Spring element, actuator and method for manufacturing a spring element

Abstract

A spring element (10) includes a spring portion (11) having a plurality of plate springs (11a) in a plate shape, and a plate-shaped support portion (12) and a load portion (13) connected to both ends in a first direction of the plate springs (11a). The plate springs (11) are configured by stacking a plurality of sheet members in a thickness direction. The plurality of sheet members are bonded to each other by intermolecular forces.

Description

Technical Field

[0001] The present invention relates to a spring element, an actuator, and a method for manufacturing a spring element having a spring that deforms when a load is applied and returns to its original shape when the load is removed. Background Technology

[0002] A spring is a component that utilizes the elastic deformation of a material; even if deformed under load, it will return to its original shape when unloaded. Types of springs include helical springs, disc springs, and leaf springs. Patent Document 1 discloses a method for manufacturing a helical spring with an outer diameter of 200 nm and an inner diameter of 100 nm, made of a metal or alloy containing a magnetic transition metal.

[0003] Existing technical documents

[0004] Patent documents

[0005] Patent Document 1: Japanese Patent Application Publication No. 2018-193607 Summary of the Invention

[0006] The problem the invention aims to solve

[0007] However, the helical spring manufactured using the prior art described in Patent Document 1 has the following problem: when the helical spring is compressed, the spring wires come into contact with each other, thus preventing a large displacement. Leaf springs, which utilize the deflection of a plate, are springs that can achieve a large displacement under compression. However, to obtain a large reversible deformation range with a leaf spring, the plate must be enlarged, resulting in a problem of requiring a large space to accommodate the leaf spring.

[0008] The present invention was made in view of the above circumstances, and its object is to provide a spring element that has a larger reversible deformation range than conventional helical springs, while suppressing the space required for installation compared to conventional leaf springs.

[0009] means for solving problems

[0010] To solve the above problems and achieve the objective, the spring element of the present invention comprises: a spring portion having a plurality of plate-shaped leaf springs; and plate-shaped support portions and load portions connected to both ends of the leaf springs in a first direction. The leaf springs are constructed by stacking a plurality of sheet-shaped members in the thickness direction. The plurality of sheet-shaped members are bonded to each other by intermolecular forces.

[0011] The effects of the invention

[0012] The spring element of the present invention has the following effects: it has a larger reversible deformation range compared with conventional helical springs, and it can suppress the space required for installation compared with conventional leaf springs. Attached Figure Description

[0013] Figure 1 This is a perspective view schematically illustrating an example of the structure of the spring element in Embodiment 1.

[0014] Figure 2 This is a perspective view schematically illustrating an example of the structure of a leaf spring of the spring element in Embodiment 1.

[0015] Figure 3 This is a top view showing an example of the atomic structure of graphene.

[0016] Figure 4 This is a side view showing an example of the atomic structure of graphene.

[0017] Figure 5 This is a top view showing an example of the atomic structure of molybdenum disulfide.

[0018] Figure 6 This is a side view showing an example of the atomic structure of molybdenum disulfide.

[0019] Figure 7 This is a cross-sectional view showing an example of the structure of the spring element in Embodiment 1.

[0020] Figure 8 This is an explanation Figure 7 The diagram shows the effect of the spring element.

[0021] Figure 9 This is an explanation Figure 7 The diagram shows the effect of the spring element.

[0022] Figure 10 This is a cross-sectional view schematically illustrating another example of the structure of the spring element in Embodiment 1.

[0023] Figure 11 This is a diagram schematically illustrating an example of the structure of the actuator in Embodiment 2.

[0024] Figure 12 This is a diagram schematically illustrating another example of the structure of the actuator in Embodiment 2.

[0025] Figure 13 This is a diagram schematically illustrating another example of the structure of the actuator in Embodiment 2.

[0026] Figure 14 This is a diagram schematically illustrating another example of the structure of the actuator in Embodiment 2. Detailed Implementation

[0027] Hereinafter, the spring element, actuator, and method of manufacturing the spring element according to embodiments of the present invention will be described in detail with reference to the accompanying drawings.

