A dual-mode otic detector based on MEMS

Abstract

The application discloses a dual-mode ear detection instrument based on MEMS, and belongs to the medical imaging field.The application comprises an OCT imaging module, an ultrasonic imaging module, a controller and an imaging probe.MEMS micromirrors, ring-shaped MEMS ultrasonic transducers and other devices are built-in integrated in the imaging probe end of the detection instrument, through the through hole settings of the MEMS micromirrors and the ultrasonic transducers, the small size and large scanning angle of the MEMS micromirrors are fully utilized, and the small size of the ring-shaped MEMS ultrasonic transducers is utilized, so that the micromirrors realize front-view scanning, a larger OCT imaging field is provided while a smaller probe diameter is maintained, and the effect of dual-mode simultaneous imaging of the OCT front-view scanning imaging and the ultrasonic imaging is achieved.The application further discloses a large-field dual-mode ear detection instrument based on MEMS, and the imaging probe end is designed to be coaxial through compact photoelectric and structure, so that a larger OCT scanning imaging range can be realized while the size is kept small.

Description

TECHNICAL FIELD

[0001] The application relates to a MEMS-based bimodal otic detector and belongs to the medical imaging field. BACKGROUND

[0002] An ear is composed of an outer ear, a middle ear and an inner ear. The length of an outer ear canal of an adult is about 25 mm, the diameter is 8 mm, the eardrum thickness is 0.1 mm, and the inner ear canal length is about 10 mm. In the process of otoscopy, common diseases in the outer ear canal and part of the middle ear diseases such as ear canal injury, otitis externa and eardrum perforation can be diagnosed and treated. However, some diseases in the middle ear and the inner ear such as middle ear inflammation and Meniere's disease (water accumulation in the inner ear membrane labyrinth) cannot be quantitatively analyzed in terms of imaging of tissue depth, eardrum thickness, inflammation area size and fluid characteristics because an otoscope can only observe the surface information of the tissue, which limits the judgment of the disease degree by doctors. Myringotomy for the diagnosis of inner ear infection is an invasive surgery and also causes certain damage to the patient. If these middle ear and inner ear diseases are not treated in time or the diagnosis is delayed, the patient will suffer from a series of uncomfortable symptoms such as pain, tinnitus, dizziness, hearing loss and even deafness.

[0003] In view of the above clinical problems, there is an urgent need for a medical imaging method and a detection device to have a better diagnosis effect on the middle ear and the inner ear diseases. As a new medical imaging method, optical coherence tomography (OCT) can recover the three-dimensional morphology of a sample by collecting the light interference signals scattered by biological tissues, reflect the internal structure and scattering coefficient of biological tissues and has an imaging resolution of 1-10 um and an imaging depth of 2-8 mm. The OCT has the advantages of non-contact, no need for a marker, real-time high-resolution imaging and the like and can be used for the diagnosis and analysis of middle ear and inner ear diseases. In addition, as a mature medical imaging method, ultrasonic imaging can obtain the image of an organ in the body by scanning the human body tissue with an ultrasonic beam and receiving and processing the reflected signals. Although the imaging resolution of the ultrasonic imaging is not as good as that of the OCT, the imaging depth of the ultrasonic imaging is larger than that of the OCT, and the ultrasonic imaging can also be used for otic detection.

[0004] The above two technologies can complement each other to achieve high resolution and large imaging depth, respectively, to finely image the tissue and meet the clinical needs. For example, patent CN 104644112 A proposes a new endoscopic frequency domain OCT device for ear and nose examination, CN 104248419 A proposes an ultrasonic / optical dual-mode imaging probe and imaging method for endoscopic imaging, CN 109561813 A proposes an optical coherence tomography device for otitis media, and CN 110996792 A proposes an infrared otoscope for characterizing exudates. However, the detection devices based on the above technologies have problems such as the scanning mechanism being located at the rear end of the probe, being far from the imaging position, resulting in limited field of view, and the imaging end being difficult to miniaturize, or the miniaturized imaging probe being a fiber ring scanning type, which can only perform 360° ring scanning imaging on the cavity and cannot perform forward-looking imaging.

