A beam sampling circuit for a dual electron gun

Abstract

The application discloses a kind of beam sampling circuit of double electron gun, including high voltage end HV, the first parallel end of high voltage end HV is connected with the transformer T2 of first electron gun EBS after being connected with first DC current sensor DCCT;The second parallel end of high voltage end HV is connected with the transformer T2B of second electron EBSB after being connected with second DC current sensor DCCTB, so, there are two electron guns, respectively by two DC current sensors with zero magnetic flux current mutual inductance mode to carry out beam sampling, reduce the influence of excitation current, response time is fast, reduce delay and beam oscillation situation, beneficial to improve the control precision of beam, to improve the control precision of electron gun.

Description

Technical Field

[0001] This invention relates to the field of vacuum coating machine technology, and in particular to a beam sampling circuit with dual electron guns. Background Technology

[0002] In vacuum coating machines, it is necessary to sample the voltage value of the electron gun and adjust the voltage of the electron gun based on the sampled data. Currently, Hall current sensors based on the magnetic transmission principle are mostly used for sampling. However, the response time of Hall current sensors is mostly between tens of milliseconds and hundreds of milliseconds. When the sampled current is used as a feedback signal for adjustment and control, the control accuracy of the electron gun beam is low due to the sampling delay. Sometimes beam oscillation may also occur, making the beam difficult to control. Especially in the case of dual electron guns, the Hall current sensors may affect each other, affecting the accuracy of the beam. Summary of the Invention

[0003] The purpose of this invention is to provide a beam sampling circuit with dual electron guns. It has two electron guns, which sample the beam through two DC current sensors in a zero-flux current mutual inductance manner. This reduces the influence of excitation current, has a fast response time, reduces delay and beam oscillation, and helps to improve the control accuracy of the beam, thereby improving the control accuracy of the electron guns.

[0004] To achieve this objective, the present invention adopts the following technical solution:

[0005] A beam sampling circuit with dual electron guns includes a high-voltage terminal HV, the first parallel terminal of the high-voltage terminal HV is connected to a first DC current sensor DCCT and then to the transformer T2 of the first electron gun EBS.

[0006] The second parallel terminal of the high-voltage end HV is connected to the second DC current sensor DCCTB and then to the transformer T2B of the second electronic EBSB gun.

[0007] The output terminal of the first DC current sensor DCCT is connected to capacitor C111 and then connected to the high voltage terminal HV.

[0008] The output terminal of the second DC current sensor DCCTB is connected to capacitor C111B and then to the high voltage terminal HV.

[0009] The first DC current sensor DCCT and the second DC current sensor DCCTB have the same structure.

[0010] The first DC current sensor DCCT includes a high-voltage coil TP, an induction coil NS1, and an induction coil NS2;

[0011] Induction coil NS1 and induction coil NS2 are connected in series. The input terminal of induction coil NS1 is connected to the auxiliary power supply ES. The output terminal of induction coil NS2 is connected to the rectifier. The output terminal of the rectifier is connected to the feedback terminal Vo. The feedback terminal Vo is connected in parallel with a resistor RS.

[0012] In some implementations, the rectifier is a full-bridge diode rectifier.

[0013] In some implementations, a capacitor is connected in parallel to the output coil of transformer T2.

[0014] In some implementations, the output coil of transformer T2 is connected in parallel with capacitors C1 and C2, and capacitors C1 and C2 are connected in series.

[0015] In some implementations, the high-voltage terminal HV is connected between capacitors C1 and C2 and is also connected to transformer T2.

[0016] In some implementations, the first electron gun EBS includes a filament FIL connected to a transformer T2.

[0017] In some implementations, the first electron gun EBS also includes a horizontal deflection electrode XSCAN.

[0018] In some implementations, the first electron gun EBS also includes a vertical deflection electrode YSCAN.

