On-orbit automatic elimination device and method for electrostatic effect of inertial sensor

Abstract

The application discloses an on-orbit automatic elimination device and method of electrostatic effect of an inertial sensor, and belongs to the field of precision measurement, and the method comprises the following steps: placing parallel electrode plates fixed to a grounded frame on both sides of a test mass, wherein the parallel electrode plates are parallel to the surface of the test mass and have the same distance from the test mass; applying a control voltage on the parallel electrode plates by using an electrostatic actuator, and controlling the test mass at the central position of the electrode plates and the frame by the electrostatic force generated between the parallel electrode plates and the test mass; and calculating a compensation voltage according to the control voltage and the electric charge on the test mass, and applying the compensation voltage on the electrode plates to automatically eliminate the electrostatic effect on the test mass. The application can continue to detect a target signal while eliminating the electrostatic force effect on the test mass, and has a wide application prospect.

Description

Technical Field

[0001] This invention belongs to the field of precision measurement, and more specifically, relates to an on-orbit automatic elimination device and method for electrostatic effects of inertial sensors. Background Technology

[0002] In the field of precision measurement, it is usually necessary to insulate the sensing element to isolate it from external interference such as electrical and thermal noise. For example, in the LISA space gravitational wave detection project led by the European Space Agency, the sensing probe of the inertial sensor consists of a test mass and surrounding electrodes. The test mass is an isolated conductor with no electrical connection to surrounding objects. Free charges in space will adhere to the test mass, leading to charge accumulation. Although the amount of accumulated charge is very small, the electrostatic force generated by the accumulated charge can interfere with the instrument's measurement results. Therefore, it is necessary to suppress the electrostatic effect on the test mass.

[0003] Taking the charge management scheme used in LISA Pathfinder as an example, as the charge on the inspection quality accumulates, the inspection quality needs to be periodically charged. The charge control process uses ultraviolet discharge to change the absolute charge on the inspection quality in order to suppress electrostatic interference introduced by the charge. However, the noise generated by the ultraviolet discharge process is too large, making it impossible to measure weak signals. Therefore, frequent charge control will frequently interrupt the measurement of weak signals, reducing the measurement efficiency. Summary of the Invention

[0004] In view of the shortcomings of the prior art, the purpose of this invention is to provide an on-orbit automatic elimination method and technology for electrostatic effects of inertial sensors, aiming to solve the interference problem caused by the frequent interruption of target signal detection when controlling the charge of quality inspection.

[0005] This invention provides an on-orbit automatic elimination device for electrostatic effects of inertial sensors, comprising: an inspection mass, a first parallel electrode plate, a second parallel electrode plate, an electrode plate frame, a displacement measurement module, a controller module, a first electrostatic actuator, a second electrostatic actuator, a charge measurement module, a first adder, a second adder, a first voltage compensation module, and a second voltage compensation module; the first and second parallel electrode plates are respectively disposed on both sides of the inspection mass, and both the first and second parallel electrode plates are fixedly connected to the electrode plate frame; the electrode plate frame is grounded; the first input terminal of the displacement measurement module is connected to the first parallel electrode plate, and the second input terminal is connected to the second parallel electrode plate, for measuring the displacement of the inspection mass; the input terminal of the controller module is connected to the output of the displacement measurement module, for calculating the control voltage for controlling the position of the inspection mass; the input of the first electrostatic actuator is connected to the first output terminal of the controller module, for applying a first control voltage; the input of the second electrostatic actuator is connected to the second output terminal of the controller module, for applying a second control voltage; the input terminal of the charge measurement module is connected to the output terminal of the displacement measurement module, for... The system calculates the charge on the inspection mass based on the displacement signal. The input of the first voltage compensation module is connected to the first output of the charge measurement module, used to calculate the first compensation voltage of the first parallel plate. The input of the second voltage compensation module is connected to the second output of the charge measurement module, used to calculate the second compensation voltage of the second parallel plate. The first input of the first adder is connected to the output of the first electrostatic actuator, and the second input of the first adder is connected to the output of the first voltage compensation module, used to add the first control voltage and the first compensation voltage applied by the first electrostatic actuator to the first parallel plate, reducing the potential difference between the first parallel plate and the inspection mass, effectively suppressing electrostatic interference on the inspection mass. The first input of the second adder is connected to the output of the second electrostatic actuator, and the second input of the second adder is connected to the output of the second voltage compensation module, used to add the second control voltage and the second compensation voltage applied by the second electrostatic actuator to the second parallel plate, reducing the potential difference between the second parallel plate and the inspection mass, effectively suppressing electrostatic interference on the inspection mass.