[0028] Implementation Method 1

[0029] Figure 1 This is a perspective view schematically illustrating an example of the structure of the spring element according to Embodiment 1. The spring element 10 includes a spring portion 11, a plate-shaped support portion 12 connected to the spring portion 11, and a load portion 13.

[0030] The spring section 11 has a plurality of leaf springs 11a in the shape of plates. The surfaces of the leaf springs 11a perpendicular to the thickness direction are connected at a predetermined angle to connecting surfaces 12a and 13a. Connecting surface 12a is the surface of the support section 12 that connects to the spring section 11, and connecting surface 13a is the surface of the load section 13 that connects to the spring section 11. In one example, the surfaces of the leaf springs 11a perpendicular to the thickness direction are connected orthogonally to the connecting surfaces 12a of the support section 12 and 13a of the load section 13.

[0031] Figure 2 This is a perspective view schematically illustrating an example of the structure of a leaf spring of the spring element according to Embodiment 1. Each leaf spring 11a has a structure in which multiple sheet-like members 11b are stacked in the thickness direction of the sheet-like members 11b. The surfaces of the multiple sheet-like members 11b constituting the leaf spring 11a that are perpendicular to their thickness are arranged to be parallel to each other. The stacked sheet-like members 11b are not bonded to each other by metallic bonds found in materials such as iron used in conventional leaf springs, but are bonded to each other by intermolecular forces.

[0032] The material of the sheet-like component 11b is sometimes a two-dimensional material with a two-dimensional bonded structure of atoms. An example of a two-dimensional material is at least one material selected from the group consisting of graphene, hexagonal boron nitride, molybdenum disulfide, molybdenum telluride, indium selenide, and tin telluride. Figure 3 This is a top view showing an example of the atomic structure of graphene. Figure 4 This is a side view illustrating an example of the atomic structure of graphene. Graphene 100 is a sheet-like structure in which carbon atoms 110 are covalently bonded in a hexagonal manner within the same plane. As described above, the adjacent layers of graphene 100 are bonded together by intermolecular forces.

[0033] Figure 5 This is a top view showing an example of the atomic structure of molybdenum disulfide. Figure 6This is a side view illustrating an example of the atomic structure of molybdenum disulfide. The molybdenum disulfide layer 120 is sheet-like, with a sulfur layer 140a disposed above and below the molybdenum layer 130a. The molybdenum layer 130a is formed by molybdenum atoms 130 arranged in a triangular configuration within the same plane, and the sulfur layer 140a is formed by sulfur atoms 140 arranged in a triangular configuration. The molybdenum layer 130a and the sulfur layer 140a are configured to form a hexagon when viewed from a direction perpendicular to the sheet, through the triangles of the molybdenum layer 130a and the sulfur layer 140a. The molybdenum atoms 130 of the molybdenum layer 130a and the sulfur atoms 140 of the sulfur layer 140a are connected by covalent bonds to form one molybdenum disulfide layer 120. Adjacent molybdenum disulfide layers 120 are bonded together by intermolecular forces.

[0034] In this way, the atoms of the sheets constituting each sheet member 11b are bonded by covalent bonds rather than by metallic bonds found in materials such as iron used in conventional leaf springs, resulting in a material that is highly rigid in the in-plane direction and flexible in terms of bending in the out-of-plane direction.

[0035] Back Figure 1 The support portion 12 is a member that supports the spring portion 11. The support portion 12 is a plate-shaped member having a connecting surface 12a that connects to the spring portion 11 and a support surface 12b that is the side opposite to the connecting surface 12a. In one example, the support portion 12 has a shape in which the connecting surface 12a and the support surface 12b have a pair of parallel surfaces. The spring element 10 is supported on an object such that the support surface 12b of the support portion 12 contacts the object on which the spring element 10 is supported.

