A rotating white light water-cooled adjustable aperture device

Abstract

This invention discloses a rotary white light water-cooled adjustable aperture device, characterized by comprising an absorber component and a driving mechanism. The absorber component includes an absorber having an aperture A and a straight light-transmitting aperture B. The left side wall inside the aperture A is processed into a second left-side inclined surface, a first left-side inclined surface, and a left-side micro-inclined surface that are stepped inward along the incident direction of the light beam. The right side wall inside the aperture A is processed into a right-side micro-inclined surface and a right-side inclined surface that are inclined outward. The bottom inside the aperture A is processed into a second bottom inclined surface, a first bottom inclined surface, and a bottom rear end inclined surface that are stepped inward. The top inside the aperture A is processed into a top front end inclined surface and a top rear end micro-inclined surface that are inclined inward, with the rear end portion of the top front end inclined surface opposite to the front end portion of the bottom rear end inclined surface. The driving mechanism is used to cause the absorber to rotate, thereby achieving adjustment of the light-transmitting aperture of the aperture A. This invention saves a significant amount of valuable space.

Description

Technical Field

[0001] This invention belongs to the field of synchrotron radiation technology and relates to a rotating white light water-cooled adjustable aperture device, which is applied to the beamline of a synchrotron radiation device and used in a high vacuum environment. Background Technology

[0002] my country is currently constructing its first fourth-generation High Energy Photon Source (HEPS), which has a storage ring energy of 6 GeV and a luminance of 1×10⁻⁶. 22 phs·s -1 ·mm -2 ·mrad -2 • (0.1%bw)⁻¹, emittance less than 60 pm·rad, high-performance beamline capacity of no less than 90, capable of providing X-rays with energies up to 300 ke V, and synchrotron radiation peak power density of 700~800 kW / mrad 2 This power density is equivalent to that of electron beam welding, easily cutting through various uncooled metals. Synchrotron radiation sources enable research in materials science, physics, chemistry, and life sciences, thus requiring different spot sizes to be modulated for different research needs. An aperture is a commonly used device for modulating the spot size. An aperture located before optical equipment such as white light mirrors, monochromators, and focusing lenses is usually called a white light water-cooled adjustable aperture. Its main function is to confine the synchrotron radiation beam spot projected from the light source to the required size to meet the receiving aperture requirements of downstream optical equipment and reduce the overall heat load of downstream optical equipment. White light adjustable apertures especially require water-cooled protection for the absorbing surface of the synchrotron radiation beam spot to prevent damage from excessive heat load. Optical equipment connected to the white light water-cooled adjustable aperture on the beamline needs to be located in an ultra-high vacuum environment to protect internal precision optical components such as mirrors, because the white light water-cooled adjustable aperture also needs to maintain an ultra-high vacuum environment. The most commonly used aperture type is the four-blade white light water-cooled adjustable aperture. Swissneutronics (Switzerland), Mirrotron (Hungary), and JJ X-Ray (Denmark) were the first companies to commercialize the four-blade white light water-cooled adjustable aperture. The four-blade white light water-cooled adjustable aperture consists of four blades, each independently adjustable, thus modulating the spot size. However, all four blades are located inside the vacuum cavity, resulting in a complex motion structure, a large lateral space occupied by the beamline, long processing cycles, high costs, and difficult equipment maintenance. The L-type white light water-cooled adjustable aperture is also a light-limiting device used for synchrotron X-ray radiation, greatly improving upon the problems of the four-blade white light water-cooled aperture. Its structure is as follows: Figure 1 As shown.

[0003] The L-shaped white light water-cooled adjustable aperture mainly consists of an upstream absorber body 1, a downstream absorber body 2, a welded bellows 3, a fixed support structure 4, a two-dimensional precision adjustment mechanism 5, and a coarse adjustment mechanism 6. The upstream absorber body 1, the fixed support structure 4, and the downstream absorber body 2 are connected by the welded bellows 3 and vacuum-sealed by a pair of knife-edge flanges pressing metal sealing gaskets. The two-dimensional precision adjustment mechanism 5 is installed below the main structure and is used to position and adjust the main structure, controlling the displacement of the absorber body to obtain different light transmission apertures. The coarse adjustment mechanism 6 is located at the bottom of the overall structure, and its function is to roughly position the entire device on the beamline.

[0004] like Figure 2 As shown, the upstream absorber body 1 mainly consists of an upstream absorber, a left blade, an upper blade, a target holder, and a support plate. The upstream absorber is integrally machined from chromium-zirconium-copper material. For ease of installation and fixation, the absorber is octagonal in shape, with blades machined on both ends to seal with upstream and downstream welded bellows flanges, creating a vacuum environment. A square hole is formed in the center of the absorber, with water-cooling channels on the upper and lower sides. The left and upper blades are installed above and to the left of the square hole, forming an "L"-shaped blade. A target holder is placed on the upper surface of the absorber for placing the target ball during alignment. The absorber is fixed to the support plate by brackets and bolts, facilitating the installation of the upstream absorber body 1 onto the two-dimensional precision adjustment mechanism.

[0005] like Figure 3 As shown, the downstream absorber body 2 mainly consists of a downstream absorber, a lower blade, a right blade, a target holder, and a support plate. Except for the different blade distribution positions, the structure of the downstream absorber body 2 is similar to that of the upstream absorber body 1. The blades of the downstream absorber are arranged on the lower and right sides of the opening, meaning the upstream and downstream absorbers respectively intercept light in two directions.

[0006] like Figure 4 As shown, the fixed support structure 4 mainly consists of a double-sided fixed flange, a fixing plate, a support structure, and a target seat. The function of this structure is to act as a fixed structure to isolate the lateral displacement of the bellows on both sides in different directions, preventing interference when the absorbers on both sides move. The double-sided fixed flange is made of 304 stainless steel, and both ends are also machined with sealing blades. It is fixed to the support structure below by the fixing plate.

[0007] like Figure 5 As shown, the two-dimensional precision adjustment mechanism 5 consists of an X-axis electric linear slide and a Z-axis electric lifting platform, which are used to control the precision movement of the absorber body in the X and Z directions, respectively.

