A diffuser plate device and a method of manufacturing the same, a projection apparatus, a display apparatus

Abstract

The application provides a diffusion plate device and a manufacturing method thereof, a projection device and a display device. The diffusion plate device comprises a substrate and a microlens array. The microlens array comprises multiple rows and multiple columns of microlenses arranged on the surface of the substrate. The positions of the microlenses in adjacent two rows are irregularly arranged, and / or the positions of the microlenses in adjacent two columns are irregularly arranged. The diffusion plate device provided by the application is characterized in that the positions of the microlenses in adjacent two rows and / or the positions of the microlenses in adjacent two columns are irregularly and randomly arranged on the surface of the substrate, so that the shapes of the microlenses are not the same, thereby achieving the purpose of inhibiting the diffraction of the diffusion light field. Moreover, the random displacement of the microlenses in the row and / or column direction also makes the diffusion plate easier to process.

Description

Technical Field

[0001] The present application relates to the field of optical device design and manufacturing, and more specifically, to a diffuser device and a method for manufacturing the same, a projection device, and a display device. Background Art

[0002] Microlens array diffuser plates are widely used in various devices such as head-up displays (HUDs) and projectors.

[0003] However, a microlens array type diffuser plate having a plurality of regularly arranged microlenses has the following characteristics: the plurality of regularly arranged microlenses function as a diffraction grating, causing the microlens array type diffuser plate to form a phenomenon of diffraction of the diffused light field.

[0004] In order to suppress the phenomenon of diffuse light field diffraction, some related technologies adopt a technical solution of causing deviations in the diameter, surface roughness, curvature radius, etc. of each microlens.

[0005] However, when the above solution is adopted, the surface shapes of the microlenses will be greatly different, making the microlens array type diffusion plate difficult to manufacture. Summary of the Invention

[0006] The present application provides a diffusion plate device and a preparation method thereof, a projection device, and a display device that can at least partially solve the above-mentioned problems existing in the related art.

[0007] On one hand, the present application provides a diffuser plate device, comprising: a substrate; and a microlens array, the microlens array comprising multiple rows and multiple columns of microlenses arranged on a surface of the substrate; wherein the positions of two adjacent rows of microlenses are irregularly configured, and / or the positions of two adjacent columns of microlenses are irregularly configured.

[0008] In some embodiments, the distances between adjacent microlenses in each row of microlenses are equal in the row direction of the microlens array, and / or the distances between adjacent microlenses in each column of microlenses are equal in the column direction of the microlens array.

[0009] In some embodiments, the distance S between two adjacent microlenses in the column direction in two adjacent rows of microlenses is x The diameter of the microlens d satisfies S x ≤2 / 3d; the distance S between two adjacent microlenses in the row direction and in the column direction in two adjacent columns of microlenses y The diameter of the microlens d satisfies S y ≤2 / 3d.

[0010] In some embodiments, the microlenses include a first axis and a second axis that are perpendicular to each other, and the first axis and the second axis are located in a plane parallel to the substrate, wherein the first axes of the plurality of microlenses are at different angles to each other.

[0011] In some embodiments, the angle between the first axis and the row direction of the microlens array ranges from -20° to 20°.

[0012] In some embodiments, the plurality of microlenses have different radii of curvature in the direction of the first axis and / or in the direction of the second axis, such that the maximum heights of the plurality of microlenses are different.

[0013] In some embodiments, the curvature radius C of the microlens in the direction of the first axis is x The average value C of the curvature radius of the plurality of micro lenses in the direction of the first axis x0 Satisfy C x0 -3% C x0 ≤C x ≤C x0 +3%C x0 The curvature radius C of the microlens in the direction of the second axis y The average value C of the curvature radius of the plurality of microlenses in the direction of the second axis y0 Satisfy C y0 -3% C y0 ≤C y ≤C y0 +3%C y0 .

[0014] In some embodiments, a plurality of the microlenses are arranged adjacent to each other.

[0015] Another aspect of the present application provides a method for manufacturing a diffuser plate device, comprising: forming a plurality of microlenses in a microlens array on a surface of a substrate, the microlens array comprising a plurality of rows and a plurality of columns of microlenses; wherein, during the formation process, the positions of two adjacent rows of microlenses are irregularly arranged, and / or the positions of two adjacent columns of microlenses are irregularly arranged.