[0006] Furthermore, both the first parallel plate and the second parallel plate are parallel to the conductor surface of the inspection mass, and the distance from the first parallel plate to the inspection mass is equal to the distance from the second parallel plate to the inspection mass.

[0007] During operation, the first and second electrostatic actuators apply control voltages to the first and second parallel plates, generating electrostatic forces between the inspection mass and the first and second parallel plates, thus controlling the inspection mass to be centered. At this time, the displacement measurement module measures the displacement of the inspection mass, and the charge measurement module calculates the charge on the inspection mass based on the displacement signal. The first and second voltage compensation modules calculate the compensation voltage for each plate and apply it to the first and second parallel plates, reducing the potential difference between the plates and the inspection mass and effectively suppressing electrostatic interference on the inspection mass.

[0008] Furthermore, the first voltage compensation module and the second voltage compensation module have the same structure, both including: a voltage calculation unit for calculating the magnitude of the compensation voltage required for the parallel plates, and a voltage drive amplifier (DVA) for applying the compensation voltage.

[0009] Furthermore, the displacement measurement module includes: a front-end circuit, an AC amplifier, a lock-in amplifier, and a low-pass filter connected in sequence; the front-end circuit is used to convert the capacitance signal into a voltage signal and complete the signal modulation; the AC amplifier is used to selectively amplify the signal; the lock-in amplifier is used to demodulate the modulated signal; and the low-pass filter is used to filter the demodulated signal and output the measured displacement signal.

[0010] Furthermore, the charge measurement module includes a charge calculation unit for calculating the mass charge of the test based on the displacement.

[0011] The voltage calculation unit or charge calculation unit can be implemented by an FPGA.

[0012] The present invention also provides an on-orbit automatic elimination method based on the above-mentioned on-orbit automatic elimination device, comprising the following steps:

[0013] A control voltage is applied to the parallel plates so that the inspection quality is subject to electrostatic force and controlled at the center of the plates.

[0014] Fluctuations in electrostatic force cause electrostatic effects to affect the quality of inspection.

[0015] Measure the displacement of the quality inspection material;

[0016] The charge value of the test mass is calculated based on the displacement signal, and the magnitude of the compensation voltage is then calculated from this.

[0017] A compensating voltage is applied to the two plates to suppress the electrostatic effect on the inspection quality.

[0018] Wherein, both the first parallel electrode and the second parallel electrode are parallel to the conductor surface of the inspection mass, and the distance from the first parallel electrode to the inspection mass is equal to the distance from the second parallel electrode to the inspection mass.

[0019] Furthermore, the sum of the induced electromotive forces generated by the control voltage on each plate in the inspection quality is 0, meaning that the control voltage does not affect the electromotive force of the inspection quality.

[0020] In summary, the technical solutions conceived by this invention have the following beneficial effects compared with the prior art:

[0021] This invention applies a compensation voltage to parallel plates fixed to a grounding frame, which suppresses interference introduced by charge on the inspection quality. It avoids the problem of excessive noise during the process of reducing electrostatic effects by ultraviolet discharge, which requires interruption of target signal detection. While suppressing interference introduced by charge on the inspection quality, the precision measuring instrument for inspection quality can continue to detect the target signal, which has broad application prospects.

[0022] The on-orbit automatic elimination technology for electrostatic effects of inertial sensors provided by this invention has no mechanical connection with the precision measuring instrument with inspection quality, and will not introduce external interference such as mechanical thermal noise into the precision measuring instrument during the process of suppressing electrostatic effects of inspection quality. Attached Figure Description

[0023] Figure 1 This is a flowchart of an on-orbit automatic elimination method for electrostatic effects of inertial sensors provided in an embodiment of the present invention;

[0024] Figure 2 This is a schematic diagram illustrating the basic principle of the on-orbit automatic elimination method for electrostatic effects of inertial sensors provided in this embodiment of the invention.

[0025] Figure 3 The diagram shows the structure of the displacement measurement module in the on-orbit automatic elimination method for electrostatic effects of inertial sensors provided in this embodiment of the invention.