[0008] Although the aforementioned L-shaped white light water-cooled adjustable aperture effectively shortens the lateral space occupied by the beamline, it increases the size of the device in the beam direction and has a large number of bellows, which is not conducive to obtaining and maintaining an ultra-high vacuum environment. Summary of the Invention

[0009] To address the problems existing in the prior art, the present invention aims to provide a rotary white light water-cooled adjustable aperture device. This white light water-cooled adjustable aperture is applied to the beamline of a synchrotron radiation facility for use in a high vacuum environment. The invention directly adjusts the absorber aperture through two-dimensional rotation and oscillation, saving significant valuable space, ensuring the acquisition of an ultra-high vacuum environment, and reducing costs. Furthermore, the invention achieves beam size conditioning under the high-energy, high-heat-load requirements of the HEPS fourth-generation light source using a single absorber, reducing the total heat load on downstream optical equipment and protecting it.

[0010] The technical solution of this invention is as follows:

[0011] A rotary white light water-cooled adjustable aperture device, characterized in that it includes an absorber component 11 and a drive mechanism 12;

[0012] The absorber component 11 includes an absorber 101, which has an aperture A and a direct light-passing hole B.

[0013] The left side wall inside the aperture A is processed into a second left inclined surface, a first left inclined surface, and a left micro-inclined surface that are inclined inward in a stepped manner along the incident direction of the light beam. The inclination angle of the second left inclined surface is greater than that of the first left inclined surface.

[0014] The right side wall inside the aperture A is processed into a right micro-inclined surface and a right inclined surface that are inclined outward along the incident direction of the light beam. The rear end portion of the right micro-inclined surface is parallel to the first left inclined surface.

[0015] The bottom of the aperture A is processed into a second bottom inclined surface, a first bottom inclined surface, and a bottom rear end inclined surface that are inclined inward in the direction of beam incident. The inclination angle of the second bottom inclined surface is greater than that of the first bottom inclined surface.

[0016] The top of the aperture A is processed into a top front inclined surface and a top rear micro-inclined surface that are inclined inward along the incident direction of the beam. The rear portion of the top front inclined surface is relatively parallel to the first bottom inclined surface.

[0017] The through-hole B is used to ensure that the synchrotron radiation beam line passes through during the dimming stage without irradiating the absorber component.

[0018] The driving mechanism 12 is used to cause the absorber in the absorber component 11 to rotate, thereby adjusting the light transmission aperture of the aperture A.

[0019] Furthermore, the absorber component 11 includes the absorber 101, an absorber welding upper cover plate 102, an absorber welding lower cover plate 103, an absorber welding left cover plate 104, an absorber welding right cover plate 105, a tungsten rod 106, a welded copper plug 107, a welded copper tube 108, a welded flange 109, a pipe joint 110, and a target holder 111; wherein, the absorber 101, the absorber welding upper cover plate 102, the absorber welding lower cover plate 103, the absorber welding left cover plate 104, and the absorber welding right cover plate 105 are connected by electron beam welding; the front and rear ends of the absorber 101 are respectively connected to the welded flange 109 by a welded copper tube 108; the absorber 101 has a second left inclined surface, a first left inclined surface, and a right inclined surface located on the aperture A. Mounting holes are machined at the front end, the rear end of the second bottom inclined surface, the rear end of the first bottom inclined surface, and the rear end of the top front inclined surface. A tungsten rod 106 is placed in each mounting hole for light control. A column is provided on the absorber 101 at a position matching the mounting hole. The column has a column hole. Small holes are provided on the absorber welding upper cover plate 102 and absorber welding left cover plate 104 at positions matching the mounting holes. The welding copper plug 107 is welded to the tungsten rod 106 through the small holes and column holes. The central axis of the tungsten rod 106 coincides with the central axis of the column hole. A pipe joint 110 is connected to the absorber welding upper cover plate 102 and absorber welding right cover plate 105 respectively. Target seats 111 are installed on the absorber 101 and absorber welding right cover plate 105 respectively.

[0020] Furthermore, the drive mechanism 12 includes a linear motor, a two-dimensional adjustment mechanism, a crossed roller bearing, a circular grating ruler, and a rotary encoder; the two-dimensional adjustment mechanism is used to adjust the coincidence between the center of the synchrotron radiation beamline and the center of the aperture A; the linear motor is used to adjust the center of the aperture A; the vertical axis of the aperture A, the bearing center of the crossed roller bearing, the circular grating ruler, and the vertical rotation axis center of the absorber 101 coincide; the rotary encoder and the horizontal rotation center axis of the absorber 101 coincide with the horizontal axis of the aperture A.

[0021] Furthermore, the drive mechanism 12 includes a two-dimensional adjustment mechanism 201, an attitude adjustment platform adapter plate 202, a crossed roller bearing 203, an adapter support plate 204, a circular grating ruler 205, a reading head 206, a reading head mounting adjustment plate 207, a dual reading head mounting bracket 208, a horizontal rotation mounting plate 209, a vertical right-side support frame adapter assembly 210, a vertical left-side support frame adapter assembly 211, a linear motor drive mechanism around the X-axis 212, a vertical limit switch 213, a vertical switch mounting base 214, a horizontal limit switch 215, a horizontal switch mounting base 216, a vertical preload constant force spring assembly 217, a linear motor bracket 218, a horizontal preload constant force spring assembly 219, and a linear motor drive mechanism around the Z-axis 22. 0; The attitude adjustment platform adapter plate 202 is fixed on the two-dimensional adjustment mechanism 201. The crossed roller bearing 203 includes an inner ring and an outer ring. The outer ring of the crossed roller bearing 203 is fixed on the attitude adjustment platform adapter plate 202. The adapter support plate 204 is fixed on the inner ring of the crossed roller bearing 203. The circular grating ruler 205 and the horizontal rotation mounting plate 209 are both fixed on the adapter support plate 204. The reading head 206 is fixed on the reading head mounting adjustment plate 207. The reading head mounting adjustment plate 207 is fixed on the dual reading head mounting bracket 208. The dual reading head mounting bracket 208, the horizontal limit switch 215, the horizontal switch mounting base 216, and the linear motor bracket 2 All 18 are fixed on the attitude adjustment platform adapter plate 202. The horizontal preload constant force spring assembly 219 and the Z-axis linear motor drive mechanism 220 are fixed on the linear motor bracket 218. The vertical right support frame adapter assembly 210, the vertical left support frame adapter assembly 211, the X-axis linear motor drive mechanism 212, the vertical switch mounting base 214, and the vertical preload constant force spring assembly 217 are all fixed on the horizontal rotation mounting plate 209. The vertical limit switch 213 is mounted on the vertical switch mounting base 214, and the horizontal limit switch 215 is mounted on the horizontal switch mounting base 216. When the linear motor shaft in the Z-axis linear motor drive mechanism 220 moves linearly, it drives the circular... The grating ruler 205, horizontal rotating mounting plate 209, vertical right support frame adapter assembly 210, vertical left support frame adapter assembly 211, X-axis linear motor drive mechanism 212, vertical limit switch 213, vertical switch mounting base 214, and absorber component 11 move around the Z-axis to adjust the aperture A in the horizontal direction. When the linear motor shaft in the X-axis linear motor drive mechanism 212 moves linearly, it drives the absorber component 11 to move around the X-axis, thereby adjusting the aperture A in the vertical direction. The horizontal rotation axis of the absorber 101 is defined as the X-axis, the vertical rotation axis of the absorber 101 is defined as the Z-axis, and the Y-axis is the beam center axis.

