A vacuum sealing door panel structure for a transmission cavity

Abstract

The present invention relates to a vacuum sealing door panel structure for a transmission chamber, comprising a vacuum box body, a transmission port arranged at the end of the vacuum box body, a sealing ring arranged on the outer ring of the transmission port, a sealing door panel arranged at the transmission port, and a driving and pressing mechanism for driving the sealing door panel to press the sealing ring; the driving and pressing mechanism comprises a parallelogram connecting rod assembly and a limiter respectively arranged on both sides of the vacuum box body, and a power assembly arranged below the vacuum box body; each group of the parallelogram connecting rod assemblies comprises a long strip plate arranged for vertical sliding, two connecting blocks respectively arranged vertically at intervals on the sides of the sealing door panel, and two connecting rods hinged at both ends to the ends of the connecting long strip plate and the connecting blocks; during the process of the power assembly driving the sealing door panel to rise, the limiter can make the sealing door panel move horizontally to press the sealing ring; the present invention is not only simple and compact in structure and reduces production costs, but also the driving and pressing mechanism is staggered with the transmission port, which reduces the working space.

Description

Technical Field

[0001] The present invention relates to the technical field of vacuum equipment, in particular to a vacuum sealing door panel structure for a transmission cavity. Background Art

[0002] The vacuum-sealed door panel structure is a supporting structure for vacuum sealing of the door panel. The existing sealing function is achieved by moving the door panel with a sealing groove to squeeze the sealing ring, and the pressure surface of the sealing ring is a plane. In order to reduce the wear of the sealing ring, the door panel displacement can be mainly divided into the following forms: achieving this function by flipping the door panel; first moving the door panel horizontally and then moving the door panel vertically; first moving the door panel horizontally and then moving the door panel tilted. With the continuous development of science and technology, people's requirements for the manufacturing process of the vacuum-sealed door panel structure are becoming higher and higher.

[0003] For example, the prior art 201822210676.X discloses a gate valve for sealing a vacuum chamber and a vacuum chamber using the gate valve, and the prior art 202021470168.6 discloses a vacuum box sealing device based on a connecting rod mechanism, in which the driving components for driving the door plate for sealing are all arranged on the end face of the vacuum box sealing port, which not only has a complex structure and increases the manufacturing cost, but also greatly occupies the working space, thereby limiting its use in the semiconductor industry. Summary of the Invention

[0004] The object of the present invention is to provide a vacuum sealing door panel structure for a transmission cavity in order to overcome the deficiencies of the prior art.

[0005] To achieve the above-mentioned object, the technical solution adopted by the present invention is: a vacuum sealing door panel structure for a transmission chamber, comprising a vacuum box, a transmission chamber arranged inside the vacuum box, a transmission port arranged at an end of the vacuum box and connected to the transmission chamber, a sealing groove arranged at the end of the vacuum box and located on the outer circle of the transmission port, a sealing ring arranged in the sealing groove, a sealing door panel arranged at the transmission port, and a driving and pressing mechanism for driving the sealing door panel to press the sealing ring to seal the transmission port;

[0006] The driving and pressing mechanism includes a parallelogram connecting rod assembly and a limiter respectively arranged on both sides of the vacuum box, and a power assembly arranged below the vacuum box;

[0007] Each set of the parallelogram connecting rod assembly comprises a guide rail vertically arranged on the side of the vacuum box, a long strip plate vertically slidably arranged on the guide rail, two connecting blocks vertically spaced apart and arranged on the side of the sealing door plate, and two connecting rods whose ends are respectively hinged to the ends of the connecting strip plate and the connecting blocks;

[0008] When the power assembly drives the parallelogram connecting rod assembly to drive the sealing door panel to rise, the limiting member can make the sealing door panel move horizontally and press the sealing ring tightly;

[0009] The power assembly includes a U-shaped connector with two ends respectively connected to the bottom of the long strips on both sides of the vacuum box, and a driver for driving the U-shaped connector to move up and down.