[0019] The beneficial effects of this invention are as follows: the two electron guns sample the beam current through two DC current sensors in a zero-flux current mutual inductance manner, which reduces the influence of the excitation current, has a fast response time, reduces delay and beam oscillation, and helps to improve the control accuracy of the beam current, thereby improving the control accuracy of the electron gun. Attached Figure Description

[0020] Figure 1 This is a beam sampling circuit diagram of a dual electron gun according to the present invention;

[0021] Figure 2 This is a circuit diagram of the DC current sensor of the present invention;

[0022] Figure 3 This is an assembly structure diagram of the DC current sensor of the present invention;

[0023] Figure 4 This is a circuit diagram of the DC current sensor of the present invention. Detailed Implementation

[0024] The present invention will now be described in further detail with reference to the accompanying drawings.

[0025] refer to Figure 1 and Figure 2A beam sampling circuit for dual electron guns includes a high-voltage terminal HV, which can provide a DC voltage of -4kV to -10kV to provide a high-voltage power supply for the first electron gun EBS and the second electron gun EBSB. The first parallel terminal of the high-voltage terminal HV is connected to the first DC current sensor DCCT and then connected to the transformer T2 of the first electron gun EBS.

[0026] The second parallel terminal of the high-voltage end HV is connected to the second DC current sensor DCCTB, and then to the transformer T2B of the second electron gun EBSB. In this way, the two electron guns are sampled by two DC current sensors respectively. Both DC current sensors are high-voltage isolated sampling through magnetic field transmission and are zero-flux current mutual inductance, which effectively eliminates the influence of excitation current on the measurement accuracy of the mutual inductor. The response time is fast, reducing delay and beam oscillation, which is conducive to improving the control accuracy of the beam, thereby improving the control accuracy of the electron gun. The voltage of the electron gun can be adjusted in time according to the value of the beam.

[0027] The output terminal of the first DC current sensor DCCT is connected to the high voltage terminal after being connected to capacitor C111, that is, capacitor C111 is connected in parallel with the first DC current sensor DCCT.

[0028] The output terminal of the second DC current sensor DCCTB is connected to capacitor C111B and then to the high voltage terminal HV; that is, capacitor C111B is connected in parallel with the second DC current sensor DCCTB.

[0029] Capacitors C111 and C111B have a certain filtering effect, which can absorb circuit oscillations and improve the stability of circuit voltage transmission.

[0030] The first DC current sensor DCCT and the second DC current sensor DCCTB have the same structure.

[0031] The first DC current sensor DCCT includes a high-voltage coil TP, an induction coil NS1, and an induction coil NS2;

[0032] The high-voltage coil TP is connected to the high-voltage terminal HV;

[0033] Induction coil NS1 and induction coil NS2 are connected in series. The input terminal of induction coil NS1 is connected to the auxiliary power supply ES. The output terminal of induction coil NS2 is connected to the rectifier. The output terminal of the rectifier is connected to the feedback terminal Vo. The feedback terminal Vo is connected in parallel with a resistor RS.

[0034] The feedback terminal Vo collects the beam current value, thereby obtaining the current Ip and voltage status of the high-voltage coil TP, and thus the value of the high-voltage terminal HV can be adjusted according to the beam current value.

[0035] Similarly, the second DC current sensor DCCTB also has the aforementioned electronic components such as the high-voltage coil TP, induction coil NS1, induction coil NS2, rectifier, feedback terminal Vo, and resistor RS.

[0036] The rectifier is a full-bridge diode rectifier, which performs rectification and improves the accuracy of the beam feedback terminal Vo.

[0037] Among them, reference Figure 3 and Figure 4 The first DC current sensor DCCT is located inside the barrel 41. One end of the barrel 41 is provided with a first cover 42, and the other end of the barrel 41 is provided with a second cover 43. The high voltage coil TP, the induction coil NS1 and the induction coil NS2 are assembled inside the barrel 41, and the coils are covered with a silicone rubber layer 44.

