Frictional additive manufacturing method and device

Abstract

This disclosure provides a triboelectric additive manufacturing method and apparatus. The method includes: establishing triboelectric contact between a printing tip and a sample to be processed; and, during the injection of lubricating fluid into the triboelectric contact area between the printing tip and the sample, increasing the concentration of micro / nano particles in the lubricating fluid in the contact area by controlling the evaporation of a base fluid in the lubricating fluid. The apparatus includes: a loading unit with a fixed printing tip, a lubricating fluid injection unit, a driving unit, and a base fluid evaporation control unit. This disclosure utilizes a triboelectric / negative wear method to prepare micro / nanowires on a sample. By controlling the evaporation of the base fluid, the local concentration of micro / nano particles in the contact area is increased, promoting the formation of a triboelectric material transfer film or a tribochemical reaction film caused by friction, thereby improving the preparation efficiency of micro / nanowires, and the prepared structural precision can reach the submicron or even nanometer scale.

Description

Technical Field

[0001] This disclosure relates to the field of 3D printing technology for materials, and more particularly to a method and apparatus for triboelectric additive manufacturing. Background Technology

[0002] Micro / nano additive manufacturing is the intersection of micro / nano manufacturing and additive manufacturing. Traditional techniques used in micro / nano additive manufacturing generally include electroplating, electrodeposition, self-assembly, and scanning probe microscopy based on substrate oxidation. In recent years, researchers have achieved a new approach to micro / nano additive manufacturing by utilizing the formation of tribotransfer films or tribochemical reaction films, or negative wear phenomena. For example, RW Carpick et al. from the United States used zinc dialkyl dithiophosphate (ZDDP) or ZrO2 nanoparticles as additives and polyalphaolefin (PAO) as the base oil to fabricate micro / nano structures with submicron lengths / widths and tens of nanometer thicknesses on steel surfaces using atomic force microscopy (AFM) (ACS Appl. Mater. Interfaces 2018, 10, 40335-40347; Nano Lett. 2018, 18, 6756-6763). They termed this method "nanotribological printing" to illustrate the relationship between 3D printing and tribofacture. In addition, Anne Neville et al. from the UK used ZDDP, didecyl phthalate (DDP), or a mixture of ZDDP and molybdenum dialkyl dithiocarbamate (MoDTC) as additives and PAO synthetic oil as the base liquid to prepare a tribochemical reaction film with a linewidth of tens of nanometers on the steel surface using AFM (Nanotechnology 2019, 30, 095302), and called this method 3D tribo-nanoprinting.

[0003] The aforementioned methods for micro / nano additive manufacturing using friction are all implemented through AFM (Action-Factor Mechanism) devices. However, since AFM positioning, force application, and measurement require the use of lasers, the transparency of the lubricant is critical. Therefore, systems that utilize AFM probes as friction pairs to achieve micro / nano additive manufacturing through friction are currently very limited. Furthermore, a second drawback of triboelectric micro / nano additive manufacturing is its extremely low fabrication efficiency. Typically, tens of thousands of friction cycles are required to obtain a line with a thickness on the micro / nano scale. These two drawbacks mean that methods for micro / nano additive manufacturing using friction fall far short of practical application requirements. In macroscopic triboelectric deposition additive manufacturing, Chinese invention patent applications 202010999535.X and 202211627951.2 can both achieve the deposition of materials on the millimeter scale. However, these technologies cannot achieve the fabrication of micro / nano-scale structures. Summary of the Invention

[0004] This disclosure aims to address at least one of the technical problems existing in the prior art.

[0005] Therefore, the first aspect of this disclosure provides a triboelectric additive manufacturing method that can improve the efficiency of triboelectric printing technology. This method utilizes friction / negative wear to prepare micro / nanowires on a sample to be processed, such as a silicon wafer, metal, or alloy sheet. By controlling the evaporation of the base liquid, the local concentration of micro / nano particles in the contact area between the sample to be processed and the printing tip is increased, promoting the formation of a triboelectric material transfer film or a tribochemical reaction film caused by friction, thereby improving the preparation efficiency of micro / nanowires.

[0006] The first aspect of this disclosure provides a method for friction additive manufacturing, comprising:

[0007] Frictional contact is created between the printing tip and the sample to be processed, and lubricant is injected. During the process of injecting lubricant into the contact area between the printing tip and the sample to be processed, the concentration of micro- and nano-particles in the lubricant at the contact area is increased by controlling the evaporation of the base liquid in the lubricant.

