Communication device, control method of communication device, and communication system

Abstract

This invention relates to a communication device, a control method for the communication device, and a communication system. The communication device (12) includes: a wide-area wireless communication unit (46) that transmits and receives information with a transport trolley (4) via a wireless access point (10) through wide-area wireless communication; a short-range wireless communication unit (50) that transmits and receives information with a communication device (8) through short-range wireless communication with a communication range narrower than that of wide-area wireless communication; and a control unit (54) that converts information received by the wide-area wireless communication unit (46) from information for wide-area wireless communication to information for short-range wireless communication and outputs it to the short-range wireless communication unit (50), and converts information received by the short-range wireless communication unit (50) from information for short-range wireless communication to information for wide-area wireless communication and outputs it to the wide-area wireless communication unit (46).

Description

Technical Field

[0001] This invention relates to a communication device, a control method for the communication device, and a communication system. Background Technology

[0002] Semiconductor manufacturing systems are known to include bridge-type transport trolleys equipped with FOUPs (Front Opening Unified Pods) for transporting and storing semiconductor wafers, and semiconductor manufacturing apparatuses for processing semiconductor wafers (see, for example, Patent Document 1).

[0003] The SEMI (Semiconductor Equipment and Materials International) E84 communication sequence is used in communication between the transport trolley and the communication equipment connected to the mounting port of the semiconductor manufacturing apparatus. Control signals are transmitted and received between the transport trolley and the communication equipment via the E84 communication sequence when transferring the FOUP between the transport trolley and the mounting port.

[0004] The E84 communication sequence consists of three steps: a pre-transfer step, a transfer step, and a post-transfer step. In the pre-transfer step, control signals indicating the commencement of FOUP transfer are exchanged between the transport carriage and the communication device. In the transfer step, control signals for executing the FOUP transfer are exchanged between the transport carriage and the communication device, and the actual transfer of the FOUP is performed. In the post-transfer step, control signals indicating the end of the FOUP transfer are exchanged between the transport carriage and the communication device. The pre-transfer, transfer, and post-transfer steps are executed while the transport carriage is stopped immediately above the loading port.

[0005] Patent Document 1: Japanese Patent Application Publication No. 2019-117616

[0006] In semiconductor manufacturing systems, multiple transport trolleys need to simultaneously execute E84 communication sequences via wireless communication with each communication device at each of the multiple mounting ports to which the FOUP (Front-End Unit) is to be transferred. Furthermore, the power allocated to each communication device at each mounting port is limited according to the semiconductor manufacturing apparatus, requiring the communication devices to operate in a power-saving mode. Therefore, to avoid interference and to perform power-saving wireless communication, short-range wireless communication with a limited communication range (e.g., within 3-5 meters) is adopted as the method for wireless communication between the transport trolleys and the communication devices.

[0007] However, in recent years, in order to further improve the manufacturing efficiency of semiconductors in the aforementioned semiconductor manufacturing systems, a pre-transfer step and a post-transfer step of executing E84 communication sequences during the movement of the transport trolley have been proposed.

[0008] However, in short-range wireless communication between the transport trolley and the communication equipment, due to the suppression of the radio wave output strength, problems such as reduced received radio wave strength between the transport trolley and the communication equipment when traveling from a position immediately above the loading port occur in the pre-transfer and post-transfer steps. Summary of the Invention

[0009] The present invention was made in view of such a problem, and its object is to provide a communication device, a control method for the communication device, and a communication system that can stabilize wireless communication between a conveyor trolley and a communication device.

[0010] To achieve the above objectives, one embodiment of the present invention provides a communication device for relaying communication between a transport trolley for transporting a transported object and a communication device connected to a transfer device for transferring the transported object between the transport trolley and the transport trolley. The device comprises: a wide-area wireless communication unit that transmits and receives information with the transport trolley via a wide-area wireless communication base station; a short-range wireless communication unit that transmits and receives information with the communication device via short-range wireless communication with a narrower communication range than the wide-area wireless communication; and a control unit that converts information received by the wide-area wireless communication unit from information for wide-area wireless communication to information for short-range wireless communication and outputs it to the short-range wireless communication unit, and converts information received by the short-range wireless communication unit from information for short-range wireless communication to information for wide-area wireless communication and outputs it to the wide-area wireless communication unit.

[0011] According to this embodiment, even when the conveyor trolley is traveling at a position directly above the transfer device, the wide-area wireless communication unit transmits and receives information with the conveyor trolley via a wide-area wireless communication base station (e.g., a wireless access point). Therefore, it is possible to avoid a decrease in the received radio wave strength between the conveyor trolley and the communication device, thus stabilizing the wireless communication between them. Furthermore, the short-range wireless communication unit transmits and receives information with the communication device via short-range wireless communication, enabling the communication device to operate with low power consumption.

