Electrohydrodynamic pump head assembly with gas flow channel

Abstract

The present invention relates to an electro-hydrodynamic pump head assembly, and more particularly, to an electro-hydrodynamic (EHD) pump head assembly with a gas flow channel that applies a potential difference to a viscous solution and dispenses the viscous solution through a nozzle. The electro-hydrodynamic pump head assembly with a gas flow channel of the present invention has an effect of allowing an EHD pump to easily adjust conditions for dispensing a viscous solution, thereby improving dispensing quality. The electro-hydrodynamic pump head assembly with a gas flow channel of the present invention has an effect of stably maintaining dispensing quality of the electro-hydrodynamic pump head assembly with a gas flow channel that dispenses a viscous solution.

Description

Technical Field

[0001] This invention relates to an electrohydrodynamic (EHD) pump head assembly, and more particularly to an electrohydrodynamic (EHD) pump head assembly with a gas flow channel that applies a potential difference to a viscous solution and dispenses the viscous solution through a nozzle. Background Technology

[0002] Pumps that dispense viscous solutions at high speed and in precise quantities are widely used in various technical fields, including semiconductor manufacturing.

[0003] As mentioned above, pumps for dispensing viscous solutions include pumps of various shapes and structures such as Auger pumps, pneumatic pumps, piezo pumps, and inkjet pumps.

[0004] To more precisely adjust the dispensing capacity of viscous solutions and distribute fine linewidth patterns onto the material, electrohydrodynamic (EHD) pumps are also used.

[0005] An electrohydrodynamic pump is a pump that uses the energy generated by the electric field produced by applying a high voltage to a viscous solution stored in a storage compartment to eject the viscous solution through a nozzle.

[0006] As described above, the electrohydrodynamic pump can spray viscous solutions in small volumes, but it has the disadvantage that its distribution characteristics are greatly affected by the viscosity of the solution or important factors such as the surrounding environment and the shape of the electrodes.

[0007] Therefore, in order to be effectively used in various fields such as semiconductor manufacturing, an electrohydrodynamic pump head assembly with a gas flow channel with the following structure is required: it can easily dispense viscous solutions with higher viscosity, and can more easily control the spray shape, pattern, flow rate, etc. of the viscous solution, while maintaining stable dispensing characteristics. Summary of the Invention

[0008] The problem that the invention aims to solve

[0009] The present invention is proposed to solve the problems mentioned above, and aims to provide an electrohydrodynamic pump head assembly with a gas flow channel that has excellent performance in dispensing viscous solutions, can stably maintain the dispensing characteristics, and can easily adjust the dispensing characteristics.

[0010] Methods for solving problems

[0011] The electrohydrodynamic pump head assembly with a gas flow channel of the present invention, for solving the objectives described above, is characterized by comprising: a storage section for storing a viscous solution; an insulating nozzle, made of insulating material, connected to the storage section and formed in a lengthwise direction to eject the viscous solution; an inner electrode disposed on the path for transferring the viscous solution stored in the storage section to the insulating nozzle; and an outer electrode formed to surround at least a portion of the insulating nozzle and formed in an upward and downward direction.

[0012] The effects of the invention

[0013] The electrohydrodynamic pump head assembly with gas flow channel of the present invention has the effect of making it easy for the EHD pump to adjust the conditions for dispensing viscous solutions, thereby improving the dispensing quality.

[0014] The electro-hydraulic pump head assembly with gas flow channel of the present invention has the effect of stably maintaining the dispensing quality of the electro-hydraulic pump head assembly with gas flow channel for dispensing viscous solutions. Attached Figure Description

[0015] Figure 1 This is a perspective view of an electro-hydraulic power pump head assembly with a gas flow channel according to an embodiment of the present invention.

[0016] Figure 2 and Figure 3 Is it like this? Figure 1 The image shows a front view of an electro-hydraulic pump head assembly with a gas flow channel.

[0017] Figure 4 and Figure 5 They are as follows Figure 1 The diagram shows a cross-sectional view and a partial enlarged view of the electro-hydraulic pump head assembly with gas flow channels along line IV-IV.

[0018] Figure 6 It is aimed at such Figure 1 A front view of a portion of an electro-hydraulic power pump head assembly with a gas flow channel.

[0019] Figure 7 It will be like Figure 1 An enlarged cross-sectional view of a portion of an electro-hydraulic pump head assembly with a gas flow channel is shown.

