Tray clamping mechanism and tray handling apparatus

Abstract

The application discloses a tray clamping mechanism and a tray carrying device. The tray clamping mechanism comprises a base, a first driving member and a clamping jaw. The clamping jaw comprises a clamping main body part and an extension part. The first driving member is arranged on the base, the clamping jaw is connected with the first driving member, the extension part is connected with the clamping main body part and extends along a first direction of the base relative to the clamping main body part. The first driving member is used for driving the clamping jaw to move along a second direction of the base, so that the clamping main body part clamps the tray along the second direction, and the extension part clamps the tray along the first direction. The tray clamping mechanism can increase the clamping points of the tray and stably clamp the tray by using the clamping main body part and the extension part of the clamping jaw to clamp the tray from the second direction and the first direction respectively.

Description

Technical Field

[0001] This application relates to the field of semiconductor manufacturing, and more particularly to a material handling mechanism. Background Technology

[0002] In semiconductor manufacturing, semiconductor products are typically stored in trays, and the transfer of semiconductor products is achieved by moving the trays.

[0003] In related technologies, suction cups are typically used to pick up material trays. Cylinders, motors, and other transmission mechanisms drive the suction cups to transport the trays to their destination. However, when using suction cups to pick up material trays, dust on the tray or suction cup surface can cause the suction cups to fail to hold the trays properly. During transport, because the contact between the suction cup and the tray is only one-sided, the grip is not secure enough, especially when the air supply fluctuates, which can lead to the tray falling and affect production safety and efficiency. Summary of the Invention

[0004] This application discloses a material tray clamping mechanism, which can improve the reliability of the material tray gripping and handling process, and is conducive to improving production safety and production efficiency.

[0005] To achieve the above objectives, in a first aspect, the present invention discloses a tray clamping mechanism, comprising:

[0006] Base;

[0007] A first driving member is disposed on the base;

[0008] The gripper includes a gripping main body and an extension, one end of the gripping main body is connected to the first driving member, and the extension is connected to the end of the gripping main body opposite to the first driving member;

[0009] The first driving member is used to drive the gripper to move along a first direction of the base, so that the gripping main body grips the tray along the first direction and the extension grips the tray along the second direction respectively;

[0010] The second direction intersects with the first direction.

[0011] As an optional implementation, the grippers are arranged in pairs and are symmetrically located on opposite sides of the base along the first direction;

[0012] Each of the grippers is driven by an independent first drive element.

[0013] As an optional implementation method,

[0014] The clamping body includes a first clamping surface, the normal vector of the first clamping surface is parallel to the first direction, and the first clamping surface is used to connect with the material tray to clamp the material tray along the first direction;

[0015] The extension includes a second clamping surface and a third clamping surface. The second clamping surface is connected to the first clamping surface, and the normal vector of the second clamping surface is coplanar with the first direction, for clamping the material tray along the second direction.

[0016] The third clamping surface is connected to the second clamping surface and assists in clamping the material tray along the second direction.

[0017] As an optional implementation, the base includes a first surface and a second surface along the first direction, the first driving member is disposed on the first surface, and the third clamping surface is parallel to the second surface and forms a clamping gap between the third surface and the second surface for clamping the tray.

[0018] The tray clamping mechanism further includes a buffer member, which is located at the corner of the base near the gripper. The buffer member is at least partially located on the side of the second surface. The buffer member is used to contact the tray to buffer the clamping impact of the base on the tray.

[0019] As an optional implementation, the tray clamping mechanism further includes a limiting structure disposed on the base, the limiting structure being used to limit the position of the tray in a third direction;

[0020] The third direction intersects with both the first and second directions.

[0021] As an optional implementation, the tray clamping mechanism further includes sensors, which are arranged in pairs at both ends of the base, and are used to detect the clamping status of the tray.

[0022] Secondly, the present invention discloses a tray handling device, comprising:

[0023] The machine includes a frame, a first transport mechanism, a second transport mechanism, and a tray clamping mechanism as described in any one of the above descriptions. The first transport mechanism is disposed on the frame and is movable relative to the frame in a third direction. The second transport mechanism is connected to the first transport mechanism and is movable relative to the base in a second direction. The tray clamping mechanism is fixedly connected to the second transport mechanism so as to move in the second direction under the drive of the second transport mechanism and in a third direction under the drive of the first transport mechanism.