[0012] For example, it can also be configured such that: (i) when the aforementioned conveyor trolley travels in a direction approaching the aforementioned transfer device before transferring the conveyed object between the trolley and the aforementioned transfer device, or travels in a direction away from the aforementioned transfer device after transferring the conveyed object between the trolley and the aforementioned transfer device, and information is sent to the aforementioned communication device, the aforementioned wide-area wireless communication unit receives information from the aforementioned conveyor trolley via the aforementioned wide-area wireless communication base station through the aforementioned wide-area wireless communication; the aforementioned control unit converts the information received by the aforementioned wide-area wireless communication unit from information for wide-area wireless communication to information for short-range wireless communication and outputs it to the aforementioned short-range wireless communication unit; the aforementioned short-range wireless communication unit sends the information converted by the aforementioned control unit to the aforementioned communication device through the aforementioned short-range wireless communication. (ii) When the aforementioned communication device sends information to the aforementioned transport vehicle before the aforementioned transport vehicle transfers the aforementioned transported item between itself and the aforementioned transfer device in a direction approaching the aforementioned transfer device, or when the aforementioned transport vehicle transfers the aforementioned transported item between itself and the aforementioned transfer device in a direction away from the aforementioned transfer device, the aforementioned short-range wireless communication unit receives information from the aforementioned communication device via the aforementioned short-range wireless communication, the aforementioned control unit converts the information received by the aforementioned short-range wireless communication unit from information for short-range wireless communication to information for wide-area wireless communication and outputs it to the aforementioned wide-area wireless communication unit, the aforementioned wide-area wireless communication unit transmits the information converted by the aforementioned control unit to the aforementioned transport vehicle via the aforementioned wide-area wireless communication base station through the aforementioned wide-area wireless communication.

[0013] According to this embodiment, for example, when the E84 communication sequence of SEMI is applied between the transport trolley and the communication device, the wireless communication between the transport trolley and the communication device can be stabilized even when the transport trolley is traveling at a position directly above the transfer device, in the pre-transfer or post-transfer steps of the E84 communication sequence.

[0014] For example, the communication device may also be configured such that it further includes an acquisition unit that acquires communication status information indicating the communication status between other transport vehicles (excluding the transport vehicle) and the communication device during the operation of the transport vehicle, and the wide-area wireless communication unit transmits the communication status information acquired by the acquisition unit to the transport vehicle in motion via the wide-area wireless communication base station and the wide-area wireless communication.

[0015] According to this embodiment, the traveling transport vehicle can appropriately change its travel route based on communication status information indicating the communication status between other transport vehicles and the communication device, such as when other transport vehicles are performing the transfer step of the E84 communication sequence on the travel route of the transport vehicle.

[0016] For example, the communication device may also be configured such that it further includes an acquisition unit that acquires location information indicating the location of other transport vehicles besides the transport vehicle during the operation of the transport vehicle, and the wide-area wireless communication unit transmits the location information acquired by the acquisition unit to the transport vehicle in motion via the wide-area wireless communication base station and the wide-area wireless communication.

[0017] According to this embodiment, the traveling transport trolley can appropriately change its travel route based on location information indicating the location of other transport trolleys besides itself, for example, when other transport trolleys are performing a transfer step of an E84 communication sequence on the travel route of the transport trolley.

[0018] Furthermore, one embodiment of the present invention provides a control method for a communication device that relays communication between a transport trolley for transporting a transported object and a communication device connected to a transfer device that transfers the transported object between the transport trolley and the transport trolley. The method includes the following steps: (a) receiving information from the transport trolley via a wide-area wireless communication base station using wide-area wireless communication; (b) converting the information received in (a) from wide-area wireless communication information to short-range wireless communication information; (c) transmitting the converted information from (b) to the communication device via short-range wireless communication, which has a narrower communication range than the wide-area wireless communication; (d) receiving information from the communication device via the short-range wireless communication; (e) converting the information received in (d) from short-range wireless communication information to wide-area wireless communication information; and (f) transmitting the converted information from (e) to the transport trolley via the wide-area wireless communication base station using wide-area wireless communication.

[0019] According to this embodiment, even when the conveyor trolley is traveling at a position directly above the transfer device, it can still transmit and receive information via wide-area wireless communication via a wide-area wireless communication base station (e.g., a wireless access point). Therefore, it is possible to avoid a decrease in the received radio wave strength between the conveyor trolley and the communication device, thus stabilizing the wireless communication between them. Furthermore, by transmitting and receiving information via short-range wireless communication with the communication device, the communication device can operate with low power consumption.

[0020] Furthermore, a communication system according to one embodiment of the present invention includes: a conveyor trolley for conveying a conveyed object; a communication device connected to a transfer device for transferring the conveyed object between the conveyor trolley and the conveyor trolley; and a communication device for relaying communication between the conveyor trolley and the communication device. The conveyor trolley has a first communication unit for transmitting and receiving information via a wide-area wireless communication base station to the communication device via wide-area wireless communication. The communication device has a second communication unit for transmitting and receiving information via a short-range wireless communication with the communication device, which has a narrower communication range than the wide-area wireless communication. The communication device includes a wide-area wireless... The communication unit transmits and receives information via the wide-area wireless communication base station to the first communication unit of the transport trolley via the wide-area wireless communication; the short-range wireless communication unit transmits and receives information via the short-range wireless communication to the second communication unit of the communication device; and the control unit converts information received by the wide-area wireless communication unit from information for wide-area wireless communication to information for short-range wireless communication and outputs it to the short-range wireless communication unit, and converts information received by the short-range wireless communication unit from information for short-range wireless communication to information for wide-area wireless communication and outputs it to the wide-area wireless communication unit.

[0021] According to this embodiment, even when the conveyor trolley is traveling at a position directly above the transfer device, the wide-area wireless communication unit of the communication device transmits and receives information with the first communication unit of the conveyor trolley via a wide-area wireless communication base station (e.g., a wireless access point). Therefore, it is possible to avoid a decrease in the received radio wave strength between the conveyor trolley and the communication device, and to stabilize the wireless communication between them. Furthermore, the short-range wireless communication unit of the communication device transmits and receives information with the second communication unit of the communication device via short-range wireless communication, enabling the communication device to operate with low power consumption.

