Method for purifying electronic-grade semiconductor stripping solution

By employing a purification method for electronic-grade semiconductor stripping fluid, utilizing distillation and a DCS system, the problem of recycling residual electronic-grade semiconductor stripping fluid was solved, achieving a highly efficient purification and environmentally friendly production process.

CN116870816BActive Publication Date: 2026-06-16SHANGHAI DEMEI SHIOU TECH CO LTD
2 Cites 0 Cited by

Patent Information

Application Number
CN202310842194.9
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2023-07-10
Publication Date
2026-06-16
Estimated Expiration
2043-07-10

AI Technical Summary

Technical Problem

The existing electronic-grade semiconductor stripping fluid does not meet the quality requirements, the residual liquid cannot be recycled and is difficult to treat, and it is not environmentally friendly.

Method used

An electronic-grade semiconductor stripping solution purification method is adopted, which includes steps such as pH detection, neutralization, distillation, crystallization, centrifugation, rectification and micromembrane filtration. The method is operated through a DCS system, and the residual liquid is purified by rectification to separate and recover high-purity semiconductor stripping solution.

Benefits of technology

It improves the utilization rate of semiconductor stripping fluid, reduces environmental pollution, lowers operating costs, and enhances safety by using physical methods at low temperature and low pressure.

✦ Generated by Eureka AI based on patent content.
Patent Text Reader

Abstract

A kind of electronic grade semiconductor stripping liquid purification method, comprising: providing electronic grade semiconductor stripping liquid residual liquid, and carry out pH detection, when pH<7, drop NaOH solution to stop;The residual liquid after neutralization is extracted into distillation kettle, and the aqueous solution of residual liquid is removed, and the water is collected into storage tank from the top of kettle, and the bottom of kettle is waste liquid containing salt, and salt is removed by cooling, crystallization, centrifugation, and the aqueous solution of electronic grade semiconductor stripping liquid is recovered by redistillation;Water is extracted into dehydration kettle, and water is separated, and the bottom of kettle is electronic grade semiconductor stripping liquid crude product;The crude product is refined using rectifying kettle, and electronic grade semiconductor stripping liquid pure product is collected from the top of kettle;Electronic grade semiconductor stripping liquid pure product is microfiltrated using peristaltic pump, and electronic grade semiconductor stripping liquid fine product is prepared.The present application not only effectively improves the utilization rate of stripping liquid, reduces environmental pollution, provides convenient conditions for waste treatment, but also improves safety factor, reduces operating cost, and is worth popularizing and using in industry.
Need to check novelty before this filing date? Find Prior Art