[0024] As an optional implementation, the rack includes a support and a mounting plate, the mounting plate being connected to the support;

[0025] The first conveying mechanism includes a second driving member and a transmission assembly. The second driving member is disposed on the mounting plate, and the transmission assembly is connected to the second driving member so as to move along the third direction under the driving action of the second driving member.

[0026] The second conveying mechanism includes a third driving member and a connecting member. The driving structure is connected to the transmission assembly. The tray clamping mechanism is connected to the third driving member through the connecting member. The third driving member is used to drive the tray clamping mechanism to move along the second direction.

[0027] As an alternative implementation, the rack further includes a cable chain and a tray, the tray being disposed on the mounting plate and extending along the third direction, one end of the cable chain being connected to the third drive member, and the other end of the cable chain being connected to the tray, such that the cable chain is at least partially located on the tray.

[0028] As an optional implementation, the third driving member includes a fixed end, a sliding end, and an elastic element;

[0029] The fixed end is connected to the transmission assembly, the sliding end is slidably connected to the fixed end, and the material tray clamping mechanism is connected to the sliding end so as to move relative to the fixed end in the second direction under the drive of the sliding end.

[0030] The elastic element is connected between the sliding end and the fixed end, and the elastic element is used to limit the sliding stroke of the sliding end relative to the fixed end.

[0031] Compared with the prior art, the beneficial effects of this application are:

[0032] By using grippers to grasp the material tray, the main gripping part and the extension part of the grippers are used to grip the material tray from the second direction and the first direction, respectively. This increases the number of gripping points on the material tray, replacing the suction cup adsorption method in related technologies, which is prone to unreliable adsorption. This effectively improves the gripping reliability of the material tray, thereby helping to improve production safety and efficiency. Attached Figure Description

[0033] To more clearly illustrate the technical solutions in the embodiments of the present invention, the accompanying drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0034] Figure 1 This is an isometric schematic diagram of the tray clamping mechanism provided in the embodiments of this application;

[0035] Figure 2 A front view of the tray clamping mechanism provided in an embodiment of this application;

[0036] Figure 3 for Figure 1 Axonometric view of the middle gripper;

[0037] Figure 4 A schematic diagram of the tray handling equipment provided in the embodiments of this application;

[0038] Figure 5 for Figure 4 A schematic diagram of the third driving component.

[0039] Explanation of reference numerals in the attached figures:

[0040] First direction, Y; Second direction, Z; Third direction, X;

[0041] Base, 1; First surface, 11; Second surface, 12;

[0042] First driving component, 2;

[0043] Gripper 3; clamping body part 31; first clamping surface 311; extension part 32; second clamping surface 321; third clamping surface 322;

[0044] Buffer, 4;

[0045] Limiting structure, 5;

[0046] Sensor, 6;

[0047] 7; rack, 71; bracket, 72; mounting plate, 73; cable chain, 74; tray, 75;

[0048] First conveying mechanism, 8; second driving component, 81; transmission assembly, 82; synchronous belt, 821; guide rail, 822;

[0049] Second conveying mechanism, 9; third driving component, 91; fixed end, 911; sliding end, 912; elastic component, 913; connecting component, 92. Detailed Implementation

[0050] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0051] In this invention, the terms "upper," "lower," "left," "right," "front," "rear," "top," "bottom," "inner," "outer," "vertical," "horizontal," "lateral," and "longitudinal" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. These terms are primarily for the purpose of better describing the invention and its embodiments, and are not intended to limit the indicated device, element, or component to having a specific orientation, or to be constructed and operated in a specific orientation.

[0052] Furthermore, in addition to indicating direction or positional relationship, some of the aforementioned terms may also have other meanings. For example, the term "above" may also be used in certain situations to indicate a dependency or connection. Those skilled in the art can understand the specific meaning of these terms in this invention based on the specific circumstances.