[0016] In some embodiments, each microlens in each row of microlenses is moved by the same displacement in the row direction, and / or each microlens in each column of microlenses is moved by the same displacement in the column direction.

[0017] In some embodiments, the displacement size Δx of each microlens in the row direction and the size d of the microlens diameter satisfy Δx≤1 / 3d, and / or the displacement size Δy of each microlens in the column direction and the size d of the microlens diameter satisfy Δy≤1 / 3d.

[0018] In some embodiments, the method further includes: the microlens includes a first axis and a second axis perpendicular to each other, the first axis and the second axis are located in a plane parallel to the substrate, and the plurality of microlenses are rotated around their respective central axes at different angles.

[0019] In some embodiments, the angle of rotation of the plurality of microlenses around their respective central axes ranges from -20° to 20°.

[0020] In some embodiments, the plurality of microlenses have different radii of curvature in the direction of the first axis and / or the direction of the second axis, so that the heights of the highest points of the plurality of microlenses are different.

[0021] In some embodiments, the curvature radius C of the microlens in the direction of the first axis is x The average value C of the curvature radius of the plurality of micro lenses in the direction of the first axis x0 Satisfy C x0 -3% C x0 ≤C x ≤C x0 +3%C x0 The curvature radius C of the microlens in the direction of the second axis y The average value C of the curvature radius of the plurality of microlenses in the direction of the second axis y0 Satisfy C y0 -3% C y0 ≤C y ≤C y0 +3%C y0 .

[0022] In some embodiments, a plurality of microlenses are arranged adjacent to each other.

[0023] Another aspect of the present application provides a projection device, wherein the electronic device includes the diffusion plate device as described in any one of the above items.

[0024] Another aspect of the present application provides a display device, wherein the electronic device includes the diffusion plate device as described above.

[0025] At least one embodiment of the present application provides a diffuser plate device that allows adjacent rows and / or columns of microlenses to be positioned irregularly and randomly on the surface of a substrate, thereby preventing the microlenses from having identical shapes, thereby suppressing diffraction of the diffused light field. Furthermore, the random displacement of the microlenses in the row and / or column directions also makes the diffuser plate easier to manufacture.

[0026] In at least one embodiment of the present application, the diffuser plate device provided by adding random amounts in rows and / or columns has a smaller variation in the radius of curvature, thereby making the surface shape of the microlenses on the surface of the diffuser plate device smaller. In addition, the angle of rotation of each microlens around its respective central axis can also be controlled to be smaller, thereby further facilitating the processing of the diffuser plate device. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Other features, objects and advantages of the present application will become more apparent from the detailed description of non-limiting embodiments made with reference to the following drawings, in which:

[0028] Figure 1 is a schematic structural diagram of a diffusion plate device according to one embodiment of the present application;

[0029] Figures 2A to 2D is a schematic diagram of a method for manufacturing a diffuser plate device according to one embodiment of the present application;

[0030] Figure 3A is a schematic diagram of the rotation direction of a microlens around a central axis according to one embodiment of the present application;

[0031] Figure 3B yes Figure 3A Schematic top view of

[0032] Figure 4 is a diffraction light field diagram of a diffuser device according to one embodiment of the present application;

[0033] Figure 5 Schematic diagram of the structure of the diffusion plate device in Example 1 of the present application;

[0034] Figure 6 yes Figure 5 Diffraction light field diagram of the diffuser device in;

[0035] Figure 7 is a schematic structural diagram of the diffusion plate device in Example 2 of the present application; and

[0036] Figure 8 yes Figure 7 Diffraction light field diagram of the diffuser device in . DETAILED DESCRIPTION

[0037] For a better understanding of the present application, various aspects of the present application will be described in more detail with reference to the accompanying drawings. It should be understood that these detailed descriptions are merely descriptions of exemplary embodiments of the present application and are not intended to limit the scope of the present application in any way. Throughout the specification, the same reference numerals refer to the same elements. The expression "and / or" includes any and all combinations of one or more of the associated listed items.