[0010] Preferably, each of the long strips is hingedly provided with a retractable support rod; the retractable end of the support rod is hingedly connected to the middle portion of the connecting rod located above.

[0011] Preferably, the limiting member is provided with a card slot in a ∩-shaped structure; the width of the card slot is slightly larger than the width of the connecting block, and when the driving pressing mechanism drives the sealing door panel to press the sealing ring, the connecting block will be stuck in the card slot.

[0012] Preferably, a limiting portion is provided on the outer bottom of the limiting member; the connecting rod and the connecting block are hinged via a rotating shaft; and a roller is sleeved on the rotating shaft just below the limiting portion.

[0013] Preferably, vertically placed positioning grooves are provided on both sides of the vacuum box; part of the guide rail is installed in the positioning groove, and the remaining part extends to the bottom of the vacuum box.

[0014] Preferably, the guide rail is at least long enough to fully expose the transfer port when the sealed door panel is lowered.

[0015] Preferably, the guide rail is provided with two sliders spaced apart from each other; the upper and lower ends of the long board are respectively provided on the two sliders.

[0016] Preferably, the sealing door panel is staggered with the driver, and the sealing door panel is arranged on the outside of the driver.

[0017] Preferably, the driver is one of a cylinder, a linear module, and a servo electric cylinder.

[0018] Due to the application of the above technical solution, the present invention has the following advantages compared with the prior art:

[0019] 1. In the present invention, when the power assembly drives the parallelogram connecting rod assembly to drive the sealing door panel to rise, the limiter can make the sealing door panel move horizontally to press the sealing ring. The structure is simple and compact, which reduces production costs. In addition, the driving and pressing mechanism is staggered with the transmission port, which reduces the working space.

[0020] 2. The present invention provides a retractable support rod, which forms a triangular structure with the long strip and the connecting rod. In the absence of external forces, the support rod can maintain the sealing door panel in a specific position, thereby ensuring that the sealing door panel does not rub against the sealing ring and the end surface of the transmission cavity during vertical movement;

[0021] 3. The present invention is easy to repair and assemble, and is easy to maintain the sealing ring and other parts. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] The technical solution of the present invention will be further described below with reference to the accompanying drawings:

[0023] Attachment Figure 1 This is a diagram showing the state of the sealed door panel in the present invention when it is closed;

[0024] Attachment Figure 2 This is a state diagram of the sealed door panel before closing in the present invention;

[0025] Attachment Figure 3 This is a state diagram of the sealed door panel of the present invention when it is opened;

[0026] Attachment Figure 4 This is a three-dimensional diagram of the sealed door panel of the present invention when it is closed;

[0027] Attachment Figure 5 for Figure 4 A partial enlarged view of the middle part;

[0028] Attachment Figure 6 This is a three-dimensional view of the sealed door panel of the present invention when it is opened.

[0029] Among them: 1. Vacuum box; 11. Transmission chamber; 12. Sealing ring; 2. Sealing door panel; 3. Drive clamping mechanism; 31. Parallelogram connecting rod assembly; 311. Guide rail; 312. Long strip; 313. Connecting block; 314. Connecting rod; 315. Support rod; 316. Roller; 317. Positioning groove; 318. Slider; 32. Limiting piece; 321. Limiting part; 33. Power assembly; 331. U-shaped connecting piece; 332. Driver. DETAILED DESCRIPTION

[0030] The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0031] Attachment Figure 1-5 The vacuum sealing door panel structure for a transmission chamber according to the present invention comprises a vacuum box 1, a transmission chamber 11 disposed inside the vacuum box 1, a transmission port disposed at an end of the vacuum box 1 and communicating with the transmission chamber 11, a sealing groove disposed at the end of the vacuum box 1 and located on the outer ring of the transmission port, a sealing ring 12 disposed in the sealing groove, a sealing door panel 2 disposed at the transmission port, and a driving and pressing mechanism 3 for driving the sealing door panel 2 to press the sealing ring 12 to seal the transmission port.

