101A to 106A.

[0068] In this way, the second mode is a mode in which, after one or more of the six blue lasers irradiate the object 400, infrared lasers irradiate the first irradiation positions 101A to 106A. Thus, as... Figure 8 As shown in (A), the first irradiation positions 101A to 106A of the object 400 are locally heated by blue laser irradiation. The temperature of the locally heated positions (i.e., the first irradiation positions 101A to 106A) rises, and the absorption rate of infrared laser at these positions increases. Therefore, as... Figure 8 As shown in (B), by irradiating the location with infrared laser, the location can absorb the infrared laser, thus achieving formal heating at that location.

[0069] Figure 9 This diagram illustrates an example of the third mode. The above description explained the configuration of irradiating one object 400 with blue and infrared lasers. The third mode is a mode in which multiple objects are each irradiated with blue and infrared lasers. Figure 9 In the example, two objects are shown as multiple objects: object 4001 and object 4002.

[0070] exist Figure 9 In the third mode of the example, infrared laser light is applied to the second illumination position 201A1 of the object 4001. Furthermore, a portion of six blue laser beams are applied to the position corresponding to the second illumination position 201A1. Here, the position corresponding to the second illumination position can be either an overlap with the second illumination position or a position at a fixed distance from the second illumination position. Figure 9In the example, the position corresponding to the second irradiation position 201A1 refers to the position that overlaps with the second irradiation position 201A1. Figure 9 In the example, a portion of the six blue lasers are blue lasers output from the first laser devices 101-103 respectively. Therefore, in Figure 9 In the example, the first irradiation positions 101A to 103A are shown in object 4001.

[0071] In addition, Figure 9 In the example, infrared laser light was applied to the second illumination position 201A2 of the object 4002. Furthermore, a portion of six blue lasers was applied to the position overlapping with the second illumination position 201A2. This portion of blue laser light was emitted from the blue lasers output by the first laser devices 104-106 respectively. Therefore, in Figure 9 In the example, the first irradiation positions 104A to 106A are shown in object 4002.

[0072] Figure 10 This diagram illustrates an example of the fourth mode. The fourth mode is, for example, used when scanning infrared and blue lasers in a linear (e.g., straight or curved) pattern within object 400. Figure 10 In the example, infrared and blue lasers are scanned along line L. Furthermore, in mode 4, the first irradiation position (at...) Figure 10 In the example, the first irradiation position (101A to 106A) is used as a reference, and the scanning direction set in the object 400 is (in) the second irradiation position 201A. Figure 10 In the example, the direction of line L is the side.

[0073] With this setup, the blue laser and infrared laser are scanned in a line L-shape within the object 400. Furthermore, within this line L, the blue laser is irradiated first, compared to the infrared laser. Thus, within the line L, the infrared laser can be irradiated after localized heating with the blue laser.

[0074] Furthermore, the idea of ​​the fourth mode can also be reflected in the third mode. In this case, the aforementioned "position corresponding to the second irradiation position" is set to a position at a fixed distance from the second irradiation position. That is, it becomes a mode in which the second irradiation position 201A1 is at a fixed distance from the first irradiation positions 101A to 103A, and the second irradiation position 201A2 is at a fixed distance from the first irradiation positions 103A to 106A.

[0075] In the laser device 10, for example, it is configured such that a user can select an irradiation mode from a plurality of irradiation modes including modes 1 to 4. For example, the user can select any one of modes 1 to 4 by operating the input device 502.

[0076] In conventional laser devices, there is a problem that the beam profile is not studied. To address this, the laser device 10 of this embodiment allows for the modification of the relative positional relationships between the first irradiation positions 101A to 106A of the plurality of blue lasers in the object 400 and the second irradiation position 201A of the infrared laser in the object 400, as well as the individual positions of the six first irradiation positions 101A to 106A (changing the object position). Therefore, the beam profiles of the infrared and blue lasers can be varied.

[0077] Furthermore, the control device 500 enables the change of the object's position. Therefore, changing the relative positional relationship becomes easier compared to changing the relative positional relationship by the user.

[0078] Furthermore, the laser device 10 includes an input device 502 that accepts input of the irradiation mode from the user. The control device 500 changes the position of the object to be changed based on the input irradiation mode. Thus, for example, the user can change the position of the object to be changed using an irradiation mode that is used frequently. Therefore, the burden on the user can be reduced.