[0053] Furthermore, the terms "installation," "setup," "equipped with," "connection," and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral structure; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium, or an internal connection between two devices, components, or parts. Those skilled in the art can understand the specific meaning of these terms in this invention based on the specific circumstances.

[0054] Furthermore, the terms "first," "second," etc., are primarily used to distinguish different devices, elements, or components (which may be the same or different in specific type and construction), and are not intended to indicate or imply the relative importance or quantity of the indicated devices, elements, or components. Unless otherwise stated, "a plurality of" means two or more.

[0055] In semiconductor manufacturing, semiconductor products are typically stored in trays, and then transferred by moving these trays. This allows for the transfer of large quantities of semiconductor chips at once, while the chips are protected by the trays, preventing damage from impacts during transfer. Furthermore, standardized trays facilitate the identification and positioning of semiconductor products in subsequent processes, thus improving production efficiency.

[0056] In related technologies, suction cups are typically used to adhere to the upper surface of a material tray. A cylinder, motor, and other transmission mechanisms then drive the suction cup to transport the tray to its destination. However, when using suction cups to hold the tray, dust on the tray or suction cup surface can cause the suction cup to fail to hold it properly. During transport, because the contact between the suction cup and the tray is only one side, the grip is not strong enough. If the suction cup's position changes, the vacuum tubing connected to the suction cup may bend, or fluctuations in the air supply may cause a sudden drop in the suction force, leading to the tray falling and affecting production safety and efficiency.

[0057] Based on this, in a first aspect, this application discloses a tray clamping mechanism, which includes a base, a first driving member, and a gripper, wherein the gripper includes a gripping main body and an extension. The first driving member is disposed on the base, the gripper is connected to the first driving member, and the extension is connected to the gripping main body and extends relative to the gripping main body along a first direction of the base; the first driving member is used to drive the gripper to move along a second direction of the base, so that the gripping main body clamps the tray along the second direction and the extension clamps the tray along the first direction, respectively. This application uses a gripper as a means of grasping the tray. When grasping the tray, the gripping main body and the extension of the gripper are used to clamp the tray from the second direction and the first direction, respectively, thereby increasing the number of gripping points on the tray and achieving stable clamping of the tray.

[0058] Secondly, this application also discloses a tray handling device, which includes a frame, a first handling mechanism, a second handling mechanism, and the tray clamping mechanism mentioned in the first aspect. The first handling mechanism is disposed on the frame and can move relative to the frame in a third direction. The second handling mechanism is connected to the first handling mechanism and can move relative to the base in a second direction. The tray clamping mechanism is fixedly connected to the second handling mechanism and moves in the second direction under the drive of the second handling mechanism, and also moves in a third direction under the drive of the first handling mechanism. Using the tray handling device of this application, trays can be handled stably.

[0059] To facilitate understanding of the structure of the tray clamping mechanism and the tray handling equipment, the technical solution of this application will be further described below in conjunction with the embodiments and accompanying drawings.

[0060] Please see Figures 1 to 3In a first aspect, the tray clamping mechanism provided in this application includes: a base 1, a first driving member 2, and grippers 3. The base 1 has a first surface 11 and a second surface 12, and the first driving member 2 is mounted on the first surface 11. When clamping the tray, the second surface 12 is parallel to the upper surface of the tray and clamps the tray together with the grippers 3. The grippers 3 are arranged in pairs, symmetrically located on both sides of the base 1, and each gripper 3 is driven by an independent first driving member 2. Under the driving action of the first driving member 2, the two opposing grippers 3 move towards each other, thereby clamping the tray. For ease of understanding, the direction of movement of the grippers 3 is called the first direction Y, and the normal direction of the second surface 12 is called the second direction Z, wherein the first direction Y and the second direction Z intersect.