[0036] The load portion 13 is a component disposed between the load member that applies a load to the spring portion 11 and the spring portion 11. The load portion 13 is provided on the leaf spring 11a at a location facing the portion connecting the support portion 12. That is, in Figure 1 In this example, the support portion 12 and the load portion 13 are connected to both ends of the leaf spring 11a in the extending direction of the first direction. The load portion 13 is a plate-shaped member having a connecting surface 13a connected to the spring portion 11 and a load surface 13b as the side opposite to the connecting surface 13a. In one example, the load portion 13 has a shape in which the connecting surface 13a and the load surface 13b have a pair of parallel surfaces. The spring element 10 is arranged such that the load member contacts the load surface 13b of the load portion 13.

[0037] The deformation mechanism of the spring portion 11 will now be explained. Assume that a load with a component extending from the load surface 13b toward the connecting surface 13a of the load portion 13 is applied to the load surface 13b of the load portion 13 at an angle relative to the load surface 13b. In this case, the multiple laminated sheet members 11b constituting the leaf spring 11a remain bonded by intermolecular forces, generating tensile strain on the outer side of the bend and compressive strain on the inner side of the bend, thereby deforming the leaf spring 11a. When a larger load is applied from this state, the intermolecular forces-based bonds between the multiple laminated sheet members 11b constituting the leaf spring 11a break, resulting in sliding or peeling between the sheet members 11b, or wrinkling within the sheet members 11b, thereby deforming the leaf spring 11a. Once the intermolecular forces-based bonds break, the sheet members 11b become in an energy-unstable state, and the resistance to sliding is almost zero.

[0038] Subsequently, when the load applied to the load portion 13 is removed, the strain energy accumulated in the leaf spring 11a becomes a driving force, causing the deformation of the leaf spring 11a to recover. When it returns to the position before the load was applied, the sheet members 11b re-form bonds with each other based on intermolecular forces. Thus, after the load applied to the load portion 13 is removed, the deformation of the spring portion 11 recovers. In this way, for the leaf spring 11a formed by stacked sheet members 11b, even if the leaf spring 11a is deformed to the point where the inner surface of the bending of the leaf spring 11a comes into contact, the energy state between the contacting surfaces is unstable and easily separates, thereby reversibly deforming through the deformation mechanism described above. Therefore, the reversible deformation range of the spring element 10 is larger than before.

[0039] This describes a scenario where the sheet member 11b is made of graphene, and a load with a component extending from the load surface 13b toward the connecting surface 13a is applied to the load surface 13b of the load portion 13 at an angle relative to the load surface 13b. In this case, before the interlaminar shear stress generated in the sheet member 11b exceeds 600 MPa, or before the vertical stress generated in the normal direction of the sheet member 11b exceeds 2000 MPa, tensile strain occurs on the outer side of the bend, and compressive strain occurs on the inner side of the bend, thereby deforming the leaf spring 11a. Furthermore, when the interlaminar shear stress reaches 600 MPa or more, interlaminar slippage occurs due to the breaking of bonds based on intermolecular forces. Additionally, when the vertical stress generated in the normal direction of the sheet member 11b reaches 2000 MPa or more, delamination occurs due to the breaking of bonds based on intermolecular forces, thereby deforming the leaf spring 11a. When slippage or delamination occurs in the interlaminar space of the sheet member 11b, wrinkles may sometimes form within the sheet member 11b. Subsequently, when the load applied to the load portion 13 is removed, the deformation is restored by a spontaneous restoring force driven by the strain energy accumulated in the sheet members 11b and the surface energy generated by sliding in graphene. Furthermore, the bonds between the sheet members 11b based on intermolecular forces are re-formed, thereby restoring the deformation of the leaf spring 11a.

[0040] In the spring element 10 of Embodiment 1, the spring part 11, the support part 12, and the load part 13 may be made of different materials or the same material. Figure 7 This is a cross-sectional view showing an example of the structure of the spring element in Embodiment 1. Figure 7 In the example shown, the spring portion 11, support portion 12, and load portion 13 of the spring element 10 are made of the same material. The sheet-like member 11b constituting the leaf spring 11a extends from the connection surface 12a with the support portion 12 to the opposite support surface 12b, and from the connection surface 13a with the load portion 13 to the opposite load surface 13b. Furthermore, at the positions where the support portion 12 and the load portion 13 are positioned, the sheet-like member 11b is stacked in the same direction as the stacking direction of the leaf spring 11a, thereby constituting the load portion 13 and the support portion 12. In other words, the support portion 12 and the load portion 13 are integrally formed with the spring portion 11a by stacking the sheet-like member 11b in the thickness direction at both ends in the extending direction of the leaf spring 11a.