[0022] Furthermore, the two-dimensional adjustment mechanism 201 includes an X-axis electric linear slide 201a, a Z-axis electric lifting platform 201b, and a displacement platform adapter shim 201c, which are used to control the adjustment movement of the absorber component 11 in the X and Z directions, respectively.

[0023] Furthermore, the vertical right-side support frame adapter assembly 210 includes a vertical right-side support frame adapter plate 210a, a vertical center calibration shaft 210b, a vertical frame adapter plate 210c, a vertical frame connecting shaft 210d, a bearing 210e, a polytetrafluoroethylene gasket 210f, a bearing sleeve 210g, and a bearing retaining ring 210h; the vertical right-side support frame adapter plate 210a is fixed on the horizontal rotating mounting plate 209, the vertical frame adapter plate 210c is fixed together with the vertical frame connecting shaft 210d, the vertical frame adapter plate 210c is fixed on the absorber component 11, and the vertical frame connecting shaft 210d... One end is connected to the absorber component 11 by a tight fit. The bearing 210e and bearing sleeve 210g are both mounted on the vertical frame connecting shaft 210d, and the bearing 210e and bearing sleeve 210g are fixed by the bearing retaining ring 210h. The vertical center calibration shaft 210b is fixed to the other end of the vertical frame connecting shaft 210d by a tight fit. The vertical frame connecting shaft 210d is coaxial with the horizontal X-axis, and the position of the horizontal X-axis is determined by the vertical center calibration shaft 210b.

[0024] Furthermore, the vertical left-side support frame adapter assembly 211 includes a vertical left-side support frame adapter plate 211a, a rotary encoder 211b, a vertical frame adapter plate 210c, a vertical frame connecting shaft 210d, a bearing 210e, a polytetrafluoroethylene gasket 210f, a bearing sleeve 210g, and a bearing retaining ring 210h; the vertical left-side support frame adapter plate 211a is fixed on the horizontal rotating mounting plate 209, the vertical frame adapter plate 210c and the vertical frame connecting shaft 210d are fixed together by welding, the vertical frame adapter plate 210c is fixed on the absorber component 11, and the vertical frame connecting shaft 210d... One end is connected to the absorber component 11 by a tight fit; the bearing 210e and the bearing sleeve 210g are mounted on the vertical frame connecting shaft 210d, and the bearing 210e and the bearing sleeve 210g are fixed by the bearing retaining ring 210h. The other end of the vertical frame connecting shaft 210d is connected to the rotary encoder 211b; when the absorber component 11 rotates around the X-axis, feedback is provided by the rotary encoder 211b to ensure the accuracy of rotation.

[0025] Furthermore, the X-axis linear motor drive mechanism 212 includes a linear motor body 212a, a linear motor lead screw 212b, a lead screw end adapter 212c, a bearing shaft 212d, a small ball bearing 212e, a small bearing retaining ring 212f, a spring washer 212g, a flat washer 212h, a nut 212i, and a set screw 212j. The linear motor lead screw 212b performs linear motion within the linear motor body 212a. The lead screw end adapter 212c is fixed to the linear motor lead screw 212b by the set screw 212j. The bearing shaft 212d, the small ball bearing 212e, and the small bearing retaining ring 212f are fixed to the lead screw end adapter 212 by the spring washer 212g, the flat washer 212h, and the nut 212i. c; The small ball bearing 212e is in tangential contact with the absorber component 11. When the linear motor screw 212b moves linearly, it drives the absorber component 11 to rotate. When the linear motor screw 212b moves away from the cable of the linear motor body 212a, the light transmission of the aperture A in the absorber component 11 decreases. When the linear motor screw 212b moves closer to the cable of the linear motor body 212a, the light transmission of the aperture A in the absorber component 11 increases. When the absorber component 11 moves to the initial position, the light transmission of the aperture A returns to its initial state. The Z-axis linear motor drive mechanism 220 and the X-axis linear motor drive mechanism 212 have the same composition and connection method.

[0026] Furthermore, the vertical pre-tensioned constant force spring assembly 217 includes a first constant force spring 217a, a first constant force spring vertical mounting bracket 217b, a first locking screw 217c, a first flat washer 217d, and a first nut 217e; the first constant force spring 217a is fixed to the first constant force spring vertical mounting bracket 217b by the first locking screw 217c, the first flat washer 217d, and the first nut 217e; the circular hole on the first constant force spring 217a is fixed to the horizontal rotating mounting plate 209 by screws, and the first constant spring vertical mounting bracket 217b is fixed to the absorber component 11; when the light transmission of the aperture A changes from small to large, the aperture A returns to its initial position by the elasticity of the vertical pre-tensioned constant force spring assembly 217 and the weight of the absorber component 11.

[0027] Furthermore, the horizontal preload constant force spring assembly 219 includes a second constant force spring 219a, a second constant force spring horizontal mounting bracket 219b, a second screw 219c, a second flat washer 219d, and a second nut 219e; the second constant force spring 219a is fixed on the second constant force spring horizontal mounting bracket 219b by the second screw 219c, the second flat washer 219d, and the second nut 219e, and the second constant force spring horizontal mounting bracket 219b is mounted on the linear motor bracket 218; the circular hole on the second constant force spring 219a is fixed to the horizontal rotating mounting plate 209 by screws; when the light transmission of the aperture A changes from small to large, the elastic force of the horizontal preload constant force spring assembly 219 causes the aperture A to return to its initial position.