[0032] The driving and pressing mechanism 3 includes a parallelogram connecting rod assembly 31 and a limiter 32 respectively arranged on both sides of the vacuum box 1, and a power assembly 33 arranged below the vacuum box 1;

[0033] Each set of parallelogram linkage assemblies 31 includes a guide rail 311 vertically arranged on the side of the vacuum box 1, a long strip 312 vertically slidably arranged on the guide rail 311, two connecting blocks 313 vertically spaced apart and arranged on the side of the sealing door panel 2, and two connecting rods 314 whose ends are respectively hinged to the ends of the connecting strip 312 and the connecting blocks 313;

[0034] The power assembly 33 drives the parallelogram connecting rod assembly 31 to drive the sealing door panel 2 to rise, and the limiter 32 can make the sealing door panel 2 move horizontally to press the sealing ring 12;

[0035] The power assembly 33 includes a U-shaped connector 331 whose two ends are respectively connected to the bottom of the long strips 312 on both sides of the vacuum box 1, and a driver 332 for driving the U-shaped connector 331 to move up and down.

[0036] During operation: the vacuum box 1 and the driver 332 are both installed on the frame; when the sealing door panel 2 needs to be opened, the driver 332 drives the U-shaped connector 331 to drive the long strips 312 on both sides of the vacuum box 1 to move downward along the guide rails 311. Since the long strips 312 are hinged to the sealing door panel 2 through two connecting rods 314, they drive the sealing door panel 2 to move downward together, thereby opening the sealing door panel 2 and exposing the transmission port; when the sealing door panel 2 needs to be closed, the driver 332 drives the U-shaped connector 331 to The long strips 312 on both sides of the dynamic vacuum box 1 move upward along the guide rails 311. Since the long strips 312 are hinged to the sealing door panels 2 through two connecting rods 314, the sealing door panels 2 are driven to move upward together. When the uppermost connecting rod 314 touches the limiter 32, the driver 332 continues to drive the long strips 312 upward. Under the action of the limiter 32, the sealing door panels 2 will move horizontally to press the sealing ring 12, thereby sealing the transmission port. The structure is simple and compact, which reduces production costs.

[0037] Furthermore, each of the long strips 312 is hingedly provided with a retractable support rod 315; the retractable end of the support rod 315 is hinged to the middle part of the connecting rod 314 located above; the present invention forms a triangular structure with the long strips 312 and the connecting rod 314 by setting a retractable support rod 315. In the absence of external force, the support rod 315 can maintain the sealing door panel 2 in a certain specific position, thereby ensuring that the sealing door panel 2 will not rub against the sealing ring 12 and the end face of the transmission cavity 11 during the vertical movement.

[0038] Furthermore, the limiting member 32 is provided with a card slot, which is a ∩-shaped structure; the width of the card slot is slightly larger than the width of the connecting block 313, and when the driving and clamping mechanism 3 drives the sealing door panel 2 to press the sealing ring 12, the connecting block 313 will be stuck in the card slot; the present invention provides a card slot on the limiting member 32, so that the sealing door panel 2 can be stuck in the card slot when closing the sealing door panel 2, which plays a limiting role and can effectively prevent the sealing door panel 2 from moving left and right.

[0039] Furthermore, a limiting portion 321 is provided at the outer bottom of the limiting member 32; the connecting rod 314 and the connecting block 313 are hinged via a rotating shaft; a roller 316 is sleeved on the rotating shaft just below the limiting portion 321; the present invention can reduce wear and increase service life by sleeved the roller 316 just below the limiting portion 321.

[0040] Furthermore, vertically placed positioning grooves 317 are provided on both sides of the vacuum box body 1; part of the guide rail 311 is installed in the positioning groove 317, and the remaining part extends to the bottom of the vacuum box body 1; since part of the guide rail 311 is installed in the positioning groove 317, the present invention can not only play a positioning role, but also make the overall structure more compact.