[0008] A second aspect of this disclosure provides a friction additive manufacturing apparatus, comprising:

[0009] A loading unit, wherein a printing head is fixedly provided at one end of the loading unit facing the sample to be processed, for applying a load to the sample to be processed through the printing head;

[0010] A lubricant injection unit is used to inject lubricant into the contact area between the printing tip and the sample to be processed;

[0011] A drive unit is used to generate relative movement between the printing tip and the sample to be processed; and

[0012] A base fluid evaporation control unit is used to control the evaporation of the base fluid in the lubricating fluid in order to increase the concentration of micro- and nano-particles in the lubricating fluid at the contact area.

[0013] In some embodiments, the driving unit causes the relative motion between the printing tip and the sample to be processed to be a relative rotation or a relative translation.

[0014] In some embodiments, the evaporation of the base liquid is controlled by any one or more combinations of controlling the temperature of the sample to be processed, controlling the temperature of the environment in which the sample to be processed is located, and controlling the humidity of the environment in which the sample to be processed is located.

[0015] In some embodiments, the base liquid evaporation control unit includes:

[0016] A heater or cooler for controlling the temperature of the sample to be processed or the environment in which the sample to be processed is located; and / or

[0017] A humidity controller or airflow controller is used to control the humidity of the environment in which the sample to be processed is located.

[0018] In some embodiments, the temperature of the sample to be processed and the temperature of the environment in which the sample to be processed is located should not be higher than the boiling point or flash point of the base liquid.

[0019] In some embodiments, the humidity of the environment in which the sample to be processed is located is 0% to 90%.

[0020] The beneficial effects of this disclosure are:

[0021] The triboelectric additive manufacturing method and apparatus disclosed herein utilize energy generated during the friction process to fabricate micro / nanowires on a sample to be processed (such as a silicon wafer, metal, or alloy sheet) through triboelectric transfer. By controlling the evaporation of the base liquid in the lubricant, the local concentration of micro / nano particles in the contact area between the sample and the printing tip is increased, promoting the formation of a triboelectric material transfer film or a tribochemical reaction film caused by friction, thereby improving the fabrication efficiency of micro / nanowires. Compared with traditional technologies such as triboelectric additive manufacturing and triboelectric deposition additive manufacturing, the triboelectric additive manufacturing method and apparatus disclosed herein are simpler to operate, and can produce structures with submicron or even nanometer-level precision. Compared with existing triboelectric printing or 3D triboelectric nanoprinting technologies, it has higher fabrication efficiency and a richer fabrication system. This disclosure provides a new and improved approach for micro / nano additive manufacturing and in-situ wear repair. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of a triboelectric additive manufacturing apparatus provided in an embodiment of the present disclosure.

[0023] Figure 2 (a) and (b) in the figure are local three-dimensional microscopic morphology photographs and contour curves of the sample prepared on the surface of the sample 4 to be processed in Example 1 of this disclosure.

[0024] Figure 3 This is a partial two-dimensional micrograph of the sample prepared on the surface of the sample 4 to be processed in Example 5 of this disclosure.

[0025] In the picture:

[0026] 1 is the loading unit, 2 is the printing head, 3 is the lubricant, 4 is the sample to be processed, 5 is the driving unit, 6 is the base liquid evaporation control unit, and 7 is the lubricant injection unit. Detailed Implementation

[0027] The present application will now be described in further detail with reference to the accompanying drawings and specific embodiments. Similar elements in different embodiments are referred to by related similar element reference numerals. In the following embodiments, many details are described to facilitate a better understanding of the present application. However, those skilled in the art will readily recognize that some features may be omitted in different situations, or may be replaced by other elements, materials, or methods. In some cases, certain operations related to the present application are not shown or described in the specification. This is to avoid obscuring the core parts of the present application with excessive description. For those skilled in the art, detailed description of these related operations is not necessary; they can fully understand the related operations based on the description in the specification and general technical knowledge in the art.

[0028] The features, operations, or characteristics described in this specification can be combined in any suitable manner to form various embodiments. Furthermore, the steps or actions described in the method description can be rearranged or adjusted in a manner readily apparent to those skilled in the art. Therefore, the various orders in the specification and drawings are merely for the clear description of a particular embodiment and do not imply a mandatory order, unless otherwise stated that a particular order must be followed.

[0029] The structures, proportions, and sizes illustrated in the accompanying drawings are solely for illustrative purposes to aid those skilled in the art and to facilitate understanding. They are not intended to limit the scope of this application and therefore have no substantial technical significance. Any modifications to the structure, changes in proportions, or adjustments to size, provided they do not affect the effectiveness or purpose of this application, should still fall within the scope of the technical content disclosed herein. Furthermore, the terms "upper," "lower," "left," "right," "middle," and "one" used in this specification are merely for clarity and not intended to limit the scope of this application. Changes or adjustments to their relative relationships, without substantially altering the technical content, should also be considered within the scope of this application's implementation.

