Wafer steel ring support rack device

Abstract

The application relates to a steel ring support rack device for wafers, which comprises a steel ring rack base plate and a steel ring rack slide plate from bottom to top in sequence, the steel ring rack slide plate can move along the X-axis direction relative to the steel ring rack base plate; four guide clamping grooves are arranged around the middle position of the steel ring rack slide plate, and a steel ring rack limiting mechanism is arranged in the guide clamping grooves; first and second steel ring limiting frames are respectively arranged on the steel ring rack slide plates on the two sides of one outer steel ring rack limiting frame or one inner steel ring rack limiting frame. The steel ring support rack device has the fool-proof function of steel ring placement through the structural arrangement of the first and second steel ring limiting frames; and the steel ring support rack device can freely switch 8-inch steel rings and 12-inch steel rings.

Description

Technical Field

[0001] This invention relates to the field of wafer processing technology, and in particular to a steel ring support rack device for wafers. Background Technology

[0002] In existing technologies, automated wafer lamination and peeling equipment requires a support device for supplying steel rings. For example, patent CN107452660A, entitled "Wafer Carrier and its Manufacturing Method," currently does not allow for free switching between 8-inch and 12-inch wafers, lacks detection for overlapping steel rings, and is inconvenient to deploy and retract.

[0003] In view of the above-mentioned shortcomings, the designer actively researched and innovated in order to create a wafer steel ring support rack device, which would have greater industrial application value. Summary of the Invention

[0004] To address the aforementioned technical problems, the present invention aims to provide a wafer steel ring support rack device.

[0005] To achieve the above objectives, the present invention adopts the following technical solution:

[0006] A wafer steel ring support rack device includes, from bottom to top, a steel ring rack substrate and a steel ring rack slide plate, wherein the steel ring rack slide plate can move relative to the steel ring rack substrate along the X-axis direction.

[0007] Guide slots are provided around the center of the steel ring material rack slide plate. A steel ring material rack limiting mechanism is installed in the guide slots. The steel ring material rack limiting mechanism includes an outer steel ring material rack limiting frame and an inner steel ring material rack limiting frame from the outside to the inside. The outer steel ring material rack limiting frame and the inner steel ring material rack limiting frame are installed on the first movable base plate from the outside to the inside. The first movable base plate is installed in the guide slots. An outer steel ring pad is provided on the first movable base plate near the inside of the outer steel ring material rack limiting frame. An inner steel ring pad is provided on the first movable base plate near the inside of the inner steel ring material rack limiting frame.

[0008] One of the outer steel ring material rack limiting frames or the inner steel ring material rack limiting frames are respectively equipped with a first steel ring limiting frame and a second steel ring limiting frame on the sliding plates of the steel ring material rack on both sides. The bottom of the first steel ring limiting frame is installed on the sliding plate of the steel ring material rack through a supporting base plate, and the bottom of the second steel ring limiting frame is installed in the inclined groove opened on the sliding plate of the steel ring material rack through a second movable base plate.

[0009] As a further improvement of the present invention, slide rails are provided on both sides of the steel ring material rack base plate along the Y-axis direction. The slide rails are arranged along the X-axis direction and are fixedly installed on the steel ring material rack base plate by slide rail support frames. The bottom of the steel ring material rack slide plate is connected to the slide rails on both sides along the Y-axis direction by slide rail guide frames.

[0010] As a further improvement of the present invention, a slide plate limiting baffle for limiting the sliding plate of the steel ring material rack is provided on one side of the steel ring material rack base plate along the negative X-axis, a two-gang amplifier is provided on one side of the steel ring material rack base plate along the positive X-axis, and a handle is provided on one side of the steel ring material rack slide plate along the negative X-axis; a knob plunger is also provided on one side of the steel ring material rack base plate along the negative X-axis, and a plunger limiting block adapted to the knob plunger is also provided on one side of the steel ring material rack slide plate along the negative X-axis.

[0011] As a further improvement of the present invention, a first backing plate is provided on both the outer and inner sides of the first movable base plate, a guide slot is provided in the guide groove, and the bottom of the first movable base plate is connected to the guide slot through a first guide block located at the bottom of the steel ring material frame slide.

[0012] As a further improvement of the present invention, a second backing plate is provided on both the outer and inner sides of the second movable base plate, and an inclined groove opening is provided in the inclined groove. The bottom of the second movable base plate is connected to the inclined groove opening through a second guide block located at the bottom of the steel ring material frame slide plate. An adjustment knob is also provided on the second movable base plate. After passing through the second movable base plate, the adjustment knob is connected to the knob nut located at the bottom of the steel ring material frame slide plate.

[0013] As a further improvement of the present invention, two sensor stands are provided on the side of the steel ring material rack base plate near the positive X-axis direction. The two sensor stands are respectively located on both sides of the steel ring material rack base plate along the Y-axis direction, and several first sensors are installed on the sensor stands along the Z-axis direction.

