An apparatus and method for large-scale deep removal of neon and hydrogen from helium

Abstract

This invention discloses an apparatus and method for large-scale deep removal of neon and hydrogen from helium. It includes a heat exchanger A (1), a separator (2), a heat exchanger B (3), a condenser-separator (4), a distillation column (5), a cryogenic adsorber (6), a liquid helium Dewar (7), a mixer (8), and a compressor (9). It also discloses a method for large-scale deep removal of neon and hydrogen from helium, which includes condensation separation, cryogenic distillation, and cryogenic adsorption processes. This invention solves the problem of large-scale deep removal of neon and hydrogen from helium, purifying helium containing 4–70 ppm neon and 1–10 ppm hydrogen to obtain ultrapure helium with a purity of over 99.9999%, enabling the distribution of gaseous and liquid helium products and significantly enhancing the economic value of helium.

Description

Technical Field

[0001] This invention relates to the fields of chemical engineering, semiconductors, superconductivity, and medicine, and specifically to an apparatus and method for large-scale deep removal of neon and hydrogen from helium. Background Technology

[0002] Helium is a rare strategic resource, and ultrapure helium has wide applications in military, medical, semiconductor, superconducting, and cryogenic refrigeration fields.

[0003] Currently, various helium extraction devices do not consider neon in their feed gas composition, and there are no processes for neon removal. According to GB / T4844-2011, "Pure Helium, High-Purity Helium and Ultra-Purity Helium," the neon content in high-purity helium is <4 ppm, and the neon content in ultra-pure helium is <1 ppm. Therefore, the standard requires that a neon removal process be considered. Currently, domestically produced neon-containing crude helium and neon-containing high-purity helium are relatively cheaper than ultra-pure helium. Chinese invention patent CN 114562852 A, "A Helium Neon Removal System," uses a cryogenic refrigerator to provide cooling capacity, but the provided cooling capacity is very limited. It utilizes cryogenic adsorption to remove neon from helium, but this involves numerous moving parts, a complex system, and is only suitable for small-scale production, making it economically unsustainable. Summary of the Invention

[0004] The purpose of this invention is to provide an apparatus and method for large-scale deep removal of neon and hydrogen from helium, in order to solve the problems existing in the prior art.