[0041] Figure 8 and Figure 9 This is an explanation Figure 7 A diagram illustrating the effect of the spring element. (See diagram.) Figure 8 The illustration shows the case where the spring element 10 is fixed to the mounting surface 50, which has irregularities. In this case, as shown... Figure 9As shown, by sliding the sheet-like members 11b that constitute the support portion 12 against each other during installation, the shape of the support portion 12 will mimic the shape of the mounting surface 50. With this shape, stress concentration on the support portion 12 and the mounting surface 50 is eliminated when a load is applied to the load portion 13. Therefore, the spring element 10 has the effect of withstanding large loads, i.e., it can withstand large displacements.

[0042] Figure 10 This is a cross-sectional view schematically illustrating another example of the structure of the spring element in Embodiment 1. Figure 10 In this design, a cutout 15 of a predetermined depth is provided in the leaf spring 11a. Here, each of the sheet members 11b constituting the leaf spring 11a, arranged in a predetermined number of continuous layers starting from one of the planes perpendicular to the thickness direction of the leaf spring 11a, has a hole. Furthermore, the predetermined number of sheet members 11b are stacked in a manner that overlaps at the position of the hole. At this time, the holes of the sheet members 11b are arranged such that at least a portion overlaps with adjacent sheet members 11b. The overlapping portion of the holes forms the cutout 15. Examples of hole shapes include circular, triangular, and quadrilateral. The size of the hole can be increased or decreased by tilting from the sheet member 11b forming one of the planes perpendicular to the thickness direction to the inner layer of the leaf spring 11a.

[0043] When on Figure 10 When a load is applied to the load portion 13 of the spring element 10 with the notch 15 shown, the leaf spring 11a deforms in such a way that the surface where the notch 15 is located is concave. As a result, the shape of the deformation of the leaf spring 11a can be controlled compared to the case without the notch 15.

[0044] Below, on Figure 7 The manufacturing method of the spring element 10 shown will be described. A base material larger than the spring element 10 to be manufactured is prepared, and sheet-like members 11b are stacked in the same direction in at least a portion of the base material. In the region of the base material where the sheet-like members 11b are stacked in the same direction, a focused ion beam (FIB) device is used to remove portions other than the spring portion 11, the support portion 12, and the load portion 13, thereby manufacturing the spring element 10. Specifically, an ion beam is irradiated from a direction parallel or perpendicular to the thickness direction of the sheet-like members 11b and parallel to the connection surfaces 12a and 13a of the support portion 12 and the load portion 13. The irradiated ions deflect the base material, thereby removing portions other than the constituent elements of the spring element 10. Examples of ions used in the ion beam are gallium ions, neon ions, and helium ions.

[0045] When the spring element 10 is made of graphene, highly oriented pyrolytic graphite (HOPG) is used as the base material. HOPG is obtained by thermally decomposing and depositing hydrocarbon gases to generate pyrolytic carbon, followed by high-temperature heat treatment while applying stress.