[0014] As a further improvement of the present invention, a sensor bracket is provided on the steel ring material rack base plate below the steel ring material rack slide plate. Two second sensors are provided on the sensor bracket. Through holes are respectively opened on the steel ring material rack slide plate directly above the two second sensors. The two through holes are located directly below the outer steel ring and the inner steel ring, respectively.

[0015] As a further improvement of the present invention, a third sensor is also provided on the outer steel ring material frame limit frame along the negative X-axis side.

[0016] By means of the above-described solution, the present invention has at least the following advantages:

[0017] 1. The present invention, through the structural arrangement of the first steel ring limiting frame and the second steel ring limiting frame, has a foolproof function for placing the steel ring;

[0018] 2. This invention allows for free switching between 8-inch and 12-inch steel rings;

[0019] 3. The sliding plate of the steel ring material rack of the present invention can move relative to the steel ring material rack base plate along the X-axis direction, making it simple and convenient to place the steel ring;

[0020] 4. This invention has a steel ring detection function, which can detect whether there are enough steel rings;

[0021] 5. This invention has a steel ring thickness detection function, which can prevent the rings from overlapping.

[0022] The above description is merely an overview of the technical solution of the present invention. In order to better understand the technical means of the present invention and to implement it in accordance with the contents of the specification, the preferred embodiments of the present invention are described in detail below with reference to the accompanying drawings. Attached Figure Description

[0023] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the present invention and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0024] Figure 1 This is a schematic diagram of the structure of a steel ring support rack device for wafers according to the present invention;

[0025] Figure 2 yes Figure 1 A structural diagram of the other side;

[0026] Figure 3 yes Figure 1 or Figure 2 Schematic diagram of the sliding plate of the Sinosteel ring material rack;

[0027] Figure 4 yes Figure 1 A schematic diagram of the upper part of the steel ring material rack slide after removing the first steel ring limiting frame and the second steel ring limiting frame;

[0028] Figure 5 yes Figure 4 Schematic diagram of the bottom structure of the sliding plate of the Zhonggang ring material rack;

[0029] Figure 6 yes Figure 1 A schematic diagram of the structure behind the first and second steel ring limiting frames in the upper part of the sliding plate of the steel ring material rack;

[0030] Figure 7 yes Figure 6 A schematic diagram of the bottom structure of the sliding plate of the steel ring material rack.

[0031] The meanings of the labels in the figures are as follows.

[0032] 1. Steel ring feeder base plate 2. Steel ring feeder slide plate

[0033] 3. Slide limit baffle 4. Slide rail support frame

[0034] 5. Slide rail 6. Slide rail guide bracket

[0035] 7 Handle 8 Knob plunger

[0036] 9. Plunger limiting block; 10. Outer steel ring material holder limiting bracket.

[0037] 11 Inner steel ring material rack limit frame 12 First steel ring limit frame

[0038] 13 Second steel ring limiting frame 14 Sensor upright

[0039] 15 Outer steel ring 16 Inner steel ring

[0040] 17 First sensor 18 Two-stage amplifier

[0041] 19 Second sensor 20 Sensor bracket

[0042] 21 Third sensor 22 Guide slot

[0043] 23 Guide slot 24 Inclined slot

[0044] 25 Inclined slot 26 First movable base plate

[0045] 27 Outer steel ring washer plate 28 Inner steel ring washer plate

[0046] 29 First support plate 30 First guide block

[0047] 31 Supporting base plate 32 Second movable base plate

[0048] 33 Second backrest 34 Adjustment knob

[0049] 35 Second guide block 36 Knob nut Detailed Implementation

[0050] The specific embodiments of the present invention will be described in further detail below with reference to the accompanying drawings and examples. The following examples are for illustrative purposes only and are not intended to limit the scope of the invention.

[0051] To enable those skilled in the art to better understand the present invention, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. The components of the embodiments of the present invention described and shown in the accompanying drawings can generally be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0052] Example

[0053] like Figures 1 to 7 As shown,

[0054] A wafer support rack device comprises, from bottom to top, a steel ring rack substrate 1 and a steel ring rack slide plate 2. The steel ring rack slide plate 2 is movable relative to the steel ring rack substrate 1 along the X-axis. Slide rails 5 are provided on both sides of the steel ring rack substrate 1 along the Y-axis. The slide rails 5 are arranged along the X-axis and fixedly mounted on the steel ring rack substrate 1 by slide rail support brackets 4. The bottom of the steel ring rack slide plate 2 is connected to the slide rails 5 on both sides along the Y-axis by slide rail guide brackets 6. A sliding plate limiting baffle 3 for limiting the movement of the steel ring material rack slide 2 is provided on one side of the steel ring material rack base plate 1 along the negative X-axis. A two-gang amplifier 18 is provided on one side of the steel ring material rack base plate 1 along the positive X-axis. A handle 7 is provided on one side of the steel ring material rack slide 2 along the negative X-axis. A knob plunger 8 is also provided on one side of the steel ring material rack base plate 1 along the negative X-axis. A plunger limiting block 9 adapted to the knob plunger 8 is also provided on one side of the steel ring material rack slide 2 along the negative X-axis. In actual use, the knob plunger 8 can be turned off first, and then the handle 7 can be pulled open to place an 8-inch or 12-inch steel ring (i.e., the inner steel ring 16 or the outer steel ring 15 in the figure) as needed.

