Film tearing machine and its doctor mechanism

Abstract

A scraper mechanism of a film tearing machine includes a carrier, a blade and a resilient member. The blade is pivotally connected to the carrier. The resilient member connects the carrier and the blade, and the resilient member is deformable by movement of the blade relative to the carrier.

Description

Technical Field

[0001] This invention relates to a scraper mechanism, and more particularly to a scraper mechanism for a film peeling machine. Background Technology

[0002] Currently, in the semiconductor or electronic component industry, some processes require the application of multiple layers of film onto a substrate. The outermost release liner is used to prevent dust adhesion, provide electrostatic discharge protection, or prevent contact with air. The film application process includes the film application procedure and the release liner removal procedure. In the film application procedure, the main multilayer film is applied to the substrate, with the release liner, which is subsequently removed, on top of the main film. In the release liner removal procedure, the release liner is peeled off to expose the main film.

[0003] Currently, the industry widely uses automated equipment to remove the film from the substrate. However, the problem of main film overflow can affect the film removal process. Specifically, during the film application process, the main film is heated and attached to the substrate. If the main film has high fluidity, it may overflow from the edge of the release film and cover the surrounding area, making it difficult to separate the release film from the main film in the subsequent film removal process. To solve this problem, one solution is to use a laser to burn off the overflowing main film after the film application process is completed. However, the laser energy may damage the circuit patterns on the substrate. Therefore, in addition to the method of burning off the overflowing film with a laser, other solutions need to be developed. Summary of the Invention

[0004] In view of the above problems, the present invention discloses a scraper mechanism, which substantially solves one or more problems caused by the limitations and defects of the prior art. The present invention also discloses a film-tearing machine incorporating this scraper mechanism.

[0005] The scraper mechanism disclosed in this invention includes a support, a cutting tool, and an elastic element. The cutting tool is pivotally connected to the support. The elastic element connects the support and the cutting tool, and the elastic element can deform due to the movement of the cutting tool relative to the support.

[0006] The scraper mechanism disclosed in this invention includes a support, a cutting tool, and a path length adjustment member. The cutting tool is pivotally connected to the support. The path length adjustment member is disposed on the support and is used to limit the path length of the cutting tool relative to the support.

[0007] The film-tearing machine disclosed in this invention includes the aforementioned scraper mechanism and film-tearing device. The scraper mechanism is used to separate the edge of the film material from another film material, and the film-tearing device is used to completely separate the film material from the other film material.

[0008] According to the doctor blade mechanism and film-tearing machine disclosed in this invention, the blade is connected to the support seat via an elastic element, thus providing the blade with a certain degree of mobility. In cases where the main film material overflows from the edge of the release film, when the blade of the movable blade contacts the main film material, the blade can remain moving along the surface of the main film material without penetrating its interior. Then, when the blade contacts the release film material, the blade can be lowered by the elastic element and its own weight, causing the blade to extend below the release film material, thereby separating the release film material from the main film material. Using the doctor blade mechanism of this invention for film tearing eliminates the need for the step of pre-burning off the overflowing film material with a laser.

[0009] The foregoing description of the invention and the following description of its embodiments are intended to demonstrate and explain the spirit and principles of the invention, and to provide a further explanation of the claims. Attached Figure Description

[0010] Figure 1 This is a perspective view of a scraper mechanism according to an embodiment of the present invention.

[0011] Figure 2 for Figure 1 A cross-sectional diagram of the scraper mechanism.

[0012] Figures 3 to 6 For use of included Figure 1 A schematic diagram of a film-peeling machine with a scraper mechanism removing film from a substrate. Detailed Implementation

[0013] The following detailed description of the features and advantages of the present invention in the embodiments is sufficient to enable those skilled in the art to understand the technical content of the present invention and to implement it accordingly. Based on the disclosure of this specification, the claims, and the drawings, those skilled in the art can easily understand the related objects and advantages of the present invention. The following embodiments further illustrate the viewpoints of the present invention in detail, but are not intended to limit the scope of the present invention in any way.