[0030] A triboelectric additive manufacturing method provided in the first aspect of this disclosure includes:

[0031] By creating frictional contact between the printing tip and the sample to be processed, and by controlling the evaporation of the base liquid in the lubricant during the process of injecting lubricant into the frictional contact area between the printing tip and the sample to be processed, the concentration of micro- and nano-particles in the lubricant in the contact area between the printing tip and the sample to be processed is increased.

[0032] In some embodiments, the methods for controlling the evaporation of the base liquid include, but are not limited to, controlling any one or more combinations of the following: the temperature of the sample to be processed, the temperature of the environment in which the sample to be processed is located, and the humidity of the environment in which the sample to be processed is located.

[0033] In some embodiments, the base fluid in the lubricant is any one or a mixture of esters, alcohols (such as ethanol), ketones (such as acetone), petroleum ether, and water.

[0034] In some embodiments, the micro / nano particles in the lubricating fluid are molybdenum disulfide, graphene, or copper, silver, or alloy solid particles, wherein the particle size of the solid particles is 10 nanometers to 10 micrometers, and the concentration of the micro / nano particles in the lubricating fluid is 0.1 g / L to 1000 g / L. This disclosure does not impose strict limitations on the material to be processed and the materials of the nanoparticles; both can be made of the same or different materials.

[0035] The second aspect of this disclosure provides a triboelectric additive manufacturing apparatus that can improve the efficiency of triboelectric printing, and its structure is as follows: Figure 1 As shown, the device includes:

[0036] The loading unit 1 has a printing end 2 fixedly provided at one end facing the sample 4 to be processed. The loading unit 1 applies a certain load to the sample 4 to be processed through the printing end 2, thereby forming a material transfer film or chemical reaction film on the surface of the sample 4 to be processed.

[0037] The lubricant injection unit 7 is used to inject lubricant 3 into the contact area between the printing tip 2 and the sample to be processed 4. The lubricant 3 is a liquid medium formed by dispersing nanoparticles in a base liquid.

[0038] The driving unit 5 is used to generate relative movement between the printing tip 2 and the sample 4 to be processed, thereby generating frictional contact between the printing tip 2 and the sample 4 to be processed.

[0039] The base liquid evaporation control unit 6 is used to control the evaporation of the base liquid in the lubricant 3, so as to increase the concentration of micro and nano particles in the lubricant 3 in the contact area between the printing end 2 and the sample to be processed 4.

[0040] In some embodiments, the power provided by the drive unit 5 to generate relative motion between the printing tip 2 and the sample 4 to be processed can be in a rotational mode or a reciprocating mode. The drive unit 5 can drive the printing tip 2 or the sample 4 to be processed.

[0041] In some embodiments, the base liquid evaporation control unit 6 may be a heating or cooling instrument disposed around the contact area between the printing tip 2 and the sample 4 to be processed, or fixed to the printing tip 2 or the sample 4 to be processed. The controlled ambient temperature and sample temperature should not exceed the boiling point or flash point of the lubricant 3. The base liquid evaporation control unit 6 may also be a humidity control instrument or airflow control instrument disposed around the contact area between the printing tip 2 and the sample 4 to be processed, controlling the ambient humidity to be 0% to 90%.

[0042] In some embodiments, the material of the printed tip 2 may be diamond, ceramic (such as alumina, silicon nitride, zirconium oxide, etc.) or a composite material thereof, and its shape may be spherical or conical.

[0043] In some embodiments, the sample 4 to be processed is made of silicon, metal, or alloy. A lubricant 3 needs to be added between the surface of the sample 4 and the printing tip 2.

[0044] Before etching and coloring, the surface of the sample 4 to be processed is ground, polished, cleaned, and dried, and then placed at the bottom of the printing tip 2. Next, the driving unit 5 induces relative movement between the sample 4 and the printing tip 2, and the loading unit 1 applies a load to the printing tip 2, both achieving a friction / negative wear process. Subsequently, lubricant 3, with a volume of 1 μL to 1 mL, is added between the sample 4 and the printing tip 2 using the lubricant injection unit 7. The ambient temperature and / or the temperature of the sample to be processed are controlled by the base liquid evaporation control unit 6 to ensure that they do not exceed the boiling point or flash point of the lubricant 3, or the ambient humidity is controlled to be 0–90%. Under a load of 0.01 N to 100 N, preparation is carried out for 10 s to 1000 s, achieving micro / nano additive manufacturing on the surface of the sample 4.