[0038] It should be noted that in this specification, the expressions first, second, third, etc. are only used to distinguish one feature from another feature area, and do not represent any limitation on the features, and especially do not represent any order of precedence. Therefore, without departing from the teachings of this application, the first part discussed in this application can also be referred to as the second part, and vice versa.

[0039] In the accompanying drawings, the thickness, size, and shape of components have been slightly adjusted for ease of illustration. The accompanying drawings are for illustration only and are not drawn strictly to scale. As used herein, the terms "substantially," "approximately," and similar terms are used to indicate approximations, not degrees, and are intended to account for the inherent variations in measurements or calculations that would be recognized by one of ordinary skill in the art.

[0040] It should also be understood that expressions such as "comprises," "including," "having," "includes," and / or "comprising" are open rather than closed expressions in this specification, indicating the presence of the stated features, elements, and / or components, but do not exclude the presence of one or more other features, elements, components, and / or combinations thereof. In addition, when expressions such as "at least one of..." appear after a list of listed features, they modify the entire list of features rather than just the individual elements in the list. In addition, when describing embodiments of the present application, "may" is used to mean "one or more embodiments of the present application." And, the term "exemplary" is intended to refer to an example or illustration.

[0041] Unless otherwise defined, all words used herein (including engineering terms and scientific and technological terms) have the same meaning as commonly understood by those skilled in the art to which this application belongs. It should also be understood that, unless otherwise specified in this application, words defined in commonly used dictionaries should be interpreted as having the same meaning as they do in the context of the relevant technology, and should not be interpreted in an idealized or overly formal sense.

[0042] It should be noted that, unless otherwise specified or inconsistent with the context, the embodiments and features of the embodiments in this application may be combined with each other. Furthermore, unless expressly limited or inconsistent with the context, the specific steps included in the methods described in this application are not necessarily limited to the order in which they are described, but may be performed in any order or in parallel. The present application will be described in detail below with reference to the accompanying drawings and in conjunction with the embodiments.

[0043] In addition, in the present application, when “connected” or “coupled” is used, it may indicate direct contact or indirect contact between corresponding components, unless otherwise clearly defined or inferred from the context.

[0044] Figure 1Shown is a schematic structural diagram of a diffusion plate device according to one embodiment of the present application. Figures 2A to 2D FIG. 1 is a schematic diagram of a method for manufacturing a diffuser plate device according to one embodiment of the present application. Figure 3A and 3B FIG2 shows a schematic diagram of the rotation direction of a microlens around a central axis according to one embodiment of the present application. Figure 4 FIG. 1 shows a diffraction light field diagram of a diffuser device according to an embodiment of the present application.

[0045] In some embodiments, as Figure 1 As shown, the diffuser device includes a substrate 10 and a microlens array 20. The microlens array 20 includes multiple rows and columns of microlenses 21 arranged on the surface of the substrate 10; wherein the positions of two adjacent rows of microlenses are irregularly arranged, and / or the positions of two adjacent columns of microlenses are irregularly arranged.

[0046] In an exemplary embodiment, Figure 1 As shown, the material of the substrate 10 is not particularly limited in this application. For example, resin or optical glass such as quartz glass, borosilicate glass, white glass, etc. can be used as the substrate 10. Figure 1 In the figure, the transparent substrate 10 is shown as a rectangle as an example, but the shape of the transparent substrate 10 is not limited to a rectangle, and may have any shape according to the shape of a display device, a projection device, etc. on which the diffuser plate device is mounted.

[0047] Continue to refer to Figure 1 As shown, a microlens array 20 is formed on the surface of a substrate 10. The microlens array 20 includes a plurality of microlenses 21. The plurality of microlenses 21 are arranged in rows and columns on the surface of the substrate 10 to form an array. For example, the horizontal direction shown in the figure is the row direction X of the microlens array 20, and the vertical direction is the column direction Y of the microlens array 20.

[0048] In some embodiments, as Figures 2A to 2C As shown, when forming the microlens array 20 on the surface of the substrate 10, the microlenses 21 in two adjacent rows are moved by different displacements in the row direction X, so that the positions of the microlenses 21 in the finally formed microlens array 20 are irregularly arranged, and / or the microlenses 21 in two adjacent columns are moved by different displacements in the column direction Y, so that the positions of the microlenses 21 in two adjacent columns are irregularly arranged, referring to FIG. Figure 1 .