[0028] Furthermore, the angle between the second left inclined surface and the incident direction of the beam is 8°, the angle between the first left inclined surface and the incident direction of the beam is 3.6°, and the angle between the left micro-inclined surface and the incident direction of the beam is 0.5°; the angle between the right micro-inclined surface and the incident direction of the beam is 0.5°, and the angle between the right inclined surface and the incident direction of the beam is 3.6°; the angle between the second bottom inclined surface and the incident direction of the beam is 7°, the angle between the first bottom inclined surface and the incident direction of the beam is 1.8°, the angle between the bottom rear inclined surface and the incident direction of the beam is 3°, the angle between the top front inclined surface and the incident direction of the beam is 3°, and the angle between the top rear micro-inclined surface and the incident direction of the beam is 1.8°; the length of the second left inclined surface is 60mm, the length of the first left inclined surface is 95mm, and the length of the right micro-inclined surface is 205mm; the length of the second bottom inclined surface is 50mm, the length of the first bottom inclined surface is 80mm, and the length of the top front inclined surface is 230mm.

[0029] The rotary white light adjustable aperture device of the present invention mainly includes an absorber component and a driving mechanism. The driving mechanism can cause the absorber in the absorber component to rotate, thereby realizing the adjustment of the adjustable aperture diameter.

[0030] The absorber components include an absorber, a copper tube, a tungsten rod, a copper rod, a pipe joint, a target holder, and a flange. The main material of the absorber is a copper alloy with high hardness and excellent thermomechanical and thermophysical properties, such as chromium-zirconium copper or dispersed copper. The aperture A is adjusted by rotating the edges on the internal horizontal and vertical surfaces around the central axis. This aperture is machined using both wire EDM and electrical discharge machining processes, involving multiple angle changes. Another square hole B ensures that a larger beam line can pass through during the dimming stage without irradiating the absorber and generating high heat. This square hole is cut by wire EDM. In the initial position, the light transmittance of aperture A reaches its maximum set value, and the horizontal and vertical central axes intersect at a single point. In the horizontal rotating structure, the first adjustment is made to the left and right edges, at which point the central axis is centered on both edges. The aperture A is adjusted symmetrically about the synchrotron radiation beamline. The second adjustment is made to the left and right edges, ultimately achieving complete aperture closure. At this point, the horizontal rotating central axis is close to the edge of the exit aperture, resulting in asymmetry during closure. Similarly, in the vertical rotating structure, the first adjustment is made to the bottom and top edges, again with the central axis centered on both edges. The aperture is adjusted symmetrically about the synchrotron radiation beamline. The second adjustment is made to the bottom and top edges, ultimately achieving complete aperture closure. At this point, the vertical rotating central axis is close to the edges of the entrance and exit apertures, resulting in asymmetry during closure. The white light adjustable aperture-rotating structure allows adjustment of all four edges of the synchrotron radiation beamline using a single absorber, saving space and cost. Furthermore, tungsten rods are installed at the edges to reduce haloing at the beam edge, resulting in a clearer beam.

[0031] The drive mechanism includes a linear motor, a two-dimensional adjustment mechanism, crossed roller bearings, a circular grating ruler, and a rotary encoder. The two-dimensional adjustment mechanism ensures the coincidence of the center of the synchrotron radiation beamline and the center of the aperture card; the linear motor adjusts the amount of light transmitted through the rotating absorber, with the bearing center and the circular grating ruler center coinciding with the center of the horizontal rotation axis of the absorber, ensuring the accuracy of the horizontal rotation aperture adjustment; the central axis of the rotary encoder coincides with the vertical rotation axis, ensuring the accuracy of the vertical rotation aperture adjustment.

[0032] This invention has the following characteristics:

[0033] 1) Without damaging the absorber, the aperture can be processed using wire EDM and electrical discharge machining.

[0034] 2) The small ball bearing installed at the end of the linear motor drive mechanism can compensate for the changes in angle and displacement of the absorber component during rotation;

[0035] 3) The constant force spring ensures that the rotating parts of the absorber can return to their original position without causing changes in force, thus ensuring that the force always moves within the range that the motor can withstand.

[0036] The advantages of this invention are as follows:

[0037] First, the absorber material in this invention is dispersed copper. The aperture can be processed by slow wire cutting and electrical discharge machining without damage, which can greatly reduce the cost of use. In addition, cooling water pipes are processed inside the absorber, so the absorber will not be damaged when it is under high heat.

[0038] Second: The changes in angle and displacement of the absorber components during rotation can be compensated for by a small ball bearing, ensuring a simple and compact structure.

[0039] Third: The constant force spring ensures that the rotating parts of the absorber can return to their original position without causing changes in force, thus ensuring that the force always moves within the range that the motor can withstand. Attached Figure Description

[0040] Figure 1 Structural diagram of an L-shaped white light water-cooled adjustable aperture device;

[0041] Figure 2 Schematic diagram of an L-shaped white light water-cooled adjustable upstream absorber structure;

[0042] Figure 3 Schematic diagram of an L-shaped white light water-cooled adjustable downstream absorber structure;

[0043] Figure 4 Schematic diagram of L-shaped white light water-cooled adjustable fixed support structure;

[0044] Figure 5 A schematic diagram of an L-shaped white light water-cooled adjustable two-dimensional precision adjustment mechanism;

[0045] Figure 6 This is a structural diagram of a rotating white light water-cooled adjustable aperture device;

[0046] Figure 7 This is a three-dimensional schematic diagram of the absorber component structure of the present invention;

[0047] Figure 8 This is a front view of the absorber component structure of the present invention;

[0048] Figure 9 This is a horizontal cross-sectional view of the absorber component structure of the present invention;

[0049] Figure 10 This is a vertical sectional view of the absorber component structure of the present invention;

[0050] Figure 11 This is a front view of the drive mechanism structure of the present invention;

[0051] Figure 12This is a left view of the drive mechanism structure of the present invention;

[0052] Figure 13 This is a top view of the drive mechanism structure of the present invention;

[0053] Figure 14 This is a schematic diagram of the two-dimensional adjustment mechanism of the present invention;

[0054] Figure 15 This is a schematic diagram of the vertical right-side support frame adapter assembly of the present invention;

[0055] Figure 16 This is a partial cross-sectional view of the vertical right-side support frame adapter assembly of the present invention;

[0056] Figure 17 This is a schematic diagram of the vertical left-side support frame adapter assembly of the present invention;

[0057] Figure 18 This is a partial cross-sectional view of the vertical left-side support frame adapter assembly of the present invention;

[0058] Figure 19 This is a schematic diagram of the linear motor drive mechanism around the X-axis described in this invention;

[0059] Figure 20 This is a partially enlarged schematic diagram of the X-axis linear motor drive mechanism described in this invention;

[0060] Figure 21 This is a schematic diagram of the vertical preload constant force spring assembly of the present invention;

[0061] Figure 22 This is a schematic diagram of the horizontal preload constant force spring assembly of the present invention. Detailed Implementation

[0062] The present invention will now be described in further detail with reference to the accompanying drawings. The examples given are only for explaining the present invention and are not intended to limit the scope of the present invention.