[0020] Figure 8 It is used to explain how Figure 1 The diagram shows the state in which the electro-hydraulic pump head assembly with gas flow channels is installed in a distributor for use.

[0021] Figure 9 Showing about such Figure 1 Another structure of the external electrode of the electro-hydraulic power pump head assembly shown. Detailed Implementation

[0022] Hereinafter, with reference to the accompanying drawings, an electrohydrodynamic pump head assembly having a gas flow channel according to an embodiment of the present invention will be described.

[0023] The electrohydrodynamic pump head assembly with a gas flow channel of the present invention is used to apply a viscous solution to a material disposed on a substrate. When the material is disposed on a grounded substrate, if a voltage is applied to the viscous solution, the viscous solution is ejected through a nozzle onto the material due to the potential difference between the substrate and the viscous solution.

[0024] Figure 1 This is a perspective view of an electrohydrodynamic pump head assembly with a gas flow channel according to an embodiment of the present invention. Figure 2 and Figure 3 Is it like this? Figure 1 The image shows a front view of an electrohydraulic pump head assembly with a gas flow channel. Figure 4 and Figure 5 They are as follows Figure 1 The diagram shows a cross-sectional view and a partial enlarged view of the electro-hydraulic pump head assembly with gas flow channels along line IV-IV.

[0025] Reference Figures 1 to 5 The electro-hydraulic pump head assembly with a gas flow channel according to this embodiment is formed by including a storage section 110, an inner electrode 310, an insulating nozzle 330, and an outer electrode 350.

[0026] The storage unit 110 is configured to store a viscous solution sprayed through the insulating nozzle 330. The storage unit 110 can be configured in various ways to store the viscous solution. It can also be configured to transfer the viscous solution stored in another container via a tube-like conduit. In this embodiment, as... Figures 1 to 5 As shown, the example described uses a storage section 110 formed from a container structure in the form of a cylindrical cartridge. A pressure regulator that can apply pressure to the viscous solution stored inside can be connected to the storage section 110 as described above.

[0027] like Figure 4 and Figure 5 As shown, an inner electrode 310 is provided at the lower end of the storage section 110. The inner electrode 310 is formed of a conductive material so that a voltage can be applied to the viscous solution stored in the storage section 110. In this embodiment, the inner electrode 310 is formed in the form of a metal pipe with a fixed inner diameter and thickness along its length. With the structure described above, the inner electrode 310 can apply a voltage to the viscous solution stored in the storage section 110 and simultaneously transfer the viscous solution to the insulating nozzle 330.

[0028] like Figure 4 , Figure 5 and Figure 7 As shown, the insulating nozzle 330 is formed in a manner that extends in the length direction. It is preferable that the insulating nozzle 330 is formed such that at least a portion of its inner diameter decreases towards the lower side. In the case of this embodiment, as... Figure 7 As shown, the upper part of the insulating nozzle 330 is formed with a fixed inner diameter along the length direction, and the lower part is formed with a pipe shape in which the inner diameter decreases towards the bottom.

[0029] The insulating nozzle 330 is formed of an insulating material such as glass. In this embodiment, the insulating nozzle 330 is manufactured by drawing a glass tube. As described above, the insulating nozzle 330 is assembled to the lower end of the storage section 110 in the same manner as the inner electrode 310.

[0030] In the case of this embodiment, such as Figure 7 As shown, the insulating nozzle 330 is assembled to the storage unit 110 with the inner electrode 310 inserted inside. Preferably, the insulating nozzle 330 is assembled to the storage unit 110 by screwing it in a state where it is joined with a synthetic resin structure in the form of a nut. At this time, the inner electrode 310, which is provided in a manner that protrudes towards the lower end of the storage unit 110, is inserted into the insulating nozzle 330 to connect the insulating nozzle 330 to the storage unit 110. With the structure described above, the inner electrode 310 can apply voltage to the viscous solution, while simultaneously supplying the viscous solution directly to the insulating nozzle 330. In the case of this embodiment, as... Figure 7 As shown, the inner electrode 310 is formed such that it is inserted only into the upper part of the insulating nozzle 330, which is fixedly formed within the inner diameter of the nozzle. With the structure described above, the inner electrode 310 can deliver a viscous solution to a position very close to the outlet of the insulating nozzle 330 and apply a voltage to the viscous solution.