[0045] The technical solution of this application will be further described below with reference to embodiments:

[0046] Example 1:

[0047] Zirconia ceramic balls were used as the printing tip 2, and a stainless steel sheet was used as the sample to be processed 4. Ethanol containing 10 g / L copper nanoparticles (approximately 200 nm in diameter) was used as the lubricant 3. Before processing, the surface of the sample to be processed 4 was ground, polished, cleaned, and dried, and then placed at the bottom of the printing tip 2. During the fabrication process, a load of 1 N was applied using the loading unit 1, and a reciprocating frequency of 1 Hz and a reciprocating distance of 5 mm were applied using the driving unit 5. 200 μL of lubricant 3 was added dropwise between the printing tip 2 and the sample to be processed 4. The printing time was set to 900 s, the temperature to room temperature of approximately 20 °C, and the humidity to 28%. After preparation, the sample was removed, cleaned, and dried. The sample prepared on the surface of the sample to be processed 4 using the triboelectric additive manufacturing method and apparatus of this embodiment has a height of 1.2 μm, a width of 90 μm, and a length of 5 mm (the height, width, and length of the sample prepared in this embodiment are average dimensions, the same below). The local three-dimensional microscopic morphology photographs and contour curves of the sample prepared on the surface of the sample to be processed are shown in the figure. Figure 2 As shown in (a) and (b).

[0048] Example 2:

[0049] A diamond printing tip 2 and a stainless steel sheet as the sample to be processed 4 were used. Ethanol containing 10 g / L of copper nanoparticles (approximately 200 nm in diameter) was used as the lubricant 3. Before processing, the surface of the sample to be processed 4 was ground, polished, cleaned, and dried, and then placed at the bottom of the printing tip 2. During the fabrication process, a load of 0.3 N was applied using the loading unit 1, and a reciprocating frequency of 1 Hz and a reciprocating distance of 5 mm were applied using the driving unit 5. 20 μL of lubricant 3 was added dropwise between the printing tip 2 and the sample to be processed 4. The printing time was set to 200 s, the temperature to room temperature (approximately 20 °C), and the humidity to 28%. After preparation, the sample was removed, cleaned, and dried. The sample prepared on the surface of the sample to be processed 4 using the triboelectric additive manufacturing method and apparatus of this embodiment has a height of 0.2 μm, a width of 90 μm, and a length of 5 mm.

[0050] Example 3:

[0051] A silicon nitride ball was used as the printing tip 2, a stainless steel sheet as the sample to be processed 4, and ethanol containing 10 g / L copper nanoparticles (approximately 200 nm in diameter) was used as the lubricant 3. Before processing, the surface of the sample to be processed 4 was ground, polished, cleaned, and dried, and then placed at the bottom of the printing tip 2. During the fabrication process, a load of 0.3 N was applied using the loading unit 1, and a reciprocating frequency of 1 Hz and a reciprocating distance of 5 mm were applied using the driving unit 5. 1 μL of lubricant 3 was added dropwise between the printing tip 2 and the sample to be processed 4. The printing time was set to 10 s, the temperature to approximately room temperature (around 20°C), and the humidity to 28%. After preparation, the sample was removed, cleaned, and dried. The sample prepared on the surface of the sample to be processed 4 using the triboelectric additive manufacturing method and apparatus of this embodiment has a height of 0.1 μm, a width of 90 μm, and a length of 5 mm.

[0052] Example 4:

[0053] Zirconia ceramic balls were used as the printing tip 2, and a bearing steel sheet was used as the sample to be processed 4. Ethanol containing 10 g / L of copper nanoparticles (approximately 200 nm in diameter) was used as the lubricant 3. Before processing, the surface of the sample to be processed 4 was ground, polished, cleaned, and dried, and then placed at the bottom of the printing tip 2. During the fabrication process, a load of 100 N was applied using the loading unit 1, and a reciprocating frequency of 1 Hz and a reciprocating distance of 5 mm were applied using the driving unit 5. 20 μL of lubricant 3 was added dropwise between the printing tip 2 and the sample to be processed 4. The printing time was set to 200 s, the temperature to room temperature of approximately 20 °C, and the humidity to 28%. After preparation, the sample was removed, cleaned, and dried. The sample prepared on the surface of the sample to be processed 4 using the triboelectric additive manufacturing method and apparatus of this embodiment has a height of 0.2 μm, a width of 50 μm, and a length of 5 mm.

[0054] Example 5:

[0055] Zirconia ceramic balls were used as the printing tip 2, and a silicon wafer was used as the sample to be processed 4. Ethanol containing 10 g / L copper nanoparticles (approximately 200 nm in diameter) was used as the lubricant 3. Before processing, the surface of the sample to be processed 4 was ground, polished, cleaned, and dried, and then placed at the bottom of the printing tip 2. During the fabrication process, a load of 0.3 N was applied using the loading unit 1, and a reciprocating frequency of 1 Hz and a reciprocating distance of 5 mm were applied using the driving unit 5. 20 μL of lubricant 3 was added dropwise between the printing tip 2 and the sample to be processed 4. The printing time was set to 200 s, the temperature to room temperature of approximately 20 °C, and the humidity to 28%. After preparation, the sample was removed, cleaned, and dried. The sample prepared on the surface of the sample to be processed 4 using the triboelectric additive manufacturing method and apparatus of this embodiment has a height of 0.2 μm, a width of 30 μm, and a length of 5 mm. A partial two-dimensional micrograph of the sample prepared on the surface of the sample to be processed 4 is shown below. Figure 3 As shown.