[0049] In an optional manner, the midpoint position of each regular row of microlenses 21 is used as the initial value (initial position O x), and randomly shift the midpoint of the microlens 21 along the row direction X within the range from the initial value to Δx, so that the positions of the microlenses 21 in two adjacent rows (positions after shifting O x ') irregularly configured, refer to Figure 2A It can be understood that the above expression "along the row direction X" means in the positive direction or negative direction of the row.

[0050] In an optional manner, the midpoint position of each regular column of microlenses 21 is used as the initial value (initial position O y ), and randomly shift the midpoint of the microlens 21 along the column direction Y within the range from the initial value to Δy, so that the positions of the microlenses 21 in two adjacent columns (positions after shifting O y ') irregularly configured, refer to Figure 2B It is understood that the above expression "along the column direction Y" means in the positive direction or negative direction of the column.

[0051] In an alternative method, the midpoint position of each regular row and column of microlenses 21 is taken as an initial value (not shown), and the midpoint position of the microlens 21 is randomly shifted along the row direction X and the column direction Y within the range from the initial value to Δx and Δy, so that the positions of the microlenses 21 in two adjacent rows and two columns (positions O' after shifting) are irregularly arranged. Figure 2C It can be understood that the above expression "along the row direction X and the column direction Y" means in the positive direction or negative direction of the row and in the positive direction or negative direction of the column.

[0052] In the above scheme, two adjacent rows and / or columns of microlenses 21 can be positioned irregularly and randomly adjacent to each other on the surface of the substrate 10, thereby preventing the shapes of the microlenses 21 from being identical, thereby suppressing diffraction of the diffuse light field. Furthermore, the present invention can also disrupt the periodic structure of the microlenses, thereby suppressing pattern speckle.

[0053] In some embodiments, the distances between adjacent microlenses 21 in each row of microlenses are equal in the row direction X of the microlens array 20, and / or the distances between adjacent microlenses 21 in each column of microlenses are equal in the column direction Y of the microlens array 20. Alternatively, the microlenses 21 in each row of microlenses may be moved by the same displacement in the row direction X, and / or the microlenses 21 in each column of microlenses may be moved by the same displacement in the column direction Y.

[0054] In some embodiments, the displacement Δx of each microlens 21 in the row direction X and the diameter d of the microlens 21 satisfy Δx≤1 / 3d, and / or the displacement Δy of each microlens 21 in the column direction Y and the diameter d of the microlens 21 satisfy Δy≤1 / 3d. Figure 2A 、 Figure 2B and Figure 2C That is, the distance S between two adjacent microlenses 21 in the column direction Y in two adjacent rows of microlenses in the row direction X is x The diameter of the microlens d satisfies S x ≤2 / 3d; the distance S between two adjacent microlenses 21 in the row direction X and in the column direction Y in two adjacent columns of microlenses y The diameter d of the microlens 21 satisfies S y ≤2 / 3d, reference Figure 2C .

[0055] In other words, in the above method, each microlens 21 in the same row / column moves by the same displacement, while the displacements of the microlenses 21 between adjacent rows and columns are different.

[0056] Moreover, in the above solution, the displacement of each microlens 21 in the row direction X and / or column direction Y should be less than or equal to one-third of the diameter of the microlens. This can prevent the diffusion pattern from being converted into an elliptical shape after the microlens 21 moves in the row and / or column direction, thereby ensuring that the diffusion pattern of the diffusion plate is rectangular.

[0057] In some embodiments, the material of the plurality of microlenses 21 may include glue or glass, etc. Therefore, the substrate 10 and the microlens array 20 may be formed integrally. Alternatively, the microlens array 20 may be formed on the substrate 10.

[0058] Illustratively, when the random displacement of rows and / or columns described in the present application is not adopted, the initial microlens array may be a quadrilateral. Optionally, the initial microlens array may be a regular quadrilateral or rectangular array.

[0059] In some embodiments, the microlens 21 includes a first axis x and a second axis y that are perpendicular to each other. The first axis x and the second axis y are located in a plane parallel to the substrate, wherein the first axes x of the plurality of microlenses 21 form different angles with each other.