[0031] It is preferable to have the gap between the inner diameter of the insulating nozzle 330 and the outer diameter of the inner electrode 310 as narrow as possible. If the gap between the inner diameter of the insulating nozzle 330 and the outer diameter of the inner electrode 310 is narrowed, the pressure loss and electromagnetic force loss transmitted to the insulating nozzle 330 can be reduced, and the viscous solution can be effectively sprayed out through the insulating nozzle 330.

[0032] Preferably, the distance between the inner diameter of the insulating nozzle 330 and the outer diameter of the inner electrode 310 is 0.05 mm to 0.1 mm. If the distance between the inner diameter of the insulating nozzle 330 and the outer diameter of the inner electrode 310 is less than 0.05 mm, it will be difficult to assemble the insulating nozzle 330 and the inner electrode 310. If the distance between the inner diameter of the insulating nozzle 330 and the outer diameter of the inner electrode 310 is greater than 0.1 mm, the viscous solution may flow between the insulating nozzle 330 and the inner electrode 310, or bubbles may form between the inner wall of the insulating nozzle 330 and the outer wall of the inner electrode 310, or the bubbles may be discharged together with the viscous solution through the insulating nozzle 330.

[0033] The insulating nozzle 330, the inner electrode 310, and the storage unit 110 are assembled to the upper body 210. The upper body 210 is configured to combine and support the storage unit 110, the inner electrode 310, and the insulating nozzle 330. The upper body 210 and the lower body 230 are assembled and used as described above.

[0034] like Figure 4 and Figure 5 As shown, the lower body 230 has an assembly groove 231 formed in an upward and downward direction. The upper body 210 has an assembly extension 211 formed in a shape corresponding to the assembly groove 231. The upper body 210 and the lower body 230 are assembled together by inserting the assembly extension 211 of the upper body 210 into the assembly groove 231 of the lower body 230.

[0035] An outer electrode 350 is fixed to the lower main body 230. That is, the outer electrode 350 is provided and supported on the lower main body 230. In this embodiment, the outer electrode 350 is formed in the form of a pipe extending vertically. In the case of the present invention, an outer electrode 350 formed by a structure with a fixed inner diameter and thickness in the vertical direction will be described as an example, but the structure and shape of the outer electrode 350 can be modified in various ways. For example, it can also be formed into a pipe-shaped structure in which the inner diameter of the outer electrode increases or decreases in the vertical direction. In addition, as Figure 9 As shown, an external electrode 360 ​​can also be formed by a plurality of external electrode elements 361 arranged at fixed angles along the circumferential direction and extending in the length direction.

[0036] If the assembly extension 211 is inserted into the assembly slot 231 to assemble the upper body 210 and the lower body 230 together, the outer electrode 350 surrounds at least a portion of the outer periphery of the insulating nozzle 330 in a non-contact state. In this embodiment, as... Figure 5 As shown, the end portion of the insulating nozzle 330 is inserted into the outer electrode 350. At this time, the inner electrode 310, which is inserted into the interior of the insulating nozzle 330, is also inserted into the interior of the outer electrode 350.

[0037] In the state described above, the upper body 210 is configured to be able to rise and fall relative to the lower body 230. In this embodiment, the upper body 210 is configured to be able to rise and fall relative to the lower body 230 along a guide rail provided on the lower body 230. The electro-hydraulic pump head assembly with gas flow channel in this embodiment is configured such that after manually adjusting the height of the upper body 210, the height of the upper body 210 is fixed using an additional fixing component 250. Depending on the situation, the electro-hydraulic pump head assembly with gas flow channel may also be configured such that a lifting component in the form of a linear motor is provided, which can adjust the height of the upper body 210 by a control signal, thereby causing the upper body 210 to rise and fall automatically relative to the lower body 230. If the height of the upper body 210 is adjusted by the lifting component described above, the height of the insulating nozzle 330 relative to the external electrode 350 is ultimately adjusted.

[0038] The electrohydrodynamic pump head assembly with a gas flow channel in this embodiment has a gas flow channel 410 connected between the insulating nozzle 330 and the external electrode 350. As described above, the gas flow channel 410 is connected between the insulating nozzle 330 and the external electrode 350 to transmit positive or negative pressure gas between the insulating nozzle 330 and the external electrode 350.

[0039] As described above, the gas flow channel 410 is connected to an external pneumatic device via the interior of the lower body 230 between the insulating nozzle 330 and the external electrode 350. In this embodiment, the gas flow channel 410 is connected via the path between the assembly extension 211 of the upper body 210 and the assembly groove 231 of the lower body 230.