[0038] refer to Figure 1 A capacitor is connected in parallel to the output coil of transformer T2. The capacitor plays a certain filtering role and improves the stability of the input voltage of transformer T2.

[0039] The output coil of the transformer is connected in parallel with capacitors C1 and C2, and capacitors C1 and C2 are connected in series.

[0040] The high-voltage terminal is connected between capacitors C1 and C2, and also to transformer T2. While the high-voltage terminal HV is connected to transformer T2, it is also connected to the connection point between capacitors C1 and C2. Capacitors C1 and C2 filter the high-voltage terminal, improving the stability of the circuit voltage.

[0041] The input coil of transformer T2 is connected to another voltage or power source.

[0042] refer to Figure 1 The first electron gun EBS includes a filament FIL connected to a transformer T2. The filament FIL operates under high voltage and is heated to release electrons.

[0043] The first electron gun (EBS) also includes a horizontal deflection electrode (XSCAN) and a vertical deflection electrode (YSCAN). The XSCAN and YSCAN electrodes generate corresponding horizontal and vertical magnetic fields, causing electrons to deflect and change their direction of motion.

[0044] The first electron gun EBS and the second electron gun EBSB have basically the same structure.

[0045] The second electron gun EBSB includes a filament FIL, a transformer T2B, a horizontal deflection electrode XSCAN, a vertical deflection electrode YSCAN, and capacitors C1B and C2B. The high-voltage terminal HV is connected to the transformer T2B and also to the connection point between capacitors C1B and C2B. Capacitors C1B and C2B further filter the high-voltage terminal HV to improve the stability of the circuit voltage.

[0046] The above description only discloses some embodiments of the present invention. For those skilled in the art, various modifications and improvements can be made without departing from the inventive concept of the present invention, and these all fall within the scope of protection of the invention.

Claims

1. A beam sampling circuit with dual electron guns, characterized in that, Including the high-voltage terminal HV, the first parallel terminal of the high-voltage terminal HV is connected to the first DC current sensor DCCT and then to the transformer T2 of the first electron gun EBS; The second parallel terminal of the high-voltage terminal HV is connected to the second DC current sensor DCCTB and then to the transformer T2B of the second electronic EBSB gun. The output terminal of the first DC current sensor DCCT is connected to capacitor C111 and then to the high voltage terminal HV. The output terminal of the second DC current sensor DCCTB is connected to capacitor C111B and then to the high-voltage terminal HV; The first DC current sensor DCCT and the second DC current sensor DCCTB have the same structure. The first DC current sensor DCCT includes a high-voltage coil TP, an induction coil NS1, and an induction coil NS2; The induction coil NS1 and the induction coil NS2 are connected in series. The input terminal of the induction coil NS1 is connected to the auxiliary power supply ES. The output terminal of the induction coil NS2 is connected to the rectifier. The output terminal of the rectifier is connected to the feedback terminal Vo. The feedback terminal Vo is connected in parallel with a resistor RS. The rectifier is a full-bridge diode rectifier; A capacitor is connected in parallel to the output coil of the transformer T2.

2. The beam sampling circuit with dual electron guns according to claim 1, characterized in that, The output coil of the transformer T2 is connected in parallel with capacitors C1 and C2, and capacitors C1 and C2 are connected in series.

3. The beam sampling circuit with dual electron guns according to claim 2, characterized in that, The high-voltage terminal HV is connected between capacitor C1 and capacitor C2, and is also connected to transformer T2.

4. The beam sampling circuit with dual electron guns according to claim 1, characterized in that, The first electron gun EBS includes a filament FIL connected to the transformer T2.

5. The beam sampling circuit with dual electron guns according to claim 4, characterized in that, The first electron gun EBS also includes a horizontal deflection electrode XSCAN.

6. The beam sampling circuit with dual electron guns according to claim 5, characterized in that, The first electron gun EBS also includes a vertical deflection electrode YSCAN.

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