[0056] Example 6:

[0057] Zirconia ceramic balls were used as the printing tip 2, and a titanium alloy sheet was used as the sample to be processed 4. Ethanol containing 10 g / L of copper nanoparticles (approximately 200 nm in diameter) was used as the lubricant 3. Before processing, the surface of the sample to be processed 4 was ground, polished, cleaned, and dried, and then placed at the bottom of the printing tip 2. During the fabrication process, a load of 0.3 N was applied using the loading unit 1, and a reciprocating frequency of 1 Hz and a reciprocating distance of 5 mm were applied using the driving unit 5. 20 μL of lubricant 3 was added dropwise between the printing tip 2 and the sample to be processed 4. The printing time was set to 200 s, the temperature to room temperature of approximately 20 °C, and the humidity to 28%. After preparation, the sample was removed, cleaned, and dried. The sample prepared on the surface of the sample to be processed 4 using the triboelectric additive manufacturing method and apparatus of this embodiment has a height of 0.3 μm, a width of 50 μm, and a length of 5 mm.

[0058] Example 7:

[0059] Zirconia ceramic balls were used as the printing tip 2, and a copper sheet was used as the sample to be processed 4. Ethanol containing 10 g / L of copper micro / nano particles (approximately 200 nm in diameter) was used as the lubricant 3. Before processing, the surface of the sample to be processed 4 was ground, polished, cleaned, and dried, and then placed at the bottom of the printing tip 2. During the fabrication process, the load applied by the loading unit 1 was 0.01 N, and the reciprocating frequency applied by the driving unit 5 was 1 Hz with a reciprocating distance of 5 mm. 20 μL of lubricant 3 was added dropwise between the printing tip 2 and the sample to be processed 4. The printing time was set to 200 s, the temperature to room temperature (approximately 20 °C), and the humidity to 28%. After preparation, the sample was removed, cleaned, and dried. The sample prepared on the surface of the sample to be processed 4 using the triboelectric additive manufacturing method and apparatus of this embodiment has a height of 0.2 μm, a width of 40 μm, and a length of 5 mm.

[0060] Example 8:

[0061] Zirconia ceramic spheres were used as the printing tip 2, and a silicon wafer as the sample to be processed 4. Ethanol containing 100 g / L of silver nanoparticles (approximately 300 nm in diameter) was used as the lubricant 3. Before processing, the surface of the sample to be processed 4 was ground, polished, cleaned, and dried, and then placed at the bottom of the printing tip 2. During the fabrication process, a load of 0.3 N was applied using the loading unit 1, and a reciprocating frequency of 1 Hz and a reciprocating distance of 5 mm were applied using the driving unit 5. 20 μL of lubricant 3 was added dropwise between the printing tip 2 and the sample to be processed 4. The printing time was set to 200 s, the temperature to room temperature (approximately 20 °C), and the humidity to 28%. After preparation, the sample was removed, cleaned, and dried. The sample prepared on the surface of the sample to be processed 4 using the triboelectric additive manufacturing method and apparatus of this embodiment has a height of 0.1 μm, a width of 30 μm, and a length of 5 mm.

[0062] Example 9:

[0063] Zirconia ceramic balls were used as the printing tip 2, and a silicon wafer as the sample to be processed 4. Ethanol containing 1000 g / L molybdenum disulfide micro / nano particles (approximately 10 micrometers in diameter) was used as the lubricant 3. Before processing, the surface of the sample to be processed 4 was ground, polished, cleaned, and dried, and then placed at the bottom of the printing tip 2. During the fabrication process, a load of 0.3 N was applied using the loading unit 1, and a reciprocating frequency of 1 Hz and a reciprocating distance of 5 mm were applied using the driving unit 5. 20 μL of lubricant 3 was added dropwise between the printing tip 2 and the sample to be processed 4. The printing time was set to 200 s, the temperature to room temperature of approximately 20°C, and the humidity to 28%. After preparation, the sample was removed, cleaned, and dried. The sample prepared on the surface of the sample to be processed 4 using the triboelectric additive manufacturing method and apparatus of this embodiment has a height of 0.2 μm, a width of 30 μm, and a length of 5 mm.