[0005] To achieve the above objectives, the present invention provides the following technical solution: The present invention provides a large-scale deep removal device for neon and hydrogen from helium, comprising a heat exchanger A, a separator, a heat exchanger B, a condenser separator, a distillation column, a cryogenic adsorber, a liquid helium Dewar, a mixer, and a compressor; wherein, the cryogenic neon-hydrogen-containing crude helium gas outlet channel of the heat exchanger A is connected to a cryogenic neon-hydrogen-containing crude helium gas pipeline, and the cryogenic neon-hydrogen-containing crude helium gas pipeline of the heat exchanger A is connected to the inlet of the separator; the cryogenic neon-hydrogen-containing crude helium gas outlet channel A of the separator is connected to a cryogenic neon-hydrogen-containing crude helium gas pipeline A, and the cryogenic neon-hydrogen-containing crude helium gas outlet channel A of the separator is connected to the cryogenic neon-hydrogen-containing crude helium gas pipeline A. Pipeline A is connected to the inlet channel of the low-temperature neon-hydrogen crude helium gas in heat exchanger B; the outlet channel of the deep-temperature neon-hydrogen crude helium gas in heat exchanger B is connected to the deep-temperature neon-hydrogen crude helium gas pipeline, which is connected to the inlet of the deep-temperature neon-hydrogen crude helium gas in the condenser; the outlet of the helium-containing liquid neon gas in the condenser is connected to the helium-containing liquid neon gas pipeline, which is connected to the inlet of the helium-containing liquid neon gas in the distillation column; the outlet of the crude helium gas in the distillation column is connected to the crude helium gas pipeline, which is connected to the inlet of the heat exchanger B; the outlet of the liquid neon gas in the distillation column is connected to the liquid neon gas pipeline. The liquid neon pipeline is connected to the liquid neon inlet of heat exchanger B; the deep-temperature neon-hydrogen-containing crude helium gas A outlet of the condenser separator is connected to the deep-temperature neon-hydrogen-containing crude helium gas A pipeline, which is connected to the deep-temperature neon-hydrogen-containing crude helium gas A inlet of the low-temperature adsorber; the de-neon-hydrogen ultrapure helium gas outlet of the low-temperature adsorber is connected to the de-neon-hydrogen ultrapure helium gas pipeline; the de-neon-hydrogen ultrapure helium gas pipeline is connected to the de-neon-hydrogen ultrapure helium gas inlet of the mixer; the liquid helium outlet of the liquid helium Dewar is connected to the liquid helium pipeline, which is connected to the liquid helium inlet of the mixer; the deep-temperature ultrapure helium gas outlet of the mixer is connected to the liquid helium pipeline. The helium outlet is connected to a cryogenic ultrapure helium outlet pipeline, which is connected to heat exchanger B. The mixer mixes liquid helium with helium gas to raise the liquid helium temperature and prevent excessive temperature difference in heat exchanger B during startup. The crude helium B outlet channel of heat exchanger A is connected to a crude helium B pipeline, which is connected to the crude helium B inlet channel of the compressor. The pressurized crude helium outlet channel of the compressor is connected to a pressurized crude helium pipeline, which is connected to a neon-hydrogen-containing crude helium pipeline, which is connected to the neon-hydrogen-containing crude helium inlet channel of heat exchanger A. Furthermore, heat exchanger A is also connected to an air venting pipe, a nitrogen pipe, a liquid nitrogen pipe, an impurity pipe, a product A pipe, and a product B pipe; wherein, the air venting outlet channel of heat exchanger A is connected to the air venting pipe; the nitrogen outlet channel of heat exchanger A is connected to the nitrogen pipe; the liquid nitrogen inlet channel of heat exchanger A is connected to the liquid nitrogen pipe; the impurity inlet channel of heat exchanger A is connected to the impurity pipe, and the impurity pipe is connected to the impurity outlet channel of the separator; the ultrapure helium outlet channel of heat exchanger A is connected to the product A pipe; and the neon outlet channel of heat exchanger A is connected to the product B pipe.

[0006] Furthermore, the heat exchanger B is also connected to a cryogenic ultrapure helium pipeline, a crude helium A pipeline, and a neon pipeline; wherein, the cryogenic ultrapure helium outlet of the heat exchanger B is connected to the cryogenic ultrapure helium pipeline, and the cryogenic ultrapure helium pipeline is connected to the cryogenic ultrapure helium inlet channel of the heat exchanger A; the crude helium A outlet of the heat exchanger B is connected to the crude helium A pipeline, and the crude helium A pipeline is connected to the crude helium A inlet channel of the heat exchanger A; the neon outlet of the heat exchanger B is connected to the neon pipeline, and the neon pipeline is connected to the neon inlet channel of the heat exchanger A.

[0007] Furthermore, the system includes a control system. Valve A is installed on the impurity pipeline, valve B is installed on the helium-containing liquid neon pipeline, valve C is installed on the liquid neon pipeline, valve D is installed on the crude helium pipeline, valve E is installed on the de-neon hydrogen ultrapure helium pipeline, and valve F is installed on the liquid helium pipeline. All valves A, B, C, D, E, and F are solenoid valves. Valve C and valve D control the pressure of the distillation column, valve E controls the pressure of the cryogenic adsorber, and valve F controls the temperature of the cryogenic neon hydrogen-containing crude helium gas exiting the heat exchanger B.

[0008] Furthermore, it also includes a reboiler, which is installed inside the distillation column and is an electric heater or an external heat source.

[0009] Furthermore, the aforementioned low-temperature adsorber can be configured to be used intermittently or multiple units connected in parallel for continuous regeneration and switching.