[0063] like Figure 6 The rotating white light water-cooled adjustable aperture device shown is an example of the present invention. It mainly includes an absorber component 11 and a drive mechanism 12, which are connected by screws.

[0064] like Figure 7 , Figure 8 , Figure 9 and Figure 10As shown, the absorber component 11 mainly consists of an absorber 101, an absorber welded upper cover plate 102, an absorber welded lower cover plate 103, an absorber welded left cover plate 104, an absorber welded right cover plate 105, a tungsten rod 106, a welded copper plug 107, a welded copper pipe 108, a welded flange 109, a pipe joint 110, and a target seat 111. First, the absorber 101, the upper cover plate 102, the lower cover plate 103, the left cover plate 104, and the right cover plate 105 are connected by electron beam welding. Next, the copper tube 108 and the flange 109 are connected by brazing. The two welded components are then connected to the absorber 101 by electron beam welding. The absorber 101 has mounting holes, into which a tungsten rod 106 is placed, with a clearance fit between the mounting hole and the tungsten rod 106. Then, copper plugs 107 are placed above the tungsten rod 106, and the six copper plugs 107 are electron beam welded to the columns on the absorber 101. Two pipe joints 110 are threaded onto the upper cover plate 102 and the right cover plate 105, respectively. Seven target holders 111 are installed onto the absorber 101 and the right cover plate 105 by tight fit. Finally, the beam is controlled by a tungsten rod 106. The horizontal rotation axis is defined as the X-axis, the vertical rotation axis as the Z-axis, and the Y-axis as the beam center axis.

[0065] like Figure 11 , Figure 12 and Figure 13As shown, the drive mechanism 12 mainly consists of a two-dimensional adjustment mechanism 201, an attitude adjustment platform adapter plate 202, a cross roller bearing 203, an adapter support plate 204, a circular grating ruler 205, a reading head 206, a reading head mounting adjustment plate 207, a dual reading head mounting bracket 208, a horizontal rotation mounting plate 209, a vertical right support frame adapter assembly 210, a vertical left support frame adapter assembly 211, a linear motor drive mechanism around the X-axis 212, a vertical limit switch 213, a vertical switch mounting base 214, a horizontal limit switch 215, a horizontal switch mounting base 216, a vertical preload constant force spring assembly 217, a linear motor bracket 218, a horizontal preload constant force spring assembly 219, and a linear motor drive mechanism around the Z-axis 220. The attitude adjustment platform adapter plate 202 is fixed to the two-dimensional adjustment mechanism 201 by screws. The crossed roller bearing 203 consists of an inner ring and an outer ring. The outer ring of the crossed roller bearing 203 is fixed to the attitude adjustment platform adapter plate 202 by screws. The adapter support plate 204 is fixed to the inner ring of the crossed roller bearing 203. The circular grating ruler 205 and the horizontal rotation mounting plate 209 are both fixed to the adapter support plate 204. The reading head 206 is fixed to the reading head mounting adjustment plate 207. The head mounting adjustment plate 207 is fixed on the dual reading head mounting bracket 208. The dual reading head mounting bracket 208, horizontal limit switch 215, horizontal switch mounting base 216, and linear motor bracket 218 are all fixed on the attitude adjustment table adapter plate 202. The horizontal preload constant force spring assembly 219 and the Z-axis linear motor drive mechanism 220 are fixed on the linear motor bracket 218. The vertical right support frame adapter assembly 210, the vertical left support frame adapter assembly 211, and the X-axis linear motor drive mechanism 220 are fixed on the linear motor bracket 218. The Z-axis linear motor drive mechanism 212, the vertical switch mounting base 214, and the vertical pre-tension constant force spring assembly 217 are all fixed on the horizontal rotating mounting plate 209. The vertical limit switch 213 is mounted on the vertical switch mounting base 214, and the horizontal limit switch 215 is mounted on the horizontal switch mounting base 216. When the linear motor shaft in the Z-axis linear motor drive mechanism 220 moves linearly, the circular grating ruler 205, the horizontal rotating mounting plate 209, the vertical right support frame adapter assembly 210, the vertical left support frame adapter assembly 211, the X-axis linear motor drive mechanism 212, the vertical limit switch 213, the vertical switch mounting base 214, and the absorber component 11 can move around the Z-axis, thereby achieving adjustment of the aperture A in the horizontal direction. When the linear motor shaft in the X-axis linear motor drive mechanism 212 moves linearly, the absorber component 11 can move around the X-axis, thereby achieving adjustment of the aperture A in the vertical direction.

[0066] like Figure 14 As shown, the two-dimensional adjustment mechanism 201 consists of an X-axis electric linear slide 201a, a Z-axis electric lifting platform 201b, and a displacement platform transition pad 201c, which are used to control the adjustment movement of the absorber component 11 in the X and Z directions, respectively.

[0067] like Figure 15 and Figure 16 As shown, the vertical right support frame adapter assembly 210 consists of a vertical right support frame adapter plate 210a, a vertical center calibration shaft 210b, a vertical frame adapter plate 210c, a vertical frame connecting shaft 210d, a bearing 210e, a polytetrafluoroethylene gasket 210f, a bearing sleeve 210g, and a bearing retaining ring 210h. The vertical right-side support frame adapter plate 210a is fixed to the horizontal rotating mounting plate 209 with screws. The vertical frame adapter plate 210c and the vertical frame connecting shaft 210d are fixed together by welding. The vertical frame adapter plate 210c is fixed to the absorber component 11 with screws. One end of the vertical frame connecting shaft 210d is connected to the absorber component 11 by a tight fit. The bearing 210e and the bearing sleeve 210g are installed on the vertical frame connecting shaft 210d and fixed by the bearing retaining ring 210h. The vertical center calibration shaft 210b is fixed to the other end of the vertical frame connecting shaft 210d by a tight fit. The vertical frame connecting shaft 210d is coaxial with the horizontal X-axis, and the position of the horizontal X-axis is determined by the vertical center calibration shaft 210b.