[0060] refer to Figure 2D As shown, in some embodiments, the plurality of microlenses 21 can be rotated around their respective central axes by different angles α.

[0061] Alternatively, as Figure 3AAs shown, a straight line passing through the midpoint P of the microlens 21 and perpendicular to the substrate 10 is used as the central axis of the microlens 21, and multiple microlenses 21 are rotated around their respective central axes at different angles α (refer to Figure 2D ), the angle may be between -20° and 20°. The first axes x of different microlenses 21 rotate around their respective central axes at different angles. The first axes x of the plurality of microlenses 21 are at different angles. Optionally, the first axes x of the plurality of microlenses 21 are at different angles within ±20° with respect to the extension direction X of the row, with reference to Figure 2D .

[0062] In some embodiments, the plurality of microlenses 21 have different radii of curvature in the direction of the first axis x and / or the direction of the second axis y, so that the heights of the highest points of the plurality of microlenses 21 are different.

[0063] Optionally, the curvature radius C of the surface of the plurality of microlenses 21 in the direction of the respective first axes x is x Differently, the curvature radius C of the surface of the plurality of micro lenses 21 in the direction of the second axis y is y Optionally, the curvature radius C of the microlens 21 in the direction of the first axis x is x The curvature radius C in the direction of the second axis y y different.

[0064] In some embodiments, the curvature radius C of the microlens 21 in the direction of the first axis x is x The average value C of the curvature radius of each of the microlenses 21 in the direction of the first axis x is x0 Satisfy C x0 -3% C x0 ≤C x ≤C x0 +3%C x0 The curvature radius C of the microlens 21 in the direction of the second axis y is y The average value C of the curvature radius of each of the microlenses 21 in the direction of the second axis y is y0 Satisfy C y0 -3% C y0 ≤C y ≤C y0 +3%C y0 .

[0065] In some embodiments, the surface shape of the microlens 21 satisfies the following function formula:

[0066]

[0067] In the surface shape function shown in formula (1), the central axis (optical axis of the microlens) of the microlens having the surface shape represented by the surface shape function can be set as the Z axis direction, which can be parallel to the substrate 10 and pass through the midpoint P (refer to Figure 3A and 3B ) as a reference plane (orthogonal to the Z-axis direction), and establish a three-dimensional rectangular coordinate system. The central axis of the microlens 21 can be used as the origin in the reference plane (i.e., the midpoint P is used as the origin).

[0068] In the above formula (1), z represents the height of a point on the surface of the microlens 21 from the reference surface, r x represents the distance of the point from the central axis (midpoint P) in the direction of the first axis x, r y Indicates the distance of a point from the central axis (midpoint P) in the direction of the second axis y, C x represents the curvature radius of the microlens 21 in the direction of the first axis x, C y Indicates the curvature radius of the surface in the direction of the second axis y, K x Indicates the conic coefficient of the surface in the direction of the first axis x, K y Indicates the conic coefficient of the surface in the direction of the second axis y.

[0069] Figure 4 The figure shows the diffraction light field diagram of the diffusion plate device with the random displacement of each row and / or each column, the random rotation angle of the micro lens center axis and the random curvature radius added in this application. Figure 4 As can be seen in the figure, the method for manufacturing a diffuser panel device in this application introduces irregularities into the microlens array, significantly suppressing diffraction of the diffused light field of the diffuser panel device. Furthermore, the microlens' radius of curvature varies minimally (within ±3%), minimizing variations in surface shape and facilitating fabrication of the diffuser panel device. Furthermore, the rotation angle of each microlens 21 around its central axis can be controlled within ±20°, further simplifying fabrication of the diffuser panel device.

[0070] In some embodiments, the present application provides two comparative examples to further illustrate the beneficial effects of the above scheme.

[0071] against Figure 4 As for the effect of the diffraction light field diagram shown, after adding random amounts in rows and / or columns, the microlens central axis is rotated by a random angle of ±10° and the curvature radius is randomized by 1% (±1% in the direction of the first axis x and the direction of the second axis y, respectively, and randomization can also be added in a single direction).

