Oscillator-based temperature sensor and sensor assembly

By using an oscillator-based temperature sensor to directly provide digital temperature values, the problem of data reduction and noise increase caused by analog-to-digital converter reading in MEMS sensors is solved, achieving low-power and high-efficiency temperature sensing.

CN116793515BActive Publication Date: 2026-05-29MEMSIC SEMICON (TIANJIN) CO LTD

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
MEMSIC SEMICON (TIANJIN) CO LTD
Filing Date
2023-06-13
Publication Date
2026-05-29

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Abstract

The application provides an oscillator-based temperature sensor and a sensor assembly. The temperature sensor comprises: a first oscillator generating a first clock signal of a first frequency, an absolute value of a temperature coefficient of the first clock signal being greater than or equal to a first predetermined value; a second oscillator generating a second clock signal of a second frequency, the second frequency being higher than the first frequency, an absolute value of a temperature coefficient of the second clock signal being less than a second predetermined value; a counting and control unit timing based on the first clock signal to obtain a predetermined time length; a counter counting the second clock signal to obtain and output a count value within the predetermined time length; and a calculation unit calculating a current digital temperature value according to a calibration count value output by the counter at a predetermined calibration temperature, a measurement count value output at a current temperature, and a linearly fitted temperature coefficient.
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