[0068] like Figure 17 and Figure 18 As shown, the vertical left support frame adapter assembly 211 consists of a vertical left support frame adapter plate 211a, a rotary encoder 211b, a vertical frame adapter plate 210c, a vertical frame connecting shaft 210d, a bearing 210e, a polytetrafluoroethylene gasket 210f, a bearing sleeve 210g, and a bearing retaining ring 210h. The vertical left support frame adapter plate 211a is fixed to the horizontal rotating mounting plate 209 with screws. The vertical frame adapter plate 210c and the vertical frame connecting shaft 210d are fixed together by welding. The vertical frame adapter plate 210c is fixed to the absorber component 11 with screws. One end of the vertical frame connecting shaft 210d is connected to the absorber component 11 by a tight fit. The bearing 210e and the bearing sleeve 210g are installed on the vertical frame connecting shaft 210d and fixed by the bearing retaining ring 210h. The other end of the vertical frame connecting shaft 210d is connected to the rotary encoder 211b. When the absorber component 11 rotates around the X-axis, feedback can be obtained through the rotary encoder 211b to ensure the accuracy of rotation.

[0069] like Figure 19 and Figure 20As shown, the X-axis linear motor drive mechanism 212 consists of a linear motor body 212a, a linear motor lead screw 212b, a lead screw end adapter 212c, a bearing shaft 212d, a small ball bearing 212e, a small bearing retaining ring 212f, a spring washer 212g, a flat washer 212h, a nut 212i, and a set screw 212j. The linear motor lead screw 212b moves linearly within the linear motor body 212a. The lead screw end adapter 212c is fixed to the linear motor lead screw 212b by the set screw 212j. The bearing shaft 212d, the small ball bearing 212e, and the small bearing retaining ring 212f are fixed to the lead screw end adapter 212c by the spring washer 212g, the flat washer 212h, and the nut 212i. The small ball bearing 212e is in tangential contact with the absorber component 11. When the linear motor screw 212b moves linearly, it can drive the absorber component 11 to rotate. When the linear motor screw 212b moves away from the cable of the linear motor body 212a, the light transmission of the light-transmitting aperture A in the absorber component 11 decreases. When the linear motor screw 212b moves closer to the cable of the linear motor body 212a, the light-transmitting aperture in the absorber component 11 increases. When the absorber component 11 moves to its initial position, it is in the state where the aperture A is set to have the maximum light transmission. The composition and connection method of the linear motor drive mechanism 220 around the Z-axis and the linear motor drive mechanism 212 around the X-axis are exactly the same.

[0070] like Figure 21 As shown, the vertical pre-tensioned constant force spring assembly 217 consists of a constant force spring 217a, a vertical mounting bracket 217b, a screw 217c, a flat washer 217d, and a nut 217e. The constant force spring 217a is fixed to the vertical mounting bracket 217b by the screw 217c, flat washer 217d, and nut 217e. The circular hole on the constant force spring 217a is ultimately fixed to the horizontal rotating mounting plate 209 by screws, and the vertical mounting bracket 217b is fixed to the absorber component 11. When the absorber aperture changes from small to large, the aperture needs to return to its initial position through the elasticity of the vertical pre-tensioned constant force spring assembly 217 and the weight of the absorber component 11.

[0071] like Figure 22As shown, the horizontal preload constant force spring assembly 219 consists of a constant force spring 219a, a constant force spring horizontal mounting bracket 219b, a plug screw 219c, a flat washer 219d, and a nut 219e. The constant force spring 219a is fixed to the constant force spring horizontal mounting bracket 219b by the plug screw 219c, flat washer 219d, and nut 219e. The constant force spring horizontal mounting bracket 219b is mounted on the linear motor bracket 218. The circular hole on the constant force spring 219a is ultimately fixed to the horizontal rotating mounting plate 209 by screws. When the absorber orifice diameter increases, the elastic force of the horizontal preload constant force spring assembly 219 is needed to return the orifice diameter to its initial position.

[0072] This device can also be made into a four-blade or L-shaped structure to achieve aperture adjustment. However, compared with the structure of this invention, the four-blade adjustable aperture structure is more complex, more expensive, and occupies more space. Although the L-shaped aperture effectively shortens the lateral space occupied by the beamline, it increases the size of the device in the beam direction. For apertures with large opening range requirements, these two types of apertures can be purchased.

[0073] Although specific embodiments of the invention have been disclosed for illustrative purposes to aid in understanding and implementing the invention, those skilled in the art will understand that various substitutions, variations, and modifications are possible without departing from the spirit and scope of the invention and the appended claims. Therefore, the invention should not be limited to the content disclosed in the preferred embodiments, and the scope of protection claimed by the invention is defined by the claims.

Claims

1. A rotary white light water-cooled adjustable aperture device, characterized in that, It includes an absorber component (11) and a drive mechanism (12). The absorber component (11) includes an absorber (101), which has an aperture A and a through hole B. The left side wall inside the aperture A is processed into a second left inclined surface, a first left inclined surface, and a left micro-inclined surface that are inclined inward in a stepped manner along the incident direction of the light beam. The inclination angle of the second left inclined surface is greater than that of the first left inclined surface. The right side wall inside the aperture A is processed into a right micro-inclined surface and a right inclined surface that are inclined outward along the incident direction of the light beam. The rear end portion of the right micro-inclined surface is parallel to the first left inclined surface. The bottom of the aperture A is processed into a second bottom inclined surface, a first bottom inclined surface, and a bottom rear end inclined surface that are inclined inward in the direction of beam incident. The inclination angle of the second bottom inclined surface is greater than that of the first bottom inclined surface. The top of the aperture A is processed into a top front inclined surface and a top rear micro-inclined surface that are inclined inward along the incident direction of the beam. The rear portion of the top front inclined surface is relatively parallel to the first bottom inclined surface. The through-hole B is used to ensure that the synchrotron radiation beam line passes through during the dimming stage without irradiating the absorber component. The drive mechanism (12) is used to make the absorber in the absorber component (11) rotate, thereby realizing the adjustment of the light aperture of the aperture A.