[0022] Furthermore, the present invention can be implemented not only as a device, but also as a method of setting the processing mechanism constituting the device as steps, or as a program for causing a computer to execute these steps, or as a recording medium such as a computer-readable CD-ROM containing the program, or as information, data, or signals representing the program. Moreover, these programs, information, data, and signals can also be distributed via communication networks such as the Internet.

[0023] The communication device according to one embodiment of the present invention can stabilize wireless communication between the transport trolley and the communication equipment. Attached Figure Description

[0024] Figure 1 This is a diagram showing an overview of the communication system according to the implementation method.

[0025] Figure 2 This is a diagram illustrating an example of the E84 communication sequence when loading a FOUP.

[0026] Figure 3 This is a diagram illustrating an example of the E84 communication sequence during FOUP unloading.

[0027] Figure 4 This is a block diagram illustrating the functional structure of the communication system in the implementation method.

[0028] Figure 5 This is a diagram illustrating an example of information used in wide-area wireless communication.

[0029] Figure 6 This is a diagram illustrating an example of information used in short-range wireless communication.

[0030] Figure 7 This is a simplified diagram illustrating the operation of the communication system in the implementation steps prior to the transfer.

[0031] Figure 8 It is a timing diagram that shows the flow of the communication system's operation in the pre-transfer steps of the implementation method.

[0032] Figure 9 This is a simplified diagram illustrating the operation of the communication system in the implementation of the transfer process.

[0033] Figure 10 It is a timing diagram that shows the flow of the communication system's operation in the transfer step.

[0034] Figure 11 This is a simplified diagram illustrating the operation of the communication system in the implementation steps after the transfer. Detailed Implementation

[0035] Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. Furthermore, the embodiments described below are general or specific examples. The numerical values, shapes, materials, structural members, arrangement positions of structural members, connection methods, steps, and order of steps shown in the following embodiments are examples and are not intended to limit the scope of the present invention. Additionally, in the structural members of the following embodiments, structural members not described in the independent technical solution are described as arbitrary structural members.

[0036] (Implementation Method)

[0037] [1. Overview of Communication Systems]

[0038] First, refer to Figures 1-3 An overview of the communication system 2 in the implementation method will be described. Figure 1This is a diagram showing an outline of the communication system 2 according to the implementation method. Figure 2 This is a diagram illustrating an example of the E84 communication sequence when FOUP14 is loaded. Figure 3 This is a diagram illustrating an example of the E84 communication sequence during FOUP14 unloading.

[0039] like Figure 1 As shown, the communication system 2 is, for example, a system built within a semiconductor manufacturing plant. The communication system 2 includes a conveyor trolley 4, a semiconductor manufacturing apparatus 6, communication equipment 8, a wireless access point 10, and a communication device 12.

[0040] The transport trolley 4 is a bridge-type transport trolley used to transport FOUP 14 (an example of the transported item) containing semiconductor wafers, known as an OHT (Overhead Hoist Transfer). The transport trolley 4 operates unmanned along tracks 16 installed in the ceiling of the semiconductor manufacturing plant. Furthermore, although multiple (e.g., hundreds) transport trolleys 4 are configured in the semiconductor manufacturing plant, for ease of explanation, only a few are described below. Figure 1 The middle image shows a conveyor trolley 4.

[0041] Inside the transport carriage 4, a gripping part 18 for holding the FOUP 14 is mounted vertically and flexibly. For example, when transferring the FOUP 14 between the transport carriage 4 and the loading port 22 (described later) of the semiconductor manufacturing apparatus 6, with the transport carriage 4 stopped at a position immediately above the loading port 22, the gripping part 18 descends from the transport carriage 4 to the vicinity of the loading port 22. Furthermore, when the transfer of the FOUP 14 is completed, the gripping part 18 rises from the vicinity of the loading port 22 back onto the transport carriage 4 and is stored inside the transport carriage 4.

[0042] Semiconductor manufacturing apparatus 6 is a device for processing or temporarily placing semiconductor wafers and the like housed in FOUP 14, and is located directly below track 16. Semiconductor manufacturing apparatus 6 has a loading / unloading outlet 20 for loading and unloading FOUP 14, and a loading port 22 (an example of a transfer device) disposed near the loading / unloading outlet 20. Loading port 22 is a loading port for loading FOUP 14. Loading port 22 transfers FOUP 14 between itself and the holding part 18 of the transport trolley 4, and transfers FOUP 14 between itself and semiconductor manufacturing apparatus 6 via the loading / unloading outlet 20.

[0043] Furthermore, although semiconductor manufacturing plants have multiple (e.g., thousands) semiconductor manufacturing units 6, for ease of explanation, in Figure 1 Only one semiconductor manufacturing apparatus 6 is shown in the figure. In addition, although the semiconductor manufacturing apparatus 6 has been described in this embodiment with one mounting port 22, it is not limited to this and may have multiple mounting ports 22.

[0044] Communication device 8 is a server that mediates communication between the transport trolley 4 and the mounting port 22 of the semiconductor manufacturing apparatus 6. Communication device 8 is disposed on the top surface of the semiconductor manufacturing apparatus 6 and connected to the mounting port 22 of the semiconductor manufacturing apparatus 6 via a parallel cable 24. Thus, communication device 8 can communicate with the mounting port 22 of the semiconductor manufacturing apparatus 6. The SEMI E84 communication sequence is used in the communication between communication device 8 and the transport trolley 4. Furthermore, although the semiconductor manufacturing plant has the same number of communication devices 8 as the mounting ports 22, for ease of explanation, [the following is omitted as it is not directly related to the main text]. Figure 1 Only one communication device 8 is shown in the figure.