[0072] However, to achieve the same diffraction effect, if there is no random amount of rows and / or columns, the random angle of the microlens center axis rotation needs to be ±20°, and the random amount of the curvature radius needs to be 10%. Figure 4 Diffraction light field diagram.

[0073] It can be seen that after adding random amounts in rows and / or columns, the change in the curvature radius of the microlens is smaller, the surface shape of the microlens on the surface of the diffuser plate device is smaller, and the rotation angle of each microlens around its own central axis is also smaller, which is more conducive to the processing of the diffuser plate device.

[0074] Example 1

[0075] Figure 5 A schematic diagram of a diffuser plate device according to one embodiment of the present application is shown. Figure 6 Shown Figure 5 Diffraction light field diagram of the diffuser device in .

[0076] like Figure 5 As shown, a microlens array 20 is disposed on the surface of a substrate 10. Each microlens 21 may occupy an area, and these microlenses 21 form multiple rows or columns. The positions of two adjacent rows of microlenses are irregularly arranged, and / or the positions of two adjacent columns of microlenses are irregularly arranged. The material of the substrate 10 includes glass or plastic. The surface shape of the multiple microlenses 21 may satisfy the aforementioned formula (1), and the material includes glue or glass.

[0077] Exemplarily, the central axes of the plurality of microlenses 21 are randomly rotated by an angle between -10° and 10°; the length and width of the microlenses are both 38 μm; and the random displacement sizes Δx and Δy of the plurality of microlenses 21 in the row direction X and / or column direction Y are both 9.5 μm.

[0078] In formula (1), the following parameters of each microlens can be set as follows:

[0079] Cone coefficient K x and K y The curvature radius C of the surface of the plurality of microlenses 21 in the direction of the first axis x is x is any random value between 29.9±0.3μm; the curvature radius C of the surface of the plurality of microlenses 21 in the direction of the second axis y y Any random value between 59.4±0.3μm.

[0080] Figure 6 This is the speckle effect diagram of the random microlens array diffuser obtained by calculating the angular spectrum propagation theory of diffraction in this embodiment. Figure 6As can be seen from the figure, the diffuser plate device of this application can significantly suppress the phenomenon of diffraction of the diffused light field. Furthermore, the change in the radius of curvature of the microlenses only needs to be 0.3 μm, resulting in minimal differences in the surface profiles of the multiple microlenses. Furthermore, the angle of rotation of the central axes of the multiple microlenses does not exceed 10°. Thus, the diffuser plate of this application can achieve the goal of suppressing diffraction of the diffused light field while making the microlens array diffuser easier to manufacture.

[0081] Example 2

[0082] Figure 7 A schematic diagram of a diffuser plate device according to one embodiment of the present application is shown. Figure 8 Shown Figure 7 Diffraction light field diagram of the diffuser device.

[0083] like Figure 7 As shown, a microlens array 20 is disposed on the surface of a substrate 10. Each microlens 21 may occupy an area, and these microlenses 21 form multiple rows or columns. The positions of two adjacent rows of microlenses are irregularly arranged, and / or the positions of two adjacent columns of microlenses are irregularly arranged. The material of the substrate 10 includes glass or plastic. The surface shape of the multiple microlenses 21 may satisfy the aforementioned formula (1), and the material includes glue or glass.

[0084] Exemplarily, the central axes of the plurality of microlenses 21 are randomly rotated by an angle between -10° and 10°; the length and width of the microlenses are both 34 μm; and the random displacement sizes Δx and Δy of the plurality of microlenses 21 in the row direction X and / or column direction Y are both 8.5 μm.

[0085] In formula (1), the following parameters of each microlens can be set as follows:

[0086] Cone coefficient K x and K y The curvature radius C of the surface of the plurality of microlenses 21 in the direction of the first axis x is x is any random value between 50±0.4μm; the curvature radius C of the surface of the plurality of microlenses 21 in the direction of the second axis y y Any random value between 40±0.4μm.