[0064] Example 10:

[0065] Zirconia ceramic balls were used as the printing tip 2, and a silicon wafer as the sample to be processed 4. Ethanol containing 10 g / L nickel nanoparticles (approximately 200 nm in diameter) was used as the lubricant 3. Before processing, the surface of the sample to be processed 4 was ground, polished, cleaned, and dried, and then placed at the bottom of the printing tip 2. During the fabrication process, a load of 0.3 N was applied using the loading unit 1, and a reciprocating frequency of 1 Hz and a reciprocating distance of 5 mm were applied using the driving unit 5. 20 μL of lubricant 3 was added dropwise between the printing tip 2 and the sample to be processed 4. The printing time was set to 200 s, the temperature to room temperature (approximately 20 °C), and the humidity to 28%. After preparation, the sample was removed, cleaned, and dried. The sample prepared on the surface of the sample to be processed 4 using the triboelectric additive manufacturing method and apparatus of this embodiment has a height of 0.1 μm, a width of 30 μm, and a length of 5 mm.

[0066] Example 11:

[0067] Zirconia ceramic balls were used as the printing tip 2, and a bearing steel sheet was used as the sample to be processed 4. Water containing 0.1 g / L graphene nanoparticles (approximately 10 nm in diameter) was used as the lubricant 3. Before processing, the surface of the sample to be processed 4 was ground, polished, cleaned, and dried, and then placed at the bottom of the printing tip 2. During the fabrication process, a load of 0.3 N was applied using the loading unit 1, and a reciprocating frequency of 1 Hz and a reciprocating distance of 5 mm were applied using the driving unit 5. 20 μL of lubricant 3 was added dropwise between the printing tip 2 and the sample to be processed 4. The printing time was set to 200 s, the temperature to room temperature of approximately 20 °C, and the humidity to 32%. After preparation, the sample was removed, cleaned, and dried. The sample prepared on the surface of the sample to be processed 4 using the triboelectric additive manufacturing method and apparatus of this embodiment has a height of 0.1 μm, a width of 50 μm, and a length of 5 mm.

[0068] Example 12:

[0069] Zirconia ceramic balls were used as the printing tip 2, and a silicon wafer as the sample to be processed 4. Acetone containing 10 g / L copper nanoparticles (approximately 200 nm in diameter) was used as the lubricant 3. Before processing, the surface of the sample to be processed 4 was ground, polished, cleaned, and dried, and then placed at the bottom of the printing tip 2. During the fabrication process, a load of 0.3 N was applied using the loading unit 1, and a reciprocating frequency of 1 Hz and a reciprocating distance of 5 mm were applied using the driving unit 5. 20 μL of lubricant 3 was added dropwise between the printing tip 2 and the sample to be processed 4. The printing time was set to 200 s, the temperature to room temperature (approximately 20 °C), and the humidity to 28%. After preparation, the sample was removed, cleaned, and dried. The sample prepared on the surface of the sample to be processed 4 using the triboelectric additive manufacturing method and apparatus of this embodiment has a height of 0.2 μm, a width of 30 μm, and a length of 5 mm.

[0070] Example 13:

[0071] Zirconia ceramic balls were used as the printing tip 2, and a silicon wafer as the sample to be processed 4. Petroleum ether containing 10 g / L copper nanoparticles (approximately 200 nm in diameter) was used as the lubricant 3. Before processing, the surface of the sample to be processed 4 was ground, polished, cleaned, and dried, and then placed at the bottom of the printing tip 2. During the fabrication process, a load of 0.3 N was applied using the loading unit 1, and a reciprocating frequency of 1 Hz and a reciprocating distance of 5 mm were applied using the driving unit 5. 20 μL of lubricant 3 was added dropwise between the printing tip 2 and the sample to be processed 4. The printing time was set to 200 s, the temperature to room temperature of approximately 20 °C, and the humidity to 28%. After preparation, the sample was removed, cleaned, and dried. The sample prepared on the surface of the sample to be processed 4 using the triboelectric additive manufacturing method and apparatus of this embodiment has a height of 0.1 μm, a width of 30 μm, and a length of 5 mm.

[0072] Example 14:

[0073] Zirconia ceramic spheres were used as the printing tip 2, and a silicon wafer was used as the sample to be processed 4. A mixture of ethanol and water (volume ratio 9:1) containing 10 g / L copper nanoparticles (approximately 200 nm in diameter) was used as the lubricant 3. Before processing, the surface of the sample to be processed 4 was ground, polished, cleaned, and dried, and then placed at the bottom of the printing tip 2. During the fabrication process, a load of 0.3 N was applied using the loading unit 1, and a reciprocating frequency of 1 Hz and a reciprocating distance of 5 mm were applied using the driving unit 5. 20 μL of lubricant 3 was added dropwise between the printing tip 2 and the sample to be processed 4. The printing time was set to 200 s, the temperature to room temperature (approximately 20 °C), and the humidity to 28%. After preparation, the sample was removed, cleaned, and dried. The sample prepared on the surface of the sample to be processed 4 using the triboelectric additive manufacturing method and apparatus of this embodiment has a height of 0.2 μm, a width of 30 μm, and a length of 5 mm.