[0026] Figure 4 This is a structural diagram of the first voltage compensation module of the on-orbit automatic elimination method for electrostatic effects of inertial sensors provided in an embodiment of the present invention;

[0027] Figure 5 A diagram illustrating the effect of the on-orbit automatic elimination method for electrostatic effects of inertial sensors provided in an embodiment of the present invention;

[0028] Wherein, 1 represents the inspection quality, 2-1 represents the first parallel electrode plate, 2-2 represents the second parallel electrode plate, 3 represents the electrode plate frame, 4 represents the displacement measurement module, 5 represents the controller module, 6-1 represents the first electrostatic actuator, 6-2 represents the second electrostatic actuator, 7 represents the charge measurement module, 8-1 represents the first voltage compensation module, and 8-2 represents the second voltage compensation module. Detailed Implementation

[0029] To make the objectives, technical solutions, and advantages of this invention clearer, the invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the invention.

[0030] The on-orbit automatic elimination method for electrostatic effects in inertial sensors provided by this invention can be summarized as follows: This method, based on differential compensation, is a method for suppressing electrostatic effects on inspection quality. The electrodes are fixed to the electrode frame in an insulated manner. A control voltage applied to the surrounding electrodes by an electrostatic actuator interacts with the charged inspection quality to generate an electrostatic force. This electrostatic force keeps the inspection quality at the center position between the electrodes and the frame. Fluctuations in this force can cause electrostatic effects on the inspection quality. The compensation voltage is calculated from the charge value measured by the charge measurement module and applied to each electrode to suppress the electrostatic effects on the inspection quality.

[0031] like Figure 1 As shown, the on-orbit automatic elimination method for electrostatic effects of inertial sensors provided by the present invention includes the following steps:

[0032] (1) Place a pair of parallel plates fixed to the grounding plate frame on both sides of the inspection mass. Both parallel plates are parallel to the surface of the inspection mass and are equidistant from it; specifically:

[0033] A pair of parallel plates fixed to the grounding plate frame are placed on both sides of the inspection mass. Both parallel plates are parallel to the conductor surface of the inspection mass and are equidistant from the inspection mass. The two plates on the sides of the inspection mass are the first parallel plate 2-1 and the second parallel plate 2-2, respectively. A spatial rectangular coordinate system is established with the centroid of the inspection mass as the origin, and the normal direction of the plates is defined as the x-direction.

[0034] (2) When the inspection quality is displaced by external interference, the displacement measurement module measures the displacement of the inspection quality, and the controller calculates the control voltage required to return the inspection quality to its original position based on the measured displacement.

[0035] (3) The electrostatic actuator applies a control voltage to the two plates, so that the inspection quality is subjected to electrostatic force and controlled to return to the center of the plates;

[0036] (4) Fluctuations in electrostatic force can cause the quality of inspection to be affected by electrostatic effects;

[0037] (5) The displacement of the inspection mass is measured by the displacement measurement module as a function of the charge value of the inspection mass. The charge measurement module calculates the charge value of the inspection mass based on the displacement signal, and calculates the magnitude of the compensation voltage and applies it to the two plates to automatically suppress the electrostatic effect on the inspection mass.

[0038] When the inspection mass is displaced by external interference, the capacitance formed by the inspection mass and the two side plates is no longer equal. The displacement measurement module calculates the displacement of the inspection mass based on the voltage signal caused by the capacitance difference, and then the controller calculates the control voltages V1 and V2 required to control the inspection mass in the center position.

[0039] The control voltage V on plate i i An electrostatic actuator applies an electrostatic force to the parallel plates, causing the inspection mass to be subjected to an electrostatic force and controlled to return to its center position. The magnitude of the electrostatic force acting on the inspection mass along the x-direction is:

[0040]

[0041] Where i takes the values ​​1 and 2 to represent two plates, C i Let be the capacitance formed by the i-th electrode and the quality inspection. For capacitor C i The first derivative along the x-direction, for capacitance, when the inspection quality is controlled at the center position, is expressed as follows:

[0042]

[0043] Among them, C x To ensure that the capacitance formed by the two plates and the test mass is equal when the test mass is at its center position, d0 is the distance between the two plates and the test mass when the test mass is at its center position. In the electrostatic force formula (1.1), V i To control the voltage, V TM The potential required to test the mass depends on the charge on the mass and the effect of the potential of each electrode on the mass.