[0045] Wireless access point 10 is an access point for a wireless LAN (Local Area Network). Wireless access point 10 mediates wide-area wireless communication between the conveyor trolley 4 and the communication device 12. That is, both the conveyor trolley 4 and the communication device 12 are wireless LAN stations. Furthermore, the wide-area wireless communication is based on the wireless LAN, and its communication range is, for example, approximately 20-30 meters squared centered on wireless access point 10. Wireless access point 10 is an example of a wide-area wireless communication base station.

[0046] Communication device 12 is a relay device used to relay communication between the conveyor trolley 4 and the communication device 8. Communication device 12 is, for example, positioned above track 16. Communication device 12 transmits and receives information with the conveyor trolley 4 via wide-area wireless communication through wireless access point 10. Additionally, communication device 12 transmits and receives information with the communication device 8 via short-range wireless communication. Furthermore, short-range wireless communication is, for example, BLE (Bluetooth Low Energy) based wireless communication, and its communication range is narrower than that of wide-area wireless communication, for example, approximately 5 meters squared around communication device 12. Short-range wireless communication is also called "proximity wireless communication".

[0047] In the aforementioned communication system 2, when loading the FOUP14 placed in the loading port 22 via the conveyor trolley 4, and when unloading the FOUP14 from the conveyor trolley 4 to the loading port 22, control signals (information) are transmitted and received between the conveyor trolley 4 and the communication device 8 via the E84 communication sequence. In the E84 communication sequence, when transferring the FOUP14 between the conveyor trolley 4 and the loading port 22, an interlocking sequence consisting of multiple processes is used, such that the process will not move to the next process unless a specific control signal (e.g., L_REQ) is cut off.

[0048] like Figure 2As shown, the E84 communication sequence during FOUP14 loading consists of three steps: a pre-load step, a load step, and a post-load step. Additionally, as... Figure 3 As shown, the E84 communication sequence during FOUP14 unloading is... Figure 2 It is the same, consisting of three steps: the pre-transfer step, the transfer step, and the post-transfer step.

[0049] like Figure 2 as well as Figure 3 As shown, in the pre-transfer step, control signals indicating the commencement of FOUP14 transfer are exchanged between the conveyor trolley 4 and the communication device 8. During the transfer step, control signals for executing the FOUP14 transfer are exchanged between the conveyor trolley 4 and the communication device 8, and the actual transfer of FOUP14 is performed. In the post-transfer step, control signals indicating the completion of FOUP14 transfer are exchanged between the conveyor trolley 4 and the communication device 8.

[0050] The pre-transfer step is performed while the conveyor trolley 4 is traveling in a direction approaching and directly above the loading port 22 where the FOUP 14 is to be transferred. The transfer step is performed after the conveyor trolley 4 has reached and stopped at the loading port 22 where the FOUP 14 is to be transferred. The post-transfer step is performed while the conveyor trolley 4 is traveling in a direction away from the loading port 22 where the FOUP 14 has been transferred.

[0051] [2. Functional Structure of Communication Systems]

[0052] Reference Figures 4-6 The functional structure of the communication system 2 in the implementation method will be described. Figure 4 This is a block diagram illustrating the functional structure of the communication system 2 in the implementation method. Figure 5 This is a diagram illustrating an example of information used in wide-area wireless communication. Figure 6 This is a diagram illustrating an example of information used in short-range wireless communication.

[0053] like Figure 4 As shown, the conveyor trolley 4, wireless access point 10, and communication device 12 are connected to the wireless network 26. The wireless network 26 is, for example, a wireless LAN based on the IEEE 802.11 series, constructed from WiFi (registered trademark) in the 2.4 GHz or 5 GHz band.

[0054] The transport trolley 4 includes: a wide-area wireless communication unit 28 (an example of a first communication unit), an antenna 30, a short-range wireless communication unit 32, an antenna 34, and a control unit 36.

[0055] The wide-area wireless communication unit 28 transmits and receives information with the communication device 12 via the wireless access point 10. The antenna 30 is an antenna for wide-area wireless communication and is connected to the wide-area wireless communication unit 28.

[0056] The short-range wireless communication unit 32 transmits and receives information with the communication device 8 via short-range wireless communication. The antenna 34 is an antenna for short-range wireless communication and is connected to the short-range wireless communication unit 32.

[0057] The control unit 36 ​​performs various processes by controlling the wide-area wireless communication unit 28 and the short-range wireless communication unit 32. Specifically, the control unit 36 ​​controls the conveyor trolley 4 just before it reaches the position directly above the loading port 22 where the FOUP 14 is to be transferred, by conducting short-range wireless communication with the communication device 8 via the short-range wireless communication unit 32. Alternatively, the control unit 36 ​​can also control the conveyor trolley 4 when its position at the loading port 22 and its free-travel position are within a constant range, by conducting short-range wireless communication with the communication device 8 via the short-range wireless communication unit 32 without using the communication device 12. In this case, the power consumption of the communication device 12 can be reduced. Furthermore, the control unit 36 ​​can be implemented, for example, by a processor reading and executing software programs recorded on a recording medium such as a hard disk or semiconductor memory.

[0058] The mounting port 22 of the semiconductor manufacturing apparatus 6 has a communication unit 38 and a control unit 40.

[0059] Communication unit 38 via parallel cable 24 (see reference) Figure 1 It sends and receives information with communication device 8.