[0061] Optionally, the gripper 3 may include a gripping main body 31 and an extension 32. The gripping main body 31 includes a first gripping surface 311, and the extension 32 includes a second gripping surface 321 and a third gripping surface 322. The first driving member 2 is connected to the gripping main body 31, and the extension 32 is connected to the end of the gripping main body 31 away from the first driving member 2. The direction of the normal vector of the first gripping surface 311 is parallel to the first direction Y, and the direction of the normal vector of the third gripping surface 322 is parallel to the second direction Z. The second gripping surface 321 connects the first gripping surface 311 and the third gripping surface 322. It is easy to understand that the normal vector of the second gripping surface 321 intersects the first direction Y and the second direction Z respectively, and the normal vector of the second gripping surface 321, the first direction Y, and the second direction Z are coplanar. Thus, the third gripping surface 322 is parallel to the second surface 12, and a gripping distance for gripping the material tray is formed between the third gripping surface 322 and the second surface 12. When clamping the tray, under the driving action of the drive unit 2, the gripper 3 approaches the tray along the first direction Y. During this process, the third clamping surface 322 extends under the tray to assist in clamping, the second clamping surface 321 contacts the tray, and the first clamping surface 311 positions and clamps the tray. It is easy to understand that during the clamping process, the direction of the clamping force of the first clamping surface 311 on the tray is parallel to the first direction Y, thus clamping the tray along the first direction Y. The clamping force of the second clamping surface 321 on the tray (denoted as F2) is the contact force of the second clamping surface 321 on the tray, and its direction is the normal vector direction of the second clamping surface 321. Therefore, F2 can be decomposed into a component force F along the first direction Y. 2y The force F, pointing towards the other gripper 3, and along the second direction Z. 2z The second clamping surface 321 and the second surface 12 clamp the tray along the second direction Z. The third clamping surface 322 supports the tray in the second direction, that is, the third clamping surface 322 is located on the side of the tray away from the second surface 12 along the second direction Z, which can prevent the tray from slipping off in this direction.

[0062] It is understandable that the gripper 3 can also be used individually, rather than in pairs. In this case, one or more surfaces for clamping can be provided on the side of the base 1 where the gripper is not located, to cooperate with the gripper 3 in clamping the tray. In this way, the tray clamping mechanism of this application contains fewer moving parts and the structural design is simpler.

[0063] Optionally, the base 1 can be generally in the shape of a long strip, such as a rectangular plate. In this case, the first direction Y can be the length direction of the base, and the second direction Z can be the thickness direction of the base. During installation, two grippers 3 can be respectively positioned at both ends of the base along the first direction Y, thereby clamping both ends of the material tray along the first direction Y. Two first driving members 2 can be positioned in the middle of the base 1, spaced apart, to control the two grippers 3 respectively.

[0064] Furthermore, the first surface 11 can be the upper surface of the base 1, that is, the side on which the first driving member 2 is provided, while the second surface 12 can be the lower surface of the base 1. The second surface 12 can be used to contact the material tray when the gripper 3 grips the material tray, so that the material tray can be clamped between the extension 32 of the gripper and the second surface 12 along the second direction Z.

[0065] As an optional example, the first drive component 2 can be a dual-axis or tri-axis cylinder. When a dual-axis or tri-axis cylinder is selected, the plane containing the axis of the dual-axis or tri-axis cylinder needs to be parallel to the second surface 12. The two axes of the dual-axis cylinder or the three axes of the tri-axis cylinder are simultaneously connected to the gripper 3. In this way, the clamping force distribution on the second clamping surface 321 and the third clamping surface 322 is more uniform. When the surface in contact with the material tray is not parallel to the second surface 12, the gripper 3 will generate a torsional torque about the second direction Z when clamping the material tray. The dual-axis and tri-axis cylinders can better resist this torque, thereby improving the stability of clamping.

[0066] As another alternative example, the first drive element 2 can also be a rotary cylinder. When a rotary cylinder is selected, a linkage mechanism is used to simultaneously connect a pair of grippers 3, so that when the rotary cylinder rotates, the pair of grippers 3 will extend or retract synchronously along the first direction Y. This results in better consistency of the tray's position when releasing the tray compared to using a linear cylinder, thus achieving higher clamping accuracy.

[0067] Of course, it is easy to understand that the first driving component 2 can also be selected from various servo motors, which can more accurately control the magnitude of the clamping force of the gripper 3.