[0010] This invention provides a method for large-scale deep removal of neon and hydrogen from helium, comprising the following steps: S1, mixing neon-hydrogen-containing crude helium gas with pressurized crude helium gas, cooling to 77K via a neon-hydrogen-containing crude helium gas pipeline and heat exchanger A to obtain low-temperature neon-hydrogen-containing crude helium gas, wherein liquid nitrogen, low-temperature ultrapure helium, impurity liquid, crude helium gas A, and neon gas provide cooling capacity for heat exchanger A; S2, the low-temperature neon-hydrogen-containing crude helium gas passes through a separator to separate the impurity liquid, the separated impurity liquid is returned to heat exchanger A via valve A to provide cooling capacity for heat exchanger A, and is then reheated and vented; the low-temperature neon-hydrogen-containing crude helium gas A enters heat exchanger B via a pipeline; S3, the low-temperature neon-hydrogen-containing crude helium gas A is cooled to 50K-20K via heat exchanger B to obtain deep-temperature neon-hydrogen-containing crude helium gas, wherein deep-temperature ultrapure helium, crude helium gas, and liquid neon gas provide cooling capacity for heat exchanger B; S4, the deep-temperature neon-hydrogen-containing crude helium gas enters a condenser separator for gas-liquid separation, containing helium liquid neon. After being throttled by valve B, both gas and liquid phases enter the distillation column. The cryogenic neon-hydrogen-containing crude helium gas enters the cryogenic adsorber. S5, containing helium-containing liquid neon, enters the distillation column; the gaseous neon-containing helium phase rises, while the liquid neon-containing helium phase descends. Heated in the reboiler, heat and mass transfer occur under the action of the packing material, resulting in liquid neon at the bottom of the column. Throttled by valve C, this liquid provides cooling to heat exchangers B and A. After reheating, product B neon gas is obtained. The crude helium gas from the top of the column passes through valve D and enters heat exchangers B and A. The gas is supplied with cooling capacity, reheated, and then pressurized by a compressor to obtain pressurized crude helium. This pressurized crude helium is then combined with neon- and hydrogen-containing crude helium and further recycled to produce ultrapure helium. S6. The cryogenic neon- and hydrogen-containing crude helium enters a cryogenic adsorber, where neon and hydrogen are removed by the cryogenic adsorbent, yielding 99.9999% pure neon- and hydrogen-free ultrapure helium. This pure helium enters a mixer via valve E. Further, it provides cooling capacity to heat exchangers B and A, and after reheating, product A ultrapure helium is obtained. Further, the pressure of the neon- and hydrogen-containing crude helium is 0.1–5.0 MPa, the neon content is 4–70 ppm, and the hydrogen content is 1–10 ppm. Further, the temperature range of heat exchanger A is between 313 and 77 K; the temperature range of heat exchanger B is controlled between 50 K and 20 K; the temperature of the condenser separator is controlled between 50 K and 20 K; and the temperature of the cryogenic adsorber is controlled between 50 K and 20 K. Furthermore, in step S6, the low-temperature adsorbent includes one or more combinations of activated carbon, 5A molecular sieve, and lithium molecular sieve. Based on the above technical solution, the embodiments of the present invention can produce at least the following technical effects: (1) The apparatus and method for large-scale deep removal of neon and hydrogen from helium provided by the present invention solves the problem of deep removal of neon and hydrogen through a low-temperature adsorption unit, thereby producing ultrapure helium with a purity of ≥99.9999%. (2) The apparatus and method for large-scale deep removal of neon and hydrogen from helium provided by the present invention provide cooling capacity through liquid nitrogen and liquid helium, eliminating the need for a deep cryogenic refrigerator, making it suitable for large-scale production, economical and with high added value.