[0005] With the development of micro-electro-mechanical systems (MEMS) in the electronics industry, the integration of MEMS manufacturing processes and integrated circuit production processes is further strengthened. Micro devices based on MEMS technology, such as MEMS scanning micro mirrors, MEMS micro transducers and sensors, have unique advantages in reducing costs, mass production, improving performance and reducing package size, and MEMS devices provide new possibilities for miniaturization and multi-modal imaging of otological detection devices. SUMMARY

[0006] In view of the fact that an otoscope cannot observe the depth information of middle ear and inner ear tissue, and the existing depth imaging technology has problems such as the scanning mechanism being located at the rear end of the probe, the field of view being limited, and the imaging probe end being difficult to miniaturize, the main purpose of the present application is to provide a dual-mode otological detector based on MEMS. The detector integrates devices such as MEMS micro mirrors and ring-shaped MEMS ultrasonic transducers at the imaging probe end of the detector. By setting through holes in the MEMS micro mirrors and ultrasonic transducers at the probe end, the small size and large scanning angle of the MEMS micro mirrors, and the miniaturization of the ring-shaped MEMS ultrasonic transducers are fully utilized. The micro mirror realizes forward-looking scanning, provides a larger OCT imaging field of view while maintaining a smaller probe diameter, and the ring-shaped MEMS ultrasonic transducer can realize ultrasonic imaging, achieving the effect of dual-mode simultaneous imaging of OCT forward-looking scanning imaging and ultrasonic imaging.

[0007] The dual-mode otological detector based on MEMS can reduce the diagnosis and analysis time of physicians, reduce the misdiagnosis rate, and at the same time has high resolution of OCT and large imaging depth of ultrasonic, solving the existing clinical pain points and making it a medical diagnostic tool with high resolution, real-time, large imaging depth, high sensitivity and specificity.

[0008] The application discloses a MEMS-based large-view-field bimodal ear detector, which has a large-view-field imaging mode.

[0009] The application aims to realize the following technical scheme.

[0010] The application discloses a MEMS-based bimodal ear detector, which mainly comprises an OCT imaging module, an ultrasonic imaging module, a controller and an imaging probe.

[0011] The OCT imaging module is used for high-resolution medical imaging.

[0012] The light source emits a beam of infrared band partially coherent light, which is connected with a single-mode optical fiber through an optical isolator and a fiber coupler.

[0013] The ultrasonic imaging module is used for large-depth medical imaging.

[0014] The imaging probe is the core component of the dual-mode otic detector. The imaging probe mainly comprises a single-mode optical fiber, a base, a ring-shaped MEMS micromirror, a mirror, an imaging lens group, a sound absorption layer, a ring-shaped MEMS ultrasonic transducer, a conducting liquid and window glass. The OCT imaging device is located in the front half of the probe, and the ultrasonic imaging device is located in the rear half of the probe. The cable line is the cable line for controlling and receiving signals of the ring-shaped MEMS ultrasonic transducer and the ring-shaped MEMS micromirror, and is connected with the MEMS controller and the filter amplifier. The cable line is connected with the MEMS controller.

[0015] The single-mode optical fiber is fixed at the center of the probe by the base, and the ring-shaped MEMS micromirror is also fixed on the surface of the base. A through hole for placing the single-mode optical fiber is arranged in the middle. The driving mode is electrothermal, electrostatic driving or other driving modes. The light beam emitted by the single-mode optical fiber is incident on the mirror surface of the mirror at a certain divergence angle, and then is reflected to the surface of the ring-shaped MEMS micromirror. The surface of the ring-shaped MEMS micromirror has a large-area reflecting layer, which can realize angular deflection in X and Y two-axis directions. The light beam passes through the secondary reflection of the micromirror and the imaging lens group, and converges on the imaging focal plane, so that the object on the imaging focal plane can be scanned and imaged by OCT. The main function of the sound absorption layer is to absorb the ultrasonic waves emitted backward by the wafer, isolate the conducting liquid and fix the position of the ring-shaped MEMS ultrasonic transducer. The sound absorption layer needs to be transparent and light-transmitting. The ring-shaped MEMS ultrasonic transducer is a piezoelectric ultrasonic transducer (PMUT) array. The number of detection points is increased by arranging the array. A through hole is formed in the middle of the transducer for light transmission. The ring-shaped MEMS ultrasonic transducer can emit and receive ultrasonic signals. The center of the ring-shaped MEMS ultrasonic transducer is coaxial with the single-mode optical fiber and the ring-shaped MEMS micromirror. The surface of the ring-shaped MEMS ultrasonic transducer can maintain a certain curvature, and the curvature focal point is located on the focal plane, which is used for enhancing the received ultrasonic signals to realize ultrasonic imaging. The conducting liquid is used for sound conduction and needs to be an insulating liquid, preferably mineral oil or vegetable oil.

