Z-axis resonant accelerometer with improved detection structure

By designing a detection structure with an inertial mass block and a longitudinally extended resonant element, the problems of insufficient sensitivity, space occupation, and dynamic performance of existing Z-axis resonant accelerometers are solved, and acceleration detection with high sensitivity and high dynamic performance is achieved.

CN115808542BActive Publication Date: 2026-05-26STMICROELECTRONICS SRL
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
STMICROELECTRONICS SRL
Filing Date
2022-09-14
Publication Date
2026-05-26

AI Technical Summary

Technical Problem

Existing Z-axis resonant accelerometers have shortcomings in terms of sensitivity, space occupation, interference suppression capability, and dynamic performance, and are not entirely satisfactory, especially in portable applications.

Method used

A detection structure is designed, comprising an inertial mass block suspended above a substrate by first and second torsion-type anchoring elastic elements, having a longitudinally extending first resonant element, detecting the resonant frequency change caused by external acceleration by driving electrodes and detection electrodes, and measuring acceleration by utilizing the rotational motion of the inertial mass block and the mechanical stiffness change of the resonant element.

Benefits of technology

It improves the sensitivity of acceleration detection, reduces space occupation, enhances interference suppression capability, and improves dynamic performance and linearity, achieving a high linear range of up to 50g and dynamic performance of 17g.

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Abstract

Embodiments of this disclosure relate to a Z-axis resonant accelerometer with an improved detection structure. The detection structure includes an inertial mass suspended above a substrate and having a window provided across the entire thickness of the inertial mass. The inertial mass is coupled to a main anchor via a torsion-type first and second anchoring elastic element, the main anchor being disposed within the window and integral with the substrate. The detection structure also includes at least a first resonant element having a longitudinal extension, coupled between the first elastic element and a first constraint element disposed within the window. The first constraint element is suspended above the substrate and fixedly coupled to the substrate via a first auxiliary anchor element extending below the longitudinally extending first resonant element and integrally coupled between the first constraint element and the main anchor.
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