[0011] (3) The apparatus and method for large-scale deep removal of neon and hydrogen from helium provided by the present invention, combined with liquid helium distribution, utilizes liquid helium gasification to provide cooling for low-temperature adsorption and dehydrogenation, and purifies crude helium gas containing neon and hydrogen and high-purity helium gas containing neon and hydrogen to 99.9999% ultrapure helium, realizing the distribution of gaseous and liquid helium products, which greatly enhances the economic value of helium. Attached Figure Description

[0012] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on the structures shown in these drawings without creative effort.

[0013] Figure 1 This is a process schematic diagram of an embodiment of the present invention; in the figure: 1 heat exchanger A, 2 separator, 21 valve A, 3 heat exchanger B, 4 condenser separator, 5 distillation column, 51 reboiler, 52 valve B, 53 valve C, 6 low temperature adsorber, 61 valve E, 7 liquid helium Dewar, 71 valve F, 8 mixer, 9 compressor. Detailed Implementation

[0014] The technical solutions in the embodiments of the present invention will be clearly and completely described below. Obviously, the described embodiments are only a part of the embodiments of the present invention, and not all of them. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention. In addition, the technical solutions of the various embodiments can be combined with each other, but this must be based on the ability of those skilled in the art to implement them. When the combination of technical solutions is contradictory or cannot be implemented, it should be considered that such combination of technical solutions does not exist and is not within the scope of protection claimed by the present invention.

[0015] The objective of this invention is achieved through the following technical solutions: such as Figure 1As shown, a large-scale deep removal device for neon and hydrogen from helium includes heat exchanger A1, separator 2, valve A21, heat exchanger B3, condenser separator 4, valve B41, distillation column 5, reboiler 51, valve C52, valve D53, cryogenic adsorber 6, valve E61, liquid helium Dewar 7, valve F71, mixer 8, compressor 9, and other equipment. Among them, the pressurized crude helium gas pipeline is connected to the neon-hydrogen-containing crude helium gas pipeline; the neon-hydrogen-containing crude helium gas pipeline is connected to the neon-hydrogen-containing crude helium gas inlet channel of heat exchanger A1; the low-temperature neon-hydrogen-containing crude helium gas outlet channel of heat exchanger A1 is connected to the low-temperature neon-hydrogen-containing crude helium gas pipeline; the low-temperature neon-hydrogen-containing crude helium gas pipeline is connected to the inlet of separator 2; the impurity outlet channel of separator 2 is connected to the inlet of valve A21; the outlet of valve A21 is connected to the impurity inlet channel of heat exchanger A1; the venting outlet channel of heat exchanger A1 is connected to the venting pipeline; the liquid nitrogen pipeline is connected to the liquid nitrogen inlet channel of heat exchanger A1; and the gaseous nitrogen outlet channel of heat exchanger A1 is connected to the venting pipeline. The inlet channel is connected to the nitrogen pipeline; the cryogenic ultrapure helium pipeline is connected to the cryogenic ultrapure helium inlet channel of heat exchanger A1; the ultrapure helium outlet channel of heat exchanger A1 is connected to the product A pipeline; the crude helium A pipeline is connected to the crude helium A inlet channel of heat exchanger A1; the crude helium B outlet channel of heat exchanger A1 is connected to the crude helium B pipeline; the crude helium B pipeline is connected to the crude helium B inlet channel of compressor 9; the pressurized crude helium outlet channel of compressor 9 is connected to the pressurized crude helium pipeline; the neon pipeline is connected to the neon inlet channel of heat exchanger A1; the neon outlet channel of heat exchanger A1 is connected to the product C pipeline. The cryogenic neon-hydrogen-containing crude helium pipeline is connected to the inlet of separator 2; the impurity outlet channel of separator 2 is connected to the inlet of valve A21; the cryogenic neon-hydrogen-containing crude helium A outlet channel of separator 2 is connected to the cryogenic neon-hydrogen-containing crude helium A pipeline; the cryogenic neon-hydrogen-containing crude helium A pipeline is connected to the cryogenic neon-hydrogen-containing crude helium A inlet channel of heat exchanger B3.