[0014] Please refer to Figure 1 and Figure 2 ,in Figure 1 This is a perspective view of a scraper mechanism according to an embodiment of the present invention, and Figure 2 for Figure 1 A cross-sectional schematic diagram of the scraper mechanism is shown. In this embodiment, the scraper mechanism 1 includes a support base 10, a cutter 20, an elastic element 30, and a path length adjustment element 40. The cutter 20 is pivotally connected to the support base 10, the elastic element 30 connects the support base 10 and the cutter 20, and the path length adjustment element 40 can be disposed on the support base 10. The support base 10 can be driven by a motor (not shown) or manually to move the cutter 20, the elastic element 30, and the path length adjustment element 40 together.

[0015] The cutting tool 20 may include a connector 210 and a cutting blade 220 fixed to the connector 210. The connector 210 is pivotally connected to the support 10, and the elastic member 30 connects the support 10 and the connector 210, allowing the connector 210 to rotate relative to the support 10. The cutting blade 220 forms a tapered tip 221 at its end. At the tapered tip 221, the thickness of the cutting blade 220 gradually decreases towards the end.

[0016] An elastic element 30 is disposed between the cutter 20 and the support 10. The elastic element 30 is, for example, but not limited to, a disc spring, one end of which is fixed to the support 10 and the other end of which is fixed to the connector 210 of the cutter 20.

[0017] The path length adjustment member 40 is used to limit the path length of the tool 20 relative to the support 10. Specifically, the path length adjustment member 40 can move relative to the support 10 towards or away from the tool 20, and the path length adjustment member 40 interferes with the tool 20 to limit the path length of the tool 20's movement. In this embodiment, the path length adjustment member 40 may include an interference end 410 with a bevel, and the tool 20 may further include a columnar member 230. The columnar member 230 is located within the slot 211 of the connector 210, and the columnar member 230 has another bevel that matches the bevel of the interference end 410. The path length adjustment member 40 can move relative to the support 10 and insert into the tool 20 to contact the columnar member 230 to form a male-female mating structure 231, and the degree of movement of the tool 20 is adjusted by the extent to which the interference end 410 is inserted into the slot 211. This embodiment influences the path length of the tool 20 by the contact between two inclined surfaces formed on the path length adjustment member 40 and the tool 20, but the invention is not limited thereto. In some embodiments, the path length can be adjusted by matching the concave and convex surfaces formed on the path length adjustment member and the tool.

[0018] In this embodiment, the scraper mechanism 1 may further include a limiting member 50 fixed to the support base 10. The cutter 20 is disposed between the support base 10 and the limiting member 50, and the limiting member 50 is located on the path of rotation of the cutter 20 relative to the support base 10. More specifically, the limiting member 50 is a plate, such as a metal plate, which is inclined relative to the elastic member 30. The connecting member 210 of the cutter 20 is located between the support base 10 and the limiting member 50. The extending direction of the blade 220 of the cutter 20 may be substantially parallel to the extending direction of the limiting member 50.

[0019] Figures 3 to 6 For use of included Figure 1 A schematic diagram of a film-peeling machine with a scraper mechanism removing film from a substrate. The film-peeling machine 2 includes the scraper mechanism 1 (see...). Figures 3 to 6 ) and film-tearing device 3 (see Figure 6A scraper mechanism 1 is used to separate the edge of film material A from film material B. A film-tearing device 3 is used to completely separate film material A from film material B. Film material A is, for example, but not limited to, Mylar film, and film material B is, for example, but not limited to, ABF film, which is attached to the surface of substrate S. Film material B overflows from the edge of film material A, and film material B surrounds or even covers the peripheral area of ​​film material A.

[0020] like Figure 2 and Figure 3 As shown, the support 10 of the scraper mechanism 1 can be driven by a motor or other power source (not shown) to move the cutter 20, the elastic element 30, and the path length adjustment element 40 together, thereby approaching the film material A and the film material B. The movement of the support 10 allows the cutter 20 to approach the edge of the film material B along the surface of the substrate S, so that the blade 220 of the cutter 20 can contact the interface where the substrate S and the film material B are adhered.

[0021] like Figure 2 and Figure 4 As shown, as the support 10 is continuously moved, the blade 220 of the tool 20 moves from the interface between the substrate S and the film material B to the surface of the film material B. During the process of the blade 220 moving to the surface of the film material B, the blade 220 may detach from the surface of the film material B. At this time, the elastic member 30 deforms, and a gap is formed between the connecting member 210 and the limiting member 50 of the tool 20. The deformed elastic member 30 then releases its elastic potential energy to recover, and the elastic potential energy released by the elastic member 30 drives the tool 20 to rotate slightly relative to the support 10, thereby causing the blade 220 to return to the surface of the film material B. When the film material B has a high surface hardness, the tool 20 has a certain degree of mobility due to the spring, so it can maintain movement along the surface of the film material B without inserting into the interior of the film material B.