[0016] The ring-shaped MEMS micromirror mainly comprises a substrate, a driving arm, a connecting fixed terminal and a mirror surface. The substrate is used for placing a bonding pad. A gap for cable routing is left on the edge part. The driving arm provides angular deflection in X and Y two-axis directions. A through hole is formed in the center of the mirror surface. The size of the through hole is slightly larger than the diameter of the optical fiber, which can be 1 mm. The ring-shaped MEMS ultrasonic transducer mainly comprises a piezoelectric layer, an elastic layer and a cavity layer. The stretching and contraction of the piezoelectric layer can drive the elastic layer to deform, form vibration and generate ultrasonic signals through the cavity layer. The size of the central through hole needs to be considered comprehensively according to the diameter of the light path and the emission and absorption performance of ultrasonic signals. The size is preferably 1 / 4 to 1 / 2 of the total diameter of the ring-shaped MEMS ultrasonic transducer.

[0017] The imaging probe end of the dual-mode otic detector is designed with a compact photoelectric and structural coaxial design, and the through-hole arrangement of the MEMS micromirror and the ultrasonic transducer, which fully utilizes the small size and large scanning angle of the MEMS micromirror and the miniaturization of the annular MEMS ultrasonic transducer, so that the micromirror realizes forward scanning, provides a larger OCT imaging field of view while maintaining a smaller probe diameter, and the annular MEMS ultrasonic transducer can realize ultrasonic imaging, achieving the effect of dual-mode simultaneous imaging of OCT forward scanning imaging and ultrasonic imaging.

[0018] The dual-mode otic detector imaging probe can significantly reduce the probe size, adapt to improve the forward scanning imaging effect in a narrow cavity, and realize high-resolution and large imaging depth of otic tissue detection.

[0019] As a preferred embodiment, the MEMS-based dual-mode otic detector can also load different types of light sources, excitation sources, light splitting devices and detectors through fiber wavelength division multiplexing, realize photoacoustic imaging and fluorescence imaging, and achieve multi-modal imaging for different application scenarios.

[0020] As a preferred embodiment, the MEMS-based dual-mode otic detector imaging probe can also be designed with a curved top end, and the optical deflection angle realized by the reflector and the angle between the MEMS micromirror and the optical axis can be designed as other values, to realize lateral scanning of the probe and further increase the scanning imaging range and application of the detector.

[0021] The MEMS-based dual-mode otic detector is typically used for diagnosis and analysis of middle ear and inner ear diseases, and due to its technical characteristics, it can also be used for detection of other organs, especially for narrow cavity forward tomography in endoscopic scenarios, such as cervix, nasal cavity, oral cavity, throat, etc.

[0022] In order to realize a larger OCT scanning imaging range while maintaining a small size, the application also discloses a MEMS-based large-field dual-mode otic detector, and the imaging probe end is designed with a compact photoelectric and structural coaxial design and mainly composed of an OCT imaging module, an ultrasonic imaging module, a controller and an imaging probe.

[0023] In the large-field imaging mode, the probe is composed of a single-mode optical fiber, a base, a fiber self-focusing lens, a reflecting prism, a MEMS micromirror, an acoustic absorption layer, an annular MEMS ultrasonic transducer, a conductive liquid and a window glass. The cable lines are respectively the cable lines for controlling and receiving signals of the annular MEMS ultrasonic transducer and the annular MEMS micromirror, the cable lines are connected with the MEMS controller and the filter amplifier, and the cable lines are connected with the MEMS controller.