[0079] In addition, such as Figure 9 As shown, the third illumination mode is a mode in which a portion of the six blue lasers illuminates positions corresponding to the second illumination positions 201A1 and 201A2 of the infrared lasers, which are separated by the optical element 211. Thus, for example, the laser device 10 can process multiple objects in parallel.

[0080] In addition, such as Figure 8 and Figure 10 As shown, modes 2 and 4 in the irradiation mode are modes in which the infrared laser irradiates the first irradiation position of the blue laser after one or more of the six blue lasers irradiate the object 400. Thus, the infrared laser irradiates the object after local preheating with the blue laser. Therefore, even the object 400, which has a high reflectivity to infrared lasers, can be processed by this infrared laser.

[0081] Furthermore, the laser device 10 also includes a focusing lens 300, which focuses multiple blue laser beams and directs them onto the object 400. The focusing lens 300 has a transmission portion that allows infrared laser beams to pass through, and the infrared laser beams that pass through the transmission portion are then directed onto the object 400. Thus, the laser device 10 can focus multiple blue and infrared laser beams onto the object 400 using the focusing lens 300.

[0082] In addition, such as Figure 4 As shown, the transmission portion formed in the condenser lens 300 is a hole 306. Thus, infrared laser light can be transmitted through the condenser lens 300 with a relatively simple configuration.

[0083] Furthermore, the first laser devices 101 to 106 are semiconductor laser devices. Therefore, it is possible to irradiate the object 400 with blue laser light using existing semiconductor laser devices.

[0084] Furthermore, the second laser device 201 is a single-mode fiber laser device. Therefore, it is possible to irradiate the object 400 with infrared laser using an existing single-mode fiber laser device.

[0085] Furthermore, the first laser, taking blue laser as an example, is a laser with a wavelength of 400nm to 550nm, and the second laser, taking infrared laser as an example, is a laser with a wavelength of 900nm to 1100nm. Moreover, the object 400 is made of copper, gold, or aluminum. Therefore, even if the object 400 is a highly reflective component such as copper, gold, or aluminum that reflects the second laser, the absorption rate of the second laser on the highly reflective component can be increased by preheating it with the first laser. Thus, the highly reflective component can be processed using the first laser.

[0086] Furthermore, in the laser device 10, the condenser lens 300 and the focusing lens 212 are configured to be staggered relative to each other in the Z-axis direction. Therefore, the designer of the laser device 10 can design (manufacture) the laser device 10 while simultaneously adjusting the beam profiles of the infrared and blue lasers. In other words, the designer can adjust the beam profiles of the infrared and blue lasers during the manufacture of the laser device 10.

[0087] [Control device processing]

[0088] Figure 11 This is a flowchart illustrating an example of the processing steps performed by the control device 500. First, in step S1, the control device 500 changes the aforementioned relative positional relationships and individual positions based on user input operations to the input device 502, etc. This step S1 includes the following steps S2 and S4.

[0089] In step S2, the control device 500 determines the second irradiation position based on the command from the user to the input device 502. Next, in step S4, the control device 500 determines the first irradiation position, for example, based on the aforementioned irradiation mode and the second irradiation position determined in step S2.

[0090] Next, in step S6, the control device 500 causes the first laser device to irradiate a determined first irradiation position with blue laser. Furthermore, in step S6, the control device 500 causes the second laser device 201 to irradiate a determined second irradiation position with infrared laser. Additionally, in step S6, when the second mode is selected, the control device 500 first irradiates with blue laser, and then irradiates the first irradiation position irradiated with blue laser with infrared laser. Through this process, the laser device 10 is able to irradiate the position preheated by blue laser with infrared laser for formal heating.

[0091] In addition, Figure 11 In the example described, the control device 500 performs the processing of step S6 after the processing of step S1. However, the control device 500 may also perform the processing of step S1 during the execution of step S6 (i.e., during the output of infrared laser and blue laser).

[0092] [Variation Example]

[0093] (1) In Figure 4 In the example, in the condenser lens 300, the configuration of forming the aperture portion 306 as the transmission portion for transmitting infrared laser light has been described. However, the transmission portion can be any configuration as long as it transmits infrared laser light. Figure 12 This diagram shows a modified example of a condenser lens 300A. The condenser lens 300A has a lens body 302, a first layer 304 formed on the surface of the lens body 302, and a second layer 308 formed on the surface of the lens body 302. The second layer 308 corresponds to the "transmitting coating" of this disclosure. The second layer 308 is a layer with low reflectivity for infrared laser light. The second layer 308 is composed of a stack of tantalum pentoxide (TaO2) and silicon dioxide (SiO2). The number of stacked layers can be 1 or more.