[0016] The inlet channel of the low-temperature neon-hydrogen-containing crude helium gas A of heat exchanger B3 is connected to the low-temperature neon-hydrogen-containing crude helium gas A pipeline; the outlet channel of the deep low-temperature neon-hydrogen-containing crude helium gas of heat exchanger B3 is connected to the deep low-temperature neon-hydrogen-containing crude helium gas pipeline; the deep low-temperature neon-hydrogen-containing crude helium gas pipeline is connected to the inlet of the deep low-temperature neon-hydrogen-containing crude helium gas of condenser separator 4; the deep low-temperature ultrapure helium pipeline is connected to the inlet channel of the deep low-temperature ultrapure helium gas of heat exchanger B3; the outlet channel of the low-temperature ultrapure helium gas of heat exchanger B3 is connected to the low-temperature ultrapure helium gas pipeline; the crude helium gas pipeline is connected to the inlet of valve D53; the outlet of valve D53 is connected to the inlet channel of the crude helium gas of heat exchanger B3; the outlet channel of the crude helium gas A of heat exchanger B3 is connected to the crude helium gas A pipeline; the liquid neon gas pipeline is connected to the inlet of valve C52; the outlet of valve C52 is connected to the liquid neon gas inlet channel of heat exchanger B3; and the neon gas outlet channel of heat exchanger B3 is connected to the neon gas pipeline.

[0017] The cryogenic neon-hydrogen-containing crude helium gas pipeline is connected to the cryogenic neon-hydrogen-containing crude helium gas inlet of condenser 4; the helium-containing liquid neon outlet of condenser 4 is connected to the helium-containing liquid neon pipeline; the helium-containing liquid neon pipeline is connected to the inlet of valve B41; the outlet of valve B41 is connected to the helium-containing liquid neon inlet of distillation column 5; the cryogenic neon-hydrogen-containing crude helium gas outlet A of condenser 4 is connected to the cryogenic neon-hydrogen-containing crude helium gas pipeline A.

[0018] The crude helium outlet of distillation column 5 is connected to a crude helium pipeline; the crude helium pipeline is connected to the inlet of valve D53; the liquid neon outlet of distillation column 5 is connected to a liquid neon pipeline; the liquid neon pipeline is connected to the inlet of valve C52; the cryogenic neon-hydrogen-containing crude helium A pipeline is connected to the cryogenic adsorber 6 cryogenic neon-hydrogen-containing crude helium A inlet; the de-neon-hydrogen ultrapure helium outlet of cryogenic adsorber 6 is connected to a de-neon-hydrogen ultrapure helium pipeline; the de-neon-hydrogen ultrapure helium pipeline is connected to the inlet of valve E61; the outlet of valve E61 is connected to the de-neon-hydrogen ultrapure helium inlet of mixer 8. The liquid helium outlet of liquid helium Dewar 7 is connected to a liquid helium pipeline; the liquid helium pipeline is connected to the inlet of valve F71; the outlet of valve F71 is connected to the liquid helium inlet of mixer 8.

[0019] The mixer 8 is connected to the cryogenic ultrapure helium outlet via a cryogenic ultrapure helium outlet pipeline.

[0020] The crude helium B pipeline is connected to the crude helium B inlet channel of compressor 9; the compressor 9 booster crude helium outlet channel is connected to the booster crude helium pipeline; and the pressurized crude helium pipeline is connected to the neon-hydrogen-containing crude helium pipeline.

[0021] In a specific embodiment, multiple low-temperature adsorbers 6 are connected in parallel for continuous regeneration and switching.

[0022] In a specific embodiment, a control system is also included, and valves A21, B41, C52, D53, E61, and F71 are all solenoid valves.

[0023] In a specific embodiment, the pressure of the distillation column 5 is controlled by valves C52 and D53; the pressure of the cryogenic adsorber 6 is controlled by valve E61; and the temperature of the cryogenic neon-hydrogen-crude helium gas exiting the heat exchanger B3 is controlled by valve F71.

[0024] In a specific embodiment, the reboiler 51 can be an electric heater.