2. The rotary white light water-cooled adjustable aperture device according to claim 1, characterized in that, The absorber component (11) includes the absorber (101), an absorber welding upper cover plate (102), an absorber welding lower cover plate (103), an absorber welding left cover plate (104), an absorber welding right cover plate (105), a tungsten rod (106), a welding copper plug (107), a welding copper tube (108), a welding flange (109), a pipe joint (110), and a target holder (111); wherein, the absorber (101), the absorber welding upper cover plate (102), the absorber welding lower cover plate (103), the absorber welding left cover plate (104), and the absorber welding right cover plate (105) are connected by electron beam welding; the front and rear ends of the absorber (101) are respectively connected to the welding flange (109) through a welding copper tube (108); the rear end of the second left inclined surface and the rear end of the first left inclined surface of the absorber (101) located on the aperture A are... Mounting holes are machined at the front end of the right inclined surface, the rear end of the second bottom inclined surface, the rear end of the first bottom inclined surface, and the rear end of the top front inclined surface. A tungsten rod (106) is placed in each mounting hole for light control. A column is provided on the absorber (101) at the position matching the mounting hole. The column has a column hole. Small holes are provided on the absorber welding top cover plate (102) and absorber welding left cover plate (104) at the position matching the mounting hole. The welding copper plug (107) is welded to the tungsten rod (106) through the small hole and the column hole. The central axis of the tungsten rod (106) coincides with the central axis of the column hole. A pipe joint (110) is connected to the absorber welding top cover plate (102) and absorber welding right cover plate (105). Target seats (111) are installed on the absorber (101) and absorber welding right cover plate (105).

3. The rotary white light water-cooled adjustable aperture device according to claim 1 or 2, characterized in that, The drive mechanism (12) includes a linear motor, a two-dimensional adjustment mechanism, a cross roller bearing, a circular grating ruler, and a rotary encoder; the two-dimensional adjustment mechanism is used to adjust the coincidence of the center of the synchrotron radiation beamline with the center of the aperture A; the linear motor is used to adjust the center of the aperture A; the vertical axis of the aperture A, the bearing center of the cross roller bearing, the circular grating ruler, and the vertical rotation axis center of the absorber (101) coincide; the horizontal rotation center axis of the rotary encoder and the absorber (101) coincides with the horizontal axis of the aperture A.

4. The rotary white light water-cooled adjustable aperture device according to claim 3, characterized in that, The drive mechanism (12) includes a two-dimensional adjustment mechanism (201), an attitude adjustment platform adapter plate (202), a cross roller bearing (203), an adapter support plate (204), a circular grating ruler (205), a reading head (206), a reading head mounting adjustment plate (207), a dual reading head mounting bracket (208), a horizontal rotation mounting plate (209), a vertical right support frame adapter assembly (210), a vertical left support frame adapter assembly (211), a linear motor drive mechanism around the X-axis (212), a vertical limit switch (213), a vertical switch mounting base (214), a horizontal limit switch (215), a horizontal switch mounting base (216), a vertical preload constant force spring assembly (217), and a linear motor support. The system comprises a frame (218), a horizontal preload constant force spring assembly (219), and a linear motor drive mechanism (220) around the Z-axis; the attitude adjustment platform adapter plate (202) is fixed on the two-dimensional adjustment mechanism (201); the cross roller bearing (203) includes an inner ring and an outer ring; the outer ring of the cross roller bearing (203) is fixed on the attitude adjustment platform adapter plate (202); the adapter support plate (204) is fixed on the inner ring of the cross roller bearing (203); the circular grating ruler (205) and the horizontal rotating mounting plate (209) are both fixed on the adapter support plate (204); the reading head (206) is fixed on the reading head mounting adjustment plate (207); and the reading head mounting adjustment plate... (207) Fixed on the dual reading head mounting bracket (208), the dual reading head mounting bracket (208), the horizontal limit switch (215), the horizontal switch mounting base (216), and the linear motor bracket (218) are all fixed on the attitude adjustment table adapter plate (202). The horizontal preload constant force spring assembly (219) and the linear motor drive mechanism around the Z-axis (220) are fixed on the linear motor bracket (218). The vertical right support frame adapter assembly (210), the vertical left support frame adapter assembly (211), the linear motor drive mechanism around the X-axis (212), the vertical switch mounting base (214), and the vertical preload constant force spring assembly (217) are all fixed on the horizontal rotation mounting plate (202). 9) The vertical limit switch (213) is mounted on the vertical switch mounting base (214), and the horizontal limit switch (215) is mounted on the horizontal switch mounting base (216). When the linear motor shaft in the Z-axis linear motor drive mechanism (220) moves linearly, it drives the circular grating ruler (205), the horizontal rotating mounting plate (209), the vertical right support frame adapter assembly (210), the vertical left support frame adapter assembly (211), the X-axis linear motor drive mechanism (212), the vertical limit switch (213), the vertical switch mounting base (214), and the absorber component (11) to move around the Z-axis, thereby realizing the adjustment of the aperture A in the horizontal direction.When the linear motor shaft in the X-axis linear motor drive mechanism (212) moves linearly, it drives the absorber component (11) to move around the X-axis, thereby adjusting the aperture A in the vertical direction; wherein, the horizontal rotation axis of the absorber (101) is defined as the X-axis, the vertical rotation axis of the absorber (101) is defined as the Z-axis, and the Y-axis is the beam center axis.

5. The rotary white light water-cooled adjustable aperture device according to claim 4, characterized in that, The two-dimensional adjustment mechanism (201) includes an X-axis electric linear slide (201a), a Z-axis electric lifting platform (201b), and a displacement platform adapter shim (201c), which are used to control the adjustment movement of the absorber component (11) in the X and Z directions, respectively.