[0046] The spring element 10 of Embodiment 1 includes: a spring portion 11 composed of a plurality of plate-shaped leaf springs 11a; and a plate-shaped support portion 12 and a load portion 13 connected to two opposing ends of the leaf springs 11a. The leaf springs 11a are constructed by stacking a plurality of sheet-like members 11b in the thickness direction, and the sheet-like members 11b are bonded to each other by intermolecular forces. When a load larger than a predetermined size is applied to the load portion 13, the intermolecular bonds between the sheet-like members 11b constituting the leaf springs 11a break, resulting in slippage or peeling between the sheet-like members 11b, or wrinkling within the sheet-like members 11b, thereby deforming the spring portion 11. Furthermore, when the load is removed, the deformation is restored by the strain energy accumulated in the sheet-like members 11b during loading, and the deformation is restored by re-forming the intermolecular bonds between the sheet-like members 11b. Thus, the spring element 10 has the effect of having a larger reversible deformation range compared to conventional helical springs. Furthermore, in conventional leaf springs, the leaf plate must be enlarged to achieve a large reversible deformation range, requiring a large space for the leaf spring. However, in the spring element 10 of Embodiment 1, the leaf spring 11a has a structure in which multiple sheet-like members 11b are bonded together by intermolecular forces, exhibiting high in-plane stiffness and flexibility in out-of-plane bending. Therefore, regardless of size, a leaf spring 11a with a large reversible deformation range can be constructed. As a result, it has the effect of reducing the space required for the spring element 10 compared to conventional leaf springs.

[0047] Implementation Method 2

[0048] In Embodiment 2, an actuator using the spring element 10 described in Embodiment 1 will be described.

[0049] Figure 11 This diagram schematically illustrates an example of the structure of the actuator according to Embodiment 2. The actuator 20A includes: a spring element 10A having a spring portion 11A, a support portion 12A, and a load portion 13A; an electrode 21 disposed on a support surface 12b of the support portion 12A; an electrode 22 disposed on a load surface 13b of the load portion 13A; a power supply 23 applying voltage between the electrodes 21 and 22; and a wire 24 electrically connecting the power supply 23 to the electrodes 21 and 22. Figure 11In this embodiment, spring element 10A, spring portion 11A, support portion 12A, and load portion 13A correspond to spring element 10, spring portion 11, support portion 12, and load portion 13, respectively, in Embodiment 1. However, spring portion 11A, support portion 12A, and load portion 13A are made of insulating material. Electrodes 21 and 22 are made of conductive material. Electrode 21 corresponds to the first electrode, and electrode 22 corresponds to the second electrode. Wire 24 is made of conductive material, preferably with low resistance. Power supply 23 can be a DC power supply or an AC power supply. Figure 11 The diagram shows a case where the number of electrodes 21 and 22 connected to the support portion 12A and the load portion 13A is one, but there can also be multiple electrodes.

[0050] exist Figure 11 In the actuator 20A shown, when the power supply 23 is turned on and a voltage is applied between the electrode 21 connected to the support portion 12A and the electrode 22 connected to the load portion 13A, a force in the direction of compressing the spring portion 11A is generated between the electrodes 21 and 22 by electrostatic discharge. The magnitude of the generated force varies depending on the magnitude of the voltage, and the amount of deformation of the spring portion 11A varies depending on the magnitude of the generated force. When the voltage between the electrodes 21 and 22 is zero, the electrostatic force disappears, and the spring portion 11A returns to its initial shape before deformation by the restoring force of the leaf spring 11a constituting the spring portion 11A.

[0051] Figure 12 This is a diagram schematically illustrating another example of the structure of the actuator in Embodiment 2. Furthermore, regarding... Figure 11 The same constituent elements are labeled with the same reference numerals and their descriptions are omitted. The actuator 20B includes: a spring element 10B having a spring portion 11B, a support portion 12B, and a load portion 13B; an insulating layer 25 disposed on the support surface 12b of the support portion 12B; an insulating layer 26 disposed on the load surface 13b of the load portion 13B; an electrode 21 connected to the insulating layer 25; an electrode 22 connected to the insulating layer 26; a power supply 23 applying voltage between the electrodes 21 and 22; and a wire 24 electrically connecting the power supply 23 to the electrodes 21 and 22. Figure 12 In this embodiment, spring element 10B, spring portion 11B, support portion 12B, and load portion 13B correspond to spring element 10, spring portion 11, support portion 12, and load portion 13, respectively, in Embodiment 1. However, spring portion 11B, support portion 12B, and load portion 13B are made of conductive material. Insulating layer 25 corresponds to the first insulating layer, and insulating layer 26 corresponds to the second insulating layer.