[0094] Even if Figure 12 The configuration of such a 300A focusing lens can also allow infrared lasers to pass through appropriately.

[0095] (2) In the above embodiment, the configuration of the laser device 10 including an actuator has been described. However, the laser device 10 may also be configured without an actuator. In this case, the user can hold the first laser device and manually change the irradiation position of the blue laser on the object 400. That is, the user can change the relative positional relationship by manual operation.

[0096] Furthermore, in the above embodiments, a configuration pre-stored program data for executing modes 1 to 4 as irradiation modes has been described. However, a configuration without storing such program data may also be used. In such a configuration, for example, the user can achieve at least one of modes 1 to 4 by finely adjusting the irradiation directions of the first and second laser devices.

[0097] (3) Furthermore, in the above embodiment, the configuration of the laser device 10 including the condenser lens 300 has been described. However, the laser device 10 may also not include the condenser lens 300. For example, it may be configured such that the object 400 is directly irradiated by blue lasers from the first laser devices 101 to 106 and infrared lasers from the second laser device 201, respectively.

[0098] (4) In the above embodiment, a configuration in which the number of first laser devices is multiple (6) and the number of second laser devices is one has been described. However, the number of both the first laser devices and the second laser devices may be one. In such a configuration, the relative positional relationship between the first irradiation position of the blue laser in the object 400 and the second irradiation position of the infrared laser in the object 400 can be changed. Thus, the beam profile can be adjusted.

[0099] Alternatively, there may be one first laser device and multiple second laser devices. In such a configuration, the relative positional relationship between the first irradiation position of the blue laser in the object 400 and the respective second irradiation positions of the multiple second lasers in the object 400, as well as at least one of the individual positions of the multiple second irradiation positions, can be changed. Therefore, the beam profile can be adjusted.

[0100] [plan]

[0101] Those skilled in the art will understand that the above-described exemplary embodiments are specific examples of the following solutions.

[0102] (Item 1) A laser device of one embodiment includes: a plurality of first light sources, each outputting a first laser for preheating an object; a second light source, outputting a second laser for formally heating the object, wherein the relative positional relationship between the first irradiation position of the plurality of first lasers in the object and the second irradiation position of the second laser in the object, and at least one of the positions of the plurality of first irradiation positions, are changeable.

[0103] According to the laser device described in claim 1, the relative positional relationship between the first irradiation position of each of the plurality of first lasers in the object and the second irradiation position of the second laser in the object, and at least one of the positions of the plurality of first irradiation positions, can be changed. Therefore, the beam profile can be adjusted.

[0104] (Item 2) The laser device described in Item 1 further includes a control device for changing the relative positional relationship.

[0105] According to the laser device described in item 2, the user's burden can be reduced because the relative positional relationship is changed by the control device.

[0106] (Item 3) The laser device described in Item 2 further includes an input device that accepts input of an irradiation mode from a user, and a control device that changes at least one of the relative positional relationship and the respective positions based on the irradiation mode.

[0107] Because the relative positional relationship is changed based on the illumination mode selected by the user, user convenience can be improved.

[0108] (Item 4) The laser device described in Item 3 further includes an optical element for dividing the second laser, and the irradiation mode includes a mode in which a portion of the plurality of first lasers is irradiated to a position corresponding to the second irradiation position of each of the divided second lasers.

[0109] According to the laser device described in item 3, multiple objects can be processed in parallel.

[0110] (Item 5) In the laser device described in Item 3 or 4, the irradiation mode includes a mode in which a second laser irradiates a first irradiation position that was irradiated by the first laser after one or more of a plurality of first lasers irradiates the object.

[0111] According to the laser device described in item 5, since the object can be preheated using the first laser and then formally heated using the second laser, even objects with high reflectivity of the second laser can be formally heated using the second laser.

[0112] (Item 6) The laser device described in any one of items 1 to 5 further comprises a focusing lens that focuses a plurality of first lasers and irradiates them onto an object, and a transmission portion is formed in the focusing lens that allows a second laser to pass through, and the second laser passing through the transmission portion is irradiated onto the object.

[0113] According to the laser device described in item 6, a plurality of first lasers and second lasers can be focused by a focusing lens and irradiated onto an object.

[0114] (Item 7) In the laser device described in Item 6, the through portion is an aperture portion.