[0044]

[0045] Where Q is the charge on the test mass, and C tot The total capacitance of the parallel plates and plate frame to the inspection mass is given. To avoid induced charge on the inspection mass, the sum of the control voltage amplitudes is designed to satisfy the relationship V1 + V2 = 0, so that the control voltage has zero effect on the inspection mass potential. TM It can be simplified to:

[0046]

[0047] In equation (1.1), the dominant term for electrostatic interference is the fluctuation δV of the control voltage on the electrode. i Therefore, the electrostatic interference before compensation can be approximately described as:

[0048]

[0049] Where δV i For the voltage fluctuations of the plates, it is assumed that the voltage fluctuations of each plate are independent and have the same fluctuation pattern, i.e., δV1 = δV2. Electrostatic interference is related to the potential difference between the plates and the inspection mass. Therefore, electrostatic interference can be reduced by applying a compensation voltage to the plates to decrease the potential difference between the plates and the inspection mass.

[0050] Calculate the compensation voltage V applied to the two plates based on the plate voltage and charge values. comp,1 and V comp,2 The applied compensation voltage will affect the potential of the inspection mass. Therefore, the potential difference between the two plates and the inspection mass after compensation is as follows:

[0051]

[0052] The charge measurement module can measure the charge value without mechanical contact. The voltage compensation module then calculates the required compensation voltage based on the charge value and the plate voltage, ensuring that the potential difference between the two plates and the test mass is compensated to the minimum achievable value, i.e., a compensation accuracy of σ. comp ,Right now

[0053]

[0054] get

[0055]

[0056] After compensation, the electrostatic interference caused by control voltage fluctuations is:

[0057]

[0058] The electrostatic interference introduced by the compensation voltage can be described as follows:

[0059]

[0060] Where δV comp To compensate for voltage fluctuations, which are independent of and follow the same fluctuation pattern as the control voltage fluctuations, the total electrostatic interference after compensation can be expressed as:

[0061]

[0062] The total electrostatic interference δF after compensation x Compared with the electrostatic interference before compensation in equation (1.5), due to σ comp The potential difference between the pre-compensation electrode and the inspection quality is much smaller than that between the electrode and the inspection quality. Therefore, this method can effectively suppress electrostatic interference on the inspection quality.

[0063] To further illustrate the on-orbit automatic elimination method for electrostatic effects of inertial sensors provided in the embodiments of the present invention, it is now described in detail below with reference to the accompanying drawings and specific examples:

[0064] like Figure 2 As shown, a pair of parallel plates fixed to a grounded plate frame are placed on both sides of the inspection mass. Both parallel plates are parallel to the surface of the inspection mass and equidistant from it. This parallel arrangement is to form a parallel plate capacitor, which facilitates the calculation of electrostatic force. The equidistant distance between the plates on both sides of the inspection mass is to create a symmetrical system structure. Specifically:

[0065] A pair of parallel plates fixed to the grounding plate frame are placed on both sides of the inspection quality. Both parallel plates are parallel to the conductor surface of the inspection quality and are equidistant from the inspection quality. The two plates on both sides of the inspection quality are the first parallel plate 2-1 and the second parallel plate 2-2, respectively.

[0066] An electrostatic actuator applies a control voltage to two plates, causing the inspection quality to be controlled by electrostatic force and kept at the center of the plates, and the control voltage does not affect the potential of the inspection quality.

[0067] The fluctuation of electrostatic force is mainly caused by the fluctuation of control voltage, which can lead to electrostatic interference with the inspection quality.

[0068] The magnitude of the differential compensation voltage is calculated from the potential of the plates and the potential of the test mass, and then applied to the two plates to suppress electrostatic interference on the test mass.

[0069] right Figure 2 A more detailed explanation is as follows:

[0070] The displacement measurement module 4 measures the displacement of the inspection mass. The controller 5 calculates the control voltage that can keep the inspection mass in the center position based on the displacement using a PID control algorithm. The electrostatic actuators 6-1 and 6-2 apply the control voltage to the first parallel plate 2-1 to the second parallel plate 2-2. The inspection mass 1 generates electrostatic force with the first parallel plate 2-1 to the second parallel plate 2-2, keeping the inspection mass 1 in the center position. At this time, the charge measurement module 7 calculates the charge on the inspection mass based on the displacement signal, and the first voltage compensation module 8-1 and the second voltage compensation module 8-2 calculate the compensation voltage of each plate and apply it to the first parallel plate 2-1 and the second parallel plate 2-2 to reduce the potential difference between the plate and the inspection mass and effectively suppress the electrostatic interference on the inspection mass.