[0052] exist Figure 12In the example shown, the areas of insulating layers 25 and 26 are larger than the areas of support portion 12B and load portion 13B. On the side of insulating layer 25 opposite to the surface connected to support portion 12B, multiple electrodes 21 are provided at positions not corresponding to the placement positions of spring element 10B. On the side of insulating layer 26 opposite to the surface connected to load portion 13B, multiple electrodes 22 are provided at positions not corresponding to the placement positions of spring element 10B. Furthermore, in... Figure 12 The diagram shows a case where two electrodes 21 and 22 are connected to the support portion 12B and the load portion 13B respectively, but there could also be three or more, or even just one. Additionally, in... Figure 12 The diagram shows the case where electrodes 21 and 22 are configured not to overlap with the configuration position of spring element 10B, but electrodes 21 and 22 can also be configured to overlap with the configuration position of spring element 10B.

[0053] exist Figure 12 In the actuator 20B shown, when the power supply 23 is turned on and a voltage is applied between the electrode 21, which is connected to the support portion 12B via the insulating layer 25, and the electrode 22, which is connected to the load portion 13B via the insulating layer 26, a force in the direction of compressing the spring portion 11B is generated between the electrodes 21 and 22 due to electrostatic discharge. The magnitude of the generated force varies depending on the magnitude of the voltage, and the amount of deformation of the spring portion 11B varies depending on the magnitude of the generated force. When the voltage between the electrodes 21 and 22 is zero, the electrostatic force disappears, and the spring portion 11B returns to its initial shape before deformation due to the restoring force of the leaf spring 11a constituting the spring portion 11B.

[0054] Figure 13 This is a diagram schematically illustrating another example of the structure of the actuator in Embodiment 2. Furthermore, regarding... Figure 11 The same constituent elements are labeled with the same reference numerals and their descriptions are omitted. The actuator 20C includes: a spring element 10C having a spring portion 11C, a support portion 12C, and a load portion 13C; an electrode 21 disposed on a support surface 12b of the support portion 12C; an electrode 22 disposed on a load surface 13b of the load portion 13C; a power supply 23 applying voltage between the electrodes 21 and 22; and a wire 24 electrically connecting the power supply 23 to the electrodes 21 and 22. Figure 13In this embodiment, the spring element 10C, spring portion 11C, support portion 12C, and load portion 13C correspond to the spring element 10, spring portion 11, support portion 12, and load portion 13 of Embodiment 1, respectively. However, the spring portion 11C is made of a conductive material, while the support portion 12C and load portion 13C are made of an insulating material. An electrode 21 is provided on the support surface 12b of the support portion 12C in the portion where the spring portion 11C, i.e., the leaf spring 11a, is not disposed. An electrode 22 is provided on the load surface 13b of the load portion 13C in the portion where the leaf spring 11a is not disposed. Furthermore, this is only one example; alternatively, the electrode 21 may be provided on the support surface 12b of the support portion 12C in the portion where the leaf spring 11a is disposed, and the electrode 22 may be provided on the load surface 13b of the load portion 13C in the portion where the leaf spring 11a is disposed.

[0055] exist Figure 13 In the actuator 20C shown, when the power supply 23 is turned on and a voltage is applied between the electrode 21 connected to the support portion 12C and the electrode 22 connected to the load portion 13C, a force in the direction of compressing the spring portion 11C is generated between the electrodes 21 and 22 due to electrostatic discharge. The magnitude of the generated force varies depending on the magnitude of the voltage, and the amount of deformation of the spring portion 11C varies accordingly. When the voltage between the electrodes 21 and 22 is zero, the electrostatic force disappears, and the spring portion 11C returns to its initial shape before deformation due to the restoring force of the leaf spring 11a constituting the spring portion 11C.