[0074] Example 15:

[0075] Zirconia ceramic balls were used as the printing tip 2, and a silicon wafer as the sample to be processed 4. Ethanol containing 10 g / L copper nanoparticles (approximately 200 nm in diameter) was used as the lubricant 3. Before processing, the surface of the sample to be processed 4 was ground, polished, cleaned, and dried, and then placed at the bottom of the printing tip 2. During the fabrication process, a load of 0.3 N was applied using the loading unit 1, and a reciprocating frequency of 1 Hz and a reciprocating distance of 5 mm were applied using the driving unit 5. 1 mL of lubricant 3 was added dropwise between the printing tip 2 and the sample to be processed 4. The printing time was set to 1000 s, the temperature to room temperature (approximately 20 °C), and the humidity to 28%. After preparation, the sample was removed, cleaned, and dried. The sample prepared on the surface of the sample to be processed 4 using the triboelectric additive manufacturing method and apparatus of this embodiment has a height of 0.2 μm, a width of 30 μm, and a length of 5 mm.

[0076] Example 16:

[0077] Zirconia ceramic spheres were used as the printing tip 2, and a silicon wafer as the sample to be processed 4. Ethanol containing 10 g / L copper nanoparticles (approximately 200 nm in diameter) was used as the lubricant 3. Before processing, the surface of the sample to be processed 4 was ground, polished, cleaned, and dried, and then placed at the bottom of the printing tip 2. During the fabrication process, a load of 0.3 N was applied using the loading unit 1, and a reciprocating frequency of 1 Hz and a reciprocating distance of 5 mm were applied using the driving unit 5. 200 μL of lubricant 3 was added dropwise between the printing tip 2 and the sample to be processed 4. The printing time was set to 10 s, the ambient temperature to 50 °C, and the humidity to 18%. After preparation, the sample was removed, cleaned, and dried. The sample prepared on the surface of the sample to be processed 4 using the triboelectric additive manufacturing method and apparatus of this embodiment has a height of 0.2 μm, a width of 30 μm, and a length of 5 mm.

[0078] Example 17:

[0079] Zirconia ceramic spheres were used as the printing tip 2, and a silicon wafer as the sample to be processed 4. Ethanol containing 10 g / L copper nanoparticles (approximately 200 nm in diameter) was used as the lubricant 3. Before processing, the surface of the sample to be processed 4 was ground, polished, cleaned, and dried, and then placed at the bottom of the printing tip 2. During the fabrication process, a load of 0.3 N was applied using the loading unit 1, and a reciprocating frequency of 1 Hz and a reciprocating distance of 5 mm were applied using the driving unit 5. 200 μL of lubricant 3 was added dropwise between the printing tip 2 and the sample to be processed 4. The printing time was set to 200 s, the surface temperature of the printing tip was set to 50 °C, and the humidity was set to 18%. After preparation, the sample was removed, cleaned, and dried. The sample prepared on the surface of the sample to be processed 4 using the triboelectric additive manufacturing method and apparatus of this embodiment has a height of 0.2 μm, a width of 30 μm, and a length of 5 mm.

[0080] Example 18:

[0081] Zirconia ceramic balls were used as the printing tip 2, and a silicon wafer as the sample to be processed 4. Ethanol containing 10 g / L copper nanoparticles (approximately 200 nm in diameter) was used as the lubricant 3. Before processing, the surface of the sample to be processed 4 was ground, polished, cleaned, and dried, and then placed at the bottom of the printing tip 2. During the fabrication process, a load of 0.3 N was applied using the loading unit 1, and a reciprocating frequency of 1 Hz and a reciprocating distance of 5 mm were applied using the driving unit 5. 200 μL of lubricant 3 was added dropwise between the printing tip 2 and the sample to be processed 4. The printing time was set to 200 s, the surface temperature of the sample to be processed was 50 °C, and the humidity was 18%. After preparation, the sample was removed, cleaned, and dried. The sample prepared on the surface of the sample to be processed 4 using the triboelectric additive manufacturing method and apparatus of this embodiment has a height of 0.4 μm, a width of 30 μm, and a length of 5 mm.