[0115] According to the laser device described in item 7, the second laser can be transmitted through a focusing lens.

[0116] (Item 8) In the laser device described in Item 6, the transmitting portion includes a transmitting coating for allowing the second laser to pass through.

[0117] According to the laser device described in item 8, the second laser can be transmitted through a focusing lens.

[0118] (Item 9) In any one of the laser devices described in items 1 to 8, the first light source is composed of a semiconductor laser device.

[0119] According to the laser device described in item 9, a first laser can be used to irradiate an object using an existing semiconductor laser device.

[0120] (Item 10) In any one of the laser devices described in items 1 to 9, the second laser source is composed of a single-mode fiber laser device.

[0121] According to the laser device described in item 10, a second laser can be used to irradiate an object using an existing single-mode fiber laser device.

[0122] (Item 11) In any one of the laser devices described in items 1 to 10, the first laser is a laser with a wavelength of 400 nm to 550 nm, the second laser is a laser with a wavelength of 900 nm to 1100 nm, and the object is made of copper, gold, or aluminum.

[0123] According to the laser apparatus described in item 11, even if the object is a highly reflective component such as copper, gold, or aluminum that reflects the second laser, the absorption rate of the second laser on the highly reflective component can be increased by preheating it with the first laser. Therefore, the highly reflective component can be processed using the first laser.

[0124] (Item 12) Another embodiment of the laser device includes: a first light source that outputs a first laser for preheating an object; a second light source that outputs a second laser for formally heating the object, wherein the relative positional relationship between the first irradiation position of the first laser in the object and the second irradiation position of the second laser in the object is changeable.

[0125] According to the laser device described in item 12, the relative positional relationship between the first irradiation position of the first laser and the second irradiation position of the second laser in the object can be changed. Therefore, the beam profile can be adjusted.

[0126] (Item 13) Another embodiment of the laser device includes: a first light source that outputs a first laser for preheating an object; a plurality of second light sources, each outputting a second laser for formally heating the object, wherein the relative positional relationship between the first irradiation position of the first laser in the object and the second irradiation position of each of the plurality of second lasers in the object, and at least one of the positions of each of the plurality of second irradiation positions, is changeable.

[0127] According to the laser apparatus described in claim 13, the relative positional relationship between the first irradiation position of the first laser in the object and the second irradiation positions of the plurality of second lasers in the object, and at least one of the positions of the plurality of second irradiation positions, can be changed. Therefore, the beam profile can be adjusted.

[0128] (Item 14) Another laser device comprises: a plurality of first light sources, each outputting a first laser for preheating an object; a second light source, outputting a second laser for formally heating the object; a first optical system for focusing the first laser; and a second optical system for focusing the second laser, wherein the first optical system and the second optical system are staggered relative to each other in the optical axis direction.

[0129] According to the laser device described in item 14, the beam profile can be adjusted during the manufacture of the laser device.

[0130] (Item 15) Another control method is a control method for a laser device used to process an object. The control method includes: outputting a plurality of first lasers for preheating the object; outputting a second laser for formally heating the object; and changing at least one of the relative positional relationship between the first irradiation position of each of the plurality of first lasers in the object and the second irradiation position of the second laser in the object, and the position of each of the plurality of first irradiation positions.

[0131] According to the control method described in item 15, the relative positional relationship between the first irradiation position of each of the plurality of first lasers in the object and the second irradiation position of the second laser in the object, and at least one of the positions of the plurality of first irradiation positions, can be changed. Therefore, the beam profile can be changed.

[0132] (Item 16) In the control method described in Item 15, changing the relative positional relationship includes: determining a second irradiation position; and determining a first irradiation position based on the determined second irradiation position.

[0133] According to the control method described in item 16, a second laser for formal heating can be irradiated onto the position preheated by the first laser.

[0134] The embodiments of the present invention have been described above, but it should be considered that the embodiments disclosed herein are illustrative rather than limiting in all respects. The scope of the invention is set forth in the claims and is intended to include all modifications within the meaning and scope equivalent to the claims.

Claims

1. A laser device, characterized in that, have: Multiple primary light sources, each emitting a primary laser for preheating the object; The second light source outputs a second laser for formally heating the object; The driving unit enables the independent movement of the respective first irradiation position of the first laser emitted from each of the plurality of first light sources in the object and the second irradiation position of the second laser emitted from the second light source in the object; Input device, accepting input of illumination mode from the user; The control device controls the drive unit based on the irradiation mode. Through the drive unit, at least one of the relative positional relationship between the respective first irradiation position and the second irradiation position and the respective position of the respective first irradiation position can be changed.