[0025] In a specific embodiment, the mixer 8 mixes liquid helium with gaseous helium to increase the temperature of the liquid helium, thus preventing excessive temperature difference in the heat exchanger B3 during device startup.

[0026] In a specific embodiment, a method for large-scale deep removal of neon and hydrogen from helium includes the following steps: S1, neon-hydrogen-containing crude helium gas is mixed with pressurized crude helium gas, and cooled to 77K via a neon-hydrogen-containing crude helium gas pipeline and heat exchanger A1 to obtain cryogenic neon-hydrogen-containing crude helium gas. Liquid nitrogen, cryogenic ultrapure helium, impurity liquid, crude helium gas A, and neon gas provide cooling for heat exchanger A1; S2, the cryogenic neon-hydrogen-containing crude helium gas passes through separator 2 to separate the impurity liquid. The separated impurity liquid is returned to heat exchanger A1 via valve A21 to provide cooling for heat exchanger A1, and then reheated and vented; the cryogenic neon-hydrogen-containing crude helium gas A goes to heat exchanger B3; S3, the cryogenic neon-hydrogen-containing crude helium gas A is cooled to 50K via heat exchanger B3. At 20K, cryogenic neon-hydrogen-containing crude helium gas is obtained; cryogenic ultrapure helium, crude helium gas, and liquid neon provide cooling for heat exchanger B3; S4, the cryogenic neon-hydrogen-containing crude helium gas enters the condenser separator 4 for gas-liquid separation, and the helium-containing liquid neon is throttled by valve B41, with both gas and liquid phases entering the distillation column 5; the cryogenic neon-hydrogen-containing crude helium gas enters the cryogenic adsorber 6; S5, the helium-containing liquid neon enters the distillation column, where the helium-containing gas phase rises and the helium-containing liquid neon descends, and is heated by the reboiler 51 in the column bottom. Heat and mass transfer occur under the action of the packing material, and liquid neon is obtained at the bottom of the column. It is throttled by valve C52 to provide cooling for heat exchangers B3 and A1. After reheating, it yields... Product B is neon gas; the crude helium gas from the top of the tower passes through valve D53 to provide cooling for heat exchangers B3 and A1. After reheating, it is pressurized by compressor 9 to obtain pressurized crude helium gas, which is then combined with neon-hydrogen-containing crude helium gas for further recycling to produce ultrapure helium; S6, the cryogenic neon-hydrogen-containing crude helium gas enters the cryogenic adsorber 6, where neon and hydrogen are removed under the action of the adsorbent to obtain 99.9999% pure neon-hydrogen-removed ultrapure helium gas, which enters the mixer 8 through valve E61; S7, liquid helium enters the mixer 8 from the liquid helium Dewar 7, where it mixes with the neon-hydrogen-removed ultrapure helium gas to provide cooling for heat exchangers B3 and A1. After reheating, product A ultrapure helium gas is obtained. In specific embodiments, the pressure of the neon-containing crude helium gas is 0.1–5.0 MPa, the neon content is 4–70 ppm, and the hydrogen content is 1–10 ppm. In a specific embodiment, the temperature range of heat exchanger A1 is between 313 and 77 K, the temperature range of heat exchanger B3 is controlled between 50 K and 20 K, the temperature of condenser separator 4 is controlled between 50 K and 20 K, and the temperature of low-temperature adsorbent 6 is controlled between 50 K and 20 K. In a specific embodiment, the low-temperature adsorbent includes one or more combinations of activated carbon, 5A molecular sieve, and lithium molecular sieve. In a specific embodiment, ultrapure helium product A with a purity of 99.9999% and recovered neon product B can be obtained.

[0027] The foregoing has shown and described the basic principles, main features, and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of the invention. Various changes and modifications can be made to the invention without departing from its spirit and scope, and all such changes and modifications fall within the scope of the present invention as claimed. The scope of protection of the present invention is defined by the appended claims and their equivalents.