[0071] In this embodiment of the invention, both the first parallel plate 2-1 and the second parallel plate 2-2 can be conductor plates made of metal.

[0072] The structure of displacement measurement module 4 is as follows: Figure 3 As shown, after the displacement caused by the quality inspection generates a capacitance difference signal, the capacitance signal is converted into a voltage signal by the front-end circuit 4-1, and the signal is modulated at the same time. Then, the signal is selectively amplified by the AC amplifier 4-2. The modulated signal is demodulated by the lock-in amplifier 4-3, and finally the measured displacement signal is output after passing through the low-pass filter 4-4.

[0073] The controller module 5 uses a PID algorithm to calculate the control voltage that needs to be applied to the first parallel plate 2-1 and the second parallel plate 2-2 in order to control the inspection quality at the center position.

[0074] Electrostatic actuators 6-1 and 6-2 apply control voltage to the first parallel plate 2-1 and the second parallel plate 2-2 via a voltage drive amplifier (DVA).

[0075] The charge measurement module 7 includes a charge calculation unit for calculating the mass charge of the test based on the displacement.

[0076] The first voltage compensation module 8-1 and the second voltage compensation module 8-2 have the same structure. The structure of the first voltage compensation module 8-1 is shown in the figure. It includes: a voltage calculation unit for calculating the magnitude of the compensation voltage required for the plate, and a voltage drive amplifier (DVA) for applying the compensation voltage.

[0077] The voltage calculation unit or charge calculation unit can be implemented using an FPGA.

[0078] Differential compensation methods exhibit varying suppression effects on electrostatic interference across different frequency bands. The suppression effects before and after compensation are as follows: Figure 5As shown, near the millihertz frequency of interest in on-orbit weak signal measurement missions, the interference effect introduced by electrostatic force can be reduced by at least one order of magnitude using this method. Electrostatic interference can be eliminated and will not interfere with weak signal detection.

[0079] In summary, compared with the prior art, the present invention has the following advantages: the method of eliminating electrostatic effects by applying differential compensation voltage to the electrode plates around the inspection quality has less interference introduced by the compensation voltage, which can suppress the total electrostatic interference and will not interrupt the detection of weak signals.

[0080] The system for suppressing electrostatic interference in inspection quality provided by this invention has no mechanical connection with the precision measuring instrument that has inspection quality, and will not introduce external interference such as mechanical thermal noise into the precision measuring instrument during the measurement of the charge of inspection quality.

[0081] Those skilled in the art will readily understand that the above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.

Claims

1. An on-orbit automatic elimination device of electrostatic effect of an inertial sensor, characterized in that, The utility model relates to a kind of electrostatic force interferometer, including: Test mass (1), first parallel plate (2-1), second parallel plate (2-2), plate frame (3), displacement measurement module (4), controller module (5), first electrostatic actuator (6-1), second electrostatic actuator (6-2), charge measurement module (7), first adder, second adder, first voltage compensation module (8-1) and second voltage compensation module (8-2); The first parallel plate (2-1) and the second parallel plate (2-2) are respectively arranged on the two sides of the test mass (1), and the first parallel plate (2-1) and the second parallel plate (2-2) are fixedly connected with the plate frame (3); The first input end of the displacement measurement module (4) is connected with the first parallel plate (2-1), and the second input end is connected with the second parallel plate (2-2), for measuring the displacement of the test mass (1); The input of the controller module (5) is connected with the output of the displacement measurement module (4), for calculating the control voltage of the position of the test mass (1); The input of the first electrostatic actuator (6-1) is connected with the first output end of the controller module (5), for applying the first control voltage; The input of the second electrostatic actuator (6-2) is connected with the second output end of the controller module (5), for applying the second control voltage; The input end of the charge measurement module (7) is connected with the output end of the displacement measurement module (4), for calculating the charge of the test mass (1) according to the displacement signal; The input end of the first voltage compensation module (8-1) is connected with the first output end of the charge measurement module (7), for calculating the first compensation voltage of the first parallel plate (2-1); The input end of the second voltage compensation module (8-2) is connected with the second output end of the charge measurement module (7), for calculating the second compensation voltage of the second parallel plate (2-2); The first input end of the first adder is connected with the output end of the first electrostatic actuator (6-1), and the second input end of the first adder is connected to the output end of the first voltage compensation module (8-1), for adding the first control voltage applied by the first electrostatic actuator (6-1) and the first compensation voltage to act on the first parallel plate (2-1), and reduce the potential difference between the first parallel plate (2-1) and the test mass (1), effectively inhibit the electrostatic force interference received by the test mass (1); The first input end of the second adder is connected with the output end of the second electrostatic actuator (6-2), and the second input end of the second adder is connected to the output end of the second voltage compensation module (8-2), for adding the second control voltage applied by the second electrostatic actuator (6-2) and the second compensation voltage to act on the second parallel plate (2-2), and reduce the potential difference between the second parallel plate (2-2) and the test mass (1), effectively inhibit the electrostatic force interference received by the test mass (1).