[0068] Optionally, the tray clamping mechanism of this application may further include a buffer 4, which is disposed at the corner of the base 1 near the gripper 3, and at least partially located on the side of the second surface 12. When the tray clamping mechanism of this application clamps the tray, it needs to approach the tray along the first direction Z. Therefore, when buffers 4 are provided at all four corners of the base 1, the impact of the base 1 of the tray clamping mechanism of this application on the tray when it contacts the tray can be buffered.

[0069] Preferably, as described above, the base is roughly in the shape of a long strip plate. Therefore, the buffer element can be provided at all four corners of the base. This is because, considering the process of gripping and releasing the material tray in practice, the base 1 and the material tray are not completely parallel. In this case, the corners of the base 1 are the first positions to contact and move away from the material tray. Placing the buffer element 4 at the corners helps to exert its buffering effect. Of course, in other embodiments, the buffer element can also be provided only at two opposite corners of the base. This embodiment does not specifically limit this.

[0070] Optionally, the buffer 4 can be an elastic component such as a spring, a pad made of various types of rubber or silicone, or a sponge. In practice, it can be freely selected based on factors such as the material of the tray, the replaceability and durability of the buffer 4, and the effect of static electricity. This embodiment does not impose specific limitations on this.

[0071] In some embodiments, the tray clamping mechanism may further include a limiting structure 5. The limiting structure 5 is disposed on both sides of the base 1 along a third direction X. Exemplarily, the limiting structure 5 may be a metal block disposed along a third direction X on the side of the base 1 where the gripper 3 is not located. This limiting structure can be connected to the base 1 by fasteners such as bolts or rivets, and when the tray clamping mechanism of this application clamps the tray, the lower surface of the limiting structure 5 is lower than the upper surface of the tray. Thus, when the tray is clamped, the movement of the tray along a third direction X will be prevented by the limiting structure 5, thereby preventing the tray from slipping off along a third direction X. It is understood that in other embodiments, the limiting structure 5 may also be a protrusion of the base 1, and the limiting structure 5 is integrally constructed with the base, so that in vibrating working environments, the limiting structure 5 will not detach from the base 1 and fail.

[0072] In some embodiments, the tray clamping mechanism of this application may further include a sensor 6. The sensor 6 is disposed on the base 1 and is used to detect the clamping status of the tray. Preferably, the sensors 6 are disposed in pairs at both ends or corners of the base 1. Considering that in practice, the base 1 and the tray are not completely parallel during the process of clamping and releasing the tray, in this case, the corners or ends of the base 1 are the first positions to contact and move away from the tray. This arrangement of the sensors 6 is beneficial for timely detection of abnormalities such as tray slippage, and enables the central control system to stop the tray clamping mechanism and the tray conveying equipment of this application.

[0073] For example, the sensor may include, but is not limited to, photoelectric, capacitive, or ultrasonic proximity sensors or other types of proximity sensors, as well as other sensors that can identify whether the tray is successfully clamped. In practice, the sensor can be freely selected based on factors such as the material of the tray, the specific working environment, and the influence of light / electricity / magnetism on the tray and the products stored in the tray. This embodiment does not impose any specific limitations on these factors.

[0074] Optionally, to facilitate maintenance personnel to promptly obtain information on the material tray clamping status, the sensor 6 can be connected to alarm devices such as a three-color light. When abnormalities such as material tray slippage occur, the alarm device can alert the maintenance personnel.

[0075] Please see Figure 4 Secondly, the tray handling equipment provided in this embodiment includes a frame 7, a first handling mechanism 8, a second handling mechanism 9, and the aforementioned tray clamping mechanism. The frame 7 may include a bracket 71 and a mounting plate 72; the first handling mechanism 8 may include a second driving member 81 and a transmission assembly 82; the second handling mechanism 9 may include a third driving member 91 and a connecting member 92. The bracket 71 is fixed to a mounting base, such as the ground or a milled plate. The mounting plate 72 is connected to the bracket 71. The second driving member 81 is disposed on the mounting plate 72. The transmission assembly 82 is arranged along a third direction X and is movably connected to the second driving member 81. The third driving member 91 is connected to the transmission assembly 82, and the connecting member 92 is connected to the third driving member 91. Driven by the second driving member 81, the transmission assembly 82 can move relative to the mounting plate 72 along a third direction X, thereby causing the third driving member 91 to move along a third direction X. The third driving member 91 can drive the connecting member 92 to move relative to the mounting plate 72 along a first direction Z, thereby driving the tray clamping mechanism of this application to move along the first direction. In this way, the material tray can be clamped by the material tray clamping mechanism of this application, and driven by the second conveying mechanism 9 to move along the first direction Z, and driven by the first conveying mechanism 8 to move along the third direction X, thereby realizing the conveying of the material tray from one place to another.