[0087] Figure 8 This is the speckle effect diagram of the random microlens array diffuser device calculated using the diffraction angular spectrum propagation theory of this embodiment. Figure 8As can be seen from the figure, the diffuser plate device of this application can significantly suppress the phenomenon of diffraction of the diffused light field. Furthermore, the change in the radius of curvature of the microlenses only needs to be 0.4 μm, resulting in minimal differences in the surface shapes of the multiple microlenses. Furthermore, the angle of rotation of the central axes of the multiple microlenses does not exceed 10°. Thus, the diffuser plate of this application can achieve the goal of suppressing diffraction of the diffused light field while making the microlens array diffuser easier to manufacture.

[0088] like Figures 2A to 2D As shown, another aspect of the present application provides a method for manufacturing a diffuser plate device. The method includes forming a microlens array 20 on a surface of a substrate 10. The microlens array 20 includes multiple rows and columns of microlenses 21. During the formation process, two adjacent rows of microlenses 21 are displaced by different amounts in the row direction X, and / or two adjacent columns of microlenses 21 are displaced by different amounts in the column direction Y. For example, the microlens array 20 can be engraved using a laser.

[0089] In some embodiments, each microlens 21 in each row of microlenses moves by the same displacement in the row direction X, and / or each microlens 21 in each column of microlenses moves by the same displacement in the column direction Y.

[0090] In some embodiments, the displacement size Δx of each microlens 21 in the row direction X and the size d of the diameter of the microlens 21 satisfy Δx≤1 / 3d, and / or the displacement size Δy of each microlens 21 in the column direction Y and the size d of the diameter of the microlens 21 satisfy Δy≤1 / 3d.

[0091] In some embodiments, the method further includes: the microlens 21 includes a first axis x and a second axis y that are perpendicular to each other, the first axis x and the second axis y are located in a plane parallel to the substrate 10, and the plurality of microlenses 21 are rotated around their respective central axes at different angles.

[0092] In some embodiments, the angle range of the plurality of microlenses 21 rotating around their respective central axes is -20° to 20°.

[0093] In some embodiments, the plurality of microlenses 21 have different radii of curvature in the direction of the first axis x and / or the direction of the second axis y, so that the heights of the highest points of the plurality of microlenses 21 are different.

[0094] In some embodiments, the curvature radius C of the microlens 21 in the direction of the first axis x is x The average value C of the curvature radius of each of the microlenses 21 in the direction of the first axis x is x0 Satisfy C x0 -3% C x0 ≤C x ≤C x0+3%C x0 The curvature radius C of the microlens 21 in the direction of the second axis y y The average value C of the curvature radius of each of the microlenses 21 in the direction of the second axis y is y0 Satisfy C y0 -3% C y0 ≤C y ≤C y0 +3%C y0 .

[0095] In some embodiments, the plurality of microlenses 21 are arranged adjacent to each other.

[0096] Since the contents involved in the above description of the diffuser plate device structure are fully or partially applicable to the method described here, related or similar contents are not repeated here.

[0097] Another aspect of the present application provides a projection device including the above-mentioned diffusion plate device, which is used to significantly suppress the speckle effect during the imaging process and present a highly uniform projection image.

[0098] Another aspect of the present application provides a display device including the above-mentioned diffuser device, which is used to significantly suppress the speckle effect during the imaging process and present a highly uniform projection image.

[0099] The above description is merely an embodiment of the present application and an illustration of the technical principles employed. Those skilled in the art should understand that the scope of protection involved in this application is not limited to the technical solutions formed by a specific combination of the above-mentioned technical features, but should also cover other technical solutions formed by any combination of the above-mentioned technical features or their equivalents without departing from the technical concept. For example, a technical solution formed by replacing the above-mentioned features with (but not limited to) technical features with similar functions disclosed in this application.

Claims

1. A diffuser plate device, characterized in that: include: substrate; as well as a microlens array, the microlens array comprising a plurality of rows and columns of microlenses disposed on a surface of the substrate; The positions of two adjacent rows of microlenses are irregularly arranged, and / or the positions of two adjacent columns of microlenses are irregularly arranged; Each microlens in the same row and / or column moves the same displacement, and the microlenses in two adjacent rows and / or two adjacent columns move different displacements; The displacement of each microlens in the row direction and / or the column direction is less than or equal to one third of the diameter of the microlens; The variation of the curvature radius of the surface of the microlens is within ±3% of the average value of the curvature radius of the surface of the plurality of microlenses; The angle range of the plurality of micro lenses rotating around their respective central axes is -20° to 20°.