[0056] Figure 14 This is a diagram schematically illustrating another example of the structure of the actuator in Embodiment 2. Furthermore, regarding... Figure 11 The same constituent elements are labeled with the same reference numerals and their descriptions are omitted. The actuator 20D includes: a spring element 10D having a spring portion 11D, a support portion 12D, and a load portion 13D; a power supply 23 that applies voltage between the support portion 12D and the load portion 13D; and a wire 24 that electrically connects the power supply 23 to the support portion 12D and to the load portion 13D. Figure 14 In this embodiment, the spring element 10D, spring portion 11D, support portion 12D, and load portion 13D correspond to the spring element 10, spring portion 11, support portion 12, and load portion 13 of Embodiment 1, respectively. However, the spring portion 11D is made of an insulating material, while the support portion 12D and load portion 13D are made of a conductive material. Furthermore, the support portion 12D and load portion 13D also function as the electrodes 21 and 22 of Embodiment 1.

[0057] exist Figure 14In the actuator 20D shown, when the power supply 23 is turned on and a voltage is applied between the support portion 12D and the load portion 13D, a force in the direction of compressing the spring portion 11D is generated between the support portion 12D and the load portion 13D by electrostatic discharge. The magnitude of the generated force varies depending on the magnitude of the voltage, and the amount of deformation of the spring portion 11D varies accordingly. When the voltage between the support portion 12D and the load portion 13D is reduced to 0, the electrostatic force disappears, and the spring portion 11D returns to its initial shape before deformation by the restoring force of the leaf spring 11a constituting the spring portion 11D.

[0058] In the actuators 20A, 20B, 20C, and 20D of Embodiment 2, a voltage is applied between the support portions 12A, 12B, 12C, and 12D and the load portions 13A, 13B, 13C, and 13D of the spring elements 10A, 10B, 10C, and 10D, which have spring portions 11A, 11B, 11C, and 11D, support portions 12A, 12B, 12C, and 12D, and load portions 13A, 13B, 13C, and 13D, and the leaf spring 11a is deformed according to the magnitude of the voltage. When a force in the compression direction exceeding a predetermined value is applied between the support portions 12A, 12B, 12C, 12D and the load portions 13A, 13B, 13C, 13D, the bonds between the sheet members 11b constituting the leaf spring 11a based on intermolecular forces break, resulting in sliding or peeling between the sheet members 11b, or wrinkling within the sheet members 11b, thereby deforming the leaf spring 11a. Furthermore, when the force in the compression direction between the support portions 12A, 12B, 12C, 12D and the load portions 13A, 13B, 13C, 13D is removed, the deformation is restored by the strain energy accumulated in the sheet members 11b during compression, and the deformation is further restored by the re-formation of the bonds between the sheet members 11b based on intermolecular forces. Thus, actuators 20A, 20B, 20C, 20D have the effect of providing a larger reversible deformation range compared to conventional helical springs. Furthermore, in conventional leaf springs, the leaf springs must be enlarged to achieve a large reversible deformation range, requiring a large space for the leaf springs. However, the leaf springs 11a of the actuators 20A, 20B, 20C, and 20D in Embodiment 2 have a structure in which multiple sheet-like members 11b are bonded together by intermolecular forces, exhibiting high in-plane stiffness and flexibility in out-of-plane bending. Therefore, a leaf spring 11a with a large reversible deformation range can be constructed regardless of its size. As a result, actuators 20A, 20B, 20C, and 20D can be obtained that, compared to conventional leaf springs, reduce the space required for the spring elements 10A, 10B, 10C, and 10D while maintaining a large reversible deformation range.

[0059] The structure shown in the above embodiments is an example, and it can also be combined with other known technologies. The embodiments can also be combined with each other, and without departing from the spirit, a part of the structure can be omitted or changed.

[0060] Explanation of reference numerals in the attached figures

[0061] 10, 10A, 10B, 10C, 10D Spring elements; 11, 11A, 11B, 11C, 11D Spring parts; 11a Leaf spring; 11b Sheet-like component; 12, 12A, 12B, 12C, 12D Support parts; 12a, 13a Connecting surfaces; 12b Support surface; 13, 13A, 13B, 13C, 13D Load parts; 13b Load surface; 15 Cutout part; 20A, 20B, 20C, 20D Actuators; 21, 22 Electrodes; 23 Power supply; 24 Wire; 25, 26 Insulating layer; 50 Setting surface; 100 Graphene; 110 Carbon atom; 120 Molybdenum disulfide layer; 130 Molybdenum atom; 130a Molybdenum layer; 140 Sulfur atom; 140a Sulfur layer.