[0041] Furthermore, the length of the guide rail 311 is twice the height of the sealing door panel 2, so that when the sealing door panel 2 is lowered, the transmission port can be completely exposed.

[0042] Furthermore, two sliders 318 spaced apart from each other are provided on the guide rail 311; the upper and lower ends of the long plate 312 are respectively provided on the two sliders 318; the present invention makes the long plate 312 more stable during the up and down movement by providing two sliders 318 spaced apart from each other on the guide rail 311.

[0043] Furthermore, the sealing door panel 2 and the driver 332 are staggered and arranged on the outside of the driver 332, thereby reducing the working space.

[0044] Furthermore, the driver 332 is one of a pneumatic cylinder, a linear module, and a servo electric cylinder, which can be selected according to the working environment.

[0045] The above are only specific application examples of the present invention and do not constitute any limitation on the scope of protection of the present invention. Any technical solutions formed by equivalent transformation or equivalent replacement shall fall within the scope of protection of the present invention.

Claims

1. A vacuum sealing door panel structure for a transmission cavity, characterized by: The invention comprises a vacuum box, a transmission cavity provided inside the vacuum box, a transmission port provided at an end of the vacuum box and connected to the transmission cavity, a sealing groove provided at the end of the vacuum box and located on the outer circle of the transmission port, a sealing ring provided in the sealing groove, a sealing door plate provided at the transmission port, and a driving and pressing mechanism for driving the sealing door plate to press the sealing ring to seal the transmission port; The driving and pressing mechanism includes a parallelogram connecting rod assembly and a limiter respectively arranged on both sides of the vacuum box, and a power assembly arranged below the vacuum box; Each set of the parallelogram connecting rod assembly comprises a guide rail vertically arranged on the side of the vacuum box, a long strip plate vertically slidably arranged on the guide rail, two connecting blocks vertically spaced apart and arranged on the side of the sealing door plate, and two connecting rods whose ends are respectively hinged to the ends of the connecting strip plate and the connecting blocks; When the power assembly drives the parallelogram connecting rod assembly to drive the sealing door panel to rise, the limiting member causes the sealing door panel to move horizontally and press the sealing ring tightly; The limiting member is provided with a card slot in a ∩-shaped structure; the width of the card slot is slightly larger than the width of the connecting block, and when the pressing mechanism drives the sealing door panel to press the sealing ring, the connecting block will be stuck in the card slot; A limiting portion is provided on the outer bottom of the limiting member; the connecting rod and the connecting block are hingedly connected via a rotating shaft; a roller is sleeved on the rotating shaft just below the limiting portion; The power assembly includes a U-shaped connector with two ends respectively connected to the bottom of the long strips on both sides of the vacuum box, and a driver for driving the U-shaped connector to move up and down.

2. The vacuum sealing door panel structure for a transmission cavity according to claim 1, characterized in that: A retractable support rod is hingedly provided on each of the long strips; the retractable end of the support rod is hingedly connected to the middle part of the connecting rod located above.

3. The vacuum sealing door panel structure for a transmission cavity according to claim 1 or 2, characterized in that: Both sides of the vacuum box are provided with vertically placed positioning grooves; part of the guide rail is installed in the positioning groove, and the remaining part extends to the bottom of the vacuum box.

4. The vacuum sealing door panel structure for a transmission chamber according to claim 3, characterized in that: The length of the guide rail is at least enough to allow the transmission port to be completely exposed when the sealed door panel is lowered.

5. The vacuum sealing door panel structure for a transmission chamber according to claim 4, characterized in that: The guide rail is provided with two sliding blocks spaced apart from each other; the upper and lower ends of the long strip are respectively provided on the two sliding blocks.

6. The vacuum sealing door panel structure for a transmission chamber according to claim 5, characterized in that: The sealing door plate is staggered with the driver, and the sealing door plate is arranged on the outside of the driver.

7. The vacuum sealing door panel structure for a transmission chamber according to claim 6, characterized in that: The driver is one of a cylinder, a linear module, and a servo electric cylinder.

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