2. The laser device as described in claim 1, characterized in that, The laser device further includes a lens to focus the first laser beams output from each of the plurality of first light sources. The driving unit changes the incident angle of the first laser emitted from each of the plurality of first light sources relative to the lens.

3. The laser device as described in claim 1, characterized in that, The driving unit includes a plurality of actuators disposed corresponding to each of the plurality of first light sources. The plurality of actuators displace the output end of the first light source corresponding to the actuator.

4. The laser device as described in claim 1, characterized in that, The laser device further includes optical elements to divide the second laser beam. The illumination mode includes a mode in which a portion of the first lasers output from each of the plurality of first light sources illuminates a position corresponding to the second illumination position of each of the divided second lasers.

5. The laser device as described in claim 1 or 4, characterized in that, The irradiation mode includes a mode in which, after the object is irradiated by one or more first lasers output from the plurality of first light sources, the second laser irradiates the first irradiation position that was irradiated by the first laser.

6. The laser device according to any one of claims 1 to 3, characterized in that, Furthermore, it includes a focusing lens to concentrate the first laser beams output from each of the plurality of first light sources and direct them onto the object. The condenser lens has a transmitting portion that allows the second laser beam to pass through. The second laser, which passes through the transmitting portion, is irradiated onto the object.

7. The laser device as described in claim 6, characterized in that, The through portion is a hole.

8. The laser device as described in claim 6, characterized in that, The transparent portion includes a transparent coating for allowing the second laser to pass through.

9. The laser device according to any one of claims 1 to 3, characterized in that, The first light source is composed of a semiconductor laser device.

10. The laser device according to any one of claims 1 to 3, characterized in that, The second light source is composed of a single-mode fiber laser device.

11. The laser device according to any one of claims 1 to 3, characterized in that, The first laser is a laser with a wavelength between 400nm and 550nm. The second laser is a laser with a wavelength between 900 nm and 1100 nm. The object is made of copper, gold, or aluminum.

12. A laser device, characterized in that, have: The first light source outputs a first laser for preheating the object; The second light source outputs a second laser for formally heating the object; The driving unit enables the first irradiation position of the first laser emitted from the first light source in the object and the second irradiation position of the second laser emitted from the second light source in the object to move independently; Input device, accepting input of illumination mode from the user; The control device controls the drive unit based on the irradiation mode. The relative positional relationship between the first irradiation position and the second irradiation position can be changed through the drive unit.

13. A laser device, characterized in that, have: The first light source outputs a first laser for preheating the object; Multiple second light sources, each emitting a second laser for formally heating the object; The driving unit enables the independent movement of the first irradiation position of the first laser emitted from the first light source in the object and the respective second irradiation position of the second laser emitted from each of the plurality of second light sources in the object; Input device, accepting input of illumination mode from the user; The control device controls the drive unit based on the irradiation mode. Through the drive unit, at least one of the relative positional relationship between the first irradiation position and the respective second irradiation positions, and the respective positions of the respective second irradiation positions, can be changed.

14. A laser device, characterized in that, have: Multiple primary light sources, each emitting a primary laser for preheating the object; The second light source outputs a second laser for formally heating the object; The first optical system focuses the first laser beam; The second optical system focuses the second laser beam; The driving unit enables the laser from the first optical system at the first irradiation position in the object and the laser from the second optical system at the second irradiation position in the object to move independently; Input device, accepting input of illumination mode from the user; The control device controls the drive unit based on the irradiation mode. The first optical system and the second optical system are offset from each other in the optical axis direction.

15. A control method, which is a control method for a laser device for processing an object, characterized in that, have: The first output step involves outputting multiple first lasers from multiple first light sources for preheating the object. The second output step involves outputting a second laser from the second light source for formally heating the object. The acceptance process involves accepting input from the user regarding the irradiation mode; The moving step involves independently moving the respective first irradiation position of the first laser emitted from each of the plurality of first light sources in the object and the second irradiation position of the second laser emitted from the second light source in the object based on the irradiation pattern; The modification step involves changing at least one of the relative positional relationship between the respective first irradiation position and the second irradiation position, and the respective position of the respective first irradiation position, through the movement step.

16. The control method as described in claim 15, characterized in that, Changing the relative positional relationship includes: Determine the second irradiation position; The first irradiation position is determined based on the determined second irradiation position.

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