[0082] Example 19:

[0083] Zirconia ceramic spheres were used as the printing tip 2, and a silicon wafer as the sample to be processed 4. Ethanol containing 10 g / L copper nanoparticles (approximately 200 nm in diameter) was used as the lubricant 3. Before processing, the surface of the sample to be processed 4 was ground, polished, cleaned, and dried, and then placed at the bottom of the printing tip 2. During the fabrication process, a load of 0.3 N was applied using the loading unit 1, and a rotation speed of 5 mm / s and a rotation radius of 2 mm were applied using the driving unit 5. 20 μL of lubricant 3 was added dropwise between the printing tip 2 and the sample to be processed 4, and the entire system was placed under nitrogen flow drying, with a flow rate of 100 mL / min, a time of 20 min, and an ambient humidity of approximately 15%. The printing time was set to 200 s, the temperature to room temperature (approximately 20 °C), and the humidity to 28%. After preparation, the sample was removed, cleaned, and dried. The sample prepared on the surface of the sample to be processed 4 using the triboelectric additive manufacturing method and apparatus of this embodiment has a height of 0.2 μm, a width of 25 μm, and a length of 12.56 mm.

[0084] Example 20:

[0085] Zirconia ceramic spheres were used as the printing tip 2, and a silicon wafer as the sample to be processed 4. Ethanol containing 10 g / L copper nanoparticles (approximately 200 nm in diameter) was used as the lubricant 3. Before processing, the surface of the sample to be processed 4 was ground, polished, cleaned, and dried, and then placed at the bottom of the printing tip 2. During the fabrication process, a load of 0.3 N was applied using the loading unit 1, and a rotational speed of 5 mm / s and a rotational radius of 6 mm were applied using the driving unit 5. 200 μL of lubricant 3 was added dropwise between the printing tip 2 and the sample to be processed 4, and the entire system was placed under nitrogen flow drying, with a flow rate of 200 mL / min and a time of 20 min, while controlling the ambient humidity to approximately 5%. The printing time was set to 300 s, and the temperature to approximately room temperature (20 °C). After preparation, the sample was removed, cleaned, and dried. The sample prepared on the surface of the sample to be processed 4 using the triboelectric additive manufacturing method and apparatus of this embodiment has a height of 0.3 μm, a width of 30 μm, and a length of 37.68 mm.

[0086] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0087] Although embodiments of this application have been shown and described, those skilled in the art will understand that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of this application, the scope of which is defined by the claims and their equivalents.

Claims

1. A method for friction additive manufacturing, characterized in that, include: Frictional contact is created between the printing tip and the sample to be processed, and lubricant is injected. During the process of injecting lubricant into the contact area between the printing tip and the sample to be processed, the concentration of micro- and nano-particles in the lubricant at the contact area is increased by controlling the evaporation of the base liquid in the lubricant.

2. The triboelectric additive manufacturing method according to claim 1, characterized in that, The method for controlling the evaporation of the base fluid in the lubricant is any one or more combinations of controlling the temperature of the sample to be processed, controlling the temperature of the environment in which the sample to be processed is located, and controlling the humidity of the environment in which the sample to be processed is located.

3. The triboelectric additive manufacturing method according to claim 2, characterized in that, The temperature of the sample to be processed and the temperature of the environment in which the sample is located should not be higher than the boiling point or flash point of the base liquid.

4. The triboelectric additive manufacturing method according to claim 2, characterized in that, The humidity of the environment in which the sample to be processed is located is 0% to 90%.

5. A friction additive manufacturing apparatus, characterized in that, include: A loading unit, wherein a printing head is fixedly provided at one end of the loading unit facing the sample to be processed, for applying a load to the sample to be processed through the printing head; A lubricant injection unit is used to inject lubricant into the contact area between the printing tip and the sample to be processed; A driving unit is used to generate relative movement between the printing head and the sample to be processed; and A base fluid evaporation control unit is used to control the evaporation of the base fluid in the lubricating fluid in order to increase the concentration of micro- and nano-particles in the lubricating fluid at the contact area.

6. The triboelectric additive manufacturing apparatus according to claim 5, characterized in that, The driving unit causes the relative motion between the printing head and the sample to be processed to be either relative rotation or relative translation.

7. The triboelectric additive manufacturing apparatus according to claim 5, characterized in that, The base liquid evaporation control unit controls the evaporation of the base liquid by controlling any one or more combinations of the following: controlling the temperature of the sample to be processed, controlling the temperature of the environment in which the sample to be processed is located, and controlling the humidity of the environment in which the sample to be processed is located.

8. The triboelectric additive manufacturing apparatus according to claim 5, characterized in that, The base liquid evaporation control unit includes: A heater or cooler for controlling the temperature of the sample to be processed or the environment in which the sample to be processed is located; and / or A humidity controller or airflow controller is used to control the humidity of the environment in which the sample to be processed is located.

9. The triboelectric additive manufacturing apparatus according to claim 8, characterized in that, The temperature of the sample to be processed and the temperature of the environment in which the sample is located should not be higher than the boiling point or flash point of the base liquid.

10. The triboelectric additive manufacturing apparatus according to claim 8, characterized in that, The humidity of the environment in which the sample to be processed is located is 0% to 90%.

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