Claims

1. A spring element, characterized in that have: The spring section has multiple leaf springs in the shape of plates; and The plate-shaped support and load-bearing portions are connected to both ends of the leaf spring in a first direction. The leaf spring is constructed by stacking multiple leaf-shaped components in the thickness direction. The multiple sheet-like components are bonded to each other by intermolecular forces. The leaf-shaped member constituting the leaf spring, having a predetermined number of layers starting from one of the planes of the leaf spring perpendicular to the thickness direction, has a hole. The sheet-like members of a predetermined number of layers are stacked in such a way that at least a portion of the positions of the holes overlap.

2. The spring element according to claim 1, characterized in that, The surfaces of the plurality of leaf-shaped members constituting the leaf spring that are perpendicular to the thickness direction are parallel to each other. The surface of the leaf spring perpendicular to the thickness direction is connected to the load portion and the support portion at a predetermined angle.

3. The spring element according to claim 1 or 2, characterized in that, The spring portion, the load portion, and the support portion are all made of the same material. The support portion and the load portion are integrally formed by stacking the sheet-like members in the thickness direction and the spring portion at both ends of the leaf spring in the first direction.

4. The spring element according to claim 1 or 2, characterized in that, The sheet-like component is a two-dimensional material.

5. The spring element according to claim 4, characterized in that, The two-dimensional material is at least one material selected from the group consisting of graphene, hexagonal boron nitride, molybdenum disulfide, molybdenum telluride, indium selenide, and tin telluride.

6. An actuator characterized by, have: The spring element according to any one of claims 1 to 4; The first electrode is connected to the support portion; The second electrode is connected to the load portion; as well as A power source, which is connected to the first and second electrodes via wires. The spring portion, the support portion, and the load portion are made of insulating material.

7. An actuator characterized by, have: The spring element according to any one of claims 1 to 4; The first insulating layer, which is connected to the side opposite to the surface of the support portion that connects to the spring portion, is made of insulating material; The first electrode is connected to the first insulating layer; The second insulating layer, which is connected to the side opposite to the surface of the load portion that connects to the spring portion, is made of insulating material; The second electrode is connected to the second insulating layer; as well as A power source, which is connected to the first and second electrodes via wires. The spring portion, the support portion, and the load portion are made of conductive material.

8. The actuator according to claim 7, characterized in that, The first insulating layer has a larger area than the support portion. The second insulating layer has a larger area than the load portion. The first electrode is disposed outside the first insulating layer at a position corresponding to the configuration position of the support portion. The second electrode is disposed outside the second insulating layer at a position corresponding to the configuration position of the load portion.

9. An actuator characterized by, have: The spring element according to any one of claims 1 to 4; The first electrode is connected to the support portion; A second electrode, which is connected to the load portion; and A power source, which is connected to the first and second electrodes via wires. The spring portion is made of a conductive material. The support portion and the load portion are made of insulating material.

10. The actuator according to claim 9, characterized in that, The first electrode is disposed in the support portion at a position other than the position corresponding to the configuration position of the spring portion. The second electrode is disposed on the load portion at a position other than the configuration position of the spring portion.

11. An actuator, characterized in that, have: The spring element according to any one of claims 1 to 4; and The power supply is connected to the support and the load via wires. The spring portion is made of insulating material. The support portion and the load portion are made of conductive material.

12. A method for manufacturing a spring element, the spring element comprising: The spring section has multiple leaf springs in the shape of plates; and The plate-shaped support and load-bearing portions are connected to both ends of the leaf spring in a first direction. The leaf spring is constructed by stacking multiple leaf-shaped components in the thickness direction. The multiple sheet-like components are bonded to each other by intermolecular forces. The method for manufacturing the spring element is characterized in that, Remove the portion of the base material from which the sheet-like components are stacked, excluding the spring portion, the support portion, and the load portion.

13. The method for manufacturing a spring element according to claim 12, characterized in that, The parent material is highly oriented pyrolytic graphite.

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