[0022] Furthermore, the path length (i.e., the degree of vertical sway) of the tool 20 relative to the support 10 can be adjusted by the path length adjustment element 40. For example, refer to Figure 2 When the surface hardness of the film material B is high or the thickness is thick, the operator can pull the path length adjustment piece 40 to move the interference end 410 away from the columnar member 230 in the groove 211. At this time, since the contact area between the inclined surface of the interference end 410 and the inclined surface of the columnar member 230 is small, the cutter 20 has a longer rotatable path relative to the support seat 10 and has a greater degree of mobility, which allows the tapered tip 221 of the blade 220 to be raised to a higher height.

[0023] like Figure 2 and Figure 5As shown, as the support 10 continues to move, the blade 220 of the cutter 20 moves along the surface of the film material B and reaches the junction of film materials A and B. At the junction of film materials A and B, film material A is not covered by film material B, or the thickness of film material B covering film material A is very thin. Due to the mobility of the cutter 20, when film material A is relatively soft, the cutter 20 can be lowered by the elastic element 30 and its own weight, causing the blade 220 to extend from the junction of film materials A and B into the area below film material A. The insertion of the blade 220 causes the edge of film material A to separate from film material B, that is, a small portion of the edge of film material A is torn off, while the rest of film material A remains attached to the surface of film material B.

[0024] like Figure 2 and Figure 6 As shown, the film-tearing device 3 (e.g., a suction cup or tape roller) is attached to a small portion of film material A that has been separated from film material B, and the film-tearing device 3 moves to continuously separate film material A from film material B along the moving direction of the film-tearing device 3.

[0025] In summary, according to the doctor blade mechanism and film-tearing machine disclosed in this invention, the blade is connected to the support seat via an elastic element, thus providing the blade with a certain degree of mobility. When the main film material overflows from the edge of the release film, when the blade of the movable blade touches the main film material, the blade can remain moving along the surface of the main film material without penetrating its interior. Then, when the blade touches the release film material, the blade can be lowered by the elastic element and its own weight, causing the blade to extend under the release film material, thereby separating the release film material from the main film material. Using the doctor blade mechanism of this invention for film tearing eliminates the need for the step of pre-burning off the overflowing film material with a laser.

[0026] [Symbol Explanation]

[0027] 1. Scraper Mechanism

[0028] 2. Film peeling machine

[0029] 3. Film tearing device

[0030] 10 Support base

[0031] 20 knives

[0032] 210 Connector

[0033] 211 Through slot

[0034] 220 blades

[0035] 221 Tapered blade tip

[0036] 230 columnar components

[0037] 231 Male-Female Matching Structure

[0038] 30 Elastic element

[0039] 40 Path length adjustment piece

[0040] 410 Interference end

[0041] 50 limit components

[0042] A and B film materials

[0043] S substrate.

Claims

1. A scraper mechanism for a film-peeling machine, characterized in that, Include: Support; The cutting tool is pivotally connected to the support; and A path length adjustment component is provided on the support base. This component limits the path length of the tool's rotation relative to the support base, thereby adjusting the degree of vertical wobble of the tool. The path length adjusting component can move relative to the support to approach or move away from the tool, and the path length adjusting component interferes with the tool to limit the path length of the tool's rotation. The path length adjustment member has a tapered end, the tool has a tapered recess corresponding to the tapered end, and the path length adjustment member can move relative to the support so that the tapered end extends into the tapered recess, thereby limiting the path length of the tool rotation by the extent to which the tapered end is inserted into the tapered recess.

2. The scraper mechanism of the film-tearing machine according to claim 1, wherein the blade includes a connector, a blade fixed to the connector, and a columnar member disposed on the connector, the connector being pivotally connected to the support seat, the columnar member being located in the through groove of the connector, and the columnar member having the tapered recess.

3. A film-peeling machine, characterized in that, Include: The scraper mechanism of the film-tearing machine according to any one of claims 1 to 2 is used to separate the edge of the first film material from the second film material; and A film-tearing device is used to completely separate the first film material from the second film material.

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