[0024] The single-mode optical fiber is connected with the optical fiber self-focusing lens and the reflecting prism together, and is used for deflecting the light beam. The base fixes the optical fiber and the MEMS micro mirror, the light beam is converged at the imaging focal plane through the optical fiber self-focusing lens, and the OCT scanning imaging of the light beam on the object on the imaging focal plane is realized through the large-angle deflection of the two axes of the MEMS micro mirror. The deflection angle of the light beam realized by the reflecting prism is typically 90°, the included angle between the MEMS micro mirror and the optical axis is typically 45°, and the rest of the structure and the working mode are consistent with the MEMS-based dual-mode ear detection instrument.

[0025] The MEMS-based dual-mode ear detection instrument disclosed by the application can reduce the diagnosis and analysis time of doctors, reduce the misdiagnosis rate, has high resolution of OCT and large imaging depth of ultrasound, solves the existing clinical pain points, and becomes a medical diagnosis tool with high resolution, real-time, large imaging depth, high sensitivity and specificity.

[0026] Beneficial effects:

[0027] 1. The MEMS-based dual-mode ear detection instrument disclosed by the application utilizes the small size and large scanning angle of the MEMS micro mirror, the miniaturization of the annular MEMS ultrasonic transducer and other characteristics, so that the front-end scanning of the micro mirror provides a larger OCT imaging field of view while maintaining a smaller probe diameter. The annular MEMS ultrasonic transducer can realize ultrasonic imaging, and the through hole is used for the light beam to pass through, so as to achieve the effect of dual-mode simultaneous imaging of OCT forward-looking scanning imaging and ultrasonic imaging.

[0028] 2. The MEMS-based large-field-of-view dual-mode ear detection instrument disclosed by the application realizes high resolution and large imaging depth, and a large imaging field of view through the coaxial design of the probe end photoelectricity and structure, and the through hole setting of the MEMS micro mirror and the ultrasonic transducer.

[0029] 3. The MEMS-based dual-mode ear detection instrument disclosed by the application can also design the imaging probe into a curved surface through the top end of the probe, and design the optical deflection angle realized by the reflecting mirror and the angle between the MEMS micro mirror and the optical axis into other values, so as to realize lateral scanning of the probe and further increase the scanning imaging range and application of the detection instrument.

[0030] 4. The MEMS-based dual-mode ear detection instrument disclosed by the application can significantly reduce the size of the probe, can adapt to improve the forward-looking scanning imaging effect of a narrow cavity, can realize high-resolution and large-imaging-depth ear tissue detection, can reduce the diagnosis and analysis time of doctors, can reduce the misdiagnosis rate, and has high resolution of OCT and large imaging depth of ultrasound, solves the existing clinical pain points, and becomes a medical diagnosis tool with high resolution, real-time, large imaging depth, high sensitivity and specificity. BRIEF DESCRIPTION OF DRAWINGS

[0031] Figure 1 This is a schematic diagram of a MEMS-based dual-modal otology diagnostic instrument.

[0032] Figure 2 This is a schematic diagram of the imaging probe end structure of the detector;

[0033] Figure 3 A schematic diagram of a ring-shaped MEMS micromirror and a ring-shaped MEMS ultrasonic transducer.

[0034] Figure 4 This is a schematic diagram of another structure of the imaging probe end of the detector;

[0035] Among them: 1—Light source, 2—Optical isolator, 3—Single-mode fiber, 4—Fiber optic coupler, 5—Polarization controller, 6—Optical delay line, 7—Imaging probe, 8—Ear, 9—Detector, 10—Data acquisition card, 11—MEMS controller, 12—Filter amplifier, 13—Data acquisition card, 14—Processing computer, 701—Ultrasonic transducer cable, 702—MEMS micromirror cable, 703—Base, 704—Ring-shaped MEMS micromirror, 705—Reflector 706—Imaging lens group; 707—Sound-absorbing layer; 708—Annular MEMS ultrasonic transducer; 709—Conductive fluid; 710—Imaging focal plane; 711—Window glass; 7041—Substrate; 7042—Driving arm; 7043—Connecting and fixing terminal; 7044—Reflecting mirror; 7081—Piezoelectric layer; 7082—Elastic layer; 7083—Cavity layer; 712—Base; 713—Fiber optic self-focusing lens; 714—Reflecting prism; 715—MEMS micromirror Detailed Implementation

[0036] To better illustrate the purpose and advantages of the present invention, the invention will be further described below in conjunction with the accompanying drawings and examples.