6. The rotary white light water-cooled adjustable aperture device according to claim 4, characterized in that, The vertical right-side support frame adapter assembly (210) includes a vertical right-side support frame adapter plate (210a), a vertical center calibration shaft (210b), a vertical frame adapter plate (210c), a vertical frame connecting shaft (210d), a bearing (210e), a polytetrafluoroethylene gasket (210f), a bearing sleeve (210g), and a bearing retaining ring (210h). The vertical right-side support frame adapter plate (210a) is fixed on the horizontal rotating mounting plate (209), the vertical frame adapter plate (210c) is fixed together with the vertical frame connecting shaft (210d), the vertical frame adapter plate (210c) is fixed on the absorber component (11), and the vertical frame connecting shaft (210d)... One end is connected to the absorber component (11) by a tight fit. The bearing (210e) and bearing sleeve (210g) are both mounted on the vertical frame connecting shaft (210d). The bearing (210e) and bearing sleeve (210g) are fixed by the bearing retaining ring (210h). The vertical center calibration shaft (210b) is fixed to the other end of the vertical frame connecting shaft (210d) by a tight fit. The vertical frame connecting shaft (210d) is coaxial with the horizontal X-axis. The position of the horizontal X-axis is determined by the vertical center calibration shaft (210b).

7. The rotary white light water-cooled adjustable aperture device according to claim 4, characterized in that, The vertical left support frame adapter assembly (211) includes a vertical left support frame adapter plate (211a), a rotary encoder (211b), a vertical frame adapter plate (210c), a vertical frame connecting shaft (210d), a bearing (210e), a polytetrafluoroethylene gasket (210f), a bearing sleeve (210g), and a bearing retaining ring (210h). The vertical left support frame adapter plate (211a) is fixed on the horizontal rotating mounting plate (209), and the vertical frame adapter plate (210c) and the vertical frame connecting shaft (210d) are fixed together by welding. The vertical frame adapter plate (210c) is fixed on the absorber component (11), and the vertical frame connecting shaft (210d)... One end is connected to the absorber component (11) by a tight fit; the bearing (210e) and the bearing sleeve (210g) are mounted on the vertical frame connecting shaft (210d), and the bearing (210e) and the bearing sleeve (210g) are fixed by the bearing retaining ring (210h). The other end of the vertical frame connecting shaft (210d) is connected to the rotary encoder (211b). When the absorber component (11) rotates around the X-axis, feedback is provided by the rotary encoder (211b) to ensure the accuracy of the rotation.

8. The rotary white light water-cooled adjustable aperture device according to claim 4, characterized in that, The X-axis linear motor drive mechanism (212) includes a linear motor body (212a), a linear motor lead screw (212b), a lead screw end adapter (212c), a bearing shaft (212d), a small ball bearing (212e), a small bearing retaining ring (212f), a spring washer (212g), a flat washer (212h), a nut (212i), and a set screw (212j). The linear motor lead screw (212b) performs linear motion within the linear motor body (212a). The lead screw end adapter (212c) is fixed to the linear motor lead screw (212b) by the set screw (212j). The bearing shaft (212d), the small ball bearing (212e), and the small bearing retaining ring (212f) are fixed to the lead screw end adapter by the spring washer (212g), the flat washer (212h), and the nut (212i). On the connector (212c); a small ball bearing (212e) is in tangential contact with the absorber component (11). When the linear motor screw (212b) moves linearly, it drives the absorber component (11) to rotate. When the linear motor screw (212b) moves away from the cable of the linear motor body (212a), the light transmission of the aperture A in the absorber component (11) decreases. When the linear motor screw (212b) moves closer to the cable of the linear motor body (212a), the light transmission of the aperture A in the absorber component (11) increases. When the absorber component (11) moves to the initial position, the light transmission of the aperture A returns to the initial state. The composition and connection method of the linear motor drive mechanism (220) around the Z-axis and the linear motor drive mechanism (212) around the X-axis are the same.

9. The rotary white light water-cooled adjustable aperture device according to claim 4, characterized in that, The vertical pre-tensioned constant force spring assembly (217) includes a first constant force spring (217a), a first constant force spring vertical mounting bracket (217b), a first screw (217c), a first flat washer (217d), and a first nut (217e). The first constant force spring (217a) is fixed to the first constant force spring vertical mounting bracket (217b) by the first screw (217c), the first flat washer (217d), and the first nut (217e). The round hole on the first constant force spring (217a) is fixed to the horizontal rotating mounting plate (209) by screws, and the first constant force spring vertical mounting bracket (217b) is fixed to the absorber component (11). When the light transmission of the aperture A changes from small to large, the aperture A returns to its initial position by the elasticity of the vertical pre-tensioned constant force spring assembly (217) and the gravity of the absorber component (11).

10. The rotary white light water-cooled adjustable aperture device according to claim 4, characterized in that, The horizontal preload constant force spring assembly (219) includes a second constant force spring (219a), a second constant force spring horizontal mounting bracket (219b), a second screw (219c), a second flat washer (219d), and a second nut (219e). The second constant force spring (219a) is fixed on the second constant force spring horizontal mounting bracket (219b) by the second screw (219c), the second flat washer (219d), and the second nut (219e). The second constant force spring horizontal mounting bracket (219b) is mounted on the linear motor bracket (218). The round hole on the second constant force spring (219a) is fixed on the horizontal rotating mounting plate (209) by screws. When the light transmission of the aperture A changes from small to large, the aperture A returns to its initial position by the elastic force of the horizontal preload constant force spring assembly (219).

11. The rotary white light water-cooled adjustable aperture device according to claim 1, characterized in that, The angle between the second left inclined surface and the incident direction of the beam is 8°, the angle between the first left inclined surface and the incident direction of the beam is 3.6°, and the angle between the left micro-inclined surface and the incident direction of the beam is 0.5°; the angle between the right micro-inclined surface and the incident direction of the beam is 0.5°, and the angle between the right inclined surface and the incident direction of the beam is 3.6°; the angle between the second bottom inclined surface and the incident direction of the beam is 7°, the angle between the first bottom inclined surface and the incident direction of the beam is 1.8°, the angle between the bottom rear inclined surface and the incident direction of the beam is 3°, the angle between the top front inclined surface and the incident direction of the beam is 3°, and the angle between the top rear micro-inclined surface and the incident direction of the beam is 1.8°; the length of the second left inclined surface is 60mm, the length of the first left inclined surface is 95mm, and the length of the right micro-inclined surface is 205mm; the length of the second bottom inclined surface is 50mm, the length of the first bottom inclined surface is 80mm, and the length of the top front inclined surface is 230mm.

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