Claims

1. A device for large-scale deep removal of neon and hydrogen from helium, characterized in that: The system includes heat exchanger A (1), separator (2), heat exchanger B (3), condenser separator (4), distillation column (5), cryogenic adsorber (6), liquid helium Dewar (7), mixer (8), and compressor (9); wherein, the cryogenic neon-hydrogen crude helium outlet channel of heat exchanger A (1) is connected to the inlet of separator (2), and cryogenic neon-hydrogen crude helium is input and output to heat exchanger B (3) through the outlet of separator (2); cryogenic neon-hydrogen crude helium is output to condenser separator (4) through the outlet of heat exchanger B (3); The condenser (4) outputs helium-containing liquid neon to the distillation column (5) through a helium-containing liquid neon pipeline; the crude helium outlet of the distillation column (5) outputs crude helium to the crude helium inlet of the heat exchanger B (3), and the liquid neon outlet of the distillation column (5) outputs liquid neon to the liquid neon inlet of the heat exchanger B (3). The deep-temperature neon-hydrogen-containing crude helium gas A outlet of the condenser (4) outputs the deep-temperature neon-hydrogen-containing crude helium gas A to the low-temperature adsorber (6); the low-temperature adsorber (6) outputs the de-neon-hydrogen-containing ultrapure helium gas to the mixer (8) through the de-neon-hydrogen ultrapure helium gas pipeline. The liquid helium Dewar (7) outputs liquid helium to the mixer (8) through a liquid helium pipeline; the cryogenic ultrapure helium outlet of the mixer (8) outputs cryogenic ultrapure helium to the heat exchanger B (3); the mixer (8) increases the temperature of the liquid helium by mixing liquid helium with helium gas, thus avoiding excessive temperature difference in the heat exchanger B (3) when the device is started. The heat exchanger A (1) outputs crude helium B to the compressor (9) through the crude helium B pipeline; the compressor (9) outputs pressurized crude helium to the neon-hydrogen-containing crude helium pipeline through the pressurized crude helium pipeline for mixing, and inputs the mixed neon-hydrogen-containing crude helium into the heat exchanger A (1). The heat exchanger A (1) is also connected to an air release pipe, a nitrogen pipe, an impurity pipe, a product A pipe, and a product B pipe; wherein, the separator (2) is connected to the heat exchanger A (1) through the impurity pipe to realize the discharge of impurities, and releases air through the air release pipe; the heat exchanger A (1) is connected to the liquid nitrogen pipe through the nitrogen pipe for inputting liquid nitrogen; the heat exchanger B (3) outputs low-temperature ultrapure helium to the heat exchanger A (1) through the product A pipe to obtain product A; the heat exchanger B (3) outputs neon gas to the heat exchanger A (1) through the product B pipe to obtain product B; The heat exchanger B (3) is also connected to a crude helium gas A pipeline; crude helium gas A is output to heat exchanger A (1) through the crude helium gas A pipeline. It also includes a control system, wherein valve A (21) is installed on the impurity pipeline, valve B (41) is installed on the helium-containing liquid neon pipeline, valve C (52) is installed on the liquid neon pipeline, valve D (53) is installed on the crude helium pipeline, valve E (61) is installed on the deneon-hydrogen ultrapure helium pipeline, and valve F (71) is installed on the liquid helium pipeline; valves A (21), B (41), C (52), D (53), E (61), and F (71) are all solenoid valves; the pressure of the distillation column (5) is controlled by valves C (52) and D (53), the pressure of the cryogenic adsorber (6) is controlled by valve E (61), and the temperature of the cryogenic neon-hydrogen-containing crude helium gas exiting the heat exchanger B (3) is controlled by valve F (71); It also includes a reboiler (51), which is disposed inside the distillation column (5).

2. The apparatus for large-scale deep removal of neon and hydrogen from helium according to claim 1, characterized in that: The reboiler (51) is an electric heater or an external heat source.