2. The on-orbit automatic removal device according to claim 1, wherein The first parallel electrode plate (2-1) and the second parallel electrode plate (2-2) are parallel to the conductor surface of the test mass (1), and the distance from the first parallel electrode plate (2-1) to the test mass (1) is equal to the distance from the second parallel electrode plate (2-2) to the test mass.

3. The on-orbit automatic removal device according to claim 1, wherein In operation, the first electrostatic actuator (6-1) and the second electrostatic actuator (6-2) apply a control voltage to the first parallel electrode plate (2-1) and the second parallel electrode plate (2-2), and the test mass (1) is controlled at the center position by the electrostatic force generated between the test mass (1) and the first parallel electrode plate (2-1) and the second parallel electrode plate (2-2). At this time, the displacement of the test mass is measured by the displacement measurement module (4), and the charge on the test mass is calculated according to the displacement signal by the charge measurement module (7). The compensation voltage of each electrode plate is calculated by the first voltage compensation module (8-1) and the second voltage compensation module (8-2) and applied to the first parallel electrode plate (2-1) and the second parallel electrode plate (2-2), thereby reducing the potential difference between the electrode plate and the test mass and effectively suppressing the electrostatic force interference on the test mass.

4. The on-orbit automatic elimination device according to any one of claims 1 to 3, characterized in that, The first voltage compensation module (8-1) and the second voltage compensation module (8-2) are the same in structure and each include a voltage calculation unit for calculating the compensation voltage required by the parallel electrode plate and a voltage drive amplifier (DVA) for applying the compensation voltage.

5. The on-orbit automatic elimination device according to any one of claims 1 to 3, wherein The displacement measurement module (4) includes a front-end circuit (4-1), an AC amplifier (4-2), a lock-in amplifier (4-3), and a low-pass filter (4-4) connected in sequence. The front-end circuit (4-1) is used to convert the capacitance signal into a voltage signal and complete the modulation of the signal. The AC amplifier (4-2) is used to selectively amplify the signal. The lock-in amplifier (4-3) is used to demodulate the modulated signal. The low-pass filter (4-4) is used to filter the demodulated signal and output the measured displacement signal.

6. The on-orbit automatic elimination device according to any one of claims 1 to 3, wherein The charge measurement module (7) includes a charge calculation unit for calculating the charge of the test mass according to the displacement.

7. The on-orbit automatic removal device according to claim 4, wherein The voltage calculation unit is realized by FPGA.

8. The on-orbit automatic removal device according to claim 6, wherein The charge calculation unit is realized by FPGA.

9. An on-orbit automatic elimination method implemented by the on-orbit automatic elimination device according to any one of claims 1-6, characterized in that, The method comprises the following steps: Applying a control voltage to the parallel electrode plate so that the test mass is subjected to an electrostatic force and is controlled at the center of the electrode plate; The fluctuation of the electrostatic force causes the test mass to be subjected to an electrostatic effect; Measuring the displacement of the test mass; According to the displacement signal, the charge value of the test mass is calculated, and the compensation voltage is calculated accordingly; And the compensation voltage is applied to the two electrode plates to suppress the electrostatic effect on the test mass.

10. The on-orbit automatic elimination method as described in claim 9, characterized in that, The first parallel electrode plate and the second parallel electrode plate are parallel to the conductor surface of the test mass, and the distance from the first parallel electrode plate to the test mass is equal to the distance from the second parallel electrode plate to the test mass.

11. The on-orbit automatic elimination method as described in claim 9, characterized in that, The sum of the induced potentials generated on the test mass by the control voltages on the first parallel electrode plate and the second parallel electrode plate is 0.

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