[0060] The control unit 40 performs various processes via the control communication unit 38. Specifically, the control unit 40 performs processes for transferring FOUP14 (see reference 4) between the control unit 4 and the transport trolley 4. Figure 1 Interlocking processing is performed on the inlet / outlet 20 (see reference). Additionally, the control unit 40 executes procedures for handling the inlet / outlet 20. Figure 1 The control unit 40 performs the handover process between the FOUP14 and the semiconductor manufacturing apparatus 6. Furthermore, the control unit 40 implements this process, for example, by a processor reading and executing a software program recorded on a recording medium such as a hard disk or semiconductor memory.

[0061] The communication device 8 has a communication unit 42 (an example of a second communication unit) and a control unit 44.

[0062] The communication unit 42 transmits and receives information with the mounting port 22 via parallel cable 24. In addition, the communication unit 42 transmits and receives information with the conveyor trolley 4 and the communication device 12 via short-range wireless communication.

[0063] The control unit 44 performs various processes by controlling the communication unit 42. Furthermore, the control unit 44 may be implemented, for example, by a processor reading and executing software programs recorded on a recording medium such as a hard disk or semiconductor memory.

[0064] The communication device 12 includes a wide-area wireless communication unit 46, an antenna 48, a short-range wireless communication unit 50, an antenna 52, a control unit 54, and an acquisition unit 56.

[0065] The wide-area wireless communication unit 46 transmits and receives information with the transport trolley 4 via the wireless access point 10. The antenna 48 is an antenna for wide-area wireless communication and is connected to the wide-area wireless communication unit 46.

[0066] The short-range wireless communication unit 50 transmits and receives information with the communication device 8 via short-range wireless communication. The antenna 52 is an antenna for short-range wireless communication and is connected to the short-range wireless communication unit 50. Furthermore, although the communication device 12 has only one set of short-range wireless communication unit 50 and antenna 52 in this embodiment, it is not limited to this. For example, when transmitting and receiving information with multiple communication devices 8 simultaneously via short-range wireless communication, it may have multiple sets of short-range wireless communication units 50 and antennas 52.

[0067] The control unit 54 performs various processes by controlling the wide-area wireless communication unit 46 and the short-range wireless communication unit 50. Specifically, the control unit 54 converts information received by the wide-area wireless communication unit 46 from information intended for wide-area wireless communication into information intended for short-range wireless communication and outputs it to the short-range wireless communication unit 50. Additionally, the control unit 54 converts information received by the short-range wireless communication unit 50 from information intended for short-range wireless communication into information intended for wide-area wireless communication and outputs it to the wide-area wireless communication unit 46. Furthermore, the control unit 54 can be implemented, for example, by a processor reading and executing software programs recorded on a recording medium such as a hard disk or semiconductor memory.

[0068] Here, the information used for wide-area wireless communication is, for example, Figure 5 Data frame 58 as shown in (a). Figure 5 Data frame 58 shown in (a) contains fields for Frame Control, Duration, MAC Address 1–3, Seq Control, MAC Address 4, Data, and CRC. Figure 5 The fields of Data shown in (a) contain Figure 5 (b) shows the IP header, UDP header, and various fields of the communication data. Furthermore, in Figure 5 The fields in the communication data shown in (b) contain Figure 5(c) shows the short-range wireless communication frequency band, short-range wireless communication channel, short-range wireless connection target device ID, short-range wireless connection source ID, and various fields of the short-range wireless communication data. Furthermore, in Figure 5 The field of the short-range wireless communication data shown in (c) contains Figure 5 The fields of transmission direction, INPUT DATA, and OUTPUT DATA are shown in (d).

[0069] In addition, information used in short-range wireless communication is, for example, Figure 6 Data frame 60 as shown. Figure 6 The data frame 60 shown contains fields for Near Range Wireless Target Device ID, Near Range Wireless Source ID, Transmission Direction, INPUTDATA, and OUTPUTDATA.

[0070] For example, when the wide area wireless communication unit 46 receives... Figure 5 In the case of data frame 58 shown in (a), the control unit 54 extracts data from data frame 58 received from the wide area wireless communication unit 46. Figure 5 The fields of short-range wireless connection target device ID, short-range wireless connection source ID, transmission direction, INPUT DATA, and OUTPUT DATA shown in (c) and (d) are used to generate the short-range wireless connection target device ID, short-range wireless connection source ID, transmission direction, INPUT DATA, and OUTPUT DATA. Figure 6 The data frame 60 shown. In this way, the control unit 54 converts the data frame 58, which is used for wide-area wireless communication, into the data frame 60, which is used for short-range wireless communication.

[0071] Moreover, for example, when the near-field wireless communication unit 50 receives... Figure 6 In the case of the data frame 60 shown, the control unit 54 generates a new data frame by extracting the fields of the short-range wireless connection target device ID, short-range wireless connection source ID, transmission direction, INPUT DATA, and OUTPUT DATA of the data frame 60 received by the short-range wireless communication unit 50. Figure 5 Data frame 58 is shown in (a). In this way, the control unit 54 converts data frame 60, which is used for short-range wireless communication, into data frame 58, which is used for wide-area wireless communication.

[0072] During the movement of the conveyor trolley 4, the acquisition unit 56 acquires communication status information indicating the communication status between other conveyor trolleys (not shown) and the communication device 8. Additionally, during the movement of the conveyor trolley 4, it acquires location information indicating the position of other conveyor trolleys. The acquisition unit 56 can also acquire communication status information and location information from the wide-area wireless communication unit 46 or the short-range wireless communication unit 50, or from the upper-level controller (not shown) of the overall communication system 2.