[0040] The assembly groove 231 is cylindrical, and the assembly extension 211 is formed in a cylindrical shape with an outer diameter that perfectly matches the assembly groove 231. Partial flow channels 213, extending upward and downward in a groove shape at equal intervals (90-degree intervals) along the circumference, are formed on the outer surface of the assembly extension 211. An annular groove 215, formed in a ring shape along the outer diameter of the assembly extension 211, is formed and connected to the upper end of the partial flow channels 213. A gas flow channel 410 connects the assembly extension 211 and the assembly groove 231 along the path formed by the partial flow channels 213 and the annular groove 215 as described above. The gas flow channel 410 extends laterally from the annular groove 215 to the lower body 230. The gas flow channel 410 is connected to an external pneumatic device via the path described above.

[0041] If the external pneumatic device generates positive pressure, the compressed gas is dispersed between the external electrode 350 and the insulating nozzle 330. Conversely, if the external pneumatic device generates negative pressure, the pressure between the external electrode 350 and the insulating nozzle 330 is reduced, and air around the insulating nozzle 330 is drawn in through the gas flow channel 410.

[0042] On the other hand, the relative position of the insulating nozzle 330 to the outer electrode 350 is automatically aligned by inserting the assembly extension 211 of the upper body 210 into the assembly groove 231 of the lower body 230. If the assembly extension 211 and the assembly groove 231 are processed in a way that makes the tolerance between them very small, the horizontal displacement of the insulating nozzle 330 is fixed after the assembly extension 211 is inserted into the assembly groove 231. Therefore, if the assembly extension 211 is inserted into the assembly groove 231 and slids while being guided by the assembly groove 231, the insulating nozzle 330 can easily enter the interior of the outer electrode 350. Damage to the insulating nozzle 330 can be prevented by the method described above. Since the insulating nozzle 330 is made of a very brittle glass material and is very thin and long, it is easily damaged even by small impacts. As described above, due to the shape and structure of the assembly groove 231 and the assembly extension 211, the insulating nozzle 330 can easily enter the interior of the outer electrode 350. With the insulating nozzle 330 aligned with the horizontal position of the outer electrode 350, assembling the upper body 210 and the lower body 230 prevents damage to the insulating nozzle 330 and makes it easy for the insulating nozzle 330 to enter the interior of the outer electrode 350.

[0043] Therefore, it is preferable that the length of the insulating nozzle 330 protruding from the lower side of the upper body 210 is shorter than the depth of the assembly groove 231. If configured as described above, the assembly extension 211 begins to be inserted into the assembly groove 231 before the insulating nozzle 330 contacts the bottom of the assembly groove 231. The assembly extension 211 automatically aligns with the position of the insulating nozzle 330 while being positioned through the assembly groove 231.

[0044] As explained above, because the assembly groove 231 and the assembly extension 211 are formed with very small tolerances, the remaining portion of the assembly groove 231 and the assembly extension 211, excluding the gas flow channel 410, is airtight. If necessary, sealing components such as O-rings can be provided in the assembly extension 211 or the assembly groove 231 to more reliably achieve a gas seal between the assembly groove 231 and the assembly extension 211.

[0045] On the other hand, an insulating cover 233 made of insulating material is provided on the lower main body 230. The insulating cover 233 has an electrode hole formed in a vertically penetrating manner. The insulating cover 233 is attached to the lower main body 230 so that an external electrode 350 can be disposed inside the electrode hole. The insulating cover 233 serves to fix the external electrode 350 to the lower main body 230 and to protect the operator from the high voltage applied to the external electrode 350.

[0046] The operation of the electro-hydraulic power pump head assembly with gas flow channel as described above will be explained below.

[0047] First, the assembly sequence of the electro-hydraulic power pump head assembly with gas flow channel according to this embodiment will be explained.

[0048] Reference Figure 1 , Figure 2 and Figure 4 The external electrode 350 is then assembled to the lower body 230. As explained above, the external electrode 350 is fixed to the lower part of the lower body 230 using the insulating cover 233. At this time, the external electrode 350 is exposed on the lower side through the electrode hole of the insulating cover 233.

[0049] The external electrode 350 is electrically connected to a power supply device via the lower body 230. The power supply device applies a DC voltage to the external electrode 350 at a voltage set in the control unit.