[0055] Guide slots 22 are provided around the center of the steel ring material rack slide plate 2. A steel ring material rack limiting mechanism is installed within the guide slots 22. The steel ring material rack limiting mechanism, from the outside to the inside, includes an outer steel ring material rack limiting frame 10 and an inner steel ring material rack limiting frame 11. The outer steel ring material rack limiting frame 10 and the inner steel ring material rack limiting frame 11 are installed sequentially from the outside to the inside on a first movable base plate 26. The first movable base plate 26 is installed within the guide slots 22. An outer steel ring pad 27 is provided on the first movable base plate 26 near the inside of the outer steel ring material rack limiting frame 10, and an inner steel ring pad 28 is provided on the first movable base plate 26 near the inside of the inner steel ring material rack limiting frame 11. First backing plates 29 are provided on both the outer and inner sides of the first movable base plate 26. A guide slot 23 is provided within the guide slots 22. The bottom of the first movable base plate 26 is connected to the guide slot 23 via a first guide block 30 located at the bottom of the steel ring material rack slide plate 2. The first backplate 29 is used to limit the first movable base plate 26, and the limit is set after adjustment with a 12-inch or 8-inch steel ring.

[0056] On the steel ring rack slides 2 on both sides of one of the outer steel ring rack limiting frames 10 or the inner steel ring rack limiting frames 11, a first steel ring limiting frame 12 and a second steel ring limiting frame 13 are respectively provided. The bottom of the first steel ring limiting frame 12 is mounted on the steel ring rack slide 2 via a supporting base plate 31, and the bottom of the second steel ring limiting frame 13 is mounted in the inclined groove 24 opened on the steel ring rack slide 2 via a second movable base plate 32. The outer and inner sides of the second movable base plate 32 are provided with second backing plates 33, and the inclined groove 24 is provided with an inclined groove opening 25. The bottom of the second movable base plate 32 is connected to the inclined groove opening 25 via a second guide block 35 located at the bottom of the steel ring rack slide 2. An adjustment knob 34 is also provided on the second movable base plate 32, and the adjustment knob 34 passes through the second movable base plate 32 and is connected to a knob nut 36 located at the bottom of the steel ring rack slide 2. The second backplate 33 is used to limit the second movable base plate 32, and is limited after adjustment with a 12-inch or 8-inch steel ring.

[0057] The inner contact surface of the first steel ring limiting bracket 12 corresponds to the large notch of the 12-inch or 8-inch steel ring, and the second steel ring limiting bracket 13 corresponds to the small notch of the 12-inch or 8-inch steel ring. If the steel ring is placed upside down, it cannot be put in, which can effectively achieve the effect of preventing mistake-proofing. The steel ring material rack limiting mechanism installed around the 12-inch steel ring can limit the steel ring.

[0058] The sensor unit of the present invention:

[0059] Two sensor stands 14 are provided on the side of the steel ring material rack base plate 1 near the positive X-axis. The two sensor stands 14 are located on both sides of the steel ring material rack base plate 1 along the Y-axis. Several first sensors 17 are installed on the sensor stands 14 along the Z-axis. The first sensors 17 can sense whether the steel rings are sufficient. When the steel rings are insufficient, an alarm is triggered.

[0060] A sensor bracket 20 is installed on the steel ring rack base plate 1 below the steel ring rack slide plate 2. Two second sensors 21 are mounted on the sensor bracket 20. Through holes are respectively opened on the steel ring rack slide plate 2 directly above the two second sensors 21, located directly below the outer steel ring 15 and the inner steel ring 16. The second sensors 21 can trigger an alarm to detect whether a steel ring is placed, ensuring that a steel ring is always present on the equipment.

[0061] A third sensor 19 is also installed on the outer steel ring material rack limit frame 10 along the negative X-axis side.

[0062] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicating orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, are only for the convenience of describing the invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the invention. Furthermore, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly referring to the number of technical features indicated. Thus, features defined with "first," "second," etc., may explicitly or implicitly include one or more of that feature. In the description of this invention, unless otherwise stated, "a plurality of" means two or more.