[0073] [3. Operation of the communication system]

[0074] [3-1. Communication system actions before migration]

[0075] Reference Figure 7 as well as Figure 8 The operation of communication system 2 before the transfer is explained. Figure 7 This is a simplified diagram illustrating the operation of the communication system 2 in the implementation method during the pre-transfer steps. Figure 8 This is a timing diagram showing the flow of the operation of the communication system 2 in the implementation method during the steps before the transfer.

[0076] The following, such as Figure 7 As shown, consider a semiconductor manufacturing apparatus 6a, 6b, 6c, 6d, 6e, and 6f (6a to 6f) arranged in this order within a semiconductor manufacturing plant. Semiconductor manufacturing apparatuses 6a to 6f each have mounting ports 22a, 22b, 22c, 22d, 22e, and 22f (22a to 22f). Communication devices 8a, 8b, 8c, 8d, 8e, and 8f (8a to 8f) are connected to mounting ports 22a to 22f.

[0077] Additionally, the following describes the transfer of FOUP14 between the transport trolley 4 and the loading port 22d of the semiconductor manufacturing apparatus 6d (see reference). Figure 1 Please explain the situation. For example... Figure 7 As shown, the pre-transfer step is performed while the transport trolley 4 is traveling in a direction close to the position above the loading port 22d where the FOUP 14 is to be transferred. During the pre-transfer step, information indicating that the transfer of the FOUP 14 will then begin is transmitted and received between the transport trolley 4 and the communication device 8d.

[0078] Furthermore, the communication device 12 is capable of transmitting and receiving information with communication devices 8a to 8f via short-range wireless communication, for example. Additionally, the communication device 12 is capable of wide-area wireless communication with devices located directly above the semiconductor manufacturing apparatus 6d, near the semiconductor manufacturing apparatus 6a (in... Figure 7(left side in the middle), and on the side of semiconductor manufacturing device 6f, which is immediately above semiconductor manufacturing device 6d (in Figure 7 Information is transmitted and received between the four conveyor trolleys (the middle one is on the right) that are moving.

[0079] First, the information transmission situation of the 4-way communication device 8d of the conveyor trolley will be explained. For example... Figure 8 As shown, the wide-area wireless communication unit 28 of the conveyor trolley 4 transmits information (information for wide-area wireless communication) to the communication device 12 via wide-area wireless communication (S101). The wireless access point 10 forwards the information from the conveyor trolley 4 to the communication device 12 via wide-area wireless communication (S102).

[0080] The wide-area wireless communication unit 46 of the communication device 12 receives information relayed from the wireless access point 10 via wide-area wireless communication (S103). The control unit 54 of the communication device 12 converts the information received by the wide-area wireless communication unit 46 from wide-area wireless communication information to short-range wireless communication information (S104) and outputs it to the short-range wireless communication unit 50. The short-range wireless communication unit 50 of the communication device 12 transmits the information converted by the control unit 54 (short-range wireless communication information) to the communication device 8d via short-range wireless communication (S105).

[0081] The communication unit 42 of the communication device 8d receives information sent from the communication device 12 via short-range wireless communication (S106).

[0082] Next, the process of communication device 8d sending information to conveyor trolley 4 will be explained. For example... Figure 8 As shown, the communication unit 42 of the communication device 8d sends information (information for short-range wireless communication) to the communication device 12 via short-range wireless communication (S107).

[0083] The short-range wireless communication unit 50 of the communication device 12 receives information sent from the communication device 8d via short-range wireless communication (S108). The control unit 54 of the communication device 12 converts the information received by the short-range wireless communication unit 50 into information for wide-area wireless communication (S109) and outputs it to the wide-area wireless communication unit 46. The wide-area wireless communication unit 46 of the communication device 12 transmits the information converted by the control unit 54 (information for wide-area wireless communication) to the transport trolley 4 via wide-area wireless communication (S110).

[0084] Wireless access point 10 transmits the information from communication device 12 sent in step S110 to transport trolley 4 via wide-area wireless communication (S111). Wide-area wireless communication unit 28 of transport trolley 4 receives the information transmitted from wireless access point 10 via wide-area wireless communication (S112).

[0085] [3-2. Operation of the communication system during the transfer step]

[0086] Reference Figure 9 as well as Figure 10 The operation of communication system 2 during the transfer step is explained. Figure 9 This is a simplified diagram illustrating the operation of the communication system 2 in the implementation method during the transfer step. Figure 10 This is a timing diagram illustrating the operation of the communication system 2 in the implementation method during the transfer step.

[0087] The following, as described above, explains the transfer of FOUP14 between the transport trolley 4 and the loading port 22d of the semiconductor manufacturing apparatus 6d. Figure 9 As shown, the transfer step is performed when the conveyor trolley 4 is stopped at a position immediately above the loading port 22d where the FOUP 14 is to be transferred. During the transfer step, information for performing the transfer of the FOUP 14 is transmitted and received between the conveyor trolley 4 and the communication device 8d, and the transfer of the FOUP 14 is actually carried out.

[0088] First, the information transmission situation of the 4-way communication device 8d of the conveyor trolley will be explained. For example... Figure 10 As shown, the short-range wireless communication unit 32 of the conveyor trolley 4 transmits information (information for short-range wireless communication) to the communication device 8d via short-range wireless communication (S201). The communication unit 42 of the communication device 8d receives the information transmitted from the conveyor trolley 4 via short-range wireless communication (S202).

[0089] Next, the process of communication device 8d sending information to conveyor trolley 4 will be explained. For example... Figure 10 As shown, the communication unit 42 of the communication device 8d sends information (information for short-range wireless communication) to the conveyor trolley 4 via short-range wireless communication (S203). The short-range wireless communication unit 32 of the conveyor trolley 4 receives information sent from the communication device 8d via short-range wireless communication (S204).