[0050] Next, refer to Figure 1 , Figure 2 and Figure 7 An inner electrode 310 and an insulating nozzle 330 are assembled in the storage section 110. The viscous solution stored in the storage section 110 is in a state where it can be discharged to the outside through the inner electrode 310. Additionally, as... Figure 7 As shown, an insulating nozzle 330 is assembled into the storage unit 110 such that the inner electrode 310 is inserted into a portion of the insulating nozzle 330 whose inner diameter is fixedly formed. In this configuration, the viscous solution stored in the storage unit 110 can be directly transferred to the insulating nozzle 330 via the inner electrode 310. A pressure regulator is connected to the storage unit 110. The pressure regulator can apply pressure to the viscous solution stored in the storage unit 110 at a pressure set in the control unit.

[0051] In the state described above, such as Figure 1 and Figure 2 As shown, the storage unit 110, the inner electrode 310, and the insulating nozzle 330 are assembled onto the upper body 210. Figure 1 and Figure 2 As shown, with the upper body 210 raised relative to the lower body 230, the storage section 110 and its surrounding components are mounted to the upper body 210. As described above, with the upper body 210 raised, the inner electrode 310 and the insulating nozzle 330 can be easily mounted to the upper body 210 without being locked to the lower body 230.

[0052] The inner electrode 310 is connected to the power supply device via the upper body 210. The power supply device applies a DC voltage set in the control unit to the inner electrode 310.

[0053] When the upper body 210 slides downward, as Figure 3 and Figure 5As shown, the assembly extension 211 is inserted into the assembly slot 231, assembling the upper body 210 and the lower body 230 together. At this time, the insulating nozzle 330 is also inserted into the outer electrode 350. The process described above can be performed manually or by a lifting component operated according to a signal from the control unit. The relative position between the upper body 210 and the lower body 230 can be adjusted according to various parameters such as operating conditions or the characteristics of the viscous solution.

[0054] As explained above, if the length of the insulating nozzle 330 protruding downwards from the upper body 210 is shorter than the depth of the assembly groove 231, it has the advantage of reducing the risk of damage to the assembly groove 231. Since the assembly extension 211 begins to insert into the assembly groove 231 before the insulating nozzle 330 contacts the bottom of the assembly groove 231 or enters the interior of the outer electrode 350, the position of the assembly extension 211 is automatically aligned with the position of the insulating nozzle 330 while simultaneously being aligned through the assembly groove 231. Therefore, the insulating nozzle 330 enters the interior of the outer electrode 350 at the accurate position. Furthermore, the insulating nozzle 330 does not contact the outer electrode 350 during its insertion.

[0055] When assembling the upper body 210 and the lower body 230, such as Figure 6 As shown, the end portion of the insulating nozzle 330 is exposed to the lower part of the outer electrode 350. The height of the upper body 210 can be adjusted as needed, so that the dispensing operation can also be performed without the end portion of the insulating nozzle 330 being exposed to the lower part of the outer electrode 350.

[0056] The electrohydrodynamic pump head assembly with gas flow channel of this embodiment, assembled and used in the order described above, can be used as follows: Figure 8 Use as shown in the diagram. Figure 8 As shown, in this embodiment, the electrohydrodynamic pump is installed on a separate transfer device while being mounted on a support panel along with other components such as a camera and a sensor. The transfer device transfers the viscous solution vertically and horizontally, and various methods are used to dispense the material disposed at the bottom.

[0057] As described above, if the material is placed on a grounded substrate (bottom), and a DC voltage is applied to the inner electrode 310 and the outer electrode 350 using a power supply device, the viscous solution inside the insulating nozzle 330 is ejected downwards by the potential difference between the inner electrode 310 and the outer electrode 350 relative to the substrate. In this embodiment, a fixed DC voltage is applied to the inner electrode 310, and pulse voltages of various patterns and frequencies are applied to the outer electrode 350, thereby ejecting the viscous solution through the insulating nozzle 330. Alternatively, depending on the situation, a hydrodynamic pump head assembly with a gas flow channel can be constructed by applying a fixed DC voltage to the outer electrode 350 and a pulse voltage of a specific frequency to the inner electrode 310.

[0058] like Figure 7 As shown, since the inner electrode 310 extends into the interior of the insulating nozzle 330, a DC voltage can be applied more effectively to eject the viscous solution. The structure described above improves the dispensing performance of the viscous solution. Furthermore, since the inner electrode 310 in this embodiment is formed in a pipe-like shape, it performs the function of supplying the viscous solution to the insulating nozzle 330 while simultaneously creating a potential difference, thereby further improving the dispensing performance.