[0037] Example 1:

[0038] like Figure 1 As shown, this embodiment discloses a MEMS-based dual-modal otology detector, which mainly consists of an OCT imaging module, an ultrasound imaging module, a controller, an imaging probe 7, and a MEMS controller 11.

[0039] The OCT imaging module includes a light source 1, an optical isolator 2, a single-mode fiber 3, a fiber optic coupler 4, a polarization controller 5, an optical delay line 6, an imaging probe 7, a detector 9, a data acquisition card 10, and a processing computer 14. The ultrasound imaging module includes an imaging probe 7, a filter amplifier 12, a data acquisition card 13, and a processing computer 14.

[0040] The working principle of the OCT imaging module is that a light source 1 emits a beam of infrared band partially coherent light, which passes through an optical isolator 2, a single-mode optical fiber 3 is connected with an optical fiber coupler 4, and the light beam is split into two paths through the optical fiber coupler 4. One path of light passes through the polarization state adjustment of a polarization controller 5 and is connected with an imaging probe 7, which is used for imaging detection of an ear 8. A MEMS controller 11 can control the scanning of a MEMS micromirror built in the imaging probe 7, so as to select an imaging scanning area of interest. The other path of light passes through the polarization state adjustment of the polarization controller 5 and is connected with an optical delay line 6, which is used for adjusting and matching the optical path, so that the optical paths of the two light beams are equal. The signal collected by the imaging probe 7 returns along the original path and interferes with the other light at the optical fiber coupler 4. A detector 9 converts the optical interference signal into an electrical signal, which passes through a data acquisition card 10. After the processing computer 14 receives the collected signal, the signal is calculated and processed to generate an OCT image of the middle ear and inner ear. When the light source 1 is a swept source, a synchronous trigger signal is generated, which is used for synchronous control of the acquisition and imaging of the data acquisition card 10.

[0041] The working principle of the ultrasonic imaging module is that the MEMS controller 11 controls the ring-shaped MEMS ultrasonic transducer built in the imaging probe 7, which is used for generating a high-frequency ultrasonic signal. The ultrasonic signal is received by the ring-shaped MEMS ultrasonic transducer after being reflected by the ear 8, and is converted into an electrical signal. The signal is processed by a filter amplifier 12, transmitted to a processing computer 14 by a data acquisition card 13, and calculated to generate an ultrasonic image of the middle ear and inner ear.

[0042] The real-time imaging effects of the OCT and the ultrasound can be verified with each other, realizing fine imaging of the ear department with high resolution and large depth, and meeting the clinical needs of doctors to reduce diagnosis and analysis time and reduce the misdiagnosis rate.

[0043] As a core component of the ear department detector, the structure of the imaging probe 7 is as shown in Figure 2 .

[0044] The probe is composed of a single-mode optical fiber 3, a base 703, a ring-shaped MEMS micromirror 704, a reflecting mirror 705, an imaging lens group 706, a sound absorbing layer 707, a ring-shaped MEMS ultrasonic transducer 708, a conducting liquid 709, and a window glass 711. The OCT imaging device is located in the front half of the probe, and the ultrasonic imaging device is located in the rear half of the probe. 701 and 702 are cable lines for controlling and receiving signals of the ring-shaped MEMS ultrasonic transducer 708 and the ring-shaped MEMS micromirror 704, respectively. The cable line 701 is connected with the MEMS controller 11 and the filter amplifier 12, and the cable line 702 is connected with the MEMS controller 11.