2. The diffuser plate device according to claim 1, wherein: The distances between adjacent microlenses in each row of microlenses are equal in the row direction of the microlens array, and / or the distances between adjacent microlenses in each column of microlenses are equal in the column direction of the microlens array.

3. The diffuser plate device according to claim 2, wherein: The distance in the row direction between two adjacent microlenses in the column direction S x With the microlens diameter d satisfy S x ≤ d ; The distance in the column direction between two adjacent microlenses in the row direction S y With the microlens diameter d satisfy S y ≤ d .

4. The diffuser plate device according to any one of claims 1 to 3, characterized in that: The microlens includes a first axis and a second axis that are perpendicular to each other, and the first axis and the second axis are located in a plane parallel to the substrate. Wherein, the first axes of the plurality of microlenses are at different angles.

5. The diffuser plate device according to claim 4, wherein: The angle between the first axis and the row direction of the microlens array ranges from -20° to 20°.

6. The diffuser plate device according to claim 4, wherein: The plurality of microlenses have different curvature radii in the direction of the first axis and / or the direction of the second axis, so that the maximum heights of the plurality of microlenses are different.

7. The diffuser plate device according to claim 6, wherein: The curvature radius of the microlens in the direction of the first axis C x The average value of the curvature radius of the plurality of micro lenses in the direction of the first axis C x0 satisfy C x0 -3% C x0 ≤ C x ≤ C x0 +3% C x0 ; The curvature radius of the microlens in the direction of the second axis C y The average value of the curvature radius of the plurality of micro lenses in the direction of the second axis C y0 satisfy C y0 -3% C y0 ≤ C y ≤ C y0 +3% C y0 .

8. The diffuser plate device according to claim 1, wherein: The plurality of microlenses are arranged adjacent to each other.

9. A method for manufacturing a diffuser plate device, characterized in that: include: forming a plurality of microlenses in a microlens array on a surface of a substrate, wherein the microlens array includes a plurality of rows and a plurality of columns of microlenses; Wherein, during the forming process, the positions of two adjacent rows of micro lenses are irregularly arranged, and / or the positions of two adjacent columns of micro lenses are irregularly arranged; Each microlens in the same row and / or column moves the same displacement, and the microlenses in two adjacent rows and / or two adjacent columns move different displacements; The displacement of each microlens in the row direction and / or the column direction is less than or equal to one third of the diameter of the microlens; The variation of the curvature radius of the surface of the microlens is within ±3% of the average value of the curvature radius of the surface of the plurality of microlenses; The angle range of the plurality of micro lenses rotating around their respective central axes is -20° to 20°.

10. The method according to claim 9, characterized in that Each microlens in each row of microlenses is moved by the same displacement in the row direction, and / or each microlens in each column of microlenses is moved by the same displacement in the column direction.

11. The method according to claim 9 or 10, characterized in that Also includes: The microlens includes a first axis and a second axis that are perpendicular to each other. The first axis and the second axis are located in a plane parallel to the substrate. The plurality of microlenses are rotated around their respective central axes at different angles.

12. The method according to claim 11, characterized in that The plurality of microlenses have different curvature radii in the direction of the first axis and / or the direction of the second axis, so that the heights of the highest points of the plurality of microlenses are different.

13. The method according to claim 12, characterized in that The curvature radius of the microlens in the direction of the first axis C x The average value of the curvature radius of the plurality of micro lenses in the direction of the first axis C x0 satisfy C x0 -3% C x0 ≤ C x ≤ C x0 +3% C x0 ; The curvature radius of the microlens in the direction of the second axis C y The average value of the curvature radius of the plurality of micro lenses in the direction of the second axis C y0 satisfy C y0 -3% C y0 ≤ C y ≤ C y0 +3% C y0 .

14. The method according to claim 9 or 10, characterized in that The plurality of microlenses are arranged adjacent to each other.

15. A projection device, characterized in that: A diffuser plate device comprising the diffuser plate device according to any one of claims 1 to 8.

16. A display device, characterized in that: A diffuser plate device comprising the diffuser plate device according to any one of claims 1 to 8.

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