[0059] Due to the structure between the inner electrode 310 and the insulating nozzle 330 as described above, the distance between the portion supplying the viscous solution stored in the storage section 110 to the insulating nozzle 330 and the portion ejecting the viscous solution from the insulating nozzle 330 becomes very short. This structure significantly reduces the possibility of bubble generation during dispensing. Furthermore, because the structure described above applies voltage to the viscous solution using the inner electrode 310 at a position very close to the outlet of the insulating nozzle 330, the electrohydraulic pump head assembly with a gas flow channel in this embodiment exhibits excellent dispensing performance. Additionally, the structure described above has the advantage of allowing for very easy and direct control of the dispensing characteristics.

[0060] Furthermore, since a DC voltage can be applied to the outer electrode 350 at a position very close to the inner electrode 310 and the insulating nozzle 330, the electro-hydraulic pump head assembly with gas flow channel of this embodiment has superior dispensing performance. In particular, the outer electrode 350 of the electro-hydraulic pump head assembly with gas flow channel of this embodiment is formed in a pipe shape, thereby creating a space surrounding the outer periphery of the insulating nozzle 330 and extending upward and downward. In the state described above, since a DC voltage is applied to the outer electrode 350, the electro-hydraulic pump head assembly with gas flow channel of the present invention can reduce the influence of interference from the external environment or noise. As a result, the electro-hydraulic pump head assembly with gas flow channel of the present invention has a more stable performance in dispensing viscous solutions.

[0061] Furthermore, when both the inner electrode 310 and the outer electrode 350 are formed in a cylindrical shape, by further increasing the area and space where a potential difference is generated between the inner electrode 310 and the outer electrode 350, the electro-hydraulic pump head assembly with gas flow channel of the present invention has a structure that can more effectively transmit electromagnetic force to viscous solutions.

[0062] Next, the function of the gas flow channel 410 will be explained. The gas flow channel 410, connected to the external pneumatic pump, is connected to the lower part of the upper body 210 and the lower part of the lower body 230 via an annular groove 215 formed in the assembly extension 211 and a partial flow channel 213. At the lower end of the partial flow channel 213, the gas flow channel 410 extends radially again, connecting to the inner space of the outer electrode 350. As a result, the end portion of the gas flow channel 410 connects to the space between the outer electrode 350 and the insulating nozzle 330. Depending on the operation of the external pneumatic pump, the gas flow channel 410 supplies positive or negative pressure gas between the outer electrode 350 and the insulating nozzle 330.

[0063] Generally, it is common for pumps dispensing viscous solutions to remove internal air bubbles during the initial operation or to perform a purging operation during calibration. When performing a purging operation as described above, generating positive pressure through the gas channel 410 helps to eject the viscous solution through the insulating nozzle 330. Furthermore, generating a fixed-pressure gas flow around the insulating nozzle 330 through the gas channel 410, not only during the initial purging operation but also during product dispensing operations, shortens the time required to form a stable meniscus for ejection.

[0064] If the gas pressure or gas flow rate transmitted through the gas channel 410 is adjusted, the electrohydrodynamic pump head assembly with the gas channel in this embodiment can also operate in a spray form to dispense viscous solution, rather than spraying viscous solution in droplet units.

[0065] On the other hand, the electrohydrodynamic pump head assembly with a gas flow channel can also be activated to transmit negative pressure through the gas flow channel 410 to create a vacuum around the insulating nozzle 330. If negative pressure is generated in the gas flow channel 410 during the purging operation as described above, the viscous solution purged through the insulating nozzle 330 is suctioned and discharged to the outside through the gas flow channel 410. That is, by preventing the viscous solution from falling to the underside of the insulating nozzle 330 during the calibration or work preparation steps of the electrohydrodynamic pump head assembly with a gas flow channel, and discharging it to the outside through the gas flow channel 410, contamination of the work space caused by the viscous solution can be prevented. In addition, as described above, even when the viscous solution is dispensed in a spray form, negative pressure can be applied to the gas flow channel 410 during the dispensing of the viscous solution without dispensing material, so that fine particles of the viscous solution are suctioned through the gas flow channel 410 and discharged to the outside.