[0045] Wherein the single-mode optical fiber 3 is fixed at the center of the probe by the base 703, and the annular MEMS micromirror 704 is also fixed on the surface of the base, with a through hole in the middle for placing the single-mode optical fiber 3, and the driving mode can be electrothermal, electrostatic driving or other driving modes. The light beam emitted by the single-mode optical fiber 3 is incident on the mirror surface of the reflecting mirror 705 with a certain divergence angle, and then reflected to the surface of the annular MEMS micromirror 704, which has a large-area reflecting layer and can realize angular deflection in X and Y two-axis directions. The light beam passes through the secondary reflection of the micromirror 704 and the imaging lens group 706, and converges on the imaging focal plane 710, which can perform OCT scanning imaging on the object on the imaging focal plane. The main function of the sound absorbing layer 707 is to absorb the ultrasonic waves emitted backward by the wafer, isolate the conductive liquid 709, and fix the position of the annular MEMS ultrasonic transducer 708, which should be transparent and light-transmitting. The annular MEMS ultrasonic transducer 708 can be a piezoelectric ultrasonic transducer (PMUT) array, which can increase the number of detection points by arranging the array. The transducer has a through hole in the middle for light transmission. The annular MEMS ultrasonic transducer 708 can emit and receive ultrasonic signals, and its center is coaxial with the single-mode optical fiber 3 and the annular MEMS micromirror 704. The surface can maintain a certain curvature, and the curvature focal point is located on the focal plane 710, which is used to enhance the reception of ultrasonic signals and realize ultrasonic imaging. The conductive liquid 709 is used for the transmission of sound waves and should be an insulating liquid such as mineral oil or vegetable oil.

[0046] As the core component of the imaging probe, the structure of the annular MEMS micromirror 704 and the annular MEMS ultrasonic transducer 708 is as shown in Figure 3

[0047] Wherein the annular MEMS micromirror 704 is composed of a substrate 7041, a driving arm 7042, a connecting fixed terminal 7043, and a reflecting mirror surface 7044. The substrate 7041 is used to place the solder pad, and the edge part can have a gap for cable 702 wiring. The driving arm 7042 provides angular deflection in X and Y two-axis directions. The reflecting mirror surface 7044 has a through hole in the center, which is slightly larger than the diameter of the optical fiber and can be 1mm. The annular MEMS ultrasonic transducer 708 is composed of a piezoelectric layer 7081, an elastic layer 7082, and a cavity layer 7083. The stretching and contraction of the piezoelectric layer 7081 can drive the elastic layer 7082 to deform, form vibration, and generate ultrasonic signals through the cavity layer 7083. The size of the central through hole needs to consider the diameter of the optical path and the emission and absorption performance of ultrasonic, which can be 1 / 4-1 / 2 of the total diameter of the annular MEMS ultrasonic transducer.

[0048] ​The imaging probe end of the dual-mode otic detector is designed with compact photoelectric and structural coaxial design, has a very small probe size, and can realize simultaneous imaging of OCT and ultrasound through the through-hole design of the built-in annular MEMS micromirror and annular MEMS ultrasonic transducer, has a unique advantage for forward scanning imaging of a narrow cavity such as an ear, and realizes high-resolution and large imaging depth of tissue detection.

[0049] Embodiment 2

[0050] As Figure 4 shown, in order to realize a larger OCT scanning imaging range while maintaining a small size, the application further discloses a MEMS-based large-field-of-view dual-mode otic detector, and the imaging probe end is designed with compact photoelectric and structural coaxial design. The MEMS-based large-field-of-view dual-mode otic detector mainly comprises an OCT imaging module, an ultrasonic imaging module, a controller, and an imaging probe.

[0051] The probe is composed of a single-mode optical fiber 3, a base 712, a fiber self-focusing lens 713, a reflecting prism 714, a MEMS micromirror 715, a sound-absorbing layer 707, an annular MEMS ultrasonic transducer 708, a conducting liquid 709, and a window glass 711. The cables 701 and 702 are respectively connected to the annular MEMS ultrasonic transducer 708 and the MEMS micromirror 715 for control and signal reception. The cable 701 is connected to the MEMS controller 11 and the filter amplifier 12, and the cable 702 is connected to the MEMS controller 11.

[0052] The single-mode optical fiber 3, the fiber self-focusing lens 713, and the reflecting prism 714 are connected together for beam deflection. The base 712 fixes the optical fiber 3 and the MEMS micromirror 715. The design of the fiber self-focusing lens 713 can realize the convergence of the light beam at the imaging focal plane 910. The two-axis large-angle deflection of the MEMS micromirror 715 realizes the OCT scanning imaging of the light beam on the object on the imaging focal plane. The typical value of the deflection angle of the light beam realized by the reflecting prism is 90°, and the included angle between the MEMS micromirror 715 and the optical axis is typically 45°. The remaining parts are consistent with the previous structure.