[0076] Optionally, the frame 7 may also include a cable chain 73 and a tray 74. The tray 74 is connected to the mounting plate 72, one end of the cable chain 73 is connected to the tray 74, the other end is connected to the third drive unit 91, and the portion between the two ends rests on the tray 74. The wiring and / or piping of the third drive unit 91 and the tray clamping mechanism of this application can be neatly organized and stored inside the cable chain 73, thus preventing the aforementioned wiring and / or piping from being damaged by friction with other hard components due to the movement of the first transport mechanism 8 and the second transport mechanism 9. Assuming that the cable chain 73 is not supported by the tray 74, the cable chain 73 will hang naturally due to its own weight. Due to the movement of the first transport mechanism 8 and the second transport mechanism 9, it will repeatedly impact the mounting base or have multiple small-radius bends, which will cause the internal wiring and / or piping to be subjected to large bending stress, making it prone to fatigue damage over time. In particular, if the aforementioned piping includes air pipes, the small-radius bends may prevent airflow from passing normally, affecting the normal operation of the components connected to the air pipes. The tray 74 can prevent this from happening. It is easy to understand that the component connected to the aforementioned air pipe can be the first drive component 2 of the selected cylinder mentioned above.

[0077] Optionally, the second driving component 81 can be a motor, and the transmission assembly 82 can include a synchronous belt and a guide rail. The synchronous belt is connected to the motor, and the guide rail is disposed on the mounting plate 72 along the third direction X. The third driving component 91 is connected to the synchronous belt and is slidably connected to the guide rail. In this way, the motor can drive the third driving component 91 through the synchronous belt, and with the guiding effect of the guide rail, the third driving component 91 moves along the third direction X. Consequently, the tray clamping mechanism connected to the third driving component 91 can move along the third direction X, and the tray held by the tray clamping mechanism can move along the third direction X. The synchronous belt and guide rail are commonly used transmission methods to convert the rotational motion of the motor into the linear motion of the load. If the synchronous belt is used alone to drag the load, due to the elasticity of the synchronous belt, the load lacks a guiding effect under the drag of the synchronous belt, and the trajectory of the load's motion will be a random curve. Using the solution provided in this embodiment helps to take advantage of the high-precision transmission of the synchronous belt. The weight of the load is borne by the guide rail, and the synchronous belt only plays a dragging role, which is beneficial to extending the life of the synchronous belt. It is easy to understand that the above-mentioned load in this embodiment corresponds to the third drive member 91, the tray clamping mechanism connected to the drive member 91, and the tray clamped by the tray clamping mechanism.

[0078] Optionally, the third drive component 91 can be a pneumatic slide, a linear motor, or a rotary motor combined with a lead screw mechanism, rack and pinion mechanism, or other mechanisms that can achieve linear motion. Rotary motors, when combined with other mechanisms to achieve linear motion, generally have a power-off self-locking function, ensuring high safety in the event of sudden power or gas outages. Pneumatic slides have a simple structure, low cost, and are easy to maintain and replace. Linear motors allow for precise adjustment of the stroke and output force, making them widely applicable.