3. The apparatus for large-scale deep removal of neon and hydrogen from helium according to claim 1, characterized in that: The aforementioned low-temperature adsorber (6) can be configured as one unit for intermittent use or multiple units connected in parallel for continuous regeneration and switching.

4. A method for large-scale deep removal of neon and hydrogen from helium, characterized in that, The apparatus for large-scale deep removal of neon and hydrogen from helium according to any one of claims 1 to 3 comprises the following steps: S1. The neon-hydrogen crude helium gas is mixed with the pressurized crude helium gas and cooled to 77K through the neon-hydrogen crude helium gas pipeline and heat exchanger A (1) to obtain low-temperature neon-hydrogen crude helium gas. Liquid nitrogen, low-temperature ultrapure helium, impurity liquid, crude helium gas A and neon gas provide cooling capacity for heat exchanger A (1). S2. Low-temperature neon-hydrogen-containing crude helium gas passes through separator (2) to separate impurity liquid. The separated impurity liquid is returned to heat exchanger A (1) through valve A (21) to provide cooling capacity to heat exchanger A (1) and is reheated and vented. Low-temperature neon-hydrogen-containing crude helium gas A enters heat exchanger B (3) through pipeline. S3. Low-temperature neon-hydrogen crude helium gas A is cooled to 50K~20K by heat exchanger B (3) to obtain deep low-temperature neon-hydrogen crude helium gas, in which deep low-temperature ultrapure helium, crude helium gas and liquid neon provide cooling capacity for heat exchanger B (3); S4. The cryogenic neon-hydrogen-containing crude helium gas enters the condenser (4) for gas-liquid separation. The helium-containing liquid neon is throttled by valve B (41), and the gas and liquid phases enter the distillation column (5). The cryogenic neon-hydrogen-containing crude helium gas enters the cryogenic adsorber (6). S5. Helium-containing liquid neon enters the distillation column (5). The helium-containing gas phase rises, while the helium-containing liquid neon falls. It is heated by the reboiler (51) and undergoes heat and mass transfer under the action of the packing. Liquid neon is obtained at the bottom of the column. It is throttled by valve C (52) to provide cooling for heat exchanger B (3) and heat exchanger A (1). After reheating, product B neon gas is obtained. The crude helium gas at the top of the column is throttled by valve D (53) to provide cooling for heat exchanger B (3) and heat exchanger A (1). After reheating, it is pressurized by compressor (9) to obtain pressurized crude helium gas. After merging with the neon-containing hydrogen crude helium gas, it is further recycled to produce ultrapure helium. S6. Deep cryogenic neon-hydrogen-containing crude helium gas enters the cryogenic adsorber (6). Under the action of the cryogenic adsorbent, neon and hydrogen are removed to obtain 99.9999% pure neon-hydrogen-removed ultrapure helium gas, which enters the mixer (8) through valve E (61). S7. Liquid helium enters the mixer (8) from the liquid helium dewar (7) and mixes with denephrin-hydrogenated ultrapure helium to provide cooling for heat exchanger B (3) and heat exchanger A (1). After reheating, product A ultrapure helium is obtained.

5. The method for large-scale deep removal of neon and hydrogen from helium according to claim 4, characterized in that: The pressure of the neon-hydrogen-containing crude helium gas is 0.1–5.0 MPa, the neon content is 4–70 ppm, and the hydrogen content is 1–10 ppm.

6. The method for large-scale deep removal of neon and hydrogen from helium according to claim 4, characterized in that: The heat exchanger A (1) has a temperature range between 313 and 77 K; the heat exchanger B (3) has a temperature range between 50 K and 20 K; the condenser separator (4) has a temperature range between 50 K and 20 K; and the low-temperature adsorber (6) has a temperature range between 50 K and 20 K.

7. The method for large-scale deep removal of neon and hydrogen from helium according to claim 4, characterized in that: In step S6, the low-temperature adsorbent includes one or more combinations of activated carbon, 5A molecular sieve, and lithium molecular sieve.

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