[0053] The imaging probe end of the dual-mode otic detector is designed with compact photoelectric and structural coaxial design, has a very small probe size, and can realize simultaneous imaging of OCT and ultrasound through the through-hole design of the built-in annular MEMS micromirror and annular MEMS ultrasonic transducer, has a unique advantage for forward scanning imaging of a narrow cavity such as an ear, and realizes high-resolution and large imaging depth of tissue detection.

[0054] The MEMS-based dual-mode otic detector disclosed in this embodiment is composed of an OCT imaging module, an ultrasonic imaging module, an imaging probe, a controller, and the like. The imaging probe comprises a single-mode optical fiber, a base, a MEMS micromirror, an imaging lens group, a reflecting mirror, an annular MEMS ultrasonic transducer, a window glass, and the like.

[0055] The MEMS micromirror, the ring-shaped MEMS ultrasonic transducer and other devices are integrated in the imaging probe end of the detector, the photoelectricity and structure of the probe end are coaxially designed, the through hole of the MEMS micromirror and the ultrasonic transducer is set, the small size and large scanning angle of the MEMS micromirror are used, the characteristics of the small size of the ring-shaped MEMS ultrasonic transducer are used, the front end scanning of the micromirror provides a larger OCT imaging field of view while keeping a smaller probe diameter, the ring-shaped MEMS ultrasonic transducer can realize ultrasonic imaging, the through hole is used for the light beam to pass through, and the effect of dual-mode simultaneous imaging of OCT front-view scanning imaging and ultrasonic imaging is achieved.

[0056] The embodiment can reduce the diagnosis and analysis time of doctors, reduce the misdiagnosis rate, has high resolution of OCT and large imaging depth of ultrasonic at the same time, solves the existing clinical pain points, and makes it become a medical diagnosis tool with high resolution, real-time, large imaging depth, high sensitivity and specificity.

[0057] The specific description is used for further detailed description of the purpose, technical scheme and beneficial effects of the application, and it should be understood that the above description is only a specific embodiment of the application and is not used to limit the protection scope of the application, and any modification, equivalent replacement, improvement and the like within the spirit and principle of the application should be included in the protection scope of the application.