[0066] Because the external electrode 350 of the electro-hydraulic pump head assembly with gas flow channel in this embodiment is arranged to surround the insulating nozzle 330 in a non-contact state, it has the advantage of easily connecting the gas flow channel 410 to the structure between the insulating nozzle 330 and the external electrode 350. Since the gas flow channel 410 can be positioned very close to the insulating nozzle 330 through the structure described above, it has the advantage of improving the effect of the positive or negative gas pressure transmitted by the gas flow channel 410.

[0067] On the other hand, it is crucial that the nozzle height be maintained at a set value in a distribution pump, such as the electrohydrodynamic pump head assembly with gas flow channels of the present invention. In the case of the present invention, the heights of the external electrode 350 and the insulating nozzle 330 can be calibrated and controlled using the method described below.

[0068] like Figure 1 , Figure 2 and Figure 4 As shown, with the upper body 210 in a state where it is raised relative to the lower body 230, as... Figure 7The height of the outer electrode 350 is measured by lowering the overall structure. When using a linear variable displacement transducer (LVDT), the outer electrode 350 is lowered until it contacts the LVDT sensor, thus determining the reference height of the outer electrode 350. The relative displacement between the upper body 210 and the lower body 230 can be easily measured or adjusted relative to the outer electrode 350. Therefore, by directly measuring the height of the outer electrode 350 using the method described above, and indirectly measuring the height of the inner electrode 310 or the insulating nozzle 330, damage to the inner electrode 310 or the insulating nozzle 330 can be prevented, and the height of the main components can be accurately determined and adjusted. Factors related to the height of the main components can be easily adjusted using the method described above, thereby controlling the distribution characteristics of the viscous solution.

[0069] On the other hand, as described above, the electrohydrodynamic pump head assembly with gas flow channel of this embodiment is a structure in which the container-shaped storage section 110, the inner electrode 310, and the insulating nozzle 330 are mounted as a group to the upper body 210, thus offering both ease of use and superior performance. Previously, structures were often used that stored viscous solutions in containers such as small glass bottles and transferred the viscous solution to the nozzle through tubes. However, in the present invention, a structure is used that directly connects the container-shaped storage section 110, the inner electrode 310, and the insulating nozzle 330 over a short distance. Therefore, the pressure loss of the regulator connected to the storage section 110 can be minimized while simultaneously transferring the pressure to the inner electrode 310. Furthermore, since no intermediate connecting tube is used, the electrohydrodynamic pump head assembly with gas flow channel of this embodiment has the advantages of simplified structure and compact size.

[0070] The structure of the present invention as described above can maintain the advantages described above and can be modified in various ways. The above description illustrates the case where the storage unit 110, the inner electrode 310, and the insulating nozzle 330 are assembled as a unit and mounted to the upper body 210; however, the structure described above can be modified as needed. For example, it can be configured such that, with the inner electrode 310 and the insulating nozzle 330 assembled to the upper body 210, the storage unit 110 can be detachably attached to the upper body 210, thereby connecting with the inner electrode 310 and the insulating nozzle 330.

[0071] The present invention has been described above with reference to preferred examples, but the scope of the present invention is not limited to the forms described and shown above.

[0072] For example, the structures of the inner electrode 310, the insulating nozzle 330, and the outer electrode 350, besides the cylindrical structure, can be deformed into various other structures, and the sizes of the outer and inner diameters can also be modified as needed. Furthermore, such as Figure 9 As shown, the outer electrode 360 ​​can also be modified in the following way: by arranging a plurality of outer electrode elements 361 in the circumferential direction, an outer electrode 360 ​​with a structure similar to a cylinder is formed. The structure of the inner electrode 310 can also be modified to the structure described above for use.

[0073] Furthermore, unlike the structure described above with reference to the accompanying drawings, the electrohydrodynamic pump head assembly with a gas flow channel of the present invention can also be configured such that the height of either the inner electrode or the insulating nozzle can be adjusted relative to the other. As described above, by adjusting the height between the inner electrode and the insulating nozzle, the distribution characteristics of the viscous solution can be adjusted.

[0074] Furthermore, while the above description illustrates the case where the inner electrode 310 is inserted into the interior of the insulating nozzle 330, it is also possible to construct an electro-hydraulic pump head assembly with a gas flow channel without the inner electrode being inserted into the insulating nozzle, depending on the circumstances. An inner electrode that is not in the form of a pipe may also be used, depending on the circumstances.