[0090] [3-3. Communication System Operations After Migration]

[0091] Reference Figure 11 The operation of communication system 2 after the transfer process is explained. Figure 11 This is a simplified diagram illustrating the operation of the communication system 2 in the implementation method during the post-transfer steps.

[0092] like Figure 11 As shown, the post-transfer step is performed while the conveyor trolley 4 is traveling in a direction immediately above the loading port 22d where FOUP14 has been transferred. In the post-transfer step, as described above... Figure 8Similarly, between the transport trolley 4 and the communication equipment 8d, information indicating the completion of the transfer of FOUP 14 is transmitted and received via the wireless access point 10 and the communication device 12.

[0093] [3-4. Other actions]

[0094] As described above, during the movement of the transport trolley 4, the acquisition unit 56 acquires communication status information indicating the communication status between other transport trolleys besides the transport trolley 4 and the communication devices 8a to 8f. The wide-area wireless communication unit 46, upon request from the moving transport trolley 4, transmits the communication status information and / or location information acquired by the acquisition unit 56 to the moving transport trolley 4 via the wireless access point 10 through wide-area wireless communication.

[0095] Thus, for example, when the transport trolley 4 is traveling in a direction close to the position immediately above the loading port 22d for a transfer step, and other transport trolleys are stopped at the position immediately above the loading port 22d for a transfer step, the traveling transport trolley 4 can appropriately change its travel route by bypassing the position immediately above the loading port 22d based on communication status information and / or position information.

[0096] [4. Effect]

[0097] In the communication system 2 of this embodiment, for example, in the pre-transfer or post-transfer steps of the E84 communication sequence, when the transport carriage 4 is traveling at a position directly above the loading port 22, the wide-area wireless communication unit 46 of the communication device 12 transmits and receives information with the transport carriage 4 via the wireless access point 10. This avoids a decrease in the received radio wave strength between the transport carriage 4 and the communication device 8, and stabilizes the wireless communication between the transport carriage 4 and the communication device 8.

[0098] Furthermore, the short-range wireless communication unit 50 of the communication device 12 transmits and receives information with the communication device 8 via short-range wireless communication, thus enabling the communication device 8 to operate with low power consumption. Therefore, for example, the communication device 8 can be operated using a power supply (24V, 100mA) provided via the PI / O (Programmed Input / Output) of the semiconductor manufacturing apparatus 6.

[0099] In addition, during the transfer step of the E84 communication sequence, information is transmitted and received between the conveyor trolley 4 and the communication device 8 via short-range wireless communication. Therefore, even if multiple conveyor trolleys 4 are simultaneously communicating with multiple communication devices 8, interference from wireless communication can be avoided.

[0100] (Other variations, etc.)

[0101] While the communication device of the present invention has been described above based on the embodiments described above, the present invention is not limited to the embodiments described above. Modifications conceived by those skilled in the art relative to the embodiments described above, as well as other forms achieved by arbitrarily combining the structural components of the embodiments described above, are also included in the present invention.

[0102] In the above embodiments, although WiFi (registered trademark) is used as the wide-area wireless communication, it is not limited to this. For example, PrivateLTE (Long Term Evolution) or Local5G, a fifth-generation mobile communication system, can also be used. When using this wide-area wireless communication, the wide-area wireless communication unit 28 and antenna 30 of the transport trolley 4, the wide-area wireless communication unit 46 and antenna 48 of the communication device 12, and the communication unit 42 of the communication equipment 8 are based on the communication standards of each wide-area wireless communication.

[0103] Furthermore, in the above embodiment, regarding the operation of the communication system 2 in the transfer step, in order to transmit and receive information for performing the FOUP4 transfer between the transport trolley 4 and the communication device 8, the short-range wireless communication unit 32 provided by the transport trolley 4 transmits and receives information (information for short-range wireless communication) to the communication device 8 via short-range wireless communication. However, the same communication method as the operation of the communication system 2 in the pre-transfer and post-transfer steps can also be applied. That is, in the operation of the communication system 2 in the transfer step, the transport trolley 4 transmits and receives information with the communication device 12 via the wireless access point 10 through wide-area wireless communication, and the communication device 12 performs short-range wireless communication with the communication device 8. In this way, the transport trolley 4 does not need to be equipped with a short-range wireless communication unit 32, and can perform interlocking communication with the communication device 8 through wide-area wireless communication, and can reduce the manufacturing cost and design complexity of the transport trolley 4.

[0104] Furthermore, in the above embodiments, each structural component can be constructed using dedicated hardware, or it can be implemented by executing software programs suitable for each structural component. Each structural component can also be implemented by a program execution unit such as a CPU or processor reading and executing software programs recorded on a recording medium such as a hard disk or semiconductor memory.

[0105] Industrial applications

[0106] The communication system of the present invention can be applied, for example, to semiconductor manufacturing systems for transporting FOUPs by a transport trolley traveling along a track set in the ceiling.

[0107] Explanation of reference numerals in the attached figures

[0108] 2…Communication System

[0109] 4…Conveyor trolley

[0110] 6, 6a, 6b, 6c, 6d, 6e, 6f… Semiconductor manufacturing equipment

[0111] 8, 8a, 8b, 8c, 8d, 8e, 8f… communication equipment

[0112] 10… Wireless Access Points

[0113] 12…communication device

[0114] 14…FOUP

[0115] 16…orbit

[0116] 18…Control Department

[0117] 20…Moving in and out

[0118] 22, 22a, 22b, 22c, 22d, 22e, 22f… (Ports)

[0119] 24…parallel cable

[0120] 26… Wireless Network

[0121] 28, 46… Wide Area Wireless Communications Department

[0122] 30, 34, 48, 52… antennas

[0123] 32, 50… Short-range wireless communication units

[0124] 36, 40, 44, 54… Control Department

[0125] 38, 42…Ministry of Communications

[0126] 56… Acquisition Department

[0127] Data frames 58, 60...