[0079] Please see Figure 5 When the third driving component is a pneumatic slide table or a linear motor, the third driving component 91 may include a fixed end 911, a sliding end 912, and an elastic element 913. The fixed end 911 is connected to the transmission assembly 82, and the sliding end 912 is slidably connected to the fixed end 911. The tray clamping mechanism of this application is connected to the sliding end 912 via a connecting member 92, so that it moves relative to the fixed end 911 in the first direction Z under the drive of the sliding end 912. Without the elastic element 913, in the event of a sudden power outage or gas failure or operator error, since pneumatic slide tables or linear motors generally do not have a self-locking function in case of power outage or gas failure, the sliding end 912 and the tray clamping mechanism of this application will slip off the fixed end 911 due to gravity and fall onto other components. Using an elastic element 913 to connect the fixed end 911 and the sliding end 912 can limit the travel of the sliding end 912 relative to the fixed end 911 under the above extreme conditions, thereby preventing the sliding end 912 from detaching from the fixed end 911 and causing accidents such as falling and crashing into machines.

[0080] Optionally, the elastic element may include, but is not limited to, springs, tension springs, etc.

[0081] The following is a brief description of the process by which the material tray clamping mechanism of this application clamps the material tray, and the process by which the material tray handling equipment of this application handles the material tray:

[0082] S1: The material tray is located at the loading position;

[0083] S2: The material tray clamping mechanism of this application is driven by the first conveying mechanism 8 and moves to directly above the material tray. The gripper 3 is driven by the first driving member 2 and moves to the positive limit.

[0084] S3: The material tray clamping mechanism of this application is driven by the second conveying mechanism 9 and descends until the buffer 4 contacts the material tray, and / or the sensor 6 detects that the distance between the material tray clamping mechanism and the material tray meets the preset distance; at this time, the material tray clamping mechanism of this application is located at the upper material position;

[0085] S4: The gripper 3 is driven by the first conveying mechanism 8 to move towards the negative limit. The third clamping surface 322 moves to below the material tray, the second clamping surface 321 contacts the material tray, and the first clamping surface 311 contacts the material tray until the first clamping surface 311 clamps the material tray along the first direction Y, and the second clamping surface 321 and the second surface 12 clamp the material tray along the second direction Z. After this step is completed, the material tray clamping mechanism of this application completes the clamping of the material tray.

[0086] S5: The material tray clamping mechanism of this application maintains the clamping of the material tray and is driven by the first conveying mechanism 8 and the second conveying mechanism 9 to move to the unloading position. During this process, the sensor 6 keeps detecting the material tray. If the material tray is not detected, a signal is sent to the central control system to control the machine to stop and to trigger the alarm device.

[0087] S6: The gripper 3, driven by the first drive member 2, moves to its positive limit, and the tray is released. The tray clamping mechanism of this application rises, driven by the second conveying mechanism 9, waiting to clamp the next tray.

[0088] The following is an explanation of some of the terms used in the above steps:

[0089] Loading position: The preset position where the material tray clamping mechanism of this application clamps the material tray; at this position, it can be ensured that the material tray clamping mechanism of this application can clamp the material tray safely and stably;

[0090] Positive limit: A pair of grippers 3 move away from the material tray along the first direction Y and reach the limit position; at this position, it can be ensured that when the material tray clamping mechanism of this application falls to the upper material position, the material tray is located between the grippers 3;

[0091] Preset distance: The preset distance between the second surface 12 and the upper surface of the material tray when the material tray clamping mechanism of this application clamps the material tray. Within a certain range of this distance, it can be ensured that the gripper 3 can clamp the material tray and the base 1 will not crush the material tray to be clamped;

[0092] Negative limit: The pair of grippers 3 move towards the material tray along the first direction Y and reach the limit position. At this position, it can be ensured that the grippers 3 clamp the material tray tightly;

[0093] Material release position: The preset position for releasing the material tray. This position ensures that the material tray is released at a height that prevents it from falling and damaging the tray, while also allowing for seamless connection to subsequent processes.

[0094] It should be noted that, for ease of understanding, the above description of the process by which the material tray clamping mechanism of this application clamps the material tray has been numbered and listed. However, the above process does not imply that the material tray clamping mechanism of this application must strictly follow the described order when clamping the material tray. In practice, the order of each step can be configured according to actual needs, or some of the above steps can be combined, split, or deleted, or steps not mentioned above can be inserted.