[0075] In addition, the case in which the inner electrode 310 and the insulating nozzle 330 are directly connected to the container-shaped storage section 110 has been described and shown, but it is also possible to construct an electro-hydraulic pump head assembly with a gas flow channel that connects the container-shaped storage section to the inner electrode and the insulating nozzle through a tube-like intermediate structure.

[0076] Furthermore, while the structure described above, in which the upper main body 210 is configured to be raised and lowered relative to the lower main body 230, can also be modified to have the lower main body configured to be raised and lowered relative to the upper main body. In this case, the lifting component causes the lower main body to rise and fall relative to the upper main body.

[0077] Furthermore, the assembly structure of the upper and lower main bodies can not be a sliding mechanism, but can be varied into a screw-in structure, a snap-fit ​​structure, etc. It can also be configured as a hydrodynamic pump head assembly with a gas flow channel, where the upper and lower main bodies are not separate entities, but rather a single, integrated main body.

[0078] Furthermore, while the above description uses an electro-hydraulic pump head assembly with a gas flow channel 410 as an example, the structure of the gas flow channel can be modified in various ways, and it is also possible to construct an electro-hydraulic pump head assembly with a gas flow channel without a gas flow channel structure. In addition to the structure of the annular groove 215 and the partial flow channel 213 described above, the structure of the gas flow channel can also be modified into various other forms.

Claims

1. An electrohydrodynamic pump head assembly with a gas flow channel, comprising: Storage section, for storing viscous solutions; An insulating nozzle, made of insulating material, is connected to the storage section and formed to extend in the length direction to spray the viscous solution; The internal electrode is positioned along the path that transfers the viscous solution stored in the storage section to the insulating nozzle. An external electrode is formed in a non-contact manner surrounding at least a portion of the insulating nozzle, wherein the external electrode includes a plurality of external electrode elements arranged circumferentially around the insulating nozzle, and the plurality of external electrode elements constitute a cylindrical structure. A gas flow channel is connected between the insulating nozzle and the external electrode to transmit positive or negative pressure gas between the insulating nozzle and the external electrode; The lower body, coupled to the external electrode in a manner that supports the external electrode and forms the gas flow channel, wherein the lower body has an assembly groove extending upward and downward; and An upper body is assembled with the insulating nozzle to support it. The upper body has an assembly extension formed in a shape corresponding to the assembly groove. The relative position of the insulating nozzle with respect to the outer electrode is determined by inserting the assembly extension of the upper body into the assembly groove of the lower body. The assembly groove of the lower main body is formed in such a way that it can slide up and down to guide the assembly extension of the upper main body, so that the insulating nozzle can be aligned with the position of the outer electrode while being inserted into the outer electrode. The gas flow channel includes multiple partial flow channels that extend upward and downward between the assembly extension of the upper body and the assembly groove of the lower body.

2. The electro-hydraulic power pump head assembly with gas flow channel according to claim 1, wherein... A portion of the gas flow channel is formed between the upper body and the lower body and connected between the insulating nozzle and the external electrode.

3. The electro-hydraulic power pump head assembly with gas flow channel according to claim 1, wherein... The length by which the insulating nozzle protrudes towards the lower side of the upper body is shorter than the depth of the assembly groove of the lower body.

4. The electro-hydraulic pump head assembly with a gas flow channel according to claim 1, wherein... The assembly groove of the lower body and the assembly extension of the upper body are formed in a way that the rest of the parts, except for the gas flow channel, are airtight to each other.

5. The electro-hydraulic pump head assembly with a gas flow channel according to claim 1, wherein... The plurality of partial flow channels have gas flow channels arranged at equal intervals along the outer periphery of the assembly extension of the upper body.

6. The electro-hydraulic power pump head assembly with a gas flow channel according to claim 1 further includes: An insulating cover made of insulating material has an electrode hole formed in a manner that is disposed inside the outer electrode, and is attached to the lower part of the lower body.

7. The electrohydrodynamic pump head assembly with gas flow channel according to claim 1, wherein... Either the upper body or the lower body is configured to be able to rise or fall relative to the other.

8. The electrohydrodynamic pump head assembly with a gas flow channel according to claim 7 further includes: A lifting component allows either the upper body or the lower body to rise or fall relative to the other.

9. The electro-hydraulic pump head assembly with gas flow channel according to claim 8, wherein... The storage section is formed in the form of a container, and the inner electrode and the insulating nozzle are combined and disposed in the storage section.

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