[0063] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. For those skilled in the art, the specific meaning of the above terms in this invention can be understood through the specific circumstances.

[0064] The above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the technical principles of the present invention, and these improvements and modifications should also be considered within the scope of protection of the present invention.

Claims

1. A wafer support rack device with steel rings, characterized in that: From bottom to top, it includes a steel ring material rack base plate (1) and a steel ring material rack slide plate (2), wherein the steel ring material rack slide plate (2) can move relative to the steel ring material rack base plate (1) along the X-axis direction; Guide slots (22) are provided around the center of the steel ring material rack slide (2). A steel ring material rack limiting mechanism is installed in the guide slots (22). The steel ring material rack limiting mechanism includes an outer steel ring material rack limiting frame (10) and an inner steel ring material rack limiting frame (11) from the outside to the inside. The outer steel ring material rack limiting frame (10) and the inner steel ring material rack limiting frame (11) are installed on the first movable base plate (26) from the outside to the inside. The first movable base plate (26) is installed in the guide slots (22). An outer steel ring pad (27) is provided on the first movable base plate (26) near the inside of the outer steel ring material rack limiting frame (10). An inner steel ring pad (28) is provided on the first movable base plate (26) near the inside of the inner steel ring material rack limiting frame (11). One of the outer steel ring material rack limiting frames (10) or inner steel ring material rack limiting frames (11) is provided with a first steel ring limiting frame (12) and a second steel ring limiting frame (13) on the steel ring material rack sliding plates (2) on both sides. The bottom of the first steel ring limiting frame (12) is installed on the steel ring material rack sliding plate (2) through a supporting base plate (31), and the bottom of the second steel ring limiting frame (13) is installed in the inclined groove (24) opened on the steel ring material rack sliding plate (2) through a second movable base plate (32).

2. The wafer steel ring support rack device as described in claim 1, characterized in that, The steel ring material rack base plate (1) is provided with slide rails (5) on both sides along the Y-axis direction. The slide rails (5) are provided along the X-axis direction and are fixedly installed on the steel ring material rack base plate (1) by slide rail support frame (4). The bottom of the steel ring material rack slide plate (2) is connected to the slide rails (5) on both sides along the Y-axis direction by slide rail guide frame (6).

3. A wafer steel ring support rack device as described in any one of claims 1 or 2, characterized in that, A sliding plate limiting baffle (3) for limiting the sliding plate (2) of the steel ring material rack is provided on one side along the negative X-axis of the steel ring material rack base plate (1). A two-gang amplifier (18) is provided on one side along the positive X-axis of the steel ring material rack base plate (1). A handle (7) is provided on one side along the negative X-axis of the steel ring material rack sliding plate (2). A knob plunger (8) is also provided on one side along the negative X-axis of the steel ring material rack base plate (1). A plunger limiting block (9) adapted to the knob plunger (8) is also provided on one side along the negative X-axis of the steel ring material rack sliding plate (2).

4. The wafer steel ring support rack device as described in claim 1, characterized in that, The first movable base plate (26) is provided with a first backing plate (29) on both the outer and inner sides. The guide slot (22) is provided with a guide groove (23). The bottom of the first movable base plate (26) is connected to the guide groove (23) through a first guide block (30) located at the bottom of the steel ring material rack slide plate (2).

5. The wafer steel ring support rack device as described in claim 1, characterized in that, The second movable base plate (32) is provided with a second backing plate (33) on both the outer and inner sides. The inclined groove (24) is provided with an inclined groove opening (25). The bottom of the second movable base plate (32) is connected to the inclined groove opening (25) through a second guide block (35) located at the bottom of the steel ring material rack slide plate (2). The second movable base plate (32) is also provided with an adjustment knob (34). The adjustment knob (34) passes through the second movable base plate (32) and is connected to a knob nut (36) located at the bottom of the steel ring material rack slide plate (2).

6. A wafer steel ring support rack device as described in claim 1 or 2, characterized in that, Two sensor stands (14) are provided on the side of the steel ring material rack base plate (1) near the positive X-axis direction. The two sensor stands (14) are located on both sides of the steel ring material rack base plate (1) along the Y-axis direction. Several first sensors (17) are installed on the sensor stands (14) along the Z-axis direction.

7. The wafer steel ring support rack device as described in claim 1, characterized in that, A sensor bracket (20) is provided on the steel ring material rack base plate (1) below the steel ring material rack slide plate (2). Two second sensors (21) are provided on the sensor bracket (20). Through holes are respectively opened on the steel ring material rack slide plate (2) directly above the two second sensors (21). The two through holes are located directly below the outer steel ring (15) and the inner steel ring (16).

8. The wafer steel ring support rack device as described in claim 1, characterized in that, A third sensor (19) is also provided on the outer steel ring material rack limit frame (10) on one side along the negative X-axis.

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