Claims

1. A communication system comprising a conveyor trolley for conveying a conveyed object, a communication device connected to a transfer device for transferring the conveyed object between the conveyor trolley and the communication device, and a communication device for relaying communication between the conveyor trolley and the communication device, wherein the communication device comprises: The wide-area wireless communication unit transmits and receives information with the aforementioned transport trolley via a wide-area wireless communication base station. A short-range wireless communication unit that transmits and receives information with the aforementioned communication device via short-range wireless communication with a narrower communication range than the aforementioned wide-area wireless communication; and The control unit converts information received by the wide-area wireless communication unit from wide-area wireless communication information into short-range wireless communication information and outputs it to the short-range wireless communication unit, and converts information received by the short-range wireless communication unit from short-range wireless communication information into wide-area wireless communication information and outputs it to the wide-area wireless communication unit. (i) When the aforementioned conveying trolley travels in a direction approaching the aforementioned transfer device before transferring the conveyed item between the trolley and the aforementioned transfer device, or travels in a direction away from the aforementioned transfer device after transferring the conveyed item between the trolley and the aforementioned transfer device, and information is transmitted to the aforementioned communication device. The aforementioned wide-area wireless communication unit receives information from the aforementioned transport trolley via the aforementioned wide-area wireless communication base station. The control unit converts the information received by the wide-area wireless communication unit from wide-area wireless communication information into short-range wireless communication information and outputs it to the short-range wireless communication unit. The aforementioned short-range wireless communication unit transmits the information converted by the aforementioned control unit to the aforementioned communication device via the aforementioned short-range wireless communication. (ii) When the communication device sends information to the conveyor trolley before transferring the transported item between the trolley and the transfer device in a direction approaching the transfer device, or after transferring the transported item between the trolley and the transfer device in a direction away from the transfer device. The aforementioned short-range wireless communication unit receives information from the aforementioned communication device via the aforementioned short-range wireless communication. The control unit converts the information received by the short-range wireless communication unit from short-range wireless communication information into wide-area wireless communication information and outputs it to the wide-area wireless communication unit. The aforementioned wide-area wireless communication unit transmits the information converted by the aforementioned control unit to the aforementioned transport trolley via the aforementioned wide-area wireless communication base station and through the aforementioned wide-area wireless communication.

2. The communication system according to claim 1, wherein, The aforementioned communication device further includes an acquisition unit that acquires communication status information indicating the communication status between the aforementioned communication device and other conveyor trolleys besides the aforementioned conveyor trolley during the movement of the aforementioned conveyor trolley. The aforementioned wide-area wireless communication unit transmits the communication status information obtained by the aforementioned acquisition unit to the moving transport vehicle via the aforementioned wide-area wireless communication base station and through the aforementioned wide-area wireless communication.

3. The communication system according to claim 1, wherein, The aforementioned communication device further includes an acquisition unit that acquires position information indicating the positions of other conveyor trolleys besides the aforementioned conveyor trolley during its travel. The aforementioned wide-area wireless communication unit transmits the location information obtained by the aforementioned acquisition unit to the moving transport vehicle via the aforementioned wide-area wireless communication base station and through the aforementioned wide-area wireless communication.

4. A communication method in a communication system, the communication system comprising a conveyor trolley for conveying a conveyed object, a communication device connected to a transfer device for transferring the conveyed object between the conveyor trolley and the communication device, and a communication device for relaying communication between the conveyor trolley and the communication device, the communication method comprising the following steps: (a) The step of receiving information from the aforementioned transport trolley via wide-area wireless communication through a wide-area wireless communication base station; (b) The step of converting the information received in (a) above from information for wide-area wireless communication to information for short-range wireless communication; (c) The step of sending the information converted in (b) above to the communication device via short-range wireless communication with a narrower communication range than the wide-area wireless communication described above; (d) The step of receiving information from the communication device via the above-described short-range wireless communication; (e) The step of converting the information received in (d) above from information for short-range wireless communication to information for wide-area wireless communication; and (f) The step of sending the converted information from (e) to the transport trolley via the aforementioned wide-area wireless communication base station and the aforementioned wide-area wireless communication. (i) When the aforementioned conveying trolley travels in a direction approaching the aforementioned transfer device before transferring the conveyed item between the trolley and the aforementioned transfer device, or travels in a direction away from the aforementioned transfer device after transferring the conveyed item between the trolley and the aforementioned transfer device, and information is transmitted to the aforementioned communication device. The above communication device Information from the aforementioned transport trolley is received via the aforementioned wide-area wireless communication base station through the aforementioned wide-area wireless communication. The received information is converted from information used for wide-area wireless communication to information used for short-range wireless communication. The converted information is sent to the aforementioned communication device via the aforementioned short-range wireless communication. (ii) When the communication device sends information to the conveyor trolley before transferring the transported item between the trolley and the transfer device in a direction approaching the transfer device, or after transferring the transported item between the trolley and the transfer device in a direction away from the transfer device. The above communication device Information is received from the aforementioned communication device via the aforementioned short-range wireless communication. The received information is converted from information used for short-range wireless communication to information used for wide-area wireless communication. The converted information is sent to the transport trolley via the aforementioned wide-area wireless communication base station.

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