Claims

1. A dual modality otic detector based on MEMS, characterized by: Mainly by OCT imaging module, ultrasound imaging module, controller, imaging probe is composed of; The OCT imaging module is used for high-resolution medical imaging;The OCT imaging module comprises a light source (1), an optical isolator (2), a single-mode optical fiber (3), a fiber coupler (4), a polarization controller (5), an optical delay line (6), an imaging probe (7), a detector (9), a first data acquisition card (10) and a processing computer (14); The light source (1) emits a beam of infrared band partially coherent light, which is connected with the optical isolator (2), the single-mode optical fiber (3) and the fiber coupler (4), and is split by the fiber coupler (4), and the light beam is divided into two paths, one path of light is adjusted by the polarization state of the polarization controller (5), and the imaging probe (7) is used for imaging detection of the ear (8), the MEMS controller (11) controls the scanning of the MEMS micro-mirror built in the imaging probe (7), so as to select the imaging scanning area of interest;The other light is adjusted by the polarization state of the polarization controller (5), and the optical path is adjusted and matched by the optical delay line (6), so that the optical paths of the two light beams are equal;The signal collected by the imaging probe (7) returns along the original path and interferes with the other light at the fiber coupler (4), the detector (9) converts the optical interference signal into an electrical signal, and then the first data acquisition card (10) is used, the processing computer (14) receives the collected signal and is calculated and processed, and the middle ear and inner ear OCT image is generated;When the light source (1) is a sweep frequency light source, a synchronous trigger signal is generated, which is used for synchronous control of the first data acquisition card (10) for acquisition and imaging; The ultrasound imaging module is used for large-depth medical imaging;The ultrasound imaging module comprises an imaging probe (7), a filter amplifier (12), a second data acquisition card (13) and a processing computer (14);The MEMS controller (11) controls the annular MEMS ultrasonic transducer built in the imaging probe (7), which is used for generating high-frequency ultrasonic signals, the ultrasonic signals are reflected by the ear (8) and received by the annular MEMS ultrasonic transducer, the ultrasonic signals are converted into electrical signals, and the signals are transmitted to the processing computer (14) by the filter amplifier (12) for calculation, and the middle ear and inner ear ultrasonic image is generated; The imaging probe is a core component of the dual-mode otic detector; the imaging probe mainly comprises a single-mode optical fiber (3), a base (703), a ring-shaped MEMS micromirror (704), a mirror (705), an imaging lens group (706), a sound absorption layer (707), a ring-shaped MEMS ultrasonic transducer (708), a conducting liquid (709) and a window glass (711); wherein the OCT imaging device is located in the front half of the probe, and the ultrasonic imaging device is located in the rear half of the probe; a first cable (701) and a second cable (702) are respectively cable lines for controlling and receiving signals of the ring-shaped MEMS ultrasonic transducer (708) and the ring-shaped MEMS micromirror (704), the first cable (701) is connected with a MEMS controller (11) and a filter amplifier (12), and the second cable (702) is connected with the MEMS controller (11); The single-mode optical fiber (3) is fixed at the center position of the probe by the base (703), and the ring-shaped MEMS micromirror (704) is also fixed on the surface of the base, a through hole for placing the single-mode optical fiber (3) is arranged in the middle, and the driving mode is electrothermal, electrostatic driving or other driving modes; the light beam emitted by the single-mode optical fiber (3) is incident on the mirror surface of the mirror (705) at a certain divergence angle, and then is reflected to the surface of the ring-shaped MEMS micromirror (704), the surface of the ring-shaped MEMS micromirror (704) has a large-area reflecting layer and can realize angular deflection in X and Y two-axis directions, the light beam passes through the secondary reflection of the micromirror (704) and the imaging lens group (706), and converges on the imaging focal plane (710), so that the object on the imaging focal plane can be OCT scanned and imaged; the main function of the sound absorption layer (707) is to absorb the ultrasonic waves emitted backward by the wafer, isolate the conducting liquid (709) and fix the position of the ring-shaped MEMS ultrasonic transducer (708), and the sound absorption layer (707) needs to be transparent and light-transmitting, the ring-shaped MEMS ultrasonic transducer (708) is a piezoelectric ultrasonic transducer PMUT array, the number of detection points is increased through the arrangement of the array, a through hole is arranged in the middle of the transducer for light passing through, the ring-shaped MEMS ultrasonic transducer (708) can emit and receive ultrasonic signals, the center of the ring-shaped MEMS ultrasonic transducer (708) is coaxial with the single-mode optical fiber (3) and the ring-shaped MEMS micromirror (704), the surface of the ring-shaped MEMS ultrasonic transducer (708) can maintain a certain curvature, the curvature focal point is located on the focal plane (710), and the ring-shaped MEMS ultrasonic transducer (708) is used for enhancing the reception of ultrasonic signals and realizing ultrasonic imaging; the conducting liquid (709) is used for conducting sound waves and needs to be an insulating liquid; The annular MEMS micro mirror (704) is mainly composed of a substrate (7041), a driving arm (7042), a connecting fixed terminal (7043) and a mirror surface (7044), the substrate (7041) is used for placing a pad, an edge part is left with a gap for wiring of the second cable (702), the driving arm (7042) provides angular deflection of two X and Y axes, and the mirror surface (7044) is provided with a through hole in the center, the through hole is slightly larger than the diameter of the optical fiber; the annular MEMS ultrasonic transducer (708) is mainly composed of a piezoelectric layer (7081), an elastic layer (7082) and a cavity layer (7083), stretching and contraction of the piezoelectric layer (7081) can drive the elastic layer (7082) to deform, form vibration and generate an ultrasonic signal through the cavity layer (7083).

2. The dual modality otic detector based on MEMS of claim 1, wherein: The MEMS-based bimodal ear detection instrument can also load different types of light sources, excitation sources, light splitting devices and detectors through the optical fiber wavelength division multiplexing mode to realize photoacoustic imaging and fluorescence imaging.

3. The dual modality otic detector based on MEMS of claim 1, wherein: The imaging probe of the MEMS-based bimodal ear detection instrument can also realize lateral scanning of the probe by designing the top end of the probe into a curved surface, designing the optical deflection angle realized by the mirror and the angle between the MEMS micro mirror and the optical axis into other values.

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