[0095] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A material tray clamping mechanism, characterized in that, include Base; A first driving member is disposed on the base; The gripper includes a gripping main body and an extension, one end of the gripping main body is connected to the first driving member, and the extension is connected to the end of the gripping main body opposite to the first driving member; The first driving member is used to drive the gripper to move along a first direction of the base, so that the gripping main body grips the tray along the first direction and the extension grips the tray along the second direction respectively; The clamping main body includes a first clamping surface, the direction of the normal vector of the first clamping surface is parallel to the first direction; the first clamping surface is used to connect with the material tray to clamp the material tray along the first direction; The base includes a second surface, and the extension includes a second clamping surface and a third clamping surface. The second clamping surface is connected to the first clamping surface and the third clamping surface and is located between the first clamping surface and the third clamping surface. The first clamping surface and the third clamping surface are perpendicular to each other, and the second clamping surface is an inclined transition surface connecting the first clamping surface and the third clamping surface. The second clamping surface is used to generate a component force in a second direction toward the base through the normal vector of the second clamping surface coplanar with the first direction under the drive of the first driving member, so as to press the material tray against the second surface of the base, thereby clamping the material tray together with the second surface along the second direction. The third clamping surface is parallel to the second surface and located on the side of the tray away from the second surface along the second direction, so that the third clamping surface supports the tray in the second direction; The second direction intersects with the first direction.

2. The material tray clamping mechanism according to claim 1, characterized in that, The grippers are arranged in pairs and are symmetrically located on opposite sides of the base along the first direction; Each of the grippers is driven by an independent first drive element.

3. The material tray clamping mechanism according to claim 1, characterized in that, The base includes a first surface and a second surface along the first direction, the first driving member is disposed on the first surface, and the third clamping surface is parallel to the second surface and forms a clamping gap between the third surface and the second surface for clamping the tray. The tray clamping mechanism further includes a buffer member, which is located at the corner of the base near the gripper. The buffer member is at least partially located on the side of the second surface. The buffer member is used to contact the tray to buffer the clamping impact of the base on the tray.

4. The material tray clamping mechanism according to claim 1, characterized in that, The material tray clamping mechanism further includes a limiting structure, which is disposed on the base and is used to limit the position of the material tray in a third direction; The third direction intersects with both the first and second directions.

5. The material tray clamping mechanism according to claim 1, characterized in that, The material tray clamping mechanism also includes sensors, which are arranged in pairs at both ends of the base. The sensors are used to detect the clamping status of the material tray.

6. A material tray handling device, characterized in that, The tray handling equipment includes a frame, a first handling mechanism, a second handling mechanism, and a tray clamping mechanism as described in any one of claims 1 to 5. The first handling mechanism is disposed on the frame and can move relative to the frame in a third direction. The second handling mechanism is connected to the first handling mechanism and can move relative to the base in a second direction. The tray clamping mechanism is fixedly connected to the second handling mechanism so as to move in the second direction under the drive of the second handling mechanism and in a third direction under the drive of the first handling mechanism.

7. The material tray handling device according to claim 6, characterized in that, The frame includes a bracket and a mounting plate, the mounting plate being connected to the bracket; The first conveying mechanism includes a second driving member and a transmission assembly. The second driving member is disposed on the mounting plate, and the transmission assembly is connected to the second driving member so as to move along the third direction under the driving action of the second driving member. The second conveying mechanism includes a third driving member and a connecting member. The third driving member is connected to the transmission assembly. The tray clamping mechanism is connected to the third driving member through the connecting member. The third driving member is used to drive the tray clamping mechanism to move along the second direction.

8. The material tray handling device according to claim 7, characterized in that, The rack also includes a cable chain and a tray, the tray being disposed on the mounting plate and extending along the third direction, one end of the cable chain being connected to the third drive member, and the other end of the cable chain being connected to the tray, such that the cable chain is at least partially located on the tray.

9. The material tray handling device according to claim 7, characterized in that, The third driving component includes a fixed end, a sliding end, and an elastic component; The fixed end is connected to the transmission assembly, the sliding end is slidably connected to the fixed end, and the material tray clamping mechanism is connected to the sliding end so as to move relative to the fixed end in the second direction under the drive of the sliding end. The elastic element is connected between the sliding end and the fixed end, and the elastic element is used to limit the sliding stroke of the sliding end relative to the fixed end.

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